JP3072099U - Geometric arrangement of magnetic levitation force in magnetic levitation type rotary bearing device - Google Patents

Abstract

(57) 【Summary】 PROBLEM TO BE SOLVED: To provide a magnetic levitation force geometry in an optimal magnetic levitation type rotary bearing device which is practically applicable to a vacuum turbo molecular pump, a main shaft of a high-speed machine tool, an inertial gyro compass, etc. Provides the structure of the array. SOLUTION: The structure of the magnetic levitation force geometric arrangement in the magnetic levitation type rotary bearing device of the present invention is a force for rotating the main shaft with the magnetic force provided on the bearing to lift the main shaft, and using a radial module for the main shaft. Provide two magnetic levitation restraining forces that are perpendicular and intersect with the main axis, and provide three magnetic levitation restraining forces that are parallel to the main axis supplied by the axial module and do not form a coplanar. Therefore, this mechanism has a total of five linear independent restraining forces, does not contact or friction with the stationary element by floating the main shaft, and also supplies a more stable floating force in the axial direction and its effect is Superior to conventional magnetically levitated rotary bearings. The main shaft is driven by a rotary motor to perform high-speed rotary motion, and has little wear and little noise and vibration. Therefore, it is applied to a high-speed rotating machine such as a main shaft of a vacuum turbo molecular pump, a high-speed machine tool, and an inertial gyro compass.

Description

[Detailed description of the invention]

[0001]

[Technical field to which the invention belongs]

 The present invention relates to a structure of a magnetic levitation force geometric arrangement in a magnetic levitation type rotary bearing device, and particularly relates to a total of five linear independent restraining forces. Magnetic levitation in a magnetic levitation type rotary bearing device that does not cause vibration and has a better axial stop effect than conventional magnetic levitation type bearings, is suitable for high-speed rotary motion, and reduces noise and vibration. Refers to the structure of the force geometric array.

[0002]

[Prior art]

 A magnetic levitation bearing is an integration of three components: mechanical, electronic, and control software.The magnetic force is used to levitate a rotating mechanical part, thereby supporting the rotating mechanical part, and the main shaft of the rotating mechanical part. Control the position. It has the advantages of no contact, zero friction, no lubrication mechanism, and control of system vibration. The sources of magnetic levitation are divided into three types: superconducting magnets, permanent magnets, and electromagnets. There are two types of magnetic levitation that support rotating machines: attractive and repulsive. Since the repulsive force among them is difficult to control, therefore, everyone generally uses the suction force. According to the method of controlling the magnetic levitation force, the magnetic levitation bearings are also divided into main type, passive type and mixed type. The active magnetic levitation bearing system is a servo control system composed of an electromagnetic maglev actuator, a position sensor, a controller and a linear power amplifier. The position sensor senses the position of the sensor target on the axis of rotation and converts the size of the gap into a voltage signal which is fed back to the servo controller, which then sends the control signal to the power amplifier. The power amplifier controls the position of the spindle by converting the voltage signal of the controller to the electromagnet drive current.

[0003] A conventional magnetically levitated bearing device is disclosed in Patent Publication 209303 of the Republic of China. Its main constituent features are: a magnetically levitated bearing consisting of a stationary element and a rotating element, in which one of the elements allows at least part of another element and a first magnetic element such as a ring Wraps around another element, and the portion of the other element supplies a second magnetic element, usually having a circular surface, and the area around the surface is a substantial magnetic monopole, so that both Keep the levitation from each other, and another element includes a non-magnetic cylinder surrounding its upper surface. However, the disadvantage in the configuration is that the above-mentioned magnetic levitation type bearing device uses a permanent magnet to form a magnetic monopole, and the magnetic force of the monopole is a repulsive force. As mentioned, repulsion systems that use repulsion are difficult to control. Therefore, it is not suitable for designing a magnetic levitation type bearing device.

There are also designs related to magnetic levitation bearings in other countries, but the design is based on two conventional radial magnetic levitation modules, each of which has two coplanar magnetic levitation restraining forces and a vertical main shaft. The magnetically levitated module, which intersects on the main shaft and provides an axial levitation, provides a constraining force in the direction of the main shaft and forms a magnetic levitation bearing system with a total of five linear independent constraining forces. Then, the machine can be rotated freely around the main shaft by rotating the machine. There are other ways to design a maglev module at both ends of the spindle, but each of the three restraining forces intersects the spindle end. These six restraining forces are linearly interdependent, and only five of them are linearly independent and can rotate freely around the main shaft by rotating the machine in the same way. Can be done. However, as described above, the axial magnetic levitation design of the geometric arrangement of the magnetic levitation force is relatively weak, so that the application problem when the main shaft generates a relatively large axial load is completely ignored. doing. Furthermore, although the adjustment of the distance between the magnetic pole and the spindle is to obtain the best balance effect, the geometric arrangement in the conventional design makes the adjustment of the magnetic pole rather difficult. As you can see, any conventional design is far from ideal.

In view of this, the inventor of the present invention has developed many years of painstaking research in order to improve such various disadvantages of the conventional magnetically levitated rotary bearing device. Fig. 3 shows the structure of a magnetic levitation force geometry in a rotary bearing device.

[0006]

[Problems to be solved by the invention]

 The purpose of the present invention is to realize a magnetic levitation force geometry in an optimal magnetic levitation type rotary bearing device that is highly practical for application to high-speed rotating machines, for example, vacuum turbo molecular pumps, high-speed machine tool spindles and inertial gyro compasses, etc. In providing the structure of the strategic array.

A further object of the present invention is to provide a structure of a magnetic levitation geometry in a magnetic levitation type rotary bearing device which is most suitable for providing a more stable levitation force in the axial direction.

[0008] A further object of the present invention is to provide a structure of a magnetic levitation force geometry in a magnetic levitation type rotary bearing device so that it can be applied to a rotating mechanical system having a larger axial load to achieve better levitation. The effect is to be able to be obtained.

A further object of the present invention is to provide a structure of a magnetic levitation force geometry in a magnetic levitation type rotary bearing device, and to be able to adjust a distance between an axial magnetic pole and a main shaft. The best floating balance effect can be obtained.

[0010]

[Means for Solving the Problems]

 The structure of the magnetic levitation force geometry of the magnetic levitation rotating bearing device of the present invention having the above advantages includes a radial magnetic levitation module and an axial magnetic levitation module, and the supply of the radial module therein. The two degrees of free restraint, the two electromagnetic restraints, are coplanar or coplanar, perpendicular to the main axis, and intersect at a single point with the radial magnetic levitation module part, and the axial module. The three degrees of free restraint provided by the core, the three magnetic restraints are parallel to the main axis, and the three forces do not form a coplanar, i.e., are composed of non-coplanar axial magnetic levitation modules. The degree of freedom in the body space is six. Actuators can provide the binding force of a part with a magnetic force to reveal an input / output in which the remaining other unrestricted degrees of freedom can be controlled, or control or manipulate the movement with motion. When it comes to rotating machinery, it has one degree of freedom of movement and requires five linearly independent magnetic levitation constraints. The geometry of the magnetic levitation restraint force of the present invention is a restraining force that restrains the independent stave-shaped magnetic levitation, allowing the machine to rotate and rotate freely with respect to the main shaft, or a motor. Can control its operation.

[0011]

[Embodiment of the invention]

 Hereinafter, embodiments of the present invention will be described with reference to the drawings to clarify the technical contents of the present invention and its objects and effects.

FIGS. 1 and 2 show the structure of the magnetic levitation force geometry of the magnetic levitation type rotary bearing device provided by the present invention. Mainly body 10, auxiliary ball bearings 20 and 25, radial magnetic levitation module 30, motor armature 40, electromagnets 54 and 55 of axial magnetic levitation module, main shaft 60, gap rings 70, 74 and 78, auxiliary bearing It is composed of elements such as a fixing ring 80.

[0013] Both ends of the main shaft 60 are provided with auxiliary ball bearings 20 and 25, respectively, and a gap ring 78 is attached to the left side of the disk 65 of another main shaft 60. The left side of the gap ring 78 is provided with an axial magnetic levitation type module. An electromagnet 55 is attached, and an auxiliary bearing fixing ring 80 is sandwiched between the electromagnet 55 of the axial magnetic levitation type module and the auxiliary ball bearing 25. The electromagnet 54 of the axial magnetic levitation module is mounted on the right side of the disk 65 of the main shaft 60, and the motor armature 40 is mounted on the right side of the electromagnet 54 of the axial magnetic levitation module. A gap ring 74 is sandwiched between the electromagnet 54 and the motor armature 40 of the axial magnetic levitation module. A radial magnetic levitation module 30 is provided on the right side of the motor armature 40, and a gap ring 70 is sandwiched between the radial magnetic levitation module 30 and the auxiliary ball bearing 20. All of the above elements are covered with a body 10.

The present invention seeks to find another geometric arrangement of magnetic levitation restraining force from the geometrical viewpoint of mechanical motion, and to make it a modular magnetic levitation bearing structure. This structure is mainly composed of the axial magnetic levitation module 50 and the radial magnetic levitation module 30, and the geometric arrangement of the restraining force is as shown in FIG. The main shaft 60 and the disk 65 which is in contact with the main shaft 60 are attracted members, which are made of a material having excellent electromagnetic properties or which increase the magnetic levitation efficiency of the surface lamination close to the magnetic pole. The radial magnetic levitation module 30 and the general magnetic levitation bearing radial module are similar. As shown in FIG. 4A, this is an explanatory view of the packaging of the radial magnetic levitation type module 30. FIG. 4B is an explanatory view of an octupole electromagnet in which the package of the radial magnetic levitation type module 30 is removed, and two degrees of freedom constraints can be provided. The two linear independent restraining forces and the main shaft 60 are perpendicular and intersect at one point. The axial magnetic levitation module 50 is a six-pole electromagnet as shown in FIG. 5A, and FIG. 5B is an electromagnet 54 and 55 comprising upper and lower six magnetic poles 52 and a main shaft 60. Consisting of a combination of articulated disks 65, it provides three degrees of free constraint and the three constraints and the spindle 60 are parallel and non-coplanar.

[0015] If the electromagnets 54 and 55 serve as a source of magnetic force, the core should be made of a material or laminate having excellent electromagnetic properties. This increases the magnetic levitation efficiency. The axial magnetic levitation module 50 of the present invention and the above-described radial magnetic levitation module 30 are used to support the magnetic levitation with a total of five linear and independent electromagnet restraining forces, so that the object can move with respect to the main shaft 60. Can rotate freely. The gap rings 70, 74, 78 use a non-electromagnetic material. FIG. 6 shows a case where the axial magnetic levitation module 50 is designed to have a magnetic levitation force parallel to the four main axes. This simplifies the operation of mechanical calculations. However, these four magnetic levitation forces are linearly interdependent and their degree of free constraint is three, and they are classically the same as the module in Fig. 3 in kinematic geometry. Solve the problem of extra binding force.

This mechanism is composed of two magnetic levitation modules. One is a radial magnetic levitation module 30, and the other is an axial magnetic levitation module 50, which is a geometrical structure composed of two conventional radial magnetic levitation modules and one axial magnetic levitation module. In contrast to magnetically levitated bearings, the geometrical limitations of conventional magnetically levitated bearings can be exceeded when combined with other mechanical components. For example, when the diameter and length of the rotating machine main shaft are relatively large, or when the rotating machine main shaft has relatively large inertia, three non-coplanar constraints of the axial module can be obtained using the existing mechanical arrangement. By adjusting the distance between the force and the spindle, better parallelism to the gyroscope can be obtained. The axial magnetic levitation force of this mechanism is much better than the conventional one. In addition, the present invention has one less radial module than a general magnetically levitated bearing. Fewer components in the mechanism will lead to relatively higher reliability, as well as cost savings.

The mechanism is supported by magnetic levitation force, the rotating machine is free to rotate with respect to the main shaft and has no friction and does not require lubrication, so that a high-speed rotary pump, a high-speed machine tool main shaft, Applied to inertial gyroscope, low friction, low noise and vibration. In addition, since this mechanism does not require lubrication during operation, if it is used in a vacuum environment that requires high cleanliness, air contamination of fine particles or lubricating oil caused by wear can be prevented.

[0018]

[Effect of the invention]

 The structure of the magnetic levitation force geometry of the magnetic levitation type rotating bearing device provided by the present invention has the following advantages as compared with the above-mentioned certificate and other conventional technologies. .

The magnetic levitation bearing is a key element such as a high-speed rotating machine and a vacuum turbine molecular pump. The purpose of the present invention is to discover the new design by exploring the magnetic pole geometry of the maglev bearing by the geometric search of the mechanism motion. As with the current type of magnetically levitated bearing, it not only supports the main shaft while floating, but also allows the main shaft to rotate freely. Its axial magnetic levitation force is superior to existing products, and it has a relatively excellent balance support effect in rotating mechanical systems with relatively large axial loads. In addition, the best balance effect can be obtained by adjusting the distance between the axial magnetic pole and the main shaft by considering the gyroscope effect balance of the rotating machine. It is applied to high-speed rotating machines. For example, the market potential of vacuum turbine molecular pumps, high speed machine tool spindles and inertial gyroscopes is enormous.

[Brief description of the drawings]

FIG. 1 is a structural combination diagram of a magnetic levitation force geometric arrangement in a magnetic levitation type rotary bearing device of the present invention.

FIG. 2 is an exploded structural view of a magnetic levitation force geometric arrangement in the magnetic levitation type rotary bearing device of the present invention;

FIG. 3 is a structural view of a magnetic levitation force geometric arrangement of the magnetic levitation type rotary bearing device of the present invention;

FIG. 4A is an explanatory view of the packaging of the radial magnetic levitation type module of the present invention, and FIG. 4B is an explanatory view of the octopole electromagnet with the packaging of the radial magnetic levitation module of the present invention removed.

FIG. 5A is an explanatory diagram of a hexapole electromagnet, and FIG. 5B is an explanatory diagram composed of an upper and lower two-pole electromagnet and a disk connected to a main shaft.

FIG. 6 is another equivalent effect design of the axial levitation module of the magnetic levitation force geometric arrangement in the magnetic levitation rotary bearing device of the present invention.

[Explanation of symbols]

 10 Body 20 Auxiliary Ball Bearing 25 Auxiliary Ball Bearing 30 Radial Magnetic Levitation Module 40 Motor Armature 50 Axial Magnetic Levitation Module 52 Magnetic Pole 54 Electromagnet of Axial Magnetic Levitation Module 55 Electromagnet of Axial Magnetic Levitation Module 60 Main Shaft 65 Disk 70 Gap ring 74 Gap ring 78 Gap ring 80 Auxiliary bearing fixing ring

 ──────────────────────────────────────────────────続 き Continued on front page (72) Inventor Susumu Hayashi

Claims (7)

[Utility model registration claims] 1. Two magnetic free restraints supplied by a radial module inside, the two electromagnetic restraining forces forming a coplanar surface, being perpendicular to the main axis and intersecting at a single point. The radial magnetic levitation module part and the three degrees of free restraint supplied by the axial module, these three magnetic restraining forces are parallel to the main axis, and the three forces do not form a coplanar, that is, non-coplanar The structure of the magnetic levitation restraint consists of five independent linear magnetic levitation restraints that rotate the machine and rotate it relative to the spindle. A structure of a magnetic levitation force geometry in a magnetic levitation type rotary bearing device characterized in that it can rotate freely or its movement can be controlled by a motor. 2. The magnetic levitation system according to claim 1, wherein the magnetic force is capable of generating an attractive force with respect to the main shaft by a permanent magnet, an electromagnet, a superconducting magnet, or another mixed system. The structure of the magnetic levitation geometry in a rotary bearing device. 3. The magnetic levitation type rotary bearing device according to claim 1, wherein the suction body is made of a magnet for an axial module and a radial module, and the suction body is a main shaft and a disk connected to the main shaft. Structure of magnetic levitation geometry. 4. The magnetic levitation force in a magnetic levitation type rotary bearing device according to claim 1, wherein the surface where the magnetic attraction and the magnetic pole approach each other is made of a highly conductive magnet material or a laminated material thereof. Geometric array structure. 5. The magnetic levitation type rotating bearing device according to claim 1, wherein the magnet of the attraction body is an electromagnet, that is, a layer formed by stacking silicon steel one by one. Force geometric structure. 6. The axial magnetic levitation module is parallel to, but non-coplanar with, three principal axes supplied by two upper and lower six-pole electromagnets. The axial magnetic levitation module includes two sets of magnets, a sensor mounted on the electromagnet and a sensor target on the disk.The position sensor converts the gap between the magnetic pole and the sensor target into a voltage signal, and controls the three axes. 2. A magnetic levitation force geometry in a magnetic levitation type rotary bearing device according to claim 1, wherein a servo control system is configured in combination with the amplifier and the main amplifier to automatically adjust the size of the gas gap. Structure of the biological sequence. 7. The axial module is supported by a maglev having three degrees of free restraint and, if the array of magnetic forces is greater than three, an axial magnetic levitation force parallel to the main axis but non-coplanar. The structure of the magnetic levitation force geometric arrangement in the magnetic levitation type rotary bearing device according to claim 1 or 6, wherein the combination of the magnetic levitation force is three degrees of constraint.