JP3136955B2 - Angular velocity detector - Google Patents

Angular velocity detector

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Publication number
JP3136955B2
JP3136955B2 JP07175755A JP17575595A JP3136955B2 JP 3136955 B2 JP3136955 B2 JP 3136955B2 JP 07175755 A JP07175755 A JP 07175755A JP 17575595 A JP17575595 A JP 17575595A JP 3136955 B2 JP3136955 B2 JP 3136955B2
Authority
JP
Japan
Prior art keywords
angular velocity
diaphragm
driving
velocity detecting
pedestal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP07175755A
Other languages
Japanese (ja)
Other versions
JPH0926322A (en
Inventor
和彦 溝尻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP07175755A priority Critical patent/JP3136955B2/en
Publication of JPH0926322A publication Critical patent/JPH0926322A/en
Application granted granted Critical
Publication of JP3136955B2 publication Critical patent/JP3136955B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、カーナビゲーション装
置などに利用し、搭載した移動体(車両)の角速度を検
出する角速度検出装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an angular velocity detector for detecting the angular velocity of a moving object (vehicle) mounted on a car navigation system.

【0002】[0002]

【従来の技術】従来、振動型の角速度検出装置は音叉又
は複雑な構造体であり、高精度のものが用いられてい
る。
2. Description of the Related Art Conventionally, a vibration type angular velocity detecting device is a tuning fork or a complicated structure, and a high-precision one is used.

【0003】図3は、このような従来の角速度検出装置
の構成を示す斜視図である。図3において、この例は、
台座100を支持棒102で固定している。そして、音
叉型振動子104は二枚の駆動用振動子104a,10
4bをベースブロック103を挟んで接合し、さらに、
検出用振動子106a,106bを駆動用振動子104
a,104bの上部かつ90度でずらして配置してい
る。駆動用振動子104a,104bには駆動用圧電素
子105a,105bが取り付けられている。また、検
出用振動子106a,106bには検出用圧電素子10
7a,107bが取り付けられている。駆動用圧電素子
105a,105b及び検出用圧電素子107a,10
7bは、それぞれに端子101a,101b,101
c,101d,101e,101fと図示しない接続線
で結線されている。端子101a〜101fは台座10
0の下部から突出し、図示しない外部回路基板と接続さ
れる。この端子101a〜101fの二つに供給された
駆動信号によって、駆動用圧電素子105a,105b
が励振されて駆動用振動子104a,104bが振動す
る。
FIG. 3 is a perspective view showing the structure of such a conventional angular velocity detecting device. In FIG. 3, this example is:
The pedestal 100 is fixed by a support bar 102. The tuning fork vibrator 104 includes two driving vibrators 104a and 104a.
4b with the base block 103 interposed therebetween.
The detecting oscillators 106a and 106b are connected to the driving oscillator 104.
a, 104b and are shifted by 90 degrees. Driving piezoelectric elements 105a and 105b are attached to the driving vibrators 104a and 104b. Further, the detecting piezoelectric elements 10a are attached to the detecting vibrators 106a and 106b.
7a and 107b are attached. Driving piezoelectric elements 105a, 105b and detecting piezoelectric elements 107a, 107
7b are terminals 101a, 101b, 101, respectively.
c, 101d, 101e, and 101f are connected by connection lines (not shown). Terminals 101a to 101f are pedestals 10
0 and is connected to an external circuit board (not shown). Drive signals supplied to two of the terminals 101a to 101f are used to drive the piezoelectric elements 105a and 105b.
Are excited, and the driving vibrators 104a and 104b vibrate.

【0004】以上のように構成された角速度検出装置に
ついて、以下にその動作について説明する。
[0004] The operation of the angular velocity detecting device configured as described above will be described below.

【0005】図4は駆動用振動子104a,104bの
動作状態を示す斜視図である。図4において、駆動用振
動子104a,104bは、互いに中心軸Pに近づいた
り、離れたりする振動を行う。これによって検出用振動
子106a,106bも互いに中心軸Pに対して近づい
たり、離れたりする振動を行う。この振動中に、この装
置が角速度ωで回転すると、そのコリオリ力が検出用振
動子106a,106bの部材平面に対し垂直方向に次
式(1)で示すように発生する。
FIG. 4 is a perspective view showing the operating state of the driving vibrators 104a and 104b. In FIG. 4, the driving vibrators 104a and 104b vibrate toward and away from the central axis P. Accordingly, the detection vibrators 106a and 106b also vibrate toward and away from the central axis P. If the apparatus rotates at an angular velocity ω during this vibration, the Coriolis force is generated in the direction perpendicular to the member plane of the detecting vibrators 106a and 106b as shown by the following equation (1).

【0006】 F=2mvω …(1) このコリオリ力によって検出用振動子106a,106
bは、この部材平面に対して垂直方向にたわむことにな
る。このたわみによって検出用振動子106a,106
b上の検出用圧電素子107a,107bに電荷が発生
し、この電荷の出力に対する信号処理を行う。
F = 2mvω (1) The detecting vibrators 106a and 106 are generated by the Coriolis force.
b will bend in a direction perpendicular to this member plane. Due to this deflection, the detecting vibrators 106a, 106
Electric charges are generated in the detecting piezoelectric elements 107a and 107b on the line b. Signal processing is performed on the output of the electric charges.

【0007】図5はこのような信号処理を行う信号処理
回路を示すブロック図である。図5において、検出用圧
電素子107a,107bの電荷をチャージ増幅器15
0で増幅して、電圧変化に変換し、同期検波回路151
で励振の信号成分を除去し、さらにオフセット調整回路
152、レベル調整回路153、ローパスフィルタ(L
PF)154を通じて不要の信号成分を除去し、かつ、
規定の出力感度に調整を行うことによって、角速度ωが
得られる。また、励振振動検出用チャージ増幅器155
によって、駆動された音叉部の振動を、駆動用圧電素子
105a,105bの一方から検出し、AGC(自動利
得調整回路)156で一定レベルの駆動信号を生成し、
ドライブ回路157を通じて、駆動用圧電素子105
a,105bの他方に出力する。すなわち、フィードバ
ック制御によって振動を一定に保持している。
FIG. 5 is a block diagram showing a signal processing circuit for performing such signal processing. In FIG. 5, charges of the detection piezoelectric elements 107a and 107b are
The signal is amplified by 0, converted into a voltage change, and output from the synchronous detection circuit 151.
To remove the excitation signal component, furthermore, an offset adjustment circuit 152, a level adjustment circuit 153, and a low-pass filter (L
PF) 154 to remove unnecessary signal components, and
By adjusting the output sensitivity to a specified value, the angular velocity ω can be obtained. Also, the charge amplifier 155 for detecting the excitation vibration
As a result, the vibration of the driven tuning fork is detected from one of the driving piezoelectric elements 105a and 105b, and an AGC (automatic gain adjustment circuit) 156 generates a driving signal of a constant level.
Through the drive circuit 157, the driving piezoelectric element 105
a and 105b. That is, the vibration is kept constant by the feedback control.

【0008】[0008]

【発明が解決しようとする課題】しかしながら、従来例
の角速度検出装置では、駆動用振動子104a,104
bと検出用振動子106a,106bとを正確な垂直位
置に配置しないと、正しい検出値が得られないため、高
精度の配置(組み立て)が要求される。また、音叉型の
場合、機械的な共振周波数によって駆動周波数が決定さ
れるため、組み立て後に、その周波数に設定するトリミ
ングが必要になる。すなわち、従来例の角速度検出装置
では、高精度の検出値が得られ難く、かつ、組み立てに
手間がかかってコストが嵩むという欠点がある。
However, in the conventional angular velocity detecting device, the driving vibrators 104a, 104
Unless b and the detecting transducers 106a and 106b are arranged at accurate vertical positions, a correct detection value cannot be obtained, so that high-precision arrangement (assembly) is required. In the case of the tuning fork type, since the driving frequency is determined by the mechanical resonance frequency, it is necessary to perform trimming to set the frequency after assembly. That is, the conventional angular velocity detecting device has a drawback that it is difficult to obtain a high-accuracy detected value, and that assembly is troublesome and costly.

【0009】本発明は、このような従来の問題を解決す
るものであり、高精度の検出値が確実に得られ、かつ、
組み立て作業が容易になって、そのコスト低減が可能に
なる優れた角速度検出装置の提供を目的とする。
The present invention has been made to solve such a conventional problem, and a highly accurate detection value can be obtained with certainty.
It is an object of the present invention to provide an excellent angular velocity detecting device in which an assembling operation is facilitated and the cost can be reduced.

【0010】[0010]

【課題を解決するための手段】上記目的を達成するため
に、請求項1記載の角速度検出装置は、台座と振動板と
の間に、厚みすべり振動モードを有すると共に、駆動信
号で台座側の表面と振動板側の表面がX軸方向かつ18
0度違った方向に振動する駆動用素子が接合して配置さ
れると共に、振動板の中心を対称にして設けられた振動
腕に、少なくとも一組の角速度検出用素子が接合して配
置され、かつ、台座と振動板とに供給される駆動信号に
よって、角速度検出用素子が振動板の重心付近を中心に
して、X・Y平面上の角度で反復回転して振動すると共
に、この振動中に角速度が加わった際のコリオリ力の作
用で振動腕がたわみ、このコリオリ力に対応した検出信
号を角速度検出用素子が出力する構成である。
According to a first aspect of the present invention, there is provided an angular velocity detecting apparatus having a thickness-shear vibration mode between a pedestal and a diaphragm, and a driving signal for detecting a vibration of the pedestal side. The surface and the surface on the diaphragm side are in the X-axis direction and 18
Driving elements that vibrate in directions different by 0 degrees are joined and arranged, and at least one set of angular velocity detecting elements are joined and arranged on a vibrating arm provided symmetrically with the center of the diaphragm, In addition, the drive signal supplied to the pedestal and the diaphragm causes the angular velocity detecting element to rotate repeatedly around the center of gravity of the diaphragm at an angle on the XY plane and to vibrate. The vibrating arm is bent by the action of the Coriolis force when an angular velocity is applied, and the angular velocity detecting element outputs a detection signal corresponding to the Coriolis force.

【0011】請求項2記載の角速度検出装置は、前記駆
動用素子及び角速度検出用素子として圧電素子を用いる
構成である。
According to a second aspect of the present invention, there is provided an angular velocity detecting device, wherein a piezoelectric element is used as the driving element and the angular velocity detecting element.

【0012】[0012]

【作用】このような構成により、請求項1,2記載の角
速度検出装置は、台座と振動板とに供給される駆動信号
によって、駆動用素子、例えば、駆動用圧電素子が振動
する。さらに、角速度検出用素子、例えば、角速度検出
用圧電素子が振動板の重心付近を中心にして、X・Y平
面上の角度で反復回転して振動する。この振動中に角速
度が加わった際のコリオリ力の作用で振動腕がたわみ、
角速度検出用素子がコリオリ力に対応した検出信号を出
力する。すなわち、振動体がコリオリ力発生方向と垂直
方向で振動し、従前の説明のように駆動用振動子と検出
用振動子とを正確に配置するような面倒かつ高精度の組
み立て作業が要求されなくなる。また、駆動信号の周波
数は、駆動用素子にのみ依存し、振動板の機械的共振に
左右されないため、従前の説明のように機械的な共振周
波数によって駆動周波数が決定されなくなり、その周波
数の調整を行うトリミングが不要になる。したがって、
高精度の検出値が確実に得られ、かつ、組み立て作業が
容易になる。
With such a configuration, in the angular velocity detecting device according to the first and second aspects, the driving element, for example, the driving piezoelectric element vibrates according to the driving signal supplied to the pedestal and the diaphragm. Further, the angular velocity detecting element, for example, the piezoelectric element for angular velocity detection vibrates by repeatedly rotating around the center of gravity of the diaphragm at an angle on the XY plane. The vibrating arm bends due to the action of Coriolis force when angular velocity is applied during this vibration,
The angular velocity detecting element outputs a detection signal corresponding to the Coriolis force. In other words, the vibrating body vibrates in the direction perpendicular to the direction in which the Coriolis force is generated, and the troublesome and high-precision assembly work for accurately arranging the driving vibrator and the detecting vibrator as described above is not required. . In addition, since the frequency of the drive signal depends only on the drive element and is not affected by the mechanical resonance of the diaphragm, the drive frequency is not determined by the mechanical resonance frequency as described above, and the frequency is adjusted. This eliminates the need for trimming. Therefore,
Highly accurate detection values can be reliably obtained, and the assembling work is facilitated.

【0013】[0013]

【実施例】以下、本発明の角速度検出装置の実施例を図
面を参照して詳細に説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the angular velocity detecting device according to the present invention will be described below in detail with reference to the drawings.

【0014】図1は本発明の角速度検出装置の実施例に
おける構成を示斜視図である。図1において、この例
は、台座200と振動板201の間に厚みすべり振動モ
ードを有する駆動用圧電素子202a,202bが接合
して配置されている。台座200と振動板201との間
に駆動信号を図示しない駆動回路から供給し、この入力
駆動信号が駆動用圧電素子202a,202bのそれぞ
れに印加されるように構成されている。また、角速度検
出用圧電素子203a,203b,203c,203d
が、それぞれ振動板201の振動腕の部分に接合されて
おり、前記の回転方向に対する反復振動(反復運動)を
行う。
FIG. 1 is a perspective view showing the configuration of an embodiment of an angular velocity detecting device according to the present invention. In FIG. 1, in this example, driving piezoelectric elements 202a and 202b having a thickness shear vibration mode are bonded and arranged between a pedestal 200 and a vibration plate 201. A drive signal is supplied from a drive circuit (not shown) between the pedestal 200 and the diaphragm 201, and the input drive signal is applied to each of the driving piezoelectric elements 202a and 202b. Also, the angular velocity detecting piezoelectric elements 203a, 203b, 203c, 203d
Are respectively joined to the vibrating arm portions of the diaphragm 201, and perform repetitive vibrations (repetitive motions) in the rotation direction.

【0015】次に、この実施例の動作について説明す
る。図2は図1に示す構成の動作状態を説明するための
図である。図1及び図2において、台座200と振動板
201との間に駆動信号を供給すると、この入力駆動信
号が駆動用圧電素子202a,202bのそれぞれに印
加され、この入力駆動信号の印加によって駆動用圧電素
子202a,202bが振動する。この振動は駆動用圧
電素子202a,202bの台座200側の表面と振動
板201側の表面がX軸方向かつ180度違った方向で
振動する。振動板201が、この板の重心付近を中心に
し、図2(a)(b)に示すようにX・Y平面上を微妙
な角度で反復回転して振動する。また、振動板201の
振動腕の部分に接合された角速度検出用圧電素子203
a〜203dが回転方向に対する反復振動を行う。この
反復振動によって、角速度検出用圧電素子203a,2
03dは、それぞれに振動板201のY軸方向の中心線
に対して、図2(a)に示すように角速度検出用圧電素
子203aが離れれば角速度検出用圧電素子203dも
離れるように振動する。また、図2(b)に示すように
角速度検出用圧電素子203aが近づけば角速度検出用
圧電素子203dも近づくように振動する。同様に角速
度検出用圧電素子203b,203cも、それぞれ振動
板201のY軸方向の中心線に対し、図2(b)に示す
ように角速度検出用圧電素子203bが離れれば、角速
度検出用圧電素子203cも離れように振動する。そし
て、図2(a)に示すように角速度検出用圧電素子20
3bが近づけば角速度検出用圧電素子203cも近づく
ように振動する。
Next, the operation of this embodiment will be described. FIG. 2 is a diagram for explaining an operation state of the configuration shown in FIG. 1 and 2, when a drive signal is supplied between the pedestal 200 and the diaphragm 201, the input drive signal is applied to each of the driving piezoelectric elements 202a and 202b, and the drive signal is applied by applying the input drive signal. The piezoelectric elements 202a and 202b vibrate. This vibration causes the surfaces of the driving piezoelectric elements 202a and 202b on the pedestal 200 side and the surface on the vibration plate 201 side to vibrate in directions different from each other in the X-axis direction by 180 degrees. As shown in FIGS. 2A and 2B, the diaphragm 201 vibrates while being repeatedly rotated at a delicate angle on the XY plane around the center of gravity of the plate. Further, an angular velocity detecting piezoelectric element 203 joined to the vibrating arm of the diaphragm 201
a to 203d perform repetitive vibration in the rotation direction. Due to this repetitive vibration, the piezoelectric elements 203a, 2
Numerals 03d vibrate so that, when the angular velocity detecting piezoelectric element 203a moves away from the center line of the diaphragm 201 in the Y-axis direction as shown in FIG. 2A, the angular velocity detecting piezoelectric element 203d also moves away. Further, as shown in FIG. 2B, when the angular velocity detecting piezoelectric element 203a approaches, the angular velocity detecting piezoelectric element 203d vibrates so as to approach. Similarly, when the angular velocity detecting piezoelectric elements 203b and 203c are separated from the center line of the diaphragm 201 in the Y-axis direction as shown in FIG. 203c also vibrates away. Then, as shown in FIG.
When 3b approaches, the piezoelectric element 203c for angular velocity detection also vibrates so as to approach.

【0016】この部分の角速度検出用圧電素子203a
〜203dの振動中に、角速度ωが加わると振動板20
1にコリオリ力が作用し、振動腕がたわむ。すなわち、
角速度検出用圧電素子203a〜203dの検出信号か
らコリオリ力を検出できるようになり、この検出信号を
演算処理して、その角速度ωが高精度に検出される。
The piezoelectric element 203a for detecting angular velocity in this portion
When the angular velocity ω is applied during the vibration of
Coriolis force acts on 1 and the vibrating arm bends. That is,
The Coriolis force can be detected from the detection signals of the angular velocity detecting piezoelectric elements 203a to 203d. This detection signal is subjected to arithmetic processing, and the angular velocity ω is detected with high accuracy.

【0017】なお、この実施例では振動板201に一つ
ずつ振動腕を設けているが、振動板201を複数枚設
け、かつ、角速度検出用圧電素子を配置し、高感度でコ
リオリ力を検出するようにも出来る。
In this embodiment, the vibrating plate 201 is provided with a vibrating arm one by one. However, a plurality of vibrating plates 201 are provided, and a piezoelectric element for detecting angular velocity is arranged to detect Coriolis force with high sensitivity. You can do it.

【0018】[0018]

【発明の効果】以上の説明から明らかなように、請求項
1,2記載の角速度検出装置によれば、台座と振動板と
に供給される駆動信号によって、駆動用圧電素子が振動
し、角速度検出用圧電素子が振動板の重心付近を中心に
して、X・Y平面上の角度で反復回転して振動する。こ
の振動中に角速度が加わった際のコリオリ力の作用で振
動腕がたわみ、角速度検出用素子がコリオリ力に対応し
た検出信号を出力する。すなわち、振動体がコリオリ力
発生方向と垂直方向で振動し、その正確な配置が要求さ
れなくなり、かつ、駆動信号の周波数が駆動用素子にの
み依存して、振動板の機械的共振に左右されないため、
調整を行うトリミングが不要になり、高精度の検出値が
確実に得られ、かつ、組み立て作業が容易になって、そ
のコスト低減が可能になるという効果を有する。
As is apparent from the above description, according to the angular velocity detecting device of the first and second aspects, the driving piezoelectric element vibrates by the driving signal supplied to the pedestal and the diaphragm, and the angular velocity The detection piezoelectric element vibrates while repeatedly rotating at an angle on the XY plane centering around the center of gravity of the diaphragm. The vibrating arm is bent by the action of the Coriolis force when the angular velocity is applied during the vibration, and the angular velocity detecting element outputs a detection signal corresponding to the Coriolis force. That is, the vibrating body vibrates in the direction perpendicular to the direction in which the Coriolis force is generated, and its precise arrangement is not required, and the frequency of the driving signal depends only on the driving element and is not affected by the mechanical resonance of the diaphragm. For,
There is an effect that trimming for adjustment is not required, a highly accurate detection value can be reliably obtained, and the assembling work is facilitated, and the cost can be reduced.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の角速度検出装置の実施例における構成
を示す斜視図
FIG. 1 is a perspective view showing the configuration of an embodiment of an angular velocity detecting device according to the present invention.

【図2】図1に示す構成の動作状態を示す平面図 (a)は角速度検出用圧電素子が離れる動作状態を示す
平面図 (b)は角速度検出用圧電素子が近づく動作状態を示す
平面図
2A is a plan view showing an operation state of the configuration shown in FIG. 1; FIG. 2A is a plan view showing an operation state in which the piezoelectric element for angular velocity detection is separated; FIG. 2B is a plan view showing an operation state in which the piezoelectric element for angular velocity detection approaches;

【図3】従来の角速度検出装置の構成を示す斜視図FIG. 3 is a perspective view showing a configuration of a conventional angular velocity detecting device.

【図4】図3に示す従来例の動作状態を示す斜視図FIG. 4 is a perspective view showing an operation state of the conventional example shown in FIG. 3;

【図5】従来例における信号処理回路を示すブロック図FIG. 5 is a block diagram showing a signal processing circuit in a conventional example.

【符号の説明】[Explanation of symbols]

200 台座 201 振動板 202a,202b 駆動用圧電素子 203a〜203d 角速度検出用圧電素子 200 pedestal 201 diaphragm 202a, 202b driving piezoelectric element 203a-203d angular velocity detecting piezoelectric element

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) G01C 19/56 G01P 9/04 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 7 , DB name) G01C 19/56 G01P 9/04

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 台座と振動板との間に、厚みすべり振動
モードを有すると共に、駆動信号で台座側の表面と振動
板側の表面がX軸方向かつ180度違った方向に振動す
る駆動用素子が接合して配置されると共に、前記振動板
の中心を対称にして設けられた振動腕に、少なくとも一
組の角速度検出用素子が接合して配置され、かつ、台座
と振動板とに供給される駆動信号によって、前記角速度
検出用素子が前記振動板の重心付近を中心にして、X・
Y平面上の角度で反復回転して振動すると共に、この振
動中に角速度が加わった際のコリオリ力の作用で振動腕
がたわみ、このコリオリ力に対応した検出信号を前記角
速度検出用素子が出力することを特徴とする角速度検出
装置。
1. A driving device having a thickness-shear vibration mode between a pedestal and a diaphragm, wherein the surface on the pedestal side and the surface on the diaphragm side vibrate in the X-axis direction and in directions different by 180 degrees by a drive signal. At least one set of angular velocity detecting elements is joined and arranged on a vibrating arm provided symmetrically with respect to the center of the diaphragm, and supplied to the pedestal and the diaphragm. The driving signal causes the angular velocity detecting element to rotate around the vicinity of the center of gravity of the diaphragm,
The vibrating arm is repeatedly rotated and vibrated at an angle on the Y plane, and the vibrating arm is bent by the action of the Coriolis force when the angular velocity is applied during the vibration. The angular velocity detecting element outputs a detection signal corresponding to the Coriolis force. An angular velocity detection device characterized in that:
【請求項2】 前記駆動用素子及び角速度検出用素子と
して圧電素子を用いることを特徴とする請求項1記載の
角速度検出装置。
2. The angular velocity detecting device according to claim 1, wherein a piezoelectric element is used as the driving element and the angular velocity detecting element.
JP07175755A 1995-07-12 1995-07-12 Angular velocity detector Expired - Fee Related JP3136955B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP07175755A JP3136955B2 (en) 1995-07-12 1995-07-12 Angular velocity detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07175755A JP3136955B2 (en) 1995-07-12 1995-07-12 Angular velocity detector

Publications (2)

Publication Number Publication Date
JPH0926322A JPH0926322A (en) 1997-01-28
JP3136955B2 true JP3136955B2 (en) 2001-02-19

Family

ID=16001692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP07175755A Expired - Fee Related JP3136955B2 (en) 1995-07-12 1995-07-12 Angular velocity detector

Country Status (1)

Country Link
JP (1) JP3136955B2 (en)

Also Published As

Publication number Publication date
JPH0926322A (en) 1997-01-28

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