JP3122101B2 - Vibration control device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention can actively control and reduce vibration transmitted from a movable foundation to an object to be damped supported on the foundation. The present invention relates to a vibration control device, and more particularly, to a vibration control device configured to reduce vibration of a selected object among a plurality of objects.

[Conventional technology]

Reduces vibration and noise transmitted from power machinery to surroundings, reduces vibration transmission to loads in trucks and rail transport, and transmits to precision equipment such as electron microscopes and IC manufacturing equipment through installation bases In general, as a vibration-proof support method for blocking vibrations, a structure is used in which a vibration-proof rubber, an air spring, a metal spring, or another elastic body is used, and an attenuator (damper) is interposed as necessary. Things are used.

As this kind of vibration isolation method, a passive vibration isolation system consisting of a spring and an attenuator is simply mounted between the movable foundation that is the source of vibration and the object that is to be isolated. In addition to the vibration isolation method, recently, active vibration that detects vibration of a movable foundation or a vibration isolation target object, and actively applies reverse vibration to the vibration isolation target object based on the vibration to reduce the vibration. Control methods have also been proposed.

[Technical problem to be solved by the invention]

However, in the conventional active vibration control method, for example,
It is necessary to accurately determine the dynamic characteristic values of the actuator system or the anti-vibration support system for applying the vibration, and the control circuit becomes complicated. There were technical issues such as the loss of data.

Therefore, first, after taking measures against vibrations by using vibration-proof materials, in the frequency band of interest, reverse vibration is generated by passing the vibration waveform of the movable foundation through a digital filter to cancel the vibration of the vibration-proof object. This is applied to the vibration-proof object to reduce the vibration, that is, the feedforward by the digital filter is disclosed in Japanese Patent Application No. 62-241479 (Japanese Patent Application No. 62-241479) filed by the present applicant.
(Japanese Patent Application Laid-Open Publication No. 64-83742 on April 29).

However, the proposed digital filter method can be applied only to a single vibration-isolation target object, and simultaneously actively controls multiple objects supported via multiple vibration-isolation support systems. It was impossible to do.

In addition, in the case of only the feed-forward method, the control effect may be reduced when the dynamic characteristics of the vibration isolation support system and the actuator system change.

For this reason, in an automobile or the like considered to be a multi-degree-of-freedom system, it is difficult to cope with the vibration reduction only by the feedforward method using a digital filter for controlling a single vibration-proof object as described above. Met.

The present invention has been made in view of such a technical problem, and an object of the present invention is to simultaneously maximize the vibration of a plurality of vibration-proof objects supported on a movable foundation that is a vibration source. Another object of the present invention is to provide a vibration control device capable of actively reducing the vibration in real time.

[Means for solving the problem]

In order to achieve the above object, the vibration control device according to the present invention includes a plurality of vibration-proof objects supported in multiple stages or in parallel or in a combination thereof on a movable foundation as a vibration source. A monitor sensor for detecting vibration is attached, and a vibration sensor for detecting the vibration of the vibration source is attached to the vibration source side or the vibration-proof object closest to the vibration source. Calculate an error signal that is the sum of square errors from the zero level of the vibration detection signal, and by the adaptive control signal generation circuit, from the error signal and the vibration detection signal from the vibration sensor, using the least square error method, The filter coefficient of the digital filter is determined so that the error signal is minimized, and the filter coefficient of the digital filter is sequentially determined to the determined value. Create a control signal for changing come,
The actuator is driven by an output signal from the digital filter obtained by inputting the vibration detection signal from the vibration sensor to the digital filter whose filter coefficient is sequentially rewritten by the control signal, thereby generating vibration. By applying the vibration generated to each of the plurality of vibration-isolation target objects, the vibration transmitted from the vibration source to each of the vibration-isolation target objects is canceled.

〔Example〕

 Hereinafter, the present invention will be specifically described with reference to the drawings.

FIG. 1 shows a first embodiment in which the present invention is applied to an anti-vibration support structure in which two objects 1, 2 to be anti-vibration are supported on a movable foundation 10 in two steps by anti-vibration support systems 3, 4. It is a block diagram.

In FIG. 1, a spring is mounted on a movable foundation 10 which is a vibration source.
The object 1 is supported via an anti-vibration support system 3 consisting of k ₁ and an attenuator (damper) c _1, and on the object 1 via an anti-vibration support system 4 consisting of a spring k ₂ and an attenuator c _2. Thus, the object 2 is supported.

An actuator 6 is mounted between the two objects 1 and 2 so that they can be vibrated actively.

The actuator 6 is driven through an actuator driver (drive circuit) 8 by an output signal 7 of a digital filter 9 of the adaptive vibration control system 5.

A signal 13 obtained by amplifying a detection signal of a vibration sensor 11 mounted on a movable base 10 by an amplifier 12 is input to the digital filter 9.

The digital filter 9 can be configured as an FIR type, an IIR type, or a combination thereof, and the filter coefficient of the filter 9 is appropriately and successively adjusted in real time (in real time) by the control signal 15 output from the adaptive control circuit 14. ) Can be changed.

The control signal 15 corresponds to the object 1 on which the vibration sensors (monitor sensors) 16 and 17 selected as the vibration isolation targets are attached,
The digital filter 9 is controlled so as to select a filter coefficient that minimizes the sum of errors from the zero level of the vibration 2.

The adaptive control circuit 14 includes an error calculation circuit 18 and an adaptive control signal generation circuit 19.

Monitor sensors 16 and 17 are attached to the object whose vibration is to be reduced, that is, the objects 1 and 2 of the present embodiment. Signals from these sensors 16 and 17 are amplified by amplifiers 20 and 21, respectively, and sent to the adaptive control circuit 14. Is entered.

The signals 22, 23 from these amplifiers 20, 21 are firstly calculated by the error calculation circuit 18 from the zero level.
Is added.

The obtained error is sent to the next adaptive control signal generating circuit 19, and the digital filter 9 is designed to minimize this error.
A control signal 15 which rewrites the filter coefficient is generated by the generation circuit 19 and output to the digital filter 9.

As the error calculation circuit 18, for example, each input signal 2
A circuit having a function of taking the square error from the zero level of 2, 23 and calculating the sum thereof can be cited.

Further, a circuit having a function of calculating a comparison error with a certain waveform instead of an error from the zero level can be used.

In addition, other error criteria may be used instead of the root mean square error.

Furthermore, not only the error in the time domain of the signal, but also the FF
A method of calculating an error in the frequency domain using T (Fast Fourier Transform method) or the like can also be adopted.

In the adaptive control signal generating circuit 19, for example, the least square error method (LMS method) is used to determine the filter coefficient of the digital filter 9 so as to minimize the error calculated by the error calculating circuit 18. Can be.

Further, as a coefficient method for determining the filter coefficient, another calculation method can be used as long as it is an optimization calculation algorithm.

As described above, the adaptive control circuit 14 controls the object 1 and the object 2
The filter coefficient of the digital filter 9 is determined so as to minimize the vibration signal.

The above-described vibration control device shown in FIG. 1 employs an adaptive vibration control system 5 enclosed by a broken line in FIG.
It is configured to reduce the vibration of the two objects 1 and 2 that are supported in vibration isolation at the steps.

FIGS. 2, 3, and 4 are block diagrams each illustrating an anti-vibration support structure capable of reducing the vibration of a plurality of objects according to the present invention.

FIG. 2 shows the case of multi-stage parallelism, FIG. 3 shows the case of multi-stage parallelism,
FIG. 4 shows a case where the actuator is attached to the vibration-proof object itself in the structure of FIG.

Multistage or parallel as shown in FIG. 2-FIG. 4, or even a vibration damping supported system in multiple stages parallel, attached monitor sensors s _i to the object m _i to be reduced vibrations, and appropriate sites or objects actuator a _i is attached between, error calculation circuit of the monitor sensors s _i of the detection signal adaptive adaptive control circuit in the vibration control system 5 of the 14 (FIG. 1)
The signal detected by the vibration source sensor 11 on the movable base 10 is input to the digital filter 9 in the system 5 (FIG. 1).
By input to, it is possible to measure the vibration reduction of a plurality of objects m _i which has been preselected.

In this way the vibration control unit for reducing vibration of a plurality of objects m _i is an actuator driver 8 (Figure 1),
Digital filter 9 (FIG. 1) and adaptive control circuit 14
(FIG. 1) and the like may be used in plurality as needed.

Further, the actuator a _i may or may attach between objects m _i as shown in FIG. 1-FIG. 3, attached as an inertial mass actuators to the object m _i themselves to be vibration reduction as shown in FIG. 4 In some cases.

When a plurality of actuators _ai are used, a plurality of actuator drivers 8 (FIG. 1) are used.

FIG. 5 is a block diagram of a second embodiment in which a signal mixer 31 is used in place of the error calculation circuit 18 in the vibration control device of FIG.

In FIG. 5, the error calculation circuit 18 (FIG. 1) into which signals 22, 23 output from a plurality of monitor sensors 16, 17 through amplifiers 20, 21 are introduced, as shown in FIG. The signal mixer 31 can be replaced with a signal mixer 31 composed of a circuit that synthesizes the waveforms of the signals 22 and 23 input directly from 21.

The output signal from the signal mixer 31 is input to the adaptive control signal generation circuit 19, and the control signal 15 for rewriting the filter coefficient of the digital filter 9 is calculated.

FIG. 6 exemplifies the configuration of an FIR digital filter used as the adaptive digital filter 9 in FIGS.

In Figure 6, the filter coefficients W _0K, W _1K, by appropriately determining the ...... W _LK, is configured to convert the input signal X _K to a desired output signal Y _K.

In this case, the filter coefficients _{W 0K, W 1K, ...... W} LK are
By combining with an adaptive control signal generating circuit (adaptive algorithm) 19, the signal changes adaptively by the control signal 15, and converges to an optimum filter coefficient value while following a change in the system or environment.

The adaptive algorithm 19 can be constituted by, for example, an LMS (least mean square) method, an SER (sequential regression) method, a Newton method, a steepest descent method, etc., but the LMS method is the most efficient in practical use.

In the LMS method, the convergence speed and stability of the adaptive digital filter can be adjusted in a well-balanced manner by the gain factor (μ).

Further, the adaptive digital filter 9 as described above is used.
In the filter coefficients W _0K, W _1K, by fixing the ...... W _LK, can be transferred to the vibration control by the fixed digital filter method, also be configured to be appropriately switched between the fixed It is possible.

That is, the filter coefficients of the digital filter 9 in FIGS. 1 and 6 are constantly updated by the calculation in the adaptive control signal generation circuit 19, and the optimum output signal
Is obtained, but usually converges to a certain value. Therefore, when the filter coefficient becomes almost constant and the optimum value is obtained, the filter coefficient is fixed (moving to the fixed type). State).

The output signal from the monitor sensor s _i is increased by a change in the vibration environment, if the error amount becomes large, adopts a method that will then again be adapted to fixed coefficients (back to adaptive) You can also.

As described above, the digital filter 9 can be configured so as to be able to appropriately convert between the filter coefficient adaptive type and the filter coefficient fixed type according to the situation.

FIG. 7 is a block diagram of a third embodiment of the vibration control device according to the present invention having a configuration in which the vibration sensor 11 (FIG. 1) is not mounted on the movable base 10.

In FIG. 7, a vibration source sensor 11 is mounted on the object 1 as a monitor sensor, and a signal from the sensor 11 is input to both the digital filter 9 and the error calculation circuit 18.

A signal from a monitor sensor 17 attached to another object 2 is input to an error calculation circuit 18.

The adaptive control signal generation circuit 19 controls the digital filter 9 so that the error calculated by the error calculation circuit 18 is minimized.
The filter coefficient transmitted to the digital filter 9 is determined and sent to the digital filter 9 as a control signal 15.

The vibration source sensor 11 is mounted on the object 1, and a signal from the vibration source sensor 11 is output to the actuator driver 8 through the digital filter 9, and further output to the actuator 6 to control the vibration of the vibration-proof objects 1 and 2.

Therefore, in the vibration control device shown in FIG. 7, the digital filter 9 has a feedback element capable of performing feedback control using an adaptive filter for the vibration control of the lower object 1, The upper object 2 has a feedforward element, and can simultaneously and appropriately control the vibration of the upper and lower objects 1 and 2 to reduce the vibration.

As shown in FIGS. 2, 3, 4, and 5, the vibration control device having the configuration shown in FIG. 7 supports a plurality of objects _mi in multiple stages or in parallel, or performs multiple stages and parallel in multiple stages. The present invention can be simultaneously applied to various support configurations that are supported in combination.

Also in these cases, a plurality of actuators a _i , a plurality of actuator drivers 8, and a plurality of adaptive control circuits 14 are used as necessary.

The digital filter 9 in FIG.
In addition to the FIR type shown in the figure, either the IIR type or a combination of both can be used.

Also, the filter coefficient of the filter 9 can be appropriately controlled according to the vibration environment, such as switching from an adaptive variable type to a fixed type, or vice versa.

Further, in each of the embodiments shown in FIGS. 1 to 7, the vibration applied to the movable base 10 may be any of random vibration, periodic vibration, or impact vibration. It is effective against any applied vibration.

FIG. 8 is a block diagram showing a configuration in a case where the vibration control device according to the present invention is applied to a suspension system of an automobile.

In FIG. 8, a road surface 33 corresponds to the movable base 10 in FIG. 1, and the vibration of the vibration source 10 is transmitted to the front and rear non-contact road surface sensors 34 and 35 and the front and rear unsprung monitor sensors 36 and 37. , And these detection signals are input to the adaptive vibration control system 5.

Sprung weight of a portion to be reduce vibration automobile (vehicle body, such as the engine) m ₃ and unsprung weight (the axle, wheels, etc.) attached to the monitor sensor 38,39,36,37 to m _1, m _2,
The signals from these monitor sensors are input to the adaptive vibration control system 5, and the filter coefficients of the built-in digital filter 9 are determined in real time so that these signals (or errors from set values) are minimized. Is done.

Thus, the non-contact road surface sensor is
When a signal is input from the 34, 35, front and rear hydraulic actuators 41, 42 is driven through the hydraulic actuator driver 8, the inverse vibration is applied to the sprung mass m ₃ and unsprung weight m _1, m ₂ You.

With this exciting force, both the sprung weight and the unsprung weight of the vehicle are reduced with respect to the vibration propagating from the road surface 33, and the riding comfort and the maneuverability are improved.

In this case, even if the vibration state changes, the filter coefficient of the digital filter 9 is sequentially changed in real time in accordance with the change, and the adaptation can be performed so that the vibration is minimized in that state.

The road surface non-contact sensors 34 and 35 are usually mounted on an axle, and for example, an ultrasonic sensor, a laser sensor, or the like is used as the sensor depending on the situation.

Also, front and rear hydraulic actuators 41,
Reference numeral 42 is mounted in parallel or in series with the suspension springs k ₁ and k ₂ and the shock absorbers c ₁ and c _2, and is disposed between the unsprung weights m ₁ and m ₂ and the sprung weights m ₃ .

However, these actuators 41 and 42 can be mounted as inertial mass type actuators on the unsprung weights m ₁ and m ₂ themselves or on the sprung weights m ₃ itself if the vibration force can be obtained. .

Further, as the actuators 41 and 42, a pneumatic actuator by changing the internal pressure of the air spring can be used.

Further, the vibration control device according to the present invention is similarly applicable to a case where the engine is regarded as a vibration source and the engine vibration transmitted to the vehicle body is actively reduced.

FIG. 9 is a schematic diagram specifically showing the vibration control device of the vehicle suspension of FIG.

In FIG. 9, parts corresponding to the respective parts in FIG. 8 are indicated by the same numbers or symbols, and a detailed description thereof will be omitted.

In FIG. 9, the hydraulic systems such as the hydraulic actuators 41 and 42 can generally use hydraulic power used for power steering and the like.

The circuit of the adaptive vibration control system 5 is usually
It is compactly configured as one or two control circuit boards, and is driven using a vehicle-mounted battery as a power supply.

Although the configuration shown in FIG. 1 (first embodiment) is used in the example of application to the automobile suspension system shown in FIG. 8, when the road surface non-contact sensors 34 and 35 are not used, the configuration shown in FIG. ) Can be applied to a suspension system of an automobile.

In this case, the object 1 in FIG.
The object 2 corresponds to the sprung mass m ₃ of m ₁ and m ₂ .

The vibration sensor used in the present invention may be any type that detects vibration acceleration, vibration speed or vibration displacement, and any type of actuator such as hydraulic pressure, pneumatic pressure, electromagnetic force, and piezoelectric may be used depending on the application. Can be used.

In addition, as the actuator model, external energy (power) such as hydraulic pressure, pneumatic pressure, electromagnetic force, etc.
And the vibration or spring stiffness is changed by the voltage or current output through the actuator driver 8, which is mounted in parallel or in series with the anti-vibration support systems 3 and 4, such as an electrorheological fluid. There is a type in which an apparent damping force or a spring force generated is used as an actuator output (apparent vibration force) based on the following. Either type can be properly used.

The apparent excitation force discovered by a change in dynamic characteristics, such as the electrorheological fluid, is not limited to the configuration shown in FIG.
2, 3, 4, 5, and 7 can be used as an actuator. In the case of supporting an extremely simple single object in an anti-vibration manner, a movable base It can also be used as an actuator mounted between 10 and an object or an inertial mass type actuator mounted on the object itself.

FIG. 10, the seat of the present invention in a vehicle such as an automobile or aircraft, i.e., sprung mass (vehicle body) m ₂ on a spring k ₃ and is supported via a damper c ₃ sheets (weight
m ₃ ), the actuator a reverses vibration (control vibration)
FIG. 9 is a schematic diagram showing an application example in which vibration is reduced by applying a voltage.

FIG. 11 shows, instead of the seat m ₃ in FIG. 10, a cabin m ₃ supported via a cabin suspension consisting of a spring k ₃ and an attenuator c ₃ on the sprung mass m ₂ of the vehicle, FIG. 9 is a schematic diagram showing an application example in which a reverse vibration (control vibration) is applied by an actuator a to reduce the vibration.

By implementing the present invention in an anti-vibration support structure as shown in FIGS. 10 and 11, the tire system m ₁ from the road surface 10,
k _1, through c ₁ it is possible to reduce the vibration which is propagated to the sheet or cabin m _3.

FIG. 12 shows that in a car, the tire system k ₁ from the road surface 10,
c _1, together with the vibrations to be propagated to the vehicle body (weight sprung) m ₂ through m _1, an engine mounted on the vehicle body m ₂ k _3, c ₃該車from the engine m ₃ mounted through the body m ₂ the vibration isolating support structure when also reduced at the same time the vibration is propagated in a diagram schematically showing, by applying the vibration control apparatus according to the present invention structured as Fig. 12, transmitted to the vehicle body m ₂ Vibrations caused can be reduced.

In the vibration control apparatus in this case, the actuator a for applying a reverse oscillation (control oscillation) is mounted between the vehicle body m ₂ and the engine m _3.

As the actuator a in each of the application examples of FIGS. 10 to 12 described above, in addition to the actuator that uses hydraulic pressure, pneumatic pressure, or electromagnetic force that positively generates vibration,
An actuator of a dynamic characteristic variable type that generates an apparent control force using an electrorheological fluid, a magnetic fluid, or the like can also be used.

The mounting method of the actuators a, each vibration isolating support system k _i, or placed in parallel with the c _i, or the like attached to the vibration damping target object m _i themselves as inertial mass actuators, the desired The method can be implemented.

FIG. 13, the vibration control apparatus of FIG. 1, the image stabilization target object with respect to vibration acceleration ₀ of the movable foundation 10 in the case of not executing as executing vibration control adaptive according to the invention (X) (Y) is a graph showing the frequency characteristic of the response magnification of the vibration acceleration, (a) the response magnification of the object 1 in the lower | ₁ /
₀ | a, (B) the upper response magnification of the object 2 | _2/0 |
Are respectively shown.

From the graphs of FIGS. 13A and 13B, it can be seen that both the two objects 1 and 2 can obtain a large vibration reduction effect of 10 to 20 dB near the two resonance peaks of 2.2 Hz and 5 Hz.

FIG. 14 shows a time waveform of the vibration acceleration amplitude of each of the objects 1 and 2 when the adaptive vibration control according to the present invention is executed (X) and when it is not executed (Y) in the vibration control device of FIG. 3A is a graph showing the vibration acceleration amplitude of the object 1, and FIG. 3B shows the vibration acceleration amplitude of the object 2.

From the graphs (A) and (B) of FIG. 14, the vibration acceleration amplitude of each of the objects 1 and 2 is reduced to one third or less when the control is performed as compared with the case without the control. Was confirmed.

As is clear from the measurement results in FIGS. 13 and 14, by practicing the present invention, the vibrations of a plurality of objects to be damped can be reduced simultaneously and significantly, and the range of application is extremely wide. It has become possible to realize a wide vibration reduction device.

〔The invention's effect〕

As is apparent from the above description, according to the vibration control device of the present invention, the vibration control apparatus is provided on each of a plurality of vibration-proof objects supported in multiple stages or in parallel or in a combination thereof on a movable foundation as a vibration source. A monitor sensor for detecting the vibration of the target object is mounted, and a vibration sensor for detecting the vibration of the vibration source is mounted on the vibration source side or the vibration-isolation target object closest to the vibration source. An error signal which is a sum of a square error from a zero level of a vibration detection signal from the sensor is calculated, and an adaptive control signal generation circuit calculates a least square error method from the error signal and the vibration detection signal from the vibration sensor. The filter coefficient of the digital filter was determined such that the error signal was minimized, and the filter coefficient of the digital filter was determined. A control signal for sequentially rewriting is created, and the actuator is actuated by an output signal from the digital filter obtained by inputting the vibration detection signal from the vibration sensor to the digital filter whose filter coefficient can be sequentially rewritten by the control signal. Since the drive generates vibration and applies the vibration generated by the actuator to each of the plurality of vibration-proof objects, the vibration transmitted from the vibration source to each vibration-proof object is cancelled. From the error signal of the vibration detection signal of each vibration-proof object and the vibration detection signal of the movable base, using the least squares error method, while sequentially rewriting the filter coefficient of the digital filter so that the error signal is minimized, Based on an output signal obtained by inputting the vibration detection signal of the movable foundation to the digital filter. Vibration is applied to each vibration-isolation target object to cancel the propagation signal to the vibration-isolation target object. A vibration control device capable of actively reducing in real time is provided.

[Brief description of the drawings]

FIG. 1 is a block diagram showing the configuration of a first embodiment of a vibration control device according to the present invention, and FIG. 2 is a schematic configuration in a case where the present invention is applied to a plurality of objects which are supported in a multistage and parallel manner. FIG. 3 is a schematic diagram of a case where the present invention is applied to a plurality of objects supported in multiple stages of vibration isolation, and FIG.
FIG. 5 is a schematic configuration diagram showing a case where an actuator is attached to an object itself in the configuration shown in FIG. 5, FIG. 5 is a block diagram showing the configuration of a second embodiment of the vibration control device according to the present invention, and FIG. FIG. 7 is a schematic diagram illustrating the configuration of a digital filter shown in FIG. 7, FIG. 7 is a block diagram illustrating the configuration of a third embodiment of the vibration control device according to the present invention, and FIG. FIG. 9 is a block diagram showing the configuration of the suspension, FIG. 9 is a schematic diagram specifically showing the configuration of the automobile suspension shown in FIG. 8, and FIGS. 10, 11, and 12 show the vibration control device according to the present invention, respectively. FIG. 13 is a schematic view showing an application example implemented in a seat seat, a truck cabin suspension, and an engine mount of an automobile. FIG. 13 shows a vibration control according to the present invention in the vibration isolating support structure of FIG. FIG. 14 is a graph showing the frequency characteristics of the vibration response magnification of each object when the vibration control according to the present invention is performed and when the vibration control is not performed in the anti-vibration support structure of FIG. It is a graph which shows the time waveform of vibration acceleration amplitude. 1, 2,... (Vibration isolation target) object, 3, 4,.
5 ... Adaptive vibration control system, 6 ... Actuator, 9 ... Digital filter, 10 ... Movable foundation, 11 ...
… Vibration sensor (vibration source sensor), 14 …… Adaptive control circuit,
16, 17: Vibration sensor (monitor sensor), 18: Error calculation circuit, 19: Adaptive control signal generation circuit.

Continuation of the front page (56) References JP-A-58-221038 (JP, A) JP-A-61-211548 (JP, A) JP-A-61-228137 (JP, A) JP-A-62-288743 (JP) JP-A-3-146466 (JP, A) Patent 2617107 (JP, B2) Patent 2812441 (JP, B2) Patent 2890196 (JP, B2) Patent 3040562 (JP, B2) JP-B-5-50696 (JP) , B2) JP 7-40199 (JP, B2) Masaaki Mitani, "Digital Signal Processing Series Vol. 3, Digital Filter Design", first edition published April 20, 1987, Shokodo Co., Ltd., No. 15 ~ 27 The 35th Technical Seminar of the Acoustical Society of Japan, "Digital Signal Processing-Advanced Course" text, March 8-9, 1989, The Acoustical Society of Japan, pages 6-9, Pages 36-38 Heiken, Translated by Takebe Miki, "Introduction to Adaptive Filters," first published September 10, 1987, Hyundai Kogakusha, pp. 3-20, pp. 108-118 (58) Fields surveyed (Int. ⁷ , DB name) F16F 15/00-15/36

Claims (1)

(57) [Claims] 1. A monitor sensor for detecting vibration of a vibration-proof object is attached to each of a plurality of vibration-proof objects supported and supported in multiple stages or in parallel or in a combination thereof on a movable foundation as a vibration source, A vibration sensor for detecting vibration of the vibration source is attached to the vibration source side or a vibration-proof object closest to the vibration source, and a square error from a zero level of a vibration detection signal from each monitor sensor is provided by an error calculation circuit. An adaptive control signal generation circuit calculates an error signal, which is the sum of the error signal and a vibration detection signal from the vibration sensor, using a least squares error method to minimize the error signal. Generating a control signal for determining the filter coefficient of the filter and sequentially rewriting the filter coefficient of the digital filter to the determined value; An actuator is driven by an output signal from the digital filter obtained by inputting the vibration detection signal from the vibration sensor to the digital filter whose filter coefficient is sequentially rewritten by a control signal to generate vibration. A vibration control device, wherein the generated vibration is applied to each of the plurality of vibration-proof objects, thereby canceling the vibration transmitted from the vibration source to each of the vibration-proof objects.