JP3157501U - Leak detector - Google Patents

Abstract

Provided is a leak detection device capable of easily detecting leakage of a working liquid. A leakage detection device 1 for detecting leakage of a working liquid by irradiating a liquid working device E enclosing a working liquid containing a fluorescent substance with ultraviolet light, wherein the liquid working device E is irradiated with ultraviolet light. An irradiating unit 5, an imaging unit 7 that images an irradiated part of ultraviolet light, a determination unit 9 that determines leakage of the working liquid based on a captured image of the imaging unit 7, and a transfer unit 3 that transfers the liquid operating mechanism E With. While the liquid operating device E is transferred by the transfer unit 3, the irradiation of the ultraviolet light by the irradiation unit 5 and the imaging by the imaging unit 7 are performed. [Selection] Figure 1

Description

  The present invention relates to a leak detection device capable of detecting leakage of a working liquid sealed in a liquid operation device such as a damper.

  As the liquid operating device, there are damper devices as disclosed in Patent Documents 1 to 3. As these damper devices, a linear type disclosed in Patent Document 1, a rotary type disclosed in Patent Document 2, and a swing type disclosed in Patent Document 3 are used depending on the purpose of use. In such a damper device, silicon oil is generally sealed as a working liquid.

  However, since silicone oil is colorless, odorless and transparent, there is a risk of illusion of water droplets and the like, and it is extremely difficult to detect even if there is oil leakage.

  Therefore, a lot of man-hours are required to prevent oil leakage from being missed in the manufacturing process.

JP-A-5-288235 JP-A-4-29632 JP-A-10-115338

  The problem to be solved is that it is extremely difficult to find oil leaks in the manufacturing process of the liquid actuator.

  In the present invention, in order to easily detect the leakage of the working liquid enclosed in the liquid working device, the working fluid containing the fluorescent substance is irradiated with ultraviolet light to irradiate the working liquid containing the fluorescent material. A leakage detection device for detecting an irradiation portion for irradiating the liquid operating device with ultraviolet light, an imaging portion for imaging the irradiation portion of the ultraviolet light, and the working liquid based on image data of the imaging portion The main feature is that it includes a determination unit for determining leakage.

  The leak detection device of the present invention irradiates the liquid operating device with ultraviolet light by the irradiating unit and images the irradiated portion of the ultraviolet light by the imaging unit, and determines the leakage of the working liquid by the determining unit based on the captured image. can do.

  Therefore, the leakage of the working liquid of the liquid working device can be easily found.

It is a perspective view which shows schematic structure of a leak detection apparatus (Example 1). (Example 1) which is sectional drawing which shows an example of a liquid actuator. (Example 1) which is sectional drawing which shows the other example of a liquid actuator. (Example 1) which is sectional drawing which shows the further another example of a liquid actuator. (Example 1) which is sectional drawing which shows the further another example of a liquid actuator. (Example 1) which is sectional drawing which shows the upper valve part of the liquid actuator of FIG.

  The purpose of easily detecting leakage of the working liquid was realized by irradiating the liquid working device with ultraviolet light and imaging the irradiated portion.

FIG. 1 is a perspective view showing a schematic configuration of a leak detection apparatus according to Embodiment 1 of the present invention.
[Leak detection device]
(Configuration of leak detection device)
The leak detection device 1 detects the leakage of the working liquid by irradiating the liquid working device E enclosing the working liquid containing a fluorescent substance with ultraviolet light. The leak detection device 1 includes a transfer unit 3, an irradiation unit 5, an imaging unit 7, a determination unit 9, and a return unit 11.

  The said transfer part 3 consists of a belt-type conveyor. That is, in the transfer unit 3, the belt 17 is wound between the pair of rollers 13 and 15. The belt 17 is supplied with a liquid operating device E from a production line or the like via a supply device 19. The supplied liquid operating device E is placed on the belt 17 and transferred.

  The irradiation unit 5 is made of black light and irradiates a predetermined range of the belt 17 with ultraviolet light. Therefore, the irradiation unit 5 can irradiate the liquid actuator E that has entered the irradiation range P with ultraviolet light. The irradiation unit 5 is inclined with respect to the irradiation range P on the rear side in the transfer direction of the belt 17. However, when an annular black light is used, the irradiation unit 5 can be coaxially arranged on the outer periphery of the imaging unit 7 to be described later. In this case, it is arranged orthogonally to the transfer direction on the irradiation range P.

  The imaging unit 7 is composed of a CCD camera. The imaging unit 7 captures an image within the irradiation range P of the irradiation unit 5 that is an ultraviolet light irradiation part, converts the image into an electric signal, and outputs the electric signal. The imaging unit 7 is arranged orthogonal to the transfer direction on the irradiation range P of the irradiation unit 5.

  The determination unit 9 includes an information processing device. The determination unit 9 receives an output signal from the imaging unit 7. The determination unit 9 converts the captured image into a predetermined format (image processing) based on the input signal, and determines the leakage of the working liquid in the liquid working device E.

Similar to the transfer unit 3, the return unit 11 has a belt 25 wound around a pair of rollers 21 and 23. The return unit 11 returns the liquid actuator E in the direction opposite to the transfer direction of the transfer unit 3.
(Leak detection)
The leak detection apparatus 1 according to the present embodiment detects the leak of the working liquid with respect to the liquid actuating apparatus E as a finished product supplied from a production line or the like.

  That is, when the liquid operating device E is supplied via the supply device 19, the leak detection device 1 transfers the liquid operating device E to the irradiation range P of the irradiation unit 5 by the belt 17 of the transfer unit 3.

  When the liquid operating device E enters the irradiation range P of the irradiation unit 5 by the transfer, the liquid operation device E receives the ultraviolet light from the irradiation unit 5. Since the fluorescent substance has a property of emitting light when irradiated with ultraviolet light, when the working liquid leaks, the fluorescent substance in the working liquid emits light by the irradiation.

  The emitted light is imaged by the imaging unit 7, converted into an electrical signal, and output to the determination unit 9. The determination unit 9 performs image processing of the captured image based on the input signal, and determines that there is leakage of the working liquid due to the presence of light emission in the captured image. If it is determined that there is a leak, the captured image or warning may be displayed on the monitor, an alarm may be generated, or the lamp may be turned on, for example, by control of the determination unit 9 or the like.

  When leakage of the working liquid is detected in this way, the liquid working device E is placed on the belt 25 of the return unit 11 as a defective product and returned.

  As described above, in this embodiment, while the liquid operating device E is transferred by the transfer unit 3, the irradiation of the ultraviolet light by the irradiation unit 5 and the imaging by the imaging unit 7 can be performed. Can be detected easily and reliably.

Therefore, in this embodiment, it is possible to easily prevent an oil leak from being overlooked in the manufacturing process, thereby improving the quality and reducing the cost.
[Liquid actuator]
Next, details of the liquid operating device used for leak detection of this embodiment will be described with reference to FIGS.

  FIG. 2 is a cross-sectional view showing an example of the liquid operating device.

  As shown in FIG. 2, the liquid operating device E <b> 1 is a linear damper device, and the working liquid Q is sealed in the cylinder 27.

  As the working liquid Q, silicon oil is used. This working liquid Q contains a fluorescent paint Da as a fluorescent substance. The content of the fluorescent paint Da is, for example, 0.0025 to 0.1% by mass. Thereby, it is possible to easily and reliably perform imaging and detection of light emission by the imaging unit 7 including a CCD camera without impairing the performance of the silicon oil as the working liquid Q. In addition, when the content of the fluorescent paint Da is set to 0.0025 to 0.1% by mass, it is possible to reliably perform imaging and detection of light emission even if mineral oil or synthetic oil is used instead of silicon oil. it can.

  The cylinder 27 has a liquid chamber 29 in which a working liquid Q is sealed. Inside the liquid chamber 29, a piston 31 is inserted so as to be movable via a piston rod 33, and is divided into a pressure chamber 35 side and a non-pressure chamber 37 side. An open end 39 of the cylinder 27 is closed with a cap 41 attached.

  The piston 31 is formed of an elastically deformable material. A flow passage 43 for the working liquid Q is formed through the piston 31 in the axial direction. A valve portion 45 is integrally formed on the end surface of the piston 31, and the valve portion 45 can open and close the flow passage 43 by elastic deformation accompanying the movement of the piston 31. Therefore, the valve part 45 does not tilt during operation and is not caught by other components.

  When the piston 31 moves to the pressure chamber 35 side, the valve portion 45 is deflected to the non-pressure chamber 37 side by the pressure of the working liquid Q, and the buffer passage 43 can be closed to obtain a buffering effect. When the piston 31 moves to the non-pressure chamber 37 side, the working liquid Q in the non-pressure chamber 37 passes through the flow passage 43 and moves to the pressure chamber 35 side. With this moving pressure, the valve portion 45 is pushed open to the pressure chamber 35 side, and the working liquid Q in the non-pressure chamber 37 passes through the flow passage 43 and moves to the pressure chamber 35 side. For this reason, the piston 31 can easily return to the original state.

  In the non-pressure chamber 37 of the cylinder 27, an elastic film 47 that is elastically deformed in response to the pressure fluctuation in the non-pressure chamber 37 is disposed. The elastic film 47 is made of a rubber film called a membrane, and is attached to a guide 49 inserted into the cylinder 27 as shown in the figure. The elastic film 47 absorbs the volume difference of the working liquid Q between the non-pressure chamber 37 and the pressure chamber 35 by elastic deformation, and can smoothly operate the piston rod 33.

  Further, a vent 51 is provided in the portion of the cylinder 27 that houses the elastic film 47 as shown in the figure. Therefore, the pressure around the elastic film 47 can be changed to atmospheric pressure, and the effect of the elastic film 47 can be further promoted.

  In the liquid operating device E1, when the piston rod 33 contracts into the cylinder 27, force is transmitted from the piston rod 33 to the piston 31, and the piston 31 moves to the pressure chamber 35 side. Then, the valve portion 45 is bent toward the non-pressure chamber 37 by the pressure of the working liquid Q, the flow passage 43 is closed, and a drag force is applied to the piston 31 due to the dynamic pressure resistance. As a result, in the liquid operating device E1, the movement of the piston 31 is limited and the input impact is alleviated.

  When the piston rod 33 is pulled out with respect to the cylinder 3 in the extending direction, the piston 31 moves to the non-pressure chamber 37 side in conjunction with this. At this time, the working liquid Q in the non-pressure chamber 37 passes through the flow passage 43 and moves to the pressure chamber 35 side, and the valve portion 45 is pushed open to the pressure chamber 35 side by this moving pressure. Thereby, the working liquid Q in the non-pressure chamber 37 passes through the flow passage 43 and moves to the pressure chamber 35 side, and the piston 31 can be easily returned to the original state.

  Even if the working liquid Q leaks from the periphery 41a of the cap 41 of the cylinder 27, the liquid actuating device E1 performs ultraviolet light emitted from the irradiation unit 5 to the leaked part while being transferred by the transfer unit 3 of the leak detecting device 1. Irradiation and imaging by the imaging unit 7 can be performed reliably.

  FIG. 3 is a cross-sectional view showing another example of the liquid operating device.

  As shown in FIG. 3, the liquid operating device E <b> 2 is a rotary damper device, and the working liquid Q is sealed in the case 53.

  The case 53 is provided with a working chamber 55 that encloses the working liquid Q therein. A rotor 57 is accommodated in the working chamber 55.

  The rotor 57 includes a brake disc 59 formed in a disc shape. A rotating shaft 61 is integrally projected at the center of the brake board 59. A mounting hole 63 is provided on the bottom surface of the brake board 59 so as to coincide with the center of the rotating shaft 61.

  At the center of the bottom surface of the working chamber 55, an attachment fixing shaft 65 that is rotatably fitted to the attachment hole 63 of the rotor 57 is integrally projected. A brake board housing portion 67 for housing the brake board 59 of the rotor 57 is formed around the mounting fixed shaft 65. A shear resistance generating portion 69 is formed in a donut shape on the outer peripheral side including the brake board housing portion 67. The adjustment portion A is accommodated in the working chamber 55.

  The adjustment unit A is composed of a bimetal 71. However, a shape memory alloy may be used for the adjustment part A. The shape of the bimetal 71 on the outer diameter side is formed in a disk shape substantially equivalent to the brake disk 59 of the rotor 57. The shape on the inner diameter side of the bimetal 71 is formed so as to be attachable to a circumferential groove 73 formed on the inner peripheral wall of the shear resistance generating portion 69 of the working chamber 55. The bimetal 71 has a flat plate shape at room temperature, and is configured to bend toward the brake plate 59 side of the rotor 57 as the temperature rises, and to be bent toward the anti-brake plate 59 side as the temperature decreases.

  As shown in FIG. 3, the bimetal 71 has a flat plate shape in a use state at a normal temperature, and a shear corresponding to the viscosity at a normal temperature of the working liquid Q is determined by a gap H <b> 1 between the case 53 side and the rotor 57 side. Resistance can be obtained.

  The shear resistance corresponding to the viscosity is not obtained only between the above-described facings, but the entire gap S forming the brake disk housing portion 97 of the working chamber 55 is involved. However, since this participation is also involved at the same rate even when the temperature of the working liquid Q changes, it will be omitted in the following description.

  When the temperature rises, the bimetal 71 is bent toward the anti-braking board 59 side of the rotor 57 in accordance with the temperature rise, and the interval H1 becomes narrower than the use state at normal temperature.

  When the temperature is high, the viscosity of the working liquid Q is lowered and the fluidity is improved, and the shear resistance is lowered as compared with the normal temperature. Even in this case, the interval H1 is automatically narrowed as compared with the use state at normal temperature, so that the shear resistance can be kept substantially constant.

  When the temperature is lowered, the bimetal 71 is bent toward the control panel 59 in accordance with the temperature drop, and the interval H1 becomes wider compared to the use state at normal temperature.

  When the temperature is low, the viscosity of the working liquid Q is increased and the fluidity is lowered and the shear resistance is improved as compared with the normal temperature. Even in this case, since the interval H1 is automatically increased as compared with the use state at normal temperature, the shear resistance can be kept substantially constant.

  As described above, in the liquid operating device E2, a predetermined damper effect can be more reliably obtained by automatically responding to a change in temperature environment.

  Even if the working liquid Q leaks from the sliding portion f between the rotating shaft 61 of the rotor 57 and the case 53, the liquid actuating device E2 performs the transfer by the transfer portion 3 of the leak detecting device 1 while leaking. Therefore, it is possible to reliably perform the irradiation of ultraviolet light by the irradiation unit 5 and the imaging by the imaging unit 7.

  FIG. 4 is a cross-sectional view showing still another example of the liquid operating device. 4 is common in the basic configuration to the liquid operating device E2 in FIG. 3, and therefore, corresponding components are denoted by the same reference numerals and detailed description thereof is omitted.

  As shown in FIG. 4, the liquid operating device E2a is provided with the adjusting portion A directly on both sides of the brake plate 59A of the rotor 57A.

  The adjustment part A is composed of a bimetal 71 as described above. The bimetal 71 is formed such that the shape on the inner diameter side can be attached to a bimetal attaching step 75 provided on the rotating shaft 61A side of the brake panel 59A.

  The bimetal 71 has a substantially horizontal flat shape at room temperature, and is deformed so as to be substantially parallel to the upper and lower inner peripheral surfaces of the shear resistance generating portion 69A of the case 53A according to the temperature rise, and the rotor 57A of the rotor 57A according to the temperature fall. It is configured to be deformed until it comes into contact with the surface of the brake board 59A.

  Even in the liquid operating device E2a, even if the working liquid Q leaks from the sliding portion f between the rotating shaft 61A of the rotor 57A and the case 53A, the liquid operating device E2a leaks while being transferred by the transfer portion 3 of the leak detecting device 1. Irradiation of ultraviolet light by the irradiation unit 5 and imaging by the imaging unit 7 can be reliably performed on the portion.

  5 and 6 show still another example of the liquid operating device, FIG. 5 is a cross-sectional view of the liquid operating device, and FIG. 6 is a cross-sectional view showing an upper valve portion of the liquid operating device of FIG.

  As shown in FIGS. 5 and 6, the liquid operating device E <b> 3 is a rotary damper device, and a working liquid Q is sealed in a case 77. The case 77 has a cylindrical inner surface.

  A rotating body 79 is provided in the case 77 so as to be relatively rotatable. A partitioning portion 81 projects from the outer surface of the rotating body 79 along the axial direction, and the partitioning portion 81 allows the working liquid chamber A and the operation to move in the case 77 before and after the rotating body 79 in the rotation direction. It is partitioned into a liquid chamber B. The top surface 81 a of the partition 81 is slidably in contact with the inner peripheral surface of the case 77, and the radius of curvature thereof is substantially matched with the radius of curvature of the inner peripheral surface of the case 77.

  The partition 81 is provided with a passage 83 communicating with the working liquid chambers A and B. The passage 83 includes a valve chamber 85 on the working liquid chamber A side and a valve chamber 87 on the working liquid chamber B side. These valve chambers 85 and 87 are communicated with each other by a valve chamber communication passage 84 that communicates with each other. The valve body 89 is movably inserted into the valve chamber 85 and the valve body 91 is movably inserted into the valve chamber 87.

  The said valve body 89 consists of a leaf | plate spring arrange | positioned so that movement within the valve chamber 85 is possible like FIG. The valve body 89 has a central portion curved toward the working liquid chamber A. The valve body 89 is configured to bend by the working liquid Q and close the passage 83 when the pressure on the working liquid chamber A side exceeds a predetermined value.

  As shown in FIG. 5, the valve body 91 is composed of a leaf spring that is movably disposed in the valve chamber 87. The valve body 91 has a central portion curved toward the working liquid chamber B side. The valve body 91 is configured to bend by the working liquid Q and close the passage 83 when the pressure on the working liquid chamber A side exceeds a predetermined value.

  In order to make it easy to understand the configuration of the valve bodies 89 and 91, in this description, the rotation is configured so that the door is opened with a light force when the door is opened, and the damper is slowly closed when the door is closed. The description will be given by taking the case where the liquid operating device E3 is attached to the door as an example.

  In FIG. 5, when the door is opened, the rotating body 79 rotates in the clockwise direction T, and the working liquid chamber A becomes the pressure chamber. As a result, the pressure of the working liquid Q in the working liquid chamber A increases, and the valve bodies 89 and 91 move in the opening direction.

  For this reason, the working liquid Q in the working liquid chamber A passes through the valve chamber 85 -the valve chamber communication passage 84 -the valve chamber 87 and moves to the working liquid chamber B that forms a non-pressure chamber. Therefore, the door can be opened with a light force.

  However, if the door is suddenly opened due to a gust of wind or the like while the door is being opened, the rotational speed of the rotating body 79 increases rapidly. Therefore, the partition 81 projecting from the rotating body 79 moves suddenly toward the working liquid chamber A forming the pressure chamber, and the pressure of the working liquid Q in the working liquid chamber A suddenly moves accordingly. To rise.

  Due to such a rapid pressure increase, as shown in FIG. 6, the bent valve body 89 is bent into a flat plate shape and pressed against the valve seat 93 side. As a result, the valve chamber communication path 84 is closed and the working liquid Q in the working liquid chamber A is prevented from moving to the working liquid chamber B. Therefore, it is possible to reliably prevent the door from opening suddenly due to a gust of wind or the like.

  When the rotation speed of the rotating body 79 returns to the normal speed, the pressure of the working liquid Q in the working liquid chamber A also decreases accordingly, and the shape of the valve body 89 also returns to the original shape. For this reason, the working liquid Q in the working liquid chamber A moves to the working liquid chamber B through the valve chamber 85 -the valve chamber communication passage 84 -the valve chamber 87. Therefore, the door can be opened with a normal light force.

  When the door is closed, the rotating body 79 rotates counterclockwise R in FIG. 5 and the hydraulic fluid chamber B becomes a pressure chamber. That is, the partition 81 projecting from the rotating body 79 moves toward the working liquid chamber B, and the pressure of the working liquid Q in the working liquid chamber B increases accordingly.

  Due to the increased pressure, the valve element 91 moves to the valve seat 93 side of the valve chamber communication passage 84 and closes the valve chamber communication passage 84 as shown in FIG. For this reason, it is possible to prevent the working liquid Q in the working liquid chamber B from moving to the working liquid chamber A and obtain a good damper effect.

  Therefore, when the speed at which the door closes due to a gust of wind or the like exceeds a predetermined speed, the pressure of the working liquid Q in the working liquid chamber B increases as the rotating speed of the rotating body 79 increases. Due to the pressure increase, the valve body 91 formed in a curved shape is bent into a flat plate shape (not shown) and is pressed against the valve seat 93 side to close the valve chamber communication passage 84 more strongly. As a result, the working liquid Q in the working liquid chamber B is prevented from moving to the working liquid chamber A. Therefore, it is possible to reliably prevent the door from closing suddenly due to a gust of wind or the like.

  When the rotational speed of the rotating body 79 returns to the normal speed, the pressure of the working liquid Q in the working liquid chamber B decreases, and the shape of the valve body 91 also returns to the original shape. For this reason, the working liquid Q in the working liquid chamber B moves through the curved gap of the valve body 91, passes through the valve chamber 87 -the valve chamber communication passage 84 -the valve chamber 85, and moves to the working liquid chamber A. Therefore, the door can be closed at a normal speed.

  In the liquid operating device E3, since the content of the fluorescent paint Da is 0.0025 to 0.1% by mass, the buffer is a laminar flow having a Reynolds number of about 2000 or less and is substantially proportional to the rotational speed of the rotating body 20. An effect (torque) can be obtained.

Even in the liquid operating device E3, even if the working liquid Q leaks from a sliding portion with the mounting cap 95 that rotatably attaches the rotating body 79 to the case 77, the liquid operating device E3 is transferred by the transfer unit 3 of the leak detecting device 1. It is possible to reliably perform the irradiation of the ultraviolet light by the irradiation unit 5 and the imaging by the imaging unit 7 with respect to the leaked portion while performing the above.
[Effect of Example]
The leak detection apparatus 1 according to the present embodiment is a leak detection apparatus that detects leakage of the working liquid by irradiating the liquid working apparatus E in which the working liquid containing a fluorescent substance is sealed with ultraviolet light. An irradiation unit 5 that irradiates E with ultraviolet light, an imaging unit 7 that images an irradiation part of ultraviolet light, and a determination unit 9 that determines leakage of the working liquid based on an image captured by the imaging unit 7. Yes.

  Therefore, the leak detection device 1 irradiates the liquid operating device E with the ultraviolet light by the irradiation unit 5, images the irradiation portion of the ultraviolet light with the imaging unit 7, and operates the working liquid based on the captured image with the determination unit 9. Can be determined.

  For this reason, in the present embodiment, the leakage of the working liquid of the liquid working device E can be easily found. As a result, it is possible to easily prevent oversight of leakage in the manufacturing process, improve the quality and reduce the cost.

  Further, in this embodiment, it is possible to cause the irradiation unit 5 to irradiate the ultraviolet light and to perform the imaging by the imaging unit 7 while transferring the liquid operating device E by the transfer unit 3. It can be detected easily and reliably.

  The liquid operating devices E1 to E3 of the present embodiment are linear or rotary damper devices, and since the portion where the working liquid Q is leaked is one place, the transfer by the transfer unit 3 of the leak detection device 1 is performed. While performing, the irradiation of the ultraviolet light by the irradiation unit 5 and the imaging by the imaging unit 7 can be surely performed on the leakage portion.

  Further, in the liquid operating devices E1 to E3, the content of the fluorescent paint Da as a fluorescent substance with respect to silicon oil is 0.0025 to 0.1% by mass. It is possible to easily and reliably perform imaging and detection of light emission by the imaging unit 7 including the CCD camera of the leak detection device 1 without hindering the performance as Q.

  In addition, when the content of the fluorescent paint Da is 0.0025 to 0.1% by mass, it is possible to reliably perform imaging and detection of light emission even if mineral oil or synthetic oil is used instead of silicon oil. , Leakage of working fluid can be detected.

  In the liquid actuator E3, a torque proportional to the rotational speed of the rotating body 79 can be obtained in a laminar flow having a Reynolds number of about 2000 or less by the content of the fluorescent paint Da.

DESCRIPTION OF SYMBOLS 1 Leak detection apparatus 3 Transfer part 5 Irradiation part 7 Judgment part Da Fluorescent paint (fluorescent substance)
E, E1, E2, E2a, E3 Liquid actuator Q Working liquid

Claims (2)

A leakage detection device for detecting leakage of the working liquid by irradiating a liquid working device enclosing a working liquid containing a fluorescent substance with ultraviolet light,
An irradiation unit for irradiating the liquid actuator with ultraviolet light;
An imaging unit that images the irradiated portion of the ultraviolet light;
A determination unit that determines leakage of the working liquid based on a captured image of the imaging unit;
A leak detection apparatus characterized by that. The leak detection device according to claim 1,
A transfer unit for transferring the liquid operating device;
Irradiation of ultraviolet light by the irradiation unit and imaging by the imaging unit are performed while the liquid operating device is transferred by the transfer unit.
A leak detection apparatus characterized by that.

Images