JP3076379B2 - Mask fall prevention mask cassette - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mask cassette for holding a mask by suction used in an exposure apparatus.

[0002]

2. Description of the Related Art Conventionally, a mask cassette utilizing magnetic attraction for holding a mask is disclosed in Japanese Patent Application Laid-Open No. 2-100131.

Hereinafter, the configuration of the mask cassette will be described with reference to FIG.

[0004] The mask cassette comprises a cassette body 701 and a cassette cover 702. By coupling the cassette body 701 and the cassette cover 702, the inside of the mask cassette is sealed, thereby preventing external dust and the like from adhering to the mask. The mask 703 is held in the mask cassette vertically on a plurality of mask stages 704 radially arranged in the cassette main body 701. A plurality of masks 703 are held on the suction surface of the mask 703 of each mask stage 704, respectively. It is magnetically attracted by the embedded magnet 705. The magnetic attraction is released by driving a magnetic circuit with a power supply (not shown) provided inside or outside the cassette main body 701 to generate a magnetic field that cancels the magnetic field of the magnet 705.

[0005]

However, in the above-mentioned conventional mask cassette, the mask is magnetically attracted only by a force in a direction perpendicular to the mask surface. For example, when an external impact is applied to the mask cassette, the external impact is directly transmitted to the mask storage unit because the mask cassette has high rigidity, and the mask may be shifted or dropped from the mask stage. If the mask is displaced or dropped from the mask stage, when the mask cassette is installed in the exposure apparatus and exposure is performed, the mask cannot be transported normally to the exposure stage, or the mask may be mechanically scratched, deformed, or damaged. However, there was a problem that it could not be used.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a mask cassette in which a mask is unlikely to be displaced or dropped from a mask stage even when an external shock is applied to the mask cassette during transportation of the mask cassette.

[0007]

According to the present invention, there is provided a mask cassette for holding a mask in a vertical position, comprising a plurality of mask stages each having suction means. a plurality of mask holding hand respectively disposed in correspondence with each mask stage, and urging means for urging so as to press toward the respective mask holding hand to each of the mask stage, vertically movable with respect to the cassette body A vertically movable member arbitrarily provided, and means for releasing the pressing of each mask stage by each of the mask pressing hands against the urging force of the urging means in accordance with the movement of the vertically movable member. It is characterized by having.

Each of the mask holding hands may be supported via an elastic body, or may have a pressing portion for mainly pressing the lower half of the mask frame portion.

Further, a cassette connected to the cassette body
A cassette cover, the cassette body and the cassette
When the bar is separated from the bar,
Thus, the pressing by the mask pressing hand may be released .

[0010]

[Action] Each mask stage is arranged correspondingly.
A plurality of mask holding hands, biasing means for biasing the mask holding hands toward the respective mask stages, and a vertically movable member provided to be vertically movable with respect to the cassette body; In accordance with the movement of the up-down movable member, the up-down movable member is moved up and down by having means for releasing the pressing of each mask stage by each of the mask pressing hands against the urging force of the urging means. By
The mask on the mask stage with the mask holding hand.
Can hold or release the held mask
You. The holding of the mask by the mask holding hand is
Each mask is held more firmly on each mask stage as compared with the case of only suction by the suction means , and the mask on each mask stage is applied even when an external shock is applied to the mask cassette or the cassette body. It is difficult to be shifted or dropped.

Further, since each mask holding hand is supported via an elastic body, the distance between each mask holding hand and the mask opposed to each mask holding hand may be changed due to variations in parts dimensions and mounting dimensions. However, even when a certain mask is pressed and another mask is not pressed, all the masks are pressed uniformly because the elastic body is elastically deformed by the urging force of the urging means.

Further, since each mask holding hand has a pressing portion for mainly pressing the lower half of the mask frame portion, the mask holding hand and the mask pressed portion are pressed at the moment when each mask holding hand is pressed against the mask. Dust and the like are generated on the mask pressing portion due to friction or the like, and even if the dust falls, it is difficult to adhere to the mask surface.

Further, the mask cassette is a cassette cover.
, The cassette body and cassette cover are separated
The upper and lower movable members move the mask holder
By releasing the pressing by the
When the cassette cover is attached to the main unit,
Press the mask holding hand when transporting the cassette.
Use of pressure-pressed mask held in mask cassette
The cassette body and cassette cover are separated for
Then, the pressing by the mask holding hand is released.

[0014]

Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a side view of a mask cassette according to a first embodiment of the present invention, with a part thereof cut away, FIG. 2 is a perspective view of a part of the mask cassette, and FIG.
Is a plan view in which a part thereof is cut away.

First, the main configuration of this embodiment will be described with reference to FIG. The mask cassette includes a cassette body 1 and a cassette cover 2. The cassette body 1 is 2
A plurality of radially arranged mask stages 4 sandwiched between an upper flange 1B and a lower flange 1C, which are discs; an upper cylindrical body 1A 'fixed at the center of the lower surface of the upper flange 1B; And a lower cylindrical body 1A fixed to the center of the upper surface of the lower flange 1C. Each mask stage 4
A plurality of magnets 5 for magnetically attracting the mask 3 vertically are respectively embedded in the mask attracting surface of (1). The magnetic attraction of the mask 3 is released by driving a magnetic circuit with a power supply (not shown) provided inside or outside the cassette main body 1 to generate a magnetic field that cancels the magnetic field of the magnet 5.

Next, the cassette body 1 will be described in detail with reference to FIGS. Rotation guides 1F, which are grooves, are formed on the circumference of the upper surface of the lower cylinder 1A and the circumference of the lower surface of the upper cylinder 1A ', respectively, and the cylindrical rotation body 7 is rotatably fitted to each rotation guide 1F. doing. On the outer surface of the rotating body 7, the same number of mask holding hands 9 as the respective mask stages 4 are opposed to the respective mask stages 4 in the same positional relationship, and are fixed radially via an elastic body 10. Each mask holding hand 9 is for simultaneously pressing or releasing the mask 3 magnetically attracted onto each mask stage 4 by the rotation of the rotating body 7, and has a shape that presses the mask 3. The center part of the arc is supported by an elastic body 10 so as to press the frame part of the mask 3 when the mask 3 is pressed. By interposing the elastic body 10 between each mask holding hand 9 and the rotating body 7, the distance between each mask holding hand 9 and the opposing mask 3 is changed due to the variation of the component size and the mounting size. In contrast, even when a certain mask 3 is pressed and another mask 3 is not pressed, since the elastic body 10 is elastically deformed, the rotating body 7 can be further rotated. Can be pressed uniformly. Elastic body 1
As the material of 0, stainless steel or the like is preferable. The material of the mask holding hand 9 is preferably a material softer than the material of the mask 3 in order to prevent the mask 3 from being damaged when the mask 3 is pressed. For example, when titanium is used as the material of the mask 3, aluminum or the like is suitable for the material of the mask holding hand 9.

Further, any elastic body 1 on the outer periphery of the lower cylindrical body 1A
The support member 1G is provided in the vicinity of the support member 1G, and between the support member 1G and the elastic body 10 in the vicinity of the support member 1G, an urging means for constantly urging each mask pressing hand 9 to press each mask stage 4. The spring 11 is stretched. Spring 11
The number of the support members 1G is not limited to one set, and a plurality of sets may be provided.

A vertically movable cup-shaped vertically movable member 6 having an inverted convex cross section is attached to a lower portion in the lower cylindrical body 1A.
The large diameter portion of the vertically movable member 6 slides in the lower cylindrical body 1A in the vertical direction in the figure. Here, lower flange 1
The hole diameter of C is smaller than the outer diameter of the large diameter portion of the vertical movable member 6,
In addition, since the outer diameter of the small-diameter portion is larger than that of the small-diameter portion, the lower flange 1 </ b> C serves as a downward stopper for the vertically movable member 6, so that the vertically movable member 6 does not fall from the cassette body 1. A stopper 1D is formed in a convex shape along the circumference of the inner surface of the lower cylindrical body 1A, against which the upper surface of the up-down movable member 6 abuts when the up-down movable member 6 rises to a predetermined position.
Further, a rod guide 1E, which is a vertical groove, is formed on the inner surface of the lower cylindrical body 1A, and a cam drive rod 8 described later fixed to the vertically movable member 6 is slidably fitted into the rod guide 1E. By doing so, the movement is only in the vertical direction. With the lower flange 1C, the stopper 1D, and the rod guide 1E, the movement of the up-down movable member 6 is limited to a predetermined range of up-down movement.

A cam drive rod 8, which extends upward in the figure and is fitted to the above-described rod guide 1E so as to be vertically movable, is fixedly provided above the vertically movable member 6, and the upper end of the cam drive rod 8 is rotatable. The inner surface of the body 7 is in contact with an end surface of a cam 12 formed in a convex shape on a part of the inner surface. The shape of the cam 12 is
When viewed from the inside, the contact portion with the cam drive rod 8 is inclined downward to the right.

Therefore, when an upward force in the figure is applied to the vertically movable member 6, that is, when the cassette body 1 or the mask cassette is placed on a table that is supported at least on the bottom surface of the vertically movable member 6, the vertically movable member 6 can be moved. The member 6 rises to the uppermost part of the movable range, and at the same time, the upper end of the cam drive rod 8 presses the end face of the cam 12 upward, so that the rotating body 7 and the mask pressing hand 9 are shown against the spring force of the spring 11. By rotating in the direction of arrow B, a space is formed between each mask holding hand 9 and the mask 3 pressed by each (see the broken line in FIG. 3). At this time, the attachment / detachment of the mask 3 becomes possible. When performing exposure, the cassette main body 1 is supported by at least the bottom surface of the vertically movable member 6 such that an upper surface of a mask elevator (not shown), which is located in the exposure apparatus and lifts the cassette main body 1 upward to a desired position where mask loading is possible, is supported. With such a shape, the vertically movable member 6 rises to the uppermost position of the movable range by the rise of the mask elevator, and the mask 3 is released from the pressing of the mask pressing hand 9, so that it is difficult to transport the mask 3 to the exposure stage. The illustrated mask hand enters the space between the mask 3 and the mask holding hand 9 and can transport the mask 3.

Conversely, when no upward force in the figure is applied to the vertically movable member 6, that is, when the mask cassette or cassette body 1 is lifted while supporting a portion other than the vertically movable member 6, the vertically movable member is moved. The member 6 is lowered to the lowest part of the movable range, and at the same time, the cam drive rod 8 is also lowered. Therefore, the force of the cam drive rod 8 does not act on the cam 12, and the respective mask holding hands 9 and the rotating body 7 rotate in the direction of the arrow A shown in the figure by the spring force of the spring 11.
Presses the frame portion of the mask 3 to firmly hold the mask 3 on the mask stage 4. At this time, since the magnetic attraction is also performed, the holding of each mask 3 becomes stronger than the conventional holding by the magnetic attraction alone, and the mask cassette or the cassette main body 1 is hit on the mask cassette or the cassette main body 1 by hitting. Even when an external impact is applied, each of the masks 3 is less likely to be displaced or fall from the mask stage 4 on which each is held. The force for holding the mask 3 is 1 kg in the direction perpendicular to the mask surface in the case of the conventional magnetic attraction. Therefore, if the pressing force by the mask holding hand 9 is set to 1 kg, it is possible to withstand twice the impact as compared with the case of only magnetic attraction.

A cylindrical leg 1 is provided on the lower surface of the lower flange 1C.
H is provided so that the bottom surface of the up-down movable member 6 does not protrude from the leg 1H when the up-down movable member 6 is at the bottom of the movable range. By doing so, the up-down movable member 6 is always inside the cassette body 1, and it is difficult for an unintentional force to be applied to the up-down movable member 6 from the outside. The pressing of the mask 9 to the mask 3 is not released.

The sliding surface between the vertically movable member 6 and the lower cylindrical body 1A, the contact portion between the cam drive rod 8 and the cam 12, and the sliding surface of the rotating body 7 are provided inside the cylindrical body. ,
Generation of dust and the like in the mask storage portion outside the cylindrical body can be reduced, and adhesion of dust and the like to the surface of the mask 3 can be reduced.

Here, the cam drive rod 8 and the cam 12
Is not limited to the above-mentioned shape, and may be any shape as long as the cam driving rod 8 moves upward in the drawing to exert a force on the cam 12 to rotate the rotating body 7 in the direction of the arrow B in the drawing.

Second Embodiment FIG. 4 is a partially cutaway side view of a mask cassette according to a second embodiment of the present invention, and FIG. 5 is a partially cutaway plan view.

The rotating body 27 inside the cassette body 21 has a cup-shaped shape, and the upper cylindrical body 21A 'is provided via a bearing 34 disposed along the outer periphery of the rotating body 27.
It is rotatably provided on the inner surface. Since the rotating body 27 rotates on the inner surface of the upper cylindrical body 21A 'via the bearing 34, the generation of dust and the like due to the rotation of the rotating body 27 is reduced.

At the lower portion on the outer peripheral surface of the rotator 27, each mask stage 24 corresponds to the position of each mask stage 24.
The same number of connecting portions 27A are formed radially, and a mask holding hand 29 is provided to face each mask stage 24 via an elastic body 30 screwed to each connecting portion 27A. Each of the elastic members 30 is formed of two elastically deformable plates that sandwich each of the coupling portions 27A and each of the mask holding hands 29 from the circumferential direction of the cassette body 21. Each mask holding hand 29 is configured to have a pressing portion for mainly pressing the lower half of the mask frame portion, and the pressing portion has a semicircular shape having a center portion supported, and the supporting portion is a rotating body 27.
It extends in the direction and is sandwiched between two elastic bodies 30. Further, a surface of the mask holding hand 29 in contact with the mask 23 is coated with a Teflon coating 36. By making the configuration of the mask holding hand 29 as described above,
It is possible to reduce dust and the like generated due to a shift or the like generated at the moment when the mask holding hand 29 comes into contact with the mask 23, and the generated dust and the like hardly adhere to the mask surface. Further, by making each mask holding hand 29 and each elastic body 30 as described above, the mask holding hand 29
Even if the rotating body 27 is further rotated while pressing the mask 23, the respective elastic bodies 30 are elastically deformed in the circumferential direction of the rotating body 27.
3 is maintained in parallel with each other, so that each mask frame portion can be pressed uniformly.

A cup-shaped vertically movable member 26 is provided on the inner surface of the lower cylindrical body 21A so as to be slidable up and down. A vertical guide 26 is provided on a part of the outer surface of the vertically movable member 26.
A is formed in a convex shape, and a guide receiver 37 that is longer than the length of the guide 26A by the moving amount of the vertical movable member 26 is formed in a concave shape on the inner surface of the lower cylindrical body 21A so as to fit into the guide 26A. I have. For this reason, the movement of the up-down movable member 26 is limited to a movement only in the up-down direction within a predetermined range.

A large number of wedge-shaped cams 32 and cam drive rods 28 are formed on the circumference of the bottom surface inside the rotating body 27 and the circumference of the upper surface of the vertically movable member 26, respectively, so as to face each other. Each of the cams 32 and each of the cam drive rods 28 have a slanted end surface that is inclined downward to the right when viewed from the inside of the cassette body 21, and have a structure in which the end surfaces are in contact with each other. A spring 31 as urging means is stretched between the flange 21J formed on the inner surface of the upper cylindrical body 21A 'and the upper surface of the rotating body 27 so as to bias the rotating body 27 in the direction of arrow A in the drawing. ing.

By providing the spring 31 inside the cylindrical body of the cassette body 21 and reducing the number of movable parts in the mask housing outside the cylindrical body, the generation of dust and the like in the mask housing can be reduced. The rotating body 27 and the cassette body 2
By providing a seal member 35 such as a magnetic fluid seal at a key point in the gap between the first and second parts, it is possible to prevent dust and the like generated by the operation of each part from entering the mask storage part outside the cylindrical body.

The present embodiment also has the same magnetic attraction means as in the first embodiment, and the legs 21H and the cassette cover 22 may be the same as those in the first embodiment, and a description thereof will be omitted.

With the above configuration, when the cassette body 21 or the mask cassette is placed on a table supported by at least the bottom surface of the vertically movable member 26, the vertically movable member 26
Rises to the top of the movable range, and each cam drive rod 28
Due to the upward force, a slip occurs between the end face of each cam drive rod 28 and the end face of the cam 32 opposed to each other, so that the rotating body 27 and the rotating body 27 are connected via the elastic body 30. Each mask holding hand 29 has a spring 31
Rotate in the direction of arrow B in the figure against the spring force of (1) to release the pressing of the mask 23 on each mask stage 24. When mounting a mask cassette of this embodiment to an exposure apparatus, the cassette
The main body 21 and the cassette cover 22 are connected to each other.
Then, the mask cassette is moved to the mask elevator 38 of the exposure apparatus.
Place on top. Here, by making the upper surface of the mask elevator 38 convex so that at least the bottom surface of the vertically movable member 26 supports the cassette body 21, the vertically movable member 26 is raised by the rise of the mask elevator 38, and each mask 23 Is released from the pressing of each mask holding hand 29, and by further raising the mask elevator 38,
Then, as shown in FIG.
The main body 21 and the cassette cover 22 are separated . Therefore, a mask hand (not shown) that transports the mask 23 to the exposure stage enters the space between the mask 23 and the mask pressing hand 29, and can transport the mask 23.

When the cassette main body 21 or the mask cassette is placed on a flat surface, or when the upwardly movable member 26 is not subjected to an upward force as shown in the figure during transportation or the like, the vertically movable member 26 is lowered to the lowermost portion of the movable range. Since the force of each cam drive rod 28 does not act on each cam 32 , the rotating body 27 and each mask holding hand 29 rotate in the direction of arrow A shown in the figure by the spring force of the spring 31, and the mask 23 on each mask stage 24 Is pressed by each mask holding hand 29 and is firmly held.

In this embodiment, the cam drive rod 28
And a plurality of pairs of the cams 32 are provided. By doing so, the force acting on the contact portions between the cam driving rods 28 and the cams 32 is dispersed, so that the durability of the cam driving rods 28 and the cams 32 is improved, In addition, the rotation of the rotating body 27 is performed smoothly.

Here, each cam drive rod 28 and each cam drive rod 28
M32The shape of the cam drive lock is not limited to the wedge shape described above.
When the door 28 moves upward in the figure, the cam32
, A force acts to rotate the rotating body 27 in the direction of arrow B in the drawing.
Such a shape may be used.

Third Embodiment FIG. 6 is a partially cutaway side view of a cassette body according to a third embodiment of the present invention. The cassette body 51 of the present embodiment includes:
A cylindrical body 71 is provided at the center, an upper flange 51B is formed at an upper end of the cylindrical body 71, and a lower flange 51C is formed at a lower end of the cylindrical body 71. Further, inside the cylindrical body 71, a partition plate 72 for vertically separating the inside of the cylindrical body 71 is formed.

Below the cylindrical body 71, a column-shaped vertical movable member 56 is provided via a bearing 73 so as to be vertically slidable inside the cylindrical body 71. An upper stopper 74 is formed in a convex shape below the partition plate 72, and a ring-shaped lower stopper 75 whose inner diameter is smaller than the outer diameter of the vertically movable member 56 is provided below the vertically movable member 56. Have been. The upper and lower stoppers 74 and 75 limit the amount of vertical movement of the vertically movable member 56. In order to prevent rotation of the vertically movable member 56, a vertical guide (not shown) is formed in a convex shape on a part of the outer surface of the vertically movable member 56, similarly to the second embodiment. A guide receiver (not shown) is formed in a concave shape so as to fit into the guide. A spring 61 is provided between the upper surface of the vertically movable member 56 and the lower surface of the partition plate 72 to bias the vertically movable member 56 downward in the drawing.

Under the upper and lower movable members 56, connecting rods 76 having a circular cross section are fixedly provided in the same number as the respective mask stages 54 corresponding to the positions of the respective mask stages 54. As shown in the figure, it extends radially toward the outer periphery of the lower flange 51C.

On the other hand, on the lower surface of the lower flange 51C, the upper end of an L-shaped support bar 79 is provided on each mask stage 54.
The horizontal portions of the support rods 79 extend in the direction of the center of the lower flange 51C, and one end thereof extends upward in the figure. The L-shaped lever 77 is inserted into a horizontal support hole (not shown) provided in a horizontal direction, and each lever 77 is rotatably supported around the support hole. The other end of each lever 77 has a bifurcated portion parallel to each other, and sandwiches the distal end of the connecting rod 76 between the bifurcated portions so as to be rotatable from above and below.

Each lever 77 is attached to the lower flange 51C.
A hole 51D is formed at a portion corresponding to the extension direction of one end of the elastic member 60, and an elastic body 60 that supports each mask holding hand 59 is loosely fitted into each hole 51D, and the tip end protrudes downward. . One end of each lever 77 is screwed to the distal end of each elastic body 60. Each of the mask holding hands 59 is disposed to face each of the mask stages 54, and has a semicircular pressing portion for mainly pressing the lower half of the mask frame portion. The part is supported by the elastic body 60. Each elastic body 60 is composed of two elastically deformable plates which sandwich each mask holding hand 59 and each lever 77 from the circumferential direction of the cassette body 51.

Then, each lever 77 by each support rod 79 is used.
Is set such that each mask pressing hand 59 presses the mask 53 on each mask stage 54 when the up-down movable member 56 is at the lowermost position of the movable range.

Also in this embodiment, the magnetic attraction means similar to that of the first embodiment is provided, and the leg 51H may be the same as that of the first embodiment, so that the description is omitted.

Next, the operation of this embodiment will be described.

When the cassette main body 51 or the mask cassette is placed on a flat surface or during transportation, the vertically movable member 56 is used.
When no upward force is applied in the figure, the vertically movable member 56 is located at the lowermost part of the movable range by the spring force of the spring 61, and each connecting rod 76 presses each lever 77 downward in the figure. Therefore, each lever 77 rotates clockwise around the horizontal portion of each support rod 79, and each mask holding hand 59 presses and holds the mask 53 on each mask stage 54.

When the cassette body 51 or the mask cassette is supported by at least the bottom surface of the vertically movable member 56, that is, the maximum width is smaller than the inner diameter of the lower stopper 75, and the height is smaller than the movable amount of the vertically movable member 56 and the lower stopper. When the cassette main body 51 or the mask cassette is placed on a convex portion having a height equal to or higher than the height of 75, the vertically movable member 56 rises to the top of the movable range against the spring force of the spring 61. As the vertically movable member 56 rises, each connecting rod 76 also rises, and the distal end of each connecting rod 76 is sandwiched between the two forks at the other end of each lever 77.
, The other end of each lever 77 also rises. Therefore, each lever 77 rotates counterclockwise in the figure around the horizontal portion of each support rod 79, and each mask holding hand 5
9 is tilted in the direction of arrow C in the figure, and the pressing on the mask 53 is released.

When the mask cassette of the present embodiment is mounted on an exposure apparatus, the upper surface of the mask elevator 68 of the exposure apparatus is formed in a convex shape such that at least the bottom surface of the vertically movable member 56 supports the cassette body 51. As a result, the vertically movable member 56 also rises due to the rise of the mask elevator 68, and each mask 53 is released from being pressed by each mask pressing hand 59. Therefore, a mask hand (not shown) that transports each mask 53 to the exposure stage can enter the space between the mask 53 and the mask pressing hand 59 and transport the mask 53. The hand 59 is pulled out from the lower side of the mask 53 into the mask storage portion, and the movable portions such as the spring 61, the vertically movable member 56, the respective connecting rods 76, and the respective levers 77 are moved to the inside of the cylindrical body 71 and the lower flange 51C. By providing the lower part and reducing the number of movable parts in the mask storage part, generation of dust and the like in the mask storage part can be reduced.

As described above, the shape of the mask frame portion pressing portion of the mask holding hand described in each embodiment is not limited to a semicircular arc shape, but may be any shape that can press only the mask frame portion.

[0049]

Since the present invention is configured as described above, the following effects can be obtained.

The biasing means is applied to the mask stage.
Responds to the movement of the up and down movable members
Flip and, by having a means for releasing the pressure to each mask stage against the biasing force of the biasing means by the mask holding hand, the holding of the mask on the mask stage, the adsorption
Since it is performed not only by means but also by the mask holding hand,
Even when the cassette body or the mask cassette is hit during transportation, the mask is hardly shifted or dropped from each mask stage even when an external impact is applied, and the reliability of the mask is increased. In addition, the pressing of the mask on each mask stage by each mask holding hand is performed by the biasing force of the biasing means.
Therefore , since the mask holding is performed automatically, the holding of the mask by each mask holding hand can be surely performed without forgetting.

Further, since each mask holding hand is supported via an elastic body, the mask holding hand and the mask opposed to each mask holding hand may be changed due to variations in component dimensions and mounting dimensions. Even if the intervals are different, all the masks can be pressed.

Further, since each mask holding hand has a pressing portion for mainly pressing the lower half of the mask frame portion, the mask holding surface such as dust generated when each mask holding hand is pressed against the mask is removed. Can be reduced, and the mask can be kept in a good condition.

In addition, when a cassette cover is provided,
When the set body and the cassette cover are separated,
Pressing by the presser hand is released.
The cassette cover is not
When it is connected to the
Pressing on the mask on the mask stage can be performed .

[Brief description of the drawings]

FIG. 1 is a side view in which a part of a mask cassette according to a first embodiment of the present invention is broken.

FIG. 2 is a partially cutaway perspective view of the cassette body according to the first embodiment of the present invention.

FIG. 3 is a partially cutaway plan view of the cassette body according to the first embodiment of the present invention.

FIG. 4 is a side view in which a part of a mask cassette according to a second embodiment of the present invention is broken.

FIG. 5 is a partially cutaway plan view of the cassette body of the second embodiment of the present invention.

FIG. 6 is a partially cutaway side view of a cassette body according to a third embodiment of the present invention.

FIG. 7 is a side view in which a part of a conventional mask cassette is cut away.

[Explanation of symbols]

 1, 21, 51 Cassette body 1A, 21A Lower cylinder 1A ', 21A' Upper cylinder 1B, 21B, 51B Upper flange 1C, 21C, 51C Lower flange 1D Stopper 1E Rod guide 1F Rotation guide 1G Support member 1H, 21H, 51H Leg 2,22 Cassette cover 3,23,53 Mask 4,24,54 Mask stage 5 Magnet 6,26,56 Vertically movable member 7,27 Rotating body 8,28 Cam drive rod 9,29,59 Mask holding hand 10, 30, 60 Elastic body 11, 31, 61 Spring 12, 32 Cam 21J Collar 26A Guide 27A Coupling 34, 73 Bearing 35 Seal member 36 Teflon coating 37 Guide receiver 38, 68 Mask elevator 51D hole 72 Partition plate 74 Stopper 75 Lower stopper 76 Connecting rod 7 lever 79 support bar

Claims (4)

(57) [Claims] 1. A mask cassette provided with a plurality of mask stages each having suction means and holding a mask in a vertical position, wherein a plurality of mask stages are arranged corresponding to the respective mask stages.
A number of mask holding hands; an urging means for urging each mask holding hand toward each of the mask stages; and a vertically movable movable vertically with respect to the cassette body . A mask comprising: a member; and means for releasing the pressing of each mask stage by each of the mask pressing hands against the urging force of the urging means in accordance with the movement of the vertically movable member. Fall prevention mask cassette. 2. The mask cassette according to claim 1, wherein each mask holding hand is supported via an elastic body. 3. The mask cassette according to claim 1, wherein each mask holding hand has a pressing portion for mainly pressing a lower half of the mask frame portion. 4. A cassette camera connected to the cassette body.
Having a bar, the cassette body and the cassette cover
When the upper and lower movable members move,
The press by the mask press hand is released.
The mask cassette for preventing a mask from falling according to claim 1, 2 or 3.