JP3071997B2 - Vortex flow meter sensor - Google Patents

Vortex flow meter sensor

Info

Publication number
JP3071997B2
JP3071997B2 JP6083275A JP8327594A JP3071997B2 JP 3071997 B2 JP3071997 B2 JP 3071997B2 JP 6083275 A JP6083275 A JP 6083275A JP 8327594 A JP8327594 A JP 8327594A JP 3071997 B2 JP3071997 B2 JP 3071997B2
Authority
JP
Japan
Prior art keywords
vortex
base material
elastic base
vibrating tube
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6083275A
Other languages
Japanese (ja)
Other versions
JPH07294298A (en
Inventor
直基 松原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oval Corp
Original Assignee
Oval Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oval Corp filed Critical Oval Corp
Priority to JP6083275A priority Critical patent/JP3071997B2/en
Publication of JPH07294298A publication Critical patent/JPH07294298A/en
Application granted granted Critical
Publication of JP3071997B2 publication Critical patent/JP3071997B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、渦流量計センサに関
し、より詳細には、渦発生体内に一端側を片持支持さ
れ、渦発生体に着脱可能に装着され、カルマン渦による
変動差圧に応動して渦信号を検出するカルマン渦流量計
のセンサ構造に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vortex flowmeter sensor, and more particularly, to a vortex generator, one end of which is cantilevered and is removably mounted on the vortex generator. The present invention relates to a sensor structure of a Karman vortex flow meter that detects a vortex signal in response to a vortex signal.

【0002】[0002]

【従来の技術】渦流量計は、周知のように、流管内に配
設された渦発生体から単位時間当りに発生するカルマン
渦の数が、所定レイノルズ数範囲で一定となることを利
用した推測形の流量計である。このように、渦流量計
は、渦発生体から発生するカルマン渦を検出するための
渦流量計センサを有している。渦流量計センサには、渦
発生体内に一体に組込まれる一体形と、渦発生体とは異
なる位置に配設された別体形とあるが、一体形の渦流量
計センサは小形な渦流量計とすることができる点で有利
である。
2. Description of the Related Art As is well known, a vortex flow meter utilizes the fact that the number of Karman vortices generated per unit time from a vortex generator disposed in a flow tube is constant within a predetermined Reynolds number range. It is a speculative flow meter. Thus, the vortex flowmeter has the vortex flowmeter sensor for detecting the Karman vortex generated from the vortex generator. There are two types of vortex flowmeter sensors: an integral type that is integrated into the vortex generator and a separate type that is installed at a different position from the vortex generator. Is advantageous.

【0003】本出願人は、以前に、以下に説明するよう
な渦発生体に着脱可能で、口径の異なるすべての渦発生
体に適用可能な渦流量計センサを提案し、実用に供して
いる。
The present applicant has previously proposed a vortex flowmeter sensor which can be attached to and detached from a vortex generator as described below and which can be applied to all vortex generators having different diameters, and has been put to practical use. .

【0004】図2は、従来の渦流量計センサを説明する
ための図であり、図示の渦流量計は、被測定流体が流通
する流管21内に渦発生体22の両端を固着して一体形
成された渦流量計本体をもっており、前記渦発生体22
の両側面に、対をなす複数の圧力導入孔25,25が穿
孔され、該圧力導入孔25,25は、渦発生体31の一
端側から軸方向に穿設された凹陥状の計測室24に連通
されている。計測室24上部の流管21の外壁には取付
面23が形成され、該取付面23には、取付フランジ3
1をもった振動管26が、取付フランジ31により片持
支持されている。
FIG. 2 is a view for explaining a conventional vortex flowmeter sensor. The illustrated vortex flowmeter has both ends of a vortex generator 22 fixed in a flow tube 21 through which a fluid to be measured flows. The vortex generator 22 has an integrally formed vortex flowmeter main body.
A plurality of pressure introduction holes 25, 25 forming a pair are formed on both side surfaces of the vortex generator 31. The pressure introduction holes 25, 25 are formed in a concave measurement chamber 24 that is formed in the axial direction from one end of the vortex generator 31. Is communicated to. A mounting surface 23 is formed on the outer wall of the flow tube 21 above the measurement chamber 24, and the mounting flange 3 is provided on the mounting surface 23.
The vibrating tube 26 having one is cantilevered by a mounting flange 31.

【0005】振動管30は、有底の円筒体26を有し円
筒体26の底部には受圧板26aが設けられている。円
筒体26の内部軸上には両面に圧電素子28が貼着され
た板状の弾性母材27が挿入され、ガラス等の高絶縁性
の充填剤29により円筒体26と一体に固着されてい
る。
The vibrating tube 30 has a bottomed cylindrical body 26, and a pressure receiving plate 26a is provided at the bottom of the cylindrical body 26. A plate-shaped elastic base material 27 having piezoelectric elements 28 attached to both surfaces is inserted on the inner axis of the cylindrical body 26, and is integrally fixed to the cylindrical body 26 with a highly insulating filler 29 such as glass. I have.

【0006】被測定流体が紙面に垂直な方向に流れた場
合、紙面の裏側である渦発生体21の下流にカルマン渦
が発生し、渦発生体22の両側面には圧力変動が生ず
る。この圧力変動は、圧力導入孔25,25から計測室
24内に導入され、受圧板26aを紙面左右方向に交番
変位させる。この交番変位は、片持支持された振動管3
0内に固着された圧電素子28に伝達され、渦の圧力変
動に応動する流量に比例した渦信号が端子32より出力
される。
When the fluid to be measured flows in a direction perpendicular to the plane of the paper, Karman vortices are generated downstream of the vortex generator 21 on the back side of the paper, and pressure fluctuations occur on both sides of the vortex generator 22. This pressure fluctuation is introduced into the measurement chamber 24 from the pressure introduction holes 25, 25, and alternately displaces the pressure receiving plate 26a in the lateral direction on the paper. This alternating displacement is caused by the cantilevered vibration tube 3
A vortex signal that is transmitted to the piezoelectric element 28 that is fixed in the inside and is proportional to the flow rate corresponding to the vortex pressure fluctuation is output from the terminal 32.

【0007】上述のように、従来の渦流量計には、口径
に従って定められた大きさの渦発生体であっても、振動
管30は共通のものが使用され、渦発生体22内の計測
室24に同一形状の渦流量計センサが挿入されて使用さ
れるので、生産が合理化され、安価な渦流量計を提供で
きる。
As described above, in the conventional vortex flow meter, even if the vortex generator has a size determined according to the diameter, the same vibration tube 30 is used, and the measurement inside the vortex generator 22 is performed. Since a vortex flowmeter sensor having the same shape is inserted into the chamber 24 and used, the production is rationalized and an inexpensive vortex flowmeter can be provided.

【0008】[0008]

【発明が解決しようとする課題】上述した従来の渦発生
体一体形の渦流量計センサは、LNG(液化天然ガス)
等の低温流体からスチーム等の高温流体のいろいろな流
体の流量を共通して計測可能とするため、充填剤29と
してガラスが使用されていた。この結果、 (1)振動管内にガラスを高温で処理充填するため振動
管の耐食性に問題があり、強度が劣化する。 (2)ガラス封着において内部ひずみの除去や、ガラス
内への気泡の混入をなくすために時間がかかり作りにく
い。 (3)内部ひずみを除去しても振動管の材質とガラスの
体膨張係数が大きく異なるため、熱サイクル等による熱
疲労により振動管にクラックが発生したり、破損したり
する危険が起り得る。 (4)渦流量計センサが流体に直接さらされるため、特
に高温流体が流れた場合、ガラス中に閉じ込められてい
た湿気が徐々に圧電素子に達し、絶縁抵抗が小さくな
り、使用可能な高温限界が制限された。 (5)渦流量計センサの乾燥に時間がかかるが、それで
も充分な除湿が困難であった。 (6)圧力導入孔25,計測室24を通って被測定流体
が噴出するので、運転中の渦流量計センサ交換ができな
い。 (7)リード線は、絶縁材で被覆された平行導線が用い
られ、金属パイプの内に挿通されていたが、振動による
容量変化によりノイズが大きくなった。
The above-mentioned conventional vortex flowmeter sensor integrated with a vortex generator is an LNG (liquefied natural gas).
Glass has been used as the filler 29 in order to be able to commonly measure the flow rates of various fluids from low-temperature fluids such as steam to high-temperature fluids such as steam. As a result, (1) there is a problem in the corrosion resistance of the vibrating tube because glass is filled in the vibrating tube at a high temperature, and the strength is deteriorated. (2) In glass sealing, it takes time to remove internal strain and to prevent air bubbles from being mixed in the glass, and it is difficult to make the glass. (3) Even if internal strain is removed, since the material of the vibrating tube and the body expansion coefficient of glass greatly differ, there is a risk that a crack or breakage may occur in the vibrating tube due to thermal fatigue due to a thermal cycle or the like. (4) Since the vortex flowmeter sensor is directly exposed to the fluid, especially when a high-temperature fluid flows, the moisture trapped in the glass gradually reaches the piezoelectric element, the insulation resistance decreases, and the usable high-temperature limit is reached. Was restricted. (5) It takes time to dry the vortex flowmeter sensor, but it is still difficult to sufficiently dehumidify. (6) Since the fluid to be measured is ejected through the pressure introducing hole 25 and the measuring chamber 24, the vortex flowmeter sensor cannot be replaced during operation. (7) As the lead wire, a parallel conductor covered with an insulating material was used, and was inserted through the metal pipe. However, noise increased due to a change in capacitance due to vibration.

【0009】[0009]

【課題を解決するための手段】本発明は、上記課題を解
決するために、(1)渦発生体の一端側から軸方向に穿
設された凹陥状の計測室を有し、前記渦発生体両側面か
ら該計測室に導入される渦変動差圧を検出する渦流量計
センサにおいて、前記渦発生体の一端側に片持支持さ
れ、前記計測室内に緩挿される有底管状で渦変動差圧に
応動して変位する振動管と、該振動管内で、該振動管
の、少くとも開口部と底部とで支持される柱状体で、該
振動管の変位に応動して変位する弾性母材と、該弾性母
材に貼着され、該弾性母材の変位を検出する振動検出素
子と、該振動検出素子と端子とを接続するリード線とを
一体に構成し、前記振動管の底部で支持される前記弾性
母材の支持部構造を、前記振動管内径より僅かに長径な
板状体で、半径方向に複数の切欠を有するばね板を前記
弾性母材端面に同心に固着し、該ばね板の外周と前記弾
性母材端面外周との軸方向に所定の空隙を有したこと、
更には、(2)前記(1)において、前記振動管と弾性
母材の熱膨張係数を等しくしたこと、更には、(3)前
記(1)において、前記弾性母材に貼着される前記振動
検出素子を板状の圧電素子とし、該圧電素子と前記端子
間とのリード線を耐熱絶縁材の被覆を有する導線のより
線としたことを特徴とするものである。
According to the present invention, in order to solve the above-mentioned problems, (1) a vortex generator has a concave measuring chamber which is formed in an axial direction from one end side of the vortex generator. In the vortex flowmeter sensor for detecting a vortex fluctuation differential pressure introduced into the measurement chamber from both side surfaces of the body, a vortex fluctuation having a bottomed tubular shape which is supported at one end of the vortex generator and is loosely inserted into the measurement chamber. A vibrating tube that is displaced in response to a differential pressure, and an elastic mother body that is displaced in response to the displacement of the vibrating tube, the column being a body supported in the vibrating tube by at least an opening and a bottom of the vibrating tube. A vibration detection element that is attached to the elastic base material and detects displacement of the elastic base material, and a lead wire that connects the vibration detection element and a terminal; The support structure of the elastic base material supported by the plate-shaped body slightly longer than the inner diameter of the vibrating tube, in the radial direction A spring plate having a notch of a few fixed concentrically to said elastic base material end face, that with a predetermined gap in the axial direction between the outer periphery and the elastic base material end face the outer periphery of the spring plate,
Further, (2) in (1), the thermal expansion coefficient of the vibrating tube and the elastic base material are made equal, and (3) in (1), the elastic base material is adhered to the elastic base material. The vibration detecting element is a plate-shaped piezoelectric element, and a lead wire between the piezoelectric element and the terminal is a stranded wire of a conductive wire having a coating of a heat-resistant insulating material.

【0010】[0010]

【作用】渦発生体に作用する渦変動圧力を渦発生体に穿
設された計測室に導入し、導入された変動圧力を渦発生
体に着脱可能に装着された有底筒状の振動管で受け、振
動管に生ずる振動変位を振動管と非接触に振動検出素子
が貼着された弾性母材に伝達して振動検出素子により検
出する。弾性母材は、振動管の少くとも開口部と底部と
で支持され、この底部の支持構造を、弾性母材の底部に
同心固着された放射状の切欠を有するばね板とし、弾性
母材の振動管への嵌挿支持を容易にするとともに、ガラ
ス等の封着剤をなくし振動検出素子の絶縁低下をなく
す。
[Function] A vortex generating pressure acting on a vortex generator is introduced into a measurement chamber formed in the vortex generator, and the introduced fluctuating pressure is removably mounted on the vortex generator. The vibration displacement generated in the vibration tube is transmitted to the elastic base material to which the vibration detection element is attached in a non-contact manner with the vibration tube and detected by the vibration detection element. The elastic base material is supported by at least the opening and the bottom of the vibrating tube, and the support structure at the bottom is a spring plate having a radial notch concentrically fixed to the bottom of the elastic base material, and the vibration of the elastic base material In addition to facilitating the insertion and support to the tube, the sealing agent such as glass is eliminated, and the insulation of the vibration detecting element is prevented from being lowered.

【0011】[0011]

【実施例】【Example】

[実施例1](請求項1に対応) 図1は、本発明による渦流量計センサの一実施例を説明
するための図であり、図1(a)は全体構造図、図1
(b)は矢視B−B線断面図、図1(c)は矢視C−C
線断面図で、図中、1は振動管、2は弾性母材、3a,
3bは圧電素子、4a,4bは電極板、5はばね板、
6,7は出力端、8はキャップ、9はシースパイプ、1
0はリード線、11はターミナルブロック、12はハー
メチック端子、13は外部リード線、14は端子であ
る。
[Embodiment 1] (corresponding to claim 1) FIG. 1 is a view for explaining an embodiment of a vortex flowmeter sensor according to the present invention, and FIG.
(B) is a sectional view taken along line BB of FIG. 1, and FIG.
1 is a vibrating tube, 2 is an elastic base material, 3a,
3b is a piezoelectric element, 4a and 4b are electrode plates, 5 is a spring plate,
6 and 7 are output terminals, 8 is a cap, 9 is a sheath pipe, 1
0 is a lead wire, 11 is a terminal block, 12 is a hermetic terminal, 13 is an external lead wire, and 14 is a terminal.

【0012】図1に示した渦流量計センサは、例えば、
円筒状の流管(図示せず)とこの流管内に両端が固着さ
れた渦発生体(図示せず)とからなる渦流量計本体に装
着される渦センサである。渦発生体には、一端側から軸
方向に凹陥状の計測室が穿設されており、計測室には渦
発生体の両側部に開口する圧力導入孔が連通している。
計測室に対向する流管壁には、計測室と同軸な貫通穴が
穿設され、軸と直角なセンサ取付面を有している。
The vortex flow meter sensor shown in FIG.
The vortex sensor is mounted on a vortex flowmeter body including a cylindrical flow tube (not shown) and a vortex generator (not shown) having both ends fixed in the flow tube. The vortex generator is provided with a measurement chamber that is concave from the one end side in the axial direction, and the measurement chamber communicates with pressure introduction holes that open on both sides of the vortex generator.
A through hole coaxial with the measurement chamber is formed in the flow tube wall facing the measurement chamber, and has a sensor mounting surface perpendicular to the axis.

【0013】振動管1は、一端が開口し底部1cを有す
る筒状体で、一端側外周に配設されたフランジ1aを上
記センサ取付面にボルト等で片持式に固着され、筒状体
部分は計測室内に緩挿される。計測室内に緩挿された振
動管1の端部には受圧板1bが取り付けられ、渦発生体
の圧力導入孔から計測室内に導入される渦変動圧力を有
効に受圧可能とするようになっている。
The vibrating tube 1 is a cylindrical body having an open end and a bottom portion 1c. A flange 1a provided on the outer periphery of one end is fixed to the sensor mounting surface in a cantilever manner with bolts or the like. The part is loosely inserted into the measurement room. A pressure receiving plate 1b is attached to an end of the vibration tube 1 loosely inserted into the measurement chamber, so that the vortex fluctuation pressure introduced into the measurement chamber from the pressure introduction hole of the vortex generator can be effectively received. I have.

【0014】弾性母材2は、振動管1内に圧入され、振
動管1に作用する渦変動差圧を受けて交番変位する振動
管の変位を忠実に伝達させるための柱状体である。弾性
母材2は、振動管1の上部開口側に上端圧入部2aを有
し、振動管底部1c側の端部2dは小径な平面で、例え
ば、下端面に向けテーパ状に切削され、端面が平坦とな
っている。中間部の外径は振動管1の内径より僅かに小
径のため、振動管とは非接触である。
The elastic base material 2 is a columnar body which is press-fitted into the vibrating tube 1 and faithfully transmits the displacement of the vibrating tube which is alternately displaced by receiving the eddy fluctuation pressure acting on the vibrating tube 1. The elastic base material 2 has an upper end press-fit portion 2a on the upper opening side of the vibrating tube 1, and an end 2d on the vibrating tube bottom 1c side is a small-diameter flat surface, for example, is cut in a tapered shape toward the lower end surface. Is flat. Since the outer diameter of the intermediate portion is slightly smaller than the inner diameter of the vibration tube 1, it is not in contact with the vibration tube.

【0015】上部圧入部2aには、2面取り2bが形成
されており、各々の面には、図1(b)に示すように、
振動検出素子、例えば、圧電素子3a,3bが貼着され
ている。圧電素子3a,3bは、厚さ方向に分極され、
圧電定数d33を有しており、非貼着面には多孔板からな
る電極板4a,4bが貼着されている。圧電素子3a,
3bは、弾性母材2を一方の出力端7とし、電極板4a
と4bとは接続され、他の出力端6としたパラレルタイ
プのバイモルフを構成している。
A double chamfer 2b is formed in the upper press-fitting portion 2a, and on each surface, as shown in FIG.
Vibration detecting elements, for example, piezoelectric elements 3a and 3b are attached. The piezoelectric elements 3a and 3b are polarized in the thickness direction,
It has a piezoelectric constant d 33, the non-bonding surface electrode plate 4a made of perforated plate, 4b are attached. The piezoelectric elements 3a,
3b, the elastic base material 2 is used as one output end 7, and the electrode plate 4a
And 4b are connected to form a parallel type bimorph as another output terminal 6.

【0016】弾性母材2の端部2dには、軸と直角な面
をもつばね板5がスポット溶接等により固着されてい
る。ばね板5は、例えば図1(c)に示すように、外径
が振動管1の内径よりも僅かに大きい円板状をしてお
り、複数の放射状の切欠5aが穿設され、支持片5bを
構成している。支持片5bは、端部2dに外端部が弾性
母材2の軸方向に変位可能にばね作用を有し、振動管1
内に圧入したとき、振入方向に湾曲して容易に挿入さ
れ、振動管1の振動変位を弾性母材に忠実に伝達させる
ことができる。
A spring plate 5 having a surface perpendicular to the axis is fixed to the end 2d of the elastic base material 2 by spot welding or the like. As shown in FIG. 1C, for example, the spring plate 5 has a disk shape whose outer diameter is slightly larger than the inner diameter of the vibrating tube 1, and is provided with a plurality of radial cutouts 5a. 5b. The support piece 5b has a spring action at the end 2d so that the outer end can be displaced in the axial direction of the elastic base material 2, and the vibrating tube 1
When it is press-fitted into the inside, it is bent in the inserting direction and is easily inserted, so that the vibration displacement of the vibration tube 1 can be faithfully transmitted to the elastic base material.

【0017】振動管1の上部開口側には、キャップ8が
被覆される。キャップ8の中央にはシースパイプ9が貫
通固着され、シースパイプ9の他端側にはハーメチック
端子12を有するターミナルブロック11が貫通固着さ
れている。シースパイプ9内には、2本のリード線10
が挿通され、出力端6,7とハーメチック端子12,1
2間に接続される。ハーメチック端子12,12には、
端子14,14を有する外部リード線13,13が接続
される。なお、ハーメチック端子12をターミナルブロ
ック11に固着する以前に、ターミナルブロック11内
に窒素ガス等の乾燒ガスを封入しておくと、シースパイ
プ9を通ってキャップ8内も乾燒ガスと置換されるの
で、高低温においても圧電素子3a,3bの絶縁が保た
れる。
The upper opening side of the vibration tube 1 is covered with a cap 8. A sheath pipe 9 is fixed through the center of the cap 8, and a terminal block 11 having a hermetic terminal 12 is fixed through the other end of the sheath pipe 9. In the sheath pipe 9, two lead wires 10
Are inserted, and the output terminals 6, 7 and the hermetic terminals 12, 1
Connected between the two. Hermetic terminals 12, 12
External lead wires 13 having terminals 14 are connected. If a burning gas such as nitrogen gas is sealed in the terminal block 11 before the hermetic terminal 12 is fixed to the terminal block 11, the inside of the cap 8 is also replaced with the burning gas through the sheath pipe 9. Therefore, the insulation of the piezoelectric elements 3a and 3b is maintained even at high and low temperatures.

【0018】以上の構成からなる渦流量計センサは、振
動管変位を振動検出素子12が貼着された弾性母材に伝
達するために、ガラス等の封着剤を使用せず、底部に固
着された切欠を有するばね板を介して伝達するので、組
立が容易で、製作時間も短縮できる。
The vortex flowmeter sensor having the above-mentioned structure is fixed to the bottom without using a sealing agent such as glass in order to transmit the displacement of the vibration tube to the elastic base material to which the vibration detection element 12 is adhered. Since the force is transmitted through the spring plate having the cutout, the assembling is easy and the manufacturing time can be shortened.

【0019】[実施例2](請求項2に対応) 振動管1と弾性母材2との熱膨張係数が異なると、振動
管1に熱ひずみが生じて長期間使用時には、振動管1に
熱疲労によりクラックを生じ、破損する危険がある。振
動管1と弾性母材2の熱膨張係数を等しくすることによ
り、上記の危険がなくなり、使用温度範囲が拡大され
る。
[Embodiment 2] (corresponding to claim 2) If the thermal expansion coefficients of the vibrating tube 1 and the elastic base material 2 are different, thermal strain is generated in the vibrating tube 1 and the vibrating tube 1 is not used for a long time. There is a risk of cracking and breakage due to thermal fatigue. By making the thermal expansion coefficients of the vibrating tube 1 and the elastic base material 2 equal, the above danger is eliminated, and the operating temperature range is expanded.

【0020】[実施例3](請求項3に対応) 弾性母材2に貼着される振動検出素子を圧電素子とした
とき、圧電素子3a,3bはバイモルフをなし、高感度
に変位検出できる。しかし、圧電素子3a,3bはイン
ピーダンスが高いので、リード線10が振動を受けたと
き、リード線10間に大きい静電容量変化が生じ、無視
できない振動ノイズが発生し、SN比を低下させる。
[Embodiment 3] (corresponding to claim 3) When the vibration detecting element attached to the elastic base material 2 is a piezoelectric element, the piezoelectric elements 3a and 3b form a bimorph, and can detect displacement with high sensitivity. . However, since the piezoelectric elements 3a and 3b have a high impedance, when the lead wire 10 is vibrated, a large change in capacitance occurs between the lead wires 10, and non-negligible vibration noise is generated to lower the SN ratio.

【0021】リード線10を、耐熱性があり高絶縁性の
セラミックフェルトを被覆した導線として、これをより
線にすることにより、振動に対しても安定した位置を保
つので、振動による容量変化も少なく、振動ノイズが小
さくなり、SN比を向上させることができる。
Since the lead wire 10 is made of a heat-resistant and high-insulating ceramic felt-coated conductive wire and is made of a stranded wire, it maintains a stable position against vibrations, so that the capacitance change due to vibrations is reduced. With less vibration noise, the SN ratio can be improved.

【0022】[0022]

【発明の効果】以上の説明から明らかなように、本発明
によると、以下の効果がある。 (1)請求項1に対応する効果:弾性母材の底部端面に
切欠を有するばね板を弾性母材端部に空隙を有して固着
したので、振動管内への圧入が容易となる。しかも、弾
性母材は振動検出素子が振動管と非接触に貼着されてい
るから、渦流量計センサの絶縁低下することなく、高温
まで使用範囲を拡大させることができる。 (2)請求項2に対応する効果:振動管と弾性母材の熱
膨張係数を等しくしたので、相互間の熱ひずみの発生が
なく、熱膨張差による振動管の疲労破壊が生じないの
で、信頼性が向上する。 (3)請求項3に対応する効果:弾性母材に貼着される
検出素子を圧電素子とすることにより、高温でも高感度
に交番変位が検出でき、しかもリード線を高耐熱高絶縁
性導線のより線としたので、振動によるノイズ発生は小
さく、SN比が向上する。
As is apparent from the above description, the present invention has the following effects. (1) Effect corresponding to the first aspect: Since the spring plate having the notch at the bottom end surface of the elastic base material is fixed with a gap at the end of the elastic base material, press-fitting into the vibration tube becomes easy. Moreover, since the vibration detecting element is attached to the elastic base material in a non-contact manner with the vibrating tube, the use range can be extended to a high temperature without lowering the insulation of the vortex flowmeter sensor. (2) Effect corresponding to claim 2: Since the thermal expansion coefficient of the vibrating tube and the elastic base material are made equal, there is no occurrence of thermal strain between the vibrating tube and the fatigue failure of the vibrating tube due to the difference in thermal expansion. Reliability is improved. (3) Effect corresponding to claim 3: By using a piezoelectric element as the detection element attached to the elastic base material, the alternating displacement can be detected with high sensitivity even at a high temperature, and the lead wire is made of a high heat-resistant and high-insulation conductive wire. , The generation of noise due to vibration is small, and the SN ratio is improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明による渦流量計センサの一実施例を説
明するための図である。
FIG. 1 is a diagram for explaining an embodiment of a vortex flowmeter sensor according to the present invention.

【図2】 従来の渦流量計センサを説明するための図で
ある。
FIG. 2 is a diagram for explaining a conventional vortex flowmeter sensor.

【符号の説明】[Explanation of symbols]

1…振動管、2…弾性母材、3a,3b…圧電素子、4
a,4b…電極板、5…ばね板、6,7…出力端、8…
キャップ、9…シースパイプ、10…リード線、11…
ターミナルブロック、12…ハーメチック端子、13…
外部リード線、14…端子。
DESCRIPTION OF SYMBOLS 1 ... Vibration tube, 2 ... Elastic base material, 3a, 3b ... Piezoelectric element, 4
a, 4b: electrode plate, 5: spring plate, 6, 7 ... output terminal, 8 ...
Cap, 9 ... sheath pipe, 10 ... lead wire, 11 ...
Terminal block, 12 ... Hermetic terminal, 13 ...
External lead wires, 14 terminals.

フロントページの続き (58)調査した分野(Int.Cl.7,DB名) G01F 1/32 Continuation of front page (58) Field surveyed (Int.Cl. 7 , DB name) G01F 1/32

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 渦発生体の一端側から軸方向に穿設され
た凹陥状の計測室を有し、前記渦発生体両側面から該計
測室に導入される渦変動差圧を検出する渦流量計センサ
において、前記渦発生体の一端側に片持支持され、前記
計測室内に緩挿される有底管状で渦変動差圧に応動して
変位する振動管と、該振動管内で、該振動管の、少くと
も開口部と底部とで支持される柱状体で、該振動管の変
位に応動して変位する弾性母材と、該弾性母材に貼着さ
れ、該弾性母材の変位を検出する振動検出素子と、該振
動検出素子と端子とを接続するリード線とを一体に構成
し、前記振動管の底部で支持される前記弾性母材の支持
部構造を、前記振動管内径より僅かに長径な板状体で、
半径方向に複数の切欠を有するばね板を前記弾性母材端
面に同心に固着し、該ばね板の外周と前記弾性母材端面
外周との軸方向に所定の空隙を有したことを特徴とする
渦流量計センサ。
1. A vortex for detecting a vortex fluctuation differential pressure introduced into the measurement chamber from both side surfaces of the vortex generator, the measurement chamber having a concave shape formed in one axial direction from one end of the vortex generator. In the flowmeter sensor, a vibrating tube that is cantilevered at one end of the vortex generator and that is displaced in response to a vortex fluctuation differential pressure in a bottomed tubular shape loosely inserted into the measurement chamber; A columnar body supported by at least the opening and the bottom of the tube, an elastic base material which is displaced in response to the displacement of the vibrating tube, and which is adhered to the elastic base material and controls the displacement of the elastic base material. The vibration detecting element to be detected and the lead wire connecting the vibration detecting element and the terminal are integrally formed, and the support structure of the elastic base material supported at the bottom of the vibrating tube is defined by the inner diameter of the vibrating tube. It is a slightly long plate-shaped body,
A spring plate having a plurality of notches in a radial direction is fixed concentrically to the end surface of the elastic base material, and has a predetermined gap in the axial direction between the outer periphery of the spring plate and the outer periphery of the end surface of the elastic base material. Vortex flow meter sensor.
【請求項2】 前記振動管と弾性母材の熱膨張係数を等
しくしたことを特徴とする請求項1に記載の渦流量計セ
ンサ。
2. The vortex flowmeter sensor according to claim 1, wherein the vibrating tube and the elastic base material have the same thermal expansion coefficient.
【請求項3】 前記弾性母材に貼着される前記振動検出
素子を板状の圧電素子とし、該圧電素子と前記端子間と
のリード線を耐熱絶縁材の被覆を有する導線のより線と
したことを特徴とする請求項1又は2に記載の渦流量計
センサ。
3. The vibration detecting element attached to the elastic base material is a plate-shaped piezoelectric element, and a lead wire between the piezoelectric element and the terminal is formed of a stranded wire of a conductive wire having a coating of a heat-resistant insulating material. The vortex flowmeter sensor according to claim 1 or 2, wherein
JP6083275A 1994-04-21 1994-04-21 Vortex flow meter sensor Expired - Lifetime JP3071997B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6083275A JP3071997B2 (en) 1994-04-21 1994-04-21 Vortex flow meter sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6083275A JP3071997B2 (en) 1994-04-21 1994-04-21 Vortex flow meter sensor

Publications (2)

Publication Number Publication Date
JPH07294298A JPH07294298A (en) 1995-11-10
JP3071997B2 true JP3071997B2 (en) 2000-07-31

Family

ID=13797813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6083275A Expired - Lifetime JP3071997B2 (en) 1994-04-21 1994-04-21 Vortex flow meter sensor

Country Status (1)

Country Link
JP (1) JP3071997B2 (en)

Also Published As

Publication number Publication date
JPH07294298A (en) 1995-11-10

Similar Documents

Publication Publication Date Title
JP3305704B2 (en) Eddy current detector
EP0666468B1 (en) Multimeasurement replaceable vortex sensor
JP2709618B2 (en) Swing beam vortex sensor
JP5091676B2 (en) Pressure measurement system and circuit board housing
US5948988A (en) Pressure transducer with flame arrester
BRPI1104088B1 (en) ultrasonic transducer set
WO2000055580A1 (en) Rocker style sensor system for use in a vortex shedding flowmeter
JP3071997B2 (en) Vortex flow meter sensor
JP4415662B2 (en) Ultrasonic flow meter
JPH03504277A (en) pressure gauge
US10481060B2 (en) Density sensor and density sensor manufacturing method
JP3153748B2 (en) Vortex flow meter sensor
JPH0613449Y2 (en) Vortex flowmeter
CN114935115B (en) Integrated temperature measurement structure for fluid pipeline and packaging method
JPH0654274B2 (en) Semiconductor pressure transducer
JPH04331322A (en) Sensor for karman vortex flowmeter
JP3069181B2 (en) Vortex flow sensor
JPH0719918A (en) Vortex flowmeter and vortex sensor
JPH0755462Y2 (en) Vortex detector
JP4458406B2 (en) Vortex flow meter
JPH0719919A (en) Vortex sensor
JP3599082B2 (en) Vortex flow meter
JP3172301B2 (en) Vortex sensor
JPH0225446B2 (en)
JPS6244338Y2 (en)

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090526

Year of fee payment: 9

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090526

Year of fee payment: 9

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100526

Year of fee payment: 10

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100526

Year of fee payment: 10

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110526

Year of fee payment: 11

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110526

Year of fee payment: 11

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120526

Year of fee payment: 12

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130526

Year of fee payment: 13

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140526

Year of fee payment: 14

EXPY Cancellation because of completion of term