JP3099946B2 - Resonator for ultrasonic vibration bonding equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a resonator mounted on both ends of an apparatus for joining superposed members by ultrasonic vibration.

[0002]

2. Description of the Related Art An ultrasonic vibration bonding apparatus disclosed in Japanese Patent Publication No. 54-13349 is composed of a mounting table and a resonator coupled to a vibrator that generates ultrasonic vibrations. By holding the joining member under pressure and transmitting the ultrasonic vibration from the vibrator to the resonator, the metal elements of the members to be joined are overlapped and joined.

[0003]

The resonator used in such an ultrasonic vibration bonding apparatus is composed of a rod-shaped lump made of any one of aluminum, iron, titanium and the like, and a material and thickness of a member to be bonded.・ Cutting is performed to the shape and size set from the shape, oscillation output of the vibrator, etc., and a primary processed product is made from the lump, and this primary processed product is connected to the vibrator and actually vibrated. In order to make the resonance state the desired state, the secondary processing such as adjusting the length and thickness is performed on the primary processed product, and the tuning is performed in the resonance state, so that it is used. At the temperature at the time of joining, the joining action portion of the resonator causes diffusion and wear. When such wear is repeated and the surface of the joining action portion is roughened, poor joining of the joined member occurs, or a joining mark is formed on the surface of the joined member, resulting in lack of quality and reliability. The surface of the joint is polished and repaired. However, the margin of polishing of the joint action portion cannot be set too much because of the proper resonance state, and cannot be used after several repairs. If this joint becomes unusable, the entire resonator must be replaced with a new one, which is uneconomical.

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a resonator for an ultrasonic vibration bonding apparatus which can replace the annular bonding member and can improve the economic efficiency and the quality reliability.

[0005]

According to a first aspect of the present invention, there is provided a resonator for an ultrasonic vibration bonding apparatus, wherein the resonator is mounted on both ends of the ultrasonic vibration bonding apparatus, and is an integer of 1/2 wavelength of a resonance frequency. The main body is divided into a plurality of body splitting elements each having a double length and having a support portion, and an annular jointing body. Are interposed between a pair of butt end faces, and are coaxially connected to both of the main body dividing elements forming the set of butt by coupling by the screw means. According to the structure of the first aspect, the resonator in which the plurality of main body dividing elements and the annular joint acting body are coaxially coupled by the screw means is attached to both ends of the resonator using the support portion, so that the resonator is provided. The member to be joined can be appropriately joined to the member to be joined by being appropriately pressurized and held without being inclined and resonating with the ultrasonic vibration transmitted from the vibrator. Then, when the joint is unusable, the connection by the screw means is released, and the old joint that has become unusable is replaced with a new joint, and the resonance state is properly tuned. The used resonator can be reused, which is economical and can improve quality reliability. According to a second aspect of the present invention, there is provided a resonator for an ultrasonic vibration bonding apparatus, wherein the plurality of main body divisional elements according to the first aspect are provided with a fitting projection formed at the center of an end on the abutting side, and an annular step on the outer periphery thereof. It has a formed butted end surface and a screw hole formed at the center of the fitting projection, and an annular joint acting body is fitted around the outer periphery of the fitting projection, and a plurality of body splitting elements are connected by screw means. It is characterized by doing. According to the configuration of the second aspect, by fitting the annular joint acting body around the outer periphery of the fitting projection, it is possible to eliminate minute rattling due to the screw means. According to a third aspect of the present invention, there is provided a resonator for an ultrasonic vibration bonding apparatus, wherein the fitting of the fitting protrusion according to the second aspect and the fitting of the bonding action body are matched. According to the configuration of the third aspect, by coordinating the fitting between the fitting protrusion and the joining body, it is possible to improve the coaxiality of the joining body with respect to the main body dividing element. According to a fourth aspect of the present invention, there is provided a resonator for an ultrasonic vibration bonding apparatus, wherein the screw means according to any one of the first to third aspects is formed by a headless screw. According to this configuration, since the screw means is formed by a headless screw, the screw means can be formed easily and easily. The resonator for an ultrasonic vibration bonding apparatus according to claim 5,
The screw means according to any one of claims 1 to 3, wherein the screw means is formed by a screw hole formed in the joint acting body and a screw portion formed on the outer peripheral surface of the fitting projection of the plurality of main body division elements. And According to the configuration of the fifth aspect, the joining action body is interposed between the plurality of main body division elements, and the screw portion is fastened to the screw hole, so that the joining action body is sandwiched by the plurality of main body division elements. The main body dividing element and the joint body can be coaxially coupled. According to a sixth aspect of the present invention, there is provided a resonator for an ultrasonic vibration bonding apparatus, wherein the plurality of main body division elements and the annular bonding action body according to any one of the first to fifth aspects are coaxially coupled by screw means. A gap is formed between the divided elements. According to the configuration of the sixth aspect, by forming a gap between the plurality of main body division elements, the plurality of main body division elements and the joining action body can be firmly connected.

[0006]

1 to 3 show a first embodiment. The ultrasonic vibration bonding apparatus shown in FIG.
The vibrator 13 is located above the working space 12 formed in front of the
The resonator 1 coaxially coupled is held in a horizontal state with both ends supported by a holder 14, and a plurality of metal-made bonded members (not shown) are mounted on a mounting table 15 provided in a lower portion of a work space 12. The members are placed one on top of the other, and the holder 14 is lowered by a pressure mechanism (not shown) built in the apparatus main body 11 above the work space 12, so that the joining action portion 6 b of the resonator 1 does not tilt and Thus, the overlapped portions of the plurality of members to be joined are appropriately pressed and held between them in a parallel state. Then, by transmitting ultrasonic vibrations from the vibrator 13 to the resonator 1, the plurality of members to be bonded are appropriately bonded.

As shown in FIGS. 1 and 2, the resonator 1 of this embodiment includes a plurality of ultrasonic horns 2 and 3 and a plurality of boosters 4 made of any one material such as aluminum, iron, and titanium. 5 is divided into a plurality of body-dividing elements such as 5 and a joining body 6 formed in an annular shape of any one of aluminum, iron, titanium and the like, and joined with these body-dividing elements 2 to 5 It has a form in which the working body 6 is coaxially connected with a plurality of headless screws 7, 8, 9 as screw means.
Each of the headless screws 7 to 9 has a tool hole for fitting a tool such as a square wrench (not shown) on one end surface and fastening the headless screws 7 to 9 to screw holes of a mating member. Further, each of the main body dividing elements 2 to 5 can be practically used if it has a length that is an integral multiple of a half wavelength of the resonance frequency. In this embodiment, however, the booster 4 is connected to the maximum vibration amplitude point (vibration rate). Point) The ultrasonic horn 2 has a length of １ ／ wavelength of the resonance frequency from f1 to the maximum vibration amplitude point f3, and the ultrasonic horn 2 has one of the resonance frequencies from the maximum vibration amplitude point f3 to the maximum vibration amplitude point f5.
The ultrasonic horn 3 has a length of / 2 wavelengths, and the ultrasonic horn 3 has a length of 1 /
It has a length of 2 wavelengths and the booster 5 has a maximum vibration amplitude point f
It has a length of 波長 wavelength of the resonance frequency from 7 to the maximum vibration amplitude point f9. Therefore, the resonator 1 has a length corresponding to two wavelengths of the resonance frequency as a whole. The material of the joining action body 6 may be the same as or different from the materials of the ultrasonic horns 2 and 3 and the boosters 4 and 5, but it is preferable to determine it based on the balance with the material of the work to be joined.

Each of the ultrasonic horns 2, 3 has a fitting projection 2a,
3a, fitting projections 2b, 3b formed coaxially to fit the boosters 4, 5 at the other ends, and fitting projections 2a, 3
Screw holes 2c, 2d, 3c, 3d formed to fasten headless screws 7 to 9 at the center portions of a, 2b, 3b, and buttings formed annularly stepped on the outer periphery of fitting projections 2a, 3a. End surfaces 2f, 3f, tool holes 2e, 3 formed in the outer peripheral surface
e. Each of the boosters 4 and 5 has a fitting recess 4 formed coaxially to fit the ultrasonic horns 2 and 3 at one end.
a, 5a, fitting projections 4b, 5b, fitting recesses 4a, 5a, and fitting projections formed coaxially to fit the vibrator 13 (see FIG. 3) or another booster (not shown) at the other end. 4
Screw holes 4c, 4d, 5c formed at the center of b, 5b for fastening headless screws 8, 9 or headless screws (not shown).
5d, minimum vibration amplitude point (nodal point) f2, f8
Support portions 4e, 5 projecting annularly from the outer peripheral surface at the position
e, having tool holes 4f, 5f formed on the outer peripheral surface.
The joining action body 6 has a through hole 6a formed in the center portion, and a plurality of joining acting portions 6b protruding from the outer peripheral surface at equal positions in the circumferential direction. Each of the joining action portions 6b has a joining action surface formed so as to press and hold the overlapped portion of the members to be joined with the flat upper surface of the mounting table 13 (see FIG. 3). The ultrasonic horns 2 and 3 have different codes, but in practice, the same two ultrasonic horns are used facing each other so that the fitting projections 2a and 3a face each other, and the boosters 4 and 5 are used. However, in practice, it is economically preferable to use the same two boosters facing each other so that the fitting recesses 4a and 5a face each other.

According to this embodiment, as shown in FIG. 2, the headless screw 7 is fastened to the screw hole 2c at one end of the ultrasonic horn 2, and the fitting projection 2a of the ultrasonic horn 2 is joined to the joining body. 6, the headless screw 7 protruding from the ultrasonic horn 2 is fastened to the screw hole 3c at one end of the ultrasonic horn 3 on the side of the joint operative body 6 so that the joint operative body 6 is inserted. Is a set of butted end faces 2 of ultrasonic horns 2 and 3
f, 3f. On the opposite side of the joining action body 6, the other end of each ultrasonic horn 2, 3 is connected to each booster 4, 5.
Of the fitting recesses 4a, 5a are fastened with headless screws 8, 9. In this state, a fastening tool (not shown) is inserted into the tool holes 4f and 5f, and the boosters 4 and 5 are rotated in opposite directions to each other, so that the ultrasonic horns 2 and 3, the boosters 4 and 5 and the jointing body are operated. 6 is firmly fastened.

[0010] By this fastening, the joining action body 6 is sandwiched between the butted end faces 2f, 3f, and the ultrasonic horns 2, 3
And the joint acting body 6 is fitted over the fitting projections 2a, 3a to form a small play between the headless screw 7 and the screw holes 2c, 3c. The sticking action is eliminated and the ultrasonic horns 2 and 3 are accurately coaxially coupled. Also, the fitting recesses 4a, 5a of the boosters 4, 5 are fitted to the fitting projections 2b, 3b of the ultrasonic horns 2, 3, and the headless screws 8, 9 and the screw holes 2d, 3d, 4c, 5c are formed. Minimal rattling between the ultrasonic horns 2 and 3 and the boosters 4 and 5 are accurately and coaxially coupled. Therefore, the resonator 1 in which each of the ultrasonic horns 2 and 3, each of the boosters 4 and 5, and the joint body 6 are coaxially coupled with the headless screws 7 to 9 is
Using the support portions 4e and 5e on both sides thereof, the holder 14 shown in FIG. 3 is attached to both ends of the support, and the vibrator 13 shown in FIG. 3 is attached to the booster 4 of the resonator 1 by a headless screw (not shown). The resonator 1 is coupled to the ultrasonic vibration from the vibrator 13.
Is caused to resonate, the joining action body 6 vibrates integrally with the ultrasonic horns 2 and 3 without dancing, so that the plurality of members to be joined can be appropriately joined by superposition.

When the joining operation by the ultrasonic vibration and the repair by polishing the surface of the joining section 6b are repeated and the joining section 6 becomes unusable, the ultrasonic horn 2,
The ultrasonic horns 2 and 3 are loosened from each other and removed by inserting the same fastening tool into the tool holes 2e and 3e of the ultrasonic horn 2 and the ultrasonic horn 2 and
Remove from step 3. Thereafter, when the ultrasonic horns 2 and 3 are coupled with the headless screws 7, the resonator 1 can be used repeatedly by coupling the new joining body 6 to the ultrasonic horns 2 and 3 coaxially. In other words, when the joining member 6 becomes unusable, simply replacing the unusable old joining member 6 with a new joining member 6 allows the resonance state of the resonator 1 to be appropriately tuned. Can be reused, it is economical, and the quality reliability can be improved.

FIG. 4 shows a second embodiment, in which the resonator 1
, A plurality of body splitting elements such as a plurality of ultrasonic horns 21 and 22 corresponding to the ultrasonic horns 2 and 3 and a joint action body 6 are coaxially coupled with a headless screw 7. Have a form. In the case of this embodiment, the ultrasonic horn 22 moves from the maximum vibration amplitude point f11 to the maximum vibration amplitude point f13.
The ultrasonic horn 23 has a length of 波長 wavelength of the resonance frequency up to the maximum vibration amplitude point f13 to the maximum vibration amplitude point f13.
The resonator 21 has a length of １ ／ wavelength of the resonance frequency up to 15, and the resonator 21 as a whole has a length of one wavelength of the resonance frequency. Each of the ultrasonic horns 22 and 23 is provided with the fitting protrusion 2.
a, 3a, fitting projections 22b, 23b corresponding to the fitting projections 2b, 3b, and screw holes 22 corresponding to the screw holes 2c, 2d, 3c, 3d.
c, 22d, 23c, 23d, tool holes 2e, 3e
Holes 22e, 23e for tooling, and butting end faces 22f, 23 corresponding to the butting end faces 2f, 3f.
f, supporting portions 22g and 23g projecting annularly from the outer peripheral surface at the positions of the minimum vibration amplitude points f12 and f14.

According to this embodiment, the fitting projections 22a,
With the ultrasonic horns 22 and 2 facing each other,
3 and a headless screw 7
, The joining action body 6 is sandwiched between the butted end faces 22f, 23f, and the ultrasonic horns 13, 1
4 and the headless screw 7 are coaxially and firmly connected. Moreover, the joining action body 6 is fitted over the fitting projections 22a and 23a to eliminate the slight rattling between the headless screw 7 and the screw holes 22c and 23c, and the joining action body 6 and each ultrasonic wave are removed. The horns 22 and 23 are precisely coaxially coupled. Therefore, the resonator 20 in which the joining action body 6 and the ultrasonic horns 22 and 23 are coaxially coupled by the headless screw 7 is used to make use of the supporting portions 22g and 23g on both sides of the resonator 20 to correspond to the holder 14 shown in FIG. Of the resonator 20 is coupled to an ultrasonic horn 22 of the resonator 20 by a headless screw (not shown) corresponding to the vibrator 13, and the ultrasonic wave from the vibrator When the resonator 20 resonates with the vibration, the joining action body 6 vibrates integrally with the ultrasonic horns 22 and 23 without dancing, so that the plurality of members to be joined can be appropriately joined by superposition. Then, when the joining member 6 becomes unusable, the old unusable joining member 6 may be replaced with a new joining member 6.

FIG. 5 shows a third embodiment, in which a main body dividing element 3 corresponding to the ultrasonic horns 2, 3 or 22, 23 is shown.
2, 33 are coaxially connected to each other by a screwing means including a screw hole 36c and screw portions 32h, 33h, with a bonding member 36 corresponding to the bonding member 6 therebetween. That is, the main body dividing elements 32, 33 are provided with the fitting projections 32 corresponding to the fitting projections 2a, 3a or 22a, 23a.
a, screw portions 32h, 3 as external threads on the outer peripheral surface of 33a
3h, the butted end faces 2f, 3f or 22f, 33
It has butted end surfaces 32f and 33f corresponding to f.
The joint action body 36 is provided with a screw portion 3 on the inner peripheral surface of the through hole 6a.
It has a screw hole 36c as a female screw formed to fit 2h and 33h, and a joining action portion 36b corresponding to the joining action portion 6b. Then, the screw hole 36c of the joining action body 36 is fastened to the screw portion 32h of the main body dividing element 32,
One end of the joining action body 36 is brought into contact with the butt end face 32f of the main body dividing element 32, and the screw portion 33h of the main body dividing element 33 is fastened to the screw hole 36c of the joining acting body 36 protruding from the main body dividing element 32. , Butted end face 32
The main body dividing elements 32, 33 and the main body 36 can be coaxially and firmly connected to each other by sandwiching the main body 36 between f and 33f. According to this embodiment, since the screw means is formed by the threaded portions 32h and 33h of the main body dividing elements 32 and 33 and the screw hole 36c of the joining action body 36, it is separate from the main body dividing elements 32 and 33 and the joining action body 36. A simple structure that eliminates screw members such as headless screws on the body
2, 33 and the joining action body 36 can be connected.

FIG. 6 shows a fourth embodiment in which main body dividing elements 42 and 43 corresponding to the main body dividing elements 32 and 33 are
Fitting projection 42 corresponding to the fitting projections 32a, 33a
a, 43a, screw holes 2c, 3c or 22c, 23c
Screw holes 42c, 43c corresponding to the butt end surfaces 32f, 43f corresponding to the butt end surfaces 32f, 33f.
f. The joining action body 46 corresponding to the joining action body 36 has an alignment hole 46a corresponding to the through hole 6a and a joining action portion 46b corresponding to the joining action portion 36b. The alignment hole 46a has a hole diameter determined by the fitting tolerance to such an extent that the fitting hole 46a can fit into the fitting protrusions 42a, 43a without play. Therefore, by fitting the fitting projections 42a, 43a of the main body dividing elements 42, 43 with the alignment holes 46a of the joining operating body 46, the coaxiality of the joining operating body 46 to the main body dividing elements 42, 43 is improved. Can be.

FIG. 7 shows a fifth embodiment in which main body dividing elements 52 and 53 corresponding to the main body dividing elements 42 and 43 are
Fitting projection 52 corresponding to the fitting projections 42a, 43a
a, 53a, screw holes 52c, 53c corresponding to the screw holes 42c, 43c, and the butted end surfaces 42f, 43f.
Have butted end faces 52f, 53f. A joining action body 56 corresponding to the joining action body 46 is provided with a matching recess 56a at both ends corresponding to the alignment hole 46a, a joining action portion 56b corresponding to the joining action portion 46b, and a partition wall forming the bottom of the matching recess 56a at both ends. 56c, through hole 56d formed for inserting headless screw 7 in the center of partition wall 56c
Having. Therefore, by joining the main body dividing elements 42 and 43 and the joining action body 46 coaxially with the headless screw 7, the joining action body 6 is sandwiched between the butting end faces 52f and 53f, and the end faces of the fitting projections 52a and 53a. By sandwiching the partition wall 56c of the joint action body 6, the main body dividing elements 52, 53 and the joint action body 56 can be integrally connected. Although illustration is omitted, the same can be applied to the case where a gap is formed between the fitting projections 52a and 53a and the partition wall 56c.

FIG. 8 shows a sixth embodiment, in which main body dividing elements 62, 63 corresponding to the main body dividing elements 53, 53 are:
Screw holes 62c and 63c corresponding to the screw holes 52c and 53c are provided at the center of the end faces 62i and 63i facing each other. A joining action body 66 corresponding to the joining action body 56,
A joint operating portion 66b corresponding to the joint operating portion 56b, a through hole 66 formed at the center for inserting the headless screw 7
d. Therefore, by connecting the main body dividing elements 62 and 63 and the joining action body 66 coaxially with the headless screw 7,
The main body dividing elements 52 and 53 and the joining action body 56 can be joined by sandwiching the periphery of the through hole 66d of the joining action body 66 between the end faces 62i and 63i of the main body dividing elements 62 and 63. In this connection, the joining action body 66 can be coaxially aligned with the main body dividing element 63 from the outer peripheral side by a jig 67 that can be opened and closed. The jig 67 includes main body dividing elements 52 and 5.
It is needless to say that the joint 3 and the joining body 66 are removed after being joined by the headless screw 7.

FIG. 9 shows a seventh embodiment in which main body dividing elements 72 and 73 corresponding to the main body dividing elements 62 and 63 are
Fitting projection 72 corresponding to the fitting projections 42a, 43a
a, 73a, butted end faces 72f, 73f corresponding to the butted end faces 52f, 53f, fitting projections 72f,
In the center of 73f, a screw portion 72j as a male screw and a screw hole 7
3j, and after fitting the joint acting body 46 to the fitting projection 72 or 73 of the main body dividing element 72 or 73, the screw portion 72j is fastened to the screw hole 73j to thereby provide a butt end face 72f. , 73f, the main body dividing elements 42, 43 and the joint operating body 46 can be coaxially connected by the screw portion 72j and the screw hole 73j.

FIG. 10 shows an eighth embodiment in which a joining member 86 corresponding to the joining member 46 is provided with the alignment hole 46.
a, which has a width greater than the distance between the butting end faces 42f, 43f of the main body dividing elements 42, 43 facing each other. When the joint 43 is coaxially coupled with the joint-acting body 86 by the headless screw 7, the joint-acting body 46 is sandwiched between the butting end surfaces 72f, 73f, and a gap 87 is provided between the fitting protrusion 42a and the fitting protrusion 43a.
Is formed, the main body dividing elements 42 and 43 and the joining action body 46 can be firmly connected. The same operation and effect can be obtained even if the joining action body 86 is elastically deformed to the outer peripheral side in an arc shape by fastening the main body dividing elements 42 and 43 and the headless screw 7.

FIG. 11 shows a ninth embodiment in which a joining member 96 corresponding to the joining member 86 is provided with the alignment hole 86.
a, and a joining action portion 96b provided on one end side of the outer periphery. When the main body dividing elements 62 and 43 and the joining action body 96 are coaxially joined by the headless screw 7, the end face 62i is provided. And the abutting end face 43f, the joining action body 96 is interposed therebetween, and a gap 97 is formed between the end face 62i and the fitting projection 43a.
And the joint body 96 can be firmly joined. Due to the fastening of the main body dividing elements 42 and 43 and the headless screw 7, the joining action body 86 may be elastically deformed to the outer peripheral side in an arc shape.

FIG. 12 shows a tenth embodiment, in which a main body dividing element 100 corresponding to the main body dividing element 43 includes a fitting projection 100a corresponding to the fitting projection 43a, and a screw hole 100c corresponding to the screw hole 43c. , A butt end face 100f corresponding to the butt end face 43f.
When coaxially coupled by the
0f and the end face 62i.
By forming the gap 107 between the main body divisional elements 62 and 100 and the joint acting body 46, the gap 107 is formed between the main body divisional elements 62 and 100. This body division element 4
3, 100 and the headless screw 7 are fastened, so that
6 may be elastically deformed to the outer peripheral side in an arc shape.

The resonator 1 shown in FIG. 2 and the resonator 21 shown in FIG.
When the vibrator 13 is coaxially coupled with a headless screw (not shown), a booster (not shown) having a length equal to an integral multiple of a half wavelength, such as a half wavelength of the resonance frequency, is connected to the resonator 1. , 21 and the vibrator 13 may be coaxially coupled to each other in the same manner as in the above embodiment.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing a first embodiment.

FIGS. 2A and 2B show the same embodiment, wherein FIG. 2A is a sectional view along the axial direction, and FIG.

FIG. 3 is an exemplary perspective view showing the ultrasonic vibration bonding apparatus according to the embodiment;

4A and 4B show a second embodiment, wherein FIG. 4A is a cross-sectional view along the axial direction, and FIG.

FIG. 5 is a sectional view showing a third embodiment.

FIG. 6 is a sectional view showing a fourth embodiment.

FIG. 7 is a sectional view showing a fifth embodiment.

FIG. 8 is a sectional view showing a sixth embodiment.

FIG. 9 is a sectional view showing a seventh embodiment.

FIG. 10 is a sectional view showing an eighth embodiment.

FIG. 11 is a sectional view showing a ninth embodiment.

FIG. 12 is a sectional view showing a tenth embodiment.

[Description of Signs] 1,21 Resonator 2,3,22,23 Ultrasonic Horn (Body Splitting Element) 32,33,42,43,52,53,62,63,7
2,73,100 Body division element 6,36,46,56,66,86,96 Joining body 7 Headless screw (screw means) 32h, 33h, 73j Screw hole (screw means) 36c, 72j Screw part (screw means)

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-2-203972 (JP, A) JP-A-60-206471 (JP, A) JP-A-4-234631 (JP, A) JP-A-9-209 253869 (JP, A) (58) Field surveyed (Int. Cl. ⁷ , DB name) B23K 20/10 B06B 1/02

Claims (6)

(57) [Claims] 1. A resonator assembled at both ends of an ultrasonic vibration bonding apparatus, the resonator having a length equal to an integral multiple of a half wavelength of a resonance frequency and having a support portion, and When these main body division elements are butted with each other and coaxially connected with a screw means, the main body dividing elements are interposed between a pair of butted end faces, and the main body divided elements are connected by the screw means. A resonator for an ultrasonic vibration bonding apparatus, wherein the resonator is coaxially coupled to both of a main body dividing element forming a set of abutments. 2. A plurality of main body dividing elements are formed at a center of a fitting projection formed at a center of an end on a butt side, a butt end face formed in a stepped shape in an annular shape on an outer periphery thereof, and a center of the fitting projection. 2. The ultrasonic vibration bonding as claimed in claim 1, wherein an annular joint acting body is fitted around the outer periphery of the fitting projection, and the plurality of main body dividing elements are connected by screw means. Device resonator. 3. The resonator for an ultrasonic vibration bonding apparatus according to claim 2, wherein the fitting between the fitting projection and the joining body is matched. 4. The resonator for an ultrasonic vibration bonding apparatus according to claim 1, wherein said screw means is formed by a headless screw. 5. The screw means is formed by a screw hole formed in the joint acting body and a screw part formed on the outer peripheral surface of the fitting projection of the plurality of main body dividing elements.
The resonator for an ultrasonic vibration bonding apparatus according to any one of claims 1 to 3. 6. The device according to claim 1, wherein a gap is formed between the plurality of main body division elements when the plurality of main body division elements and the annular joining action body are coaxially connected by screw means. A resonator for an ultrasonic vibration bonding device according to any one of the above.