JP3090997U - Scriber shank with point mark - Google Patents

Abstract

(57) [Summary] [Problem] There is no swelling around the point mark.
Provided is a scriber shank with a point mark that can be accurately attached to a scriber shank holder made precisely and that can easily identify which crystal plane is used for scribing. SOLUTION: An annular groove 20 is formed by using a lathe, rotating a scriber shank (round bar) 10 around an axis, and applying a cutting tool. Point mark 30
a, 30b, 30c (30c is not shown)
Three ridgelines 1 extending from the center of the diamond tip
Points indicating 2a, 12b, and 12c, respectively, are holes formed by a drill. These holes are painted in three colors, for example, red, blue, and yellow.

Description

[Detailed description of the device]

[0001]

[Technical field to which the device belongs]

  The present invention relates to a scriber shank, and particularly, to insert a marking line on a semiconductor wafer or the like. To be installed correctly on the scriber shank holder of the scriber And the crystal surface of the diamond tip at the tip of the scriber shank can be easily recognized. Regarding scriber shank with point mark that can be different.

[0002]

[Prior art]

  The scriber shank is a diamond cutter on the conical part of the tip of the handle on a round bar. -It is attached with a chip. Then, put a marking line on the semiconductor wafer. The driving device (scriber) is, for example, a silicon substrate or a sapphire substrate. Etc. are adsorbed to the stage, the stage is moved to the X-axis and Y-axis, and the wafer surface Then, press the diamond tip at the tip of the scriber shank onto the wafer surface. This is a device to insert a marking line.

[0003]   FIG. 2 is an enlarged plan view of the diamond tip. Scriber shank 10 The size of the diamond tip 11 at the tip of the Three crystal planes (one of which is the 111 plane) are exposed at the center of the chip 11, Three ridge lines 12a, 12b, 12c extend from near the center.

[0004]   Scribing on the surface of a semiconductor wafer using such a diamond tip 11 When drawing a line, for example, if the ridgeline 12a is aligned with the scribe direction, Can draw good marking lines.

[0005]   Therefore, as shown in FIG. 3 and FIG. 4, a pointer for indicating the direction of this ridgeline is used. Mark the mark 15 on the surface of the scriber shank (round bar) or The stranded wire 16 is inscribed. The scrubber of the scriber shank The mounting direction to the ibving device is known, and rough adjustment of the mounting direction can be easily performed. It

[0006]

[Problems to be solved by the device]

  However, the diameter of the scriber shank is, for example, 3.1 ± 0.05 mm. Since it is made with precision and accuracy, dots 15 and lines 1 The same as the shank around 6 became thicker and the shank became thicker than the standard. Becomes Therefore, it is not compatible with precision-made scriber shank holders. Become.

[0007]   In addition, there are three crystal planes of diamond tip, and it is simply a matter of which one was used. It is easy to make an error even if you try to identify it only by lines and lines.

[0008]   Therefore, consider engraving numbers, etc. near the dots and lines to facilitate the identification of crystal planes. Yes, but to make a size that can be identified without using a magnifying glass or microscope Has to take up a considerable area on the shank, The bittern cannot be ignored.

[0009]   Therefore, the present invention is precisely made without swelling around the point mark. With a point mark that can be accurately attached to the scriber shank holder The challenge is to provide a scriber shank.

[0010]   Also, the present invention makes it easy to determine which crystal plane is used for scribing. Providing a scriber shank with identifiable point marks Is an issue.

[0011]

[Means for Solving the Problems]

  The present invention for solving the above-mentioned problems is provided by a disk with a diamond tip attached. A liver shank, the annular groove formed on the surface of the shank, and the annular groove Point mark formed on the surface of the diamond tip indicating the crystal plane direction And what to do.

[0012]   In the present invention, around the annular groove, there are swells that can be seen in markings and markings. Does not occur. In addition, points are created by forming holes in the annular groove and applying different colors. To use as.

[Embodiment of device]

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows the present invention. FIG. 3 is a perspective view of a scriber shank with a point mark. This scriber The shank 10 includes a diamond tip 11, an annular groove 20, and an annular groove 20. The point mark 30 and the notch 40 for attachment are formed.

[0013]   The annular groove 20 uses a lathe to rotate the shank (round bar) 10 around an axis, It is formed by hitting a bite. The width of the annular groove 20 is, for example, about 1 mm. The depth is about 0.5 mm. Such an annular groove 20 is provided on the shank 10. For example, it is formed near the tip.

[0014]   The point marks 30a, 30b, 30c (not shown) are the diamonds shown in FIG. The three ridges 12a, 12b, 12c extending from near the center of the hand tip It is a point to point and a hole formed by a drill. The diameter of the hole For example, it is about 0.5 mm.

[0015]   These holes are painted in three colors such as red, blue and yellow. Paint separately (Oil paint, water-based paint, enamel paint with pigment dispersed), dye With dispersed ink, etc.

[0016]

[Effect of device]

  According to the present invention, since there is no swelling around the point mark, The scriber shank to the scriber shank holder You can

[0017]   Also, in the process control table, etc., which crystal direction of the diamond tip and how much It is possible to manage the details such as whether it has been used.

[Brief description of drawings]

FIG. 1 External view of a scriber shank with a point mark of the present invention

FIG. 2 is an enlarged plan view of the diamond tip at the tip of the scriber shank.

FIG. 3 is a front view of a conventional scriber shank having a point mark formed by engraving.

FIG. 4 is a front view of a conventional scriber shank in which lines are formed by scribing.

[Explanation of symbols]

10 Plan view of the scriber shank viewed from the tip side 11 Diamond tips 12a, 12b, 12c Ridge lines 15, 30a, 30b, 30c (30c is not shown) Point mark 16 Marked line 20 Annular groove 40 Notch

Claims (3)

[Scope of utility model registration request] 1. A scriber shank to which a diamond tip is attached, wherein an annular groove formed on the surface of the scriber shank and a point mark formed in the annular groove indicate a crystal plane direction of the diamond tip. A scriber shank that is characterized by having 2. The scriber shank according to claim 1, wherein the point marks are formed at three positions according to a crystal plane direction of the diamond tip. 3. The scriber shank according to claim 2, wherein the point mark is colored in different colors.