JP3119054B2 - Floating abrasive polishing machine - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a floating-abrasive polishing apparatus, and more particularly to a floating-abrasive polishing apparatus suitable for detecting the flatness of an upper and lower platen.

[0002]

2. Description of the Related Art Conventionally, in a floating-abrasive polishing apparatus called a lapping apparatus, a disk having a work holding hole is used to correct the flatness of a polishing surface which is a lower surface of an upper surface plate and an upper surface of a lower surface plate. Instead of the planetary gear for polishing a workpiece, a disk-shaped planetary gear for correction called a correction carrier without a workpiece holding hole is used.

In this polishing apparatus, a disk-shaped correction carrier is arranged between an upper and lower surface plate, and a sun gear and a ring gear meshing with the correction carrier are rotated mutually, whereby
The correction carrier rotates, or rotates and revolves, and the polishing surfaces of the upper and lower platens are simultaneously polished by sliding between the upper and lower platens and the correction carrier.

In this case, a slurry-like abrasive obtained by mixing an abrasive with water or oil and liquefied is supplied between the upper and lower platens and the repair carrier, and the upper and lower platens of the upper and lower platens are cut by a cutting blade of the abrasive. By removing the projections from the polished surface, the polished surface is corrected and the flatness of the polished surface is regenerated.

[0005]

In a floating abrasive type polishing apparatus, various conditions must be satisfied in order to polish a work and to finish the flatness of the work with high accuracy. In particular, when the flatness of the polished surfaces of the upper and lower stools is deteriorated, the thickness variation of the work becomes large, and thus maintaining the flatness of the polished surfaces is an important factor.

However, in general, since the upper and lower platens of the floating abrasive type polishing apparatus are large and heavy, it takes a long time to measure the flatness of the polished surface, and an expensive measuring apparatus is required. there were. In addition, during the work of polishing the work, it is impossible to measure the flatness of the polished surface because the work and the planetary gears are in contact with the polished surfaces of the upper and lower platens while rotating. In addition, in order to correct the flatness of the polished surface, since the polished surface is polished by the polishing apparatus itself using the correction carrier, the correction carrier rotates and comes into contact with the polished surfaces of the upper and lower platens in the same manner as described above. During the correction, the flatness of the polished surface could not be measured. For this reason, there has been a problem that the timing for correcting the flatness of the polished surfaces of the upper and lower platens and the setting of the polishing time required for the correction have to rely on experience.

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems, and numerically detects the flatness of a polished surface during a work of polishing a work and a correction of the flatness of the polished surfaces of the upper and lower platens. Another object of the present invention is to provide a floating-abrasive polishing apparatus provided with a control device capable of automatically managing the flatness of a polished surface based on the detection data.

[0008]

For this reason, according to the present invention, a planetary gear provided with an upper and lower surface plate, a holding hole for holding a work, which is disposed between the upper and lower surface plate, meshes with the planetary gear. A sun gear and a ring gear, and by rotating at least one of the sun gear or the ring gear, the planetary gear rotates, or rotates and revolves, via the slurry-like abrasive grains, the workpiece and the upper and lower platens. In the floating abrasive type polishing apparatus for polishing the work by sliding, a vibration detecting means for detecting a vibration signal of the upper surface plate is provided near an inner periphery and an outer periphery of the upper surface plate, and the vibration detection is performed. The means is provided with first comparing means for comparing the vibration signals at the inner circumference and the outer circumference detected via the vibration detecting means. Further, the vibration detecting means, a vibration signal near the inner circumference and outer circumference of the upper surface plate detected through the vibration detection means, and a reference signal near the inner circumference and outer circumference of the upper surface plate, respectively, A second comparison means for comparing is provided.

[0009]

According to the present invention, vibration signals on the inner and outer circumferences of the upper platen are detected via the vibration detecting means, and the vibration signals on the inner and outer circumferences are compared. By comparing the signal with each of the reference signals, a change in the upper and lower platens due to deterioration of the flatness due to wear of the polished surfaces of the upper and lower platens is detected, and the normality or abnormality of the flatness of the polished surfaces of the upper and lower platens is detected. Can be detected.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A floating abrasive type polishing apparatus according to an embodiment of the present invention will be described with reference to FIGS. In the figure, the floating abrasive type polishing apparatus includes a polishing apparatus main body A and a control apparatus B. The polishing apparatus main body A includes a motor 1, a drive shaft 2, an upper platen 3, a planetary gear 4, a lower platen 5, intermediate gears 6 and 7, and a ring body 8.

A drive shaft 2 is fixed to a rotating shaft 1a of a motor 1 forming a part of the polishing apparatus main body A.
A sun gear 2a is integrally formed on the upper part of the sun gear 2, and the sun gear 2a is meshed with the planetary gear 4. The planetary gears 4 are disk-shaped gears made of a thin metal plate. In this embodiment, a total of four planetary gears 4 are arranged between the upper and lower stools 3 and 5. A plurality of holding holes 4 a are formed in the planetary gear 4, and a work W made of, for example, a rectangular parallelepiped ceramic, which is thicker than the planetary gear 4, is held in the holding holes 4 a.

A lower cylindrical surface of the drive shaft 2 is rotatably fitted in a center hole of the lower platen 5, and a drive gear 2 b meshing with the intermediate gear 6 is integrally formed at the lowermost end of the drive shaft 2. I have. The intermediate gear 6 meshes with a lower gear 8a of the ring body 8 via another intermediate gear 7, and these intermediate gears 6, 7 are rotatably supported by fixed portions 6a, 7a. Therefore, the ring 8 rotates in the same direction as the drive shaft 2. The lower platen 5 and the ring 8 are rotatably supported by supporting means (not shown).

The outer surface of the lower platen 5 is slidably fitted to the lower inner surface of the ring body 8, and the ring body 8 and the lower platen 5 are relatively rotatable. A ring gear 8b meshing with the planetary gear 4 is formed on the upper inner surface of the ring body 8, and the outer peripheral surface of the upper platen 3 is slidably fitted on the upper inner surface. Thus, the planetary gears 4 are formed by the upper and lower stools 3, 5 and the drive shaft 2 and the ring body 8.
Is substantially sealed, and a polishing apparatus main body A is formed.

When correcting the polished surfaces of the upper and lower platens,
A correction carrier (not shown) is used in place of the planetary gear 4 of the above-described example. The correction carrier is a disc-shaped gear for correcting the polished surface of the upper and lower platens made of a thin metal plate, and is not provided with a work holding hole as compared with the planetary gear 4. All other configurations except the correction carrier are the same as those in the above-described example.

Next, the control device B according to the present invention will be described. The control device B includes vibration detecting means 9 and 10, an amplifying means 11, and a comparing means 13.

Among these, vibration detecting means 9 and 10 comprising a vibration sensor for detecting vibration as a mechanical vibration signal, for example, are installed near the inner periphery and the outer periphery of the upper surface of the upper platen 3. The vibration detecting means 9 and 10 are connected to, for example, an amplifying means 11 composed of an amplifier, which amplifies the vibration signal detected by the vibration detecting means 9 and 10. Is connected to an analysis unit 12 which is, for example, an FFT (Fast Fourier Transform) analyzer. The analysis means 12 is connected to a comparison means 13 for comparing vibration signals between the vicinity of the inner periphery and the vicinity of the outer periphery of the upper surface of the upper stool 3, for example, comprising a computing device (CPU). Here, the comparison means 13 compares the vibration signals between the vicinity of the inner circumference and the vicinity of the outer circumference of the upper surface of the upper stool 3 with the first comparison means and the vicinity of the inner circumference or the outer circumference of the upper surface of the upper stool 3. It also serves as second comparing means for comparing the vibration signal with each reference signal.

The operation of the polishing apparatus having such a configuration will first be described with respect to the polishing apparatus main body A. When polishing the work W, the planetary gear 4 is placed on the lower platen 5, the work W is inserted through the holding hole 4a of the planetary gear 4, and the upper platen 3 is placed thereon, and Apply pressure. Then, slurry-like abrasive grains (not shown) are supplied to the supply holes 3 a of the upper stool 3. Here, when the motor 1 is started, the sun gear 2a rotates counterclockwise in FIG. 2 and the ring gear 8b rotates at a low speed in the same direction as the sun gear 2a, so that the planetary gear 4 rotates and revolves in a planetary motion. The upper and lower surfaces of the work W held by the planetary gear 4 slide on the upper and lower stools 3 and 5 and are polished by the slurry-like abrasive grains.

When the polishing surfaces of the upper and lower stools 3 and 5 are to be corrected, a correction carrier for correction is placed on the lower stool 5 instead of the above-described planetary gear 4, and the upper stool is fixed thereon. The board 3 is placed and pressurized at a constant pressure. Then, when the slurry-like abrasive grains are supplied and the motor 1 is started in the same manner as described above, the carrier for correction causes planetary motion of revolving and revolving, and the polishing surface that is the lower surface of the upper surface plate 3 and the upper surface of the lower surface plate 5 Then, it is polished by the slurry-like abrasive grains by sliding on the upper and lower surfaces of the correction carrier.

On the other hand, the work W
During the polishing operation, vibrations near the inner and outer circumferences of the upper stool 3 are detected as vibration signals via the respective vibration detecting means 9 and 10. The detected vibration signal is amplified via the signal amplifying means 11, and the amplified vibration signal is sent to the analyzing means 12, where the vibration degree is analyzed by frequency analysis. Upon receiving the data indicating the vibration degree, the first comparing means 13 compares the vibration degree near the inner periphery with the vibration degree near the outer periphery, and for example, detects a difference or a quotient of the vibration degrees which is set in advance. (The flatness of the polished surface of the upper and lower platens 3 and 5 reaches the limit from normal to abnormal).
It is determined that the flatness of the polishing surface is abnormal, and, for example, via a control panel (not shown) mounted on the polishing apparatus main body A,
The operation of the polishing apparatus main body A is automatically stopped.

Next, unlike the operation of automatically stopping the operation of the polishing apparatus main body A by judging an abnormality from the detected vibration signal, the flatness of the polishing surfaces of the upper and lower stools 3 and 5 is corrected. An operation of automatically stopping the operation of the polishing apparatus main body A by comparing the end of the modified polishing with a vibration signal and a reference value when polishing is described.

During the polishing operation for correcting the flatness of the polished surfaces of the upper and lower stools 3 and 5, vibrations near the inner and outer circumferences of the upper stool 3 are detected as vibration signals via respective vibration detecting means 9 and 10. I do. The detected vibration signal is transmitted to the signal amplifying unit 1
The amplified vibration signal is amplified through the
2 and the vibration degree is analyzed by frequency analysis. The first comparing means 13 receiving the data indicating the vibration degree
Then, the vibration degree near the inner circumference and the vibration degree near the outer circumference are compared, and for example, the difference or the quotient of the vibration degrees is set to a normal reference value (the plane of the polished surfaces of the upper and lower platens 3, 5). And the upper and lower stools 3,5
The flatness of the polishing surface is set to an ideal state, and the operation of the polishing apparatus main body A is automatically stopped via the control panel in the same manner as described above.

Next, another comparing means will be described. During the polishing operation immediately before the flatness of the polished surfaces of the upper and lower stools 3 and 5 of the main body A of the polisher, vibrations near the inner and outer circumferences of the upper stool 3 are detected via the respective vibration detecting means 9 and 10. Detected as a vibration signal. The detected vibration signal is amplified via the signal amplifying means 11, and the amplified vibration signal is sent to the analyzing means 12, where the vibration degree is analyzed by frequency analysis. The second comparison means is used in advance as an abnormal reference signal (a limit value of the flatness of the polished surfaces of the upper and lower platens 3 and 5 from normal to abnormal) which is not allowed as the flatness of the polished surfaces of the upper and lower platens 3 and 5. Record it in 13.

Then, vibrations near the inner circumference and the outer circumference of the upper surface plate 3 during a normal work polishing operation are detected as vibration signals via vibration detecting means 9 and 10, respectively. The detected vibration signal is amplified via the signal amplifying means 11, and the amplified vibration signal is sent to the analyzing means 12, where the vibration degree is analyzed. The second comparing means 13 which has received the data indicating the degree of vibration compares the pre-recorded abnormal reference signal near the inner circumference and the outer circumference with the vibration signal near the inner circumference and the outer circumference to polish the workpiece W. When the level of the vibration signal reaches the level of the abnormal reference signal, the flatness of the polished surfaces of the upper and lower platens 3 and 5 is regarded as abnormal, and the operation of the polishing apparatus main body A is performed via the control panel in the same manner as described above. It stops automatically.

Next, unlike the operation of automatically judging the operation of the polishing apparatus main body A by judging an abnormality from the detected vibration signal, the flatness of the polished surfaces of the upper and lower platens 3 and 5 is corrected. An operation of automatically stopping the operation of the polishing apparatus main body A by comparing the end of the modified polishing with the vibration signals near the inner circumference and the outer circumference when polishing is performed will be described.

In an ideal state in which the flatness of the polished surfaces of the upper and lower stools 3 and 5 of the main body A of the polisher is good, vibrations near the inner and outer peripheries of the upper stool 3 during the polishing operation of the polished surface are respectively reduced. As a vibration signal via the vibration detecting means 9 and 10. The detected vibration signal is amplified via the signal amplifying means 11, and the amplified vibration signal is sent to the analyzing means 12, where the vibration degree is analyzed by frequency analysis. The normal reference signal (a limit value indicating that the flatness of the polished surfaces of the upper and lower platens 3, 5 is extremely good) which is allowed as the flatness of the polished surfaces of the upper and lower platens 3, 5 is set in advance as a second signal. Comparison means 13
To record. Then, during the correction polishing work of the polished surfaces of the upper and lower stools 3, 5, the vibrations near the inner circumference and the outer circumference of the upper stool 3 are detected as vibration signals via the vibration detection means 9, 10, respectively. The detected vibration signal is transmitted to the signal amplifying unit 1
The amplified vibration signal is amplified through the
2 to analyze the degree of vibration. The second comparing means 13 which has received the data indicating the vibration degree compares each of the previously recorded normal reference signals with each of the vibration signals, and determines that the level of the vibration signal during the correction polishing is the normal reference signal. Is reached, the flatness of the polished surfaces of the upper and lower stools 3 and 5 is set to an ideal state, and the operation of the polishing apparatus main body A is automatically stopped via the control panel in the same manner as described above.

The above-described control device B is an example of the embodiment, and includes vibration detecting means 9 and 10 and signal amplifying means 11.
And the analyzing means 12 and the comparing means 13, but the present invention is not limited to this, and has a function equivalent to these, including a control panel mounted on the main body A of the polishing apparatus. The provided means may be provided.

Although the vibration sensor for detecting mechanical vibration has been described as the vibration detecting means 9 and 10, an AE (ACO) for detecting acoustic sound pressure instead of the vibration sensor is used.
An abnormality due to sound pressure may be detected using a USTIC EMISSION sensor. Further, the vibration sensor and the AE sensor may be used in combination.
The installation positions of the vibration detecting means 9 and 10 are not limited to the upper surface plate 3 but may be installed on the lower surface plate 5.

Further, the polishing apparatus of the present invention comprises upper and lower
Can be applied to a two-way type in which the sun gear and the ring gear rotate and a four-way type in which the upper and lower platens 3, 5 also rotate.

[0029]

As is apparent from the above description, the floating abrasive type polishing apparatus provided with the flatness detecting device according to the present invention has:
While the workpiece is being polished, vibration signals near the inner circumference and the outer circumference of the upper surface plate are detected through the vibration detection means, and the vibration signals near the inner circumference and the outer circumference are compared, whereby the polishing surface of the upper and lower surface plates is compared. Can detect an abnormality in the flatness. Further, during the correction polishing work of the upper and lower platens, by comparing the vibration signals near the inner periphery and the outer periphery of the upper platen detected through the vibration detecting means with the respective reference signals, the upper and lower platens are compared. An ideal state of flatness of the polished surface can be detected.

For this reason, if the flatness of the upper and lower platens deteriorates automatically during the polishing operation, the operation can be stopped. If the flatness of the upper and lower platens becomes good during the correction polishing, the operation can be automatically stopped. The operation can be stopped.

[Brief description of the drawings]

FIG. 1 is a partially sectional front view of a floating-abrasive polishing apparatus and a control apparatus according to the present invention.

FIG. 2 is a plan view of the polishing apparatus with an upper surface plate removed.

[Explanation of symbols]

 W Work 2a Sun gear 3 Upper surface plate 4 Planet gear 5 Lower surface plate 8b Ring gear 9,10 Vibration detection means 11 Signal amplification means 12 Amplification means 13 Comparison means

Claims (2)

(57) [Claims] 1. An upper and lower platen, disposed between the upper and lower platens,
A planetary gear having a holding hole for holding a work, a sun gear and a ring gear meshing with the planetary gear are provided, and by rotating at least one of the sun gear and the ring gear, the planetary gear rotates, or rotates and revolves. Let
In a floating abrasive type polishing apparatus for polishing the work by sliding the work and the upper and lower platens through slurry-like abrasive grains, the upper platen is provided near the inner periphery and the outer periphery of the upper platen. A vibration detecting means for detecting a vibration signal of the panel; and a first comparing means for comparing the vibration signals on the inner circumference and the outer circumference detected via the vibration detecting means with the vibration detecting means. Floating abrasive polishing equipment. 2. A method according to claim 1, wherein said vibration detecting means converts a vibration signal detected in the vicinity of the inner and outer circumferences of said upper platen detected through said vibration detecting means and a reference signal in the vicinity of the inner and outer circumferences of said upper platen. 2. A floating abrasive polishing apparatus according to claim 1, further comprising a second comparing means for comparing each of them.