JP3091242B2 - Micro-step driving device for film-like object and micro-step driving method thereof - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and a method for driving a film-like object in minute steps.

[0002]

2. Description of the Related Art Conventionally, techniques in such a field include:
There is one described in Japanese Patent Application Laid-Open No. 2-285978 filed by the present applicant. FIG. 18 is a perspective view of such a conventional electrostatic actuator using a film, and FIG. 19 is a configuration diagram of the electrostatic actuator.

As shown in these figures, an electrostatic actuator using a film is provided with a stator 1 having a plurality of strip electrodes 4 wired in an insulator 2 and mounted on the stator 1. A moving element 10 composed of a film-shaped insulator layer 11 and a high-resistance element layer 12; and a means for positioning and moving the moving element 10 by lifting and driving the movable element 10 by switching a voltage to the strip electrode 4. ing.

[0004] This will be described in detail below. Lower stator 1
Is formed by embedding a plurality of strip electrodes 4 in an insulator 2. On the other hand, the moving element 10 is composed of a film-shaped insulating layer 11 and a high-resistance element layer 12 and is placed on the stator 1 in a state of being in contact therewith. First, a voltage is selectively applied to the belt-shaped electrode 4 as described later to charge (induce) the high-resistance layer 12 with electric charge. Thereafter, by switching the voltage, the movable element 10 is moved by one pitch while floating. Incidentally, for example, the width l ₁ of the strip electrode 4 is 0.4 mm, the pitch l ₂ of the strip electrode 4 is 1.27 mm, the entire width l ₃ where the strip electrodes 4 are arranged is 126 mm, and the length of the strip electrode 4 is 17
5 mm.

Next, one pitch operation of the electrostatic actuator will be described with reference to FIG. First,
As shown in FIG. 20A, the electrodes 4a ₁ , 4a ₂ , which are the first electrode group embedded in the insulator 2 constituting the stator 1
4a ₃ to the positive voltage + V, electrode 4b ₁ is a second electrode group, 4b ₂
, 4b ₃ have a negative voltage −V, and the electrodes 4c ₁ , 4 which are the third electrode group.
0V is applied to each of c ₂ and 4c ₃ . Then, a current flows in the high-resistance layer 12 in which no charge was initially present, and a charge is induced at the boundary between the high-resistance layer 12 and the film-like insulator layer 11 to be in an equilibrium state. This charge is shown in FIG.
It can be replaced by the mirror image charge at the position shown by the dotted line in (b). In this state, the moving element 10 is sucked by the stator 1.

Next, as shown in FIG. 20C, the voltage applied to each electrode is switched. That is, a negative voltage −V is applied to the electrodes 4a ₁ , 4a ₂ , 4a ₃ as the first electrode group, a positive voltage + V is applied to the electrodes 4b ₁ , 4b ₂ , 4b ₃ as the second electrode group, and a third electrode group. respectively applied a negative voltage -V to the electrodes 4c _1, 4c _2, 4c ₃ is. Then, the charge in each electrode moves instantaneously, but the mirror image charge induced in the high-resistance layer 12 cannot move immediately due to its high resistance. Electrodes 4a ₁ , 4b ₁ , 4a ₂
, 4b ₂ and the mirror image charge thereon have the same sign,
A repulsive force is generated, and the movable element 10 floats. The electrode 4
of c ₁ - mirror + charge is sucked on the charge electrode 4b _1, the electrodes 4c ₁ - mirror image on the charge electrode 4a ₂ - Since charges repel, the mover receives a driving force in the right direction Move right.

[0007] Therefore, the mover 10, to the right by one pitch (l _2: 1.27mm) Moving, as shown in FIG. 20 (d), the charge of the electrodes and the mirror image charges thereon and the opposite polarity Therefore, the suction force acts and the moving element stops there. Then, as shown in FIG. 20 (e), 0V to the first electrode 4a ₁ is an electrode group, 4a _2, 4a _3, the electrode 4b ₁ is a second electrode group, 4b _2, 4b ₃ to the positive voltage + V, applying a negative voltage -V to the third electrode 4c ₁ is an electrode group, 4c _2, 4c _3.

Then, the mirror image charge is diffused during the movement of the movable element, and thereby the mirror image charge is induced (charged) again. Since the moving element 10 of this actuator has no electrode and transfers the pattern of the strip-shaped electrode 4 of the stator 1 to the moving element 10 by a charging operation, the positioning of the moving element 10 with respect to the stator 1 is unnecessary, and the strip-shaped electrode is not required. 4 does not require high-precision machining.

Further, in this actuator, since the gap is maintained by bringing the stator 1 and the moving element 10 into contact with each other, the gap can be reduced as much as possible. In this case, friction between the two becomes a problem, but here, the friction is eliminated by floating the moving element 10 using electrostatic force. In order to constantly levitate the movable element 10, a sensor and complicated control are necessary. Here, a method of temporarily floating only when the movable element 10 is driven is adopted. Therefore, no sensor or complicated control is required.

As described above, the electrostatic actuator of the type described here has a simple structure, does not require accuracy, and does not require complicated control. Easy to make into film. Further, since the volume required for a portion that is not essential in terms of generating an electrostatic force, such as a gap holding mechanism and a control circuit, can be reduced as much as possible, the force density of the entire actuator can be increased. In particular, when the moving element and the stator are formed into a film, the thickness with respect to the area becomes extremely thin, so that there is no useless space and the power density can be increased.

The material of the film can be selected from a number of types of polymer films. Many polymer films are excellent insulators and can withstand high electric fields, making them suitable as materials for electrostatic actuators.

[0012]

However, the driving step in this type of actuator is, as described above, the pitch of the strip electrodes 4, ie, l ₂ , that is, 1.27.
mm, and further fine step driving devices are desired in order to perform fine operations. When such a minute position device enables minute driving, minute paper feeding for high-quality printing in a printer or facsimile, and minute positioning for printing on a film or a cloth, which have been difficult in the past, can be performed.

In view of the above situation, the present invention provides a moving object having a low resistance value and appropriately controlling the voltage pattern applied to the electrodes so that the film-like object can be formed in minute steps smaller than the electrode pitch. It is an object of the present invention to provide a micro-step driving device for a film-like object capable of fine driving and a micro-step driving method thereof.

[0014]

Means for Solving the Problems The present invention, in order to achieve the above object, and (A) in micro-step drive device of the film-like object, a stator having a plurality of strip-shaped electrodes are wired within the insulator A film-like object set on the stator,
Means for applying high-density positive and negative charges to the surface of the film-shaped object, and means for driving the film-shaped object at a minute pitch smaller than the band-shaped electrode pitch by switching a voltage to the band-shaped electrode. It is provided. ( B ) In a minute step driving device for a film-like object, a stator including a plurality of strip-shaped electrodes wired in an insulator, and a film-like object set on the stator;
Means for applying low-density positive and negative charges to the surface of the film-shaped object, and means for driving the film-shaped object at a minute pitch smaller than the band-shaped electrode pitch by switching the voltage to the band-shaped electrode. It is provided. ( C ) A minute step drive of a film-like object in which a film-like object is set on a stator having a plurality of band-like electrodes wired in an insulator and the film-like object is driven by switching a voltage to the band-like electrode In the method, (a)
Set the electrical resistance of the surface of the film-like object high,
(B) The voltage applied to the strip electrodes is switched so that the electrodes are driven at a minute pitch smaller than the pitch of the strip electrodes.

Further, in the step (b), the first strip electrode is set to a first potential, the second strip electrode is set to a second potential,
The third strip electrodes are each set to a third potential and then
The first strip electrode is set to the second potential and the second strip electrode is set to the first potential.
After setting the third strip-shaped electrode to the second potential and driving the film-shaped object, the first strip-shaped electrode is set to the first potential and the second strip-shaped electrode is set to the second potential. Potential to the third
Are set to the fourth potential, and after moving by the electrode pitch, they are pulled back to perform fine step driving.

[0016]

According to the present invention, (A) As shown in FIG. 1, a stator 21 having a plurality of strip electrodes 24 wired in an insulator 22;
1, a film-shaped object 30 comprising a film-shaped insulator layer 31 and a low-resistance layer 32 is provided, and by switching the voltage to the strip electrode 24, the film-shaped object 30 is switched to the low-resistance layer 32. Since the resistance of the film-like object 30 is low, the induced charge is
The time during which the film-shaped object 30 stays at the original position within 0 becomes shorter because the time constant is short.
Before the movement by the pitch is completed, the charges in the film-shaped object 30 disappear. At that time, the driving force of the film-shaped object 30 to the right disappears, and the film-shaped object 30 stops. in this way,
Since the time constant is short, the movement amount l _p (see FIG. 3) is considerably smaller than the electrode pitch. By repeating such an operation, fine step driving is performed.

The low resistance layer has a surface resistance of 10
¹¹ to 10 ¹⁴ Ω / □. (B) As shown in FIG. 6, a stator 41 having a plurality of strip electrodes 44 wired in an insulator 42, and the stator 4
1. A film-like object 50 set on the device 1 and means for applying high-density positive and negative charges to the surface of the film-like object 50 are provided. The object 50 is driven at a minute pitch smaller than the band electrode pitch. (C) Therefore, by setting the resistance value of the film-like object to be smaller than that in the case of normal driving, it is possible to perform, for example, minute step driving of about 1/20 of the electrode pitch. (D) As shown in FIG. 10, a stator 63 having a plurality of strip-shaped electrodes 65 wired in an insulator 64, a film-shaped insulator layer 67 set on the stator 63 and a high resistance A film-like object 66 composed of a body layer 68 is provided, and the film-like object 66 is driven at a minute pitch smaller than the band-like electrode pitch by switching the voltage to the band-like electrode 65.

[0018] First, as shown in FIG. 10 (1), the positive voltage + V _O to the electrode 65a ₁ is a first electrode group embedded in the insulator 64 constituting the stator 63, the second electrode group A negative voltage −V _O is applied to a certain electrode 65b ₁ , and the electrode 6 that is a third electrode group is
Respectively applied 0V to 5c _1. Then, the high-resistance layer 6 of the film-like object 66 in which no charge was present initially.
An electric current flows in 8, and a charge is induced at the boundary between the high-resistance layer 68 and the insulator layer 67 to be in an equilibrium state. That is, when the voltage shown in FIG. 10A is applied to each electrode, a charge as shown in the figure is induced in the film-like object 66 after a time sufficiently longer than the time constant. At this time, the film-like object 6
The position where 6 is stable is the position where the charge comes directly above each electrode.

Next, assuming that the time constant of the film-like object 66 is sufficiently long and the induced charge charged in FIG. 10A is fixed to the film-like object 66, as shown in FIG. when a voltage is applied, i.e., first to electrode 65a ₁ is an electrode group positive voltage + V _O, a negative voltage -V _O to the electrodes 65b ₁ which is the second electrode group, the electrode 65c which is a third electrode group ₁
Stable point of the negative voltage -V ₁ the time of applying each, compared to the case of FIG. 10 (1), is displaced minutely in the right diagram. Displacement rightmost electrode, i.e., is dominated by the voltage applied to the electrodes 65c ₁ is a third electrode group, if the voltage to a value close to 0, the displacement amount of the stable point of the film-like object 66 Can be further reduced.

For example, it is possible to perform a fine step drive of about 1/40 of the electrode pitch (420 μm). (E) Also, as shown in FIG. 14, in a micro-step driving device for a film-like object, a stator 91 having a plurality of band-shaped electrodes 94 wired in an insulator 92, and set on the stator 91 A film-shaped object 100 to be provided, and means for applying low-density positive and negative charges to the surface of the film-shaped object 100, and by switching a voltage to the band-shaped electrode 94, the film-shaped object 100 It is driven at a smaller pitch.

[0021]

Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 is a perspective view of a device for driving a minute step of a film-like object according to a first embodiment of the present invention,
FIG. 2 is a configuration diagram of the minute step driving device for the film-shaped object. As shown in these figures, the lower stator 2
Reference numeral 1 denotes an insulator 22 in which a plurality of strip electrodes 24 are embedded.

More specifically, the stator 21
Is composed of a base layer made of a film-shaped insulator, a plurality of strip-shaped electrodes 24 wired on the base layer, and a film-shaped insulating layer formed thereon. On the other hand, the film-shaped object 30 as a movable element is composed of an insulator layer 31 and a low-resistance element layer 32 and is placed on the stator 21 in a state of being in contact therewith. Therefore, a voltage is selectively applied to the strip-shaped electrode 24 to drive the film-shaped object 30 and perform positioning, as described later.

Next, one pitch operation of the fine positioning device for a film-like object will be described with reference to FIG. First, as shown in FIG. 3A, a positive voltage + V _O is applied to the electrodes 24a ₁ and 24a ₂ which are the first electrode group embedded in the insulator 22 constituting the stator 21, and the second electrode group is used for the first electrode group. A negative voltage −V _O is applied to certain electrodes 24b ₁ and 24b ₂ , and 0V is applied to the electrodes 24c ₁ and 24c ₂ as a third electrode group. Then, a current flows through the low-resistance layer 32 in which no charge was initially present, and a charge is induced at the boundary between the low-resistance layer 32 and the insulator layer 31 to be in an equilibrium state. Film-like object 30
The dashed line above indicates a mirror image of the electrode.

Next, as shown in FIG. 3 (2), the applied voltage pattern is shifted to the right. That is, 0 V is applied to the electrodes 24a ₁ and 24a ₂ as the first electrode group, and the electrode 2 as the second electrode group.
A positive voltage + V _O is applied to 4b ₁ and 24b ₂ , and a negative voltage −V _O is applied to the electrodes 24c ₁ and 24c ₂ as the third electrode group.
Then, a rightward force acts on the induced charge in the film-shaped object 30 in the figure, and starts to move. Then, the film-like object 30 is dragged by the moving induced charges, and starts moving as shown in FIG.

Here, in the present invention, since the film-shaped object 30 has the low-resistance layer 32 and the resistance value of the film-shaped object 30 is low, the induced charge is reduced.
The time during which the film-shaped object 30 stays at the original position within 0 becomes shorter because the time constant is short.
Before the movement by the pitch is completed, the charges in the film-shaped object 30 disappear. At that time, the driving force of the film-shaped object 30 to the right disappears, and the film-shaped object 30 stops. in this way,
When the constant is the short amount of movement l _p becomes considerably smaller than the electrode pitch. By repeating such an operation, a minute step drive can be realized.

As described above, in the conventional driving method, the whole film-like object moves by one electrode pitch together with the induced charge. However, in this method, since the resistance of the film-like object is low, the moving amount is smaller than the electrode pitch. Which is quite small,
A minute step drive can be performed. In this case, if the resistance of the film-shaped object is too low, the film cannot be driven. However, in this method, the micro-step is realized by lowering the resistance of the film-shaped object to near the drivable limit.

Hereinafter, a specific configuration example will be described. As shown in FIG. 1, the electrode pitch l ₅ is 420 μm, the electrode width l ₆ is 210 μm, and the distance l ₇ from the electrode to the stator surface is
(See FIG. 2) is about 170 μm. To reduce uncertainties due to frictional forces, a diameter of 20
μm hollow glass particles were sprayed and lubricated. The experiment was performed by placing a film-like object having a known resistance value on the film.

FIG. 4 shows the relationship between the surface resistance value of the film-like object and the one-step moving distance. It is also clear that the smaller the resistance value of the film-like object, the smaller the moving distance. For example, 3.9 × 10
^In the case of ¹¹ Ω / □, step 24 μm, 2.7 × 10 ¹² Ω
/ □, step 51 μm, 3.6 × 10 ¹² Ω / □
, The step is 250 μm for 1.2 × 10 ¹³ Ω / □, and the step is 460 μm for 9.8 × 10 ¹³ Ω / □.

FIG. 5 shows a state of the one-step movement. As is clear from this figure, when the resistance value of the film-like object is 10 ¹¹ Ω / □, the resistance value is 20 m in 1 msec.
A micro step drive of μm is performed. in this way,
A fine step drive of about 1/20 of the electrode pitch could be achieved.

FIG. 6 is a perspective view of a minute step driving device for a film-like object according to a second embodiment of the present invention. As shown in these figures, the lower stator 41 is
2, a plurality of strip electrodes 44 are embedded. FIG.
In, the film-shaped object 50 is a driving object,
An insulating film or paper can be used. In addition, paper, glass, ceramics, and the like can be driven as long as the insulator is not limited to a plastic film.

The film-like object 50 is fixed to the stator 4
1 is placed in contact with it. A needle electrode 46 for applying positive and negative charges on the film-like object 50 is provided.
And an AC high voltage source 45 connected thereto, and a blower 47
Ion blower 48 as an ion generator comprising
Is used. Note that a thin wire can be used instead of the needle electrode 46 described above. The ion blower 48 applies high-density positive and negative charges on the film-shaped object 50, and a voltage is selectively applied to the strip-shaped electrode 44, as described later, to drive the film-shaped object 50.
Positioning is performed.

The volume resistivity of the ionized air generated by the ion blower 48 is desirably 10 ⁷ to 10 ⁹ Ω · m. The needle electrode 4 of the ion blower 48
Although only one 6 is shown, it is desirable to provide a plurality of 6 on the film-like object 50. Next, the operation of the minute step driving device for a film-like object will be described with reference to FIGS.

First, as shown in FIG. 7, a pretreatment of a film-like object 60 (for example, 10 ¹⁴ Ω or more) is performed. That is,
Each of the electrode groups 44 a ₁ , 44 a ₂ , 44 a ₃ , 44 b ₁ , 44 b ₂ , 44 b ₃ embedded in the insulator 42 constituting the stator 41,
The 44c _1, 44c _2, 44c ₃ while to 0V, and the ion blower 48, by applying positive and negative charges, performs neutralization to neutralize it if such there is residual charge, the initial setting Do.

Therefore, the insulator 42 forming the stator 41
Electrodes 44a ₁ and 44a ₂ which are the first electrode group embedded in
, 44a ₃ at the positive voltage + V _O , and the electrode 44 as the second electrode group
A negative voltage −V _{O is} applied to b ₁ , 44b ₂ , 44b ₃ , and 0V is applied to the electrodes 44c ₁ , 44c ₂ , 44c ₃ as the third electrode group. In this state, ions are sprinkled on the film-like object 60 placed on the stator 41 by the ion blower 48 to form a high-density charge pattern along the electrodes.

Next, as shown in FIG. 8, the voltage applied to each electrode is switched. That is, a voltage of 0 V is applied to the electrodes 44a ₁ , 44a ₂ , 44a ₃ as the first electrode group, a positive voltage + V ₀ is applied to the electrodes 44b ₁ , 44b ₂ , 44b ₃ as the second electrode group,
Electrode 44c which is of the electrode group _1, 44c _2, a negative voltage to 44c ₃ -
V _O is applied. Then, the electric charge in each electrode moves instantaneously, but the electric charge of the film-like object 60 is held because of its high resistance value.

Therefore, the electrodes 44a ₁ , 44b ₁ , 44a ₂ , 4
The charge and charge thereon of 4b ₂ is the same sign, the repulsive force, i.e., the force to float the film-like object 60 is generated. However, since the surface of the film-like object 60 is provided with high-density positive and negative charges, the film-like object 6
Since the low-resistance layer is present on the surface of the surface 0 and the resistance of the film-like object 60 is low, the induced charge can stay at the original position in the film-like object 60 for a short time. (The time constant is short) and the film-like object 60
Before the film has moved one pitch of the electrode,
The charge inside disappears. At that point, the driving force of the film-shaped object 60 to the right disappears, and the film-shaped object 60 stops as shown in FIG. As described above, if the time constant is short, the moving amount becomes a value much smaller than the electrode pitch. By repeating such an operation, a minute step drive can be realized.

By repeating the above steps, the film-shaped object 60 can be moved and driven by minute steps. FIG. 10 is an operation principle diagram of a device for driving a minute step of a film-like object according to a third embodiment of the present invention.
First, as shown in FIG. 10A, an electrode 6 which is a first electrode group embedded in an insulator 64 forming a stator 63 is formed.
A positive voltage + V _O is applied to 5a ₁ , a negative voltage −V _O is applied to the second electrode group 65b ₁ , and 0V is applied to the third electrode group 65c ₁ . Then, a current flows through the high-resistance layer 68 of the film-shaped object 66 where no charge was present at first, and a charge is induced at the boundary between the high-resistance layer 68 and the insulator layer 67 to be in an equilibrium state. That is, FIG.
When the voltage shown in (1) is applied, a charge as shown in the figure is induced in the film-like object 66 after a time sufficiently longer than the time constant. At this time, the position where the film-shaped object 66 stabilizes is the position where the electric charge comes right above each electrode. The broken line written on the film-like object 66 represents a mirror image of the electrode.

Next, the time constant of the film-like object 66 is sufficient.
Long, the induced charge charged in Fig. 10 (1) is a film
Assuming that it is fixed to the body 66, FIG.
As described above, when a voltage is applied, that is, in the first electrode group,
Some electrode 65a₁Positive voltage + V _O, The second electrode group
Pole 65b₁Negative voltage -V_O, An electrode 65 that is a third electrode group
c₁Negative voltage -V₁The stable point when each is applied is
Compared to the case of FIG.
You. The displacement is the rightmost electrode, that is, the third electrode group.
Electrode 65c₁Is dominated by the voltage applied to
Then, the displacement of the stable point of the film-like object 66 can be further reduced.
Can be frustrated.

By applying a voltage as described above, the film-like object 66 can be driven in minute steps. That is, if the stable point is displaced to the right, the film-like object 66 can be driven to the right in small steps. If the stable point is displaced to the right, a rightward force is applied to the film-like object 66, but since the amount of displacement of the stable point is small, the value is small, and the value is small between the film-like object 66 and the stator 63. Cannot move the film-like object 66 to the stable point overcoming the frictional force because the suction force also works. This problem can be solved as described below.

FIG. 11 is a view for explaining the operation of a device for driving a minute step of a film-like object according to a third embodiment of the present invention. First, as shown in FIG. 11A, a positive voltage + V _O is applied to the electrodes 74a ₁ and 74a ₂ which are the first electrode group embedded in the insulator 72 constituting the stator 71, and the second electrode group is A negative voltage −V _O is applied to certain electrodes 74b ₁ and 74b ₂ , and 0 V is applied to the electrodes 74c ₁ and 74c ₂ as a third electrode group. Then, a current flows in the high-resistance layer 82 in which no charge was present at first, and a charge is induced at a boundary between the high-resistance layer 82 and the insulator layer 81 to be in an equilibrium state. That is, when the voltage shown in FIG. 11A is applied to each electrode, a charge as shown in FIG. 11 is induced in the film-shaped object 80 after a time sufficiently longer than the time constant. At this time, the position where the moving body is stabilized is a position where the electric charge comes right above each electrode. The broken line written on the film-like object 80 represents a mirror image of the electrode.

Next, after the induction of charges is completed, FIG.
As shown in (2), the applied voltage pattern is switched.
That is, the negative voltage −V _O is applied to the electrodes 74a ₁ and 74a ₂ as the _first electrode group, the positive voltage + V _O is applied to the electrodes 74b ₁ and 74b ₂ as the _second electrode group, and the electrode 74c as the third electrode group. _A negative voltage −V _O is applied to the _first and 74c ₂ respectively. Then, the film-like object 80 is large and moves to the right by approximately one electrode pitch.

Next, as shown in FIG. 11C, the applied voltage is switched, that is, the electrodes 74a ₁ which are the first electrode group are switched.
, 74a ₂ at the positive voltage + V _O , and the second electrode group electrode 74
The negative voltage −V _{O is} applied to b ₁ and 74b ₂ , and the electrode 7 that is the third electrode group is
4c _1, 74c ₂ to the negative voltage -V ₁ were respectively applied, this time pulling back the film-like object 80. At this point, since the stable point has been displaced to the right as compared with the state shown in FIG. 11A, the film-shaped object 80 has moved rightward from the position shown in FIG. Rest in position. When the film-like object 80 is completely stopped and friction is secured between the film-like object 80 and the stator 71, a voltage is applied again as shown in FIG. At this time, the stable point moves to the left, but the film-like object 80 remains fixed at the position shown in FIG. 11 (3) due to frictional force, and after a sufficient time, only the charges in the film-like object 80 move. Then, charges as shown in FIG. 11A are induced. By repeating the above operation, a minute step drive is realized.

Here, although the moving target is small, once the film-like object 80 is largely swung right and left, there are two meanings. First, the film-shaped object 80 is moved by overcoming the friction by largely shifting the stable point. Secondly, the large swinging to the left and right means that air enters between the film-shaped object 80 and the stator 71 and the frictional force is reduced. If the frictional force is large, it cannot be driven by this frictional force at the time of starting. By reducing the frictional force, the film-like object 8
The 0 starts reliably and comes to rest exactly on a stable point.

Hereinafter, a specific configuration example will be described. Here, the same thing as FIG. 11 was used as a stator.
The film-shaped object used had a surface resistance of 7.5 × 10 ¹³ Ω / □. V ₀ in FIG. 11 were experimented with 750V.
FIG. 12 shows the relationship between the applied voltage V ₁ and the amount of one-step movement in FIG. It can be seen that the amount of movement decreases when the value of the applied voltage V ₁ approaches 0. For example, 10
In the case of 0V, it was about 12 μm in one step, in the case of 200V, it was about 37 μm in one step, in the case of 300V, it was about 50 μm in one step, and in the case of 400V, it was about 63 μm.

FIG. 13 shows the state when one step moves.
It became like. After moving once for one pitch of the electrode, it returns to the original position, and finally, a minute step l _g [FIG. 11 (3)
See]. As described above, in the third embodiment, by appropriately controlling the voltage applied to the electrodes, it was possible to achieve the fine step drive of about 1/40 of the electrode pitch.

The fine conductor pattern wiring of the strip electrode on the insulator can be easily produced in a large amount by a printing technique.
It can be manufactured at low cost. Next, the fourth aspect of the present invention.
The embodiment will be described with reference to FIGS. FIG.
FIG. 10 is a perspective view of a device for driving a minute step of a film-like object according to a fourth embodiment of the present invention.

As shown in these figures, the lower stator 9
Reference numeral 1 denotes an insulator 92 in which a plurality of strip electrodes 94 are embedded. The film-shaped object 100 is an object to be driven, and an insulating film or paper can be used. Such a film-shaped object 100 is set in a state of being in contact with the stator 91. A needle electrode 96 for applying positive and negative charges on the film-like object 100 and an AC high voltage source 95 connected thereto (for example, 7 to 10 KV)
An ion blower (corona discharge type static eliminator: for example, Aerostat A-80 manufactured by Simco Japan Co., Ltd.) 98 is used as an ion generator including a blower 97 and a blower 97. By this ion blower 98, the film-like object 1
The positive and negative charges are applied to the upper electrode 00, and a voltage is selectively applied to the strip-shaped electrode 94, as described later, to drive the film-shaped object 100 and perform positioning.

The volume resistivity of the ionized air generated by the ion blower 98 is desirably 10 ¹⁰ to 10 ¹² Ω · m. Also, the needle electrode 9 of the ion blower 98
6 shows only one film-shaped object 100,
It is desirable to provide a plurality on the top. Next, the operation of the minute step driving device for the film-like object will be described with reference to FIG.
This will be described with reference to FIGS. First, as shown in FIG. 15, a pretreatment of the film-like object 110 (for example, 10 ¹⁴ Ω or more) is performed. That is, the insulator 92 constituting the stator 91
Electrode groups 94a ₁ , 94a ₂ , 94a ₃ , 94 embedded in
The _{b 1, 94b 2, 94b 3} , 94c 1, 94c 2, 94c 3 while to 0V, and the ion blower 98, by applying positive and negative charge, neutralize if such there is residual charge To perform static elimination and perform initial setting.

Therefore, the insulator 92 constituting the stator 91
Electrodes 94a ₁ and 94a ₂ which are the first electrode group embedded in
, 94a ₃ to the positive voltage + V _O , and the electrode 94 as the second electrode group.
A negative voltage −V _{O is} applied to b ₁ , 94b ₂ , 94b ₃ , and 0V is applied to the electrodes 94c ₁ , 94c ₂ , 94c ₃ as the third electrode group. In this state, ions are sprinkled on the film-like object 100 placed on the stator 91 by the ion blower 98 to form a charge pattern along the electrodes.

Next, as shown in FIG. 16, the voltage applied to each electrode is switched. That is, the negative voltage −V _O is applied to the electrodes 94a ₁ , 94a ₂ , 94a ₃ as the first electrode group, and the positive voltage + is applied to the electrodes 94b ₁ , 94b ₂ , 94b ₃ as the second electrode group.
V _O , the electrodes 94c ₁ , 94c ₂ , 94c _{3 as} the third electrode group
Respectively applied a negative voltage -V _O to. Then, the electric charge in each electrode moves instantaneously, but the electric charge of the film-like object 110 is held because of its high resistance value.

Therefore, the electrodes 94a ₁ , 94b ₁ , 94a ₂ , 9
The charge and charge thereon of 4b ₂ is the same sign, the repulsive force, i.e., the force to float the film-like object 110 is generated. Next, as shown in FIG. 17, the applied voltage is switched. That is, the electrodes 94a ₁ , 94 which are the first electrode group
The positive voltage + V _O is applied to a ₂ and 94a ₃ , and the electrode 7 as the second electrode group is
A negative voltage −V _{O is} applied to 4b ₁ , 74b ₂ , 74b ₃ , and a negative voltage −V ₁ is applied to the electrodes 74c ₁ , 74c ₂ , 74c ₃ as the third electrode group. .
At this point, since the stable point has been displaced to the right as compared with the state shown in FIG. 15, the film-shaped object 110 stops at the position shifted to the right by the amount of displacement of the stable point from the position shown in FIG.
When the film-shaped object 110 is completely stopped and friction is secured between the film-shaped object 110 and the stator 91, a voltage is applied again as shown in FIG. At this time, the stable point moves to the left, but the film-like object 110 remains fixed at the position shown in FIG. 17 due to the frictional force, and after a sufficient time, only the charges in the film-like object 110 move. A charge as shown in FIG. By repeating the above operation, a minute step drive is realized.

With this configuration, it is possible to drive the film-shaped object in the same minute step as in FIG. 12, and to perform the same operation as in FIG. Further, the present invention is not limited to the above-described embodiments, and various modifications are possible based on the gist of the present invention, and these are not excluded from the scope of the present invention.

[0053]

As described in detail above, according to the present invention, a fine pitch drive smaller than the electrode pitch can be achieved despite the simple configuration. That is, by setting the resistance value of the film-like object to be small, it is possible to perform, for example, minute step driving of about 1/20 of the electrode pitch. Also, by appropriately controlling the voltage applied to the electrodes, it was possible to achieve a fine step drive of about 1/40 of the electrode pitch.

In addition, positive and negative charges can be applied to a film-like object such as an insulating film or paper to perform the same minute step driving as described above. Therefore, it is possible to feed a minute paper for high-quality printing in a printer or a facsimile machine, and to drive a minute step when printing on a film or a fabric, and the effect brought about by the present invention is remarkable.

[Brief description of the drawings]

FIG. 1 is a perspective view of a device for driving a minute step of a film-like object according to a first embodiment of the present invention.

FIG. 2 is a configuration diagram of a device for driving a minute step of a film-like object according to a first embodiment of the present invention.

FIG. 3 is an explanatory diagram of an operation of the device for driving a minute step of a film-like object according to the first embodiment of the present invention.

FIG. 4 is a diagram illustrating a relationship between a one-step movement amount and a resistance value of a film-like object according to the first embodiment of the present invention.

FIG. 5 is a view showing a state of a minute step drive by a low resistance value of the film-like object minute step drive device according to the first embodiment of the present invention.

FIG. 6 is a perspective view of a device for driving a minute step of a film-like object according to a second embodiment of the present invention.

FIG. 7 is a diagram showing a first operation of the minute step driving device for a film-like object according to the second embodiment of the present invention.

FIG. 8 is a view showing a second operation of the film-shaped object minute step driving device according to the second embodiment of the present invention.

FIG. 9 is a view showing a third operation of the film-shaped object minute step driving device according to the second embodiment of the present invention.

FIG. 10 is an operation principle diagram of a device for driving a minute step of a film-like object according to a third embodiment of the present invention.

FIG. 11 is an operation explanatory view of a film-like object minute step driving device according to a third embodiment of the present invention.

FIG. 12 is a diagram showing a relationship between an applied voltage V ₁ and a one-step movement amount according to a third embodiment of the present invention.

FIG. 13 is a diagram illustrating a state of minute step driving by controlling a voltage according to a third embodiment of the present invention.

FIG. 14 is a perspective view of a minute step driving device for a film-like object according to a fourth embodiment of the present invention.

FIG. 15 is a diagram showing a first operation of the minute step driving device for a film-like object according to the fourth embodiment of the present invention.

FIG. 16 is a view showing a second operation of the film-shaped object minute step driving device according to the fourth embodiment of the present invention.

FIG. 17 is a view showing a third operation of the film-shaped object minute step drive device according to the fourth embodiment of the present invention.

FIG. 18 is a perspective view of a conventional electrostatic actuator using a film.

FIG. 19 is a configuration diagram of a conventional electrostatic actuator using a film.

FIG. 20 is an explanatory view of one pitch operation of a conventional electrostatic actuator using a film.

[Explanation of symbols]

21, 41, 63, 71, 91 Stator 22, 42, 64, 72, 92 Insulator 24, 44, 65, 74, 94 Strip electrode 30, 50, 60, 66, 80, 100, 110 Film-like object 31 , 67,81 insulator layer 32 resistance layer _{24a 1, 24a 2, 44a 1} , 44a 2, 44a 3, 65a 1, 7
_{4a 1, 74a 2, 94a 1} , 94a 2, 94a 3 first electrode _{24b 1, 24b 2, 44b 1} , 44b 2, 44b 3, 65b 1, 7
_{4b 1, 74b 2, 94b 1} , 94b 2, 94b 3 second electrode _{24c 1, 24c 2, 44c 1} , 44c 2, 44c 3, 65c 1, 7
_{4c 1, 74c 2, 94c 1} , 94c 2, 94c 3 third electrode 45,95 AC high voltage source 46,96 needle electrodes 47,97 blower 48,98 ion blower 68,82 high resistance layer

────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-63-154072 (JP, A) JP-A-63-95858 (JP, A) JP-A-4-75483 (JP, A) (58) Field (Int.Cl. ⁷ , DB name) H02N 1/00

Claims (9)

(57) [Claims] 1. A stator having a plurality of strip-shaped electrodes wired in an insulator; (b) a film-like object set on the stator; and (c) a surface of the film-like object. Means for applying high-density positive and negative charges to the film-shaped object; and (d) means for driving the film-shaped object at a minute pitch smaller than the band-shaped electrode pitch by switching a voltage to the band-shaped electrode. A micro-step driving device for a film-like object, characterized in that: 2. The micro-step driving device for a film-shaped object according to claim 1 , wherein the film-shaped object is an insulating film or paper having a surface resistance of 10 ¹⁴ Ω / □ or more. 3. A stator having a plurality of strip electrodes wired in an insulator; (b) a film-like object set on the stator; and (c) a surface of the film-like object. Means for applying low-density positive and negative charges to the film, and (d) means for driving the film-like object at a minute pitch smaller than the band-electrode pitch by switching the voltage to the band-like electrodes. A micro-step driving device for a film-like object, characterized in that: 4. The micro-step driving device for a film-shaped object according to claim 3 , wherein the film-shaped object is an insulating film or a paper having a high surface resistance. 5. A method for setting a film-shaped object on a stator having a plurality of strip-shaped electrodes wired in an insulator and switching the voltage applied to the strip-shaped electrode to drive the film-shaped object. In the step driving method, (a) the electric resistance of the surface of the film-like object is set high, and (b) the voltage to the band-like electrode is switched to drive the film-like object at a minute pitch smaller than the band-like electrode pitch. Micro step drive method. 6. The method according to claim 5 , wherein the step (b) comprises the steps of: (a) setting the first strip electrode to a first potential and setting the second strip electrode to a second potential. (B) Next, the first strip electrode is set to the second potential, the second strip electrode is set to the first potential, and the third strip electrode is set to the third potential. After setting the strip-shaped electrodes of No. 3 to the second potential and driving the film-shaped object, (c) the first strip-shaped electrodes to the first potential, the second strip-shaped electrodes to the second potential, A minute step driving method for a film-like object, in which a third strip-shaped electrode is set to a fourth potential, and is pulled back after being moved by the electrode pitch for a minute step drive. 7. The method according to claim 6 , wherein the first potential is a positive voltage + V.
_O , the second potential to a negative voltage −V _O , and the third potential to 0 V
After driving the film-shaped object, the first potential is set to the positive voltage + V _O , the second potential is set to the negative voltage −V _O , and the fourth potential is set to the negative voltage −V ₁ Method for driving small objects. 8. The method according to claim 7 , wherein said V _{O is set} to 750 V and said voltage V ₁ is set to 50 V to 400 V. 9. The method according to claim 8 , wherein the fine pitch is about 1/40 of the electrode pitch.