JP3115850B2 - Sensor circuit with resistor sensor as element - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sensor using a resistor, and more particularly, to a resistance sensor placed in a measurement atmosphere to directly determine an ambient temperature from a resistance value of the sensor at that temperature. From the electric power when the body sensor is heated to a certain high temperature that keeps the equilibrium with the ambient temperature and the previously obtained ambient temperature, a thermal transition that changes according to the thermal conductivity (humidity, flow velocity, etc.) of the measurement atmosphere is obtained. Thus, the present invention relates to a sensor technology that can determine the thermal conductivity of the atmosphere without being affected by the ambient temperature.

[0002]

2. Description of the Related Art A predetermined gas concentration of a gas mixture is defined as:
It can be determined from the difference in thermal conductivity that changes according to the molecular weight of the gas. A hygrometer utilizing thermal conductivity is based on this principle, and is based on the amount of change in the resistance of a resistor caused by the difference in the amount of heat radiated from a resistor heated at a constant current or a constant voltage. Seeking humidity. In addition, a gas anemometer utilizing thermal conductivity is based on the fact that the temperature of a resistor heated at a constant current or a constant voltage is a temperature that balances the amount of heat generated by heating power with the amount of heat released by fluid flow. If the specific heat and density of the fluid are known, the flow velocity of the fluid can be determined. Hygrometers and anemometers utilizing these thermal conductivities determine the humidity and flow rate of the atmosphere from changes in resistance due to temperature changes of the resistor heated by electric power, so that correction of the atmosphere temperature is necessary. . For this reason, the hygrometer and the anemometer have a resistor for detecting the ambient temperature in addition to a resistor for detecting the influence of thermal conductivity due to humidity, fluid flow, and the like.

In this method, the resistance for detecting the ambient temperature and the resistance for detecting the thermal conductivity are heated under the same constant condition. However, the difference in characteristics between the two resistors is inevitable and causes errors.In addition, since the ambient temperature detection resistor is cut off from the outside air, the thermal conductivity detection resistor that is in contact with the outside air is not heat sensitive. In the case of a measurement target that has a response difference and requires high response, there is a problem that a detection error occurs. In order to solve this problem, the present applicant has previously proposed a method of using one resistor and heating it at two stages of low temperature and high temperature.

One of the reasons is that a low-temperature resistor when the resistor is heated with low power has a resistance characteristic that is hardly affected by the humidity and flow velocity of the atmosphere, and a high-temperature resistor that is heated to high temperature by high power. The body utilizes the influence of the humidity and flow velocity of the atmosphere. Specifically, for example, in the case of a humidity sensor, a low-temperature detection voltage Vs at both ends of the sensor is driven by driving a resistor sensor with a 4 mA constant current pulse switched by a changeover switch.
Ask for. However, since the low-temperature detection voltage Vs is not a value directly proportional to the ambient temperature, the multiplication value KVs is held by multiplying the correction coefficient K so as to correspond to the ambient temperature Ta. Next, a constant current pulse of 8 mA is applied to obtain a high-temperature detection voltage Vp, and (Vp-KVs) = V is calculated to obtain a humidity. As described above, in the conventional method of obtaining the ambient temperature by heating the sensor at a low temperature using one resistor sensor, the voltage corresponding to the ambient temperature Ta is obtained by multiplying the correction coefficient K. For this reason, a correction coefficient circuit is required, the circuit configuration becomes complicated, and the accuracy does not increase.

Another method of heating at low and high temperatures employs a method of preparing reference resistances at respective temperatures and thermally controlling the sensor resistance to a value equivalent to the reference resistance. Although the effect of temperature can be canceled with high accuracy and an output dependent only on the thermal conductivity (thermal conduction parameter) to be measured can be obtained, it has the following problems.

[0006] 1. The resistance sensor has a variation in characteristics, which causes an error. 2. At the time of measurement under low temperature conditions, a control operation for controlling the sensor resistance to the reference resistance value is required, so that the measurement takes time. 3. When measuring under low temperature conditions, the current consumption can be reduced by controlling the sensor resistance under lower temperature conditions. However, in this case, measurement cannot be performed at an environmental temperature higher than the controlled temperature. That is, it is difficult to reduce the current when measuring the temperature.

[0007]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems in the prior art, and has been made in consideration of the heat, such as humidity and flow rate, which are not affected by the ambient temperature due to a temperature change due to heat radiation occurring according to the heat conduction characteristics. In the sensor technology for obtaining conduction parameters, the conventional circuit was driven at a constant current pulse at both low and high temperatures to improve the complexity and inadequate accuracy of the circuit configuration, and to improve the accuracy with simpler procedures and circuit configurations. In addition, the long-term measurement time is shortened by controlling the reference resistance value by performing thermal control at both low and high temperatures in the past, the conditions in the measurement environment (low-temperature reference conditions) are relaxed, and variations in the sensor are reduced. Even so, the effect of ambient temperature can be canceled with high accuracy, and an output that depends only on the amount to be measured can be obtained at high speed and with low power consumption. Providing a sensor circuit to its intended.

[0008]

According to the first aspect of the present invention, there are provided two operation modes: an operation mode for applying a predetermined voltage or current to the resistor sensor, and an operation mode for controlling the power applied to the resistor sensor. A sensor circuit including a resistor sensor for operating the resistor sensor, detecting an operation state of the resistor sensor in each operation mode, and sensing two parameters in an atmosphere of the resistor sensor that affects the detection amount. A resistance between the first operational amplifier having the resistor sensor as a negative feedback resistor and the second operational amplifier having the first constant resistor as a positive feedback resistor, n times the resistance of the resistor sensor at a predetermined temperature. A reference resistance having a value is cascaded, and the output of the second operational amplifier is connected to the first operational amplifier via a second constant resistance having a resistance value that is (1 / n) times the first constant resistance. amplification Negative feedback to, grounding the negative input terminal of the first operational amplifier positive input terminal and the second operational amplifier, a reference power source through the first switch and the second constant resistor that allows intermittent And a selection switch connected to the input terminal of the first operational amplifier to select one of the outputs of the first operational amplifier and the second operational amplifier as a circuit output.
Pitch, and is made by providing a second switch to be opened the output of the second operational amplifier.

According to a second aspect of the present invention, in the sensor circuit including the resistor sensor according to the first aspect, a third operational amplifier for amplifying an output selected by the selection switch is provided, and the second switch is provided. Is released, the reference power supply input through the first switch and the second
When the first switch is turned on, the output of the first operational amplifier
Force and the first actuation when the first switch is turned off.
And the output of the operational amplifier is selected by the selection switch and input to the third operational amplifier.

According to a third aspect of the present invention, there is provided a sensor circuit including the resistance element sensor according to the first or second aspect as at least one of the reference resistance, the first constant resistance, and the second constant resistance. As a circuit element, a resistance of a predetermined value and a control circuit that controls a voltage applied to the resistance of the predetermined value based on a variable set value are in a proportional relationship with the resistance of the predetermined value according to the variable set value. A resistance variable means for generating a resistance value is used.

According to a fourth aspect of the present invention, there is provided a sensor circuit including the resistor sensor according to any one of the first to third aspects, further comprising a circuit output by the first, second, and third operational amplifiers. An input CPU and storage means connected to the CPU; the storage means stores constants unique to the resistor sensor, data for setting calculation conditions in the two operation modes, and the circuit outputs; The CPU
Sets a variable set value in the resistance variable means based on a circuit output by the first, second, and third operational amplifiers and data stored in the storage means, and sets the parameter to be sensed. It is to calculate.

According to a fifth aspect of the present invention, there is provided a sensor circuit including the resistor sensor according to the fourth aspect, wherein the storage unit stores data such as the inherent constant and operation conditions related to the resistor sensor. This is to prepare a sex memory.

According to a sixth aspect of the present invention, there is provided a sensor circuit including the resistor sensor according to the fifth aspect as an element, wherein the non-volatile memory is unitized integrally with the resistor sensor so as to be detachable from the circuit.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First, a resistor sensor according to the present invention is required.
Of the heat transfer parameter that the sensor circuit
The principle of shing will be described. This sensin
Broadly speaking, the following procedures (1) and (2) can be used.
More executed. (1) When the sensor current flowing through the resistor is very small,
Insensitive to derived parameters (eg humidity)
In this condition, the temperature of the resistor in the state equal to the ambient temperature
The degree Ta is determined as the resistance value Ra, and is set as the ambient temperature. resistance
As a relationship between the value and the ambient temperature, for example, Ra = R₀(1 + α ・ Ta + β ・ Ta^Two(This relational expression is composed of platinum or a platinum thin film.)
Use the third and higher terms as needed in the equation for the sensor
The initial resistance R₀, Coefficient α, coefficient β
Also know the sensor-specific constant in advance, and
The ambient temperature Ta is obtained by actually measuring Ra. (2) When the sensor temperature is high, the
The sensitivity that occursT _H = Ta + P _H ・ Θ _H + X  Holds. X directly affects the heat transfer parameter to be measured
The amount affected (thermal transition temperature). Power / temperature conversion coefficient
θ_HAnd the sensor temperature is high T_HTo be
P when controlled to_HAnd the ambient temperature determined earlier
X is determined together with the temperature Ta, and the heat transfer to be measured by this X is determined.
Get derived parameters.

In executing the above procedure, it is necessary to take into account the characteristics and the like inherent to the resistor sensor in order to guarantee the accuracy. In the above procedure (1), the constants R ₀ , α, β,
The above procedure (2) is to solve the problem by giving the constant θ _H and the constant corresponding to the set high temperature T _H as a variable value according to the variation of the sensor resistance. It is necessary.

An embodiment of a sensor circuit according to the present invention for performing a procedure according to the above principle will be described below with reference to the accompanying drawings. FIG. 1 is a block diagram showing an outline of a whole of a sensor circuit according to an embodiment of the present invention. The sensor circuit shown in FIG. 1 comprises a circuit part for executing the above-described procedure (1) and a circuit part for executing the procedure (2) to form an entire circuit, and operates switches provided in the circuit. To perform the procedure (1)
The resistor sensor is driven in the second operation mode of performing the operation mode (2), and the respective circuit outputs are obtained. FIG.
, R _S is a resistance sensor, and VR _X is resistance variable means for generating a reference resistance. In this case, it is assumed that the resistance has a resistance value R _VX equal to the resistance value R _S of the resistance sensor at a predetermined high temperature. Here, R ₁ and R ₂ are constant resistors having the same value. A ₁ and A ₂ are first and second operational amplifiers. S ₁ and S ₂ are switches for setting an open / closed operating position, and S ₃ is a selection switch for obtaining an output from one of different circuit output points. Then, Vref is a reference voltage inputted through the switch S _1.

In the present sensor circuit, a reference voltage Vref is inputted through a constant resistor R ₁ connected to a negative input terminal of a first operational amplifier having a resistor sensor R _S as a negative feedback resistor.
A circuit for performing a first operation mode in which the output V _{1 of the} operational amplifier is selected by a selection switch S ₃ and output as a circuit; a first operational amplifier A ₁ having a resistor sensor R _S as a negative feedback resistance and a constant resistance R the reference resistor VR _X having the same resistance value as the resistor sensor R _S at a predetermined high temperature between the second operational amplifier a ₂ having ₂ as a positive feedback resistor connected in cascade, a second operational amplifier a ₂ first negative feedback to the operational amplifier a ₁ via the constant resistor R ₁ having a resistance equal to the constant resistance R ₂ of the output of the first
The positive input terminal of the operational amplifier A ₁ and the second operational amplifier A ₂
, The negative input terminal of which is grounded to perform a second operation mode for detecting V ₃ as an output. Also, the first
The circuit output in the second operation mode is input to the CPU via the A / D converter CV, and the two measurement variables (ambient temperature and atmospheric heat conduction parameters) to be obtained are calculated. The CPU performs data processing necessary for the calculation, further performs circuit setting processing, and performs data manipulation of the memory MR.

The basic operation of the sensor circuit will be described. (1) a first operation mode (measurement of the ambient temperature Ta) First, the ON switch S _1, OFF and S _2, when the selection switch S ₃ is b-side, as input Vref, and outputs V ₁ Only _one operational amplifier A1 is in operation. Here, i ₁ flowing through the constant resistor R ₁ is

[0019]

(Equation 1)

The next, and supplies a constant current determined by the sensor R _S Configuring Vref and R ₁ to. Vref is selected to be sufficiently small, and the operation is performed on condition that there is no self-heating of the resistor sensor _RS at this current. At this time, the sensor resistance is

[0021]

(Equation 2)

Then, R _S is obtained from the detected value V ₁ . Here, the relationship between the resistance value of the resistor sensor R _S and the temperature obtained is, for example, in a sensor made of a platinum or platinum thin film resistor, the relationship R _S = R ₀ (1 + α · Ta + β · Ta ² ) Since the initial resistance R ₀ and the resistance temperature coefficients α and β are given in advance, the ambient temperature Ta is obtained by calculation. In addition, as the relational expression between the resistance value and the temperature, a relational expression including a cubic term or later can be used as necessary.

(2) Second operation mode (thermal transition temperature: X
Measurement) First, ON OFF, the S ₂ switch S _1, the selection switch
When the S ₃ and a side, Vref is turned off, the first and second operational amplifiers A _1, A ₂ is operational.

The first operational amplifier A ₁ multiplies V ₃ (circuit output) by (−R _S / R ₁ ) to obtain V ₁ . The output terminal (potential V ₁ ) of the _first operational amplifier A ₁ and the second operational amplifier A
_The voltage between the output terminals (potential V ₃ ) of the second operational amplifier is divided by the reference resistors R _VX and R ₂ , and the second operational amplifier A ₂ determines whether the potential V ₂ at the input terminal of the second operational amplifier is 0 V or not. Is performed. Here, if V ₃ is positive, if R _X > R _S, then V ₂ > 0 and if R _X <R _S, then V ₂ <0. Since V ₃ cannot be negative due to the diode D, if V ₂ > 0, the output of the second operational amplifier A ₂ outputs a positive voltage, whereby i ₁ increases and R _S generates heat. . When the temperature rises due to heat generation, R _S increases when the temperature coefficient of resistance is positive. Thus, R _S increases, and R _S <R _X
From R _S = R _X , and the balance point is V
_{2 = 0, R S = R} X , and the sensor temperature is controlled to be constant. The actual measurement is set to R _X to a high temperature T _H, when they are balanced at a high temperature T _H becomes R _S = R _X, the sensor power is i ₁ ² · R _S. Since i ₁ = V ₃ / R ₁ , the power can be accurately obtained by setting R ₁ to a high-precision resistance and measuring V ₃ accurately. The power P _H obtained in this manner is determined by the above-described expression X = T _H together with Ta obtained in the first operation mode.
It is used to obtain the thermal transition temperature X based on -P _H · θ _H -Ta.

Next, a description will be given of an embodiment of a circuit which is added to improve the performance of the constant current circuit section which executes the first operation mode. In the first operation mode, since it is not necessary to generate heat from the resistor sensor, the power may be small, and the smaller the supply current is, the better from the viewpoint of low power consumption and high speed. Since the signal is small, the circuit is expensive and complicated for accurate measurement. In the above embodiment, a constant current is supplied. For this purpose, a reference voltage Vref is required, and a circuit for generating Vref is expensive to measure with high accuracy. 2, in the embodiment of a sensor circuit according to the present invention, a diagram showing a circuit part related to the first mode of operation by small operating current, a third operational amplifier A ₃ of the present embodiment to the circuit output terminal in FIG. 1 These are connected (in FIG. 2, a part of the circuit portion relating to the second operation mode is omitted).

As shown in FIG. 2, the first operational amplifier A ₁
Switch S ₃ '
Connecting the third operational amplifier A ₃ after selecting the. This is an operation to measure the sensor resistance R _S with a very small current.
Since the output signal level is very small, amplified by the third operational amplifier A _3. Operation of this circuit is 'select the output, V _1' and switch S ₁ open and closed selection state switch S ₃ by detecting the output of, performing the actual measuring operation of the circuit of the check operation. Specifically, OFF the switch S ₁
When the selection switch S ₃ ′ is on the b ′ side, the output V ₁ ′ o, the switch S ₁ is ON, and when the selection switch S ₃ ′ is on the a ′ side, the output V ₁ ′ r, and the switch S ₁ is ON. Switch S ₃ ′
Is detected on the b 'side, the output V ₁ ' s is detected. The sensor resistance value R _{S obtained} from these detection values is

[0027]

(Equation 3)

It can be actually measured as As the above equation shows,
First operational amplifier A _1, the amplification factor of the third offset voltage and the third operational amplifier A ₃ of the operational amplifier A ₃ and the power source voltage Vr
ef is canceled. Thus, since the measurement method is not affected by the power supply voltage Vref, a highly accurate reference voltage is not required. Further, except resistor R _1, since it is not necessary to use high-precision parts, easily and inexpensively with high accuracy can be realized.

Next, the reference resistor in the embodiment of the resistance varying means (Fig. 1 for controllably operating the circuit at a high temperature T _H in the second operation mode described above (Measurement of thermal transition temperature X) R _X
Is set by the variable resistance means). Here, too, a description will be given of an example in which the reference resistance R _X shown in FIG. 1 is variably set. The reference resistance R _X used in the embodiment of the sensor circuit is basically set to T
A resistor having a value equivalent to the resistance sensor R _S at _H (high temperature) may be prepared. However, it is necessary to adjust the resistance in order to obtain accuracy depending on the variation of the resistance sensor and the use conditions. It is possible to adopt a method in which a resistor having a large number of resistance values is prepared, and switching is selected from among them to set a reference resistance. However, this method involves a trade-off between the increase in size and the accuracy in terms of the circuit configuration. As a method for solving this disadvantage, a variable resistance means shown in FIG. 1 is provided.

In the sensor circuit shown in FIG. 1, the variable resistance means VR _X generates an arbitrary equivalent resistance value by means of a variable resistance signal. By providing this variable resistance means VR _X , it corresponds to a predetermined high temperature. An operating voltage or current equivalent to the connection of the reference resistor is generated between the terminals, so that an optimum circuit can be configured. When the resistance variable means VR _X for generating a response to the resistance variable signal resistor will be described in greater detail, the resistance adjusting means VR _X, the voltage was arbitrary multiplying the voltage applied between two terminals is constant resistance (reference resistance) It is basically configured to be applied to both ends so that a current flowing through the reference resistor flows through at least one of the two terminals.

Specifically, the resistance variable means VR _X
It is composed of those exemplified in FIG. 3 and FIG. In FIG. 3, the input / output relationship (the voltage V between the terminals T ₁ and T ₂ and the voltage between the terminals T ₃ and T ₄ )

[0032]

(Equation 4)

) Has a proportional relationship, and the proportional relationship is arbitrarily variable by setting.
The feedback resistance of _r (for example, a D / A converter with a variable attenuation factor) is made a high-precision reference resistance Rref, and the other input / output terminals T ₂ and T ₄ are short-circuited (to the same potential). It can be configured to generate an equivalent resistance obtained by multiplying a reference resistance Rref (feedback resistance) by a predetermined proportional coefficient (FS / (FS-DATA)) between two input terminals.

FIG. 4 further shows a specific example of FIG.
In the circuit configuration of the active four-terminal Koponento A _r portion is embodied. 4-terminal component is operational amplifier O
Digital data between A ₁ and OA ₂ (DAT in FIG. 3)
A), a switch group S _{1 that} performs a switching operation according to
To S _n to operate the proportional coefficient value data resistor to perform attenuation of the input voltage at the attenuation factor corresponding to (transfer function value) R, 2
R is selected. In this way, the setting of the proportional relationship is given as a digital value (DATA), for example, so that it functions as a resistor equivalent to a desired resistor in an electronic operation, thereby enabling the circuit operation as the sensor. Accuracy on the use of such resistance varying means VR _X to the sensor circuit, further, it can also be associated easily with respect to the difference of the resistance sensor or measuring environmental conditions, many advantages as the sensor circuit.

With respect to the embodiment shown in FIG. 1, the functions of the CPU and the memory MR, which have not been described in detail, will be described. The following are required for the functions of the CPU and the data held by the memory MR. (1) The CPU calculates the ambient temperature Ta from the output of the sensor circuit in the first operation mode. In this case, R _a =
In the calculation process based on R _o (1 + α · Ta + β · Ta ² ), a circuit output (R _a ) and constants (R _o , α, β) are required together with the above relational expressions, and these are prepared in the memory MR as programs or data. Is done. (2) The CPU calculates the thermal transition temperature X from the output of the sensor circuit in the second operation mode. In this case, X = T
_H -P in the calculation process based on _H · _{θ H} -Ta, constant (T _{H, θ H)} of the circuit output (P _H) and the ambient temperature Ta previously obtained
Are required together with the relational expressions, and these are also prepared in the memory MR as programs or data. Although the CPU must be set by the resistance varying means VR _X according to (see resistance value corresponding to a T _H) required R _X in this mode of operation of the sensor circuit to variations in the resistor sensor, resistance for this The variable data is also prepared in the memory MR, and the resistance value R _X is set in the resistance variable means VR _{X based} on the data. (3) The CPU calculates the finally obtained heat conduction parameter according to each coefficient of the approximate curve relating the heat transition temperature X and the heat conduction parameter (for example, humidity and flow rate) obtained in the above (2). Also in this case, the value of each coefficient of the approximate curve required in the calculation process is stored in the memory MR.

Here, an embodiment of how to store data in the memory MR will be described. Memory M
Since the data to be stored in R needs to be prepared as data representing constants and relational expressions specific to the resistor sensor, a nonvolatile memory may be used as the memory MR.
Further, when the resistor sensor portion is used as an element component and is connected to the sensor circuit by a connector,
When this nonvolatile memory is integrated with the resistor sensor,
Upon connection, data will be automatically and reliably provided for the sensor.

FIG. 5 shows an embodiment of the present sensor circuit in which a resistor sensor and a non-volatile memory for holding data relating to the sensor are integrated, and the component parts constructed in this way are connected by a connector. FIG. As shown in FIG. 5, the resistor sensor R and the non-volatile memory MR 'are integrated and provided in a housing H of a sensor circuit unit (shown as a partial view) by a connector N with a plug, for example, in a socket. Plug it in. As described above, using the nonvolatile memory MR ', each coefficient of the approximated curved surface relating the initial resistance value R _{0 of} the resistor sensor, the resistance values R _X , X to be set by the resistance variable means and the humidity in the memory. , Etc. are integrated with the sensor cable. Thereby, even if there is a variation in the sensors, the compatibility between the sensor circuit unit and the sensor cable can be maintained. Further, it is also possible to use n switches as a storage medium instead of the nonvolatile memory and operate the CPU using the variable data expressed in the on / off state.

Next, adaptive means for measuring the resistance value of the resistor sensor R _{S in} the sensor circuit with high accuracy will be described. In this sensor circuit, a very small value must be treated as a change in the resistance sensor _RS that changes according to the ambient temperature. At this time, the resistance of a lead wire (cable) connecting the resistance sensor _RS and the circuit body cannot be ignored. (See FIG. 5). Here, a resistance compensating circuit of a lead wire connecting the resistor sensor R _S and the circuit body to the resistor sensor R _S inserted in the feedback circuit of the first operational amplifier A ₁ is presented.

[0039] Figure 6, the resistor sensor R _S in resistance compensation circuit of the lead wire of the first operational resistor sensor R _S inserted into the feedback circuit of an amplifier, an embodiment in which the 3-wire example FIG. In FIG. 6, (Vref in Fig. 1) input Vin is, Vo the effect of lead resistance r of the first operational amplifier resistor sensor was inserted into the feedback loop of the A ₁ R _S in not a receiving
A fourth operational amplifier is provided to output as ut.
Here, according to the circuit configuration of FIG.

[0040]

(Equation 5)

Therefore, without being affected by r,
An output proportional to R _S can be obtained. Here, the condition of R ₅ = R ₆ is required, but the accuracy of R ₅ = R ₆ does not need to be very strict because r≪R _S.

FIG. 7 shows a circuit including a _third operational amplifier A3 for improving the minute current output in the first operation mode and a fourth circuit based on the embodiment showing the entire sensor circuit of FIG.
Further examples of the entire circuit including the lead resistance compensation circuit includes an operational amplifier A ₄ in a diagram illustrating a. In FIG. 7, the individual circuit operations are as described above, and need not be described in particular.

[0043]

【The invention's effect】

According to the first aspect of the present invention, in the sensor circuit according to the present invention, by selecting the connection of the switch, the resistor sensor is operated in the two operation modes, and the operation mode in which the ambient temperature is measured is based on the reference power supply. By adopting a simple method of passing a small current through the resistor sensor, the response and the complexity of the circuit configuration and accuracy due to the conventional control operation to the low-temperature reference resistance value even when the ambient temperature is obtained are reduced. Insufficiency is improved, accuracy can be improved with a simpler circuit configuration, and high speed, low power consumption, and no limitation of the ambient temperature as the measurement environment. Measurement can be performed.

Advantageous Correspondence of Claim 2: In addition to the effect corresponding to Claim 1, the addition of a circuit for improving accuracy in microcurrent operation causes a problem in microcurrent driving in the first operation mode. A circuit configuration that is not affected by the accuracy of the reference power supply or the offset voltage of the operational amplifier can be used.
High precision measurement is possible with an easy and inexpensive circuit configuration.

Advantageous Effect Corresponding to Claim 3: In addition to the effect corresponding to Claims 1 and 2, the setting can be performed by using a resistance variable means having an active type four-terminal component that can be controlled by data input as a reference resistance. It can be done freely, and the variation of the resistance sensor can be adjusted, so that more accurate measurement can be performed.

According to a fourth aspect of the present invention, in addition to the effects of the first and third aspects, the storage means stores data for setting calculation conditions in the two operation modes, constants specific to the resistor sensor, and calculation processes. By storing the measurement results and the like obtained by the above, and processing the stored data by the CPU, it is possible to obtain a correct heat conduction parameter value with high accuracy.

Effect corresponding to claim 5: In addition to the effect corresponding to claim 4, by providing a non-volatile memory storing sensor-related data unique to the resistor sensor as the storage means, the optimum for each sensor. It is also possible to set conditions (set temperature and constants), perform measurement processing, and adjust sensor variations.

Effect corresponding to claim 6: In addition to the effect corresponding to claim 5, in a case where the resistor sensor is incorporated in the main body sensor circuit as a separate component, related data unique to the resistor sensor. By integrating the non-volatile memory in which data is stored, there is no loss of data, and reliable data can be supplied in the measurement process.

[Brief description of the drawings]

FIG. 1 is a partial block diagram showing an outline of an embodiment of a sensor circuit according to the present invention.

FIG. 2 is a diagram showing a circuit portion of a sensor circuit according to an embodiment of the present invention in which a small operation current is improved in a first operation mode.

FIG. 3 shows a basic conceptual diagram of an embodiment of a variable resistance means having an active four-terminal component used in a sensor circuit according to the present invention.

FIG. 4 is a diagram illustrating the specific example of FIG. 3 in which a circuit configuration of an active four-terminal component _Ar is embodied;

FIG. 5 is a diagram showing an embodiment in which element parts in which a non-volatile memory holding data related to a resistance sensor and a sensor are connected by a connector in a sensor circuit according to the present invention.

FIG. 6 is a diagram showing an embodiment of a resistance compensation circuit for a lead wire of a resistance sensor in which the resistance sensor is inserted into a feedback circuit of a first operational amplifier.

FIG. 7 is a diagram showing an embodiment of an entire circuit based on the sensor circuit of FIG. 1 and further including a circuit for improving a minute current output and a lead wire resistance compensating circuit;

[Explanation of symbols]

A ₁ : first operational amplifier, A ₂ : second operational amplifier, A ₃
... third operational amplifier, A ₄ ... fourth operational amplifier, CV ...
A / D converter, D: diode, H: housing, MR
... Memory, MR '... Non-volatile memory, N ... Connector, O
A ₁ , OA ₂ ... operational amplifier, r ... lead wire resistance, R ₁ ,
R ₂ , R ₃ , R ₄ , R ₅ , R ₆ ... constant resistance, R _S ... sensor resistance,
S _1, S ₂ ... switch, S _3, S ₃ '... selection switch, VR
_X : Variable resistance means, Vref: Reference power supply.

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. ⁷ , DB name) G01N 27/00-27/24 G01N 25/00-25/72 G01F 1/68-1/699

Claims (6)

(57) [Claims] An operation mode in which a predetermined voltage or current is applied to a resistor sensor and an operation mode in which electric power applied to the resistor sensor is controlled are operated in two operation modes. In the sensor circuit including a resistor sensor that detects an operation state of the resistor sensor and senses two parameters in an atmosphere of the resistor sensor that affects the detection amount, the resistor sensor has the resistor sensor as a negative feedback resistor. A cascade connection of a reference resistor having n times the resistance value of the resistor sensor at a predetermined temperature between a first operational amplifier and a second operational amplifier having a first constant resistor as a positive feedback resistor, The output of the second operational amplifier is set to a second constant having a resistance value (1 / n) times the first constant resistance.
Through a constant resistance to the negative feedback to the first operational amplifier, and ground the negative input terminal of the positive input terminal of the first operational amplifier and the second operational amplifier, a reference power supply and Intermittent possible Connected to the input terminal of the first operational amplifier via a first switch and the second constant resistance, and selects one of the outputs of the first operational amplifier and the second operational amplifier as a circuit output selection switches, and, said second arithmetic sensor circuit to the resistor sensor element characterized by comprising providing a second switch output to enable opening of the amplifier to be. 2. The sensor circuit according to claim 1, further comprising a third operational amplifier for amplifying an output selected by said selection switch, wherein said second operational amplifier amplifies an output selected by said selection switch.
In a state where the switches are released, the reference power supply input via the first switch and the output of the first operational amplifier when the first switch is turned on and the first switch are turned off when the first switch is turned on A sensor circuit comprising a resistor sensor as an element, wherein an output of the first operational amplifier is selected by the selection switch and input to the third operational amplifier. 3. The sensor circuit according to claim 2, wherein at least one of the reference resistor, the first constant resistor, and the second constant resistor includes:
A resistor having a predetermined value and a control circuit for controlling a voltage applied to the predetermined value based on a variable set value as a circuit element, and a resistance value proportional to the predetermined value resistance according to the variable set value A sensor circuit comprising a resistor sensor as an element, characterized by using a variable resistance means for generating a resistance. 4. The sensor circuit according to claim 3, further comprising: a CPU to which a circuit output from the first, second, and third operational amplifiers is input;
Storage means connected to the CPU, wherein the storage means comprises:
The CPU stores constants unique to the resistor sensor, data for setting calculation conditions in the two operation modes, and the respective circuit outputs. The CPU outputs the circuit outputs from the first, second, and third operational amplifiers and the storage. A sensor circuit comprising a resistor sensor as an element, wherein a variable set value is set in the resistance variable means based on data stored in the means, and the parameter to be sensed is calculated. 5. A sensor circuit comprising the resistor sensor according to claim 4, wherein a non-volatile memory storing data such as the unique constants and calculation conditions related to the resistor sensor is prepared as the storage unit. A sensor circuit comprising a resistor sensor as an element. 6. A sensor circuit comprising the resistor sensor according to claim 5, wherein said nonvolatile memory is unitized integrally with said resistor sensor so as to be detachable from said circuit. Sensor circuit as an element.