JP3123563B2 - Photosensitive resin developer - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a developer for a photosensitive resin. More specifically, the present invention relates to an alkaline developer used for development when forming a relief image using a photosensitive resin composition. The alkaline developing solution according to the present invention can be used as a developing solution for a photoresist used for component processing in the field of electronics and plate making materials in the printing industry.

[0002]

2. Description of the Related Art Water, an aqueous alkaline solution or an organic solvent has been used as a developer for forming a relief image. However, organic solvents are not preferred from the viewpoint of improving the working environment. On the other hand, many high-performance photocurable resin compositions are insoluble in water, and the specific gravity of the alkaline developer is large. Many conventional alkaline developers are known, such as an aqueous solution of sodium carbonate, an aqueous solution of tetramethylammonium hydroxide, and an aqueous solution of monoethanolamine.

[0003]

However, the development performance of these developing solutions decreases as the development is repeated due to the dissolving resin composition. Further, in the case of a weakly alkaline developer, the developing performance decreases over time by absorbing carbon dioxide in the air. Therefore, it is necessary to always supply a new developer when using the conventional developer, and it cannot be said that the performance required for development is sufficiently satisfied.

[0004] As a result of intensive studies to solve such disadvantages, the present inventors have found that a mixture of an aqueous alkali solution and an aqueous acid or salt solution has extremely excellent developing performance. Reached. As is apparent from the above description, an object of the present invention is to provide an aqueous photosensitive resin developer having a small decrease in developing performance even when used in repeated development.

[0005]

That is, the present invention has the following configurations (1) and (2). (1) Charcoal with a concentration of 0.001 to 2.0 mol / L
Sodium acid aqueous solution and concentration of 0.001 to 2.0
And an aqueous solution of sodium bicarbonate
Developer for photosensitive resin. (2) The developer according to claim 2, wherein the weight ratio of the aqueous solution of sodium carbonate and the aqueous solution of sodium hydrogen carbonate is 1: 0.01 to 0.01: 1.

The aqueous solution of sodium carbonate used in the present invention
Of inorganic salts in aqueous solution of sodium and hydrogencarbonate
Is usually in the range of 0.001 mol / L to 2.0 mol / L, preferably 0.002 mol / L to 1.0 mol / L, and has a pH value suitable for the composition of the photosensitive resin composition. Prepare and use it.

The method of using the developing solution of the present invention is not particularly limited, and ordinary developing methods such as dipping and showering can be used.
The temperature at which the developer of the present invention is used is not particularly limited.
It is used in the range of 0 to 90 ° C. Of course, it is possible to use at other temperatures. In order to further improve the performance of the developer of the present invention, a surfactant such as sodium dodecylbenzenesulfonate and polyoxyethylene lauryl ether may be added. Further, a small amount of an antifoaming agent may be added.

The alkaline developer of the present invention has a small decrease in pH even when it is used repeatedly, maintains developing performance, and has a small fluctuation in developing time. For this reason, the exchange cycle of the developing solution is lengthened and the cost is reduced. Thus, the alkaline developer of the present invention is extremely useful.

Hereinafter, the present invention will be described in detail with reference to examples, but the present invention is not limited to these examples. The evaluation of the developing performance in Examples and Comparative Examples was carried out on a 6 cm × 6 cm glass substrate on one side by a 2.0 μm thick methyl methacrylate-methacrylic acid copolymer (weight ratio 70:30, polystyrene equivalent weight average molecular weight 70,000). The film was formed by measuring the time required for dissolving and removing the film having the film formed thereon using 200 ml of an alkaline developer and the pH of the alkaline developer after the dissolution and removal. As a developing method, a method of immersing a glass substrate in a developing solution and shaking was used. The temperature of the alkaline developer was kept constant at 30 ° C.

EXAMPLE 1 A 0.02 mol / liter aqueous solution of sodium carbonate 100
Milliliter and 100 ml of a 0.02 mol / liter aqueous sodium hydrogen carbonate solution were mixed to prepare an alkaline developer. The developing performance was evaluated using this. Table 1 shows the results.

Example 2 A 0.02 mol / liter aqueous solution of sodium carbonate 160
Milliliter and 40 ml of a 0.02 mol / liter aqueous sodium hydrogen carbonate solution were mixed to prepare an alkaline developer. The developing performance was evaluated using this. Table 1 shows the results.

[0012]

[0013]

[0014]

[Table 1]

COMPARATIVE EXAMPLE 1 A 0.02 mol / liter aqueous solution of sodium carbonate 200
The developing performance was evaluated using milliliters as an alkaline developer. Table 2 shows the results.

Comparative Example 2 A 0.002 mol / liter sodium carbonate aqueous solution 20
The developing performance was evaluated using 0 ml as an alkali developer. Table 2 shows the results.

[0017]

[Table 2]

[0018]

When the alkaline developer of the present invention is used,
Even if the development is repeated, the fluctuation of the pH value is small, the development can be repeated under a constant development condition, and the advantages of production such as the necessity of replacing and replenishing the developing solution are small. Also before
As described above, the present invention is an aqueous developer containing no organic solvent.
Is a major feature.

────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-2-2571 (JP, A) JP-A-2-2572 (JP, A) JP-A-5-119483 (JP, A) Revised Basics of Chemical Handbook 2nd ed., P. 1496, Maruzen Co., Ltd., issued on June 20, 1975 (58) Fields investigated (Int. Cl. ⁷ , DB name) G03F 7/32 H01L 21/027

Claims (2)

(57) [Claims] (1) a concentration of 0.001 to 2.0 mol / l;
Sodium carbonate aqueous solution and a concentration of 0.001-2.
A developer for photosensitive resin obtained by mixing 0 mol / L aqueous sodium hydrogen carbonate solution. 2. An aqueous solution of sodium carbonate and sodium bicarbonate.
The aqueous solution has a weight ratio of 1: 0.01 to 0.01: 1.
The developer for a photosensitive resin according to claim 1.