JP3096013B2 - Irradiation room open type X-ray analyzer - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray analyzer with an open irradiation chamber for irradiating a sample placed in an irradiation window of an irradiation chamber with X-rays from an X-ray source in the irradiation chamber. is there.

[0002]

2. Description of the Related Art A sample that cannot enter a sample chamber of an ordinary X-ray analyzer and cannot be divided, such as a part of an archeological site or a work of art, is X-ray.
X-ray analysis or moving the analyzer to the analysis site as needed
In the case of X-ray analysis, as shown in FIG. 5, an X-ray source 35 for irradiating the sample 30 with primary X-rays B1 and a secondary X-ray B2 Is provided, and the sample 30 is placed on the irradiation window 33 to detect X.
An open irradiation room X-ray analyzer for performing X-ray analysis is used. In this X-ray analyzer, the sample 30
The X-ray analysis can be prevented by placing the X-rays on the X-ray analyzer. In such an X-ray analyzer, a banknote as shown in FIG. 6 is used as a sample, and an ink element thereof is subjected to X-ray analysis to determine a fake bill.
In order to confirm the X-ray analysis target portion D, the irradiation window 33 is provided by a CCD image pickup device 37 disposed in the irradiation chamber 34 or the like.
By taking a picture of the vicinity and displaying the image on a monitor television set outside the irradiation room, it was confirmed whether the X-ray analysis target position D was correctly aligned with the irradiation window 33. When analyzing a sample that transmits X-rays such as banknotes, the X-ray protection cover 40 is put on.

[0003]

However, in such an X-ray analyzer, the irradiation window 33 is generally small so that a small sample can be sufficiently measured. The projected image of the sample 30 is only a local portion that can be seen from the small irradiation window 33 as shown in FIG. 5, and it is not easy to confirm which position in the entire sample corresponds to the X-ray analysis target position D. There is a problem in that it is not easy to position the laser beam on the irradiation window 33.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned conventional problems, and has an irradiation chamber open type X which can easily confirm an X-ray analysis target portion from a wide sample surface and quickly position it at a measurement position.
An object of the present invention is to provide a line analyzer.

[0005]

In order to achieve the above-mentioned object, an open-irradiation-type X-ray analyzer according to the first aspect of the present invention is applied to a sample having one or more samples.
An X-ray source for irradiating a secondary X-ray and a detector for detecting secondary X-rays from the sample are housed in an irradiation chamber, and are located outside the irradiation chamber in a case forming the irradiation chamber. An irradiation window covered by the sample is formed, a peripheral portion of the irradiation window in the case is formed of a transparent material, and a sample covering the irradiation window is viewed from the inside of the case through the irradiation window and the transparent material. Equipped with viewing equipment for viewing.

According to the X-ray analyzer with open irradiation chamber of the present invention, not only the portion of the sample covering the irradiation window but also the portion located around the irradiation window can be viewed by the viewing device. Therefore, it is possible to easily confirm which position in the entire sample corresponds to the position covering the irradiation window, and it is possible to perform the operation of positioning the target position for X-ray analysis to the irradiation window in a short time.

According to a second aspect of the present invention, there is provided an X-ray analyzer with an open irradiation chamber according to the first aspect of the present invention, wherein the viewing device is installed in the case to image the sample. And an image display device that is installed outside the case and projects an image by the imaging element. According to this configuration, since the sample can be viewed by the image display device, such as in the case where the irradiation window is closely attached to a wide planar sample such as a wall surface or a floor surface for analysis,
Even if the irradiation window is in a posture such that the irradiation window is directed sideways or downward, it is easy to view the sample. Also, as viewing equipment,
Since the members installed in the irradiation room are only imaging elements, the arrangement of the X-ray source and the detector in the irradiation room is not greatly restricted by the viewing device, and the main body of the X-ray analyzer can be configured compact. .

According to a third aspect of the present invention, there is provided an X-ray analyzer with an open irradiation chamber according to the first aspect, wherein the viewing device is connected to a fiber scope provided with a tip penetrating into a case, and to an end of the fiber scope. The imaging device is provided outside the case and takes an image of the sample through a fiberscope, and the image display device is provided outside the case and projects an image by the imaging device. According to this configuration, as a viewing device, it is only necessary to make the fiberscope enter the irradiation room, so that the arrangement of the X-ray source and the detector in the irradiation room is not greatly limited by the viewing device, The main body of the X-ray analyzer can be made compact.

According to a fourth aspect of the present invention, there is provided an X-ray analyzer with an open irradiation chamber according to the first aspect, wherein the viewing instrument is connected to a fiberscope provided with a tip penetrating into a case, and to a distal end of the fiberscope. And an eyepiece that is located outside the case and allows the sample to be viewed through a fiberscope. According to this configuration,
After all, the arrangement of the X-ray source and the detector in the irradiation room is not greatly restricted by the viewing device, and the eyepiece is simply provided at the end of the fiberscope. It can be configured at low cost.

According to a fifth aspect of the present invention, there is provided the X-ray analyzer with an open irradiation chamber according to the first aspect, wherein the viewing device is a mirror provided in the case, and the mirror provided in the case is made of a transparent material. And a viewing window through which the sample can be viewed. According to this configuration, as a viewing device, it is only necessary to install a mirror in the irradiation room, so that the arrangement of the X-ray source and the detector in the irradiation room is not greatly limited by the viewing device, and The viewing device can be configured at low cost.

[0011]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a conceptual diagram showing a schematic configuration of an irradiation room open type X-ray analyzer according to a first embodiment of the present invention. The main body 2 of the irradiation room open type X-ray analyzer 1 includes:
An X-ray source 4 for irradiating a sample 3 with a primary X-ray B1 and a detector 5 for detecting a secondary X-ray B2 from the sample 3 are housed in an irradiation chamber 6. The case 7 forming the irradiation chamber 6 has a sample stage 7 a having an irradiation window 8 opened at an upper portion thereof, and the irradiation window 8 is covered by the sample 3 placed on the sample stage 7 a from outside the irradiation chamber 6. When the sample 3 is made of a material that easily transmits X-rays such as banknotes, or when the X-rays are smaller than the irradiation window 8 and are emitted outside, the X-ray protection cover 40 that covers the irradiation window 8 is covered.

The peripheral portion 9 of the irradiation window 8 on the sample stage 7a of the case 7 is made of a transparent material such as glass or acrylic resin having high X-ray resistance and low X-ray transmittance. The viewing device 10 is mounted on the sample stage 7a and
Is a device that allows the sample 3 covering the image to be viewed from inside the case 7 through the irradiation window 8 and the peripheral portion 9 and includes an image pickup device 11 such as a CCD and an image display device 12 such as a monitor television. The image sensor 11 is installed in the case 7 and photographs the sample 3 on the sample stage 7a. The image display device 12 is installed outside the case 7 and projects an image from the image sensor 11.

According to the X-ray analyzer 1 having the above-described configuration, the part of the sample 3 placed on the sample stage 7a of the case 7 has a considerably wide area overlapping the sample stage 7a. The image is captured by the image sensor 11 through the peripheral portion 9 and the image is displayed on the image display device 12 installed outside the case 7. The relative positional relationship between the part to be analyzed and the surrounding part can be easily confirmed, and the work of aligning the part to be subjected to X-ray analysis with the part of the irradiation window 8 can be performed in a short time. That is, for example, when the banknote as the sample 3 is placed on the sample table 7a when the ink element of the banknote is subjected to the X-ray analysis and the fake bill determination is performed by the irradiation chamber open type X-ray analyzer 1, as shown in FIG. In addition to the portion A corresponding to the irradiation window 8 of the printing surface, the surrounding portion is displayed on the image display device 12. Based on the image, the position where the X-ray analysis is desired is aligned with the irradiation window 8. Work can be performed easily.

In the sample stage 7a, the irradiation window 8 is a mere opening, while the peripheral portion 9 is transparent.
The portion A corresponding to the irradiation window 8 has higher transparency than the surrounding portion, and thus is easily identified. As a result, the operation of aligning the position to be subjected to the X-ray analysis with the irradiation window 8 based on the image projected on the image display device 12 is described.
It can be done more easily. In order to more clearly distinguish the portion A corresponding to the irradiation window 8 from the surrounding portion, the peripheral portion 9 may be formed of a colored material or a material having reduced transparency.

Since only the image pickup device 11 having a small external dimension is installed in the irradiation room 6 among the viewing devices 10, the arrangement of the X-ray source 4 and the detector 5 in the irradiation room 6 is used for imaging. The main body 2 of the open-irradiation-type X-ray analyzer 1 can be made compact without being greatly limited by the element 11. Note that, since a surface to be imaged is widened, the optical magnification of the image sensor 11 may be lower than that of the conventional example shown in FIG.

FIG. 2 is a conceptual diagram showing a schematic configuration of an open-irradiation-type X-ray analyzer according to a second embodiment of the present invention.
In the irradiation room open type X-ray analyzer 1 of this embodiment, the viewing device 10A includes a fiberscope 13, an image pickup device 14 such as a CCD, and an image display device 12 such as a monitor television. Fiberscope 13
It is installed with its tip penetrating into the case 7 and facing the sample table 7a. The imaging device 14 is connected to the end of the fiberscope 13 and is disposed outside the case 7, and photographs the sample 3 on the sample stage 7 a through the fiberscope 13. The image display device 12 is installed outside the case 7 and projects an image by the image sensor 14. The transparent peripheral portion 9 and the like of the sample stage 7a are the same as those in the configuration of FIG.

According to the X-ray analyzer 1 with an open irradiation chamber, a part of the sample 3 placed on the sample stage 7a of the case 7 has a considerably wide area overlapping with the sample stage 7a.
The image is taken by the image pickup device 14 outside the case 7 through the irradiation window 8 and the transparent peripheral portion 9 and the fiber scope 13 and the image is displayed on the image display device 12. 3, the relative positional relationship between the portion located in the irradiation window 8 and the surrounding portion can be easily confirmed, and the portion to be subjected to X-ray analysis is indicated in the irradiation window 8.
Can be performed in a short time.

Since only the tip of the fiberscope 13 is installed in the irradiation chamber 6 among the viewing devices 10A, the arrangement of the X-ray source 4 and the detector 5 in the irradiation chamber 6 is changed. The main body 2 of the open-irradiation-type X-ray analyzer 1 can be configured more compactly.

FIG. 3 is a conceptual diagram showing a schematic configuration of an irradiation room open type X-ray analyzer according to a third embodiment of the present invention.
The viewing device 10B of the open-room X-ray analyzer 1 of this embodiment is the same as the imaging device 14 of the viewing device 10A in FIG.
The image display device 12 is omitted, and an eyepiece 18 such as a magnifying lens is provided at the end of the fiberscope 13 led out of the case 7, and the sample 3 on the sample table 7 a is passed through the eyepiece 18 and the fiberscope 13. To see the video directly with the naked eye. In this case, the viewing device 10B can be configured more simply and inexpensively.

FIG. 4 is a conceptual diagram showing a schematic configuration of an irradiation room open type X-ray analyzer according to a fourth embodiment of the present invention.
In the irradiation room open type X-ray analyzer 1 of this embodiment, the viewing device 10 </ b> C includes a mirror 15 installed in the case 7,
The viewing window 16 is provided at a position off the sample table 7 a on the case 7. The viewing window 16 is made of X-resistant
The sample 3 is formed of a transparent material such as glass or acrylic resin having a high line intensity and a low X-ray transmittance, and allows the naked eye of the sample 3 on the sample stage 7 a through the mirror 15. The transparent peripheral portion 9 and the like of the sample stage 7a are the same as those in the configuration of FIG.

According to the X-ray analyzer 1 with an open irradiation chamber, a part of the sample 3 placed on the sample stage 7a of the case 7 has a considerably wide area overlapping with the sample stage 7a.
Is reflected by the mirror 15 in the case 7 through the irradiation window 8 and the transparent peripheral portion 9, and the reflected image is viewed through the viewing window 16 from outside the case 7. This makes it possible to easily confirm the relative positional relationship between the portion of the sample 3 located at the irradiation window 8 and the surrounding portion, and to shorten the operation of aligning the portion to be subjected to X-ray analysis with the position of the irradiation window 8. Can be done in time.

Since only the mirror 15 is installed in the irradiation room 6 among the viewing devices 10B, the irradiation room 6
The arrangement of the X-ray source 4 and the detector 5 in the interior is hardly restricted by the mirror 15, and the open-radiation-room type X-ray analyzer 1 can be configured more compactly and inexpensively.

In each of the above embodiments, the X-ray analyzer 1 has a configuration in which the sample 3 is placed on the irradiation window 8 and X-ray analysis is performed.
However, even when the irradiation window 8 is pressed against the sample 3 which is a stationary object such as a building and the X-ray analysis is performed, the handy type irradiation room open type X-ray analyzer 1 is equipped with the same configuration. The same function can be provided.

[0024]

As described above, according to the present invention,
Since not only the part of the sample that covers the irradiation window but also the part that is located around the irradiation window can be viewed with the viewing device, the position that covers the irradiation window corresponds to the position of the entire sample. Can be easily confirmed, and the operation of aligning the target measurement point for X-ray analysis with the irradiation window can be performed in a short time.

[Brief description of the drawings]

FIG. 1 is a conceptual diagram illustrating a schematic configuration of an open-irradiation-type X-ray analyzer according to a first embodiment of the present invention.

FIG. 2 is a conceptual diagram illustrating a schematic configuration of an open-irradiation-type X-ray analyzer according to a second embodiment.

FIG. 3 is a conceptual diagram illustrating a schematic configuration of an irradiation room open type X-ray analyzer according to a third embodiment.

FIG. 4 is a conceptual diagram showing a schematic configuration of an irradiation room open type X-ray analyzer according to a fourth embodiment.

FIG. 5 is a conceptual diagram showing a schematic configuration of a conventional example.

FIG. 6 is a plan view of a bill used for X-ray analysis.

[Explanation of symbols]

1 ... X-ray analyzer with open irradiation chamber, 2 ... body, 3 ... sample,
4 X-ray source, 5 detector, 6 irradiation room, 7 case, 8
... irradiation window, 9 ... peripheral part, 10, 10A, 10B, 10
C: viewing equipment, 11: imaging device, 12: image display device,
13: Fiberscope, 14: Image sensor, 15: Mirror, 16: Viewing window, 18: Eyepiece, B1: Primary X
Line, B2 ... secondary X-ray.

────────────────────────────────────────────────── ─── Continued on the front page (58) Fields surveyed (Int. Cl. ⁷ , DB name) G01N 23/223 G21K 5/00 G21K 5/02 JICST file (JOIS)

Claims (5)

(57) [Claims] An X-ray source for irradiating a sample with primary X-rays and a detector for detecting secondary X-rays from the sample are housed in an irradiation chamber. An irradiation window covered by the sample located outside the irradiation chamber is formed, and a peripheral portion of the irradiation window in the case is formed of a transparent material. An irradiation room open type X-ray analyzer equipped with a viewing device that allows viewing from the inside of a case through a material. 2. The viewing device according to claim 1, wherein the viewing device is installed in the case and shoots the sample, and is installed outside the case to project an image by the imaging device. An irradiation room open type X-ray analyzer comprising an image display device. 3. The observation device according to claim 1, wherein the viewing device is a fiberscope provided with a tip penetrating into a case, and an imaging device connected to a distal end of the fiberscope to photograph the sample through the fiberscope. When,
An X-ray analyzer with an open irradiation chamber, comprising: an image display device that projects an image by the image sensor, wherein the image sensor and the image display device are disposed outside the case. 4. The observation device according to claim 1, wherein the viewing instrument includes a fiberscope provided with a distal end intruding into the case, and a fiberscope connected to an end of the fiberscope and located outside the case. An irradiation room open type X-ray analyzer having an eyepiece for viewing through a fiberscope. 5. The viewing device according to claim 1, wherein the viewing device includes a mirror provided in the case, and a viewing window provided in the case and made of a transparent material and allowing the sample to be viewed through the mirror. Irradiation room open type X-ray analyzer.