JP3032401B2 - Ink jet recording head, manufacturing method thereof, and recording apparatus - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a recording liquid, generally called ink, which is discharged as small droplets from a discharge port (orifice).
The present invention relates to an ink jet recording head that flies and attaches these small droplets to a recording surface to perform recording, in particular, an ink jet recording head having an improved ejection port formation end face, a manufacturing method thereof, and a recording apparatus using the same.

[0002]

2. Description of the Related Art In recent years, with the spread of computers, various applied devices have been actively developed. Especially copiers,
There is a remarkable development and spread of office equipment for office automation such as facsimile, word processor and other so-called personal computers. In these office machines, a so-called printer as an apparatus for outputting processed data or text is an essential device.

Conventionally, as such a printer, an impact type printer such as a wire dot printer or the like,
Non-impact printers such as laser beam printers and thermal transfer printers using the electrostatic copying method are used. Printers using the ink jet recording method have recently attracted attention for their excellent features, and various types of printers have been developed. Have been.

It is needless to say that it is desirable that the prints and images by the printer be beautiful and fine, and that the above-mentioned various printer-related technologies are aimed at. Therefore, as one form of an ink jet recording head, there is one in which an ink ejection nozzle is formed small and ink is ejected at high speed and high density. Further, as another type of ink jet recording head, it is conceivable to arrange the ink discharge nozzles in a small and close manner, and in order to realize this, a large number of discharge ports are formed by a fine processing method using a so-called microlithography technique. There is a known method of manufacturing a close contact.

FIG. 7 shows a configuration example of a conventional ink jet recording head manufactured by such a method. In FIG. 1, reference numeral 1 denotes a first substrate formed of, for example, a silicon wafer or the like, and 2 denotes a surface layer formed on the surface of the first substrate 1 by, for example, SiO ₂ or the like. Reference numeral 3 denotes a nozzle wall formed by a method such as lithography, 4 denotes a second substrate formed of, for example, a glass plate, 5 denotes an adhesive layer for bonding the second substrate 4 to an upper portion of the nozzle wall 3, and 6 denotes a nozzle. Are the ink ejection ports. In such a recording head, for example, the nozzle wall 3 has a height of 25 μm and a width of 20 μm, and the discharge port 6 is extremely finely processed so as to have the same size as the nozzle wall 3.

FIGS. 8 (A) and 8 (B) show side sectional views along the nozzle direction of the ink jet recording head shown in FIG. 7, showing two examples of a state where the ink 7 is ejected to form an ink droplet 8. FIG. Is shown. FIG. 8A shows the discharge port forming end surface 9.
8 is a state in which the ink droplets are not wet with the ink and the ink droplets are ejected in the direction perpendicular to the end face 9 (the direction of arrow X in the figure).
(B) shows a state in which an ink droplet is about to be ejected in a deflected direction (the direction of arrow Y in the figure) because a part of the nozzle end surface 9 is wet with ink before ejection.

The wetting of the discharge port forming end face 9 is caused not only by the case where the ink spreads when the ink is ejected, but also by the apparatus in which the ink jet recording head is mounted on the carriage to perform the recording while the head performs the printing. The ink 7 in the nozzle overflows to the end 9 of the nozzle tip when the carriage moves to the end of the recording medium or when the carriage reaches the end of the recording medium and performs a return operation. is there. In the case where the ink that has leaked and wet the end face 9 returns to the inside of the ejection port again or when the area around the ejection port is uniformly wet, the ejection direction of the ink droplet 8 is changed as shown in FIG. And the ejection state, that is, the recording state is stabilized.

However, in the conventional ink jet recording head, due to the difference in wettability between the second substrate 4 and the adhesive layer 5, the nozzle forming end face 9 is unevenly wet, or
If an uneven state of ink is left on the end face 9 after being wet, an unstable ejection state as shown in FIG. 8B occurs. That is, there is a strong correlation between the wetting of the ejection end face and the surface state of the end face, and if the surface state of the ejection port forming end face is not appropriate, an unstable ejection state is brought about, so that a good recording state can be maintained. However, the recording quality is also deteriorated.

This is a problem that can occur not only in the ink jet recording head shown in FIG. 7 but also in the ink jet recording head of the first embodiment. However, as in the ink jet recording head shown in FIG. When the outlets are provided close to each other, the wetting occurs around the discharge ports adjacent to each other, so that the wet portion is connected between the adjacent discharge ports, and the influence is further increased. As a result, the recorded characters are distorted or the image is disturbed, and the recording quality and the image quality are further adversely affected. Therefore, the ejection port end face is more strictly controlled so as not to cause these adverse effects. There is a need.

As this method, it is conceivable to apply a water-repellent surface treatment to the end face of the discharge port so as to prevent ink from being wetted by repelling the ink. Conventionally, many proposals have been made to provide a water-repellent material on a surface having an ink ejection port (ejection port forming end face). For example, there is a method of applying a water-repellent fluororesin or the like, or a method of coating a water-repellent organic polymer or the like by a vapor deposition method or a sputtering method. However, the film formed by the above method has insufficient adhesion to the end face of the discharge port, and thus has a problem in durability that the film may peel off from the end face of the discharge port.

Furthermore, recent inkjet recording is required to have good paper selectivity. That is, printing can be performed on any type of paper. However, on some papers, paper dust and paper dust are liable to be generated, which adhere to the discharge port surface of the ink jet recording head and deteriorate printing. Therefore, it is necessary to remove paper waste and paper dust. Therefore, it has been proposed that the blade is periodically brought into contact with the end face of the discharge port to remove paper waste and paper dust. However, the conventional method of providing a water-repellent material as described above has insufficient adhesion and low wear resistance of the water-repellent material, so that the blade material is limited. Therefore, it is necessary to remove the restriction of the blade material in order to increase the degree of freedom of design and reduce the price. Therefore, it is necessary to impart water repellency excellent in abrasion resistance to the discharge port surface.

Further, the above-mentioned paper waste, paper dust, etc. were more easily adhered when the end face of the discharge port was insulative. In other words, it is presumed that the end face of the discharge port is easily charged due to its insulating property, and thereby paper dust and paper dust are attracted. Therefore, it was necessary to make the end face of the discharge port conductive.

By the way, the recovery system of the conventional ink jet recording head is often of a non-contact type at the end face of the discharge port, but is almost non-contact type especially in a type of ink jet recording head having a water repellency at the end face of the discharge port. . That is, the conventional method of disposing a water-repellent material as described above has insufficient adhesion, and the water-repellent material has low abrasion resistance, so it has to be a non-contact type. This is because the recovery system impairs the water repellency of the end face of the discharge port. However, the recovery system is more reliable of the contact type. Therefore, it is possible to use a contact-type recovery system only by imparting water repellency having excellent wear resistance to the end face of the discharge port. As described above, in order to maintain a reliable recovery system, it is necessary to impart water repellency having excellent abrasion resistance to the end face of the discharge port.

Conventionally, attempts have been made to adjust the surface shape by coating the end face of the ink ejection port, that is, to provide a coating layer on the end face to achieve a uniform surface and stabilize the ejection of recording liquid droplets. I have. However, it is technically difficult to perform coating or surface treatment after forming the discharge port without reaching the inside of the discharge port, and the coating material intrudes into the discharge port. In some cases, the supply of the liquid to the ink is hindered, resulting in an unstable ejection state. This phenomenon has been almost negligible in the past. However, in recent years, the density has been increased in order to improve the print quality. Further, since such an adverse effect is feared, materials that can be used for coating or surface treatment are limited, and the effect of the surface treatment may be reduced in some cases. Patterning by photolithography,
Even if a mask or the like is used to prevent entry into the inside of the discharge port and surface treatment is performed only on the end face of the discharge port, mask alignment is complicated, and the material to be processed enters the inside of the discharge port due to the patterning material or the floating of the mask. There was a problem.

Japanese Patent Application Laid-Open No. Sho 63-122559 proposes a method in which a substance is caused to fly from an inclined direction with respect to a normal line of a discharge port and adhere to an end face. In the electron beam evaporation and sputtering methods, the straightness is insufficient, and thus, the prevention of the adhesion inside the discharge port is incomplete. Also, in the first place, the deposition method is a method in which the target material is hit by evaporation or ions of the material, and the hit material hits the workpiece, so that the collision energy of the material with respect to the workpiece is also limited, The adhesion strength of the film adhered to the end face of the discharge port was not perfect.

On the other hand, the ion implantation method is a method in which high-energy ions collide with a workpiece to be physically embedded, and the implantation energy and the linearity are far superior to the vapor deposition method and the sputtering method. Since this method is used, it is possible to perform a surface treatment that has no sticking to the inside of the discharge port and has high durability of the water repellent effect at the end of the discharge port.

[0017]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and in use, it is always possible to discharge a substantially uniform amount of liquid in a predetermined direction during use. It is an object of the present invention to provide an ink jet recording head which can sufficiently cope with high-speed recording, can cope with a high-density nozzle and small droplets, and is also durable.

It is another object of the present invention to provide an ink jet recording head capable of performing stable ejection without paper selectivity. Therefore, in the present invention, in order to impart water repellency and conductivity to the ejection port forming end face, and to improve the hardness of the ejection port forming end face of the ink jet recording head by ion implantation, the ejection port is used. Of the discharge port forming end face
Ion implantation containing fluorine is performed from a direction inclined with respect to the normal line .

[0019]

The above object is achieved by the present invention described below. That is, the present invention provides a recording head for an ink jet recording apparatus which has an ink flow path, discharges and flies ink droplets using one end of the flow path as an ejection port, and performs recording by attaching the droplets to a recording surface. In the manufacturing method of (1), when ions are implanted into the formation end face of the discharge port by an ion implantation method, ions containing fluorine are implanted from a direction inclined with respect to a normal to the discharge port formation end face of the discharge port. A method of manufacturing an ink jet recording head for imparting water repellency to an outlet forming end face , and an ink jet recording head manufactured by the method.

According to another aspect of the present invention, there is provided a recording head for an ink jet recording apparatus having an ink discharge energy generating element, wherein the energy generating element generates heat by applying electric energy to cause a change in state of the ink to perform discharge. An ink jet recording head which is a heat transducer, and a full line type ink jet recording head in which the ink ejection ports have a plurality of ejection ports over the entire width of a recording area of a recording medium; The recording head is provided with an ink ejection port for ejecting ink facing a recording surface of a recording medium.

In the present invention, the following improvements can be brought about by imparting water repellency to the formed end face of the ink discharge port by surface modification. (1) By preventing water-repellent material from entering the nozzle,
The ink ejection state is stabilized. (2) Printing durability is improved. (3) The durability of the blade for removing paper waste and paper dust is increased. (4) A contact-type recovery system becomes possible. (5) The hardness is increased by the surface modification, and the above effect is further improved. (6) By imparting conductivity to the discharge port surface, adhesion of paper waste and paper dust to the discharge port forming end surface is prevented.

Hereinafter, the present invention will be described in detail. First, the outline of the ion implantation method will be described. The ion implantation method
This is a technique of irradiating ions accelerated to 10 to several hundreds KeV onto a solid surface to control physical properties of the solid surface. As an application example of the ion implantation method, it is practically used for forming a diffusion layer by impurity doping of a semiconductor element, adjusting a carrier concentration, and the like. In addition, studies are underway for the purpose of modifying the metal surface (for example, increasing the hardness of a drill blade or the like and improving the wear properties).

FIG. 6 shows a typical example of the structure of an ion implantation apparatus. Ions are produced and extracted by the ion source 11 (for example, DC or RF is introduced by introducing a gas of about 10 ⁻³ Torr).
Drawn from the plasma generated by the discharge). Since the extracted ion beam contains various components such as atomic ions, molecular ions, and ions from residual gas, only necessary ion species are extracted by the mass analyzer 12.

The mass spectrometer 12 is not always necessary, and is hardly installed in the case of a surface reforming apparatus for a metal surface, but is installed in the case of a semiconductor device. The required ion species selected by the mass analyzer 12 then passes through a beam slit 13, an accelerator 14, a lens 15, a neutral beam trap 20, and a gate 16, and then the ion beam is converted into an X-axis by a Y scanner 17 and an X scanner 18. , A substrate 1 such as a wafer scanned on the Y axis
9 is scanned uniformly. Depending on the device, the sample stage may be rotated to perform uniform injection.

FIG. 1 shows an example of an ink jet recording head for modifying an ejection port forming end face by an ion implantation method using the above-described ion implantation apparatus. In the figure, 1 is the first
2 is a surface layer, 3 is a discharge nozzle wall, 4 is a second substrate, 5 is an adhesive layer, and 6 is a discharge port. In the present invention, the discharge port forming end face 9 is ion-implanted by an ion implanter to modify the end face 9.

First, the provision of water repellency on the discharge port forming end face will be described. CF ₄ , C ₂ F ₆ , C
There are all kinds of gases containing at least C and F, such as HF ₃ , which are gaseous under normal pressure or reduced pressure, and combinations of a gas containing F, such as F ₂ + CH ₄ , and a gas containing C. Further, when the material to be ion-implanted contains C, only the gas containing F may be used.

As the ion species, CF ₃ ⁺ , C ₂ F ₆ ⁺ , C
_It is preferable to use all of the ion species containing C and F generated from the above-mentioned ion source, such as ₂ F ₃ ⁺ ions, and a combination of F ⁺ ions and C ⁺ ions. Further, when the material to be ion-implanted contains C, only F ⁺ ions may be used.

The ion implantation amount is 1 × 10.¹⁴~ 1 ×
10¹⁸cm^-2Is preferably 1 × 10 ¹⁵~ 1 × 10¹⁷cm
^-2Is particularly preferred. Dose amount is 1 × 10¹⁴cm^-2than
If the amount is small, the water repellency may be insufficient.
Size is 1 × 10¹⁸cm^-2If the temperature exceeds
May be inconvenient.

The ion acceleration energy at the time of implantation is preferably 5 to 100 KeV, particularly preferably 10 to 60 KeV. If it exceeds 100 KeV, the temperature of the substrate rises, and ions are implanted deep inside, which is not preferable in some cases. If it is less than 5 KeV, the stability of ion acceleration is poor.

At the time of ion implantation, heat treatment may be performed to enhance the water repellency. The material that can impart water repellency by ion implantation is any material that constitutes an ink jet recording head, for example, semiconductors (such as Si), glass, ceramics, oxides of semiconductors, organic compounds such as organic polymers and organic resins, or , An inorganic compound. The ion implantation method can impart other properties (such as increased hardness and antistatic property) by changing the ion species while maintaining water repellency.

To increase the hardness, N is used as an ion source._Two Moth
S, SiF_Four , SiCl_Four Atmospheric pressure containing Si, etc., or
Everything that is gaseous under reduced pressure, and BCl_Three + NH_Three 
Preference is given to gases containing elements that form isonitrides and nitrogen gas.
New N as ion species⁺ Ion, Si⁺ Ion, S
iCl_Three ⁺All ions containing Si such as ions, B⁺ Io
N⁺ Contains nitride-forming elements such as ion combinations
And a combination of nitrogen ions and nitrogen ions. note
The entry conditions are the same as in the case of providing the water repellency. Also, vomit
As an ion source to impart conductivity to the end face of the outlet
Is (C_Two H_Five ) _Three Al, WF₆ Atmospheric pressure with metal compounds, etc.
Alternatively, all those which are gaseous under reduced pressure can be used.
Al as the ON type⁺ , W⁺ Ions containing metals such as
Can be used. The injection conditions are as described above for the case of imparting water repellency.
Is the same as

FIGS. 10A, 10B and 10C are schematic sectional views showing three examples of an ink jet recording head to which the method of the present invention is applied. In FIG. 10, reference numeral 3 denotes a nozzle tube or nozzle wall, 2 denotes a surface layer obtained by treating the surface of the nozzle tube or nozzle wall 3 by the following steps, and 26 denotes a liquid flow path communicating with the discharge port 6. In this example, the surface layer 2 is formed by an ion implantation method, and the incident direction N2 of the ions to be implanted at this time is determined by the formation of the ejection port 6 of the ejection port 6.
The end surface is inclined with respect to the normal line N1. This N1
And N2 do not need to be strictly limited,
It is generally in the range of 45 ° <θ <90 °.

The present invention particularly provides an excellent effect in a recording head and a recording apparatus of an ink jet recording system in which flying droplets are formed by utilizing thermal energy to perform recording, among the ink jet recording systems. For a representative configuration principle, see, for example, US Pat.
Nos. 3129 and 4740796, and it is preferable that the present invention be performed using these basic principles. This recording method can be applied to both on-demand type and continuous type. This recording method will be briefly described. The liquid (ink) may exceed the nucleate boiling phenomenon and generate a film boiling phenomenon in the liquid (ink) in accordance with the recorded information in the electrothermal transducer arranged corresponding to the sheet or the flow path holding the liquid (ink). By applying at least one drive signal for giving a rapid temperature rise, thermal energy is generated to cause film boiling on the heat acting surface of the recording head. As described above, since bubbles corresponding to the drive signal applied to the electrothermal converter from the liquid (ink) on a one-to-one basis can be formed, it is particularly effective for an on-demand type recording method. By discharging the liquid (ink) through the discharge holes by the growth and contraction of the bubbles, at least one small droplet is formed.

When the driving signal is formed into a pulse shape, the growth and shrinkage of the bubble are performed immediately and appropriately, and the ejection of the liquid (ink) having particularly excellent responsiveness can be achieved, which is more preferable.
The driving signal in the form of a pulse is disclosed in US Pat.
Nos. 3,359 and 4,345,262 are suitable. If the conditions shown in US Pat. No. 4,313,124 are adopted for the rate of temperature rise of the heat acting surface, more excellent recording can be performed.

As the configuration of the recording head, a configuration combining a discharge hole, a liquid flow path, and an electrothermal converter (a linear liquid flow path or a right-angled liquid flow path) as disclosed in the above-mentioned specifications. And US Pat. No. 4,558,333 and US Pat.
As shown in Japanese Patent No. 459600, the present invention also includes a configuration in which the heat acting portion is disposed in a bent region.
In addition, Japanese Unexamined Patent Publication No. 59-123670 discloses a configuration in which a common slit is used as a discharge hole of an electrothermal transducer for a plurality of electrothermal transducers, or an aperture that absorbs pressure waves of thermal energy is discharged. Unexamined Japanese Patent Publication No. Sho 59-59 discloses a configuration corresponding to
The present invention is also effective as a configuration based on -138461.

Further, as a recording head in which the present invention is effectively used, there is a full-line type recording head having a length corresponding to the maximum width of a recording medium on which a recording apparatus can record.
This full-line head may be a full-line configuration by combining a plurality of recording heads as disclosed in the above specifications, or may be a single full-line recording head integrally formed. good. In addition, a replaceable chip-type recording head that can be electrically connected to the apparatus main body or supplied with ink from the apparatus main body by being attached to the apparatus main body, or provided integrally with the recording head itself The present invention is also effective when a cartridge type recording head is used.

It is preferable to add recovery means for the print head, preliminary auxiliary means, and the like to the recording apparatus of the present invention since the recording apparatus of the present invention can be further stabilized. If these are enumerated concretely,
Pre-heating means for the recording head, capping means, cleaning means, pressurizing or suction means, an electrothermal transducer or a heating element different from this, or a combination thereof, and preliminary ejection for performing ejection different from recording It is also effective to add a means for performing a mode in order to perform stable recording.

Further, the recording mode of the recording apparatus is not limited to a mode for recording only a mainstream color such as black, but may be a mode in which a recording head is integrally formed or a configuration in which a plurality of recording heads are combined. However, the present invention is also very effective for an apparatus provided with at least one of multiple colors of different colors or full color by mixing colors.

In each of the embodiments of the present invention described above, a case where a liquid ink is used is used. In the present invention, an ink which is solid at room temperature or an ink which becomes soft at room temperature is used. I can do it. In general, in the above-described ink jet device, the temperature of the ink itself is controlled within a range of 30 ° C. or more and 70 ° C. or less to control the temperature so that the viscosity of the ink is in a stable ejection range. It is sufficient if the ink is in a liquid state.

In addition, an excessive temperature rise of the head and the ink due to thermal energy is positively prevented by using it as energy for changing the state of the ink from a solid state to a liquid state, or the purpose is to prevent evaporation of the ink. Alternatively, an ink that solidifies in a standing state may be used. In any case, the first time the heat energy is applied, such as the one in which the ink is liquefied and ejected as ink droplets by the application according to the recording signal of the thermal energy or the one which already starts to solidify when reaching the recording medium Use of an ink having a liquefying property is also applicable to the present invention. Such an ink is disclosed in JP-A-54-56847 or JP-A-60-71.
As shown in No. 260, it may be configured to be opposed to the electrothermal converter in a state of being held as a liquid or solid substance in the concave portion or through hole of the porous sheet.

In the present invention, the most effective one for each of the above-mentioned inks is to execute the above-mentioned film boiling method. FIG. 9 is an external perspective view showing an example of an ink jet recording apparatus (IJRA) in which the recording head obtained according to the present invention is mounted as an ink jet head cartridge (IJC).

In FIG. 9, reference numeral 120 denotes an ink jet head cartridge (IJC) having nozzle groups for discharging ink while facing the recording surface of the recording paper sent on the platen 124. Reference numeral 116 denotes a carriage HC for holding the IJC 120. The carriage HC is connected to a part of the drive belt 118 for transmitting the driving force of the drive motor 117, and is provided with two guide shafts 119A and 119 arranged in parallel with each other.
By making it slidable with B, reciprocal movement over the entire width of the recording paper of the IJC 120 becomes possible. Reference numeral 126 denotes a head recovery device, which is disposed at one end of the movement path of the IJC 120, for example, at a position facing the home position. The head recovery device 126 is operated by the driving force of the motor 122 via the transmission mechanism 123, and the IJC 120 is capped. In connection with the capping of the cap unit 126A of the head recovery device 126 to the IJC 120, the ink is suctioned by a suitable suction unit provided in the head recovery device 126 or by an appropriate pressurizing unit provided in the ink supply path to the IJC 120. Discharge recovery processing such as removing ink with increased viscosity in the nozzles by performing ink pressure feeding and forcibly discharging ink from the discharge ports is performed. Also, by performing capping at the end of recording or the like, IJC is protected. Reference numeral 130 denotes a blade disposed on a side surface of the head recovery device 126 and formed as a wiping member made of silicone rubber. The blade 130 is held in a cantilever form by a blade holding member 130 </ b> A, and is operated by a motor 122 and a transmission mechanism 123 similarly to the head recovery device 126, so that engagement with the ejection surface of the IJC 120 is enabled. Thereby, at an appropriate timing in the recording operation of the IJC 120 or the head recovery device 12
6 after the ejection recovery process using IJC6
The IJC 120 is made to protrude into the movement path of the IJC 120 to wipe off dew condensation, wetness, dust or the like on the ejection surface of the IJC 120 with the movement of the IJC 120.

[0043]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below with reference to embodiments based on the drawings, but the present invention is not limited to or limited to these embodiments.

Embodiment 1-1 A head provided with a heating element as disclosed in JP-A-55-128470 in FIG.
With respect to m, the discharge port forming end face 9 has C ₂ as an ion.
F ₄ ⁺ ions are accelerated at an energy of 20 KeV and dose is 1 ×
Under conditions of 10 ¹⁶ cm ^-2, with respect to the normal N1 of the discharge port forming end faces, it was injected inclined incident direction N2 ions (Fig. 1
0). Although there is no need to strictly limit the angle θ between N1 and N2, it is preferable that the angle be approximately 45 ° <θ <90 °. This time, θ = 70 °.

As a first substrate, SiO ₂ was formed as a lower layer on a silicon wafer 1, and a heating element (discharge pressure generating element) was formed thereon. Then, a nozzle wall 3 was formed on the photosensitive acrylic resin by photolithography. Acrylic resin was applied as an adhesive layer 5 to a second glass substrate 4 and bonded to the nozzle wall 3 by bonding. Finally, the first substrate 1, the nozzle wall 3, and the second substrate 4 were cut at the same time to form the discharge ports 6. There are four types of materials, silicon, SiO ₂ , acrylic resin, and glass, on the discharge port surface, and the discharge port forming end face 9 made of these materials is used.
Was modified under the above conditions.

Example 1-2 In the same manner as in Example 1-1, the discharge port forming end face of the head was formed by applying C ⁺ ions as ions to the discharge port forming end face at an acceleration energy of 20 KeV and a dose of 1 × 10 ¹⁶ cm ^−2. Normal N
1 was implanted with the ion incident direction N2 inclined. Although there is no need to strictly limit the angle θ between N1 and N2, it is preferable that the angle be approximately 45 ° <θ <90 °. This time, θ = 70 °. Next, F ⁺
Ion is accelerated at energy of 20 KeV and dose is 2 × 10
^{The same} injection was performed under the condition of ¹⁶ cm ^-2 .

Example 1-3 In the same manner as in Example 1-1, C ₂ F ₄ ⁺ ions were applied as ions to the end face of the head where the ejection openings were formed at an acceleration energy of 20 KeV and an energy of 20 KeV.
Under the condition of a dose of 1 × 10 ¹⁶ cm ⁻² , ions were implanted with the ion incident direction N2 inclined with respect to the normal N1 to the end face of the discharge port. Although there is no need to strictly limit the angle θ between N1 and N2, a range of approximately 45 ° <θ <90 ° is preferable. In this case, θ = 70 °. Next, N ⁺ ions are used as ions at an acceleration energy of 20 KeV and a dose of 2
It was similarly implanted under the condition of × 10 ¹⁶ cm ^-2 .

Example 1-4 In the same manner as in Example 1-1, C ₂ F ₄ ⁺ ions were applied as ions to the end face of the head where the ejection openings were formed at an acceleration energy of 20 KeV,
Under the condition of a dose of 1 × 10 ¹⁶ cm ⁻² , ions were implanted with the incident direction N2 of the ions inclined with respect to the normal N1 to the end face of the discharge port. Although it is not necessary to strictly limit the angle θ between N1 and N2, a range of approximately 45 ° <θ <90 ° is preferable.
This time, it was performed at θ = 70 °. Next, Al ⁺ ions are used as ions, at an acceleration energy of 20 KeV and a dose of 1 × 10 ^15.
The same injection was performed under the condition of cm ⁻² .

Example 1-5 In the same manner as in Example 1-1, an ion
As C_Two F_Four ⁺Ion accelerates energy 20 KeV,
Dose 1 × 10¹⁶cm^-2Method of the discharge port forming end face under the condition of
The ion implantation direction N2 is inclined with respect to the line N1 for implantation.
Was. The angle θ between N1 and N2 needs to be strictly limited.
However, the range of approximately 45 ° <θ <90 ° is preferable,
This time, it was performed at θ = 70 °. Then N as an ion⁺ I
Turn on acceleration energy 20 KeV, dose 1 × 10¹⁶
cm^-2Was injected in the same manner. In addition, Al ions
⁺ Ion is accelerated at 20 KeV and dose is 1 × 1
0 ¹⁵cm^-2Was injected in the same manner.

Embodiments 1-1 to 1-5 are embodiments of the present invention for an edge-star type ink jet recording head, but can be applied to a side-star type ink jet recording head. Hereinafter, the embodiment will be described.

First, as shown in FIG. 4, an orifice plate 10 made of polysulfone and a discharge port 6 is drilled with a laser, ions are implanted into the orifice plate surface under the following conditions, and the surface (discharge port formation) is formed. The end face 9 ′) is modified (see FIG. 5). Next, the orifice plate was adhered to an ink jet recording head substrate on which nozzle walls and the like were formed to produce an ink jet recording head (see FIG. 3).

Example 2-1 Ion implantation into the surface of an orifice plate was performed in Example 1-1.
Performed under the same conditions as

Example 2-2 Ion implantation into the surface of an orifice plate was performed in Example 1-2.
Performed under the same conditions as

Example 2-3 Ion implantation into the surface of an orifice plate was performed in Example 1-3.
Performed under the same conditions as

Example 2-4 Injection of ions into the surface of the orifice plate was performed according to Example 1-4.
Performed under the same conditions as

Example 2-5 Ion implantation into the orifice plate surface was performed according to Example 1-5.
Performed under the same conditions as

For each of the heads manufactured as described above,
The following conditions (signal pulse conditions) Applied pulse width 10 μsec Pulse frequency 3 kHz Applied energy 0.02 mJ / pulse (per heating element) (Ink composition) Water 70% Diethylene glycol 26% Direct black 4% An ink ejection test was performed. Excellent recording with stable ejection and impact point precision over 10 ⁹ pulses or more could be performed.

In the ink jet recording head having the discharge port forming end face treated by the method of this embodiment, the ink discharge port forming end face is not unevenly wet by the ink, and the discharge direction of the ink droplet is stable. Excellent printing quality and image quality can be obtained.

A printing test was conducted with the ink jet recording head of this embodiment mounted on a printer. As a result, the strength of the water repellent surface of the blade for removing paper residue and paper dust was improved, and the abrasion resistance was improved. As a result, there is no inconvenience in ejection and printing even with ink ejection ports using various materials. Therefore, the degree of freedom in design is improved and the cost is reduced. In addition, even in a test of a contact type recovery system, it is found that there is no decrease in water repellency, and a type in which the recovery system comes into contact with the discharge port surface can be used. Therefore, it is possible to employ a recovery system that can reliably recover.

Further, in Examples 1-3 to 1-5 and 2-3 to 2-5, other characteristics were imparted in addition to the water repellency of the discharge port forming end face. . In the heads of Examples 1-3 and 2-3, the water repellency was imparted with C ₂ F ₄ ⁺ ions, and N ⁺ ions were further implanted, whereby the nozzles at the ejection port forming end face formed of resin or the like were used. The mechanical strength of walls, adhesive layers, orifice plates, etc. is improved. Therefore, Examples 1-1, 1-2, and 2
-1 and 2-2.

In the heads of Examples 1-4 and 2-4, water repellency was imparted by using C ₂ F ₄ ⁺ ions, and further, Al ⁺
The conductivity is imparted to the discharge port surface by implanting ions. As a result, the discharge port surface was not charged by static electricity, and paper dust and paper dust were less likely to adhere. Thereby, printing defects due to paper waste and paper dust were improved. In the heads of Examples 1-5 and 2-5, the effect was further enhanced by the synergistic effect of the combination of Examples 1-3 and 1-4 and 2-3 and 2-4.

Using this head, the following conditions (signal pulse conditions) Printing pulse: 10 μsec Pulse frequency: 3 kHz Printing energy: 0.02 mJ / pulse (heating element 1
Pieces per) results of the ink ejection tested were able to perform stable ejection and impact point accurate excellent recording for more than 10 ⁹ times.

Comparative Example 1 The case where ions were implanted in a direction perpendicular to the end face of the discharge port formation is shown below.

[0064]

[Table 1] Example A: 1-1 to 1-5, and 2-1 to 2-5.

Evaluation ：: Good printing ×: Poor printing (distortion is noticeable).

Comparative Example 2 A fluororesin “DEFENSA” was added to the head prepared in Example 1-1.
7710 "(manufactured by DIK) was formed on the ejection port surface by a transfer method using a rubber-like elastic material.

Next, the following evaluations were made for each of the heads manufactured as described above. (1) Blade wiping test Test method: Using a urethane blade, the blade was wiped a plurality of times on the discharge port surface, and then printed to evaluate.
Table 2 shows the results.

[0068]

[Table 2] Example A: Examples 1-1, 1-2, 1-4, 2-1 and 2
-2, and 2-4 Example B: Examples 1-3, 1-5, 2-3, and 2-5 Level 1: Number of times of wiping 2000 times Level 2: Same as above 10000 times Level 3: Same as above 30000 times Evaluation ○ : Good printing ×: poor printing (distortion is noticeable).

(2) Recovery system test Test method: Sponge (trade name: Velklin) was pressed against and rubbed, recovery was performed multiple times, and printing was performed after recovery. Table 3 shows the results.

[0070]

[Table 3] Example A: Examples 1-1, 1-2, 1-4, 2-1 and 2
-2, and 2-4 Example B: Examples 1-3, 1-5, 2-3, and 2-5 Level 1: Number of recovery times 100 Level 2: Same as above 500 Level 3: Same as above 1000 times Evaluation ○ : Good printing ×: poor printing (distortion is noticeable).

(3) Measurement of Electric Conductivity The electric conductivity of a portion whose surface was modified by ion implantation was measured. Table 4 shows the results.

[0072]

[Table 4]

[0073]

According to the present invention as described above, the present invention is when to modify the surface by implanting ions by ion implantation into the ejection side end surface in the ink jet recording head, the discharge of the discharge port
Including fluorine from the direction inclined to the normal to the
A method of implanting ion-free, according to such an ion implantation method, in order to be <br/> modification for imparting water repellency of the material of the discharge port forming end surfaces, the adhesion is very good. In addition, by selecting the ion species to be implanted, not only water repellency but also hardness enhancement and conductivity imparting can be easily achieved. In addition, it is possible to modify only the surface of the ejection port without entering the inside of the ejection port without requiring a complicated process such as masking the inside of the ejection port of the ink or performing careful cleaning after the surface treatment. Thereby, the printing quality can be improved even in a high-density small droplet head.

Since surface modification can be widely applied to any material, it is possible to effectively modify any material even if the discharge port forming end face is formed by combining different materials. I can do it. Further, the head manufactured by the above method can always be applied to a high-speed recording because a stable ejection can be obtained while always maintaining a substantially uniform fluid amount in a predetermined direction when used. A durable inkjet recording head can be provided.

Further, it is possible to provide an ink jet recording head capable of performing stable ejection without paper selectivity.
Specifically, by imparting the water repellency by the surface modification to the end face on which the discharge port is formed, the following points can be improved. (1) Printing durability. (2) Durability against blades for removing paper residue and paper dust. (3) Possibility of contact type recovery system. (4) Improved hardness of the modified surface. (5) Prevention of electrification on the discharge port surface (prevention of paper dust, paper dust, etc. from adhering to the discharge port forming end surface).

[Brief description of the drawings]

FIG. 1 is a schematic perspective view showing a head according to an embodiment of the present invention.

FIG. 2 is an explanatory view of a manufacturing process of a head according to an embodiment of the present invention.

FIG. 3 is a schematic perspective view showing a head according to another embodiment of the present invention.

FIG. 4 is a view illustrating a manufacturing process of a head according to another embodiment of the present invention.

FIG. 5 is an explanatory view of a manufacturing process of a head according to another embodiment of the present invention.

FIG. 6 is a conceptual diagram showing an example of an ion implantation apparatus used for implementing the present invention.

FIG. 7 is a schematic perspective view showing an example of a conventional head.

FIG. 8 is an explanatory diagram showing a discharge state of ink droplets.

FIG. 9 is a schematic perspective view showing an example of the recording apparatus of the present invention.

FIG. 10 is a schematic sectional view of an ink jet recording head to which the method of the present invention is applied.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 first substrate 2 surface layer 3 discharge nozzle wall 4 second substrate 5 adhesive layer 6 discharge port 7 ink 8 ink drop 9 discharge port formation end face 10 orifice plate 11 ion source 12 mass analyzer 13 beam slit 14 accelerator 15 lens 16 Gate 17 Y Scanner 18 X Scanner 19 Wafer (Substrate) 20 Neutral Beam Trap 26 Liquid Flow Path 40 Head 116 Carriage 117 Drive Motor 118 Drive Belt 119A Guide Shaft 119B Same as above 120 Inkjet Cartridge 122 Cleaning Motor 123 Transmission Mechanism 124 Platen 126 Head recovery device 126A Cap part 130 Blade 130A Blade holding member

Claims (9)

(57) [Claims] 1. A recording head for an ink jet recording apparatus which has an ink flow path, discharges ink droplets using one end of the flow path as an ejection port, and performs recording by attaching the droplets to a recording surface. in the manufacturing method, when injecting the ions by an ion implantation method to form end faces of the discharge port, the discharge port ejection
Including fluorine from the direction inclined with respect to the normal line of the outlet forming end face
A method for manufacturing an ink jet recording head, characterized by imparting water repellency to the ejection port forming end face by implanting ions. 2. The method according to claim 1, wherein the ion species of the ion implantation method is C
F ₃ ^+, and wherein the C of ₂ F ₆ ⁺ and C ₂ F ₃ ⁺ ions, but all ionic species containing C and F, or a combination of F ⁺ ions and C ⁺ ions, wherein Item 10. A method for manufacturing an ink jet recording head according to Item 1. 3. An ion source of the ionic species is CF ₄ , C
₂ F ₆ and CHF ₃ , containing at least C and F at normal pressure, or gaseous under reduced pressure, or F ₂ + CH ₄ ,
3. The method according to claim 2, wherein the method is a combination of a gas containing F and a gas containing C. 4. The method according to claim 1, wherein the ion implantation amount in the ion implantation method is 1 × 10 ¹⁴ to 1 × 10 ¹⁸ cm ⁻² . 5. The method for manufacturing an ink jet recording head according to claim 1, wherein an ion acceleration energy at the time of the ion implantation by the ion implantation method is 5 to 100 KeV. 6. A recording head for an ink jet recording apparatus which has an ink flow path, discharges ink droplets by using one end of the flow path as an ejection port, and performs recording by attaching the droplets to a recording surface. When ions are implanted into the formation end face of the discharge port by an ion implantation method, the discharge port formation end of the discharge port is
An ink jet recording head, characterized in that ions containing fluorine are implanted from a direction inclined with respect to the normal of the surface to impart water repellency to the end face of the discharge port. 7. A recording head for an ink jet recording apparatus having an ink ejection energy generating element, wherein the energy generating element generates heat by applying electric energy to cause a change in state of the ink and discharge the ink. The inkjet recording head according to claim 6, wherein 8. The ink jet recording head according to claim 6, wherein said ink ejection port is a full line type having a plurality of ejection ports over the entire width of a recording area of a recording medium. 9. An ink jet recording apparatus comprising at least a recording head and a member for mounting the head, wherein the head has an ink discharge port for discharging ink in a manner facing a recording surface of a recording medium. 7. An ink jet recording apparatus, which is the recording head according to 6.