JP3038979U - Fluid heating device - Google Patents

Abstract

(57) [PROBLEMS] To provide a fluid heating device which is easy to maintain, has high reliability and high output. An outer tube 1, an inner tube 2 inserted in the outer tube, a halogen lamp inserted in the inner tube, and a space formed between the outer tube and the inner tube as a flow path. In a fluid heating device configured to pass and heat a fluid to be heated, the halogen lamp contains a plurality of quartz tubes each containing a filament and arranged in parallel with each other. A pair and first and second supporting portions that integrally support each pair of quartz tubes at both ends, and electrically connect the two filaments of each pair on the first supporting portion side. At the same time, an electrode lead is led out from the second support portion side to form a single-end structure, and the electrode lead is inserted from the first support portion into the inner pipe and is fixed in the inner pipe. To do.

Description

[Detailed description of the invention]

[0001]

[Technical field to which the invention belongs]

 The present invention relates to a fluid heating device, and more particularly to a support structure for a heater used in the fluid heating device.

[0002]

[Prior art]

 With the miniaturization and higher integration of semiconductor devices, the miniaturization of element patterns is increasing. In various processing steps in the manufacture of such semiconductor devices, selective processing such as resist pattern formation by photolithography and pattern formation by etching using the resist pattern as a mask is often used. Formation of a resist pattern by photolithography is performed in three steps of resist application, selective exposure using an exposure mask, and development. Then, the resist pattern is used as a mask for selective etching, and finally the resist pattern is peeled off. In such a process, sulfuric acid / hydrogen peroxide or an organic chemical solution is often used as a stripping solution.

In such a semiconductor wafer processing apparatus, temperature control is usually performed using a temperature control apparatus (Japanese Patent Laid-Open No. 5-231712). In such an apparatus, the treatment liquid is introduced from a treatment tank to a fluid heating device through a Teflon pipe using a pump, heated to a desired temperature by the fluid heating device, and returned to the treatment tank through a filter. It is configured. Here, in the fluid heating device, as shown in FIG. 16, for example, an inner tube 2 is arranged in an outer tube 1, a halogen lamp 3 as a heat source is arranged in the inner tube, and the outer tube 1 and A space formed between the inner pipe 2 and the inner pipe 2 is used as a flow path 4, and a fluid to be heated is supplied to and heated in the flow path 4. Reference numeral 11 is a fluid supply port, and 12 is a fluid discharge port. Here, the halogen lamp 3 is melted at both ends, and the halogen and the inert gas are enclosed in the quartz tube 5 which has been formed by cooling to form the flat portion, and the tungsten filament 7 supported by the supporter 6 is Electrode portions 8 arranged and connected to both ends of the filament 7 are enclosed in the flat portion. Halogen lamps can be used continuously at 2-3 times higher temperature than electric heaters such as nichrome wire, and can improve radiant energy up to 16 to 81 times, so it is a small and highly efficient heater. Has been attracting attention.

It is said that the life of such a halogen lamp is about half a year to one year, and it is necessary to replace the heater according to the life.

However, in the above-mentioned device, a double-end type halogen lamp as shown in FIG. 17 is used, and the halogen lamp is fixed at both ends of the inner tube and the electrode lead 10 is taken out. There is a problem that it must be done from both ends.

Further, the temperature of the electrode portion 8 becomes high, and molybdenum is oxidized, which often causes shortening of life. In addition, although it can be used at high temperatures, if the fluid to be heated is an inflammable substance such as an organic solvent, there is a problem in that it is necessary to take measures to prevent ignition or explosion.

[0007]

[Problems to be solved by the device]

 As described above, the conventional fluid heating device using the halogen lamp has a problem that maintenance is difficult. In addition, the temperature of the electrode portion 8 becomes high and the oxidation of molybdenum occurs, which often shortens the life. In addition, organic chemicals that are often used in the manufacturing process of semiconductor devices are often used after being heated to a desired temperature, but their ignition temperature is low and they easily burn or explode, which poses a safety issue. .

Further, in order to stabilize the temperature in a short time and to perform highly accurate temperature control, it is necessary to use a heat source having a large amount of heat generation, whereas the demand for downsizing of the device is increasing. Is.

[0009] Furthermore, it has been a very important subject that the filament can be easily replaced when it breaks and the maintenance is facilitated. The present invention has been made in view of the above circumstances, and provides a fluid heating device which is easy to maintain, can stabilize the temperature in a short time, and can perform highly accurate temperature control and has high reliability. With the goal.

[0010]

[Means for Solving the Problems]

 Therefore, the first feature of the present invention is that an outer tube, an inner tube inserted into the outer tube, a halogen lamp inserted into the inner tube, and the outer tube and the inner tube are provided. In a fluid heating device configured to use a space as a flow path for heating a fluid to be heated, the halogen lamp contains filaments and two quartz lamps are arranged in parallel with each other. A plurality of quartz tube pairs made of tubes and first and second support portions that integrally support each quartz tube pair at both ends are provided, and two pairs of each of the pairs are provided on the first support portion side. A single end structure is formed in which the filament is electrically connected and the electrode lead is led out from the second support portion side, and the filament is inserted from the first support portion into the inner tube and fixed. is there.

Preferably, at least one pair of the quartz tube pairs further comprises at least one spare quartz tube, and the spare quartz tube is electrically connected to the quartz tube pair on the side of the first support portion. And an electrode lead is led out from the side of the second support portion.

A second feature of the present invention is that an outer tube, an inner tube inserted into the outer tube, a halogen lamp inserted into the inner tube, and the outer tube and the inner tube are provided. In a fluid heating apparatus configured to heat a fluid to be heated by using a space that can be formed as a flow path, each of the halogen lamps accommodates a filament, and three halogen lamps are arranged in parallel with each other. At least one quartz tube group made of quartz tubes is provided, and first and second support portions that integrally support these quartz tubes at both end portions are provided, and each of the first and second support portions has the above-mentioned structure. The three filaments of the group are electrically connected to each other, and a single end structure is formed in which the electrode lead is led out from the side of the second supporting portion, and the filament is inserted from the first supporting portion into the inner tube. Fixed It is to be.

Further preferably, at least one of the quartz tube groups further comprises at least one spare quartz tube, and the spare quartz tube is electrically connected to the quartz tube group on the first support portion side. Are electrically connected, and the electrode lead is led out from the side of the second supporting portion.

According to the present invention, since the halogen lamp is inserted from one end side of the inner tube and is locked by, for example, a stopper provided at the other end side, the insertion side may be fixed and connected to the power supply. Replacing the halogen lamp is extremely easy. In addition, the electrode part that becomes hot can be arranged outside the outer tube, which improves heat dissipation and prolongs the service life. Moreover, since a plurality of pairs of quartz tubes are inserted into the inner tube, the amount of heat generated is increased without increasing the area occupied by the device, and high-density heat generation is possible. Moreover, since the heat generation density is high, the device can be downsized, and the cost can be reduced.

Further, by providing the spare quartz tube, when the filament is broken, it can be easily repaired by simply changing the connection of the electrode lead led out to the second supporting portion, and maintenance. Is easy.

Further, by making a hole at the end of the inner tube and cooling the electrode part by natural convection, the life of the halogen lamp can be extended. At this time, in particular, natural convection is favorably formed and cooling is performed more efficiently by forming two or more pairs of holes on the peripheral surfaces of both ends of the inner pipe so as to face each other vertically.

Further, if the electrode part is cooled by injecting an inert gas, the life of the halogen lamp can be extended, and also when the fluid heating device is used for heating the organic solvent, it does not explode. It is safe and reliable without fear.

In particular, according to the second aspect of the present invention, three quartz tubes each having a filament are electrically connected as one group, so that especially when using a three-phase alternating current as a power source. The power balance can be improved.

[0019]

[Embodiment of the invention]

 The semiconductor chemical liquid heating apparatus of the first embodiment of the present invention is shown in FIG. 1 as an overall view, and in FIGS. 2 and 3 as a right side view and a left side view. Both ends are supported by the first and second supporting portions 9a, 9b made of a disk-shaped body made of ceramic, inserted into the inner pipe 2, and the stopper S and the first stopper provided on the inner wall of the end of the inner pipe 2 are supported. The tip of the halogen lamp is fixed by engaging with the supporting portion 9a of the inner tube 2 and the other end is fixed by the pin P inserted into the end of the inner tube 2 by the second supporting portion 9b. The feature is that it can be easily performed from the side.

That is, in this device, the outer pipe 1, the inner pipe 2 disposed in the outer pipe 1, the inner pipe 2 are inserted, and the end portion is fixed to the end portion of the inner pipe 2. A halogen lamp 3 made of a quartz tube having 3 to 6 filaments and a space formed between the outer tube and the inner tube are used as a flow path 4, and isopropyl alcohol is used as a fluid to be heated in the flow path. It is configured to supply and heat the alcohol (IPA). FIG. 4 is an explanatory diagram showing the circuit connection of the halogen lamp. As shown in FIG. 5, a fluid supply port 11 and a fluid discharge port 12 are arranged in the flow path 4 and are connected to respective pipes.

Here, the halogen lamp 3 has a single end structure in which the electrode lead 10 is led out from one end side, and as shown in FIG. 6, two filament lamps each containing a filament 7 in a quartz tube 5 are provided. Three pairs are arranged in parallel so that the electrode leads 10 are led out from one end side, respectively, and the outside is supported by the second support portion 9b made of a ceramic disc-shaped body to form the electrode leads. This is the derivation base. At the other end, two filaments 7 are connected to each other and are integrally supported by a first supporting portion 9a made of a ceramic disk. The filament 7 is supported by the supporter 6 so as to be located substantially in the center of the quartz tube 5, and is connected to the electrode portions 8 fused to both ends of the quartz tube.

Further, the inner tube 2 is inserted into the outer tube 1, both ends thereof are projected, and the electrode part 8 of the halogen lamp is arranged so as to be located at the projecting part, and a region corresponding to this electrode part 8 is formed. At the peripheral surface, two holes H are formed so as to face each other vertically. A nitrogen gas supply nozzle (not shown) is used to inject nitrogen gas into the holes H to enhance heat dissipation of the electrode portion 8. Growling. FIG. 5 is a diagram showing a state in which the halogen lamp is removed, and a stopper S is attached to the first support portion 9a side. The stopper S is a projection made of quartz glass and is fused to the inner wall of the inner tube 2.

When used for flammable organic chemicals, safety can be improved by placing the entire fluid heating device in a closed container and filling the closed container with nitrogen gas.

According to this device, the halogen lamp 3 can be taken out from one end side of the device very easily, and the halogen lamp 3 can be easily mounted, so that the maintenance is very easy. Further, since the one end side is only locked to the stopper S and is supported with a degree of freedom, the lamp is largely prevented from being damaged due to a difference in expansion coefficient or the like. Further, while the nitrogen gas supplied to the hole H forms a laminar flow along the outer peripheral surface of the quartz tube of the halogen lamp 3, the nitrogen gas efficiently flows toward the facing hole H without any retention. The cooling efficiency is also high. Therefore, even when used for heating flammable substances such as IPA, by flowing a nitrogen gas at about 10 to 20 liters / minute, the molybdenum electrode part 8 can be removed even when the outside air temperature is about 40 ° C. The temperature can be maintained at 300 to 350 ° C or lower. Therefore, the halogen lamp can maintain a long life without causing oxidation of the molybdenum electrode portion. Also, because it is composed of three pairs of lamps, the power balance is good if delta connection is performed when connecting to a three-phase alternating current. In this way, according to the fluid heating device of the present invention, maintenance of the halogen lamp becomes extremely easy.

The method of attaching the stopper and the shape thereof can be changed as appropriate, and the material is not limited to quartz glass. Furthermore, the fixing method on the side of the second supporting portion is not limited to the pin and can be changed as appropriate.

This apparatus is extremely effective for heating the processing chemical in a semiconductor wafer cleaning / drying apparatus and the like, and although IPA was used as the organic solvent in the above-mentioned Examples, methyl alcohol (CH3OH), acetone (CH3COCH, Freon R-113 (CCl2FCClF3, trichloroethylene, etc., alkylbenzene sulfonic acid (ABS), monoethanolamine, other organic solvents, or sulfuric acid-hydrogen peroxide, hydrochloric acid-hydrogen peroxide, phosphoric acid, etc.) .

Furthermore, although nitrogen gas is used as the inert gas in the above embodiment, the inert gas is not limited to nitrogen, and other inert gas such as argon gas may be used.

Next, a second embodiment of the present invention will be described. The semiconductor chemical liquid heating apparatus of the second embodiment of the present invention is shown in FIGS. 7 and 8 which are a right side explanatory view and a left side explanatory view of a halogen lamp, and FIG. 9 is an explanatory view showing circuit connection. One set of single-ended halogen lamps is set, and both ends are supported by the first and second supporting portions 9a and 9b made of a ceramic disc-shaped body, and inserted into the inner tube 2 to form an end of the inner tube 2. The tip end is fixed by the engagement of the stopper S provided on the inner wall of the part and the first support part 9a, and the other end is inserted into the end part of the inner pipe 2 by the second support part 9b. The pin P is fixed so that the halogen lamp can be easily attached and detached from one end side. The other parts are formed in the same manner as in the first embodiment, and one of the three quartz tubes provided with filaments is a spare tube and a single quartz tube between the two electrode leads 10 is used. It is connected so that phase 200V is applied.

As described above, according to the second embodiment of the present invention, by providing the preliminary quartz tube, in addition to the effect of the first embodiment, when the filament is cut off, the second supporting portion is provided. By simply changing the connection of the derived electrode lead 10, it can be easily repaired and maintenance is easy.

Next, a third embodiment of the present invention will be described. The semiconductor chemical liquid heating device of the third embodiment of the present invention is shown in FIG. 10 and FIG. 11, which is a right side explanatory view and a left side view of the halogen lamp, and FIG. One set of halogen lamps is connected to two sets of three-phase AC power by a star connection method with two sets, and both ends are supported by the first and second support parts 9a and 9b made of ceramic disk-shaped bodies. , The inner tube 2 is inserted into the inner tube 2, the stopper S provided on the inner wall of the end of the inner tube 2 is engaged with the first support portion 9a to fix the front end portion, and the other end portion is fixed to the second end portion. It is characterized in that it is fixed by a pin P inserted through the end portion of the inner tube 2 by the support portion 9b so that the halogen lamp can be easily attached and detached from one end side. Other parts are formed in the same manner as in the first embodiment.

Next, a fourth embodiment of the present invention will be described. The semiconductor chemical liquid heating apparatus of the fourth embodiment of the present invention is provided with a spare one as shown in FIGS. 13 and 14 for explaining the right side and left side of the halogen lamp and FIG. 15 for the circuit connection. It is equipped with four single-ended halogen lamps, three of which are connected to a three-phase alternating current of 200 V by a star connection method, and four ends of which are made of a ceramic disc-shaped body. The front end portion is fixed by being supported by the support portions 9a and 9b and inserted into the inner pipe 2, and the stopper S disposed on the inner wall of the end portion of the inner pipe 2 and the first support portion 9a are engaged with each other. The other end is fixed by a pin P inserted through the end of the inner tube 2 by the second support portion 9b so that the halogen lamp can be easily attached and detached from one end. . Other parts are formed in the same manner as in the third embodiment.

According to this structure, by providing the spare quartz tube, in addition to the effect of the third embodiment, when the filament breaks, the electrode lead 10 led out to the second supporting portion is provided. It can be easily repaired and maintenance is easy by simply changing the connection.

[0033]

[Effect of the invention]

 As described above, according to the present invention, in a fluid heating device using a halogen lamp, the lamp can be attached and detached extremely easily from one side, and maintenance is facilitated.

[Brief description of the drawings]

FIG. 1 is a diagram showing a fluid heating device according to a first embodiment of the present invention.

FIG. 2 is a diagram showing a halogen lamp used in the same apparatus.

FIG. 3 is a diagram showing a halogen lamp used in the same apparatus.

FIG. 4 is a diagram showing a halogen lamp used in the same apparatus.

FIG. 5 is a diagram showing a state in which the halogen lamp is removed in the same device.

FIG. 6 is a diagram showing a halogen lamp used in the same apparatus.

FIG. 7 is a diagram showing a halogen lamp used in the fluid heating apparatus according to the second embodiment of the present invention.

FIG. 8 is a diagram showing a halogen lamp used in the same apparatus.

FIG. 9 is a diagram showing a halogen lamp used in the same apparatus.

FIG. 10 is a view showing a halogen lamp used in the fluid heating apparatus of the third embodiment of the present invention.

FIG. 11 is a diagram showing a halogen lamp used in the same apparatus.

FIG. 12 is a diagram showing a halogen lamp used in the same apparatus.

FIG. 13 is a view showing a halogen lamp used in the fluid heating apparatus according to the fourth embodiment of the present invention.

FIG. 14 is a diagram showing a halogen lamp used in the same device.

FIG. 15 is a diagram showing a halogen lamp used in the same device.

FIG. 16 is a diagram showing a conventional fluid heating device.

FIG. 17 is a diagram showing a halogen lamp used in a conventional fluid heating device.

[Explanation of symbols]

 1 Outer Tube 2 Inner Tube 3 Halogen Lamp 4 Flow Path 5 Quartz Tube 6 Supporter 7 Filament 8 Electrode Section 9a First Support Section 9b Second Support Section 10 Electrode Lead 11 Fluid Supply Port 12 Fluid Discharge Port

Claims (4)

[Utility model registration claims] 1. An outer tube, an inner tube inserted into the outer tube, a halogen lamp inserted into the inner tube, and a space formed between the outer tube and the inner tube as a flow path, In a fluid heating device configured to heat by passing a fluid to be heated, the halogen lamp includes a plurality of quartz tube pairs each containing a filament and made of two quartz tubes arranged in parallel with each other. And a first and a second support portion that integrally support each quartz tube pair at both ends, and electrically connect the two filaments of each pair on the first support portion side. A single-ended structure in which an electrode lead is led out from the second support portion side, and the halogen lamp is inserted into the inner pipe from the first support portion and fixed in the inner pipe. Characterized by Body heating device. 2. At least one pair of each quartz tube pair further comprises at least one spare quartz tube, and the spare quartz tube is electrically connected to the quartz tube pair on the side of the first support portion. 2. The fluid heating device according to claim 1, wherein the fluid heating device is connected and the electrode lead is led out from the second support portion side. 3. An outer tube, an inner tube inserted into the outer tube, a halogen lamp inserted into the inner tube, and a space formed between the outer tube and the inner tube as a flow path, In a fluid heating device configured to allow a fluid to be heated to pass therethrough, the halogen lamp includes a quartz tube group including three quartz tubes each accommodating a filament and arranged in parallel with each other. In addition to having at least one group, the first and second supporting portions integrally supporting these quartz tubes at both ends are provided, and the three filaments of each group are electrically connected on the side of the first supporting portion. A single-ended structure in which the electrode leads are led out from the second support portion side while being connected to each other, and the halogen lamp is inserted into the inner pipe from the first support portion into the inner pipe. Fluid heating apparatus, characterized in that it is a constant. 4. At least one of the quartz tube groups further comprises at least one spare quartz tube, and the spare quartz tube is electrically connected to the quartz tube group on the side of the first support portion. The fluid heating device according to claim 3, wherein the fluid heating device is connected, and the electrode lead is led out from the second support portion side.