JP3172932U - X-ray equipment - Google Patents

Abstract

A CT image (tomographic image) can be easily obtained, an object can be observed in detail in various cross-sections, and fine defects can be reliably detected. Provided is an X-ray imaging apparatus having excellent detection reliability and reliability.
An X-ray shutter mechanism (6) having an X-ray source (5) and an X-ray shutter plate (7) in a housing (2) and disposed opposite to an irradiation port (5b) of the X-ray source, and the X-ray shutter mechanism An X-ray imaging apparatus including an image sensor 19 disposed opposite to the X-ray source with the X-ray shutter plate interposed therebetween, and a subject 30 disposed between the X-ray source and the X-ray shutter mechanism. An object holder 16 that is detachably held is provided.
[Selection] Figure 1

Description

  The present invention relates to an X-ray imaging apparatus for capturing a transmission image of a subject when observing and inspecting the internal structure and internal defects of the subject in a nondestructive inspection or the like.

Conventionally, in a nondestructive inspection, an X-ray fluoroscope has been used as a method for observing the internal structure of a subject and detecting internal defects. By taking a transmission image, for example, an electrical connection failure of a solder portion of various electronic components mounted on a substrate or the like is detected, and the introduction of a defective product is prevented in advance.
Various studies have been made on an X-ray shutter mechanism and an X-ray imaging apparatus used to capture a transmission image using X-rays.
For example, the applicant of the present application (Patent Document 1) includes (a) an X-ray shutter plate having a window part and two X-ray shielding parts arranged on both sides of the window part, ( and b) an X-ray shutter opening / closing portion that is provided continuously with the X-ray shutter plate and opens and closes the irradiation port of the X-ray source by reciprocating the X-ray shutter plate, and closes the irradiation port and the irradiation port. An X-ray imaging apparatus including an X-ray shutter mechanism having the same speed is disclosed.

JP 2007-101259 A

(1) The X-ray imaging apparatus of (Patent Document 1) reciprocates an X-ray shutter plate having a set of one window part and two X-ray shielding parts arranged on both sides of the window part. By doing so, it is possible to easily control the presence / absence of irradiation of X-rays and the irradiation time by opening and closing the irradiation port of the X-ray source, and the movable part is small, lightweight, and has an excellent space-saving X-ray shutter mechanism. Therefore, it is possible to irradiate the subject with a uniform X-ray dose by making the opening speed and the closing speed of the irradiation port equal, so that a high-quality transmission image can be obtained and excellent in reliability. However, with the miniaturization and miniaturization of the subject, there has been a demand for further higher image magnification.
(2) In order to increase the magnification of the X-ray imaging apparatus, it is necessary to reduce the distance between the X-ray source and the subject, but a mechanism for opening and closing the irradiation port of the X-ray source by reciprocating the X-ray shutter plate However, the subject cannot be brought closer to the X-ray source side than the X-ray shutter mechanism, and there is a problem that the magnification is limited due to the restriction of the position of the subject.

  The present invention satisfies the above-mentioned conventional demands, can obtain a high-magnification transmission image, can observe a fine structure such as a small subject in detail, and has high-definition and high-quality images. Excellent in observation reliability and reliability, the device itself can be reduced in size and weight, and it not only excels in space saving and installation flexibility, but also only opens and closes the X-ray shutter plate while irradiating X-rays. By switching on and off of imaging, imaging can be performed in a stable state for a long time, CT images (tomographic images) can be easily obtained, and the subject is detailed in various cross sections. An object of the present invention is to provide an X-ray imaging apparatus that can be observed easily and has excellent observation workability, reliability of defect detection, and reliability capable of reliably detecting fine defects.

An X-ray imaging apparatus according to claim 1 of the present invention includes an X-ray source, an X-ray shutter plate, and an X-ray shutter mechanism disposed opposite to an irradiation port of the X-ray source in a housing. An X-ray imaging apparatus comprising: an image sensor disposed opposite to the X-ray source across the X-ray shutter plate of the X-ray shutter mechanism, wherein the X-ray imaging apparatus includes the X-ray shutter mechanism between the X-ray source and the X-ray shutter mechanism. A configuration is provided that includes a subject holder that is disposed and holds the subject in a detachable manner.
This configuration has the following effects.
(1) By having a subject holder disposed between the X-ray source and the X-ray shutter mechanism in the housing so as to detachably hold the subject, the X-ray source and the subject can be brought close to the limit. Infinite magnification can be obtained, so a high-magnification transmission image can be taken with an image sensor, and the image has high definition and high quality. It is possible to observe in detail and is excellent in reliability and certainty of observation.
(2) Since the subject holder is disposed between the X-ray source in the housing and the X-ray shutter mechanism, the subject can be brought closer to the X-ray source, and the magnification of the transmission image on the image sensor can be increased. Since the distance between the X-ray source and the image sensor can be shortened, the apparatus can be miniaturized, and the space saving and installation flexibility are excellent.
(3) Since an X-ray shutter mechanism is disposed between the subject holder in the housing and the image sensor, X is irradiated from the X-ray source and transmitted through the subject and the subject holder except during imaging. The X-ray shutter plate reliably blocks the rays, and at the time of imaging, the irradiated X-rays can reach the image sensor to obtain a transmission image of the subject, which is excellent in imaging reliability and reliability.
(4) Since the imaging can be switched on and off only by opening and closing the X-ray shutter plate by the X-ray shutter mechanism while irradiating the X-ray from the X-ray source, the imaging is performed stably for a long time. It is excellent in the efficiency of shooting work, the stability of shooting conditions, and the uniformity of image quality.
(5) Since the imaging can be continuously performed in a short time by switching on / off of the imaging only by opening / closing the X-ray shutter plate, one subject is observed in detail from tomographic photographs of various cross sections. It is possible to detect fine defects and the like, and it is excellent in observation workability, reliability of defect detection, and reliability.
(6) By having an object holder that detachably holds the object, the desired object can be reliably held at a predetermined position and imaging can be performed under certain conditions, and the imaging conditions are stable. Excellent data reproducibility and reliability.

Here, as a material of the housing, any material that can shield X-rays such as tungsten and lead may be used.
As the X-ray source, one having an X-ray tube that can radiate X-rays radially from a point source in a wide range is suitably used. In particular, by using a microfocused nanofocus X-ray tube, analysis with high magnification and high resolution can be performed, and defect detection accuracy can be improved.
The X-ray shutter mechanism selectively shields X-rays emitted from an X-ray source by an X-ray shutter plate, and X-ray shutters are formed on an X-ray shutter material formed of an X-ray shielding material such as tungsten or lead. It is preferable to provide a passage hole and open and close the passage hole with an X-ray shutter plate which is also made of an X-ray shielding material. Specifically, a device that opens and closes the passage hole by sliding (reciprocating) or rotating the X-ray shutter plate by the opening / closing drive unit is preferably used. In particular, when the X-ray shutter plate is reciprocated, a window portion is provided at the center in the longitudinal direction of the long X-ray shutter plate, and both sides in the longitudinal direction of the X-ray shutter plate are used as X-ray shielding portions. Thus, when the passage hole of the shutter holding portion and the window portion of the X-ray shutter plate overlap, the image sensor is irradiated with X-rays, and when the passage hole of the shutter holding portion overlaps the X-ray shielding portion of the X-ray shutter plate, X Since the line can be shielded, one shooting can be performed one way and two shootings can be performed in a reciprocating manner, there is no waste in operation, and a plurality of shootings can be performed in a short time, which is excellent in practicality.

Further, the movement of the opening / closing drive unit itself of the X-ray shutter mechanism may be any movement. For example, in order to directly drive the X-ray shutter plate linearly, one end of the X-ray shutter plate is connected to the tip of a retractable opening / closing drive unit such as a piston cylinder, and the opening / closing drive unit is linearly expanded and contracted. To reciprocate the X-ray shutter plate, or to connect one end of the X-ray shutter plate to a reciprocating open / close drive unit such as a linear motor or solenoid, and to reciprocate the X-ray shutter plate together with the open / close drive unit Etc. are preferably used. In order to reciprocate the X-ray shutter plate by converting the rotational motion of the opening / closing drive unit into linear motion, the crank portion such as a crank shaft or a disc crank is linked to one end portion of the X-ray shutter plate. Slider crank mechanism for reciprocating the X-ray shutter plate by rotating the part, forming a rack on one end side of the X-ray shutter plate, and reciprocating the X-ray shutter plate by rotating the pinion meshed with the rack in the forward and reverse directions One that moves, a cam such as an involute cam or a heart cam that is shifted in phase at both ends of the X-ray shutter plate, and that reciprocates the X-ray shutter plate by rotating each cam, X-ray shutter plate An X-ray shutter plate in the axial direction of the cylindrical cam is guided by a single groove formed on the outer periphery of the cylindrical cam, and the cylindrical cam is rotated. Those reciprocate the like can be used.
Note that a stepping motor (pulse motor), an AC motor, a DC motor, various servo motors, and the like are preferably used as a driving source for the rotational motion. When a stepping motor is used, the rotation angle and rotation speed change in proportion to the number and frequency of input pulses, so that the movement amount and movement speed of the X-ray shutter plate can be easily controlled. For a stepping motor or the like that can freely control the rotation direction, the same function can be realized even if the rotation direction is reversed in the forward and reverse directions. In particular, the stepping motor is preferably used in combination with a rack and pinion mechanism or the like.

As the image sensor, a CCD type or CMOS type is preferably used. In particular, an image sensor formed in a planar shape is less likely to be distorted in a captured image, can be easily miniaturized, and can be suitably used for observation of a minute object. By combining with an X-ray shutter mechanism, uniform X-ray irradiation can be performed with high accuracy, high-accuracy image analysis is possible, and excellent reliability is achieved.
Any object holder may be used as long as it can removably hold the object. As a method for fixing the subject in the subject holder, a method of sticking to the fixed surface of the table with a double-sided tape or the like, a method of sucking and adsorbing with air, and the like can be used. Moreover, you may use what clamps a subject directly.

The object holder preferably includes at least one of a position adjustment mechanism that adjusts the position of the X-ray source and the object and an angle adjustment mechanism that adjusts the angle between the object and the image sensor. . The object holder is equipped with a position adjustment mechanism that adjusts the position of the X-ray source and the object, so that the observation position and observation depth of the object can be easily adjusted after fixing the object to the object holder This eliminates the need for fine positioning when the subject is fixed, and is excellent in observation workability and flexibility. In addition, since the object holder includes an angle adjustment mechanism that adjusts the angle between the object and the image sensor, the direction (angle) of the object can be easily adjusted, and it is difficult to observe in a horizontal state. It is possible to change the angle at the place and observe it reliably, and it is excellent in observation workability and versatility.
As the position adjustment mechanism, a mechanism having a table movable in the X, Y, and Z directions is preferable. This is because the observation position and observation depth of the subject can be set arbitrarily. The position adjusting mechanism does not necessarily need to be movable in the three directions of X, Y, and Z, and may be movable in any one direction or two directions. As the angle adjustment mechanism, a mechanism that can rotate around each axis in the X, Y, and Z directions of a subject holder (such as a table that holds the subject) is preferable. This is because the direction of the subject and the observation angle can be arbitrarily set.

In addition, the X-ray imaging device is equipped with a display for displaying the captured transmission image, so that the captured image can be confirmed immediately, and the imaging position and orientation can be changed efficiently. It can be performed. In addition, by providing a control unit such as a personal computer, the operations of the subject holder and the X-ray shutter mechanism can be controlled in synchronization, and imaging under various conditions can be performed in a short time. Excellent observation work efficiency and practicality. In addition, a tomographic photograph (CT image) of a desired cross section can be obtained by performing image processing in the control unit based on a large amount of image information obtained in this way.
Also, the captured image data can be stored in various storage media such as a hard disk, MO, CD, and DVD provided in the control unit. As a result, the stored data can be easily managed, and the data can be taken out and displayed on a display as appropriate, or the image can be processed by image processing software or the like. When the display has a stereo display function, two types of transmission images with different angles can be selected from the captured transmission images and displayed in stereo on the display, and the interior of the subject can be accurately and quickly displayed. The state and position of structures and internal defects can be observed three-dimensionally. As a display having a stereo display function, an anaglyph stereoscopic display using red and blue glasses, a cross-stereoscopic display or a parallel stereoscopic display by autostereoscopic viewing, a liquid crystal display or a stereoscopic display capable of independent stereoscopic display. Visual glasses or a combination of a display capable of switching screens and liquid crystal shutter glasses is preferably used. Further, by installing software for analyzing the state of the inside of the subject, the state of defects, etc. based on these data, and determining quality, etc., it can be suitably used as an inspection apparatus or the like.

The invention described in claim 2 is the X-ray imaging apparatus according to claim 1, wherein the subject holder, the X-ray shutter mechanism, and the image sensor are set as one set with respect to one X-ray source. The plurality of sets of photographing units are arranged.
With this configuration, in addition to the operation of the first aspect, the following operation is provided.
(1) A plurality of imaging units including a subject holder, an X-ray shutter mechanism, and an image sensor are provided for one X-ray source, so that a plurality of imaging units can be provided with only one X-ray source. The subject can be observed (photographed), and is excellent in energy saving and resource saving.
Here, the imaging units can be arranged radially in the X-ray irradiation range from the X-ray source, and the number thereof can be selected as appropriate.

The invention described in claim 3 is the X-ray imaging apparatus according to claim 2, wherein each of the imaging units emits X-rays emitted from the X-ray source from the subject holder. It has the structure provided with the division | segmentation shielding part guided toward a shutter mechanism.
With this configuration, in addition to the operation of the second aspect, the following operation is provided.
(1) Since each imaging unit includes a divided shielding unit that guides X-rays emitted from the X-ray source from the subject holder toward the X-ray shutter mechanism, X-rays are emitted between the imaging units. Since there is no interference and accurate imaging can be performed with each imaging unit, a plurality of subjects can be imaged simultaneously, and the efficiency of observation work is excellent.
(2) Since the division shielding unit can prevent X-ray interference between the imaging units, imaging conditions such as the X-ray irradiation time can be arbitrarily set in each imaging unit, and a large amount can be obtained in a short time. Imaging can be performed, CT images can be easily obtained, and observation workability is excellent.

  Here, the same material as that of the housing and the X-ray shutter plate is used as the material of the divided shielding portion. The division shielding unit is arranged so that the X-rays that have passed through the X-ray shutter mechanism of a certain imaging unit are not irradiated to the image sensor of another imaging unit (so as to partition between the imaging unit and the imaging unit).

The invention described in claim 4 is the X-ray imaging apparatus according to claim 2 or 3, wherein the subject holder, the X-ray shutter mechanism, and the image sensor of each of the imaging units are a base portion. It has the structure connected and accommodated in the said housing | casing so that attachment or detachment is possible.
With this configuration, in addition to the operation of the second or third aspect, the following operation is provided.
(1) The object holder, the X-ray shutter mechanism, and the image sensor of each imaging unit are connected by the base unit, so that the imaging unit can be integrated and can be easily handled in units of imaging units. Therefore, it is excellent in workability and mass production of assembly and disassembly.
(2) Since each photographing unit is detachably housed in the housing, the number of photographing units in the housing can be selected as necessary, and parts can be replaced, cleaned, repaired, etc. in the photographing unit. It has excellent versatility, handleability and maintainability.

Here, the base portion holds the subject holder and the X-ray shutter mechanism, and avoids these movable portions so as not to interfere with the operation of the subject holder and the X-ray shutter mechanism. It can be connected with other frame materials.
Note that, if necessary, the support and frame material for fixing the object holder and the X-ray shutter mechanism may be formed of an X-ray shielding material such as tungsten or lead. Moreover, the above-mentioned division | segmentation shielding part may be directly attached to a base part, and may be attached to a support | pillar or a frame material.
The photographing unit is preferably mounted in the housing, but by providing a protrusion or groove-shaped guide on the inner wall of the housing, the photographing unit can be guided, the photographing unit can be easily positioned, and photographing is performed. Excellent unit detachability.

According to the X-ray imaging apparatus of the present invention, the following effects can be obtained.
The device according to claim 1 has the following effects.
(1) A high-magnification transmission image can be taken by reducing the distance between the X-ray source and the subject, and the image has excellent high definition and high quality, and a fine structure such as a small subject is detailed. It is possible to provide an X-ray imaging apparatus that can be observed and has excellent observation reliability and certainty.

According to the invention described in claim 2, in addition to the effect of claim 1, the following effect is obtained.
(1) To provide an X-ray imaging apparatus that is capable of observing (imaging) a plurality of subjects reliably and accurately with only one X-ray source and is excellent in energy saving, resource saving, and efficiency of observation work. Can do.

According to the invention described in claim 3, in addition to the effect of claim 2, the following effect is obtained.
(1) The efficiency of observation work in which X-rays do not interfere between imaging units, each imaging unit can reliably perform imaging with high accuracy, and a plurality of subjects can be imaged simultaneously. It is possible to provide an X-ray imaging apparatus excellent in the above.

According to the invention described in claim 4, in addition to the effects of claim 2 or 3, the following effects are obtained.
(1) It is possible to provide an X-ray imaging apparatus that can be easily carried and attached / detached in units of imaging units, is easy to handle, and is excellent in assembling and disassembling workability and mass productivity.

Partial sectional schematic front view showing the configuration of the X-ray imaging apparatus of the first embodiment Schematic plan view of relevant parts showing an X-ray shutter mechanism in the X-ray imaging apparatus of the first embodiment. (A) Partial sectional schematic plan view showing an imaging unit in the X-ray imaging apparatus of Embodiment 2 (b) Partial sectional schematic side view showing an imaging unit in the X-ray imaging apparatus of Embodiment 2 (A) Main part enlarged schematic plan view of FIG. 3 (a) (b) Main part enlarged schematic side view of FIG. 3 (b) Main part schematic plan view showing the configuration of the X-ray imaging apparatus of the second embodiment

(Embodiment 1)
Hereinafter, an X-ray imaging apparatus according to Embodiment 1 of the present invention will be described with reference to the drawings.
FIG. 1 is a partial cross-sectional schematic front view showing the configuration of the X-ray imaging apparatus of the first embodiment, and FIG. 2 is a schematic plan view of the main part showing the X-ray shutter mechanism in the configuration of the X-ray imaging apparatus of the first embodiment. It is.
In FIG. 1, 1 is an X-ray imaging apparatus according to the first embodiment, 2 is a casing formed of tungsten, lead, or the like and covers the apparatus body of the X-ray imaging apparatus 1, and 3 is a personal computer that controls the X-ray imaging apparatus 1. A control unit 4 such as a computer is connected to the control unit 3 and is a display of the X-ray imaging apparatus 1 that displays a transmission image of the subject 30. A nanofocus X-ray tube 5a that irradiates the subject 30 with X-rays. The X-ray source of the X-ray imaging apparatus 1 in which the X-ray is accommodated, 5b is an irradiation port formed at the bottom of the X-ray source 5, and 6 is the X-ray imaging apparatus 1 arranged opposite to the irradiation port 5b of the X-ray source 5. X-ray shutter mechanism, 7 is an X-ray shutter plate of the X-ray shutter mechanism 6 formed in a flat plate shape with tungsten, lead or the like, 8 is a window portion formed in the approximate center of the X-ray shutter plate 7 in the longitudinal direction, 10 is formed of tungsten, lead, or the like, and holds the X-ray shutter plate 7 slidably. The shutter holding part 10a of the shutter mechanism 6 is an X-ray passage hole formed in the shutter holding part 10 corresponding to the position of the X-ray tube 5a of the X-ray source 5, and 11 is connected to the X-ray shutter plate 7. The open / close drive unit of the X-ray shutter mechanism 6 that reciprocates the X-ray shutter plate 7, 12 is a drive motor as a drive source of the open / close drive unit 11 using a stepping motor or the like, and 16 is the X-ray source 5 and the X-ray shutter. An object holder 17 of the X-ray imaging apparatus 1 that is disposed between the mechanisms 6 and detachably holds the object 30, and 17 is an object holder 16 on which the object 30 is detachably fixed by a double-sided tape or the like. Table, 17a is a rotation axis of the table 17, 18 is an angle adjustment mechanism of the object holder 16 for adjusting an angle formed between an object 30 fixed to the table 17 and an image sensor 19 described later, 18a is a stepping motor, etc. The angle adjusting motor 18 of the angle adjusting mechanism 18 is used, 18b is a rotating shaft of the angle adjusting motor 18, 18c is stretched between the rotating shaft 17a of the table 17 and the rotating shaft 18b of the angle adjusting motor 18, and the angle is adjusted. A power transmission member 19 such as an endless belt for transmitting the rotation of the motor 18 to the rotating shaft 17a of the table 17 is disposed so as to face the X-ray source 5 with the X-ray shutter plate 7 of the X-ray shutter mechanism 6 interposed therebetween. It is an image sensor such as a CCD type or a CMOS type of the X-ray imaging apparatus 1 that detects a transmission image of the irradiated subject 30.

Covering parts other than the control unit 3 and the display 4 with the housing 2 prevented leakage of X-rays to the outside.
Since the control unit 3 can control the operations of the X-ray shutter mechanism 6, the subject holder 16, the image sensor 19 and the like in synchronization with each other, imaging can be performed under various conditions in a short time, and observation can be performed. Excellent work efficiency and practicality. In addition, by performing image processing in the control unit 3 based on a large amount of image information taken from various angles, a tomographic photograph (CT image) of a desired cross section can be obtained, and fine defects and the like are reliably detected. can do.
In addition, data such as transmission images and observation conditions can be stored in various storage media such as a hard disk, MO, CD, and DVD disposed in the control unit 3. As a result, the stored data can be easily managed, and the data can be taken out and displayed on the display 4 as appropriate, or the image can be processed by image processing software or the like. In particular, when the display device 4 has a stereo display function, two types of transmission images having different shooting angles can be selected from the captured transmission images and displayed on the display device 4 in a stereo manner. The internal structure of the specimen 30 and the state and position of internal defects can be observed three-dimensionally.
By using the nanofocus X-ray tube 5a having a micro focus, analysis with high magnification and high resolution can be performed, and defect detection accuracy can be improved.
As the image sensor 19, an arbitrary one can be used. In particular, when an image sensor formed in a planar shape is used, distortion is hardly generated in the image, which is suitable for observation of a minute object. The entire X-ray imaging apparatus 1 can be reduced in size and is excellent in space saving.

Next, the configuration of the X-ray shutter mechanism in the X-ray imaging apparatus according to Embodiment 1 of the present invention will be described in detail with reference to FIG.
In FIG. 2, 9a and 9b are two X-ray shielding portions of the X-ray shutter plate 7 formed on both sides of the substantially rectangular window portion 8, and 10b is a reciprocating direction of the X-ray shutter plate 7. Two guide portions of the X-ray shutter mechanism 6 that are formed in concave portions having a substantially U-shaped cross section on both sides of the shutter holding portion 10 in parallel with the (longitudinal direction) and guide and fit the X-ray shutter plate 7 loosely, 12a Is a drive shaft of the drive motor 12, 13 is a disc crank of the open / close drive unit 11 disposed on the drive motor 12 via the drive shaft 12a, and 14 is one end of the X-ray shutter plate 7 by one end of the swing fixing portion 14a. The other end is a link shaft of the opening / closing drive unit 11 rotatably disposed on the disc crank 13 by the rotation fixing unit 14b.
The drive motor 12 was fixed to the shutter holding unit 10.

Since the X-ray shutter mechanism 6 has the guide portion 10b that holds the X-ray shutter plate 7 in parallel with the reciprocating direction of the X-ray shutter plate 7, the X-ray shutter plate 7 can be reciprocated reliably and smoothly. . Note that by providing bearings or the like on both sides of the X-ray shutter plate 7, the resistance between the X-ray shutter plate 7 and the guide portion 10b can be reduced, and the stability of the reciprocating operation is excellent.
In the present embodiment, the combination of the disc crank 13 and the link shaft 14 is used as the opening / closing drive unit 11. However, the present invention is not limited to this, and the X-ray shutter plate 7 includes two X-ray shielding units 9 a, Any device that can linearly reciprocate between 9b may be used. For example, a drive unit such as a piston cylinder linearly expands and contracts to reciprocate the X-ray shutter plate 7, a slider crank mechanism other than the combination of the disc crank 13 and the link shaft 14, a combination of a rack and a pinion, an X-ray A cam such as an involute cam or a heart cam is disposed on one end side of the shutter plate 7 in the longitudinal direction, and a similar cam is disposed on the other end side with a phase shifted by 90 degrees, or an elastic member such as a coil spring is disposed. It is possible to use a device that converts a rotational motion into a linear motion using a device, a device that linearly drives the X-ray shutter plate 7 by a linear motor, a solenoid, or the like.

By using a stepping motor as the drive motor 12, the rotation angle and rotation speed of the disc crank 13 change in proportion to the number and frequency of input pulses, so the movement amount and movement speed of the X-ray shutter plate 7 can be easily achieved. Can be controlled.
By forming the rotation radius of the disc crank 13 and the distance from the center of the window portion 8 of the X-ray shutter plate 7 to the center of each X-ray shielding portion 9a, 9b, the disc crank 13 is substantially the same. Every time it rotates by 90 degrees, the X-ray shutter plate 7 can switch the opening and closing of the passage hole 10a formed in the shutter holding part 10. When the disk crank 13 is continuously rotated, the X-ray shutter plate 7 can be continuously reciprocated to perform imaging. If the rotation of the disc crank 13 is stopped for a certain period of time in a state where the window portion 8 of the X-ray shutter plate 7 and the passage hole 10 of the shutter holding portion 10 overlap (the passage hole 10 is opened), X-rays can be irradiated only, and the X-ray irradiation time can be arbitrarily set.
Since the amount of movement of the X-ray shutter plate 7 is determined by the rotation angle of the disc crank 13, if a notch is formed in the disc crank 13 and detected by an optical sensor or the like, the passage hole 10a is completely opened. The state and the completely closed state can be reliably detected.

The operation of the X-ray imaging apparatus according to Embodiment 1 of the present invention configured as described above will be described.
First, in the initial state (non-imaging, shielded state), the passage hole 10a and the X-ray shielding part 9a (or 9b) of the X-ray shutter plate 7 are overlapped, and the passage hole 10a is closed. As a result, the X-rays irradiated from the X-ray source 5 and transmitted through the subject 30 are shielded by the X-ray shutter plate 7 and the shutter holding unit 10 and are not imaged.
When the disk crank 13 is rotated 90 degrees by the drive motor 12 from the shielded state at the time of photographing, the X-ray shutter plate 7 slides and the window 8 and the passage hole 10a overlap as shown in FIG. It becomes. As a result, the X-ray transmitted through the subject 30 passes through the window portion 8 and the passage hole 10a and reaches the image sensor 19, and a transmission image is captured. Further, when the disk crank 13 is rotated 90 degrees clockwise by the drive motor 12 from the state shown in FIG. 2, the X-ray shutter plate 7 is moved to the left, and the X-ray shielding portion 9b and the passage hole 10a overlap to be closed. Thus, one shooting is finished.
As described above, every time the disc crank 13 rotates 180 degrees, the X-ray shutter plate 7 moves from the right end to the left end or from the left end to the right end to open and close the passage hole 10a, and at the intermediate point, the transmission image Since imaging can be performed, the operation of the X-ray shutter plate 7 is not wasted and continuous imaging can be easily performed.

The X-ray imaging apparatus according to Embodiment 1 of the present invention has the following operations.
(1) By having a subject holder disposed between the X-ray source and the X-ray shutter mechanism in the housing so as to detachably hold the subject, the X-ray source and the subject can be brought close to the limit. Infinite magnification can be obtained, so a high-magnification transmission image can be taken with an image sensor, and the image has high definition and high quality. It is possible to observe in detail and is excellent in reliability and certainty of observation.
(2) Since the subject holder is disposed between the X-ray source in the housing and the X-ray shutter mechanism, the subject can be brought closer to the X-ray source, and the magnification of the transmission image on the image sensor can be increased. Since the distance between the X-ray source and the image sensor can be shortened, the apparatus can be miniaturized, and the space saving and installation flexibility are excellent.
(3) Since an X-ray shutter mechanism is disposed between the subject holder in the housing and the image sensor, X is irradiated from the X-ray source and transmitted through the subject and the subject holder except during imaging. The X-ray shutter plate reliably blocks the rays, and at the time of imaging, the irradiated X-rays can reach the image sensor to obtain a transmission image of the subject, which is excellent in imaging reliability and reliability.
(4) Since the imaging can be switched on and off only by opening and closing the X-ray shutter plate by the X-ray shutter mechanism while irradiating the X-ray from the X-ray source, the imaging is performed stably for a long time. It is excellent in the efficiency of shooting work, the stability of shooting conditions, and the uniformity of image quality.
(5) Since the imaging can be continuously performed in a short time by switching on / off of the imaging only by opening / closing the X-ray shutter plate, one subject is observed in detail from tomographic photographs of various cross sections. It is possible to detect fine defects and the like, and it is excellent in observation workability, reliability of defect detection, and reliability.
(6) By having an object holder that detachably holds the object, the desired object can be reliably held at a predetermined position and imaging can be performed under certain conditions, and the imaging conditions are stable. Excellent data reproducibility and reliability.

(Embodiment 2)
An X-ray imaging apparatus according to Embodiment 2 will be described below with reference to the drawings. In addition, the same code | symbol is attached | subjected to the thing similar to Embodiment 1, and description is abbreviate | omitted.
3A is a partial cross-sectional schematic plan view showing an imaging unit in the X-ray imaging apparatus of the second embodiment, and FIG. 3B is a partial cross-section showing the imaging unit in the X-ray imaging apparatus of the second embodiment. 4 (a) is an enlarged schematic plan view of an essential part of FIG. 3 (a), FIG. 4 (b) is an enlarged schematic side view of an essential part of FIG. 3 (b), and FIG. These are the principal part schematic plan views which show the structure of the X-ray imaging apparatus of Embodiment 2. FIG.
In FIG. 3, reference numeral 20 denotes a subject holder 16, an imaging unit including the X-ray shutter mechanism 6 and the image sensor 19, and reference numeral 21 denotes a subject holder 16 whose tip end side is tapered toward the X-ray source 5. Reference numeral 25 denotes a base portion of the photographing unit 20 that connects the X-ray shutter mechanism 6 and the image sensor 19, and an image sensor fixing portion that stands on the base portion 21 and fixes the image sensor 19.

In FIG. 4, reference numeral 22 denotes a column of the subject holder 16 erected on the tip (X-ray source 5) side of the base portion 21, 23 is supported by the column 22, and the angle adjustment motor 18 a is fixed and the subject is fixed. An object holder support frame 24 in which the rotating shaft 17a of the table 17 of the holder 16 is rotatably supported, and 24 is formed in a flat plate shape of tungsten, lead or the like, and extends along both sides of the tapered tip portion of the base portion 21. As described above, the divided shielding unit 24a is disposed on both sides of the subject holder 16 and guides X-rays irradiated from the X-ray source 5 radially from the subject holder 16 toward the X-ray shutter mechanism 6. This is a leg portion of the divided shielding portion 24 erected on the specimen holder support frame 23.
The X-ray shutter mechanism 6 is erected directly on the base portion 21 using the shutter holding portion 10.

In FIG. 5, reference numeral 1 a denotes an X-ray imaging apparatus according to Embodiment 2 in which a plurality of imaging units 20 are arranged radially around the X-ray tube 5 a of the X-ray source 5.
The X-rays radiated from the X-ray tube 5 a of the X-ray source 5 are partitioned (divided) by the divided shielding portions 24 of the respective imaging units 20 from the subject holder 6 toward the X-ray shutter mechanism 11. Therefore, X-rays do not interfere between the imaging units 20, and each subject 30 can be imaged simultaneously by the plurality of imaging units 20.
Note that the number and arrangement of the imaging units 20 can be appropriately selected depending on the X-ray irradiation range.

The X-ray imaging apparatus according to Embodiment 2 of the present invention has the following actions in addition to the actions similar to those of Embodiment 1.
(1) A plurality of imaging units including a subject holder, an X-ray shutter mechanism, and an image sensor are provided for one X-ray source, so that a plurality of imaging units can be provided with only one X-ray source. The subject can be observed (photographed), and is excellent in energy saving and resource saving.
(2) Since each imaging unit includes a divided shielding unit that guides X-rays emitted from the X-ray source from the subject holder toward the X-ray shutter mechanism, X-rays are emitted between the imaging units. Since there is no interference and accurate imaging can be performed with each imaging unit, a plurality of subjects can be imaged simultaneously, and the efficiency of observation work is excellent.
(3) Since the division shielding unit can prevent X-ray interference between the imaging units, imaging conditions such as the X-ray irradiation time can be arbitrarily set in each imaging unit, and a large amount can be obtained in a short time. Imaging can be performed, CT images can be easily obtained, and observation workability is excellent.
(4) The object holder, the X-ray shutter mechanism, and the image sensor of each imaging unit are connected at the base, so that the imaging unit can be integrated and can be easily handled in units of imaging units. Therefore, it is excellent in workability and mass production of assembly and disassembly.
(5) Since each photographing unit is detachably housed in the housing, the number of photographing units in the housing can be selected as necessary, and parts can be replaced, cleaned, repaired, etc. for each photographing unit. It has excellent versatility, handleability and maintainability.

  The present invention can obtain a high-magnification transmission image, can observe fine structures such as small objects in detail, and has high-definition, high-quality, reliability of observation, and certainty. In addition to being able to reduce the size and weight of the device itself, it is not only excellent in space saving and installation flexibility, but also can be turned on and off by simply opening and closing the X-ray shutter plate while irradiating X-rays. By switching, imaging can be performed in a stable state for a long time, so that a CT image (tomographic image) can be easily obtained, and the subject can be observed in detail in various cross sections. In addition, it is possible to provide an X-ray imaging apparatus that can reliably detect fine defects and the like, and has excellent reliability in detecting defects and reliability, and is particularly suitable for industrial applications where the observation target is minute. Can be used in a short time It is possible to realize a good inspection.

DESCRIPTION OF SYMBOLS 1,1A X-ray imaging apparatus 2 Case 3 Control part 4 Indicator 5 X-ray source 5a X-ray tube 5b Irradiation port 6 X-ray shutter mechanism 7 X-ray shutter board 8 Window part 9a, 9b X-ray shielding part 10 Shutter Holding portion 10a Passing hole 10b Guide portion 11 Opening / closing drive portion 12 Drive motor 12a Drive shaft 13 Disc crank 14 Link shaft 14a Oscillating fixing portion 14b Rotating fixing portion 16 Subject holding tool 17 Table 17a Rotating shaft 18 Angle adjusting mechanism 18a Angle adjusting motor 18b Rotating shaft 18c Power transmission member 19 Image sensor 20 Imaging unit 21 Base portion 22 Support column 23 Object holder support frame 24 Split shield portion 24a Leg portion 25 Image sensor fixing portion 30 Subject

Claims (4)

An X-ray source, an X-ray shutter plate having an X-ray shutter plate disposed in a housing and disposed opposite to the irradiation port of the X-ray source, and the X-ray shutter plate of the X-ray shutter mechanism are sandwiched between the X-ray shutter plate and the X-ray shutter plate. An X-ray imaging apparatus comprising an image sensor disposed opposite to a radiation source,
An X-ray imaging apparatus comprising: an object holder that is disposed between the X-ray source and the X-ray shutter mechanism and detachably holds the object. The plurality of sets of imaging units including the subject holder, the X-ray shutter mechanism, and the image sensor as one set are arranged for one X-ray source. X-ray imaging equipment. 3. Each of the imaging units includes a division shielding unit that guides X-rays emitted from the X-ray source from the subject holder toward the X-ray shutter mechanism. X-ray imaging equipment. The object holding tool, the X-ray shutter mechanism, and the image sensor of each of the imaging units are connected by a base portion and are detachably accommodated in the housing. X-ray imaging equipment.

Images