JP3069123B2 - Support - Google Patents
SupportInfo
- Publication number
- JP3069123B2 JP3069123B2 JP2228560A JP22856090A JP3069123B2 JP 3069123 B2 JP3069123 B2 JP 3069123B2 JP 2228560 A JP2228560 A JP 2228560A JP 22856090 A JP22856090 A JP 22856090A JP 3069123 B2 JP3069123 B2 JP 3069123B2
- Authority
- JP
- Japan
- Prior art keywords
- surface plate
- support
- center
- plate
- supporting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Machine Tool Units (AREA)
- Vibration Prevention Devices (AREA)
- Details Of Measuring And Other Instruments (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は荷重中心が水平方向に移動可能な可動部を有
する装置を支持するために用いられる支持台に関し、超
精密三次元測定装置や超精密加工装置などを支持する支
持台として利用されるものである。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a support base used for supporting a device having a movable part whose center of load can move in a horizontal direction, and relates to an ultra-precision three-dimensional measuring device and an ultra-precision processing. It is used as a support for supporting devices and the like.
従来の技術 レーザを用いた超精密三次元測定装置は光学レンズな
どの表面形状をナノメータのレベルで測定するものであ
るが、このような測定装置が載置される従来の支持台と
して、第３図に示すものがある。この従来例は、剛性の
高い定盤ａを用い、且つこの定盤ａをその両側部におい
て複数の支持脚体ｂにより直接支持する構成のものが知
られている。そして定盤ａの中央部には、レーザ計測ヘ
ッドｃを備えこれをＸ−Ｙ移動させるＸ−Ｙテーブルｄ
が載置され、定盤ｂの縁部には基準ミラーｅを保持する
保持枠ｆが載置される。2. Description of the Related Art An ultra-precision three-dimensional measuring device using a laser measures a surface shape of an optical lens or the like at a nanometer level. Some are shown in the figure. In this conventional example, a configuration is known in which a surface plate a having high rigidity is used, and the surface plate a is directly supported by a plurality of support legs b on both sides thereof. An XY table d provided with a laser measuring head c at the center of the surface plate a for moving the laser measuring head XY.
Is mounted, and a holding frame f for holding a reference mirror e is mounted on an edge of the surface plate b.
前記支持脚体ｂの配設ピッチＰは定盤ａの幅寸法いっ
ぱいにとって、広幅としており、これによってＸ−Ｙテ
ーブルｄの移動中心Ｇの移動時に生じる横揺れを抑える
ようにしている。The arrangement pitch P of the support legs b is made wide to cover the full width dimension of the surface plate a, so that the roll caused when the movement center G of the XY table d moves is suppressed.
発明が解決しようとする課題 しかし上記従来例では、定盤ａに対する支持幅Ｑが、
支持脚体ｂの配設ピッチＰが広幅となることに伴い、同
様に広幅となるため、第３図に仮想線で示すように、Ｘ
−Ｙテーブルｄの移動中心Ｇが移動すると定盤ａの歪み
形状が変化し易く、レーザ計測ヘッドｃと基準ミラーｅ
との間の相対位置関係が影響を受けて測定装置本来の正
しい計測精度が得られないという問題がある。Problems to be Solved by the Invention However, in the above conventional example, the support width Q for the surface plate a is
As the arrangement pitch P of the support legs b becomes wider, the width also becomes wider. Therefore, as shown by a virtual line in FIG.
When the moving center G of the Y table d moves, the distortion shape of the platen a is likely to change, and the laser measuring head c and the reference mirror e
There is a problem that the relative positional relationship between the measurement device and the measurement device is affected and the original correct measurement accuracy cannot be obtained.
これに対しては定盤ａの厚さ寸法を大きくして定盤ａ
の歪みを小さくすることが考えられるが、そうすると前
記装置を含む機器全体の重心位置が高くなると共に重量
が増すので、横揺れが大きくなり易いという問題が生じ
る。On the other hand, the thickness of the platen a
Although it is conceivable to reduce the distortion, the center of gravity of the entire device including the device is increased and the weight is increased, which causes a problem that the roll is likely to increase.
又この横揺れに対しては、第４図に示すように、形
状のブラケットｇを介して定盤ａを低位置で支持すれ
ば、定盤ａの厚さ寸法が大であっても機器全体の重心位
置は高くならないが、支持脚体ｂを定盤ａの側方に配置
することになるので、支持脚体ｂの配設ピッチＰが定盤
ａの幅寸法よりも大きくなり、支持台が横方向に大型化
するという問題が生じる。In addition, as shown in FIG. 4, if the platen a is supported at a low position via a bracket g having a shape, even if the thickness of the platen a is large, as shown in FIG. Although the position of the center of gravity does not increase, the support legs b are arranged on the side of the surface plate a. Therefore, the arrangement pitch P of the support legs b becomes larger than the width dimension of the surface plate a. However, there is a problem that the size is increased in the lateral direction.
本発明は上記問題点に鑑み、所定装置の可動部の作動
に起因する定盤の歪み形状の変化が生じにくく、且つ横
揺れに強い比較的コンパクトな支持台を提供することを
目的とする。SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide a relatively compact support table that is less likely to change the shape of the distortion of a surface plate due to the operation of a movable unit of a predetermined device and that is resistant to roll.
課題を解決するための手段 本発明は上記目的を達成するため、可動部を有する装
置が載置される定盤と、この定盤を支持する支持脚体と
を備えた支持台において、前記定盤をその横断面形状が
中央部が厚肉で、両端部が薄肉になるように形成し、前
記支持脚体を定盤の両端部の夫々の下方に配し、これら
支持脚体と定盤との間に支持脚体の頂部から下方かつ内
側方に屈曲延出する支持ブラケットを配し、この支持ブ
ラッケトを介して前記定盤をその中央部の底面及び側面
において前記支持脚体に支持させたことを特徴とする。Means for Solving the Problems In order to achieve the above object, the present invention provides a support base having a base on which an apparatus having a movable part is placed, and a support leg supporting the base. The board is formed so that its cross-sectional shape is thick at the center and thin at both ends, and the support legs are arranged below each of the both ends of the platen. A support bracket that bends and extends downward and inward from the top of the support leg is disposed between the base and the support plate, and the support plate is supported by the support leg on the bottom surface and side surfaces of the center portion through the support bracket. It is characterized by having.
作 用 上記構成によれば、定盤をその横断面形状が中央部が
厚肉で、両端部が薄肉となるように形成し、その中央部
の底面及び側面を支持ブラケットを介して支持脚体で支
持するように構成したので、定盤に載置される装置の可
動部を厚肉中央部に載置すると、前記可動部の可動範囲
における定盤の歪みを小さくすることができる。又定盤
は支持脚体の頂部から下方かつ内側方に屈曲延出する支
持ブラケットを介して、その中央部底面及び側面が支持
される構成としたので、装置全体の重心位置が低くな
り、従来例の問題点であった横揺れが生じ易くなるとい
う事態を回避することができる。更に前記支持脚体を定
盤の両端部下方に配設したことにより、支持台の大型化
を抑えることができる。According to the above configuration, the surface plate is formed so that its cross-sectional shape is thick at the center and thin at both ends, and the bottom and side surfaces of the center are supported by the support legs via the support bracket. When the movable portion of the device mounted on the surface plate is mounted on the thick central portion, distortion of the surface plate in the movable range of the movable portion can be reduced. In addition, the center plate has a structure in which the center bottom surface and side surfaces are supported via support brackets that are bent downward and inward from the tops of the support legs, so that the center of gravity of the entire apparatus is lowered, and It is possible to avoid the problem of the example in which the roll is likely to occur. Further, by disposing the support legs below both ends of the surface plate, it is possible to suppress an increase in the size of the support base.
実施例 本発明の実施例を、第１図及び第２図に基き説明す
る。Embodiment An embodiment of the present invention will be described with reference to FIG. 1 and FIG.
本実施例の定盤１は横断面形状が中央部２が厚肉で、
両端部３、３が薄肉となる略Ｔ字状をなし、前記端部３
の厚さ寸法T1を前記中央部２の厚さ寸法T2よりも小さく
することにより、従来のものに比べて軽量化を図ってい
る。定盤１の４隅部下方に、この定盤１を支持するため
の支持脚体４を夫々配設することにより、支持脚体４、
４間の配設ピッチＰを定盤１の幅寸法いっぱいにとって
いる。これら支持脚体４は横フレーム4aによって互いに
連結されていると共に夫々の内部に防振装置を備えてい
る。The platen 1 of the present embodiment has a cross section in the center portion 2 which is thick.
The ends 3 have a substantially T-shape in which the end portions 3 are thin.
By reducing the thickness dimension T 1 than the thickness T 2 of the said central portion 2, thereby achieving weight reduction as compared with the prior art. By disposing support legs 4 for supporting the surface plate 1 below the four corners of the surface plate 1, respectively, the support legs 4,
The arrangement pitch P between the four is set to the full width dimension of the surface plate 1. These support legs 4 are connected to each other by a horizontal frame 4a, and each has a vibration isolator therein.
各支持脚体４と定盤１との間に、定盤１をその中央部
２の底面及び側面において、前記支持脚体４に支持させ
るための支持ブラケット５を夫々設けている。この支持
ブラケット５は、支持脚体４の頂部から下方かつ内側方
に屈曲延出するものであり、具体的には、支持脚体４の
頂部に取付けられる水平上板部６と、前記中央部２の底
面に取付けられる水平下板部７と、これら水平上板部６
と水平上板部７とを接続し且つ前記中央部２の側面に取
付けられる鉛直板部８とからなり、水平上板部６と水平
下板部７とは互いに逆向きに鉛直板部８から延設されて
いる。鉛直板部８の上下寸法は中央部２の厚さ寸法T2か
ら端部３の厚さ寸法T1を減じた値よりも小であり、水平
下板部７が定盤１の中央部２の底面に取付けられた状態
で、水平上板部６は前記端部３の下面との間に隙間を形
成する。これにより、定盤１に対する支持幅Ｑを前記中
央部２の幅寸法にまで小さくすることができる。Between each support leg 4 and the surface plate 1, a support bracket 5 for supporting the surface plate 1 on the support leg 4 is provided on the bottom surface and the side surface of the central portion 2. The support bracket 5 bends and extends downward and inward from the top of the support leg 4. Specifically, the horizontal bracket 6 is attached to the top of the support leg 4, 2 and a horizontal lower plate 6 attached to the bottom
And a vertical plate portion 8 connected to the horizontal upper plate portion 7 and attached to the side surface of the central portion 2. The horizontal upper plate portion 6 and the horizontal lower plate portion 7 are opposite to each other from the vertical plate portion 8. It has been extended. Vertical dimension of the vertical plate portion 8 is smaller than the value obtained by subtracting the thickness T 1 of the end portion 3 from the thickness T 2 of the central portion 2, the central portion 2 of the plate 1 is horizontal lower plate portion 7 The horizontal upper plate portion 6 forms a gap between the horizontal upper plate portion 6 and the lower surface of the end portion 3 in a state where the horizontal upper plate portion 6 is attached to the bottom surface of the end portion 3. Thereby, the support width Q with respect to the surface plate 1 can be reduced to the width of the central portion 2.
本実施例では定盤１の上に、レーザを用いた超精密三
次元測定装置を載置している。この装置は、Ｘ−Ｙテー
ブル10によってレーザ計測ヘッド11をＸ−Ｙ方向に移動
させながら光学レンズなどの被測定物12のＺ方向の形状
を測定し、測定データをXY座標に基いてナノメータオー
ダの精度で評価するものである。Ｘ−Ｙテーブル10及び
レーザ計測ヘッド11は、本装置の可動部を構成する。こ
の可動部は定盤１の中央部２に載置され、定盤１の両端
部３には定盤１に与える歪みの影響が小さい基準ミラー
13を保持する保持枠14など固定物や軽量の移動物が載置
されている。なお前記中央部２の幅寸法はＸ−Ｙテーブ
ル10の幅寸法に一致する程度まで小さくすることができ
る。In this embodiment, an ultra-precision three-dimensional measuring device using a laser is mounted on the surface plate 1. This apparatus measures the shape of an object to be measured 12 such as an optical lens in the Z direction while moving a laser measuring head 11 in the XY directions by an XY table 10 and converts the measured data to nanometer order based on XY coordinates. Is evaluated with an accuracy of. The XY table 10 and the laser measuring head 11 constitute a movable part of the present apparatus. The movable part is mounted on the center part 2 of the surface plate 1, and reference mirrors on both ends 3 of the surface plate 1 which are less affected by distortion applied to the surface plate 1.
A fixed object or a lightweight moving object such as a holding frame 14 for holding the 13 is placed thereon. The width of the central portion 2 can be reduced to the extent that it matches the width of the XY table 10.
以上の構成によれば、Ｘ−Ｙテーブル10はその作動に
応じてその移動中心Ｇを中央部２の領域内で移動させる
が、中央部２を厚肉に形成し、かつ定盤１に対する支持
幅Ｑを定盤１の幅寸法よりも小さい中央部２の幅寸法と
したことにより、前記変化に起因する定盤１の歪み形状
の変化を小さく抑えることができるので、被測定物12、
レーザ計測ヘッド11、基準ミラー13の相互の相対位置を
正確に保持することができる。According to the above configuration, the XY table 10 moves its moving center G within the area of the central part 2 according to its operation. By setting the width Q to the width of the central portion 2 smaller than the width of the surface plate 1, a change in the distortion shape of the surface plate 1 due to the change can be suppressed to a small value.
The relative position between the laser measurement head 11 and the reference mirror 13 can be accurately maintained.
又上記形状に定盤１を形成し、上記形状の支持ブラケ
ット５を介して定盤１を支持脚体４に支持させたので、
定盤１を低く設置して機器全体の重心を低くすることが
でき、横揺れに対する安定性を増すことができる。Also, since the surface plate 1 was formed in the above-described shape, and the surface plate 1 was supported by the support legs 4 via the support bracket 5 having the above-described shape,
By setting the surface plate 1 low, the center of gravity of the entire device can be lowered, and stability against rolling can be increased.
なお上記実施例では、支持ブラケットを各支持脚体ご
とに個別に設けているが、左右の支持脚体間に横架され
る形状のものを用いてもよい。In the above embodiment, the support brackets are individually provided for each of the support legs, but a support bracket having a shape that is horizontally laid between the left and right support legs may be used.
発明の効果 本発明は上記構成、作用を有するので、定盤上に載置
される装置の可動部の作動に対しての定盤の歪みを小さ
くすることができると共に、比較的コンパクトで横揺れ
の少ない支持台を提供することができる。Advantageous Effects of the Invention The present invention has the above-described configuration and operation, so that it is possible to reduce the distortion of the surface plate with respect to the operation of the movable portion of the device placed on the surface plate, and it is relatively compact and rollable. It is possible to provide a support base having a small number.
第１図は本発明の実施例の斜視図、第２図はその正面
図、第３図は従来例の正面図、第４図は改良例の正面図
である。 １……定盤 ２……中央部 ３……端部 ４……支持脚体 ５……支持ブラケット 10、11……可動部1 is a perspective view of an embodiment of the present invention, FIG. 2 is a front view thereof, FIG. 3 is a front view of a conventional example, and FIG. 4 is a front view of an improved example. DESCRIPTION OF SYMBOLS 1 ... Surface plate 2 ... Central part 3 ... End part 4 ... Support leg 5 ... Support bracket 10, 11 ... Movable part
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ Ｂ２３Ｑ 1/00 Ｂ (56)参考文献 特開 昭59−99389（ＪＰ，Ａ) 特開 昭62−120925（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) B23Q 1/00 - 1/76 B23Q 11/00 B25H 7/02 F16F 15/02 G12B 5/00 G12B 9/08 ──────────────────────────────────────────────────続 き Continuation of the front page (51) Int.Cl. 7 Identification symbol FI B23Q 1 / 00B (56) References JP-A-59-99389 (JP, A) JP-A-62-120925 (JP, A) (58) Field surveyed (Int.Cl. 7 , DB name) B23Q 1/00-1/76 B23Q 11/00 B25H 7/02 F16F 15/02 G12B 5/00 G12B 9/08
Claims (1)
この定盤を支持する支持脚体とを備えた支持台におい
て、前記定盤をその横断面形状が中央部で厚肉で、両端
部が薄肉になるように形成し、前記支持脚体を定盤の両
端部の夫々の下方に配し、これら支持脚体と定盤との間
に支持脚体の頂部から下方かつ内側方に屈曲延出する支
持ブラケットを配し、この支持脚ブラケットを介して前
記定盤をその中央部の底面及び側面において前記支持脚
体に支持させたことを特徴とする支持台。A surface plate on which an apparatus having a movable portion is mounted;
In a supporting table provided with a supporting leg for supporting the surface plate, the surface plate is formed such that its cross-sectional shape is thick at the center and thin at both ends, and the supporting leg is fixed. Arranged below each of the two ends of the board, a support bracket that bends and extends downward and inward from the top of the support leg between the support leg and the surface plate is provided. A supporting table, wherein the base is supported by the supporting legs at the bottom surface and side surfaces at the center thereof.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2228560A JP3069123B2 (en) | 1990-08-28 | 1990-08-28 | Support |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2228560A JP3069123B2 (en) | 1990-08-28 | 1990-08-28 | Support |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04111733A JPH04111733A (en) | 1992-04-13 |
| JP3069123B2 true JP3069123B2 (en) | 2000-07-24 |
Family
ID=16878288
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2228560A Expired - Fee Related JP3069123B2 (en) | 1990-08-28 | 1990-08-28 | Support |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3069123B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR200497894Y1 (en) * | 2022-05-13 | 2024-03-26 | 진영매 | Toothbrush for advertising |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6669481B2 (en) * | 2015-12-04 | 2020-03-18 | 株式会社ブイ・テクノロジー | Inspection device |
-
1990
- 1990-08-28 JP JP2228560A patent/JP3069123B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR200497894Y1 (en) * | 2022-05-13 | 2024-03-26 | 진영매 | Toothbrush for advertising |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04111733A (en) | 1992-04-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |