JP3059348U - Temperature control device of UV lamp in UV irradiation device - Google Patents

Abstract

(57) [Summary] (with correction) [PROBLEMS] To provide a UV irradiation apparatus capable of performing highly accurate temperature adjustment. SOLUTION: An ultraviolet lamp is provided in a UV irradiation apparatus configured to generate ozone in a room by ultraviolet irradiation of an ultraviolet lamp 3 and to clean or modify a work surface by a reaction between oxygen (O) in a nascent stage and an organic substance. A cooling water passage 9 is provided in a mounting base 8 in which
One end of the mounting base 8 flows into the mounting base 8, is folded at the opposite side, and has a water channel shape that reciprocates at least inside the mounting base 8. In a UV irradiation apparatus provided with an electromagnetic valve 11 for switching and controlling the supply and cutoff of water in accordance with the temperature, and a flow meter 14 or an adjustment valve 14 which functions as a throttle valve by reducing the water pressure and adjusting the amount of water. UV lamp temperature controller.

Description

[Detailed description of the invention]

[0001]

[Technical field to which the invention belongs]

 The present invention relates to a temperature control device for an ultraviolet lamp in a UV irradiation device for cleaning or modifying a substrate such as a liquid crystal, a color filter, and a PDP.

[0002]

[Problems to be solved by conventional techniques and devices]

 For electronic equipment parts and the like, a very high degree of cleaning is required. The dirt can be roughly classified into inorganic substances such as dust and chips, and organic substances such as cutting oil, flux and fingerprints. These inorganic dirt can be removed mainly by washing with water. Since it cannot be completely removed by water cleaning, precision cleaning by UV cleaning is performed after cleaning with water, a solvent, etc. in advance.

[0003] That is, a UV irradiator for performing the ultraviolet cleaning (in this case, generally referred to as a UV cleaning apparatus for the purpose of cleaning) is disposed on, for example, a production line to perform precision cleaning.

In such a conventional UV cleaning apparatus, for example, as shown in FIGS. 1 and 2, an object 1 to be cleaned 1 (for example, a substrate such as a color filter) is transferred from an entrance 4 to an ultraviolet lamp 3. A plurality of substrates are carried into the UV cleaning chambers 2 arranged side by side, and after the cleaning, are carried out from the outlet 5 on the opposite side. The substrate 1 to be cleaned is sequentially fed by the transport mechanism to perform ultraviolet cleaning. .

[0005] In brief, this ultraviolet cleaning is performed by breaking the molecular chains of organic substances by the ultraviolet (UV) irradiation of the ultraviolet lamp 3, and then into the cleaning chamber 2 by the ultraviolet (UV) irradiation of the ultraviolet lamp 3. Ozone is generated, and the surface organic matter of the article to be cleaned 1 is washed by evaporating and evaporating it by the reaction between oxygen (O) and the organic matter in the stage of generation, which has a strong oxidizing power in the decomposition / generation reaction process of ozone, and is a dry type. It is also called washing.

On the other hand, such an ultraviolet lamp has a configuration in which a large number of the ultraviolet lamps are protruded from the mounting base in a juxtaposed state, and as shown in FIG. Strengthen.

[0007] Therefore, it is necessary to provide a temperature controller for the ultraviolet lamp and adjust the temperature of the mounting base so that the irradiation intensity is always high.

However, in the conventional temperature control device, generally, a cooling water channel is simply provided in the mounting base, and a supply / interruption of the cooling water is provided in a conduit for introducing the cooling water into the cooling water channel by a temperature sensor provided in the mounting base. An electromagnetic valve for switching control is provided. Therefore, when the base temperature rises above a predetermined temperature, the solenoid valve is opened to conduct water, and when the base temperature falls below the predetermined temperature, the solenoid valve is closed and cooling is stopped.When the water pressure is high or the flow rate is large, the mounting base is It is not a sufficient structure in that it causes a sudden temperature change and makes the mounting base uniform and keeps it at a predetermined temperature.

That is, since the water pressure is not reduced and the flow rate cannot be adjusted, the mounting base is often rapidly cooled, so that there is a problem that the temperature cannot be uniformly adjusted to an appropriate temperature. Was.

[0010] Further, simply providing the inlet for the cooling water channel at one end of the mounting base, providing the outlet at the opposite side, and allowing the cooling water to pass from one end to the opposite side, would be opposite to the one end. The temperature difference is large on the side, and the temperature of the mounting base cannot be adjusted uniformly.

That is, the present invention finds such a problem in the conventional temperature control structure and solves the problem. In particular, as shown in FIG. 5, a mounting base in which a number of ultraviolet lamps are juxtaposed is used. In the configuration of the UV lamp temperature control device in a UV irradiation device that needs to be uniform and accurately controlled, the temperature of the mounting base can be made uniform and highly accurate compared to the conventional example by simple improvement. It is an object of the present invention to provide a temperature control device for an ultraviolet lamp in an epoch-making UV irradiation device capable of maintaining each ultraviolet lamp at a high irradiation intensity.

[0012]

[Means for Solving the Problems]

 The gist of the present invention will be described with reference to the accompanying drawings.

An ultraviolet lamp 3 is provided in a room 2 into which the work 1 is carried in, and the ultraviolet light (UV) irradiation of the ultraviolet lamp 3 divides a molecular chain of an organic substance. Ozone is generated in the chamber 2, and the surface or the surface of the work 1 is washed or modified by a reaction between oxygen (O) and an organic substance in a generation stage having a strong oxidizing power in the decomposition / generation reaction process of the ozone. In the temperature control device for an ultraviolet lamp in the UV irradiation device thus configured, a cooling water passage 9 is provided in a mounting base 8 in which the ultraviolet lamps 3 protrude in a juxtaposed state, and the cooling water passage 9 is connected to one end of the mounting base 8. The cooling water is supplied to the cooling water passage 9 by flowing into the mounting base 8 from the side and turning back on the opposite side to make at least one reciprocation in the mounting base 8. The pipe section 10 is provided with an electromagnetic valve 11 for switching and controlling the supply and cutoff of the cooling water in accordance with the temperature, and a flow meter 14 or an adjustment valve 14 which performs a function as a throttle valve by reducing the water pressure and adjusting the amount of water. The present invention relates to a temperature adjusting device for an ultraviolet lamp in a UV irradiation device, which is provided.

Further, the inlet 15 and the outlet 16 of the cooling water passage 9 are juxtaposed at one end of the mounting base 8 so that the shape of the water passage of the mounting base 8 extends from the inlet 15 at one end to the opposite side. The UV lamp according to claim 1, wherein the UV lamp has a U-turn shape which returns to the outlet 16 on one end side.

[0015]

[Embodiment of the invention]

 Preferred embodiments of the present invention (how to implement the present invention), which is considered to be preferable, will be briefly described with reference to the drawings, showing the operational effects thereof.

When the temperature rises above a predetermined temperature, the solenoid valve 11 opens for cooling, cooling water is supplied from the conduit section 10 to the cooling water passage 9 in the mounting base 8, and conversely, when the temperature falls below the predetermined temperature. The solenoid valve 11 closes and shuts off the introduction of cooling water.

At this time, the present invention is not limited to the electromagnetic valve 11 for controlling the supply and cutoff of the conduit section 10, but also for the flow meter 14 or the regulator for reducing the water pressure and adjusting the amount of water to function as a throttle valve. Since the valve 14 is provided, the water pressure is reduced to an appropriate predetermined water pressure by the flow meter 14 or the adjustment valve 14 and the water amount is adjusted to the predetermined amount. A large amount of cooling water does not flow in, and an appropriate amount of cooling water can be flowed in and supplied at an appropriate water pressure.

Therefore, it is possible to suppress rapid cooling of a part of the mounting base as in the above-described conventional example, so that the mounting base 8 can be made uniform and accurately cooled to a predetermined temperature.

Moreover, in the present invention, the cooling water passage 9 is not a simple passage of the cooling water from one end side to the opposite side of the mounting base 8 but a U-turn water passage which makes at least one reciprocation. It is unlikely that the cooling with the opposite side is offset, and the mounting base 8 can be cooled uniformly in this point as well.

Therefore, together with the above-mentioned functions and effects, a large number of ultraviolet lamps 3 protruding from the mounting base 8 can be cooled to a predetermined temperature, respectively, and the irradiation intensity of the ultraviolet lamp 3 can be improved.

[0021]

【Example】

 A specific embodiment of the present invention will be described with reference to the drawings.

In this embodiment, as shown in FIGS. 1 and 2, the present invention is applied to a UV cleaning apparatus used for performing a surface dry cleaning by irradiating ultraviolet rays. A large number of thin plates (as objects to be cleaned 1) are provided at both ends of the cleaning chamber 2 formed by closing the opening / closing lid 13 by protruding the lamps 3 from the mounting base 8 and juxtaposing them. A carry-in port 4 and a carry-out port 5 are provided on a roller 12 having a large number of rollers 1 arranged side by side and fed and transported, and the washing chamber 2 is configured in a sealed state while leaving the carry-in port 4 and the carry-out port 5. doing.

The exterior chambers 6 covering the carry-in port 4 and the carry-out port 5 are respectively provided in a continuous state along the transport direction, and the exterior chamber 6 is provided with a carry-in port 4A and a carry-out port 5A, respectively. Is carried in through the carry-in port 4A, the exterior chamber 6, and the carry-in port 4 sequentially, and is carried out after the ultraviolet cleaning, and is carried out. It is configured so as to be sequentially passed through the carry-out port 5A and carried out, and so to speak, an exterior chamber 6 is further provided as an auxiliary chamber outside each of the carry-in port 4 and the carry-out port 5 of the cleaning chamber 2, so-called as a whole. It has a double-chamber structure.

With such a double-chamber structure, the cleaning chamber 2 is not strongly exhausted directly from the cleaning chamber 2 for fear of a large amount of leakage directly from the loading / unloading ports 4 and 5 to the outside. The chamber 2 is configured to be sufficiently filled with an ozone atmosphere, and an exhaust unit 7 is provided in the exterior chamber 6 so as to exhaust the ozone atmosphere that always leaks into the exterior chamber 6 from the carry-in port 4 and the carry-out port 5 of the cleaning chamber 2. The ozone concentration in the cleaning chamber 2 can be increased.

In the present embodiment, in such a UV cleaning irradiation apparatus, a cooling water passage 9 is provided in a laterally long mounting base 8 projecting the ultraviolet lamps 3 in a juxtaposed state, and the cooling water passage 9 is cooled. A solenoid valve 11 for switching and controlling the supply and shutoff of cooling water by a temperature control controller 18 operated by a sensor (thermistor) 17 provided on the mounting base 8 is provided in the conduit section 10 for supplying water, and the water pressure is controlled. A flow meter 14 (adjustment valve 14) that performs pressure reduction and water volume adjustment and functions as a throttle valve is provided.

The cooling water passage 9 is formed into a water passage shape that flows into the mounting base 8 from one end side of the mounting base 8, is turned on the opposite side, and at least makes one round trip in the mounting base 8. The inlet 15 and the outlet 16 of the cooling water passage 9 are juxtaposed at one end of the mounting base 8 so that the shape of the water passage of the mounting base 8 extends from the inlet 15 at one end to the opposite side, and a U-turn is formed. Then, it has a U-turn shape that returns to the outlet 16 on one end side and makes one round trip.

The flow meter 14 of the present embodiment has a function of reducing the water pressure and a function of adjusting the amount of water, and has a function as a throttle valve. In the present embodiment, the valve is provided separately from the solenoid valve 11. By turning the knob 14F, the needle 14B protruding from the water outlet 14A is advanced and retracted so that the water amount (flow rate) can be adjusted. The downstream side of the outlet 14A is widened to reduce the pressure to an appropriate constant water pressure, and a float 14D is provided in the widened pipe 14C to know the degree of water flow, and the position of the float 14D is widened. The amount of water is read by a scale 14E provided on the pipe 14C having a predetermined shape so that the adjustment can be appropriately performed.

[0028]

[Effect of the invention]

 Since the present invention is configured as described above, an appropriate amount of water can be supplied and supplied at an appropriate water pressure, so that a portion of the mounting base can be prevented from being rapidly cooled as in the conventional example, and the mounting base can be made uniform. The cooling water channel is a U-turn water channel that makes at least one reciprocation rather than merely passing the cooling water from one end to the other end. The cooling between the side and the opposite side is less likely to be offset, so that the mounting base can be cooled very uniformly as compared with the conventional example, and therefore, the plurality of ultraviolet lamps protruding from the mounting base can be cooled to a predetermined temperature, respectively. In addition, it becomes a temperature control device of an ultraviolet lamp in a UV irradiation device that improves the irradiation intensity of the ultraviolet lamp.

In the invention according to the second aspect, a temperature adjusting device for an ultraviolet lamp in an extremely practical UV irradiation device in which the above-described functions and effects are more reliably exhibited.

[Brief description of the drawings]

FIG. 1 is a schematic configuration perspective view of a UV irradiation apparatus according to the present embodiment.

FIG. 2 is an enlarged explanatory sectional view of a main part of the UV irradiation apparatus according to the embodiment.

FIG. 3 is an explanatory diagram of a schematic configuration of a main part of the present embodiment.

FIG. 4 is an explanatory diagram of a flow meter part of the present embodiment.

FIG. 5 is a graph showing irradiation intensity of an ultraviolet lamp with respect to a mounting base temperature of a UV irradiation device.

[Explanation of symbols]

 1 Workpiece (substrate to be cleaned, substrate) 2 Room (washing chamber) 3 Ultraviolet lamp 8 Mounting base 9 Cooling channel 10 Conduit section 11 Solenoid valve 14 Flow meter (adjustment valve) 15 Inlet 16 Outlet

Claims (2)

[Utility model registration claims] An ultraviolet lamp is provided in a room into which a work is carried, and an ultraviolet (UV) irradiation of the ultraviolet lamp breaks a molecular chain of an organic substance. In cleaning, ozone is introduced into the room by irradiation of the ultraviolet lamp with the ultraviolet lamp. Of the UV lamp in the UV irradiation apparatus configured to clean or modify the surface of the work by the reaction between oxygen (O), which is a oxidizing power in the process of decomposition and generation of ozone, and an organic substance during the ozone decomposition / generation reaction process. In the temperature control device, a cooling water passage is provided in a mounting base that protrudes the ultraviolet lamps in a juxtaposed state, and the cooling water passage flows into the mounting base from one end of the mounting base and is folded back on the opposite side to at least. It is configured in a water channel shape that makes one round trip inside the mounting base, and the cooling water supply / cutoff is set to the temperature in the conduit that supplies cooling water to this cooling water channel. A temperature control device for an ultraviolet lamp in a UV irradiation device, comprising: an electromagnetic valve for performing switching control correspondingly; and a flow meter or an adjustment valve that functions as a throttle valve by reducing and adjusting the water pressure. . 2. An inlet and an outlet of the cooling water passage are arranged side by side at one end of the mounting base, and the shape of the water passage of the mounting base is extended from the inlet at one end to the opposite side. 2. A temperature adjusting device for an ultraviolet lamp in a UV irradiation device according to claim 1, wherein the device has a U-turn shape returning to a side outlet.