JP3065205U - Microscope - Google Patents

Abstract

(57) [Problem] To provide a microscope which has a wide field of view, enables observation in a lateral direction even in an extremely narrow space, and can be manufactured at low cost. SOLUTION: A charge-coupled device type video microscope 10 has an illumination through hole 2 into which an illumination light source 17 is inserted.
1, 2, 21 and a light receiving hole 23 for video
And a hand-held handpiece 12 containing a plate-like mirror 28 attached to the resin material 20 and a cut-off resin material 20. The plate-shaped mirror 28 guides the light by confining the light. Surface 32 is inclined at 45 degrees. A simple microscope without a charge-coupled device camera can also be used. With this microscope, it is possible to inspect a non-inspection object vertically.

Description

[Detailed description of the invention]

[0001]

[Technical field to which the invention belongs]

 The present invention relates to a microscope which is used as a probe for observing an extremely narrow portion or a minute structure, and for observing or inspecting a situation such as a BGA (Ball Grid Array) or skin.

[0002]

[Prior art]

 In recent years, hand-held microscopes have been widely used in medical and cosmetic fields to observe the structure of the skin and the condition of the hair, and are also being applied to various industrial fields. The following describes an example of soldering a BGA in an ultra-small package. This BGA is used in a wide range of fields, such as LSIs for mobile phones and digital camera-integrated VTRs, and high-performance microprocessors for portable information terminals. We are starting. Here, when the BGA is mounted on the board, the BGA solder balls are soldered to the board at a predetermined temperature. However, it is necessary to determine the set temperature by inspecting the soldering condition for optimal mounting.

[0003]

[Problems to be solved by the invention]

 However, methods for observing and inspecting the reliability of BGA solder balls adhered to a board include inspections by energization and inspections by X-ray transmission at present, but the cost is extremely high. Is the current situation. In addition, since the diameter of a BGA solder ball is very small, about several hundred microns to 1 mm, there is a limit to a method of visually observing a solder state with a mirror or the like as in the related art.

FIGS. 15A and 15B are schematic diagrams showing a conventional example of observing a solder state of a BGA. FIG. 15A is an example diagram of observation by a mirror, and FIG. 15B is an example diagram of observation by a prism. The arrows in the figure indicate illumination light. As shown in FIG. 15A, in the inspection using the conventional mirror 1, when observing the soldering state of the solder balls 4 of the BGA 3 soldered on the substrate 2, the conventional mirror 1 has the thickness 5 itself. In addition, it is difficult to see the lower side where the solder ball 4 adheres to the substrate 2, and since the depth 6 of the mirror is large, it is difficult to use it in a very narrow place.

As shown in FIG. 15B, in the inspection using the conventional prism 7, it is possible to see the lower side where the solder ball 4 adheres to the substrate 2, but the size 8 of the prism itself is widened. Therefore, it is difficult to use it in a very narrow place.

Further, with a conventional microscope, for example, even when the skin of the human body or the hairline of the human body is observed, the visual field is narrow, and it is difficult to obtain a clear image, and there is room for improvement.

Accordingly, an object of the present invention is to provide a microscope which has a wide field of view, enables observation in a lateral direction even in a very narrow space, and can be manufactured at low cost. Still another object of the present invention is to provide a charge-coupled device video microscope suitable for observation as a video image by incorporating a small-sized charge-coupled device camera into the main body of the microscope.

[0008]

[Means for Solving the Problems]

 In order to achieve the above object, a microscope according to the invention according to claim 1 includes a light receiving / emitting means provided with a through-hole containing a light source for illumination light and a light receiving hole for image light separated from each other; The thin plate-shaped mirror is provided with a thin plate-shaped mirror that is provided closely and tightly to the through hole and the light receiving hole, and a mirror surface formed at the tip of the thin plate-shaped mirror at an acute angle. The thin plate-shaped mirror guides the illumination light. Then, the image light reflected and emitted from the mirror surface, and the reflected image light is reflected by the mirror surface, guided and collected.

The invention according to claim 2 is characterized in that, in addition to the above configuration, the thin plate-shaped mirror is assembled with a thin plate-shaped mirror separately formed corresponding to the through hole and the light receiving hole. .

[0010] In the invention according to claim 3, the thin plate-shaped mirror has a half mirror from which illumination light enters the upper end surface and video light is emitted, and the thin plate-shaped mirror reflects the illumination light by the half mirror. It is characterized in that the video light that is guided and reflected by the mirror surface is emitted, and the reflected and returned image light is reflected by the mirror surface and guided and collected.

[0011] The invention according to claim 4 is a polarizing plate in which the thin plate-shaped mirror has a half mirror from which illumination light is incident on the upper end surface and video light is emitted, and the deflection angles of the through hole and the light receiving hole are different from each other. It is characterized by having.

According to a fifth aspect of the present invention, there is provided a device for receiving and emitting illumination light and image light, a thin plate-shaped mirror provided in the light receiving and emitting unit, and a mirror surface formed at an end of the thin plate-shaped mirror at an acute angle. The configuration was provided with. The invention according to claim 6 is characterized in that, in addition to the above configuration, the thin plate-shaped mirror is a separate type corresponding to the light receiving and emitting means. The invention according to claim 7 is characterized in that the thin plate-shaped mirror has a half mirror on the upper end surface. The invention according to claim 8 is characterized in that the thin plate-shaped mirror has a coating applied to a surface other than a portion where illumination light and image light enter and exit. Further, the invention according to claim 9 is characterized in that the light emitting / receiving means is provided with polarizing plates having different deflection angles from each other.

Here, in the microscope of the present invention, the thin plate-shaped mirror is preferably detachable from the handpiece. Further, the microscope of the present invention can be preferably configured as a charge coupled device type video microscope incorporating a small charge coupled device camera.

In the microscope of the present invention having such a configuration, the thin plate-like mirror confines the light, guides the illumination light and the image light, and reflects the light on the mirror surface, so that the light becomes diffused light. You can get light. Furthermore, since it is a thin plate-shaped mirror and has an acute angle mirror surface, it can be inspected perpendicularly to the non-inspection object, has a wide field of view, and can be observed horizontally even in a very narrow space. In particular, a clear video image of the object to be observed can be obtained by incorporating a small charge-coupled device camera into the microscope and taking a video image of the camera.

[0015]

[Embodiment of the invention]

 Hereinafter, the present invention will be described in detail based on a preferred embodiment shown in the drawings. The first embodiment of the present invention is configured as a charge-coupled device type video microscope in which a video image is obtained by incorporating a small-sized charge-coupled device camera into a microscope. It is of course possible to use a simple microscope for directly observing an object without incorporating a camera, and this example will be described later with reference to FIGS. 12 to 14 for convenience of explanation.

FIG. 1 is a schematic view of a charge-coupled device type video microscope according to a first embodiment of the present invention, in which (a) is a cross-sectional view and (b) is a partially transparent side view. In FIG. 1B, the black delrin and the lighting substrate are shown by oblique lines in order to clarify the space of the black delrin. Referring to FIGS. 1A and 1B, a charge-coupled device type video microscope 10 according to the first embodiment includes an optical system 14 in which a small-sized charge-coupled device (CCD) camera 11 and a lens 13 are appropriately combined. A focus adjusting mechanism 15 for adjusting the focus of the optical system; and a light source printed circuit board 18 having a hole 16 provided at a predetermined position with the optical axis aligned with the optical system and having mounted thereon, for example, a light emitting diode of an illumination light source 17. An example of the resin material 20 having the through holes 21 and 21 for illumination for inserting the light emitting diode of the illumination light source 17 mounted on the printed board and the light receiving hole 23 for video and having a slit 24 cut off. For example, the handpiece 12 includes a handheld type handpiece 12 having a built-in delrin and a plate-like mirror 28 attached to the resin material 20.

The resin material 20 is fitted from the cylindrical tip of the handpiece 12 in close contact with the light source printed circuit board 18 disposed inside the handpiece. In FIG. 1 (b), reference numeral 29 denotes a screw for tightening the resin material slit 24, and arrows indicate illumination light and light reception. The resin material 20, the through holes 21 and 21 and the light receiving hole 23 provided in the resin material, and the illumination light source 17 which is a light source of illumination light constitute light receiving / emitting means.

FIG. 2 is an external view of the resin material 20 and the plate-like mirror 28 according to the first embodiment. As shown in FIG. 2, the cylindrical resin material 20 has a slit 24 which is cut to a predetermined position and is approximately the width of a plate-shaped mirror 28, and a light receiving portion for image light provided on a cylindrical central axis. The hole 23 and the through-holes 21 and 21 for illumination provided at positions symmetrical with respect to the central axis penetrate to the slit 24. As shown in FIG. 2, a plate-like mirror 28 is inserted into the slit 24 until it comes into close contact with the through holes 21 and 21 and the light receiving hole 23, thereby sealing the through holes 21 and 21 and the light receiving hole 23. As shown in FIG. 1B, the resin material 20 is fixed to the handpiece 12 by clamping the plate-like mirror 28 by tightening the screw 24 with screws 29, 29.

Since the through hole for illumination and the through hole 23 for image light are separately provided up to just before the upper end surface of the plate-like mirror 28 inserted as described above, stray light is generated by the image light. Since the light does not enter the through hole 23 and is focused through the guide of the plate-like mirror 28, a clear image without flare can be obtained.

FIG. 3 is an external view of the plate-shaped mirror according to the first embodiment. The plate-like mirror 28 guides the light by confining the light. The plate-like mirror 28 has an upper end surface 31 from which the illumination light enters and the image light is emitted, and a mirror surface 32 from which the illumination light and the image light enter and exit and are reflected. Surface 32 is inclined at 45 degrees. In order to enhance the mirror effect and the light guiding effect, it is desirable to apply a light-shielding material, for example, a black paint, except for the region 33 and the upper end surface 31 where the illumination light is emitted and the image light is incident.

The plate-like mirror 28 may have a width of about 5 to 20 mm, a height of about 10 to 30 mm, and a thickness of about 2 mm, and may be appropriately increased or decreased according to the degree of brightness of the video image. Is also possible. In FIG. 3, reference numeral 34 denotes illumination light from, for example, a light emitting diode of the illumination light source 17, and reference numeral 35 denotes reflected light from a non-inspection object, that is, image light.

Next, a separate plate mirror of the plate mirror according to the first embodiment will be described. FIG. 4 is an external view of a first plate-shaped mirror of a separate type. The first plate-shaped mirror 40 is composed of illumination light guide mirrors 41, 41 and an image light guide mirror 43, and these three guide mirrors are inserted together and sandwiched in the above-mentioned three-way slit of the resin material 20. Other configurations are the same as those of the above-described plate-like mirror 28. In addition, the illumination light guide mirror 41 and the image light guide mirror 43 may be used by being superimposed and assembled independently, or may be integrated by bonding. In the first plate-shaped mirror 40, the paths of the illumination light 34, 34 and the image light 35 are independent and do not interfere with each other. In the drawing, reference numeral 17 denotes an illumination light source, and reference numeral 44 denotes a small-sized charge-coupled device.

FIG. 5 is an external view showing a second plate-like mirror of a separate type. The second plate-like mirror 50 shown in FIG. 5 is different from the first plate-like mirror 40 shown in FIG. 4 in that the other illumination light guide mirror 41 is not provided. Same as mirror. As the resin material used in the case of the plate-like mirror described above, the resin material shown in FIG. 2 can be used, and in the case of the second plate-like mirror 50, the other through-holes for illumination may be closed. .

In the case of the separate type shown in FIGS. 4 and 5, an illumination light guide mirror and an image light guide mirror having various mirror angles can be manufactured and appropriately selected and attached so that the inspection object can be illuminated well. be able to.

FIGS. 6A and 6B are views showing a plate mirror according to the second embodiment, wherein FIG. 6A is an external view of the plate mirror, and FIG. 6B is a schematic diagram. FIG. 7 is an external view of a resin material according to the second embodiment. The second embodiment differs from the first embodiment only in the shape of the plate-like mirror, the irradiation direction of the illumination light, and the shape of the resin material. As shown in FIG. 6 (a), the plate-shaped mirror 60 according to the second embodiment confines the light and guides the light. It has a cut half mirror 62 and a mirror surface 63 on which illumination light and image light enter and exit and are reflected, and the mirror surface 63 is inclined at 45 degrees.

As shown in FIG. 6B, the illumination light 34 emitted from the illumination light source 17 is incident on the plate-like mirror 60 and is reflected by the half mirror 62 on the upper end surface so that the plate-like mirror converts the illumination light. Then, the light is reflected again by the mirror surface 63 and emitted. The illumination light 34 is reflected by the object 64 to become image light 35 and is incident on the plate-like mirror 60, and is reflected by the mirror surface 63. The plate-like mirror guides the image light and emits the light by the half mirror 62, and reaches the small charge-coupled device 44 to be a video image. As described above, the plate-shaped mirror according to the second embodiment basically uses the same passage for the illumination light and the image light.

As shown in FIG. 7, the resin material 70 according to the second embodiment is cylindrical and has a through hole 71 for image light provided on the center axis, and a through hole 71 provided from the side to the through hole 71. It has a horizontal hole 72 for illumination, a vertical groove 73 for an electric wire connected to a light source for illumination fitted in the horizontal hole 72, and a slit 74. Although FIG. 7 shows a state in which the plate-shaped mirror 60 according to the second embodiment is fitted, a mirror having various angles of the mirror surface can be easily mounted.

FIG. 8 is a schematic diagram showing a modification of the second embodiment. In the modification shown in FIG. 8, polarizing plates 81 and 82 are arranged on the illumination side and the image side of the plate-shaped mirror 60 of the second embodiment so as to be perpendicular to the optical axis. The polarization direction of the polarizing plate 81 is orthogonal to that of the polarizing plate 82. Therefore, for example, glare reflected light from a BGA solder ball can be removed.

Next, the operation and usage of the first and second embodiments will be described. FIG. 9 is a schematic diagram showing a use form of the charge-coupled device type video microscope of the present invention. For example, when inspecting the solder state of the solder balls 4 of the BGA 3, the plate mirror 92 of the charge-coupled device type video microscope 90 is set up vertically on the substrate 2 as shown in FIG. At this time, since the mirror surface 93 of the plate-like mirror 92 has an acute angle, and the plate-like mirror 92 is vertically irradiated with the illumination light, it is possible to illuminate the entire lower end of the solder ball 4 of about several hundred microns.

Since the illumination light is diffused light guided by the plate-like mirror 92, the image light from the solder balls 4 is light without flare, and a clear image can be obtained. Further, as shown in FIG. 10, since the plate-like mirror 92 itself is small and can be inspected vertically, it is possible to inspect a non-inspection object 95 which is extremely narrow.

Further, as shown in FIGS. 11 (a) and 11 (b), the charge coupling of the present invention can be performed without the skin such as the human body, the cumulus and the sebaceous glands being slanted as in a conventional video microscope. Since the inspection can be performed with the device type video microscope set vertically, oblique images can be easily viewed. As shown by the arrow in FIG. 11B, various parts can be easily viewed by tilting the charge-coupled device type video microscope of the present invention.

FIG. 12 to FIG. 14 relate to a third embodiment of the present invention, and show an example of a simple-structured microscope so that an object can be directly observed without incorporating a charge-coupled device camera. Is shown. Unlike the charge-coupled device type video microscope 10 of the first embodiment, the microscope 110 does not include the small-sized charge-coupled device (CCD) camera 11, and therefore, as shown in FIG. There is no portion corresponding to the base end on the connection terminal side. That is, the elements incorporated in the handpiece 112 include an optical system 114 in which a plurality of lenses 113 are appropriately combined, a focus adjustment mechanism 115 for adjusting the focus of the optical system 114, and an optical axis aligned with the optical system. A light source printed circuit board 118 having a hole 116 provided at a predetermined position and having an illumination light source 117 mounted thereon, an illumination through-hole 121 for inserting the illumination light source 117 mounted on the printed circuit board, and an image. For example, Delrin, which is a resin material 120 having a light receiving hole 123 for cutting and having a slit 124, and a plate-like mirror 128 attached to the resin material 120, and a base end portion is connected to a video terminal portion. Thus, the eyepiece section 100 having the eyepiece lens is formed without using the eyepiece.

As shown in FIG. 13, the focus adjusting mechanism 115 for adjusting the focus of the optical system 114 is, for example, inserted into a pin 112 or a pin 101 through a slit 112 a provided on the upper and lower sides of the handpiece 112, and passes through the optical system 114. Is fixed to the focus adjustment mechanism 115 with the attached, and the pin or knob 101 is moved up and down along the slit 112a, so that the focus can be freely adjusted. Alternatively, as shown in FIG. 14, an obliquely curved slit 112a 'is formed in the handpiece 112, and a slit 115a is formed in the focus adjustment mechanism 115 in the vertical direction, and a pin or a pin is formed from these slits 112a', 115a. The focus may be adjusted by inserting the knob 101 to be fixed to the optical system 114 and moving the pin or knob 101 up and down along the slits 112a 'and 115a to rotate the optical system 114. It is needless to say that such a focus adjustment mechanism can also be applied to the charge-coupled device type video microscope 10 of the first embodiment described above.

The specific numerical examples or fields of use described in the above embodiments do not limit the scope of the present invention, and can be appropriately changed as needed. Here, the deflecting plates provided on the illumination side and the image side in the second embodiment can be used in the first and third embodiments. In addition, a transparent material such as glass or acrylic can be used as appropriate for the plate-like mirror. In the case of the separate plate-like mirror shown in FIGS. 4 and 5, mirrors having different refractive indices can be combined. Of course.

[0035]

[Effect of the invention]

 As can be understood from the above description, both the charge-coupled device type video microscope of the present invention and the simple type microscope that does not connect to a video have a wide field of view and can perform lateral observation even in an extremely narrow space. Inexpensive microscope can be provided.

[Brief description of the drawings]

FIG. 1 is a schematic view of a charge-coupled device type video microscope according to a first embodiment of the present invention, wherein FIG.
(B) is a partial side perspective view.

FIG. 2 is an external view of a resin material and a plate-shaped mirror according to the first embodiment.

FIG. 3 is an external view of a plate-shaped mirror according to the first embodiment.

FIG. 4 is an external view of a separate first plate-shaped mirror according to the first embodiment.

FIG. 5 is an external view showing a separate plate-shaped second plate-shaped mirror according to the first embodiment.

6A and 6B are views showing a plate mirror according to a second embodiment of the present invention, wherein FIG. 6A is an external view of the plate mirror, and FIG. 6B is a schematic diagram.

FIG. 7 is an external view of a resin material according to a second embodiment.

FIG. 8 is a schematic diagram showing a modification of the second embodiment.

FIG. 9 is a schematic diagram showing a use form of the charge-coupled device type video microscope of the present invention.

FIG. 10 is a diagram showing a use example in which the charge-coupled device type video microscope of the present invention is applied to a hole-shaped non-inspection object.

FIGS. 11A and 11B are schematic views showing a use form of the charge-coupled device type video microscope of the present invention, wherein FIG. 11A is an example for examining human skin and FIG. 11B is a schematic view showing an examination form.

FIG. 12 is a schematic view of a microscope (simplified type without mounting a small-sized charge-coupled device camera) according to a third embodiment of the present invention, where (a) is a cross-sectional view and (b) is a partial side perspective view. is there.

FIG. 13 is an exploded perspective view showing an example of the focus adjusting mechanism of the microscope of the present invention.

FIG. 14 is an exploded perspective view showing another example of the focus adjusting mechanism of the microscope of the present invention.

15A and 15B are schematic diagrams for observing a solder state of a BGA in a conventional example, wherein FIG. 15A is an example diagram of observation using a mirror, and FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Mirror 2 Substrate 3 BGA 4 Solder ball 7 Prism 10 Charge coupled device type video microscope 11 Small charge coupled device camera 13 Lens 14 Optical system 15 Focus adjustment mechanism 16 Hole 17 Lighting light source 18 Light source printed circuit board 20 Resin material 21 Lighting Through hole 23 for image 23 Light receiving hole for image 24 Swarri 28 Plate mirror 29 Screw 31 Upper end surface 32 Mirror surface 33 Incident area 34 Illumination light 35 Image light 41 Illumination light guide mirror 43 Image light guide mirror 62 Half mirror 81, 82 Polarizer 100 Simple microscope

Claims (11)

[Utility model registration claims] 1. A light emitting / receiving means provided with a through hole containing a light source for illumination light and a light receiving hole for image light separated from each other, and a through hole and a light receiving hole of the light receiving / emitting means being tightly and hermetically sealed. A thin plate-shaped mirror provided, and a mirror surface formed at an end of the thin plate-shaped mirror at an acute angle. The thin plate-shaped mirror guides illumination light, reflects the light on the mirror surface, emits the light, and reflects the light. A microscope that reflects the image light returned by the mirror surface and guides and condenses it. 2. A light emitting / receiving means provided with a through hole containing a light source of illumination light and a light receiving hole for image light separated from each other, and a through hole and a light receiving hole of the light receiving / emitting means being tightly and hermetically sealed. A thin plate-shaped mirror provided, and a mirror surface formed at an end of the thin plate-shaped mirror at an acute angle, wherein the thin plate-shaped mirror is formed separately corresponding to the through hole and the light receiving hole. The thin plate-shaped mirror guides the illumination light, reflects the light from the mirror surface, emits the reflected light, and reflects the reflected image light back on the mirror surface to guide the illumination light. Microscope for focusing. 3. A light emitting / receiving means provided with a through hole containing a light source for illumination light and a light receiving hole for image light separated from each other, and tightly and hermetically sealed with respect to the through hole and the light receiving hole of the light receiving / emitting means. A thin plate-shaped mirror provided, and a mirror surface formed at an end of the thin plate-shaped mirror at an acute angle, wherein the thin plate-shaped mirror makes the illumination light incident on an upper end surface and emits the image light. The thin plate-shaped mirror has a half-mirror, and the thin plate-shaped mirror reflects and guides the illumination light with the half mirror, reflects and emits the light with the mirror surface, and reflects the reflected image light with the mirror surface. A microscope that guides and focuses light. 4. A light emitting and receiving means provided with a through hole containing a light source for illumination light and a light receiving hole for image light separated from each other, and a through hole and a light receiving hole of the light receiving and emitting means which are tightly and hermetically sealed. A thin plate-shaped mirror provided, and a mirror surface formed at an end of the thin plate-shaped mirror at an acute angle, wherein the thin plate-shaped mirror makes the illumination light incident on an upper end surface and emits the image light. Has a half mirror,
The through-hole and the light-receiving hole have polarizing plates having different deflection angles from each other, and the illumination light deflected by the thin plate-shaped mirror is reflected and guided by the half mirror, reflected by the mirror surface, and emitted. ,
A microscope in which the reflected image light is reflected, guided, deflected, and condensed by the mirror surface. 5. A microscope comprising: means for receiving and emitting illumination light and image light; a thin plate-shaped mirror provided in the light receiving and emitting means; and a mirror surface formed at the tip of the thin plate-shaped mirror at an acute angle. . 6. A light receiving and emitting means for illuminating light and image light, a thin plate-like mirror provided on the light receiving and emitting means, and a mirror surface formed at an end of the thin plate-like mirror at an acute angle. A microscope in which a plate-like mirror is a separate type corresponding to light receiving and emitting means. 7. A light receiving and emitting means for illuminating light and image light, a thin plate-like mirror provided on the light receiving and emitting means, and a mirror surface formed at an end of the thin plate-like mirror at an acute angle. A microscope in which a plate mirror has a half mirror on the upper end surface. 8. The microscope according to claim 1, wherein the thin plate-shaped mirror has a coating applied to a surface other than a portion where the illumination light and the image light enter and exit. . 9. The apparatus according to claim 1, wherein said light emitting and receiving means includes polarizing plates having different deflection angles from each other.
The microscope according to any one of claims 1 to 8, wherein 10. The thin plate-shaped mirror is detachable from a handpiece.
10. The microscope according to any one of 9 above. 11. The microscope according to claim 1, wherein the microscope is a charge-coupled device type video microscope incorporating a small-sized charge-coupled device camera.