JP3168748B2 - Field emission type electron source - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a field emission type electron source provided with a control electrode for suppressing divergence of an electron beam emitted from an electron emission element, and relates to a color television receiver and a terminal display of a computer. Also, it is used for measuring instruments using fine electrons.

[0002]

2. Description of the Related Art A field emission type electronic device is, for example, an IEEE device by CAS Spindt (CASpindt).
Electron Device No. 1, Vol. 36, 225-228
Pages, including the literature published in 1989, and published in various magazines.

FIG. 6 is a sectional view showing the structure of a conventional field emission type electron source disclosed in Japanese Patent Application Laid-Open No. 2-226635. In the figure, reference numeral 1 denotes an electron emission element having a sharp tip, For example, it is made of a silicon material.
Reference numeral 2 denotes an insulating layer for insulating a voltage applied to the electron-emitting device 1, and 3 denotes an electron extraction electrode for extracting electrons from the electron-emitting device 1.
Positive with respect to potential. 4 is an insulating layer. Reference numeral 5 denotes a control electrode, and the control electrode 5
The divergence of the electron beam is suppressed by an electron lens generated between the control electrode 5 and the electron extraction electrode 3 with a negative control potential with respect to the potential . Reference numeral 7 denotes an auxiliary electrode formed via the insulating layer 6, which re-accelerates electrons passing through the control electrode 5.

A conventional cathode ray tube is constructed as described above,
From the time when the electrons reach the position of the electron extraction electrode 3, the potential of the control electrode 5 influences and forms a virtual cathode that allows only electrons having sufficient vertical energy to pass, and the auxiliary electrode 7 accelerates the electrons again. It is to let.

[0005]

In the conventional field emission type electron source as described above, the control electrode 5 and the auxiliary electrode 7 are provided for the electron emission element 1 and the extraction electrode 3, respectively. It is difficult to align the center of the hole with the center of the hole of the extraction electrode 3 and the apex of the electron-emitting device 1 on one axis, making it impossible to manufacture the device according to the theoretical design. There was a problem that it was not possible.

SUMMARY OF THE INVENTION The present invention has been made to solve such a problem, and it is easy to manufacture a hole for a control electrode or an auxiliary electrode. It is an object of the present invention to produce an averaged and stable electron beam by the control electrode even if the emission current from the laser beam fluctuates, and to obtain an efficient electron source.

[0007]

In a field emission type electron source according to the present invention, a group of a plurality of electron emission elements and a group of a plurality of electron extraction electrodes correspond to one control electrode. And corresponding to the hole diameter of the control electrode.
It is formed wider than the diameter of the electron-emitting device group .

Also, a plurality of electrons are applied to one control electrode.
A group of emission elements and a group of multiple electron extraction electrodes correspond
And the cross-sectional shape of the hole of the control electrode is
It has a taper that becomes smaller on the electron-emitting device side .

Further, the electrons passing through the control electrode are re-accelerated.
One having the auxiliary electrode
Groups and multiple electron-emitting devices for the poles and auxiliary electrodes
The number of electron extraction electrode groups is configured to correspond,
One is the pore size of the control electrode or the auxiliary electrode that is wider than the diameter of said corresponding conductive <br/> element emitting element group.

Further, the electrons passing through the control electrode are re-accelerated.
One having the above-mentioned control,
A plurality of electron-emitting devices for the electrodes and the auxiliary electrodes;
A plurality of electron extraction electrode groups are configured to correspond,
In addition, the control electrode has a taper in which the cross-sectional shape of the hole becomes smaller toward the electron-emitting device.

[0011]

The field emission type electron source configured as described above has the following features.
Since a plurality of electron-emitting devices and a lead electrode are commonly configured for one control electrode, manufacturing of the control electrode becomes easy, and non-uniformity of emission current due to variations among field-emission electronic devices is also a problem. Not.

Also, in a device having an auxiliary electrode for re-accelerating electrons passing through the control electrode, a group of a plurality of electron-emitting devices and a group of a plurality of electron extraction electrodes correspond to one control electrode and the auxiliary electrode. With such a configuration, it is easy to manufacture the control electrode and the auxiliary electrode, and the non-uniformity of the emission current due to the variation between the field emission type electronic elements does not matter.

Further, when the hole diameter of the control electrode or the auxiliary electrode is made larger than the diameter of the corresponding electron-emitting device group, there is an advantage that the emittance of electrons emitted from the field emission type electronic device can be reduced.

Furthermore, if the cross-sectional shape of the hole of the control electrode is configured to have a taper that becomes smaller on the electron-emitting device side, it is possible to easily restrict the divergence of the emitted electrons.

[0015]

【Example】

Embodiment 1 FIG. FIG. 1 is a cross-sectional view showing a configuration of a field emission type electron source according to one embodiment of the present invention. In this example, a control electrode 5 is provided for a plurality of electron emission elements 1 and extraction electrodes 3, Auxiliary electrodes 7 formed via the insulating layer 6 are also formed for the plurality of electron-emitting devices 1 and the extraction electrodes 3 to re-accelerate the electrons passing through the control electrodes 5. In such a configuration, it is easy to manufacture the holes of the control electrode 5 and the auxiliary electrode 7, and there is a variation between each electron-emitting device 1 and the extraction electrode 3.
Even if the emission current from the electron-emitting device 1 fluctuates,
An averaged and stable electron beam is produced by the control electrode 5, and an efficient electron source can be obtained.

Further, regarding the diameters of the holes of the control electrode 5 and the auxiliary electrode 7, when the diameter L1 is designed to be larger than the diameter L2 of the corresponding group of electron-emitting devices 1 as shown in FIG. There is an advantage that the emittance of emitted electrons can be reduced.

Embodiment 2 FIG. FIG. 3 shows an example in which the use efficiency of electrons is increased by changing the shape of the control electrode 5. The control electrode 5 has a tapered shape such that the cross-sectional shape of the hole becomes narrower toward the electron-emitting device 1. . With this taper, the electron lens effect generated between the control electrode 5 and the electron extraction electrode 3 can be strengthened, and the divergence trajectory of the electrons can be easily corrected.

Embodiment 3 FIG. Note that, as shown in FIG. 4, even when the height d of the electron-emitting device 1 is smaller than the height h of the electron extraction electrode 3, the same effect as the above-described taper is produced.

Embodiment 4 FIG. Further, as shown in FIG. 5, the electron-emitting device 1 can be used as an electron source similar to the above-mentioned field emission electron source even if it has a structure in which a cone-shaped element is formed on a plane.

In each of the above-described embodiments, a case where two electron-emitting devices 1 and two electron extraction electrodes 3 correspond to one control electrode 5 and one auxiliary electrode 7 in cross-sectional display, respectively. It is clear that the number of the corresponding electron-emitting devices 1 and electron extraction electrodes 3 is not limited to this.

In each of the above embodiments, the case where the auxiliary electrode 7 for accelerating the electrons passing through the control electrode 5 is described has been described. However, the present invention can be applied even when the auxiliary electrode 7 is not provided. What is necessary is just to configure so that a group of a plurality of electron-emitting devices and a group of a plurality of electron extraction electrodes correspond to one control electrode, and the same effects as in the above embodiments can be obtained.

[0022]

As is evident from the foregoing description, according to the present invention, configured as a group of one group and a plurality of electron extraction electrode of the plurality of electron-emitting devices to the control electrode corresponds, and the control
The hole diameter of the electrode is wider than the diameter of the corresponding electron-emitting device group
With the structure, the manufacture of the control electrode is facilitated, and the non-uniformity of the emission current due to the variation between the field emission type electronic elements does not matter. Furthermore, field emission type electronic devices
If the emittance of emitted electrons can be reduced
There are advantages.

Further , a plurality of electrons are applied to one control electrode.
A group of emission elements and a group of multiple electron extraction electrodes correspond
And the cross-sectional shape of the hole of the control electrode is electron emission
Since the device has a taper that becomes smaller,
Structure, and variations between field emission electronic devices.
The non-uniformity of the emission current due to this is no longer a problem. Further
The divergence of emitted electrons can be easily
You.

Also, the electrons passing through the control electrode are re-accelerated.
One having the auxiliary electrode
Groups and multiple electron-emitting devices for the poles and auxiliary electrodes
Since the number of electron extraction electrode groups is configured to correspond to each other and the hole diameter of the control electrode or auxiliary electrode is wider than the diameter of the corresponding electron emission element group, the control electrode
And auxiliary electrodes are easily manufactured, and field emission electron
Non-uniformity of emission current due to variation between
It becomes. Further, there is an advantage that the emittance of electrons emitted from the field emission type electronic element can be reduced.

Also, the electrons passing through the control electrode are re-accelerated.
One having the auxiliary electrode
Groups and multiple electron-emitting devices for the poles and auxiliary electrodes
The number of electron extraction electrode groups is configured to correspond,
Since the cross-sectional shape of the hole of the control electrode has a taper that decreases toward the electron-emitting device , the manufacture of the control electrode and the auxiliary electrode
And the variation between field-emission electronic devices
The resulting non-uniformity of the emission current is no longer a problem. further,
The divergence of emitted electrons can be easily bound.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a configuration of a main part of a field emission type electron source according to Embodiment 1 of the present invention.

FIG. 2 is a cross-sectional view illustrating a configuration of a main part of the field emission electron source according to the first embodiment of the present invention.

FIG. 3 is a sectional view showing a configuration of a main part of a field emission type electron source according to Embodiment 2 of the present invention.

FIG. 4 is a sectional view showing a configuration of a main part of a field emission type electron source according to Embodiment 3 of the present invention.

FIG. 5 is a sectional view showing a configuration of a main part of a field emission type electron source according to Embodiment 4 of the present invention.

FIG. 6 is a cross-sectional view showing a configuration of a main part of a conventional field emission electron source.

[Explanation of symbols]

1 electron-emitting device, 2 insulating layers, 3 electron extraction electrodes, 4 insulating layers, 5 control electrodes, 6 insulating layers, 7 auxiliary electrodes.

Continuation of front page (58) Field surveyed (Int.Cl. ⁷ , DB name) H01J 1/304

Claims (4)

(57) [Claims] And 1. A field emission type, which is the reference potential electron-emitting device, an electron extraction electrode which is at a positive potential with respect to the reference potential to emit electrons from the electron-emitting device,
Has a hole in which the electrons pass, it is at a negative potential relative to the electron extracting electrode e Bei and suppressing control electrode divergence of the emitted electron beams, a plurality for one of the control electrodes Wherein the group of the electron-emitting devices and the group of the plurality of electron extraction electrodes correspond to each other , and
The hole diameter of the electrode is larger than the diameter of the corresponding electron-emitting device group.
A field emission type electron source having a wide structure . 2. A field emission type electron emission set to a reference potential.
The element is set to a positive potential with respect to the reference potential, and
An electron extraction electrode for emitting electrons from the electron-emitting device,
It has a hole through which the electrons pass, and the electron extraction electrode
The emission of the emitted electron beam is made negative with respect to the potential.
And a control electrode for suppressing dispersion.
On the other hand, a group of a plurality of electron-emitting devices and a plurality of
The configuration is such that the groups of extraction electrodes correspond to each other, and
The cross-sectional shape of the hole of the electrode becomes smaller on the electron-emitting device side.
A field emission type electron source having a taper . 3. A field emission type electron emission set to a reference potential.
The element is set to a positive potential with respect to the reference potential, and
An electron extraction electrode for emitting electrons from the electron-emitting device,
It has a hole through which the electrons pass, and the electron extraction electrode
The emission of the emitted electron beam is made negative with respect to the potential.
A control electrode for suppressing scattering, and a hole through which the electrons pass
Auxiliary electricity that re-accelerates the electrons that have passed through the holes in the control electrode
And a control electrode and an auxiliary electrode.
A plurality of groups of the electron-emitting devices and a plurality of
A field emission type electron source, wherein a group of electrodes corresponds to each other, and a hole diameter of the control electrode or the auxiliary electrode is larger than a diameter of the corresponding electron emission element group. 4. A field emission type electron emission set to a reference potential.
The element is set to a positive potential with respect to the reference potential, and
An electron extraction electrode for emitting electrons from the electron-emitting device,
It has a hole through which the electrons pass, and the electron extraction electrode
The emission of the emitted electron beam is made negative with respect to the potential.
A control electrode for suppressing scattering, and a hole through which the electrons pass
Auxiliary electricity that re-accelerates the electrons that have passed through the holes in the control electrode
And a control electrode and an auxiliary electrode.
A plurality of groups of the electron-emitting devices and a plurality of
Configured, and wherein the that electric field emission type electron source to the sectional shape of the holes of the control electrode has a smaller taper in the electron-emitting device side as the group corresponding electrode is.