JP3035580U - Cleaning device for polishing objects such as disks - Google Patents

Abstract

(57) [Abstract] [Purpose] The present invention relates to a device for cleaning polishing liquid, sludge, etc. adhering when polishing a processed body such as a disk, and the polishing liquid, sludge, etc. The purpose of the invention is to obtain a cleaning device with a means that can be washed more forcibly to finish on a beautiful surface without forming a striped pattern due to the stain of the dry cleaning liquid and improve the inspection yield. It is a thing. [Structure] A cleaning shaft having a nozzle erected on the main body side, a switching device for spraying a cleaning liquid such as a pure aqueous solution and clean-air from a nozzle at the tip of the cleaning shaft, and a cleaning device rotatably fitted to the cleaning shaft. A cleaning liquid from the tip nozzle of the cleaning shaft is applied to the polishing surface of the workpiece rotating at a high speed by the workpiece holder that holds the combined workpiece such as a disk and the rotation drive device that rotates the workpiece holder at a high speed. The polishing surface of the processed body is washed by jetting the polishing liquid, sludge and the like to the outside by centrifugal force and further jetting clean air from the switching device.

Description

[Detailed description of the invention]

[0001]

[Industrial applications]

 The present invention relates to an apparatus for cleaning polishing liquid, sludge, etc., which adheres when polishing a workpiece such as a disk.

[0002]

[Prior art]

 Conventionally, as a cleaning device of this type, a cleaning device using chlorofluorocarbon has been known, but since it may destroy the ozone layer and deteriorate the environment, an alternative method is to use a volatile substance or pure aqueous solution. What is washed is commonly used.

[0003]

[Problems to be solved by the device]

 However, cleaning with a volatile solution or pure aqueous solution as an alternative to CFC cleaning is to simply wash away the work piece by immersing it in the bathtub, so the polishing liquid, sludge, etc. adhering to the work piece must be removed reliably. In addition, many of the stains of the dry cleaning liquid remained on the surface in a striped pattern, and the inspection yield was low. Therefore, the present invention has been made in order to solve the above-mentioned problems of the prior art, and it is necessary to forcibly wash away the polishing liquid, sludge, etc. adhering to the processed body, and to dry the surface. The purpose is to obtain a cleaning device that has a beautiful surface and is capable of improving the yield of inspection without producing a striped pattern due to stains of the cleaning liquid.

[0004]

[Means for Solving the Problems]

 As a means for solving this, the present invention provides a cleaning shaft having a nozzle standing on the main body side, and a switching device for ejecting the cleaning liquid and the clean air by a pure aqueous solution or the like from a nozzle at the tip of the cleaning shaft. A polishing surface of a workpiece that rotates at a high speed by a workpiece holder that holds a workpiece such as a disc rotatably fitted to the cleaning shaft and a rotation drive device that rotates the workpiece holder at a high speed. The cleaning liquid is sprayed from the nozzle of the cleaning shaft, the polishing liquid and sludge are washed away by centrifugal force, and the cleaning surface of the workpiece is cleaned by spraying clean air from the switching device. I did it.

[0005]

【Example】

 The configuration of the present invention will be described in detail below with reference to the embodiments shown in the drawings. The mounting base 2 mounted on the main body 1 is formed in a bottomed tubular shape including a bottom portion 21, a drive space portion 22, and a bearing space portion 23. The cleaning shaft 3 is erected at the center of the bottom portion 21 of the mounting base 2, and the tip of the cleaning shaft 3 is made to protrude largely from the bearing space portion 23. Further, the cleaning shaft 3 has a pipe shape with a closed end, and a flow path 31 is bored from the bottom portion 21 connected to the switching device 33, and 3 to 4 nozzles 32 are provided on the outer peripheral portion of the distal end thereof. Numerals 32 are vertically spaced and obliquely drilled so that the jets are close to each other. The upper and lower nozzles 32, 32 are jetted by a switching device 33 with a cleaning liquid such as a pure aqueous solution or a jet stream of clean air. The workpiece holder 4 has a fitting hole 41 that vertically penetrates the center thereof, and is formed in a drum shape with a collar, which includes a bottom plate portion 42, a bearing body portion 43, and a support portion 44. Then, the fitting hole 41 of the workpiece holder 4 is fitted into the cleaning shaft 3, the bottom plate portion 42 is brought into contact with the bottom portion 21 of the mounting base 2, and is brought into sliding contact with an airtight state by an airtight means described later. A bearing 6 rotatably fits between the upper half of the bearing body 43 and the bearing space 23, and a transmission mechanism 51 including a pulley and a belt mounted on the lower half of the bearing body 43 is interposed. The workpiece holder 4 is rotated at a high speed by the rotary drive device 5 which is installed in the main body 1 and whose speed is adjustable. Further, three or four stoppers 7 are provided on the upper surface of the support portion 44 at equal intervals in the circumferential direction so that the disk A of the processed body is located between the upper and lower nozzles 32, 32 of the cleaning shaft 3. A vacuum pad 8 for holding and holding the disk A by suction is provided between the stoppers 7 on the upper surface of the support portion 44, and the vacuum pad 8 is a passage formed in the workpiece holder 4. An opening is made through 81, and an annular groove 82 connected to a vacuum device 84 attached to the attachment base 2 side is rotatably slidably contacted in an airtight state via an airtight means 83 by packing. In addition, 9 is a cover for preventing scattering of cleaning liquid and the like.

With such a configuration, the disk A, which is a processed body whose surface is polished, is conveyed onto the support portion 44 of the processed body holding body 4 by an automatic loading vacuum device and formed into a donut shape. By inserting the center hole of the disc A into the cleaning shaft 3, the peripheral edge of the disc A is held between the stoppers 7 protruding from the upper surface, and the vacuum pad disposed between the stoppers 7 is held. The disk A is adsorbed and held by 8. As a result, the disk A is securely held between the upper and lower nozzles 32, 32 of the cleaning shaft 3. Therefore, the rotary drive device 5 is started to rotate the workpiece holder 4 at high speed via the transmission mechanism 51, and at the same time, the switching device 33 of the cleaning shaft 3 is switched to the cleaning liquid side, whereby the flow passage 31 is obtained. The cleaning liquid passes through the nozzles 32, 32 and ejects a powerful jet jet toward the front and back surfaces of the disk A. At that time, since the disk A is rotated at a high speed of 500 to 600 rpm by the rotation driving device 5, the cleaning liquid jetted from the upper and lower nozzles 32, 32 has a centrifugal force from the center of the disk A. The high-speed rotational force causes a swirling flow toward the outer periphery to flow out, so that the polishing liquid, sludge, and the like adhering to the disk A are forcibly washed away so as to be swept. Then, by switching the switching device 33 to the clean-air side, air is jetted through the flow passage 31 from the nozzles 32, 32 at the top and bottom of the tip toward both the front and back surfaces of the disk A. At that time, since the disk A is rotated by the rotary drive device 5 at a higher speed of 1000 rpm, the clean air jetted from the upper and lower nozzles 32, 32 removes the cleaning liquid slightly remaining on the disk A. Due to the swirling flow of the jet jet directed toward the outer circumference due to the high-speed rotational force and the centrifugal force, the striped pattern due to the stains of the dry cleaning liquid remaining on the surface of the disk A can be surely removed, and the surface can be finished beautifully. .

The processed body of the present invention is not limited to a disk, and may be a disk shape instead of a donut shape. In that case, the cleaning shaft is configured not to be inserted into the disc, but to be disposed above and below the cleaning shaft. Further, the material may be an aluminum plate, a glass plate, a crystallized glass plate, a glassy carbon plate or the like.

[0008]

[Effect of the invention]

 As described above in detail with respect to the embodiments, according to the present invention, the cleaning liquid ejected from the nozzle is rotated by rotating the processing body at a high speed when cleaning the polishing liquid or sludge attached to the processing body such as the disk. Due to the centrifugal force and the high-speed rotational force, the jet flow of swirl causes a swirling flow toward the outer peripheral direction, so that the polishing liquid, sludge, etc. adhering to the workpiece can be forcibly washed away. After further rinsing, the cleaning liquid from the nozzle is switched and jets clean-air to blow away a small amount of polishing liquid and sludge remaining, ensuring a striped pattern due to stains etc. on the dry cleaning liquid remaining on the surface of the work piece. It has an excellent effect that it can be removed into a beautiful surface to improve the inspection yield.

[Brief description of the drawings]

FIG. 1 is a vertical sectional front view of the present invention.

[Explanation of symbols]

 1 Main Body 2 Mounting Base 21 Bottom 22 Drive Space 23 Bearing Space 3 Cleaning Shaft 31 Flow Path 32 Nozzle 33 Switching Device 4 Workpiece Holder 41 Fitting Hole 42 Bottom Plate 43 Bearing Body 44 Support 5 Rotation Drive 51 Transmission mechanism 7 Stopper 8 Vacuum pad 81 Flow path 82 Annular groove 83 Airtight means 84 Vacuum device

Claims (1)

[Utility model registration claims] 1. A cleaning shaft having a nozzle erected on the main body side, a switching device for switching and ejecting a cleaning liquid such as a pure aqueous solution and clean-air from a tip nozzle of the cleaning shaft, and a rotation shaft rotatable on the cleaning shaft. The workpiece holder that holds the workpiece such as the disk fitted to the blade and the rotary drive that rotates the workpiece holder at a high speed are attached to the polishing surface of the workpiece that rotates at a high speed from the tip nozzle of the cleaning shaft. A polishing process for discs, characterized in that the cleaning liquid is jetted, the polishing liquid, sludge, etc. are washed outward by centrifugal force, and the cleaning surface of the workpiece is washed by jetting clean air with a switching device. Body cleaning device.