JP3077494B2 - Method of forming electrodes for feedthrough capacitors - Google Patents

Method of forming electrodes for feedthrough capacitors

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Publication number
JP3077494B2
JP3077494B2 JP2240294A JP2240294A JP3077494B2 JP 3077494 B2 JP3077494 B2 JP 3077494B2 JP 2240294 A JP2240294 A JP 2240294A JP 2240294 A JP2240294 A JP 2240294A JP 3077494 B2 JP3077494 B2 JP 3077494B2
Authority
JP
Japan
Prior art keywords
layer
plating layer
electroless
plating
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2240294A
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Japanese (ja)
Other versions
JPH07235461A (en
Inventor
良臣 郷
琢也 山崎
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Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
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Filing date
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Priority to JP2240294A priority Critical patent/JP3077494B2/en
Publication of JPH07235461A publication Critical patent/JPH07235461A/en
Application granted granted Critical
Publication of JP3077494B2 publication Critical patent/JP3077494B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Chemically Coating (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、ノイズ対策等のために
用いられる貫通型コンデンサの電極形成方法に係り、特
に、電極を構成する無電解メッキ層間の剥離強度を容易
に任意の値に調節することができる貫通型コンデンサの
電極形成方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming electrodes of a feedthrough capacitor used for noise suppression and the like, and more particularly, to easily adjust the peel strength between electroless plating layers constituting electrodes to an arbitrary value. The present invention relates to a method of forming electrodes of a feedthrough capacitor that can be performed.

【0002】[0002]

【従来の技術】一般の貫通型コンデンサの電極は、図1
に示す如く、セラミックス素体1の表面に、無電解メッ
キにより下地電極層としての無電解メッキ層2a及び2
bを設け、その上に電気メッキ等によりはんだメッキ層
3又はスズメッキ層を設けることにより形成されてい
る。
2. Description of the Related Art An electrode of a general feedthrough capacitor is shown in FIG.
As shown in FIG. 1, electroless plating layers 2a and 2a serving as base electrode layers are formed on the surface of the ceramic body 1 by electroless plating.
b, and a solder plating layer 3 or a tin plating layer is formed thereon by electroplating or the like.

【0003】このような貫通型コンデンサの電極におい
て、無電解メッキ層は、多くの場合、図示の如く、二
層、或は三層以上の多層積層構造とされている。これ
は、貫通型コンデンサの電極をはんだ付け処理する際、
はんだ付け時の熱による収縮応力で素体が破壊されるの
を防止するためである。即ち、多層に設けた無電解メッ
キ層間を剥離し易くすることにより、はんだ付け時の収
縮応力が素体に及ぶのを防いでいる。
[0003] In such an electrode of a feedthrough capacitor, the electroless plating layer is often in a multilayer structure of two layers or three or more layers as shown in the figure. This is because when soldering the electrodes of the feedthrough capacitor,
This is to prevent the element body from being broken by contraction stress due to heat during soldering. That is, by making the electroless plating layers provided in multiple layers easy to peel off, it is possible to prevent the shrinkage stress at the time of soldering from being applied to the element body.

【0004】従来、無電解メッキ層間の剥離を促進する
ため、即ち、剥離し易くするために、無電解メッキ層間
にシリカ層を形成する方法等が提示されている。
Conventionally, there has been proposed a method of forming a silica layer between electroless plating layers in order to promote the separation between the electroless plating layers, that is, to facilitate the separation.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、無電解
メッキ層間にシリカ層等の剥離促進のための層を形成す
る工程は、通常のメッキ工程とは異質な工程であるた
め、煩雑な作業を要する上に、所望の剥離強度を安定か
つ確実に得ることは困難である。
However, the step of forming a layer such as a silica layer between the electroless plating layers for promoting the separation is a step different from the ordinary plating step, and requires a complicated operation. Furthermore, it is difficult to stably and reliably obtain a desired peel strength.

【0006】また、シリカ層等の剥離促進のための層は
一種の不導体層であるため、このような層を形成するこ
とはコンデンサとしての特性(tanδ等)に悪影響を
及ぼす可能性もある。
Further, since a layer for promoting peeling such as a silica layer is a kind of non-conductive layer, formation of such a layer may adversely affect characteristics (tan δ, etc.) as a capacitor. .

【0007】本発明は、上記従来の問題点を解決し、無
電解メッキ層間の剥離強度を、剥離促進のための層を形
成することなく、任意の値に容易かつ確実に調節するこ
とができる貫通型コンデンサの電極形成方法を提供する
ことを目的とする。
The present invention solves the above-mentioned conventional problems, and can easily and reliably adjust the peel strength between electroless plating layers to an arbitrary value without forming a layer for promoting peeling. An object of the present invention is to provide a method for forming electrodes of a feedthrough capacitor.

【0008】[0008]

【課題を解決するための手段】請求項1の貫通型コンデ
ンサの電極形成方法は、セラミック素体表面に無電解メ
ッキ処理によりメッキ層を形成して貫通型コンデンサの
電極を形成する方法であって、該無電解メッキ処理によ
り形成されるメッキ層は、少なくともセラミック素体表
面上の第一層のメッキ層と、該第一層のメッキ層上の第
2層のメッキ層とを含む複数層のメッキ層である貫通型
コンデンサの電極形成方法において、該第一層のメッキ
層に共析するフッ素樹脂の含有量を制御することによ
り、該第一層のメッキ層と該第二層以降のメッキ層との
間の剥離強度を調節することを特徴とする。
According to a first aspect of the present invention, there is provided a method of forming an electrode of a feedthrough capacitor, comprising forming a plating layer on a surface of a ceramic body by electroless plating to form an electrode of the feedthrough capacitor. The plating layer formed by the electroless plating treatment includes a plurality of layers including at least a first plating layer on the surface of the ceramic body and a second plating layer on the first plating layer. In the method for forming an electrode of a feedthrough capacitor which is a plating layer, by controlling the content of a fluororesin which is eutectoid in the plating layer of the first layer, the plating layer of the first layer and the plating of the second layer and thereafter are controlled. It is characterized in that the peel strength between the layers is adjusted.

【0009】請求項2の貫通型コンデンサの電極形成方
法は、請求項1の電極形成方法において、第1層のメッ
キ層に共析するフッ素樹脂含有量が1〜15重量%であ
ることを特徴とする。
According to a second aspect of the present invention, there is provided the electrode forming method for the feedthrough capacitor, wherein the content of the fluorine resin co-deposited in the first plating layer is 1 to 15% by weight. And

【0010】請求項3の貫通型コンデンサの電極形成方
法は、請求項1又は2の電極形成方法において、無電解
メッキ層が無電解Niメッキ層であることを特徴とす
る。
According to a third aspect of the invention, there is provided a method for forming an electrode of a feedthrough capacitor, wherein the electroless plating layer is an electroless Ni plating layer.

【0011】以下に本発明を詳細に説明する。Hereinafter, the present invention will be described in detail.

【0012】本発明の方法において、第一層の無電解メ
ッキ層に共析するフッ素樹脂含有量を調節するには、例
えば、第一層のメッキ層形成用の無電解メッキ液中のフ
ッ素樹脂含有量を増減すれば良い。
In the method of the present invention, for adjusting the content of the fluororesin co-deposited in the first electroless plating layer, for example, the fluororesin in the electroless plating solution for forming the first electroplating layer is used. What is necessary is just to increase or decrease the content.

【0013】即ち、無電解メッキ処理は、一般に、被処
理面を金属塩溶液に浸漬してセンシタイザ処理した後、
触媒溶液に浸漬してアクチベータ処理し、次いで無電解
メッキ液に浸漬することにより行なわれるが、これらの
処理のうち、無電解メッキ液中のフッ素樹脂含有量を適
当な値に調節することにより、形成される無電解メッキ
層中のフッ素樹脂含有量を調節することができる。
That is, in the electroless plating, generally, the surface to be treated is immersed in a metal salt solution and subjected to a sensitizer treatment.
It is performed by immersing in an activator treatment by immersing in a catalyst solution, and then by immersing in an electroless plating solution. The content of the fluororesin in the formed electroless plating layer can be adjusted.

【0014】しかして、無電解メッキ液中のフッ素樹脂
含有量が多いほど、形成される無電解メッキ層中のフッ
素樹脂の含有量が多く、この無電解メッキ層中のフッ素
樹脂含有量が多いほど、第一層と第二層との無電解メッ
キ層間の剥離強度が小さい。従って、必要とされる剥離
強度に応じて、第一層のメッキ層形成用の無電解メッキ
液中のフッ素樹脂含有量を調節することにより、所望の
層間剥離強度を有した電極を形成することが可能とされ
る。
Thus, the higher the fluororesin content in the electroless plating solution, the higher the fluororesin content in the formed electroless plating layer, and the higher the fluororesin content in the electroless plating layer. The smaller the peel strength between the electroless plating layers of the first layer and the second layer, the smaller. Therefore, by adjusting the fluorine resin content in the electroless plating solution for forming the plating layer of the first layer according to the required peel strength, to form an electrode having a desired interlayer peel strength. Is made possible.

【0015】本発明の方法は、必要とされる無電解メッ
キ層間の剥離強度に応じて、第一層の無電解メッキ層中
のフッ素樹脂含有量を制御すること以外は、従来と同様
に実施することができ、無電解メッキの種類や無電解メ
ッキの層数、その上に形成する電気メッキ等の種類、厚
さ等に特に制限はないが、無電解メッキの種類について
は、Ni(ニッケル)メッキであることが望ましい。
The method of the present invention is carried out in the same manner as in the prior art, except that the fluororesin content in the first electroless plating layer is controlled in accordance with the required peel strength between the electroless plating layers. There is no particular limitation on the type of electroless plating, the number of layers of electroless plating, the type of electroplating formed thereon, the thickness, and the like. ) Plating is desirable.

【0016】ただし、最上の無電解メッキ層、即ち、電
気メッキ層の下の無電解メッキ層は、フッ素樹脂非含有
無電解メッキ層であることが望ましい。なぜなら、フッ
素樹脂含有無電解メッキ層であると無電解メッキ層と電
気メッキ層間の密着不良を引き起こす可能性があるため
である。
However, it is desirable that the uppermost electroless plating layer, that is, the electroless plating layer below the electroplating layer, is a fluorine resin-free electroless plating layer. This is because a fluorine resin-containing electroless plating layer may cause poor adhesion between the electroless plating layer and the electroplating layer.

【0017】なお、第一層のメッキ層形成用の無電解メ
ッキ液中のフッ素樹脂含有量は0.7〜10g/lとす
るのが、最適な剥離強度の無電解メッキ層を得る上で好
適である。フッ素樹脂含有量が0.7〜10g/lの無
電解メッキ液を用いた場合、一般に、形成される無電解
メッキ層に共析するフッ素含有量は1〜15重量%程度
となる。
The content of the fluororesin in the electroless plating solution for forming the first plating layer is preferably 0.7 to 10 g / l in order to obtain an electroless plating layer having an optimum peel strength. It is suitable. When an electroless plating solution having a fluororesin content of 0.7 to 10 g / l is used, generally, the content of fluorine co-deposited in the formed electroless plating layer is about 1 to 15% by weight.

【0018】なお、無電解メッキ液中に含有させるフッ
素樹脂としては、ポリテトラフルオロエチレン(PTF
E)が最も適している。それ以外にも数種類のフッ素樹
脂があるが、塩素等を含んでいるため適さない。
The fluororesin contained in the electroless plating solution is polytetrafluoroethylene (PTF).
E) is most suitable. There are several other types of fluororesins, but they are not suitable because they contain chlorine and the like.

【0019】また、本発明において、第一層のメッキ層
を形成した後は、第一層のメッキ層と素体との密着力を
高めるために、270〜330℃程度で熱処置を施した
後、第二層以降のメッキ層を形成するのが好ましい。
In the present invention, after forming the first plating layer, a heat treatment is performed at about 270 to 330 ° C. in order to increase the adhesion between the first plating layer and the element. Thereafter, it is preferable to form a second or subsequent plating layer.

【0020】本発明において、二層積層構造のメッキ層
とする場合には、例えば、第一層のメッキ層をフッ素樹
脂を0.7〜10g/l含有する無電解Niメッキ液を
用いて形成し、上記熱処理を施した後、フッ素樹脂を含
有しないメッキ液を用いること以外は第一層のメッキ層
の形成と同様な処理によりフッ素樹脂を含有しない第二
層のメッキ層を形成する。その後、電気メッキ等により
常法に従ってはんだメッキ層を形成すれば良い。なお、
第一層のメッキ層の厚さは、1〜3μm程度、第2層の
メッキ層の厚さは1〜3μm程度、はんだメッキ層の厚
さは5〜10μm程度に形成するのが好ましい。
In the present invention, when a plating layer having a two-layer structure is used, for example, the first plating layer is formed using an electroless Ni plating solution containing 0.7 to 10 g / l of a fluororesin. After the heat treatment, a second plating layer containing no fluorine resin is formed by the same treatment as the formation of the first plating layer except that a plating solution containing no fluorine resin is used. Thereafter, a solder plating layer may be formed by a conventional method such as electroplating. In addition,
It is preferable that the thickness of the first plating layer is about 1 to 3 μm, the thickness of the second plating layer is about 1 to 3 μm, and the thickness of the solder plating layer is about 5 to 10 μm.

【0021】[0021]

【作用】第一層の無電解メッキ層中のフッ素樹脂含有量
の増減に対応して、第一層と第二層の無電解メッキ層間
のアンカー効果が増減する。即ち、第一層のメッキ層の
フッ素樹脂含有量が少ないと第一層と第二層とのメッキ
層間でアンカー効果が十分に得られ層間剥離強度が大き
くなり、剥離し難くなる。一方、第一層のメッキ層のフ
ッ素樹脂含有量が多いとアンカー効果が小さくなり、層
間剥離強度が減少し、剥離し易くなる。
The anchor effect between the first and second electroless plating layers increases or decreases in accordance with the increase or decrease of the fluorine resin content in the first electroless plating layer. That is, when the fluororesin content of the first plating layer is small, the anchor effect is sufficiently obtained between the plating layers of the first layer and the second layer, the interlayer peel strength increases, and the peeling becomes difficult. On the other hand, if the content of the fluororesin in the first plating layer is large, the anchor effect is reduced, the interlayer peel strength is reduced, and the peeling is facilitated.

【0022】本発明によれば、第一層のメッキ層形成時
の無電解メッキの処理条件、例えば第一層のメッキ層形
成用の無電解メッキ液中のフッ素樹脂含有量を変えるの
みで、従来のように剥離促進のための層を形成する別の
工程を必要とすることなく、また、不導体層のように貫
通型コンデンサの電気的特性に悪影響を及ぼす層を形成
することなく、容易に無電解メッキ層間の剥離強度を任
意の値に調節することができる。
According to the present invention, only the processing conditions of the electroless plating at the time of forming the first layer plating layer, for example, the fluorine resin content in the electroless plating solution for forming the first layer plating layer, are changed. Easily without the need for a separate step of forming a layer for accelerating peeling as in the prior art, and without forming a layer that adversely affects the electrical characteristics of the feedthrough capacitor, such as a nonconductive layer. The peel strength between the electroless plating layers can be adjusted to an arbitrary value.

【0023】[0023]

【実施例】以下に実施例を挙げて本発明をより具体的に
説明する。
The present invention will be described more specifically with reference to the following examples.

【0024】実施例1 本発明の方法に従って、図1に示すような貫通型コンデ
ンサの電極の形成を行なった。
Example 1 According to the method of the present invention, electrodes of a feedthrough capacitor as shown in FIG. 1 were formed.

【0025】酸化チタン及び炭酸バリウムを所定量秤量
し、均一に混合して仮焼した。これを微粉砕した後、添
加剤、バインダー等を加えてスプレードライ装置で造粒
粉を作製した。この造粒粉をプレス成形した後焼成し
て、チタン酸バリウムからなる焼結体(貫通型コンデン
サの素体)を得た。
A predetermined amount of titanium oxide and barium carbonate were weighed, uniformly mixed and calcined. After finely pulverizing, an additive, a binder and the like were added, and a granulated powder was produced by a spray drying apparatus. This granulated powder was press-formed and fired to obtain a sintered body made of barium titanate (elementary body of a feedthrough capacitor).

【0026】この素体の表面をフッ化水素アンモニウム
溶液で表面粗化した後、塩化スズ溶液(センシタイ
ザ)、塩化パラジウム溶液(アクチベータ)、フッ素樹
脂(PTFE)含有無電解Niメッキ液の順で浸漬し、
第一層のフッ素樹脂含有無電解Niメッキ層(厚さ2μ
m)を形成した。ここで、フッ素樹脂含有無電解Niメ
ッキ液としては、フッ素樹脂の含有量が0.7g/l、
3.3g/l、7g/l、10g/lの4種類のものを
用い、各々、処理した。その後、形成された第一層の無
電解Niメッキ層と素体との密着力を上げるため、電気
炉中で300℃で熱処理した。
After the surface of the body is roughened with an ammonium hydrogen fluoride solution, it is immersed in the order of a tin chloride solution (sensitizer), a palladium chloride solution (activator), and an electroless Ni plating solution containing a fluororesin (PTFE). And
First layer of fluororesin-containing electroless Ni plating layer (2 μm thick)
m) was formed. Here, the fluorine resin-containing electroless Ni plating solution has a fluorine resin content of 0.7 g / l,
Each of the four types of 3.3 g / l, 7 g / l, and 10 g / l was processed. Thereafter, in order to increase the adhesion between the formed first electroless Ni plating layer and the element body, heat treatment was performed at 300 ° C. in an electric furnace.

【0027】次に前工程で作製した4種類の試料を、各
々、塩化スズ溶液(センシタイザ)、塩化パラジウム溶
液(アクチベータ)、フッ素樹脂非含有無電解Niメッ
キ液に順次浸漬し、第一層のメッキ層上に第二層のフッ
素樹脂非含有無電解Niメッキ層(厚さ2μm)を形成
した。更に、この上に電気メッキではんだメッキ層(厚
さ10μm)を形成し、貫通型コンデンサを作製した。
Next, the four types of samples prepared in the preceding step were immersed in a tin chloride solution (sensitizer), a palladium chloride solution (activator), and a fluorine resin-free electroless Ni plating solution, respectively. A second layer of a fluorine resin-free electroless Ni plating layer (thickness: 2 μm) was formed on the plating layer. Further, a solder plating layer (thickness: 10 μm) was formed thereon by electroplating to produce a feedthrough capacitor.

【0028】第一層のメッキ層形成用の無電解Niメッ
キ液中のフッ素樹脂含有量と形成された第一層の無電解
Niメッキ層中のフッ素樹脂含有量との関係を求め、結
果を図2に示した。また、フッ素樹脂含有無電解Niメ
ッキ層中のフッ素樹脂の含有量と、第一層と第二層との
層間剥離強度との関係を求め、結果を図3に示した。
The relationship between the content of the fluororesin in the electroless Ni plating solution for forming the first plating layer and the content of the fluororesin in the formed electroless Ni plating layer of the first layer was determined. As shown in FIG. Further, the relationship between the content of the fluororesin in the electroless Ni plating layer containing the fluororesin and the peel strength between the first layer and the second layer was determined, and the results are shown in FIG.

【0029】図2より明らかなように、無電解Niメッ
キ液中のフッ素樹脂含有量が多いほど、形成される無電
解Niメッキ層中のフッ素樹脂含有量が多い。また、図
3より明らかなように、無電解Niメッキ層中のフッ素
樹脂含有量が多いほど層間剥離強度が小さい。
As is apparent from FIG. 2, the higher the content of the fluororesin in the electroless Ni plating solution, the greater the content of the fluororesin in the formed electroless Ni plating layer. Also, as is clear from FIG. 3, the greater the fluorine resin content in the electroless Ni plating layer, the lower the delamination strength.

【0030】[0030]

【発明の効果】以上詳述した通り、本発明の貫通型コン
デンサの電極形成方法によれば、電極を構成する無電解
メッキ層間の剥離強度を別途他の工程を必要とすること
なく、また、貫通型コンデンサの特性に悪影響を及ぼす
層を形成することなく、容易に制御することができ、無
電解メッキ層を容易かつ確実に所望の剥離強度となるよ
うに安定に形成することができる。
As described in detail above, according to the electrode forming method of the feedthrough capacitor of the present invention, the peel strength between the electroless plating layers constituting the electrodes can be reduced without requiring any additional process. The formation can be easily controlled without forming a layer that adversely affects the characteristics of the feedthrough capacitor, and the electroless plating layer can be easily and stably formed so as to have a desired peel strength.

【図面の簡単な説明】[Brief description of the drawings]

【図1】貫通型コンデンサの電極構成を示す断面図であ
る。
FIG. 1 is a sectional view showing an electrode configuration of a feedthrough capacitor.

【図2】実施例1における、第一層のメッキ層形成用の
無電解Niメッキ液中のフッ素樹脂含有量と形成された
第一層の無電解Niメッキ層中のフッ素樹脂含有量との
関係を示すグラフである。
FIG. 2 shows the relationship between the fluororesin content in an electroless Ni plating solution for forming a first plating layer and the fluororesin content in a formed first electroless Ni plating layer in Example 1. It is a graph which shows a relationship.

【図3】実施例1における、第一層のフッ素樹脂含有無
電解Niメッキ層中のフッ素樹脂含有量と、第一層と第
二層との層間剥離強度との関係を示すグラフである。
FIG. 3 is a graph showing a relationship between a fluorine resin content in a fluorine resin-containing electroless Ni plating layer of a first layer and an interlayer peel strength between a first layer and a second layer in Example 1.

【符号の説明】[Explanation of symbols]

1 セラミック素体 2a,2b 無電解メッキ層 3 はんだメッキ層 DESCRIPTION OF SYMBOLS 1 Ceramic body 2a, 2b Electroless plating layer 3 Solder plating layer

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭56−157016(JP,A) 特開 平5−267092(JP,A) 実開 昭55−167637(JP,U) (58)調査した分野(Int.Cl.7,DB名) H01G 4/00 - 4/40 H01G 13/00 - 13/06 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-56-157016 (JP, A) JP-A-5-267092 (JP, A) JP-A 55-167637 (JP, U) Field (Int.Cl. 7 , DB name) H01G 4/00-4/40 H01G 13/00-13/06

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 セラミック素体表面に無電解メッキ処理
によりメッキ層を形成して貫通型コンデンサの電極を形
成する方法であって、該無電解メッキ処理により形成さ
れるメッキ層は、少なくともセラミック素体表面上の第
一層のメッキ層と、該第一層のメッキ層上の第2層のメ
ッキ層とを含む複数層のメッキ層である貫通型コンデン
サの電極形成方法において、 該第一層のメッキ層に共析するフッ素樹脂の含有量を制
御することにより、該第一層のメッキ層と該第二層以降
のメッキ層との間の剥離強度を調節することを特徴とす
る貫通型コンデンサの電極形成方法。
1. A method for forming an electrode of a feedthrough capacitor by forming a plating layer on the surface of a ceramic body by electroless plating, wherein the plating layer formed by the electroless plating is at least a ceramic element. A method of forming an electrode of a feedthrough capacitor which is a plurality of plating layers including a first plating layer on a body surface and a second plating layer on the first plating layer, wherein the first layer By controlling the content of a fluorine resin that is eutectoid in the plating layer, the peel strength between the plating layer of the first layer and the plating layer of the second and subsequent layers is adjusted. A method for forming electrodes of a capacitor.
【請求項2】 請求項1の電極形成方法において、第1
層のメッキ層に共析するフッ素樹脂含有量が1〜15重
量%であることを特徴とする貫通型コンデンサの電極形
成方法。
2. The method for forming an electrode according to claim 1, wherein
A method for forming an electrode of a feed-through capacitor, wherein the content of a fluorine resin co-deposited in a plating layer of the layer is 1 to 15% by weight.
【請求項3】 請求項1又は2の電極形成方法におい
て、無電解メッキ層が無電解Niメッキ層であることを
特徴とする貫通型コンデンサの電極形成方法。
3. The method for forming an electrode of a feedthrough capacitor according to claim 1, wherein the electroless plating layer is an electroless Ni plating layer.
JP2240294A 1994-02-21 1994-02-21 Method of forming electrodes for feedthrough capacitors Expired - Lifetime JP3077494B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2240294A JP3077494B2 (en) 1994-02-21 1994-02-21 Method of forming electrodes for feedthrough capacitors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2240294A JP3077494B2 (en) 1994-02-21 1994-02-21 Method of forming electrodes for feedthrough capacitors

Publications (2)

Publication Number Publication Date
JPH07235461A JPH07235461A (en) 1995-09-05
JP3077494B2 true JP3077494B2 (en) 2000-08-14

Family

ID=12081676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2240294A Expired - Lifetime JP3077494B2 (en) 1994-02-21 1994-02-21 Method of forming electrodes for feedthrough capacitors

Country Status (1)

Country Link
JP (1) JP3077494B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4511317B2 (en) * 2004-11-09 2010-07-28 Ntn株式会社 Resin bearing parts and manufacturing method thereof

Also Published As

Publication number Publication date
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