JP3096609U - Thin film transmission measurement cell, thin film transmission measurement device - Google Patents
Thin film transmission measurement cell, thin film transmission measurement deviceInfo
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- JP3096609U JP3096609U JP2003001479U JP2003001479U JP3096609U JP 3096609 U JP3096609 U JP 3096609U JP 2003001479 U JP2003001479 U JP 2003001479U JP 2003001479 U JP2003001479 U JP 2003001479U JP 3096609 U JP3096609 U JP 3096609U
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Abstract
(57)【要約】
【課題】 薄膜の有効面積を容易に変更可能な、薄膜の
透過量測定セルを得る。
【解決手段】 第１開口部を有する第１セル１１と、第
１開口部に対面する第２開口部を有する第２セル１４か
らなる薄膜の透過量測定セル２において、表面と底面を
貫く第１貫通孔２１を有する薄膜支持体４であり、前記
薄膜支持体の表面であって、第１貫通孔開口部の周辺近
傍に、開口部を取り巻く第１溝を設け、第１溝に第１シ
ール部材２４を設置し、前記薄膜支持体の底面に、第１
貫通孔開口部を取り巻く第２溝を設け、第２溝に第２シ
ール部材２８を設置し、かつ、第１開口部に対面する第
１セルの内底面１６に第２シール部材が当接するもので
ある薄膜支持体と、薄膜支持体の表面に対面して載置さ
れる、第２貫通孔３１を有する板状の薄膜押さえ板５を
有することを特徴とする薄膜の透過量測定セル。
(57) [Problem] To provide a thin-film transmission amount measuring cell capable of easily changing the effective area of a thin film. SOLUTION: In a thin-film transmission amount measuring cell 2 including a first cell 11 having a first opening and a second cell 14 having a second opening facing the first opening, a second cell penetrating the surface and the bottom surface. A first groove surrounding the opening on the surface of the thin film support near the periphery of the first through-hole opening, wherein the first groove is provided in the first groove; A sealing member 24 is provided, and a first
A second groove surrounding the through-hole opening is provided, a second seal member is provided in the second groove, and the second seal member contacts the inner bottom surface 16 of the first cell facing the first opening. And a plate-like thin film holding plate 5 having a second through-hole 31 and placed on the thin film support so as to face the surface of the thin film support.
Description
【０００１】[0001]
本考案は、フィルムなどを透過する気体・液体の透過量を測定する薄膜の透過 量測定セルと、当該セルを使用する薄膜の透過量測定装置に関するものである。 The present invention is a thin film permeation measuring the amount of gas or liquid permeating through a film. The present invention relates to a quantity measuring cell and a thin film transmission quantity measuring apparatus using the cell.
【０００２】[0002]
プラスチックフィルムなどの気体・液体の透過度を測定するのに薄膜の透過量 測定装置が使用されている。薄膜の透過量測定装置の測定セルは、第１セル（供 給側セル）と第２セル（透過側セル）から構成され、第１セルと第２セルは一定 面積の開口部で対面している。測定にあたっては、この開口部の間に薄膜を挿み 、透過試料を第１セルに供給し、薄膜を透過して第２セルに移行した透過試料の 量を測定する（例えば、非特許文献１、２参照。）。 Permeability of thin film to measure the permeability of gas and liquid such as plastic film A measuring device is used. The measuring cell of the thin film transmission measuring device is the first cell (provided It is composed of a supply side cell) and a second cell (transmission side cell), and the first cell and the second cell are constant. Faced with the opening of the area. For measurement, insert a thin film between these openings. Of the permeated sample which was supplied to the first cell and permeated through the thin film to the second cell. The amount is measured (for example, see Non-Patent Documents 1 and 2).
【０００３】[0003]
【非特許文献１】 ＪＩＳ Ｋ ７１２６ プラスチックフィルム及びシートの気体透過度試験方法[Non-Patent Document 1] JIS K 7126 Gas Permeability Test Method for Plastic Films and Sheets
【非特許文献２】 ＪＩＳ Ｋ ７１２９ プラスチックフィルム及びシートの水蒸気透過度試験方 法（機器測定法）[Non-patent document 2] JIS K 7129 Method for testing water vapor permeability of plastic films and sheets Method (equipment measurement method)
【０００４】[0004]
従来の薄膜の透過量測定セルは開口部の面積が一定である。すなわち測定に供 される薄膜試験片の有効透過面積は一定である。従来の透過量測定セルを用いる 透過量測定装置を使用するときに、第２セルから検出器に導かれる透過試料が多 く検出器の応答範囲を越えると、薄膜試験片の有効面積を小さくする必要がある 。 例えば、水蒸気透過度が非常に大きい薄膜を測定する場合には、薄膜の一部分 をマスクして、有効透過面積を小さくする方法が用いられている。具体的には、 接着剤のついたアルミニウム箔に開口部を設け、薄膜を挟み込むように両面にア ルミニウム箔を張り合わせ、この薄膜を測定セルに挟み込むことにより、薄膜の 有効透過面積を小さくして測定を行っていた。 In the conventional thin film transmission amount measuring cell, the area of the opening is constant. That is, for measurement The effective permeation area of the thin film test piece is constant. Uses a conventional transmission cell When using the transmission amount measurement device, many transmission samples are introduced from the second cell to the detector. If the response range of the detector is exceeded, it is necessary to reduce the effective area of the thin film test piece. . For example, when measuring a thin film with a very high water vapor transmission rate, Is used to reduce the effective transmission area. In particular, Make an opening in the aluminum foil with adhesive and insert it on both sides as if sandwiching the thin film. By laminating the aluminum foil and sandwiching this thin film in the measuring cell, The measurement was performed with a small effective transmission area.
【０００５】 しかし、アルミニウム箔に面積の正確な開口部を設けること、また、このアル ミニウム箔をたるみやしわ無く薄膜に貼り付けることには、熟練を必要とする。 また、薄膜の多様化に伴い、薄膜の透過試験に用いる透過試料も多様化してい る。透過試料によっては（例えば透過試料に有機溶剤を用いると）、アルミニウ ム箔の接着剤を溶解し、マスク性能が損なわれて、測定が失敗する場合も生じる 。[0005] However, it is necessary to make an accurate area opening in the aluminum foil. Adhering a minium foil to a thin film without sagging or wrinkling requires skill. In addition, with the diversification of thin films, the permeable samples used for thin film permeation tests have also diversified. It Depending on the transmission sample (for example, using an organic solvent for the transmission sample), aluminum It also occurs when the adhesive of the foil is melted, the performance of the mask is impaired, and the measurement fails. .
【０００６】 そこで、本考案は測定に使用する薄膜の有効面積を容易に変更可能な、薄膜の 透過量測定セルを得ることを課題とする。 また、本考案はこのようなセルを使用する透過量測定装置を得ることを課題と する。 さらに、本考案は透過量測定装置のセルに適用可能であって、測定に供する薄 膜の有効面積を容易に変更することが可能なセルアダプターを得ることを課題と する。[0006] Therefore, the present invention can easily change the effective area of the thin film used for measurement. An object is to obtain a transmission amount measurement cell. Another object of the present invention is to obtain a transmission amount measuring device using such a cell. To do. Furthermore, the present invention can be applied to the cell of the transmission amount measuring device, and can be used for the measurement. The challenge is to obtain a cell adapter that can easily change the effective area of the membrane. To do.
【０００７】[0007]
上記の課題を解決するために、請求項１にかかる薄膜の透過量測定セルは、第 １開口部を有する第１セルと、第１開口部に対面する第２開口部を有する第２セ ルからなる薄膜の透過量測定セルにおいて、表面と底面を貫く第１貫通孔を有す る薄膜支持体であり、前記薄膜支持体の表面であって、第１貫通孔開口部の周辺 近傍に、前記開口部を取り巻く第１溝を設け、第１溝に第１シール部材を設置し 、前記薄膜支持体の底面に、第１貫通孔開口部を取り巻く第２溝を設け、第２溝 に第２シール部材を設置し、かつ、第１開口部に対面する第１セルの内底面乃至 第２開口部に対面する第２セルの内底面のいずれか一方に第２シール部材が当接 するものである薄膜支持体と、前記薄膜支持体の表面に対面して載置される、第 ２貫通孔を有する板状の薄膜押さえ板を有することを特徴とする。 また、請求項２にかかる薄膜の透過量測定セルは、第２シール部材が、第２開 口部に対面する第２セルの内底面に当接することを特徴とする。 In order to solve the above problems, a thin film transmission amount measuring cell according to claim 1 A first cell having a first opening and a second cell having a second opening facing the first opening. In a cell for measuring the amount of transmission of a thin film made of silicon, it has a first through hole penetrating the surface and the bottom surface. A thin film support, which is the surface of the thin film support, and is located around the opening of the first through hole. A first groove surrounding the opening is provided in the vicinity, and a first seal member is installed in the first groove. A second groove surrounding the first through hole opening is provided on the bottom surface of the thin film support, A second sealing member on the inner surface of the first cell facing the first opening or The second seal member abuts either one of the inner bottom surfaces of the second cells facing the second opening. A thin film support that is to be placed, and is placed facing the surface of the thin film support. It is characterized by having a plate-shaped thin film pressing plate having two through holes. In addition, in the thin film permeation amount measurement cell according to claim 2, the second seal member has a second opening. It is characterized in that it abuts on the inner bottom surface of the second cell facing the mouth portion.
【０００８】 さらに、請求項３にかかる薄膜の透過量測定装置は、請求項１乃至２いずれか 記載の薄膜の透過量測定セルを備えたことを特徴とする。 また、請求項４にかかる薄膜の透過量測定セル用の薄膜支持アダプターは、第 １開口部を有する第１セルと、第１開口部に対面する第２開口部を有する第２セ ルからなる薄膜の透過量測定セル用の薄膜支持アダプターであって、表面と底面 を貫く第１貫通孔を有する薄膜支持体であり、前記薄膜支持体の表面であって、 第１貫通孔開口部の周辺近傍に、前記開口部を取り巻く第１溝を設け、第１溝に 第１シール部材を設置し、前記薄膜支持体の底面に、第１貫通孔開口部を取り巻 く第２溝を設け、第２溝に第２シール部材を設置し、かつ、第１開口部に対面す る第１セルの内底面乃至第２開口部に対面する第２セルの内底面のいずれか一方 に第２シール部材が当接するものである薄膜支持体と、前記薄膜支持体の表面に 対面して載置される、第２貫通孔を有する板状の薄膜押さえ板からなることを特 徴とする。[0008] Furthermore, the thin film transmission amount measuring device according to claim 3 is the device according to any one of claims 1 and 2. The thin-film transmission amount measuring cell described above is provided. A thin film support adapter for a thin film transmission amount measuring cell according to claim 4 is A first cell having a first opening and a second cell having a second opening facing the first opening. A thin-film support adapter for a thin-film permeation measurement cell consisting of a top surface and a bottom surface. A thin film support having a first through hole penetrating through the surface of the thin film support, A first groove surrounding the opening is provided in the vicinity of the periphery of the opening of the first through hole. A first seal member is installed, and a first through hole opening is wound around the bottom surface of the thin film support. The second groove is provided, the second seal member is installed in the second groove, and the second opening faces the first opening. Either the inner bottom surface of the first cell or the inner bottom surface of the second cell facing the second opening A thin film support on which the second seal member abuts, and a surface of the thin film support. A special feature is that it consists of a plate-shaped thin film pressing plate having a second through hole that is placed facing each other. To collect.
【０００９】[0009]
以下に実施例により、本考案にかかる透過量測定セル、透過量測定装置と薄膜 支持アダプターをさらに説明する。この考案の実施例に記載されている部材や部 分の寸法、材質、形状、その相対位置などは、とくに特定的な記載のない限りは 、この考案の範囲をそれらのみに限定する趣旨のものではなく、単なる説明例に すぎない。 A transmission amount measuring cell, a transmission amount measuring device and a thin film according to the present invention will be described below with reference to examples. The support adapter will be further described. Members and parts described in the embodiments of the present invention Unless otherwise specified, dimensions, materials, shapes, relative positions, etc. , The scope of the present invention is not intended to be limited to only those, but merely an example Only.
【００１０】 図１は、薄膜の透過量測定装置の概略説明図である。透過量測定装置１は、薄 膜の酸素透過量を等圧法により測定するものであり、窒素ガスをキャリヤーガス に使用している。 透過量測定セル２は、第１セル１１と第２セル１４から構成される。第１セル １１と第２セル１４の開口部の間に薄膜６が挟まれている。酸素ガスボンベ４１ から第１セル１１に酸素ガスが供給される。４２は酸素ガスの出口である。 窒素ガスが、窒素ガスボンベ４３から流量計４４を経て第２セル１４に流入し 、酸素検出器４５を通り出口４６から排出される。４７は記録計である。 第１セル１１に供給された酸素ガスの一部は、薄膜６を透過して第２セル１４ に移行する。移行した酸素ガスは、キャリヤーガスである窒素ガスの流れに乗り 酸素検出器４５に至りその量が検出される。 酸素検出器４５の測定値は、流量計４４で計測される窒素ガス（キャリヤーガ ス）の流量、薄膜の有効面積を使って、薄膜単位面積当たりの酸素ガス透過量に 換算される。[0010] FIG. 1 is a schematic explanatory diagram of a thin film transmission amount measuring apparatus. The transmission amount measuring device 1 is thin The amount of oxygen permeation through the membrane is measured by the isobaric method, and nitrogen gas is used as carrier gas. Used for. The transmission amount measuring cell 2 includes a first cell 11 and a second cell 14. 1st cell The thin film 6 is sandwiched between 11 and the opening of the second cell 14. Oxygen gas cylinder 41 Oxygen gas is supplied to the first cell 11 from. 42 is an outlet of oxygen gas. Nitrogen gas flows from the nitrogen gas cylinder 43 into the second cell 14 via the flowmeter 44. , Passes through the oxygen detector 45 and is discharged from the outlet 46. 47 is a recorder. A part of the oxygen gas supplied to the first cell 11 permeates the thin film 6 and passes through the second cell 14 Move to. The transferred oxygen gas rides on the flow of nitrogen gas, which is the carrier gas. It reaches the oxygen detector 45 and its amount is detected. The measured value of the oxygen detector 45 is the nitrogen gas (carrier gas) measured by the flow meter 44. Flow rate and effective area of thin film to determine the amount of oxygen gas per unit area of thin film. Converted.
【００１１】 図２は本考案にかかる透過量測定セル２の斜視図であり、図３は本考案にかか る透過量測定セル２の断面図である。透過量測定セル２は第１セル枠体１７と第 ２セル枠体１８を複数の固定ビス５６で結合している。 第１セル枠体１７の内部の空隙部は第１セル１１であり、また第２セル枠体１ ８の内部の空隙部は第２セル１４となっている。矢印１２で示される第１セルの 開口部は、矢印１５で示される第２セルの開口部と対面している。第２セル１４ の内部には、薄膜支持体４があり、薄膜支持体４の表面２２に薄膜６が配置され 、その上に薄膜押さえ板５が配置されている。薄膜支持体４の厚さは、第２セル １４の内法深さに略等しい。[0011] 2 is a perspective view of a transmission amount measuring cell 2 according to the present invention, and FIG. FIG. 3 is a cross-sectional view of a transmission amount measuring cell 2 according to the present invention. The permeation amount measurement cell 2 includes a first cell frame 17 and a first cell frame 17. The two-cell frame body 18 is connected by a plurality of fixing screws 56. The void portion inside the first cell frame body 17 is the first cell 11, and the second cell frame body 1 The void inside 8 is the second cell 14. Of the first cell indicated by arrow 12 The opening faces the opening of the second cell indicated by arrow 15. Second cell 14 There is a thin film support 4 inside, and the thin film 6 is arranged on the surface 22 of the thin film support 4. , And the thin film pressing plate 5 is arranged thereon. The thickness of the thin film support 4 is the second cell It is approximately equal to the inner depth of 14.
【００１２】 図４は、薄膜支持体４と薄膜押さえ板５からなる薄膜支持アダプター３の斜視 図である。薄膜支持体４はステンレススチールからなる厚みのある円板状であり 、表面２２と底面２５を貫く第１貫通孔２１が設けられている。薄膜支持体４の 表面２２上で、第１貫通孔２１の開口部２１ａの円周近傍に第１溝２３が彫られ ている。また、薄膜支持体４の底面２５上で、第１貫通孔２１の開口部２１ｂの 円周を取り巻く第２溝２７が彫られている。 ステンレススチールからなる円板状の薄膜押さえ板５の中心部には、第２貫通 孔３１が設けられている。 薄膜支持体４と薄膜押さえ板５の材質は、ステンレススチールに限られず、ア ルミニウム、その他の金属、合成樹脂など、透過試料を透過・吸収せず適度の剛 性を備えた材質を選択することができる。[0012] FIG. 4 is a perspective view of the thin film support adapter 3 including the thin film support 4 and the thin film pressing plate 5. It is a figure. The thin film support 4 is a thick disc made of stainless steel. A first through hole 21 penetrating the surface 22 and the bottom surface 25 is provided. Thin film support 4 On the surface 22, a first groove 23 is engraved near the circumference of the opening 21a of the first through hole 21. ing. In addition, on the bottom surface 25 of the thin film support 4, the opening 21 b of the first through hole 21 A second groove 27 surrounding the circumference is engraved. In the central part of the disk-shaped thin film pressing plate 5 made of stainless steel, the second penetration A hole 31 is provided. The material of the thin film support 4 and the thin film pressing plate 5 is not limited to stainless steel, Rumium, other metals, synthetic resins, etc. do not permeate or absorb permeation samples, and have a suitable rigidity. A material having properties can be selected.
【００１３】 図３中、２８は第２溝２７に設置されたシール部材たるＯリングである。また 、２４は、第１溝２３に設置されたシール部材たるＯリングである。さらに５７ は第１セル枠体１７に彫られた溝に設置されたＯリングである。 透過量測定セル２に薄膜６を挟み込むときは、第２セル枠体１８の第２セル１ ４中に、薄膜支持体４を入れ、薄膜６を載せ、その上に薄膜押さえ板５を載せ、 さらに第１セル枠体１７を載せて、固定ビス５６により、第２セル枠体１８と第 １セル枠体１７を固定する。このとき、第１貫通孔２１と第２貫通孔３１の中心 が一致するように組み立て、固定する。 固定ビス５６を締め付けると薄膜６はＯリング２４と当接し、薄膜６の透過量 測定に供せられる部分は、Ｏリング２４に囲まれる部分となる。同時に、薄膜押 さえ板５が、Ｏリング２４の当接に起因する薄膜の上向き変形の力を受け止める 。よって、薄膜６は変形したり、破れたりすることから保護される。Ｏリング２ ４が設置されている第１溝２３は、第１貫通孔表面２１ａの近傍にあるので、Ｏ リング２４に囲まれる部分の面積は第１貫通孔表面２１ａの面積に略等しい。[0013] In FIG. 3, 28 is an O-ring which is a seal member installed in the second groove 27. Also , 24 are O-rings, which are seal members installed in the first groove 23. Further 57 Is an O-ring installed in the groove carved in the first cell frame 17. When sandwiching the thin film 6 in the transmission amount measuring cell 2, the second cell 1 of the second cell frame 18 is inserted. 4, the thin film support 4 is placed, the thin film 6 is placed, and the thin film pressing plate 5 is placed thereon. Further, the first cell frame body 17 is placed on the second cell frame body 18 and the second cell frame body 18 with the fixing screw 56. The one-cell frame 17 is fixed. At this time, the centers of the first through hole 21 and the second through hole 31 Assemble and secure so that they match. When the fixing screw 56 is tightened, the thin film 6 contacts the O-ring 24, and the amount of permeation of the thin film 6 The portion provided for measurement is the portion surrounded by the O-ring 24. At the same time, press the thin film Even the plate 5 receives the force of the upward deformation of the thin film due to the contact of the O-ring 24. . Therefore, the thin film 6 is protected from being deformed or broken. O-ring 2 Since the first groove 23 in which No. 4 is installed is near the first through hole surface 21a, O The area of the portion surrounded by the ring 24 is substantially equal to the area of the first through hole surface 21a.
【００１４】 また、固定ビス５６の締め付けにより、Ｏリング２８は第２セル１４の内底面 １６に当接し、第１貫通孔２１の内面と第２セル側壁部分の気体の流通が遮断さ れる。前記Ｏリング２４とＯリング２８の働きで、第１貫通孔２１の内法体積部 分が実質的な第２セルとして作用する。 さらに、第１セル１１と第２セル１４は、第１セル枠体１７と第２セル枠体１ ８の当接部に設置されたＯリング５７により、外部と遮断される。よって透過量 測定セル２の気密状態が保持される。 図中、５１は透過試料供給口であり、５２は透過試料排出口である。また、５ ４はキャリヤーガス入口であり、５５はキャリヤーガス及び透過ガスの出口であ る。さらに、５３は、揮発性有機物を透過試料として使用した測定を行う場合に 使用する、揮発性有機物の排出口である。[0014] Further, by tightening the fixing screw 56, the O-ring 28 becomes the inner bottom surface of the second cell 14. 16 to block the flow of gas between the inner surface of the first through hole 21 and the side wall of the second cell 21. Be done. Due to the functions of the O-ring 24 and the O-ring 28, the inner volume of the first through hole 21 The minute acts essentially as a second cell. Furthermore, the first cell 11 and the second cell 14 are the same as the first cell frame body 17 and the second cell frame body 1. The O-ring 57 installed at the abutting portion of 8 disconnects from the outside. Therefore the amount of transmission The airtight state of the measuring cell 2 is maintained. In the figure, 51 is a permeated sample supply port, and 52 is a permeated sample discharge port. Also, 5 4 is a carrier gas inlet, and 55 is an outlet for carrier gas and permeated gas. It Furthermore, 53 is for performing measurement using a volatile organic substance as a permeation sample. It is an outlet for volatile organic substances used.
【００１５】 従来の薄膜の透過量測定セルは、キャリヤーガスの入口５４とキャリヤーガス の出口５５が第２セルの底面に設置されている。このため、第２セル１４内に薄 膜支持体４を設置し、かつ、薄膜支持体の第１貫通孔の底面側開口部２１ｂを大 きくすることにより、なんら従来の測定セルを変更することなく、薄膜支持アダ プター３を取付けることができる。 酸素透過度測定においては、酸素ガスが透過試料供給口５１から供給され、透 過試料排出口５２から排出される。また、キャリヤーガス入口５４から窒素ガス が流入し、窒素ガスと薄膜を透過した酸素ガスが、キャリヤーガス及び透過ガス の出口５５を通り、酸素検出器４５に送られる。揮発性有機物の排出口５３は、 本測定（酸素透過度測定）には使用されず、閉じられている。[0015] A conventional thin film permeation measuring cell is provided with a carrier gas inlet 54 and a carrier gas. Outlet 55 is installed on the bottom surface of the second cell. For this reason, the thin The membrane support 4 is installed, and the bottom side opening 21b of the first through hole of the thin film support is large. This allows the thin film support adapter to be used without changing any of the conventional measuring cells. Putter 3 can be attached. In measuring the oxygen permeability, oxygen gas is supplied from the permeation sample supply port 51, and The excess sample is discharged from the discharge port 52. In addition, nitrogen gas from the carrier gas inlet 54 Oxygen gas that has flowed in and passed through the nitrogen gas and the thin film is the carrier gas and the permeated gas. Is sent to the oxygen detector 45 through the outlet 55. The volatile organic matter outlet 53 is It is not used for the main measurement (oxygen permeability measurement) and is closed.
【００１６】 第１貫通孔２１の面積と第２貫通孔３１の面積が、２８ｃｍ２である１対の薄 膜支持アダプター３と、第１貫通孔２１の面積と第２貫通孔３１の面積が、１２ ．５ｃｍ２の１対の薄膜支持アダプター３を作成した。 通常、透過量測定セルの開口部の面積、すなわち薄膜実効面積は５２ｃｍ２で ある。この２種類の薄膜支持アダプターを取り替えることにより、検出器や、検 出器に流入するガス配管をなんら変更することなく、２倍、４倍の透過量を持つ 薄膜の測定が、そのまま行えた。The pair of thin film support adapters 3 each having an area of the first through hole 21 and an area of the second through hole 31 of 28 cm 2 , and an area of the first through hole 21 and an area of the second through hole 31 are 12. A pair of 5 cm 2 thin film support adapter 3 was made. Usually, the area of the opening of the transmission amount measuring cell, that is, the effective area of the thin film is 52 cm 2 . By exchanging these two types of thin film support adapters, it was possible to measure the thin film having double or quadruple transmission amount without changing the detector or the gas pipe flowing into the detector.
【００１７】 以上説明した実施例では、薄膜支持体４は第２セル１４内に挿入したが、薄膜 支持体４を第１セル１１内に挿入することもできる。薄膜支持体４を第１セル１ １内に挿入する場合には、第２溝２７に設置した第２シール部材たるＯリング２ ８は、第１セルの内底面１３に当接することになる。 本考案にかかる第１シール部材、第２シール部材は、Ｏリングに限られず、例 えば断面四角形のパッキングを使用することもできる。また、その材質は、合成 ゴム、天然ゴム、シリコン樹脂などである。 本考案にかかる薄膜支持体４と薄膜押さえ板５には、薄膜挿入時の第１貫通孔 と第２貫通孔の位置決めを容易にするために、ガイド溝とこれに合致するガイド 凸部など公知の位置決め手段を設けることができる。[0017] In the embodiment described above, the thin film support 4 is inserted in the second cell 14, The support 4 can also be inserted in the first cell 11. The thin film support 4 is attached to the first cell 1 In the case of inserting it into the first groove 1, the O-ring 2 which is the second seal member installed in the second groove 27. 8 comes into contact with the inner bottom surface 13 of the first cell. The first seal member and the second seal member according to the present invention are not limited to O-rings For example, packing having a rectangular cross section can be used. Also, the material is synthetic Examples include rubber, natural rubber, and silicone resin. The thin film support 4 and the thin film pressing plate 5 according to the present invention have a first through hole for inserting the thin film. And a guide groove and a guide groove for facilitating the positioning of the second through hole. Known positioning means such as a convex portion can be provided.
【００１８】 薄膜支持体４の外形は円柱形状に限られず、例えば、四角柱にすることもでき る。また、第１貫通孔２１の断面形状も円形に限られず、例えば四角柱などの任 意の形状にすることができる。さらに第２セル内の気体の入れ替わりを考慮しな くてよい差圧法に使用する透過量測定セルであれば、第１貫通孔２１は断面積の 等しい孔であっても良い。 薄膜押さえ板の第２貫通孔３１は、薄膜支持体表面の第１貫通孔２１の形状に 合わせて、任意の形状にすることができる。 本考案にかかる薄膜の透過量測定セル、透過量測定装置、薄膜支持アダプター は、等圧法、差圧法のいずれの透過量測定にも使用することが出来、また、プラ スチックフィルム、シート、加工紙、など種々の薄膜の透過量測定に使用するこ とができる。さらに、透過試料も、酸素ガスに限られず、水蒸気・各種ガス・有 機溶媒などの気体、水・有機溶媒などの液体いずれにも適用することが出来る。 さらに、透過試料が液体の場合には、第１セルを密閉式にすることが出来、ま た、差圧式の透過量測定用に第２セルの出入口を１つのみにすることもできる。 従来の薄膜の透過量測定セルの構造は変更せず、開口部の面積を大きくして、 種々の貫通孔面積を持つ複数の薄膜支持アダプターを準備しておけば、透過量の 異なる薄膜の測定に対応可能な透過量測定セルとなる。[0018] The outer shape of the thin film support 4 is not limited to a cylindrical shape, and may be, for example, a quadrangular prism. It Moreover, the cross-sectional shape of the first through hole 21 is not limited to a circular shape, and may be, for example, a quadrangular prism. It can have any shape. Furthermore, do not consider the exchange of gas in the second cell. If it is a permeation amount measuring cell used for the differential pressure method, the first through hole 21 has a cross-sectional area of The holes may be the same. The second through hole 31 of the thin film pressing plate has the shape of the first through hole 21 on the surface of the thin film support. Together, they can be of any shape. Thin film permeation amount measuring cell, permeation amount measuring device, thin film support adapter according to the present invention Can be used to measure the amount of permeation by either the isobaric method or the differential pressure method. It can be used to measure the transmission of various thin films such as stick films, sheets, and processed paper. You can Furthermore, the permeation sample is not limited to oxygen gas, but water vapor, various gases, and It can be applied to both gas such as organic solvent and liquid such as water and organic solvent. In addition, if the permeation sample is a liquid, the first cell can be closed, Further, it is possible to provide only one inlet / outlet of the second cell for the differential pressure type permeation amount measurement. Without changing the structure of the conventional thin film transmission amount measurement cell, the area of the opening was increased, By preparing multiple thin film support adapters with various through-hole areas, It becomes a transmission amount measurement cell that can be used for measurement of different thin films.
【００１９】[0019]
請求項１の透過量測定セルによれば、薄膜試料の有効面積を容易に変更可能な 透過量測定セルを得ることができる。 請求項２の透過量測定セルによれば、従来の第２セルのキャリヤーガス出入り 口管の位置、構成を変更する必要がなく、より使い勝手のよい透過量セルとなる 。 請求項３の透過量測定装置は、検出器などを変更することなく、透過量の多い 薄膜と透過試料の組合せに容易に対応可能な測定装置である。 請求項４の薄膜支持アダプターは、薄膜の透過量測定セルにそのまま取付け可 能な、薄膜試料の有効面積変更手段となる。 According to the transmission amount measuring cell of claim 1, the effective area of the thin film sample can be easily changed. A permeation amount measuring cell can be obtained. According to the transmission amount measuring cell of claim 2, the carrier gas in and out of the conventional second cell No need to change the position and configuration of the mouth tube, making it a more convenient transmission cell. . The transmission amount measuring device according to claim 3 has a large transmission amount without changing a detector or the like. It is a measuring device that can easily handle combinations of thin films and transmission samples. The thin film support adapter of claim 4 can be directly attached to the thin film permeation amount measurement cell. It becomes an effective means for changing the effective area of a thin film sample.
【図１】薄膜の透過量測定装置の概略説明図である。FIG. 1 is a schematic explanatory view of a thin film transmission amount measuring apparatus.
【図２】薄膜の透過量測定セルの外観斜視図である。FIG. 2 is an external perspective view of a thin film transmission amount measurement cell.
【図３】薄膜の透過量測定セルの断面図である。FIG. 3 is a cross-sectional view of a thin film transmission amount measuring cell.
【図４】薄膜支持アダプターの斜視図である。FIG. 4 is a perspective view of a thin film support adapter.
１ 薄膜の透過量測定装置 ２ 薄膜の透過量測定セル ３ 薄膜支持アダプター ４ 薄膜支持体 ５ 薄膜押さえ板 ６ 薄膜 １１ 第１セル １２ 第１開口部 １３ 第１セルの内底面 １４ 第２セル １５ 第２開口部 １６ 第２セルの内底面 ２１ 第１貫通孔 ２３ 第１溝 ２４ 第１シール部材たるＯリング ２７ 第２溝 ２８ 第２シール部材たるＯリング ３１ 第２貫通孔 1 Thin film transmission measurement device 2 Thin film transmission amount measurement cell 3 Thin film support adapter 4 Thin film support 5 Thin film holding plate 6 thin film 11 First cell 12 First opening 13 Inner bottom of 1st cell 14 Second cell 15 Second opening 16 Inner bottom of second cell 21 First Through Hole 23 First groove 24 O-ring which is the first seal member 27 Second groove 28 O-ring which is the second seal member 31 second through hole
Claims (4)
口部に対面する第２開口部を有する第２セルからなり、
薄膜が第１開口部と第２開口部の間に挿入され、第１セ
ルに透過試料が供給され、薄膜を透過する透過試料が第
２セルに移行する薄膜の透過量測定セルにおいて、 表面と底面を貫く第１貫通孔を有する薄膜支持体であ
り、前記薄膜支持体の表面であって、第１貫通孔開口部
の周辺近傍に、前記開口部を取り巻く第１溝を設け、第
１溝に第１シール部材を設置し、前記薄膜支持体の底面
に、第１貫通孔開口部を取り巻く第２溝を設け、第２溝
に第２シール部材を設置し、かつ、第１開口部に対面す
る第１セルの内底面乃至第２開口部に対面する第２セル
の内底面のいずれか一方に第２シール部材が当接するも
のである薄膜支持体と、 前記薄膜支持体の表面に対面して載置される、第２貫通
孔を有する板状の薄膜押さえ板を有することを特徴とす
る薄膜の透過量測定セル。1. A first cell having a first opening, and a second cell having a second opening facing the first opening,
The thin film is inserted between the first opening and the second opening, the permeation sample is supplied to the first cell, and the permeation sample passing through the thin film is transferred to the second cell. A thin film support having a first through hole penetrating a bottom surface, wherein a first groove surrounding the opening is provided on the surface of the thin film support near the periphery of the opening of the first through hole. A first sealing member is installed on the bottom surface of the thin film support, a second groove surrounding the opening of the first through hole is provided on the bottom surface of the thin film support, and a second sealing member is installed on the second groove. A thin film support, wherein the second seal member is in contact with either one of the inner bottom surface of the facing first cell or the inner bottom surface of the second cell facing the second opening; and a facing surface of the thin film support. And a plate-shaped thin film pressing plate having a second through hole, Permeation measuring cell of a thin film that.
る第２セルの内底面に当接することを特徴とする請求項
１に記載の薄膜の透過量測定セル。2. The thin film permeation amount measuring cell according to claim 1, wherein the second sealing member abuts on an inner bottom surface of the second cell facing the second opening.
過量測定セルを備えた薄膜の透過量測定装置。3. A thin film permeation amount measuring apparatus comprising the thin film permeation amount measuring cell according to claim 1.
口部に対面する第２開口部を有する第２セルからなり、
薄膜が第１開口部と第２開口部の間に挿入され、第１セ
ルに透過試料が供給され、薄膜を透過する透過試料が第
２セルに移行する薄膜の透過量測定セル用の薄膜支持ア
ダプターであって、 表面と底面を貫く第１貫通孔を有する薄膜支持体であ
り、前記薄膜支持体の表面であって、第１貫通孔開口部
の周辺近傍に、前記開口部を取り巻く第１溝を設け、第
１溝に第１シール部材を設置し、前記薄膜支持体の底面
に、第１貫通孔開口部を取り巻く第２溝を設け、第２溝
に第２シール部材を設置し、かつ、第１開口部に対面す
る第１セルの内底面乃至第２開口部に対面する第２セル
の内底面のいずれか一方に第２シール部材が当接するも
のである薄膜支持体と、 前記薄膜支持体の表面に対面して載置される、第２貫通
孔を有する板状の薄膜押さえ板からなることを特徴とす
る薄膜支持アダプター。4. A first cell having a first opening and a second cell having a second opening facing the first opening,
The thin film is inserted between the first opening and the second opening, the permeation sample is supplied to the first cell, and the permeation sample passing through the thin film is transferred to the second cell. An adapter, which is a thin film support having a first through hole penetrating a surface and a bottom surface, and a first surface surrounding the first through hole opening, the first thin film support surrounding the opening. A groove is provided, a first seal member is installed in the first groove, a second groove surrounding the first through hole opening is provided on the bottom surface of the thin film support, and a second seal member is installed in the second groove, And a thin film support in which the second seal member is in contact with either one of the inner bottom surface of the first cell facing the first opening and the inner bottom surface of the second cell facing the second opening, A plate-shaped thin film retainer having a second through hole, which is placed facing the surface of the thin film support. Film support adapter, characterized in that it consists of.
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| JP2003001479U JP3096609U (en) | 2003-03-20 | 2003-03-20 | Thin film transmission measurement cell, thin film transmission measurement device |
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| JP2003001479U JP3096609U (en) | 2003-03-20 | 2003-03-20 | Thin film transmission measurement cell, thin film transmission measurement device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010503850A (en) * | 2006-09-19 | 2010-02-04 | エクストラソリューション エス．アール．エル． | Method and apparatus for measuring permeability of gas passing through film body and container wall |
| JP2010210323A (en) * | 2009-03-09 | 2010-09-24 | Toppan Printing Co Ltd | Gas permeability measuring device |
| JP2011002303A (en) * | 2009-06-17 | 2011-01-06 | Ulvac Japan Ltd | Instrument for measuring transmission amount of water vapor |
| KR101912810B1 (en) | 2017-06-14 | 2018-10-29 | 울산과학기술원 | Moisture permeability measuring device |
-
2003
- 2003-03-20 JP JP2003001479U patent/JP3096609U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010503850A (en) * | 2006-09-19 | 2010-02-04 | エクストラソリューション エス．アール．エル． | Method and apparatus for measuring permeability of gas passing through film body and container wall |
| JP2010210323A (en) * | 2009-03-09 | 2010-09-24 | Toppan Printing Co Ltd | Gas permeability measuring device |
| JP2011002303A (en) * | 2009-06-17 | 2011-01-06 | Ulvac Japan Ltd | Instrument for measuring transmission amount of water vapor |
| KR101912810B1 (en) | 2017-06-14 | 2018-10-29 | 울산과학기술원 | Moisture permeability measuring device |
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