JP3059348U - Temperature control device of UV lamp in UV irradiation device - Google Patents
Temperature control device of UV lamp in UV irradiation deviceInfo
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- JP3059348U JP3059348U JP1998009293U JP929398U JP3059348U JP 3059348 U JP3059348 U JP 3059348U JP 1998009293 U JP1998009293 U JP 1998009293U JP 929398 U JP929398 U JP 929398U JP 3059348 U JP3059348 U JP 3059348U
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- mounting base
- cooling water
- ultraviolet lamp
- irradiation
- ultraviolet
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Abstract
(57)【要約】 (修正有)
【課題】 精度の高い温度調整ができる、UV照射装置
を提供する。
【解決手段】 紫外線ランプ3の紫外線照射によって室
内にオゾンを発生させ、発生期の酸素(O)と有機物と
の反応によりワーク表面の洗浄あるいは改質を行うよう
に構成したUV照射装置において紫外線ランプ3を並設
状態に突設する取付ベース8内に冷却用水路9を設け、
取付ベース8の一端側から取付ベース8内に流入され反
対側で折り返されて少なくとも取付ベース8内を一往復
する水路形状に構成し、冷却用水路9へ冷却用水を供給
する導管部10に、冷却用水の供給・遮断を温度に対応し
て切り替え制御する電磁弁11を設けると共に、水圧の減
圧並びに水量調整を行い絞り弁としての機能を果たす流
量計14若しくは調整バルブ14を設けたUV照射装置にお
ける紫外線ランプの温度調整装置。
(57) [Summary] (with correction) [PROBLEMS] To provide a UV irradiation apparatus capable of performing highly accurate temperature adjustment. SOLUTION: An ultraviolet lamp is provided in a UV irradiation apparatus configured to generate ozone in a room by ultraviolet irradiation of an ultraviolet lamp 3 and to clean or modify a work surface by a reaction between oxygen (O) in a nascent stage and an organic substance. A cooling water passage 9 is provided in a mounting base 8 in which
One end of the mounting base 8 flows into the mounting base 8, is folded at the opposite side, and has a water channel shape that reciprocates at least inside the mounting base 8. In a UV irradiation apparatus provided with an electromagnetic valve 11 for switching and controlling the supply and cutoff of water in accordance with the temperature, and a flow meter 14 or an adjustment valve 14 which functions as a throttle valve by reducing the water pressure and adjusting the amount of water. UV lamp temperature controller.
Description
【0001】[0001]
本考案は、例えば液晶,カラーフィルタ,PDPなどの基板を洗浄あるいは改 質するUV照射装置における紫外線ランプの温度調整装置に関するものである。 The present invention relates to a temperature control device for an ultraviolet lamp in a UV irradiation device for cleaning or modifying a substrate such as a liquid crystal, a color filter, and a PDP.
【0002】[0002]
電子機器部品などでは非常に高い洗浄度が要求されている。汚れを大別すると 塵,切粉などの無機質と、切削油,フラックス,指紋などの有機質とに分けられ 、この無機質の汚れは、主に水洗浄によって取り除くことができるが、有機質の 汚れは、水洗浄では完全に取り除けないため、水,溶剤などで事前に洗浄してか ら紫外線洗浄による精密洗浄が行われている。 For electronic equipment parts and the like, a very high degree of cleaning is required. The dirt can be roughly classified into inorganic substances such as dust and chips, and organic substances such as cutting oil, flux and fingerprints. These inorganic dirt can be removed mainly by washing with water. Since it cannot be completely removed by water cleaning, precision cleaning by UV cleaning is performed after cleaning with water, a solvent, etc. in advance.
【0003】 即ち、この紫外線洗浄を行うUV照射装置(この場合は洗浄を目的としている ため一般にUV洗浄装置という)を、例えば製作ラインに配置し、精密洗浄を行 っている。[0003] That is, a UV irradiator for performing the ultraviolet cleaning (in this case, generally referred to as a UV cleaning apparatus for the purpose of cleaning) is disposed on, for example, a production line to perform precision cleaning.
【0004】 従来のこのようなUV洗浄装置は、例えば図1,図2に示すように、ワーク1 である被洗浄物1(例えばカラーフィルタなどの基板)を搬入口4から紫外線ラ ンプ3を複数並設したUV洗浄室2内に搬入し、洗浄後反対側の搬出口5より搬 出する構成で、順次搬送機構により被洗浄物たる基板1を送り込み紫外線洗浄す るように構成している。In such a conventional UV cleaning apparatus, for example, as shown in FIGS. 1 and 2, an object 1 to be cleaned 1 (for example, a substrate such as a color filter) is transferred from an entrance 4 to an ultraviolet lamp 3. A plurality of substrates are carried into the UV cleaning chambers 2 arranged side by side, and after the cleaning, are carried out from the outlet 5 on the opposite side. The substrate 1 to be cleaned is sequentially fed by the transport mechanism to perform ultraviolet cleaning. .
【0005】 この紫外線洗浄は、簡単に説明すると、この紫外線ランプ3の紫外線(UV) 照射によって有機物の分子鎖を分断し、ついでこの紫外線ランプ3の紫外線(U V)照射によって洗浄室2内にオゾンを発生させ、このオゾンの分解・生成反応 過程の酸化力の強い発生期の酸素(O)と有機物との反応により被洗浄物1の表 面有機物を蒸発気化させて洗浄するもので、乾式洗浄とも称されている。[0005] In brief, this ultraviolet cleaning is performed by breaking the molecular chains of organic substances by the ultraviolet (UV) irradiation of the ultraviolet lamp 3, and then into the cleaning chamber 2 by the ultraviolet (UV) irradiation of the ultraviolet lamp 3. Ozone is generated, and the surface organic matter of the article to be cleaned 1 is washed by evaporating and evaporating it by the reaction between oxygen (O) and the organic matter in the stage of generation, which has a strong oxidizing power in the decomposition / generation reaction process of ozone, and is a dry type. It is also called washing.
【0006】 一方、このような紫外線ランプは、取付ベースに多数本並設状態に突設する構 成としているが、図5に示すようにこの取付ベースの温度によって紫外線ランプ から発する紫外線の照度が強弱する。On the other hand, such an ultraviolet lamp has a configuration in which a large number of the ultraviolet lamps are protruded from the mounting base in a juxtaposed state, and as shown in FIG. Strengthen.
【0007】 従って、この紫外線ランプに温調装置を設けて常に高い照射強度となるように 取付ベースの温度調整を行う必要がある。[0007] Therefore, it is necessary to provide a temperature controller for the ultraviolet lamp and adjust the temperature of the mounting base so that the irradiation intensity is always high.
【0008】 しかしながら、従来の温度調整装置は、一般に単に取付ベースに冷却用水路を 設け、この冷却用水路に冷却用水を導入する導管部に、取付ベースに設けた温度 センサーによって冷却用水の供給・遮断を切り替え制御するための電磁弁を設け た構成としている。従って、単に所定温度よりベース温度が上がると電磁弁を開 いて導水し、所定温度より下がると電磁弁を閉じて冷却停止するだけであり、水 圧が高かったり、流量が多いと、取付ベースに急激な温度変化をもたらし、取付 ベースを均一にして所定温度に保持する点において十分な構造とはいえない。However, in the conventional temperature control device, generally, a cooling water channel is simply provided in the mounting base, and a supply / interruption of the cooling water is provided in a conduit for introducing the cooling water into the cooling water channel by a temperature sensor provided in the mounting base. An electromagnetic valve for switching control is provided. Therefore, when the base temperature rises above a predetermined temperature, the solenoid valve is opened to conduct water, and when the base temperature falls below the predetermined temperature, the solenoid valve is closed and cooling is stopped.When the water pressure is high or the flow rate is large, the mounting base is It is not a sufficient structure in that it causes a sudden temperature change and makes the mounting base uniform and keeps it at a predetermined temperature.
【0009】 即ち、水圧が減圧されておらず、しかも流量調整ができない構成であるため、 取付ベースを急激に冷却することとなる場合が多く、そのため、均一に適正温度 に温調できない問題があった。That is, since the water pressure is not reduced and the flow rate cannot be adjusted, the mounting base is often rapidly cooled, so that there is a problem that the temperature cannot be uniformly adjusted to an appropriate temperature. Was.
【0010】 また、単に取付ベースの一端側に冷却用水路の導入口を設け、反対側に導出口 を設け、一端側から反対側へと冷却用水を通過させる構成としたのでは、一端側 と反対側で温度差が大きくなり、取付ベースを均一に温度調整できない。[0010] Further, simply providing the inlet for the cooling water channel at one end of the mounting base, providing the outlet at the opposite side, and allowing the cooling water to pass from one end to the opposite side, would be opposite to the one end. The temperature difference is large on the side, and the temperature of the mounting base cannot be adjusted uniformly.
【0011】 即ち、本考案は、従来の温度調整構造にこのような問題点を見い出し、これを 解決するもので、特に図5に示すように多数の紫外線ランプが並設している取付 ベースを均一にして精度良く温調する必要のあるUV照射装置における紫外線ラ ンプの温度調整装置の構成において、簡易な改良によって取付ベースについて従 来例に比し均一にして精度の高い温度調整ができ、各紫外線ランプを夫々高い照 射強度となる状態に保持できることとなる画期的なUV照射装置における紫外線 ランプの温度調整装置を提供することを目的としている。That is, the present invention finds such a problem in the conventional temperature control structure and solves the problem. In particular, as shown in FIG. 5, a mounting base in which a number of ultraviolet lamps are juxtaposed is used. In the configuration of the UV lamp temperature control device in a UV irradiation device that needs to be uniform and accurately controlled, the temperature of the mounting base can be made uniform and highly accurate compared to the conventional example by simple improvement. It is an object of the present invention to provide a temperature control device for an ultraviolet lamp in an epoch-making UV irradiation device capable of maintaining each ultraviolet lamp at a high irradiation intensity.
【0012】[0012]
添付図面を参照して本考案の要旨を説明する。 The gist of the present invention will be described with reference to the accompanying drawings.
【0013】 ワーク1を搬入する室内2に紫外線ランプ3を設け、この紫外線ランプ3の紫 外線(UV)照射によって有機物の分子鎖を分断し、洗浄にあってはこの紫外線 ランプ3の紫外線照射によって前記室内2にオゾンを発生させ、このオゾンの分 解・生成反応過程の酸化力の強い発生期の酸素(O)と有機物との反応によりワ ーク1表面の洗浄あるいは改質を行うように構成したUV照射装置における紫外 線ランプの温度調整装置において、前記紫外線ランプ3を並設状態に突設する取 付ベース8内に冷却用水路9を設け、この冷却用水路9は、取付ベース8の一端 側からこの取付ベース8内に流入され反対側で折り返されて少なくとも取付ベー ス8内を一往復する水路形状に構成し、この冷却用水路9へ冷却用水を供給する 導管部10に、冷却用水の供給・遮断を温度に対応して切り替え制御する電磁弁11 を設けると共に、水圧の減圧並びに水量調整を行い絞り弁としての機能を果たす 流量計14若しくは調整バルブ14を設けたことを特徴とするUV照射装置における 紫外線ランプの温度調整装置に係るものである。An ultraviolet lamp 3 is provided in a room 2 into which the work 1 is carried in, and the ultraviolet light (UV) irradiation of the ultraviolet lamp 3 divides a molecular chain of an organic substance. Ozone is generated in the chamber 2, and the surface or the surface of the work 1 is washed or modified by a reaction between oxygen (O) and an organic substance in a generation stage having a strong oxidizing power in the decomposition / generation reaction process of the ozone. In the temperature control device for an ultraviolet lamp in the UV irradiation device thus configured, a cooling water passage 9 is provided in a mounting base 8 in which the ultraviolet lamps 3 protrude in a juxtaposed state, and the cooling water passage 9 is connected to one end of the mounting base 8. The cooling water is supplied to the cooling water passage 9 by flowing into the mounting base 8 from the side and turning back on the opposite side to make at least one reciprocation in the mounting base 8. The pipe section 10 is provided with an electromagnetic valve 11 for switching and controlling the supply and cutoff of the cooling water in accordance with the temperature, and a flow meter 14 or an adjustment valve 14 which performs a function as a throttle valve by reducing the water pressure and adjusting the amount of water. The present invention relates to a temperature adjusting device for an ultraviolet lamp in a UV irradiation device, which is provided.
【0014】 また、取付ベース8の一端側に前記冷却用水路9の導入口15と導出口16とを並 設して、取付ベース8の水路形状を一端側の導入口15から反対側へと延び、Uタ ーンして一端側の導出口16へ戻るUターン形状としたことを特徴とする請求項1 記載のUV照射装置における紫外線ランプの温度調整装置に係るものである。Further, the inlet 15 and the outlet 16 of the cooling water passage 9 are juxtaposed at one end of the mounting base 8 so that the shape of the water passage of the mounting base 8 extends from the inlet 15 at one end to the opposite side. The UV lamp according to claim 1, wherein the UV lamp has a U-turn shape which returns to the outlet 16 on one end side.
【0015】[0015]
好適と考える本考案の実施の形態(考案をどのように実施するか)を、図面に 基づいてその作用効果を示して簡単に説明する。 Preferred embodiments of the present invention (how to implement the present invention), which is considered to be preferable, will be briefly described with reference to the drawings, showing the operational effects thereof.
【0016】 所定温度以上に温度が上昇すると、冷却すべく電磁弁11が開き、導管部10から 冷却用水が取付ベース8内の冷却用水路9へ供給され、逆に所定温度以下に温度 が下がると電磁弁11は閉じ、冷却用水の導入を遮断する。When the temperature rises above a predetermined temperature, the solenoid valve 11 opens for cooling, cooling water is supplied from the conduit section 10 to the cooling water passage 9 in the mounting base 8, and conversely, when the temperature falls below the predetermined temperature. The solenoid valve 11 closes and shuts off the introduction of cooling water.
【0017】 この時、本考案は、導管部10に前記供給・遮断を制御する電磁弁11だけでなく 、水圧の減圧並びに水量調整を行い絞り弁としての機能を果たす流量計14若しく は調整バルブ14を設けているから、この流量計14若しくは調整バルブ14によって 、適正な所定水圧に減圧された上に、水量は所定量に調整されるため、電磁弁11 が開いたとき、高い水圧で多量の冷却用水が流入することはなく、適正な水圧で 適正な水量の冷却用水を流入供給できる。At this time, the present invention is not limited to the electromagnetic valve 11 for controlling the supply and cutoff of the conduit section 10, but also for the flow meter 14 or the regulator for reducing the water pressure and adjusting the amount of water to function as a throttle valve. Since the valve 14 is provided, the water pressure is reduced to an appropriate predetermined water pressure by the flow meter 14 or the adjustment valve 14 and the water amount is adjusted to the predetermined amount. A large amount of cooling water does not flow in, and an appropriate amount of cooling water can be flowed in and supplied at an appropriate water pressure.
【0018】 従って、前記従来例のように取付ベースの一部が急激に冷却されることを抑制 できることになるため、取付ベース8を均一にして所定温度に精度良く冷却でき ることとなる。Therefore, it is possible to suppress rapid cooling of a part of the mounting base as in the above-described conventional example, so that the mounting base 8 can be made uniform and accurately cooled to a predetermined temperature.
【0019】 しかも、本考案は、単に取付ベース8の一端側から反対側へと冷却用水が通過 するのではなく、冷却用水路9は少なくとも一往復するUターン水路となってい るため、一端側と反対側との冷却に片寄りが生じにくく、この点においても取付 ベース8を均一に冷却できる。Moreover, in the present invention, the cooling water passage 9 is not a simple passage of the cooling water from one end side to the opposite side of the mounting base 8 but a U-turn water passage which makes at least one reciprocation. It is unlikely that the cooling with the opposite side is offset, and the mounting base 8 can be cooled uniformly in this point as well.
【0020】 それ故に前記作用・効果が相俟って、この取付ベース8に突設した多数の紫外 線ランプ3を夫々所定温度に冷却でき、紫外線ランプ3の照射強度を向上させる ことができる。Therefore, together with the above-mentioned functions and effects, a large number of ultraviolet lamps 3 protruding from the mounting base 8 can be cooled to a predetermined temperature, respectively, and the irradiation intensity of the ultraviolet lamp 3 can be improved.
【0021】[0021]
本考案の具体的な実施例について図面に基づいて説明する。 A specific embodiment of the present invention will be described with reference to the drawings.
【0022】 本実施例は、図1,図2に示すように紫外線照射によって表面乾式洗浄を行う 目的に使用するUV洗浄装置に本考案を適用したもので、装置の開閉蓋13側に紫 外線ランプ3を多数取付ベース8に突設して並設し、この開閉蓋13を閉じること で形成される洗浄室2の両端に、ワーク1として(被洗浄物1としての)薄板状 の大型基板1を多数並設したローラ12上に水平架設状態にして送り込み搬送する 搬入口4と搬出口5とを設け、この洗浄室2はこの搬入口4と搬出口5を残して 封止状態に構成している。In this embodiment, as shown in FIGS. 1 and 2, the present invention is applied to a UV cleaning apparatus used for performing a surface dry cleaning by irradiating ultraviolet rays. A large number of thin plates (as objects to be cleaned 1) are provided at both ends of the cleaning chamber 2 formed by closing the opening / closing lid 13 by protruding the lamps 3 from the mounting base 8 and juxtaposing them. A carry-in port 4 and a carry-out port 5 are provided on a roller 12 having a large number of rollers 1 arranged side by side and fed and transported, and the washing chamber 2 is configured in a sealed state while leaving the carry-in port 4 and the carry-out port 5. doing.
【0023】 この搬入口4と搬出口5とを覆う外装室6を夫々搬送方向に沿って連設状態に 設け、この外装室6に夫々搬入口4A,搬出口5Aを設け、被洗浄物1が前記洗 浄室2に搬入される場合は、搬入口4A,外装室6,搬入口4を順次通過して搬 入され、紫外線洗浄後搬出される場合は、搬出口5,外装室6,搬出口5Aを順 次通過して搬出されるように構成し、いわば洗浄室2の搬入口4と搬出口5の夫 々の外側に更に補助室として外装室6を連設し、いわゆる全体として二重室構造 に構成している。The exterior chambers 6 covering the carry-in port 4 and the carry-out port 5 are respectively provided in a continuous state along the transport direction, and the exterior chamber 6 is provided with a carry-in port 4A and a carry-out port 5A, respectively. Is carried in through the carry-in port 4A, the exterior chamber 6, and the carry-in port 4 sequentially, and is carried out after the ultraviolet cleaning, and is carried out. It is configured so as to be sequentially passed through the carry-out port 5A and carried out, and so to speak, an exterior chamber 6 is further provided as an auxiliary chamber outside each of the carry-in port 4 and the carry-out port 5 of the cleaning chamber 2, so-called as a whole. It has a double-chamber structure.
【0024】 そしてこのような二重室構造とした上で搬入搬出口4,5から外部へ直接多量 に漏れることを恐れて洗浄室2からオゾン雰囲気を直接強力に排気する構成とせ ずに、洗浄室2はあくまでオゾン雰囲気が十分に充満できる構成とし、この洗浄 室2の搬入口4,搬出口5から一旦必ず外装室6に漏れ出るオゾン雰囲気を排気 するように外装室6に排気部7を設け、洗浄室2内のオゾン濃度を高くできるよ うにしている。With such a double-chamber structure, the cleaning chamber 2 is not strongly exhausted directly from the cleaning chamber 2 for fear of a large amount of leakage directly from the loading / unloading ports 4 and 5 to the outside. The chamber 2 is configured to be sufficiently filled with an ozone atmosphere, and an exhaust unit 7 is provided in the exterior chamber 6 so as to exhaust the ozone atmosphere that always leaks into the exterior chamber 6 from the carry-in port 4 and the carry-out port 5 of the cleaning chamber 2. The ozone concentration in the cleaning chamber 2 can be increased.
【0025】 本実施例は、このようなUV洗浄照射装置において、前記紫外線ランプ3を並 設状態に突設する横方向に長い取付ベース8内に冷却用水路9を設け、この冷却 用水路9へ冷却用水を供給する導管部10に、取付ベース8に設けたセンサー(サ ーミスタ)17によって作動する温調制御部18により冷却用水の供給・遮断を切り 替え制御する電磁弁11を設けると共に、水圧の減圧並びに水量調整を行い絞り弁 としての機能を果たす流量計14(調整バルブ14)を設けている。In the present embodiment, in such a UV cleaning irradiation apparatus, a cooling water passage 9 is provided in a laterally long mounting base 8 projecting the ultraviolet lamps 3 in a juxtaposed state, and the cooling water passage 9 is cooled. A solenoid valve 11 for switching and controlling the supply and shutoff of cooling water by a temperature control controller 18 operated by a sensor (thermistor) 17 provided on the mounting base 8 is provided in the conduit section 10 for supplying water, and the water pressure is controlled. A flow meter 14 (adjustment valve 14) that performs pressure reduction and water volume adjustment and functions as a throttle valve is provided.
【0026】 また、冷却用水路9は、取付ベース8の一端側から取付ベース8内に流入され 反対側で折り返されて少なくとも取付ベース8内を一往復する水路形状に構成し ており、具体的には、取付ベース8の一端側に前記冷却用水路9の導入口15と導 出口16とを並設して、取付ベース8の水路形状を一端側の導入口15から反対側へ と延び、Uターンして一端側の導出口16へ戻り一往復するUターン形状としてい る。The cooling water passage 9 is formed into a water passage shape that flows into the mounting base 8 from one end side of the mounting base 8, is turned on the opposite side, and at least makes one round trip in the mounting base 8. The inlet 15 and the outlet 16 of the cooling water passage 9 are juxtaposed at one end of the mounting base 8 so that the shape of the water passage of the mounting base 8 extends from the inlet 15 at one end to the opposite side, and a U-turn is formed. Then, it has a U-turn shape that returns to the outlet 16 on one end side and makes one round trip.
【0027】 また、本実施例の流量計14は、水圧を減圧する機能と水量調整できる機能とを 備え、絞り弁としての機能を有するもので、具体的には、導入部側の導管部10に 本実施例では電磁弁11と別個に設けたもので、つまみ14Fを回すことで流水口14 Aに突設したニードル14Bを進退させて水量(流量)を加減調整できるように構 成し、この流水口14Aの下流側を広くした形状として適正な一定水圧に減圧する 構成とし、この広くした形状の管14C内に水量度合いを知るためのフロート14D を設け、このフロート14Dの位置を前記広くした形状の管14Cに設けた目盛14E で水量を読み取り、調整が適切に行えるようにしている。The flow meter 14 of the present embodiment has a function of reducing the water pressure and a function of adjusting the amount of water, and has a function as a throttle valve. In the present embodiment, the valve is provided separately from the solenoid valve 11. By turning the knob 14F, the needle 14B protruding from the water outlet 14A is advanced and retracted so that the water amount (flow rate) can be adjusted. The downstream side of the outlet 14A is widened to reduce the pressure to an appropriate constant water pressure, and a float 14D is provided in the widened pipe 14C to know the degree of water flow, and the position of the float 14D is widened. The amount of water is read by a scale 14E provided on the pipe 14C having a predetermined shape so that the adjustment can be appropriately performed.
【0028】[0028]
本考案は上述のように構成したから、適正な水圧で適正な水量を流入供給でき るため、従来例のように取付ベースの一部が急激に冷却されることを抑制でき、 取付ベースを均一にして所定温度に精度良く冷却することができ、しかも、単に 一端側から他端側へと冷却用水が通過するのではなく、冷却用水路は少なくとも 一往復するUターン水路となっているため、一端側と反対側との冷却に片寄りが 生じにくく、よって取付ベースを従来例に比して極めて均一に冷却でき、それ故 この取付ベースに突設した複数の紫外線ランプを夫々所定温度に冷却でき、紫外 線ランプの照射強度が向上することとなるUV照射装置における紫外線ランプの 温度調整装置となる。 Since the present invention is configured as described above, an appropriate amount of water can be supplied and supplied at an appropriate water pressure, so that a portion of the mounting base can be prevented from being rapidly cooled as in the conventional example, and the mounting base can be made uniform. The cooling water channel is a U-turn water channel that makes at least one reciprocation rather than merely passing the cooling water from one end to the other end. The cooling between the side and the opposite side is less likely to be offset, so that the mounting base can be cooled very uniformly as compared with the conventional example, and therefore, the plurality of ultraviolet lamps protruding from the mounting base can be cooled to a predetermined temperature, respectively. In addition, it becomes a temperature control device of an ultraviolet lamp in a UV irradiation device that improves the irradiation intensity of the ultraviolet lamp.
【0029】 また、請求項2記載の考案においては、更に前記作用・効果が一層確実に発揮 される極めて実用性に秀れたUV照射装置における紫外線ランプの温度調整装置 となる。In the invention according to the second aspect, a temperature adjusting device for an ultraviolet lamp in an extremely practical UV irradiation device in which the above-described functions and effects are more reliably exhibited.
【図1】本実施例のUV照射装置の概略構成斜視図であ
る。FIG. 1 is a schematic configuration perspective view of a UV irradiation apparatus according to the present embodiment.
【図2】本実施例のUV照射装置の要部の拡大説明断面
図である。FIG. 2 is an enlarged explanatory sectional view of a main part of the UV irradiation apparatus according to the embodiment.
【図3】本実施例の要部の概略構成説明図である。FIG. 3 is an explanatory diagram of a schematic configuration of a main part of the present embodiment.
【図4】本実施例の流量計部分の説明図である。FIG. 4 is an explanatory diagram of a flow meter part of the present embodiment.
【図5】UV照射装置の取付ベース温度に対する紫外線
ランプの照射強度を示すグラフである。FIG. 5 is a graph showing irradiation intensity of an ultraviolet lamp with respect to a mounting base temperature of a UV irradiation device.
1 ワーク(被洗浄物,基板) 2 室内(洗浄室) 3 紫外線ランプ 8 取付ベース 9 冷却用水路 10 導管部 11 電磁弁 14 流量計(調整バルブ) 15 導入口 16 導出口 1 Workpiece (substrate to be cleaned, substrate) 2 Room (washing chamber) 3 Ultraviolet lamp 8 Mounting base 9 Cooling channel 10 Conduit section 11 Solenoid valve 14 Flow meter (adjustment valve) 15 Inlet 16 Outlet
Claims (2)
設け、この紫外線ランプの紫外線(UV)照射によって
有機物の分子鎖を分断し、洗浄にあってはこの紫外線ラ
ンプの紫外線照射によって前記室内にオゾンを発生さ
せ、このオゾンの分解・生成反応過程の酸化力の強い発
生期の酸素(O)と有機物との反応によりワーク表面の
洗浄あるいは改質を行うように構成したUV照射装置に
おける紫外線ランプの温度調整装置において、前記紫外
線ランプを並設状態に突設する取付ベース内に冷却用水
路を設け、この冷却用水路は、取付ベースの一端側から
この取付ベース内に流入され反対側で折り返されて少な
くとも取付ベース内を一往復する水路形状に構成し、こ
の冷却用水路へ冷却用水を供給する導管部に、冷却用水
の供給・遮断を温度に対応して切り替え制御する電磁弁
を設けると共に、水圧の減圧並びに水量調整を行い絞り
弁としての機能を果たす流量計若しくは調整バルブを設
けたことを特徴とするUV照射装置における紫外線ラン
プの温度調整装置。An ultraviolet lamp is provided in a room into which a work is carried, and an ultraviolet (UV) irradiation of the ultraviolet lamp breaks a molecular chain of an organic substance. In cleaning, ozone is introduced into the room by irradiation of the ultraviolet lamp with the ultraviolet lamp. Of the UV lamp in the UV irradiation apparatus configured to clean or modify the surface of the work by the reaction between oxygen (O), which is a oxidizing power in the process of decomposition and generation of ozone, and an organic substance during the ozone decomposition / generation reaction process. In the temperature control device, a cooling water passage is provided in a mounting base that protrudes the ultraviolet lamps in a juxtaposed state, and the cooling water passage flows into the mounting base from one end of the mounting base and is folded back on the opposite side to at least. It is configured in a water channel shape that makes one round trip inside the mounting base, and the cooling water supply / cutoff is set to the temperature in the conduit that supplies cooling water to this cooling water channel. A temperature control device for an ultraviolet lamp in a UV irradiation device, comprising: an electromagnetic valve for performing switching control correspondingly; and a flow meter or an adjustment valve that functions as a throttle valve by reducing and adjusting the water pressure. .
導入口と導出口とを並設して、取付ベースの水路形状を
一端側の導入口から反対側へと延び、Uターンして一端
側の導出口へ戻るUターン形状としたことを特徴とする
請求項1記載のUV照射装置における紫外線ランプの温
度調整装置。2. An inlet and an outlet of the cooling water passage are arranged side by side at one end of the mounting base, and the shape of the water passage of the mounting base is extended from the inlet at one end to the opposite side. 2. A temperature adjusting device for an ultraviolet lamp in a UV irradiation device according to claim 1, wherein the device has a U-turn shape returning to a side outlet.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1998009293U JP3059348U (en) | 1998-11-25 | 1998-11-25 | Temperature control device of UV lamp in UV irradiation device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1998009293U JP3059348U (en) | 1998-11-25 | 1998-11-25 | Temperature control device of UV lamp in UV irradiation device |
Publications (1)
Publication Number | Publication Date |
---|---|
JP3059348U true JP3059348U (en) | 1999-07-09 |
Family
ID=32984068
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1998009293U Expired - Lifetime JP3059348U (en) | 1998-11-25 | 1998-11-25 | Temperature control device of UV lamp in UV irradiation device |
Country Status (1)
Country | Link |
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JP (1) | JP3059348U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010027357A (en) * | 2008-07-18 | 2010-02-04 | Ushio Inc | Light source for ultraviolet irradiation, and optical irradiator machine |
-
1998
- 1998-11-25 JP JP1998009293U patent/JP3059348U/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010027357A (en) * | 2008-07-18 | 2010-02-04 | Ushio Inc | Light source for ultraviolet irradiation, and optical irradiator machine |
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