JP3144265B2 - Two-phase high-frequency power supply circuit - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a power supply circuit for efficiently supplying a two-phase high-frequency power supply to two load circuits having the same impedance which require power supply currents having different phases. More particularly, the present invention relates to a power supply circuit for efficiently supplying a two-phase high-frequency power supply by performing impedance matching on a low-impedance integrated circuit as a load circuit.

[0002]

2. Description of the Related Art There is a Josephson circuit using a superconducting material as two load circuits requiring power supply currents having different phases. The Josephson circuit is characterized by fast switching and can operate at a high clock frequency in the GHz range. The Josephson circuit is driven by an AC power supply current, and the frequency of the AC current becomes the clock frequency of the Josephson circuit.
High frequency AC power in the Hz range must be supplied.

However, a Josephson integrated circuit has a low impedance, and a 10K gate Josephson integrated circuit has an impedance of several mΩ. In contrast, the impedance of a power supply or a coaxial cable is generally 50%.
Since it is Ω, it is necessary to insert an impedance matching circuit between the power supply device and the Josephson integrated circuit in order to supply power efficiently.

In order to drive a Josephson integrated circuit, there are a method using a single-phase AC power supply and a method using a polyphase AC power supply. Are simpler and ground noise can be reduced. For this reason, a method for efficiently supplying a two-phase high-frequency power source is required in a Josephson integrated circuit.

A power supply circuit for efficiently supplying a two-phase AC power supply to a Josephson integrated circuit by impedance matching is disclosed in JP-A-6-318739.
The one using a transformer as described in Japanese Patent Application Laid-Open No. H10-260, 1993 is known.

FIG. 13 shows an equivalent circuit diagram of this power supply circuit. This circuit will be described according to the numbers shown in the figure. In the figure, 1 is a power supply device, 2 is an internal resistance of the power supply device (normally 50Ω), 3 is a load resistance corresponding to a Josephson circuit operated by a first phase power supply, and 4 is a Josephson circuit operated by a second phase power supply. , 39 is the transformer primary inductor L ₁ , 40 is the transformer secondary inductor L ₂ , 41 is the mutual inductance M between the primary and secondary inductors, 42 is the primary inductance L ₂ between the primary and secondary inductors Parasitic capacitance C. Each of the load resistances 3 and 4 has the same magnitude.

It is well known that a transformer is used as an impedance matching circuit. However, in the conventional example shown in FIG. 13, as shown in FIG. 13, between each terminal of a secondary-side inductor of the transformer and ground. Respectively, by connecting the load on the first phase side and the load on the second phase side, respectively.
It is possible to simultaneously generate the phase power supply current.

[0008]

However, this matching circuit has a resonance frequency f due to a parasitic capacitance C between the primary and secondary inductors which occurs due to the structure of the circuit.
_rea ≒ 1 / _2π (MC) occurs resonance in ^1/2, since the current amplification factor is reduced suddenly, there is a serious drawback that it can not be used only in less frequency. In addition, as the parasitic capacitance increases as the number of gates of the Josephson integrated circuit increases, the current to be supplied increases in proportion to the increase. Therefore, the inductance of the transformer must be increased. As a result, both M and C are simultaneously increased. It increases and _frea decreases.

As an example, IEE Transactions on Magnetics (IEEE)
Transactions on Magnetic
s) Vol. MAG-19, No. 3, May 198
3 To introduce the results reported in p1250, 8
The maximum operating frequency of a K-gate Josephson integrated circuit is 270 MHz. As described above, the transformer type matching circuit has a serious drawback that an operating frequency has an upper limit, and is not suitable for supplying power to a Josephson integrated circuit that can operate in a GHz range.

An object of the present invention is to eliminate such a problem of the conventional impedance matching circuit for two-phase power supply,
An object of the present invention is to provide a power supply circuit that can be used at any frequency and can efficiently supply a two-phase high-frequency power supply through impedance matching.

[0011]

A first two-phase high-frequency power supply circuit according to the present invention comprises a power supply circuit for one load circuit for two load circuits having the same impedance and requiring power supply currents having different phases. A line is connected to a power input terminal via an inductor, a power line of the other load circuit is connected to the power input terminal via a capacitor, and the power input terminal is connected to an output terminal of a single-phase AC power supply. It is characterized by having.

The value of the inductance of the inductor and the value of the capacitance of the capacitor are different from each other. The resonance frequency determined by the value of the inductance and the value of the capacitance is the frequency of the AC power supplied from the single-phase AC power supply. Is a value that matches
The resonance frequency is a value that realizes impedance matching between the output impedance of the AC power supply device and the two load circuits.

A second two-phase high-frequency power supply circuit according to the present invention is characterized in that, for two load circuits having the same impedance and requiring power supply currents having different phases, the power supply line of one of the load circuits has the first inductor. The power supply line of the other load circuit is connected to the power supply input terminal via a second inductor and a capacitor, and the power supply input terminal is connected to the output terminal of a single-phase AC power supply device. It is characterized by being connected.

The resonance frequency determined by the inductance values of the first and second inductors and the capacitance value of the capacitor is determined by the first and second inductance values and the capacitance value. And the resonance frequency is such that the output impedance of the AC power supply and the impedance matching between the two load circuits are realized. Value.

Further, the connection to the two load circuits is made by a bonding wire.
Further, the capacitor is a chip capacitor or a chip variable capacitor.

[0016]

FIG. 1 is an equivalent circuit diagram of a first two-phase high-frequency power supply circuit according to the present invention. This circuit includes a power supply unit, a matching circuit, and a load as shown in the figure. The matching circuit is composed of one inductor and one capacitor. In the figure, 1 is a power supply, 2 is an internal resistance of the power supply,
3 is a load resistor R corresponding to a Josephson circuit operated by a first phase power supply, 4 is a load resistor R corresponding to a Josephson circuit operated by a second phase power supply, 5 is a capacitor C of a matching circuit, and 6 is a matching circuit. Of the inductor L. The resistance values of 3 and 4 are equal to each other.

Further, the total impedance including the matching circuit and the load viewed from the power supply side is defined as Z (ω) (ω is an angular frequency, and the frequency f has a relationship of ω = 2πf). Matching circuit inductance L and capacitance C
Is determined as described below.

The frequency of the AC current to be supplied to the load is f ₀
And First, the resonant frequency of the matching circuit is set to be equal to the f _0. That is, f ₀ = 1 / (2π (LC) ^1/2 ) (1). In addition, Z (ω) at the frequency f ₀ is set to be equal to the internal resistance (normally 50Ω) of the power supply device. That is, Z (ω ₀ ) = 50 (2) (where ω ₀ = 2πf ₀ ).

By solving the simultaneous equations (1) and (2), the values of L and C are uniquely determined. With such a design, when power is supplied from an AC power supply having a frequency f ₀ , a resonance current flows to the load, and impedance matching is also realized.

Further, the load R is compared with the internal resistance of the power supply device.
Is very small, the load on each phase is approximately 180
° Different resonance currents flow. According to the present invention, the generation of the two-phase power supply and the impedance matching are thus simultaneously realized.

Further, in the present invention, since the resonance phenomenon is used, there is no upper limit in the operating frequency, so that it is possible to supply a high-frequency power in the GHz range to the Josephson integrated circuit.

FIG. 2 shows an equivalent circuit diagram of a second two-phase power supply circuit according to the present invention. In this circuit, it is characterized in that the insertion of the inductor L ₁ to the matching circuit. Each circuit parameter of this circuit is determined as follows.

The frequency of the AC power supply to be supplied to the load is f ₀
And First, the resonant frequency of the matching circuit is set to be equal to the f _0. That is, f ₀ = 1 / 2π (C ₁ (L ₁ + L ₂ )) ^1/2
... (3). Further, Z (ω) at the frequency f ₀ is the internal resistance of the power supply device (normally 50Ω).
To be equal to That is, Z (ω ₀ ) = 50 (4) (where ω ₀ = 2πf ₀ ).

With such a design, when power is supplied from an AC power supply having a frequency f ₀ , a resonance current flows through the load, and impedance matching is also realized. Also, if the load R is very small compared to the internal resistance of the power supply,
A resonance current having a phase difference of approximately 180 ° flows through the load of each phase. According to the present invention, the generation of the two-phase power supply and the impedance matching are thus simultaneously realized.

By solving the simultaneous equations (3) and (4), L ₂ = (R (100−R)) ^1/2 / ω ₀ (5) is obtained. Therefore, given the load R and the frequency of the AC power supply, L ₂ is uniquely determined. On the other hand, L ₁
And C ₁ can take any value that satisfies equation (3) with respect to L _{2 in} equation (5).

In the first two-phase high-frequency power supply circuit of the present invention, the values of the inductor and the capacitor are uniquely determined when the load R and the frequency to be used are determined. As the load decreases, the inductor must be smaller and the capacitor must be larger.

Whether this power supply circuit is manufactured on a chip on which a Josephson integrated circuit is manufactured or on a chip carrier such as a printed circuit board, a large capacitance is obtained on a limited area. There are limits to fabrication. When a power supply circuit is manufactured on a chip carrier, a commercially available chip capacitor can be used, but at present, there is only a chip capacitor that can be used in the GHz range up to about 10 pF.

[0028] In the second two-phase high-frequency power supply circuit of the present invention, by inserting the inductor L ₁ to a capacitor side, it can give freedom to set the value of the capacitor, as a result, a limited The degree of freedom can be given to the design and layout of the power supply circuit under the restrictions such as the area and the capacity of the chip capacitor that can be used.

[0029]

Embodiments of the present invention will be described below with reference to the drawings.

(Embodiment 1) FIG. 3 shows a first embodiment of the present invention.
FIG. 2 is a schematic diagram illustrating an embodiment of a phase high-frequency power supply circuit. In this embodiment, a matching circuit is formed on the same chip as the Josephson circuit. In FIG. 3, 10 is a Josephson device chip, 11 is an upper electrode of a capacitor C of a matching circuit, 13 is a first phase power terminal of the Josephson integrated circuit, and 14 is a second phase power terminal of the Josephson integrated circuit. , 12 are inductors L of the matching circuit, and 15 is a Josephson integrated circuit that operates on a two-phase power supply.

FIG. 4 is a schematic cross-sectional view of the chip 10 for showing a method of manufacturing the capacitor C in this embodiment. The inductor is composed of a microstrip. In this embodiment, Nb, which is a superconductor used in a Josephson circuit, is used for an electrode and an inductor of a capacitor of a matching circuit.

FIG. 1 shows an equivalent circuit of this embodiment. Assuming that the scale of the Josephson integrated circuit is 10K gates, the load R of each phase is 3 mΩ. For this load,
Circuit parameters for most efficiently supplying a 1-GHz two-phase power supply are uniquely determined as L = 87pH and C = 290 pF by solving equations (1) and (2). According to the simulation result of the current flowing to the load of each phase when the parameters of the matching circuit are taken in this way, the maximum current flows at 1 GHz to each load, and the absolute value is equal at each load. 0.9 phase difference
A two-phase power supply of 97π radian and a phase difference of almost π is realized.

In this embodiment, since the electrodes of the capacitor and the inductor of the matching circuit are manufactured using a superconducting material, there is no loss in the matching circuit portion, and the matching circuit can be manufactured with the accuracy of lithography. There is an effect that a circuit can be manufactured.

In this embodiment, N is used as the superconductor.
Although b was used, the same effect can be obtained by using any superconductor other than Nb, for example, NbN or an oxide superconductor such as Y ₁ Ba ₂ Cu ₃ O _X.

As the structure of the capacitor, in this embodiment, IEE Transactions
On Microwave Theory and Techniques (IEEE TRANSACTIONS ON M
ICROWAVE THEORY AND TECHN
ICS) Vol. MTT-29, No. 6, June 1
981 p513 was used, but any other structure as described in the document, such as an interdigitated structure or a broadside-coupled structure, may be used to fabricate the capacitor. The same effect can be obtained.

Similarly, although the microstrip structure is used in this embodiment as the inductor structure, the same effect can be obtained by using any other structure, such as a coplanar structure or a meander type structure, for example. can get.

In this embodiment, a 1 GHz AC power is supplied to a Josephson circuit having a 10K gate. However, for a power source having a different load and a different frequency, (1) Using the values of the inductance and capacitance of the matching circuit determined from equation (2),
A matching circuit having the same effect can be realized.

Embodiment 2 FIG. 5 shows a second embodiment according to the present invention.
FIG. 2 is a schematic diagram of a first embodiment of a phase high-frequency power supply circuit. In this embodiment, a matching circuit is manufactured on a chip on which a Josephson circuit is manufactured. In FIG.
The upper electrode of the capacitor C ₁ of the matching circuit, 22 is an inductor L _1, 23 of the matching circuit is an inductor L ₂ of the matching circuit. On the other hand, FIG. 6 to show the manner of fabrication of the capacitor C ₁ in this embodiment, it is a cross-sectional schematic view of the chip 10. The inductor is composed of a microstrip. In this embodiment, Nb, which is a superconductor used in a Josephson circuit, is used for an electrode and an inductor of a capacitor of a matching circuit.

FIG. 2 shows an equivalent circuit of this embodiment. Assuming that the scale of the Josephson integrated circuit is 10K gates, the load R of each phase is 3 mΩ. For this load,
The circuit parameters for supplying the 1-GHz two-phase power supply most efficiently may be L ₁ = L ₂ = 87pH and C ₁ = 145 pF by solving equations (3) and (4). According to the simulation result of the current flowing to the load of each phase when the parameters of the matching circuit are taken in this way, the maximum current flows at 1 GHz to each load, and the absolute value is equal at each load. The phase difference is 0.997π radian, and a two-phase power supply with a phase difference of almost π is realized.

In this embodiment, since the electrodes of the capacitor and the inductor of the matching circuit are manufactured using a superconducting material, there is no loss in the matching circuit part, and the matching circuit can be manufactured with the accuracy of lithography. There is an effect that a circuit can be manufactured.

In this embodiment, N is used as the superconductor.
Although b was used, the same effect can be obtained by using any superconductor other than Nb, for example, NbN or an oxide superconductor such as Y ₁ Ba ₂ Cu ₃ O _X.

In this embodiment, the overlay structure and the microstrip structure are used as the structure of the capacitor and the inductor, respectively. However, the same effect can be obtained by using any of the structures described in the first embodiment. .

If the values of L ₁ and C ₁ satisfy the expression (3), the same effect can be obtained even if the values are different from those of the present embodiment.

In this embodiment, a 1 GHz alternating current power supply is supplied to a Josephson circuit having a 10K gate. However, even for a load having a different size and a power supply having a different frequency, (3) Using the values of the inductance and capacitance of the matching circuit determined from equation (4),
A matching circuit having the same effect can be realized.

(Embodiment 3) FIG. 7 shows a second embodiment according to the present invention.
FIG. 3 is a schematic diagram of a second embodiment of the phase high-frequency power supply circuit. In this embodiment, a portion of the matching circuit, i.e. the capacitor C _1, a portion of the inductor L _1, and a portion of the inductor L ₂ produced as multilayer thin film of the chip, the Josephson device chip by wire bonding Connecting. The two bonding wires in the figure are
Each becomes a part of the inductor L ₁ and the inductor L ₂ . Nb, which is a superconducting material, is used for the electrodes and inductors of the capacitors of the matching circuit on the laminated thin-film chip. The structure of the capacitor is the same as that shown in FIG. The inductor is composed of a microstrip.

FIG. 8 shows an equivalent circuit of this embodiment. Since the bonding wire has a slight resistance, the circuit parameters slightly deviate from the circuit parameters of the second embodiment. Loss occurs, but after estimating the loss, the optimum parameters can be obtained for the equivalent circuit in Fig. 8 using a high-frequency simulator, realizing a power supply circuit that supplies two-phase power supplies with the same amplitude to each load. It is possible to

In this method, since the matching circuit is manufactured as a separate chip, there is no limit to the manufacturing process of the Josephson device chip, and there is a degree of freedom in the manufacturing process of the matching circuit.

For example, an insulator generally used in a Josephson device chip is SiO ₂ , and since its dielectric constant is small, a capacitor having a large capacity in a small area cannot be manufactured. If the matching circuit is made on a separate chip, you can select an insulating material with a high dielectric constant, regardless of the process of the Josephson device chip,
It is possible to select an insulating material having a small dielectric loss tangent, which has the effect of giving a degree of freedom to the design and layout of the matching circuit.

Further, in this method, when it is desired to perform driving experiments on the same Josephson circuit at different frequencies, a matching circuit corresponding to each frequency is prepared, and a matching circuit is mounted on the same Josephson device chip. There is an effect that only the correction is necessary.

In this embodiment, N is used as the superconductor.
Although b was used, the same effect can be obtained by using any superconductor other than Nb, for example, NbN or an oxide superconductor such as YBCO (Y ₁ Ba ₂ Cu ₃ O _x ). . In this embodiment, the overlay structure and the microstrip structure are used as the structure of the capacitor and the inductor, however, the same effect can be obtained by using any of the structures described in the first embodiment.

(Embodiment 4) FIG. 9 shows a second embodiment according to the present invention.
FIG. 7 is a schematic diagram of a third embodiment of a phase high-frequency power supply circuit.

In this embodiment, a matching circuit is formed on a chip carrier such as a printed circuit board. In the figure, 32 is 50
Ω microstrip line, 33 denotes a terminal for mounting a chip capacitor, 34 denotes a chip capacitor, 27 denotes a bonding wire, and 35 denotes a chip carrier.
In this embodiment, the capacitor of the matching circuit is a chip capacitor, and the inductor is a bonding wire. The two bonding wires are respectively bonded to the first and second phase power supply lines of the Josephson circuit.

FIG. 10 shows an equivalent circuit of this embodiment. Since there are slight resistances in the bonding wire and the chip capacitor, the circuit parameters slightly deviate from the circuit parameters in the case of the second embodiment, resulting in a slight loss. However, after estimating the loss, the optimum parameters can be obtained for the equivalent circuit of FIG. 10 by using a high-frequency simulator.
It is possible to realize a power supply circuit that supplies phase power.

In this method, since a chip capacitor is used as a capacitor and a bonding wire is used as an inductor, the layout design of the matching circuit is easier than in the first, second and third embodiments.

In this method, since the matching circuit is formed on the chip carrier, when it is desired to perform driving experiments on the same Josephson circuit at different frequencies, the matching circuits corresponding to the respective frequencies are formed and the same Josephson circuit is formed. There is an effect that it is only necessary to remount the matching circuit to the son device chip.

The chip capacitor used as the capacitor can be applied to the first embodiment.

(Embodiment 5) FIG. 11 shows a fourth embodiment of the second two-phase high frequency power supply circuit according to the present invention. The difference from the fourth embodiment is that a chip capacitor having a variable capacitance is used.

FIG. 12 shows an equivalent circuit of this embodiment. Since the bonding wire and the chip variable capacitor have slight resistances, the circuit parameters slightly deviate from the circuit parameters of the second embodiment. Although a loss occurs, after estimating the loss, FIG.
Optimum parameters can be obtained for the equivalent circuit by using a high-frequency simulator, and a power supply circuit that supplies two-phase power supplies having the same amplitude to each load can be realized.

In this embodiment, the same effect as that of the fourth embodiment can be obtained. However, in this embodiment, there is an effect that the resonance frequency of the matching circuit can be changed to some extent by using a variable chip capacitor. For example, when the inductance of the bonding wire deviates from the design value, the resonance frequency can be corrected to a desired value by changing the capacitance of the chip capacitor. Alternatively, one can experiment with Josephson integrated circuits at several different frequencies.

The chip variable capacitor used as the capacitor can be applied to the first embodiment.

In the description of the present embodiment, the Josephson integrated circuit is used as two load circuits having the same impedance which require power supply currents having different phases. However, the present invention is not limited to this. Any circuit may be used.

[0062]

As described above, according to the present invention,
A first two-phase power supply circuit capable of simultaneously generating a two-phase power supply current and impedance matching at any frequency can be realized. Further, it is possible to realize a second two-phase power supply circuit capable of providing a degree of freedom in setting the capacitance of the capacitor, which is a component of the matching circuit, and consequently providing a degree of freedom in designing the matching circuit.

[Brief description of the drawings]

FIG. 1 is an equivalent circuit diagram of a first two-phase power supply circuit according to the present invention.

FIG. 2 is an equivalent circuit diagram of a second two-phase power supply circuit according to the present invention.

FIG. 3 is a diagram for explaining a first embodiment of a first two-phase power supply circuit according to the present invention;

FIG. 4 is a diagram for explaining Embodiment 1 of a first two-phase power supply circuit according to the present invention.

FIG. 5 is a diagram for explaining Embodiment 1 of a second two-phase power supply circuit according to the present invention.

FIG. 6 is a diagram for explaining Embodiment 1 of a second two-phase power supply circuit according to the present invention.

FIG. 7 is a diagram for explaining a second embodiment of the second two-phase power supply circuit according to the present invention.

FIG. 8 is an equivalent circuit diagram of Embodiment 2 of a second two-phase power supply circuit according to the present invention.

FIG. 9 is a diagram for explaining a third embodiment of the second two-phase power supply circuit according to the present invention.

FIG. 10 is an equivalent circuit diagram of Embodiment 3 of the second two-phase power supply circuit according to the present invention.

FIG. 11 is a diagram for explaining a fourth embodiment of the second two-phase power supply circuit according to the present invention.

FIG. 12 is an equivalent circuit diagram of Embodiment 4 of the second two-phase power supply circuit according to the present invention.

FIG. 13 is an equivalent circuit diagram of a conventional two-phase power supply impedance matching circuit.

[Explanation of symbols]

REFERENCE SIGNS LIST 1 power supply device 2 internal resistance of power supply device 3 load resistance equivalent to Josephson circuit operated by first-phase power supply 4 load resistance equivalent to Josephson circuit operated by second-phase power supply 5 capacitor C6 of matching circuit inductor L 13 Josephson circuit of the upper electrode 12 matching circuit of the capacitor C of the inductor L ₂ 10 Josephson device chips 11 matching circuit of the inductor L ₁ 9 matching circuit of the capacitor C ₁ 8 matching circuit of the inductor L 7 matching circuit of a matching circuit 1 phase power input terminal 14 Josephson circuit second phase power input terminal 15 Josephson circuit operated by two-phase power 16 ground plane 17 insulator 18 lower electrode of matching circuit capacitor C 19 matching circuit capacitor Top electrode of C 20 First phase power supply of Josephson circuit The upper electrode 26 matching circuit capacitor C ₁ of the lower electrode 25 matching circuit capacitor C ₁ of the inductor L ₂ 24 matching circuit of the inductor L ₁ 23 matching the upper electrode 22 matching circuit capacitor C ₁ of power terminals 21 a matching circuit Inductor L ₁ 27 Bonding wire 28 Matching circuit chip 29 Resistance included in inductor L ₁ 30 Resistance included in inductor L ₂ 31 Resistance included in capacitor C ₁ 32 Microstrip line of 50Ω 33 Chip mounting terminal 34 chip capacitor 35 chip carrier 36 chip variable capacitor 37 variable capacitor C ₁ 38 2 primary inductor of the primary inductance 40 Transformers resistor-39 transformer included in the variable capacitor C ₁ Parasitic capacitances 43 substrate between the mutual inductance 42 primary and secondary between chest 41 primary and secondary

Continuation of the front page (56) References JP-A-61-174815 (JP, A) JP-A-6-318739 (JP, A) JP-A-2-184086 (JP, A) JP-A-63-280506 (JP) JP-A-1-243824 (JP, A) JP-A-6-120762 (JP, A) JP-A-5-63604 (JP, A) JP-A-6-296116 (JP, A) 4-211518 (JP, A) Japanese Utility Model Showa 64-55729 (JP, U) (58) Fields investigated (Int. Cl. ⁷ , DB name) H01L 27/18 H01L 39/00 H01L 39/22-39 / 24 H03K 19/195 H02J 3/00-3/02 H03H 7/00-7/46

Claims (5)

(57) [Claims] 1. For two load circuits having the same impedance, which require power supply currents having different phases.
A power line of one load circuit is connected to a power input terminal via a first inductor, a power line of the other load circuit is connected to the power input terminal via a second inductor and a capacitor, An end is connected to an output end of a single-phase AC power supply, and the inductance value of the first and second inductors and the capacitance value of the capacitor are equal to the first and second inductance values and the capacitance value. Is a value that matches the frequency of the AC power supplied from the single-phase AC power supply, and the resonance frequency is determined by the output impedance of the single-phase AC power supply. A two-phase high-frequency power supply circuit having a value that realizes impedance matching with the two load circuits. 2. The connection to the two load circuits is connected by a bonding wire.
2-phase high-frequency power supply circuit as claimed in 1. 3. A process according to claim, wherein the capacitor is a chip capacitor 1 or claim 1 or 2
A two-phase high frequency power supply circuit according to any one of the above. 4. The two-phase high frequency power supply circuit according to claim 3, wherein said chip capacitor is a chip variable capacitor. 5. A power supply circuit for a superconducting circuit, wherein, for two load circuits having the same impedance and requiring power supply currents having different phases, the power supply line of one of the load circuits connects the first inductor. And a power line of the other load circuit is connected to the power input terminal via a second inductor and a capacitor, and the power input terminal is connected to an output terminal of a single-phase AC power supply. And
A two-phase high-frequency power supply circuit, wherein the two load circuits are Josephson circuits using a superconducting material.