JP3113821B2 - Article transfer equipment for heat treatment equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat treatment chamber, in which a first support portion and a second support portion for supporting an article in a plurality of stages from one end to the other end are arranged side by side. Is moved one step at a time from one end side, is transferred to the other end side of the second support part at the other end side, and is moved one step at a time at the second support part and comes out from the one end side. The heat transfer apparatus of the heat treatment apparatus described above is used as a heat treatment apparatus for subjecting various electric / electronic devices, components, materials, and the like to a predetermined temperature to perform a desired heat treatment.

[0002]

2. Description of the Related Art Many articles such as electric and electronic parts are usually manufactured in the same product. However, as an apparatus for heat-treating these articles, a large number of articles are accommodated in a heat treatment apparatus in two rows and two rows. 2. Description of the Related Art There is known an apparatus in which one article is taken out from the lowermost row of a second row, put in from the lowermost row of a first row, and continuously heat-treated. In such a heat treatment apparatus, a transport device for carrying in, ascending, transferring, and unloading articles for each tact is required. As this transfer device, for example, a heat treatment device has been proposed in which a two-row device is provided with a fixed rotation mechanism, a lifting / lowering and rotation mechanism, and a common transfer mechanism using a cylinder or a ball screw shaft (Japanese Patent Publication No. 63-63). -52307 or JP-A-8-22771).

[0003] In this apparatus, even if the mechanism of the article loading / unloading part is excluded, there are seven types of different operations such as rotation of each row, lifting and lowering, rotation, and one movement.
Further, in the lateral transfer mechanism, a beam or a screw shaft penetrating between the outside and the heat treatment chamber is used.

However, such an apparatus has a complicated structure because the number of mechanisms increases according to the type of operation, and the control is complicated because it is necessary to control the operation timing of each mechanism. And the complexity of the structure and control, it takes a long time to transport, and the reliability of the equipment also decreases.Because beams and the like penetrate the upper part of the heat treatment chamber, the cleanliness and heat insulation performance in the room decrease. And other problems.

[0005] On the other hand, there has also been proposed an article transfer device of a heat treatment apparatus which has a simpler operation than the above-mentioned conventional apparatus, and which has a transfer apparatus provided in the heat treatment chamber to improve the cleanness of the room (Japanese Patent Laid-Open No. HEI 9-163568). 8-110166). However, since this device is provided with five types of mechanisms similarly to the above, the structure and control are not sufficiently simplified.

Further, in the conventional heat treatment apparatus as described above, since the apparatus for carrying in / out the article to / from the heat treatment chamber is provided separately from the lifting / lowering transfer apparatus, these must also be controlled at the same timing. Therefore, the structure and control are further complicated. Further, since the substrate receiver supporting the article supports only both sides thereof, there is a problem that it is difficult to stably support and transport a large article.

[0007]

SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems in the prior art, and the invention of claim 1 simplifies the structure and control, shortens the transport time, and improves the cleanliness and heat insulation of the heat treatment chamber. It is an object of the present invention to provide an article transfer device of a heat treatment device with improved performance and high reliability. The invention of claim 2 is
It is an object of the present invention to provide an article transfer device of a heat treatment device whose structure and control are simplified. Claim 3 or 4
It is an object of the present invention to provide an article transfer device of a heat treatment apparatus that can safely support or transfer even when the size of the item is large.

[0008]

According to the present invention, there is provided a heat treatment chamber comprising a first support portion for supporting articles in a plurality of stages from one end to the other end in a heat treatment chamber. The two support portions are arranged side by side, the article is inserted from one end side of the first support portion and moved step by step, and is transferred to the other end side of the second support portion at the other end side, and the second support portion is moved. In the article transporting device of the heat treatment apparatus configured to move one step at a time and move out of the one end side, the article is provided at each of the first support portion and the second support portion and supports the articles at the plurality of stages. A support member having a support portion, elevating means for elevating and lowering the support member at a predetermined time, switching means for switching the support portion between a support position for articles at a predetermined time and a retracted position retracted from the article, Shared by the first support portion and the second support portion A shared support member including a shared support portion provided to support the plurality of articles, a first support portion and a second support portion, which are provided at predetermined times. And a moving means for reciprocating between the two.

In addition to the above, the invention according to claim 2 further comprises a carry-in member for carrying the article into the heat treatment chamber and a carry-out member for carrying out the article from the heat treatment chamber. Is moved by the moving means.

According to a third aspect of the present invention, in addition to the features of the first aspect of the present invention, the article has a rectangular shape, and the supporting members are arranged around the article at four locations spaced apart from each other. The support portion of each of the four support members can support two sides of the square at the support position.

According to a fourth aspect of the present invention, in addition to the features of the first aspect of the present invention, the article has a quadrangular shape, and the common support members are arranged around the article at four locations spaced apart from each other. The common support portions of the four common support members can support the two sides of the square at the support position.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an example of an overall configuration of an article transporting apparatus of a heat treatment apparatus to which the present invention is applied, and FIG. 2 shows an example of a structure of an article loading portion. A pitch transfer type clean oven, which is a heat treatment apparatus, includes a main body 102 covered with a heat insulating wall 101, inlet / outlet chambers 103 and 104 for loading / unloading a work W such as a glass substrate as an article, a machine room 105, and the like. It is composed of The main body 102 includes an air conditioning room 106 and a heat treatment room 107 arranged from the upper side to the side. Inside the air conditioning room 106, a blower 108, a heater 109, a high-performance filter 110, a duct space 111 and the like are arranged.

A work transfer device, which is an article transfer device of a clean oven, has, for example, about 50 steps as a plurality of steps from a first step at one end to an uppermost step at the other end (for simplicity, FIGS. 1 and 2). An ascending-side work loading portion A (hereinafter, referred to as “row A”) and a descending-side work loading portion B (hereinafter, referred to as “B”) serving as a first support portion and a second support portion that support the work W on the reduced number of stages. Rows) are arranged side by side, and the workpiece W is inserted from the first row of row A, raised one by one, transferred to the top row of row B at the top row, and lowered one row at row B. It is configured to take out from the first stage.
It should be noted that the apparatus may be such that the work is taken in and out from the uppermost stage and the work is transferred in the first stage.

The work transfer device includes a lifting / lowering rotating shaft 1 as a support member having a work receiver 1a as a support portion provided in each of the rows A and B to support a plurality of stages of works W. A shaft elevating mechanism 2 as an elevating means for elevating the workpiece; a shaft rotating mechanism 3 as a switching means for switching the work receiver between a workpiece supporting position and a retracted retracted position at a predetermined time; It has a horizontal moving shaft 4 as a shared support member, and a traverse and slider device 5 as moving means for reciprocating the horizontal moving shaft 4 between the rows A and B at a predetermined time.

Four lifting rotary shafts 1 are provided in each of row A and row B. The lifting rotary shaft 1 supports both ends in the width direction of the work and one end in the work conveyance direction indicated by an arrow at two places separated from each other. It is composed of those that support it. The shaft elevating and rotating mechanisms 2 and 3 will be described later with reference to FIG.

The horizontal moving shaft 4 has, as a shared support, a horizontal moving work receiver 4a having a tip portion within the width of the work W so as to support a plurality of works.
The traverse / slider device 5 includes a beam frame 51 extending in the work transfer direction, and a linear reciprocating device 52 such as a rodless air cylinder or a ball screw connected thereto.
And so on. The beam frame 51 is reciprocated by a support guide structure (not shown) in the work transfer direction indicated by an arrow and in the opposite direction.
The linear reciprocating device 52 is provided in the machine room 105.

The loading and unloading of the work into and out of the heat treatment chamber 107
Although an independent device can be provided, the present embodiment is provided with an entrance-side slider 6 and an exit-side slider 7 as a carry-in member and a carry-out member, and these are attached to the beam frame 51, and the traverse / slider device 5 It is moved together with the horizontal movement axis 4.

FIG. 3 shows a configuration example of the shaft elevating mechanism 2 and the shaft rotating mechanism 3. Like the traverse / slider device, these can be configured individually or in combination with various known mechanisms such as a cam, an air cylinder, a ball screw, a linear motor, a gear, a link, and FIG. A combination mechanism such as a cam and a gear is used. Since the same mechanism is used for row A and row B, only the mechanism for row A is shown in the figure.

The shaft lifting / lowering mechanism 2 raises / lowers the lifting / lowering rotating shaft 1 at a predetermined timing, and includes a motor 21, gears 22 and 23 for transmitting the rotation, a cam shaft 24, a cam 25, and a lower end of the lifting / lowering rotating shaft 1. It is constituted by a cam follower 26 attached and the like. The shafts 1, 24, etc. are rotatably supported at appropriate positions by bearings 27. Four cams 2
Reference numeral 5 is formed so that the four elevating rotary shafts 1 perform the same operation by the rotation of the motor 21.

In this embodiment, the shaft rotating mechanism 3 is a mechanism for rotating the shaft 1 reciprocally by 90 ° since the shaft 1 is a rotary elevating shaft. The linear reciprocating moving device 31 such as a solenoid, an air cylinder, a ball screw, etc. A wire 32 reciprocated by the moving body 31a in the direction of the arrow, around which the wire 32 is wound
It comprises a wire reel 33, a drive gear 34 coaxially connected thereto, a driven gear 35 slidably engaged with the drive gear 34 and attached to the elevating rotary shaft 1.
Instead of the wire driving method, the four gears 35 may be directly driven by using a toothed timing belt, or the four gears may be rotated by motors.
In this example, since the shaft rotating mechanism is used as the switching means,
The work receiver 1a is driven by the reciprocating rotation of the rotary elevating shaft 1,
The position is switched between the work supporting position and the retracted position.

In the above description, the shaft elevating mechanism 2 and the shaft rotating mechanism 3 are shown as separate mechanisms for the elevating means and the switching means. However, the division is not necessarily clear, and both means are inseparable. Often configured. In the above description, both mechanisms have two types of driving sources, the motor 21 and the solenoid 31. However, by appropriately combining cams, rings, sliding mechanisms, and the like, one type of driving source can be used. Is also possible. In this case, the elevating means and the rotating means are completely integrated.

FIG. 4 shows a schematic configuration of a control system. The transfer control unit 200 incorporated in the operation control panel of the entire clean oven (not shown) is configured by a microcomputer or the like, and performs timing control of the motors 21 in the A and B rows, the solenoid 31, and the solenoid valve controller 53. . At this timing, as described below, the respective drive mechanisms move the workpieces W one by one in the supporting direction, that is, raise and lower, while supporting and changing the work W by the work receiver 1a and the horizontally moving work receiver 4a. This is the timing at which the uppermost work is moved from the uppermost row in row A to the uppermost row in row B.

As described above, in the work transfer device of the present invention, only a total of five types of operations, ie, the vertical movement, the rotation operation, and the common movement operation of the row A and the row B are controlled, so that the control system is simplified. Therefore, speed, reliability, high reliability, simplification of the control circuit, and the like can be achieved. The solenoid valve controller 53 controls the three-way solenoid valves 54 and 55 for switching and supplying compressed air to either the cylinder volume portion 52a or 52b of the rodless air cylinder 52 shown in FIG. 52c is controlled to move in any direction.

FIGS. 5 and 6 show an example of an operation state of the work transfer device controlled by the transfer control section 200. FIG.
Each of the four elevating rotary shafts 1 in row A and row B and their work receivers perform the same operation, but the axis in row A and the axis in row B operate differently. The elevating rotary shaft and the work receiver are referred to as a shaft A1, a work receiver A1a and a shaft B1, and a work receiver B1a. Also, since only four stages of work receivers are shown in the figure, they are indicated by 1, 2 from the bottom and 50, 49 from the top. Work W
The same applies to the horizontal moving work receiver 4a.
Since the horizontal moving shaft 4 does not move up and down, the height position of the work receiver 4a is always constant. In the drawing, the actual positions of the other work receivers A1 and B1 are shown based on this height position.

(A) shows, as an initial state, all the work receivers A1a-1, 2, 49, 50 and B in row A and row B.
1a-1, 2, 49, and 50 work AW-1, 2, and 4
9 and 50 and BW-1, 2, 49 and 50 are shown. Although omitted, the work is naturally placed on the middle stage, and these stages are always in the same state as the second and 49 stages. As shown in FIG. 2, the inlet slider 6 has entered the heat treatment chamber 107, and the outlet slider 7 has exited from this. At this time, the horizontal moving shaft 4 is on the row B side, and no work is placed on the work receivers 4a1 to 50a and the sliders 6 and 7.

In (b), a signal is sent to the solenoid valve controller 53 to operate the rodless air cylinder 52, and from the state of (a), the horizontal movement shaft 4 and the inlet / outlet sliders 6, 7
Are simultaneously moved as indicated by arrows, and are moved to the outside and inside the row A and the heat treatment chamber, respectively.

(C) operates the motors 21 in row A,
By rotating the cam shaft 24 and the cam 25, the shaft A1 is lowered by one pitch as shown by the arrow from the state of (b), and all the works AW are transferred to the horizontally moving work receiver 4a, and
The motors 21 in the row are also operated to rotate the cam shaft 24 and the cam 25 in the same manner, and lower the shaft B1 by one pitch as shown by the arrow from the state of (b), and move the lowermost work BW1 onto the exit-side slider 7. Transferred, and a new work A is supplied from an external work supply system including a roller conveyor device (not shown).
This shows a state in which W0 is placed on the entrance-side slider 6.

These three operations can be performed simultaneously at one timing. The loading of the work on the entrance-side slider 6 does not necessarily have to be performed at this time, but may be performed at an appropriate time thereafter until the operation (f) is performed.
Also, the descent of the axes A1 and B1 does not necessarily have to be exactly one pitch. The same applies to the following operations. However, the movement distance is made equal between the ascent or descent and the opposite operation.

In (d), the solenoids 31 and the motors 21 in the row A are operated in this order, and first, the wire 32 is pulled in one direction to rotate the four wire pulleys 33 by 90 °. The shaft A1 is rotated by 90 ° as shown by an arc-shaped arrow, all the work receivers A1a are rotated by 90 ° to retract from the work support position, and then, as shown by a straight arrow, the cam 25 is rotated to rotate the shaft A1. A
1 shows a state in which 1 is lowered by one pitch. This operation is also performed by a simple sequence operation of the solenoid 31 and the motor 21. As a result, the lowermost work receiver A1a in row A
The work receivers other than 1 are located below the work other than the uppermost work AW50.

In (e), the solenoids 31 and the motors 21 in row A are operated again in this order, and the shaft A1 is rotated 90 ° as indicated by the arc arrow by the operation opposite to that of (d), and all the work receiving parts are received. A1a is rotated by 90 ° so that the workpiece can be supported, and then, as shown by a straight arrow, the axis A1a is rotated.
Shows a state where is raised by one pitch. This operation is (d)
The operation is performed continuously. As a result, all the work AWs except the uppermost work AW50 are transferred to all the work receivers except the lowermost work A1a1 in the work reception in the row A. As a result, the lowermost work receiver A1a1 becomes free, and the horizontally moving work receiver 4a receives the uppermost work receiver 4a1.
The uppermost work AW50 is placed only on a50.

In (f), the rodless air cylinder 52 operates again in the direction opposite to (b), and from the state of (e), the horizontal moving shaft 4 and the inlet / outlet sliders 6 and 7 are simultaneously moved as indicated by arrows. And the inside and outside of the row B, the heat treatment chamber, respectively. As a result, the uppermost work AW50 in (e) moves to the row B and moves to the BW51.
In row A, work AW0 is brought in, and
The work BW1 at the bottom of the row is carried out of the heat treatment chamber.

In (g), as shown by the left arrow, the axis A1 in row A rises by one pitch from the state shown in (f), and the lowermost work receiver A1a1 supports the work on the slider 6 to move the shaft A1 to the first position. In addition to the stage work AW1, as shown by the arrow on the right side, the axis B1 in row B rotates 90 ° after descending by one pitch, and the work placed on all the work receivers except the bottom stage work receiver B1a1 is moved horizontally. After transferring to a part other than the top of the tray, it is retracted to a position where it cannot support the work.

As a result, on the row A side and the row B side, the uppermost work and the lowermost work are exchanged, the other work in the intermediate stage goes up or down by one stage, and all the work receivers A1a1 to A1a50.
And A1 to AW50 and BW1 newly in 4a1 to 50
~ BW50 are loaded.

From this state, as shown by the two-dot chain line arrow in FIG.
Rotate the work receiver to the work support position, and move up one pitch to move all the work on the horizontally moving work receiver to the axis B.
The work is transferred to the first work receiver and returned to the initial state of (a). The loading and transfer of the work from the start when no work is mounted in the heat treatment apparatus to the initial state of (a) are performed in the same manner. In this case, after the loading of the work in the row A is completed, the transfer of the work to the row B is started, and when the loading of the work in the row B is completed, the state becomes (a).

FIG. 7 is a diagram collectively showing the work receiving operation as described above. (A) to (c) show the operation states of the work receiver in row A, the work receiver in row B, the horizontally moving work receiver, and the inlet / outlet slider, respectively. Among them, a straight arrow indicates an ascending and descending operation of one pitch, and an arc arrow indicates a rotating operation of 90 °. Inward indicates an operation toward a support position, and outward indicates an evacuation operation. (A) to (g) in the figure show the respective states of FIGS. 5 and 6.

The column A and column B operate independently of each other, and there is no direct timing adjustment between them. On the row A side, the operations (c) and (g) are performed after the horizontal movement of the horizontal movement axis 4 performed between (a) and (b) and between (e) and (f). The operation requires horizontal movement and timing adjustment. However, the operations from (c) to (e) can be performed independently only in column A. On row B,
The operation from (a), (b) to (c) and the stop period from (c) to (f) need to be performed by adjusting the timing with the horizontal movement. The operation is
It can be performed independently only for the B column. Therefore, in all the processes from the loading of the work to the ascending, transferring, lowering, and unloading, there are extremely few adjustment operations related to each other. As a result, operation control is easy and the operation speed can be increased. In addition, the control has high reliability and reliability.

FIG. 8 shows another example of the work transfer device. The apparatus of the present example is different from the apparatus of FIG. 2 only in that the elevating rotary shaft 1 is used as an elevating moving shaft 1 ′. That is, in the elevating rotary shaft 1, the work receiver 1 a is switched between the support position and the retracted position of the work by the reciprocating rotation of the shaft 1 by 90 °. The receiver 1'a is switched between the work supporting position and the retracted position by the reciprocating movement of the shaft 1 '. In FIG. 8, the work receiver 1'a in row A supports the work W,
The work receivers 1'a in row B are at the retracted position where the work W is not supported.

FIG. 9 shows an example of the configuration of the shaft elevating mechanism 8 and the shaft moving mechanism 9 of the elevating movement shaft. Various known mechanisms can be used for these, but a ball screw is used as an example in the figure. The shaft elevating mechanism 8 and the shaft moving mechanism 9
(A) is installed in the casing 10 as shown in FIG.
All eight lifting / lowering moving shafts 1 'in row B are driven by the same mechanism shown in (b).

The shaft elevating mechanism 8 includes a motor 81, a ball screw 82 rotated at a predetermined position by the motor 81, a nut 83 screwed up and down as shown by an arrow, a movable support plate 84 to which the nut 83 is fixed, and an elevating direction. Guide bush 8 to guide to
5, two elevating guide shafts 86 guided in the elevating direction and fixed in the casing 10 with a space therebetween, and a guide bush 87 attached to the movable support plate 84, and are supported therein so as to be horizontally movable. It is constituted by two horizontal shafts 88 and the like provided at intervals and fixed to the elevating movement shaft 1 '. The switching mechanism 9 includes a motor 91, a ball screw 92,
These components are constituted by a nut 93 and the like which are moved horizontally in the direction of the arrow and connected to the horizontal shaft 88.

With such a structure, the vertical moving shaft 1 '
Moves up and down in the direction of arrow Y similarly to the rotary shaft 1 and moves back and forth in the direction of arrow X to move the work receiver 1'a between the work support position and the retracted position. In this example, four lifting / lowering axes 1 'in row A or row B
Although two motors 81 are provided, these motors only need to be driven at the same timing, so that the control is as simple as that of FIG.

FIGS. 10 and 11 show workpiece receivers 1a and 1a.
'A and another example of the horizontally moving workpiece receiver 4a. In FIG. 10, a work receiver 1a of the elevating rotary shaft 1 includes a normal work receiving portion 1a-1 and an extended work receiving portion 1a-2 which is bent and extended, and a slightly elevated receiving portion is provided at each end portion. The seats 1a-11 and 1a-21 are provided. Similarly, the horizontal moving work receiver 4a attached to the horizontal moving shaft 4 also has a normal work receiving portion 4a-1.
And an extended work receiving portion 4a-2 that is bent and extended.
And receiving seats 4a-11 and 4a-
21.

With such a receiving seat, two sides can be supported by a single work receiver at an appropriate interval. Even with such a work receiver, as shown by a two-dot chain line in the figure, the work receiver can be retracted from the work support position by lowering the elevating rotary shaft 1 and rotating it by 90 °.

The work receiver 1'a shown in FIG. 11 has the same structure as the work receiver 1a shown in FIG.
The work receiver 1'a includes a work receiving portion 1'a-1, an extended work receiving portion 1'a-2, and a receiving seat 1'a-1.
1 and 1'a-21. In this work receiver, the work can be retracted to a position where the work is not supported by lowering and lowering the ascending / descending moving shaft 1 'as shown by a two-dot chain line in the figure.

When a square work such as a glass substrate is large as an article, only one side of the square is supported at a plurality of positions, or one side and the other side are supported at a plurality of positions. If only the support is made, the distance between the opposite side support parts or the distance between the opposite side support part and the support part on the other side becomes wide, the bending between them becomes large, and the support state becomes unstable. If the receiver or the receiving seat of the horizontally moving work receiver can support two sides of the work, the four sides of the work can be supported at eight points, and the supporting state is stabilized and the transfer of the work is performed safely. be able to.

[0045]

As described above, according to the present invention, according to the first aspect of the present invention, the support member provided on each of the first support portion and the second support portion, and the common support member moved between the two portions , The article supporting portion is constituted by the above, so that there are only three kinds of members that move differently in total, so that the structure of the article transport device is extremely simplified. In addition, since the types of members are small and the common support member does not need to be moved up and down, the types of operation of the members are reduced, and control is simplified. As a result, the transport time can be reduced, and the reliability of operation and the reliability of the entire apparatus can be improved. Furthermore, since the common support member moves in the heat treatment chamber, it does not come to the outside world, and the cleanliness and heat insulation performance of the heat treatment chamber can be improved.

The lifting / lowering means, the switching means, and the moving means move the support member up and down, switch the article support portion, and move the common support member at a predetermined time, respectively. Can be raised, transferred to the second support portion at the top, and lowered at the second support portion. For example, if articles are loaded on the support portion in both portions, the common support member can move freely, so that it is placed on the first support portion, and the first support portion is lowered via the first support member. , And all the articles thereon can be transferred onto the common support portion of the common support member. For this reason,
The shared support portion of the shared support member is provided at a position where the article can be supported.

When the first support section is free, it is retracted from the support position, lowered by one pitch, returned to the article support position, and a new article is placed on the first stage and raised again by one pitch. Other articles can be received with the top article left in the shared support, and articles can be stacked on all the tiers.

Next, the common support member on which articles are loaded only on the uppermost stage of the common support portion is moved to the second support portion. Second
On the support portion of the support member of the support portion, articles are placed on all steps, but this support member is lowered by one pitch so that all the articles are removed from parts other than the uppermost step of the shared support part and separately provided article discharge. Transfer on the member. As a result, articles are stacked on all the stages of the shared support portion. After the transfer, the support unit retracts, moves up one pitch, returns to the support position again, and again
By raising the pitch, all the articles on the common support are supported, and the initial state where the common support is free is returned. The article on the article carrying member that has completed the heat treatment is
It is taken out to the outside by a suitable carrying-out mechanism. By repeating the above operation, the article can be loaded / unloaded for each tact and heat-treated.

According to the second aspect of the present invention, in addition to the above, there are provided a carry-in member for carrying the article into the heat treatment chamber and a carry-out member for carrying the article out of the heat treatment chamber, and at least one of these members is moved by the moving means. Since it is moved, at least one of the article carrying-in means or the carrying-out means can be omitted. As a result, the configuration of the device is further simplified, and the control is further simplified.

According to the third or fourth aspect of the present invention, when the article has a rectangular shape such as a glass substrate, the supporting member or the common supporting member is disposed at four places around the article at intervals. At the same time, since the support portion or the common support portion can support two sides of the rectangular shape at the support position, the article can be supported at eight points on four sides, the support state of the article is stabilized, and the safety and reliability of transport are improved. Can be enhanced.

[Brief description of the drawings]

FIG. 1 shows a schematic overall configuration of a pitch transfer type clean oven as an example of a heat treatment apparatus to which an article transfer device of the present invention is applied, wherein (a) is a front view and (b) is a plan view.

FIG. 2 is a perspective view showing a structural example of an article loading portion of the apparatus.

FIGS. 3A and 3B are explanatory diagrams of the elevating and rotating mechanism of the above-described device, wherein FIG. 3A shows a side view, FIG. 3B shows a lower plane state, and FIG.

FIG. 4 is an explanatory diagram of a control system of the device.

FIGS. 5A to 5D are diagrams illustrating a part of the operation of the device.

FIGS. 6 (e) to 6 (g) are explanatory diagrams of the remaining part of the operation of the device.

FIGS. 7A to 7C are explanatory diagrams summarizing the above operation.

FIG. 8 is a perspective view showing another configuration example of the article loading portion of the apparatus.

FIGS. 9A and 9B are explanatory views showing a lifting and lowering mechanism of the device.

FIG. 10 is a perspective view showing another example of a work receiver and a horizontally moving work receiver.

FIG. 11 is a perspective view showing still another example of the work receiver.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Elevating rotary shaft (support member) 1 'Elevating moving shaft (support member) 1a, 1'a Work receiver (support part) 2 axis elevating mechanism (elevating means) 3 axis rotating mechanism (switching means) 4 horizontal moving axis (shared) Support member) 4a Horizontally moving workpiece receiver (common support) 5 Moving mechanism (moving means) 6 Inlet slider (loading member) 6 Outlet slider (unloading member) 8 Axis lifting mechanism (elevating means) 9 Axis moving mechanism (switching) Means) 51 Beam frame (moving means) 107 Heat treatment chamber A Ascending side work loading part, A
Row (first support part) B Lower side work loading part, B
Row (second support part) W Glass substrate, work (article)

Claims (4)

(57) [Claims] 1. A first support portion and a second support portion for supporting an article in a plurality of stages from one end to the other end in a heat treatment chamber, and the article is inserted from one end of the first support portion. An article of a heat treatment apparatus configured to move one step at a time, transfer the other end to the other end of the second support part, and move the step at the second support part one step at a time to get out from the one end. In the transfer device, a support member provided on each of the first support portion and the second support portion, the support member including a support portion for supporting the article in a plurality of stages, an elevating means for elevating and lowering the support member at a predetermined time; Switching means for switching the support portion between a support position for articles and a retreat position retracted therefrom at a predetermined time; and a shared support member shared by the first support portion and the second support portion, Provided to support the goods of A shared support member provided with a support portion for use, and moving means for reciprocating the shared support member between the first support portion and the second support portion at a predetermined time. Equipment transport equipment. 2. A carrying member for carrying the article into the heat treatment chamber and a carrying member for carrying the article out of the heat treatment chamber, wherein at least one of the carrying member and the carrying member is moved by the moving means. The article conveying device of the heat treatment apparatus according to claim 1, wherein the article is conveyed. 3. The article has a quadrangular shape, and the support members are disposed around the article at four locations spaced apart from each other, and a support portion of each of the four support members has a support position. 2. The article transfer device of the heat treatment device according to claim 1, wherein the two sides of the quadrangular shape can be supported. 4. The article has a quadrangular shape, and the shared support members are arranged at four locations around the article at a distance from each other, and the shared support portions of the shared support members at the four locations, respectively. 2. The article transfer device of the heat treatment apparatus according to claim 1, wherein the support member can support the two sides of the quadrangular shape at a support position. 3.