JP3049407U - Vacuum tube furnace - Google Patents

Abstract

(57) [Problem] To provide a small-sized vacuum tube furnace having a small heat capacity. SOLUTION: A furnace core component 2a having a shape in which a furnace shell 2 is divided by a tubular core furnace tube 1 which is long on the left and right, and a surface including an axis of the furnace core tube 1 or a surface parallel thereto. 2b. One of the furnace shell components 2a is connected to the other furnace shell component.
At 2b, it is rotatably mounted around an axis parallel to the axis of the furnace core tube 1. Vacuum exhaust ports 2g, 2h are provided on the vacuum insulation layer 7 of the furnace shell 2.
Is provided, and a vacuum is evacuated by the vacuum evacuation device 8 through this. The heating means 3 is formed by heat insulating materials 3a, 3b and resistance heating elements 3d, 3e provided on the heat insulating materials 3a, 3b so that at least a part thereof is exposed from the inner surfaces of the heat insulating materials 3a, 3b.

Description

[Detailed description of the invention]

[0001]

[Technical field to which the invention belongs]

 The present invention relates to a vacuum tube furnace used for heating an object to be processed in a vacuum atmosphere.

In this specification, the left and right of FIG. 1 are referred to as left and right, the left of FIG. 2 is referred to as front, and the right is referred to as rear.

[0003]

[Prior art]

 Conventionally, this kind of vacuum tubular furnace includes a sealed furnace core tube, a vacuum exhaust device connected to the furnace core tube, and a heat insulating material outer shell surrounding most of the furnace core tube except for the left and right ends. And a heating device provided on the inner surface of the furnace shell to heat the furnace core tube.

In this vacuum tube furnace, after the object to be treated is placed in the furnace core tube, the inside of the furnace core tube is evacuated by a vacuum exhaust device, and the object to be treated in the furnace core tube is heated to a predetermined temperature by a heating device. It has become.

[0005]

[Problems to be solved by the invention]

 In the case of the above-described conventional vacuum tube furnace, if the surface temperature of the furnace shell is to be reduced to reduce the amount of heat dissipated, the thickness of the furnace shell, that is, the thickness of the heat insulating material must be increased. There is a problem that becomes large. In addition, when the heat insulating material is thickened, the heat capacity of the heat insulating material is increased, so that there is a problem that the heat storage amount is increased and the energy consumption is increased.

The above problems are particularly problematic when the outer shell of the furnace is covered with a cover in order to install the vacuum tube furnace in a clean room. For example, in the case of a vacuum tube furnace having a furnace shell thickness of 100 mm, the outer surface temperature of the furnace shell is about 66 ° C, and when the furnace shell is covered with a cover, the temperature inside the cover becomes 60 ° C or more. However, the temperature exceeds 50 ° C., which is the heat-resistant temperature of electrical components provided between the cover and the furnace shell. For this reason, the air inside the cover must be exhausted outside the cover using a fan or the like.

[0007] An object of the present invention is to provide a vacuum tube furnace which is small and has a small heat capacity, which solves the above problems.

[0008]

[Means for Solving the Problems and Effects of the Invention]

 In order to solve the above-mentioned problems, the vacuum tube furnace of the present invention includes a sealed furnace core tube, a vacuum exhaust device connected to the furnace core tube, a furnace shell surrounding at least a part of the furnace core tube, and a furnace. A vacuum tube furnace provided with a heating means provided inside the outer shell for heating the furnace core tube, wherein the sealed furnace core tube has a long tubular shape on the left and right, and the furnace outer shell is a vacuum heat insulating layer. And a furnace shell component having a shape in which the furnace shell is divided by a plane including the axis of the furnace core tube or a plane parallel thereto, and one of the furnace shell constituent members is constituted by the other furnace shell structure. The member is rotatably attached around an axis parallel to the axis of the furnace core tube, the vacuum heat insulating layer of the furnace outer shell has a vacuum exhaust port, and the heating means is at least partially a heat insulating material. It has a resistance heating element provided on the heat insulating material so as to be exposed from the inner surface of the heat insulating material.

In this vacuum tube furnace, high heat insulation can be obtained by the vacuum heat insulating layer of the furnace outer shell, and the apparatus does not become large and the heat capacity of the apparatus does not increase.

In this vacuum tube furnace, the vacuum tube furnace is operated in a state where the furnace shell is formed by combining the two upper and lower furnace shell components, and after the operation is completed, the furnace core tube and the heating tube are added. When exchanging the heating means, it is easy to rotate one of the upper furnace shell components so that the furnace shell is open.

[0011] In the above vacuum tube furnace, the vacuum heat insulating layer of the furnace shell may be connected to a vacuum exhaust device through a vacuum exhaust port when necessary, and the vacuum may be evacuated. This is because there is no need to separately provide a vacuum exhaust device for evacuating the vacuum heat insulating layer.

Further, a heat insulating layer made of a heat insulating paint may be formed between the outer shell and the heating means. This is because better heat insulation can be obtained.

[0013]

[Embodiment of the invention]

 Hereinafter, an embodiment of the present invention will be described with reference to FIGS.

And heating means (3).

[0015] A downwardly bent vent (9) is detachably connected to the right end of the furnace core tube (1), and the furnace core tube (1) is evacuated through the vent (9). Connected to (8).

In the furnace outer shell (2), circular through holes (2c) (2d) through which the furnace core tube (1) penetrates are formed on left and right end surfaces. Furthermore, the furnace shell (2) is divided into an upper furnace shell component (2a) and a lower furnace shell component (2b), which are divided into upper and lower parts by a horizontal plane including the axis of the furnace core tube (1). More. Each of the constituent members (2a) and (2b) has a thickness of, for example, 100 mm, and has a hollow interior.

Each of the hollow portions is provided with a vacuum exhaust port (2g) (2h), and the hollow portion is connected to a vacuum exhaust device (8) through the vacuum exhaust port (2g) (2h). The hollow portion is evacuated by the evacuation device (8) to form a vacuum heat insulating layer (7). The lower part of the upper furnace component (2a) is rotatably attached to the rear upper part of the lower furnace component (2b) with a plurality of hinges (6) to form the furnace shell (2). Have been. Further, the front ends of both components (2a) (2b) can be fixed by a locking device (not shown).

The heating means (3) includes a heat insulating material (3a) disposed in the upper component (2a), a heat insulating material (3b) disposed in the lower component (2b), The multiple resistance heating wires (3d) (3e) embedded in the materials (3a) (3b) and the resistance heating wires (3d) (3e) embedded in the insulation (3a) (3b) And two terminals (3c) and (3f) connected to each other.

Each of the resistance heating wires (3d) and (3e) is embedded in each of the heat insulating materials (3a) and (3b) such that a part thereof is exposed from the inner surface of each of the heat insulating materials (3a) and (3b).

The terminals (3 c) and (3 f) pass through the through portions (2 e) and (2 f) formed in each of the constituent members (2 a) and (2 b), respectively. This portion is connected to a power supply by a lead wire (not shown) or the like.

The heating means has a structure in which a plurality of grooves extending in the axial direction are formed in the inner periphery of the heat insulating material, and a part of the heat generating wires is positioned and exposed in the grooves. May be.

A part of the heating wires (3d) and (3e) exposed from the inside of the heating means (3), that is, the inside of each of the heat insulators (3a) and (3b) and the heat insulators (3a) and (3b), In order to improve the strength of (3a) and (3b) and to improve the emissivity, it may be covered with a covering member made of an appropriate member.

A heat insulating paint (5) is applied to the inner surfaces of the constituent members (2a) (2a). As the heat-insulating coating (5), for example, it is preferable to use Supertherm (trade name) manufactured by Air Brown.

In the above-described vacuum tube furnace, the furnace core tube (1) in which an object to be processed is placed is evacuated by a vacuum exhaust device (8), and at the same time, the vacuum insulation of each of the constituent members (2a) (2b) is performed. Layer (7) is also evacuated. Thereafter, the object is heated by the heating means (3).

When the heating is completed, the locking between the front ends of the two constituent members (2a) and (2b) is released, and the upper furnace shell component (2a) is rotated to open the furnace shell (2). Thus, the furnace core tube (1) can be replaced in the state shown by the broken line in FIG.

As the vacuum tubular furnace of the present invention having the above-described structure, the two members (2a) and (2b) having a thickness of 100 mm and the vacuum heat insulating layer (7) having a thickness of 10 mm are used. When the temperature in the tube (1) was 1100 ° C., the surface temperature of the furnace shell (2) was 48 ° C.

On the other hand, in the case where the vacuum heat insulating layer is not provided and the heat insulating coating is not applied to the outer periphery of the heating means, that is, in the case of the conventional vacuum tube furnace, the surface temperature of the furnace outer shell is 66 ° C. In the vacuum tube furnace, it was confirmed that the surface temperature of the furnace shell (2) was clearly lowered.

In the vacuum tube furnace, the vacuum heat insulating layer (7) is always evacuated by the vacuum exhaust device (8) during operation of the vacuum tube furnace. After the vacuum evacuation device (7) is evacuated by the vacuum evacuation device at the time of production of the component (2a) (2b), the vacuum evacuation ports (2g) and (2h) are closed, and the vacuum evacuation layer (7) is hermetically sealed to form a tube. The furnace may be operated.

In this case, the vacuum exhaust ports (2g) and (2h) may be opened when necessary, for example, when the degree of vacuum in the vacuum heat insulating layer (7) is reduced, and the vacuum heat insulating layer (7) may be connected to a vacuum exhaust device to evacuate.

[Brief description of the drawings]

FIG. 1 is a vertical sectional view of the vacuum tube furnace of the present invention.

FIG. 2 is a sectional view taken along the line II-II in FIG.

[Explanation of symbols]

 (1) Closed cylindrical furnace core tube (2) Furnace shell (2a) Upper furnace shell component (2b) Lower furnace shell component (2g) (2h) Vacuum exhaust port (3) Heating means (3a) (3b) Insulation material (3d) (3e) Resistance heating element (resistance heating wire) (5) Thermal insulation paint (7) Vacuum insulation layer (8) Vacuum exhaust device

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Waka Yamaguchi 229 Kahatacho, Tenri-shi Koyo Lindberg Co., Ltd.

Claims (2)

[Utility model registration claims] 1. A sealed furnace core tube, a vacuum evacuation device connected to the furnace core tube, a furnace shell surrounding at least a part of the furnace core tube, and a furnace core tube provided inside the furnace shell. And a heating means for heating the furnace core, wherein the sealed furnace core tube has a long tubular shape on the left and right, the furnace outer shell has a vacuum heat insulating layer and includes the axis of the furnace core tube. A furnace shell component having a shape obtained by dividing the furnace shell by a surface or a plane parallel thereto, and one of the furnace shell components is parallel to the axis of the furnace core tube on the other furnace shell member. The vacuum heat insulating layer of the furnace outer shell has a vacuum exhaust port, and the heating means is connected to the heat insulating material and the heat insulating material so that at least a portion thereof is exposed from the heat insulating material inner surface. A vacuum tubular furnace comprising: a provided resistance heating element. 2. A heat insulating layer comprising a heat insulating paint is formed between a furnace shell and a heating means.
A vacuum tube furnace as described.