JP3137171B2 - Composite bearing with disk rotation mechanism - Google Patents
Composite bearing with disk rotation mechanismInfo
- Publication number
- JP3137171B2 JP3137171B2 JP07096077A JP9607795A JP3137171B2 JP 3137171 B2 JP3137171 B2 JP 3137171B2 JP 07096077 A JP07096077 A JP 07096077A JP 9607795 A JP9607795 A JP 9607795A JP 3137171 B2 JP3137171 B2 JP 3137171B2
- Authority
- JP
- Japan
- Prior art keywords
- spindle
- bearing
- oil
- dynamic pressure
- disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【０００１】[0001]
【産業上の利用分野】この発明は、小型の磁気ディスク
や光ディスクなどの記録ディスクに対する、回転機構の
複合型軸受けに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a composite bearing having a rotating mechanism for recording disks such as small magnetic disks and optical disks.
【０００２】[0002]
【従来の技術】磁気ディスクや光ディスクなどの記録デ
ィスクは、媒体に欠陥が存在すると記録性能が低下する
ので、検査装置により欠陥が検査される。検査において
は、記録ディスクを回転機構のスピンドルに装着して回
転し、これに磁気ヘッドや光ヘッドをローディングして
行われる。図４は、ディスク検査装置の回転機構の構成
を示す。(a) において、回転機構は駆動モータ（Ｍ）２
と、その回転軸に直結し、軸受け４に軸支されたスピン
ドル３、スピンドル３の上端に固定され、被検査の記録
ディスク１を装着してチャックするチャックヘッド５よ
りなる。チャックされた記録ディスク１は、駆動モータ
２により回転し、これに対してローディングされたヘッ
ド６は、記録ディスク１の回転により生ずるエアフロー
により、(b) に示すように微小な高さδｈ浮上する。2. Description of the Related Art A recording disk, such as a magnetic disk or an optical disk, is inspected for defects by an inspection device because the recording performance deteriorates when a defect is present in the medium. In the inspection, a recording disk is mounted on a spindle of a rotating mechanism, rotated, and a magnetic head or an optical head is loaded on the recording disk. FIG. 4 shows a configuration of a rotation mechanism of the disk inspection device. In (a), the rotating mechanism is a drive motor (M) 2
A spindle 3, which is directly connected to the rotating shaft and is supported by a bearing 4; and a chuck head 5 fixed to the upper end of the spindle 3 for mounting and chucking the recording disk 1 to be inspected. The chucked recording disk 1 is rotated by the drive motor 2, and the loaded head 6 floats by a minute height δh due to the airflow generated by the rotation of the recording disk 1 as shown in FIG. .
【０００３】上記の回転機構は、軸受け４が塵埃を発生
すると記録ディスク１が汚染されて好ましくないので、
軸受け４にはエア軸受けが使用されている。図５により
エア軸受け４の構成と動作を説明する。(a) においてエ
ア軸受け４は、スピンドル３の外径よりやや大きい内径
を有するシリンダ41と、その内部に設けた図示の形状の
エア通路42よりなる。(b) において、シリンダ41の外側
面の４箇所よりエア通路42に対してエアＡi を圧入する
と、これがスピンドル３に吹きつけられ、矢印ＡO のよ
うに上方と下方に流出する。この吹きつけにより、(c)
に示すように分布した押圧力Ｐが発生して、スピンドル
３は対称的に押圧されて支持される。この場合、スピン
ドル３は回転中と停止中にかかわらずつねに支持され、
またエアＡi には塵埃の無いクリーンエアが使用されて
いる。The above rotating mechanism is not preferable because the recording disk 1 is contaminated when the bearing 4 generates dust.
An air bearing is used for the bearing 4. The configuration and operation of the air bearing 4 will be described with reference to FIG. 3A, the air bearing 4 comprises a cylinder 41 having an inner diameter slightly larger than the outer diameter of the spindle 3 and an air passage 42 having a shape shown in FIG. In (b), when air Ai is pressed into the air passage 42 from four places on the outer surface of the cylinder 41, the air Ai is blown to the spindle 3 and flows upward and downward as indicated by the arrow AO . By this spraying, (c)
A pressing force P distributed as shown in FIG. 4 is generated, and the spindle 3 is symmetrically pressed and supported. In this case, the spindle 3 is always supported regardless of whether it is rotating or stopped.
The clean air free of dust is used for the air A i.
【０００４】[0004]
【発明が解決しようとする課題】さて、最近における記
録ディスクは小型化が進み、インチサイズは３．５、
３．２５、１．８などがあり、近く１．３インチが現れ
る趨勢である。また検査においては、これらの小型ディ
スクは、例えば１８００ｒｐｍまたは３６００ｒｐｍの
高速度で回転される。これに対する回転機構において
は、スピンドル３の振動が問題となる。すなわち、ディ
スクの小型化に対応してスピンドル３は直径が小さくな
って剛性が弱くなり、また軸受け４も小型化されて支持
力が弱小なため、スピンドル３を高速回転すると横振れ
振動が発生してディスク１も振動する。小型ディスクの
場合は、浮上高δｈは、０．０１５または０．０２５μ
ｍの微小であり、ディスク１の僅かな振動でも、浮上高
δｈが変動して検査が良好になされない。なお留意すべ
きこととして、ディスク１はスピンドル３が停止中でも
安定に保持されることが必要であり、もし不安定である
とディスク１とヘッド６とが無用に摺り合って両者が傷
付く恐れがある。この発明は上記に鑑みてなされたもの
で、小型ディスクを装着したスピンドルが高速回転中に
発生する振動を防止し、これが停止中でも安定に支持で
きる、複合型の軸受けを提供することを目的とする。By the way, recent recording disks have been miniaturized, and the inch size has become 3.5 inches.
3.25, 1.8, etc., and the tendency is for 1.3 inches to appear soon. In the inspection, these small disks are rotated at a high speed of, for example, 1800 rpm or 3600 rpm. In the rotation mechanism for this, vibration of the spindle 3 becomes a problem. That is, the spindle 3 is reduced in diameter and rigidity is reduced in accordance with the miniaturization of the disk, and the bearing 4 is also reduced in size and has a small supporting force. The disk 1 also vibrates. In the case of a small disk, the flying height δh is 0.015 or 0.025μ.
m, and even if the disk 1 is slightly vibrated, the flying height δh fluctuates and the inspection is not performed well. It should be noted that the disc 1 needs to be stably held even when the spindle 3 is stopped. If the disc 1 is unstable, the disc 1 and the head 6 may be unnecessarily rubbed and both may be damaged. is there. The present invention has been made in view of the above, and an object of the present invention is to provide a composite type bearing that prevents a spindle mounted with a small disk from generating vibration during high-speed rotation and can stably support the spindle even when the spindle is stopped. .
【０００５】[0005]
【課題を解決するための手段】この発明はディスク回転
機構の複合型軸受けであって、スピンドルの外周にエア
を噴射して、回転と停止にかかわらずスピンドルを支持
するエア軸受けと、スピンドルの外周に対して適当なギ
ャップをなして設けたシリンダ、スピンドルの外周に形
成され、円周方向に鋸歯状をなす複数の傾斜面、および
ギャップに充填されたオイルよりなり、スピンドルの回
転によりオイルが発生する押圧力により、スピンドルを
支持するオイル式の動圧軸受けとを併用し、かつ、動圧
軸受けの両端に設けられ、オイルの散出を防止する磁性
流体シールとにより構成される。SUMMARY OF THE INVENTION The present invention relates to a composite bearing for a disk rotating mechanism, wherein an air bearing for injecting air to the outer periphery of a spindle to support the spindle regardless of rotation or stop, and an outer periphery of the spindle. The cylinder consists of a plurality of inclined surfaces formed on the outer periphery of the spindle, forming a sawtooth in the circumferential direction, and oil filled in the gap. Oil is generated by rotation of the spindle. With the use of an oil-type dynamic pressure bearing that supports the spindle, the magnetic fluid seal is provided at both ends of the dynamic pressure bearing to prevent oil from escaping.
【０００６】[0006]
【作用】上記の複合型軸受けにおいては、オイル式の動
圧軸受けは、スピンドルの外周に設けたシリンダと、ス
ピンドルの外周に設けた鋸歯状の複数の傾斜面との間の
ギャップに充填されたオイルは、スピンドルの高速回転
により強い押圧力を発生し、スピンドルを強力に支持す
るので振動の発生が防止されて欠陥検査が安定になされ
る。ただし、動圧軸受けは回転中のみに押圧力を発生
し、停止中は発生しない。これに対して、エア軸受けは
スピンドルの外周に噴射したエアにより、回転中と停止
中を問わずスピンドルを支持するので、停止中でもディ
スクは安定に支持されて前記の問題が生じない。また、
動圧軸受けのギャップに充填されたオイルは、両端に設
けた磁性流体シールにより散出が防止されてオイルミス
トが発散しないのでディスクが汚染される恐れがない。In the above composite type bearing, the oil type dynamic pressure bearing is filled in a gap between a cylinder provided on the outer periphery of the spindle and a plurality of sawtooth-shaped inclined surfaces provided on the outer periphery of the spindle. The oil generates a strong pressing force due to the high-speed rotation of the spindle and strongly supports the spindle, so that the generation of vibration is prevented and the defect inspection is stably performed. However, the dynamic pressure bearing generates a pressing force only during rotation, and does not occur during stoppage. On the other hand, the air bearing supports the spindle regardless of whether it is rotating or stopped by the air injected to the outer periphery of the spindle, so that the disk is stably supported even during the stop, and the above-described problem does not occur. Also,
The oil filled in the gap of the dynamic pressure bearing is prevented from being scattered by the magnetic fluid seals provided at both ends and no oil mist is scattered, so that there is no possibility that the disk is contaminated.
【０００７】[0007]
【実施例】図１〜図３はこの発明の一実施例を示し、図
１は複合型軸受けの構成図、図２は動圧軸受け７の構成
と動作の説明図、図３は磁性流体シール８の動作説明図
である。図１において、複合型軸受けは、２組のエア軸
受け４と、その中間に設けたオイル式の動圧軸受け７、
および動圧軸受け７に対する磁性流体シール８よりな
る。ただし、エア軸受け４は前記した図５(a) のものと
同一である。図２(a) において、動圧軸受け７は、シリ
ンダ71と、スピンドル３の外周面に円周方向に形成され
た鋸歯状をなす複数の傾斜面72、およびスピンドル３と
シリンダ71のギャップＧに充填されたオイルＯi とによ
り構成される。(b) により動圧軸受け７の動作を説明す
る。スピンドル３を矢印Ｃの方向に回転すると、オイル
Ｏi は、各傾斜面72により漸次に圧縮されてスピンドル
３2 を押圧し、段差Ｄの位置で圧力は低下する。複数の
傾斜面72は対称的に設けてあるので、スピンドル３は均
等に押圧されて支持される。このオイルＯi の押圧力は
スピンドル３の回転速度に依存するので、高速回転する
とエア軸受け４の押圧力に比べて非常に強い押圧力を発
生する。これにより小型ディスクに対する弱い剛性のス
ピンドル３が高速回転しても振動が発生せず、これに装
着された記録ディスク１は安定して検査される。また停
止中のスピンドル３は２組のエア軸受け４により安定に
支持されて問題が生じない。1 to 3 show one embodiment of the present invention. FIG. 1 is a structural view of a composite bearing, FIG. 2 is an explanatory view of the structure and operation of a dynamic pressure bearing 7, and FIG. 3 is a magnetic fluid seal. 8 is an operation explanatory diagram of FIG. In FIG. 1, a composite type bearing includes two sets of air bearings 4 and an oil type dynamic pressure bearing 7 provided therebetween.
And a magnetic fluid seal 8 for the dynamic pressure bearing 7. However, the air bearing 4 is the same as that shown in FIG. In FIG. 2A, the dynamic pressure bearing 7 includes a cylinder 71, a plurality of inclined surfaces 72 formed in a circumferential direction on an outer peripheral surface of the spindle 3, and a gap G between the spindle 3 and the cylinder 71. constituted by a filled oil O i. The operation of the dynamic pressure bearing 7 will be described with reference to FIG. When the spindle 3 is rotated in the direction of arrow C, the oil Oi is gradually compressed by the inclined surfaces 72 and presses the spindle 32, and the pressure decreases at the position of the step D. Since the plurality of inclined surfaces 72 are provided symmetrically, the spindle 3 is uniformly pressed and supported. Since the pressing force of the oil O i depends on the rotation speed of the spindle 3, a very high pressing force is generated as compared with the pressing force of the air bearing 4 when rotating at high speed. As a result, even when the spindle 3 having a low rigidity with respect to the small disk rotates at high speed, no vibration occurs, and the recording disk 1 mounted on the spindle 3 is inspected stably. In addition, the stopped spindle 3 is stably supported by the two sets of air bearings 4 and no problem occurs.
【０００８】次に図３により磁性流体シール８の構成と
作用を説明する。磁性流体シール８は、動圧軸受け７の
シリンダ71の両端に接着され、それぞれの先端がスピン
ドル３の外周面に接近したＮ極リング81とＳ極リング8
2、および両リング81,82 の先端に吸着された磁性流体8
3とにより構成される。両リング81,82 とスピンドル３
により一点鎖線で示す磁界Ｍが生じ、磁性流体83は両リ
ング81，82の先端の磁界Ｍに吸着されて保持され、動圧
軸受け７のオイルＯi をシールしてその散出が防止され
るので、オイルミストによるディスク１の汚染の恐れが
ない。なお上記の実施例は、１組の動圧軸受け７と、そ
の両側に２組のエア軸受け４を設けたものであるが、エ
ア軸受け４を１組とし、その両側に２組の動圧軸受け７
を設けて構成してもよい。Next, the structure and operation of the magnetic fluid seal 8 will be described with reference to FIG. The magnetic fluid seals 8 are bonded to both ends of the cylinder 71 of the dynamic pressure bearing 7, and the N-pole ring 81 and the S-pole ring 8, each end of which is close to the outer peripheral surface of the spindle 3.
2 and the magnetic fluid adsorbed on the tips of both rings 81 and 82
And 3. Both rings 81,82 and spindle 3
Magnetic field M shown by a dashed line occurs, the magnetic fluid 83 is held by being adsorbed to the magnetic field M of the tip of the rings 81 and 82, the Chide is prevented by sealing the oil O i of the dynamic pressure bearing 7 by Therefore, there is no risk of contamination of the disk 1 by oil mist. In the above embodiment, one set of the dynamic pressure bearing 7 and two sets of the air bearings 4 are provided on both sides of the dynamic pressure bearing 7. However, one set of the air bearing 4 and two sets of the dynamic pressure bearings on both sides are provided. 7
May be provided.
【０００９】[0009]
【発明の効果】以上の説明のとおり、この発明の複合型
軸受けによれば、回転機構のスピンドルは、オイル式の
動圧軸受けにより強力に支持されて振動が発生せず、こ
れに装着された記録ディスクは安定に高速回転して検査
され、停止中はエア軸受けにより安定に支持され、ま
た、磁性流体シールにより動圧軸受けよりのオイルの散
出が防止されてオイルミストを発散しないもので、小型
の記録ディスクの欠陥検査の信頼性の向上に寄与するも
のである。As described above, according to the composite type bearing of the present invention, the spindle of the rotating mechanism is strongly supported by the oil-type dynamic pressure bearing and does not generate vibration, and is mounted on the spindle. The recording disk is inspected by rotating stably at high speed, while it is stopped, it is stably supported by the air bearing, and the magnetic fluid seal prevents oil from escaping from the dynamic pressure bearing and does not emit oil mist. This contributes to improving the reliability of defect inspection of a small recording disk.
【図１】図１はこの発明の複合型軸受けの一実施例の構
成図である。FIG. 1 is a configuration diagram of an embodiment of a composite bearing according to the present invention.
【図２】図２はオイル式動圧軸受けの構成と動作の説明
図であって、(a)は、動圧軸受けの断面図、(b)は、その
動作の説明図である。FIGS. 2A and 2B are explanatory views of the configuration and operation of an oil-type dynamic pressure bearing. FIG. 2A is a cross-sectional view of the dynamic pressure bearing, and FIG. 2B is an explanatory view of the operation.
【図３】図３は磁性流体シールの構成と動作の説明図で
ある。FIG. 3 is an explanatory diagram of a configuration and operation of a magnetic fluid seal.
【図４】図４はディスク検査装置の回転機構の構成図で
あって、(a)は、チャックヘッドの説明図、(b)は、浮動
状態の説明図である。FIGS. 4A and 4B are configuration diagrams of a rotation mechanism of the disk inspection device, wherein FIG. 4A is an explanatory diagram of a chuck head, and FIG. 4B is an explanatory diagram of a floating state.
【図５】図５はエア軸受けの構成と動作の説明図であっ
て、(a)は、エア軸受けの縦断面図、(b)は、その断面
図、(c)は、その動作の説明図である。5A and 5B are explanatory diagrams of the configuration and operation of the air bearing, wherein FIG. 5A is a longitudinal sectional view of the air bearing, FIG. 5B is a sectional view thereof, and FIG. FIG.
１…磁気ディスクまたは光ディスクなどの記録ディス
ク、２…駆動モータ（Ｍ）、３…スピンドル、４…エア
軸受け、41…シリンダ、42…エア通路、５…チャックヘ
ッド、６…磁気ヘッドまたは光ヘッド、７…オイル式動
圧軸受け、71…シリンダ、711 …内周面、72…回転軸、
721 …傾斜面、 ８…磁性流体シール、81…Ｎ極リン
グ、82…Ｓ極リング、83…磁性流体、Ａi …エア、Ｏi
…オイル、Ｍ…磁界。DESCRIPTION OF SYMBOLS 1 ... Recording disk, such as a magnetic disk or an optical disk, 2 ... Drive motor (M), 3 ... Spindle, 4 ... Air bearing, 41 ... Cylinder, 42 ... Air passage, 5 ... Chuck head, 6 ... Magnetic head or optical head, 7 ... oil type dynamic pressure bearing, 71 ... cylinder, 711 ... inner peripheral surface, 72 ... rotating shaft,
721: inclined surface, 8: magnetic fluid seal, 81: north pole ring, 82: south pole ring, 83: magnetic fluid, Ai : air, Oi
... oil, M ... magnetic field.
Claims (1)
て高速回転する回転機構において、該スピンドルの外周
にエアを噴射して、回転と停止にかかわらず該スピンド
ルを支持するエア軸受けと、該スピンドルの外周に対し
て適当なギャップをなして設けたシリンダ、該スピンド
ルの外周に形成され、円周方向に鋸歯状をなす複数の傾
斜面、および該ギャップに充填されたオイルよりなり、
該スピンドルの回転により該オイルが発生する押圧力に
より、該スピンドルを支持するオイル式の動圧軸受けと
を併用し、かつ、該動圧軸受けの両端に設けられ、該オ
イルの散出を防止する磁性流体シールとにより構成され
たことを特徴とする、ディスク回転機構の複合型軸受
け。An air bearing for ejecting air to the outer periphery of a spindle and supporting the spindle regardless of rotation or stop, in a rotating mechanism for mounting a small recording disk on a spindle and rotating at a high speed; A cylinder provided with an appropriate gap with respect to the outer circumference of the cylinder, a plurality of inclined surfaces formed on the outer circumference of the spindle and having a sawtooth shape in the circumferential direction, and oil filled in the gap,
Due to the pressing force generated by the rotation of the spindle, the oil is used in combination with an oil-type dynamic pressure bearing that supports the spindle, and is provided at both ends of the dynamic pressure bearing to prevent the oil from scattering. A composite bearing for a disk rotating mechanism, comprising a magnetic fluid seal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07096077A JP3137171B2 (en) | 1995-03-29 | 1995-03-29 | Composite bearing with disk rotation mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07096077A JP3137171B2 (en) | 1995-03-29 | 1995-03-29 | Composite bearing with disk rotation mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08270650A JPH08270650A (en) | 1996-10-15 |
| JP3137171B2 true JP3137171B2 (en) | 2001-02-19 |
Family
ID=14155343
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP07096077A Expired - Fee Related JP3137171B2 (en) | 1995-03-29 | 1995-03-29 | Composite bearing with disk rotation mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3137171B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200847589A (en) * | 2007-05-31 | 2008-12-01 | Delta Electronics Inc | Motor and magnetic oil seal structure thereof |
-
1995
- 1995-03-29 JP JP07096077A patent/JP3137171B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH08270650A (en) | 1996-10-15 |
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