JP3025624B2 - Surface profile measuring device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface shape measuring device for measuring the surface shape of a detection object by irradiating the object with slit light.

[0002]

2. Description of the Related Art Conventionally, for example, during the development stage of a vehicle, the surface shape of a manufactured prototype model has been optically measured.

FIG. 19 shows an example of this type of surface shape measuring device. In FIG. 19, the detection head 1 has a light projecting unit 2 composed of a laser diode and a light receiving unit 3 composed of a two-dimensional image sensor. The slit light reflected on the surface of the object is imaged by the light receiving unit 3 and an image signal is output. Controller 4
The light amount of the light projecting unit 2 of the detection head 1 is automatically corrected according to the amount of light received by the light receiving unit 3, and the image signal from the light receiving unit 3
/ D conversion and output to the host computer 5 as distance data. The host computer 5 measures the surface shape of the detection target based on the input distance data.

Here, a ROM is mounted on the controller 4, and a lookup table corresponding to the detection head 1 is stored in the ROM. This look-up table is created in advance so as to show a relationship between image data for a standard detection target and distance data.
Then, the controller 4 measures the surface shape of the detection target based on the conversion table stored in the ROM. Therefore, when a detection head 6 having a different detection field of view is used, the detection head 6
Is used, and the controller 7 is connected to the host computer 5 by an expansion board 8.

[0005]

However, in the above-mentioned prior art, it is necessary to prepare controllers 4 and 7 in which individual conversion tables are stored in correspondence with the plurality of detection heads 1 and 6. As the number of heads increases, the number of controllers increases, and the cost increases significantly. Further, in order to replace the detection head 6, it is necessary to reconnect the controller 7 connected to the detection head 6 to the host computer 5, and there is a disadvantage that it is difficult to automate the detection.

Further, different measurable ranges are set for the detection heads 1 and 6, respectively, and the positional relationship between the detection heads 1 and 6 is adjusted so that the detection target is located within the measurement range of the detection heads 1 and 6. However, it is difficult to visually position the detection heads 1 and 6 with respect to the detection target.
In this case, there is an example in which the information is displayed on the monitor of the host computer 5. However, in such a configuration, each time the measurement is started, the monitor is set to a monitor installed at a location away from the detection heads 1, 6. Must be confirmed one by one, which is extremely troublesome.

On the other hand, a semiconductor laser is generally used as the light projecting portion of the detection heads 1 and 6. However, since the life of the semiconductor laser is approximately 20,000 hours at rated use, the semiconductor laser is periodically used. Need to be replaced. In this case, the replacement time of the semiconductor laser varies depending on the light emission intensity.
Incorrect measurement or sudden measurement failure may occur.

The present invention has been made in view of the above circumstances, and has as its object to increase the number of detection heads in a configuration in which the surface shape of a detection target is measured by detection heads having different detection accuracy settings. Cost can be reduced and automatic measurement can be performed.Furthermore, it is possible to easily judge the suitability of measurement for an object to be detected. An object of the present invention is to provide a surface shape measuring device that can be confirmed.

[0009]

A surface shape measuring apparatus according to the present invention comprises: a light projecting section for projecting slit light on the surface of a detection target; and a light receiving section for imaging reflected slit light on the surface of the detection target. Providing multiple integrated detection heads,
Measuring means that can be connected to these detection heads and that measures the surface shape of the detection target based on the imaging state of the slit light by the light receiving unit of the detection head and a given conversion table is provided. A storage unit storing a plurality of conversion tables individually corresponding to the head; and providing the conversion unit corresponding to the detection head in the operating state among the plurality of conversion tables stored in the storage unit to the measurement unit. Means are provided (claim 1).

In addition, a plurality of detection heads are provided in which a light projecting section for projecting slit light on the surface of the detection object and a light receiving section for imaging the reflected slit light on the surface of the detection object are integrated. Measuring means that can be connected to the detection head and that measures the surface shape of the detection target based on the imaging state of the slit light by the light receiving unit of the detection head and a given conversion table is provided, and the detection head is individually provided. A plurality of storage means in which a corresponding conversion table is stored for each of the detection heads are provided, and these storage means are provided so as to be selectively mountable, and the conversion table stored in the mounted storage means is provided to the measuring means. An application means may be provided (claim 2).

In addition, there is provided a detecting head in which a light projecting unit for projecting slit light on the surface of the detection object and a light receiving unit for imaging the reflected slit light on the surface of the detection object are integrated. Measuring means for measuring the surface shape of the detection target based on the imaging state of the slit light by the light receiving unit and a predetermined conversion table is provided, and notification means for notifying the detection head of suitability of measurement for the detection target is provided. It may be provided (claim 3).

In addition, there is provided a detecting head in which a light projecting section for projecting slit light on the surface of the detection object and a light receiving section for imaging the reflected slit light on the surface of the detection object are integrated. Measuring means for measuring the surface shape of the detection target based on the imaging state of the slit light by the light receiving unit and a predetermined conversion table is provided, and a notifying means for notifying whether or not the light projecting unit can be used is provided on the detection head. (Claim 4).

[0013]

In the case of the surface shape measuring apparatus according to the first aspect, when slit light is emitted from the light projecting portion of the detection head to the detection target, the slit light is reflected on the surface of the detection target. The image is captured by the light receiving unit.

The assigning means provides the measuring means with a conversion table corresponding to the operating state detection head among the plurality of conversion tables stored in the storage means. Then, the measuring unit can measure the surface shape of the detection target based on the imaging state of the slit light by the light receiving unit and the conversion table given from the providing unit. Accordingly, in the configuration in which the surface shape of the detection target is measured by the detection head, even if the number of the detection heads increases, the cost can be suppressed and the automatic measurement can be performed.

In the case of the surface shape measuring device according to the second aspect,
A storage unit in which a conversion table corresponding to the detection head is stored among the plurality of storage units is attached to the providing unit. Then, the assigning unit gives the conversion table stored in the storage unit to the measuring unit, so that the measuring unit determines the surface shape of the detection target based on the imaging state of the slit light by the light receiving unit and the conversion table given from the adding unit. Can be measured. As a result, even if the number of detection heads increases, the cost can be suppressed and the automatic measurement can be performed.

In the case of the surface shape measuring device according to the third aspect,
The notifying means provided in the detection head notifies whether the measurement of the detection target is possible or not, so that it is possible to quickly determine whether the measurement of the detection target is appropriate based on the notification result of the notification means.

In the case of the surface shape measuring device according to claim 4,
The notifying unit provided in the detection head notifies the propriety of use of the light emitting unit, so that it is possible to determine whether the light emitting unit has reached the end of life based on the notification result of the notifying unit.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described below with reference to FIGS. FIG. 2 shows the overall configuration. In FIG. 2, a three-axis robot 12 is fixed on a surface plate 11. That is, the three-axis robot 12 is provided with the main body 13 on the surface plate 11 so as to be rotatable in the horizontal direction.
An arm 14 is provided rotatably in the vertical direction, and a wrist 15 is provided at the tip of the arm 14 so as to be rotatable about the central axis of the arm 14. Control device 16
Controls the turning positions of the main body 13, the arm 14, and the wrist 15 of the three-axis robot 12.

A first detection head 17 and a second detection head 18 are mounted on the wrist 15 of the three-axis robot 12. These first and second detection heads 17 and 18 output the surface shape of the detection target 19 disposed at a predetermined position on the surface plate 11 to the controller 20 as an image signal. The controller 20 converts the image signals input from the detection heads 17 and 18 into distance data and
Output to 1. In this case, the detection heads 17 and 18 differ only in measurement conditions, and have the same basic configuration.

FIG. 1 shows the overall electrical configuration. In FIG. 1, the first and second detection heads 17 and 18 are composed of a light projecting unit 22 composed of a laser diode and a light receiving unit 23 composed of a two-dimensional image sensor. And irradiate the
Numeral 3 captures the slit light reflected on the surface of the detection target 19 and outputs an image signal. in this case,
The detection field of view of the first detection head 18 is set to 30 square mm, and the detection field of view of the second detection head 19 is set to 10 square mm.

The light projecting portions 22 of the first and second detection heads 17 and 18 are connected to a CPU via a laser output controller 24.
(Central Processing Unit) 25, and each light receiving unit 23 is connected to the CPU 25 via the image processing circuit 26. The laser output controller 24 includes a CPU 25
The output of the light projecting unit 22 is controlled in accordance with the control of (1). The image processing circuit 26 amplifies and A / D converts the image signal from the light receiving unit 23 and outputs the image signal to the CPU 25 as image data. The CPU 25 controls the laser output controller 24 based on a program stored in the ROM 27, converts the image data from the image processing circuit 26 into distance data, and stores the distance data in the RAM 28 sequentially. And CPU2
4 is an RA in response to a request from the host computer 21.
The distance data stored in M28 is transferred to the interface circuit 29.
Through the host computer 21.

Here, the controller 20 has a first EPROM 30 and a second EPROM 31 as storage means.
Is mounted, and the CPU 25 is connected to one of the EPROMs 30 and
31 can be accessed. The analog switch 32 is switched by the CPU 25 in response to a command from the host computer 21. In this case, look-up tables respectively corresponding to the first and second detection heads 17 and 18 are stored in the EPROMs 30 and 31, respectively.

These look-up tables are prepared in advance so as to indicate the relationship between image data and distance data for a standard detection target corresponding to the detection heads 17 and 18, and based on the image data. You can ask for data. This is the detection head 1
7 and 18, the position of the slit light from the light projecting unit 22, the accuracy of the light receiving unit 23 or the laser output controller 2
This is because a variation occurs in the amplification degree of No. 4 and a detection error occurs simply by replacing the image data with the distance data by a predetermined arithmetic expression.

On the other hand, the host computer 21 outputs a control command for controlling the three-axis robot 12 to the control device 16 and, after outputting a command for switching the analog switch 32, inputs distance data from the CPU 25. The surface shape of the detection target 19 is finally determined.

Next, the operation of the above configuration will be described. First, the host computer 21 controls the three-axis robot 12 through the control device 16 to position the first detection head 17 at a predetermined position with respect to the detection target 19. Subsequently, the host computer 21 switches the analog switch 32 to switch the CPU 25 to the first EP.
After connecting to the ROM 30, the laser output controller 24 corresponding to the first detection head 17 is controlled.

Thus, the slit light is emitted from the light projecting portion 22 of the first detection head 17 to the surface of the detection target 19, and the slit light reflected by the detection target 19 is imaged by the light receiving portion 23. Therefore, an image signal corresponding to the surface shape of the detection target 19 is output from the light receiving section 23 of the first detection head 17 to the image processing circuit 26 of the controller 20 and an image corresponding to the first detection head 17 is formed. Image data corresponding to the image signal is sent from the processing circuit 26 to the CPU 2.
5 is output.

Here, the CPU 25 is a first EPROM.
30 by converting the input image data into distance data by referring to a look-up table stored in
The data is sequentially stored in M28. Then, the CPU 25 sequentially outputs the distance data stored in the RAM 28 to the host computer 21 in response to a request from the host computer 21.

The host computer 21 having measured the predetermined range of the detection target 19 by the first detection head 17 as described above, controls the three-axis robot 12 again to detect the predetermined range from the first detection head 17. Distance data corresponding to different parts of the object 19 is input. The host computer 21 having input the distance data corresponding to the surface shape of the detection target 19 in this manner can measure the surface shape of the detection target 19 based on the distance data.

Incidentally, since the detection field of view of the first detection head 17 is set to be relatively large, the detection object 19 is detected.
In order to measure the surface shape of the first detection head 1 in detail,
The surface shape of the detection target 19 is detected by the second detection head 18 whose measurement field of view is smaller than (the detection accuracy is higher than 7). That is, the host computer 21
The second detection head 18 is positioned at a predetermined position with respect to the detection target 19 by controlling the axis robot 12.

Then, the host computer 21 connects the CPU 25 to the second EPROM 31 by switching the analog switch 32 and controls the CPU 25 so that the second detection head 18 is activated. Thereby, the CPU 25 converts the distance data corresponding to the surface shape of the detection target 19 into RA as in the case of the first detection head 17.
M28 and sequentially stored in the host computer 21.
The distance data stored in the RAM 28 is output to the host computer 21 in response to a request from the host computer 21.

As a result of the above operation, the host computer 2
1 is to be able to measure the surface shape of the detection target 19 using the first detection head 17 and to measure the surface configuration of a predetermined portion of the detection target 19 with high accuracy using the second detection head 18. Can be.

According to the above configuration, the controller 2
The detection target 1 is detected by any one of the first and second detection heads 17 and 19 connected to a different field of view and set to 0.
9 when measuring the surface shape of the detection head 1
By switching the analog switch 32 in accordance with 7 or 18, one of the first and second EPROMs 30 and 31 is switched to C
Since it is connected to the PU 25, the cost can be reduced irrespective of the number of detection heads, as compared with the conventional example in which a plurality of controllers need to be prepared for each detection head individually.

Further, since the controller 20 is always connected to the host computer 21, it is not necessary to reconnect the controller 20 to the host computer every time the detection head is switched, and the surface shape of the detection object 19 can be changed with different detection accuracy. Measurement can be automated.

FIG. 3 shows the electrical structure of the main part of the second embodiment of the present invention, and the same parts as those of the first embodiment are denoted by the same reference numerals. In the second embodiment, a configuration is shown in which eight detection heads can be connected to the controller 20, and the CPU 25 is provided so as to be able to access the EPROM 33 as eight storage means in which different lookup tables are stored. ing.

That is, the decoder 34 outputs the
Inputting bit data enables one of the eight output terminals. The output terminal of the decoder 34 is connected to a three-three buffer 35 as an application unit, and only the buffer 35 connected to the enabled output terminal is enabled. The EPROM 33 is connected to the CPU 25 via the buffer 35, and only the EPROM 33 connected to the activated buffer 35 is the CPU 25.
Accessed from Therefore, the CPU 25 can access only the predetermined EPROM 33 and output the predetermined bit pattern to the decoder 34 to refer to the lookup table.

According to the second embodiment, the number of detection heads can be increased up to eight. This is because a desired number of detection heads can be accommodated by devising the circuit configuration. Means you can do it.

FIGS. 4 to 6 show a third embodiment of the present invention. The same parts as those in the first embodiment are denoted by the same reference numerals and description thereof is omitted. In the third embodiment, as shown in FIG. 6, the controller 20 is provided with a socket 36 as an attaching means for mounting the EPROMs 30 and 31, and the CPU 12 controls the EPRO connected to the socket 36.
The lookup tables stored in M30 and M31 are referred to.

According to the third embodiment, the controller 20 is provided with the socket 36, and the EPROMs 30 and 31 mounted on the socket 36 can be accessed by the CPU 25. It can correspond to the detection heads 17 and 18. Therefore, similarly to the first embodiment, the cost can be suppressed and the controller 20 can be connected to the host computer 21.
There is no need to reconnect.

FIGS. 7 to 11 show a fourth embodiment of the present invention. The same parts as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted. Different parts are denoted by reference numerals. I do. In the fourth embodiment, a configuration in which only one detection head 17 is connected to the controller 20 is shown. In FIG. 7 showing the entire external appearance, the detection head 17 is provided with an LED (indicator) 37 as a notification means.

In FIG. 8 showing the overall electrical configuration, the light projecting unit 22 includes a laser diode 38 and a driving circuit 3.
The laser diode 38 outputs a set output laser beam. The light receiving section 23 is a CCD 4
0 and a TV signal output circuit 41.
The signal output circuit 41 converts an image signal from the CCD 40 into, for example, a television signal of the NTSC standard and outputs it. A / D
The converter 42 converts the television signal output from the detection head 17 into digital data and outputs the digital data to the CPU 25.

The CPU 25 sequentially stores the digital data from the A / D converter 42 in the RAM 28, and judges whether or not the measurement target can be measured based on the stored digital data. Converts the stored digital data into distance data based on the look-up table stored in the ROM 27, and outputs the distance data to the host computer 21 through the interface circuit 29. Here, the CPU 25 blinks the LED 37 when the object to be detected cannot be measured.

The CCD 40 has a light receiving surface composed of a group of pixels (I, J) as shown in FIG. 10, and receives the slit light reflected on the surface of the object to be detected by the group of pixels (I, j). In this case, it is set so that light is received in an inclined state.
For this reason, the conversion ratio between the measured distance and the light receiving distance with respect to the detection target varies depending on the light receiving position, and the detection accuracy deteriorates as the distance from the light receiving center increases. That is, the measurable rectangular area shown by oblique lines in FIG. 9 has a trapezoidal shape as shown in FIG. 10 in the pixel group (I, J) of the CCD 40.

In this case, the pixel group (I, J) of the CCD 40
10, the I direction shown in FIG. 10 corresponds to the Z direction shown in FIG. 9, the J direction shown in FIG. 10 corresponds to the Y direction shown in FIG. 9, and the slit light reflected on the surface of the detection target is J
Light is received along the direction.

As shown in FIG. 10, the measurable area in the pixel group (I, J) of the CCD 40 is a (j) ≦ Ij
≦ b, the CCD 4
The measurable range for the 0 pixel group (I, J) is a (j)
≦ Ij ≦ b.

The detection head 17 outputs a television signal of the NTSC standard. In this case, since the horizontal scanning direction of the CCD 40 is orthogonal to the direction of the received slit light, the horizontal scanning line signal forming the television signal indicates the amount of received light in the horizontal direction at the vertical position J as shown in FIG. ing. Therefore, the CCD based on the signal level of the horizontal scanning signal of the television signal output from the detection head 17
The light receiving position of the slit light at 40 can be determined.

Since the CCD 40 receives the slit light in an inclined state, the slit light received by the CCD 40 is received in an expanded state depending on the light receiving position. Therefore, it is not possible to accurately detect the slit light receiving position simply by determining that the peak position of the signal level in the horizontal scanning signal of the television signal output from the detection head 17 is the slit light receiving position.

Therefore, when determining the light receiving position of the slit light based on the horizontal scanning line signal of the television signal input from the detection head 17, the CPU 25 sequentially stores the digital data indicating the signal level of the horizontal scanning line signal in the RAM 28. The center of gravity of the received slit light is obtained by calculating a weighted average of those signal levels, and the center of gravity is specified as the position of the slit light.

Each time a horizontal scanning line signal is input from the CCD 40, the CPU 25 specifies the slit light position Ij in the direction I shown in FIG. When the specification of the position Ij of the slit light in the horizontal scanning line signal is completed,
The position Ij of the specified slit light is a measurable region a
(J) It is determined whether or not satisfies ≦ Ij ≦ b. If OK, Ij is coordinate-converted to distance data based on a look-up table.

On the other hand, when the measurable area for the detection target is NG, the CPU 25 blinks the LED 37.
Therefore, when the LED 37 blinks, it is impossible to measure the object to be detected.
The position of the detection head 17 is adjusted so that 7 turns off.

According to the fourth embodiment, when the detection head 17 is provided with the LED 37 and the measurement by the detection head 17 is impossible, the LED 37 is made to blink, so that the LED 37 of the detection head 17 blinks. It is possible to determine whether or not measurement by the detection head 17 is possible based on Therefore, it is possible to quickly determine whether or not measurement by the detection head 17 is possible at the measurement location.
The measurement time can be reduced as compared with a configuration in which the propriety of measurement is displayed on the monitor of the host computer 21.

FIGS. 12 to 15 show a fifth embodiment of the present invention. 12 to 15, in the main body 43 as the detection head, the detection head 17 and the controller 20 shown in the fourth embodiment are integrally formed.

That is, in FIG. 12 showing the overall appearance,
The main body 43 is provided with legs 43a,
The surface shape of the object to be detected is measured in a state where the surface 3a is in direct contact with the object to be detected. In this case, an LED 44 is provided on the upper surface of the main body 43 as notification means.

In FIG. 13 showing the electrical configuration, in FIG.
Reference numeral 3 denotes an LED 4 as a light projecting unit for projecting slit light.
5 and a PSD (Position Sensitive Device) 46 as a light receiving unit for receiving slit light reflected by the detection object.
Is provided.

The PSD 46 has a pair of electrodes at both ends, and outputs currents I1 and I2 from the electrodes in accordance with the position of the center of gravity of the light receiving area of the PSD 46. And P
The currents I1 and I2 output from the SD 46 are converted into V1 and V2 by a current-voltage conversion circuit and then added by an addition circuit.
To give to.

Then, the CPU 47 calculates (V1 + V2) /
By calculating V2, the light receiving position D of the slit light can be calculated as
Consequently, the distance to the detection target is determined.

When the PSD 46 is used as the light receiving element, the detection accuracy is reduced depending on the light receiving position of the PSD 46 for the same reason as in the case where the CCD is used as the light receiving element as described above. In this case, the detection accuracy is guaranteed when the light receiving position D is within the range of a ≦ D ≦ b.

When detecting the light receiving position of the slit light, the CPU 47 determines whether or not the light receiving position of the slit light is within the measurable range as shown in FIG. Converts the data to distance, and if the slit light is not located within the measurable range,
44 flashes.

According to the fifth embodiment, the main body 43
LED 44 is provided, and when the measurement range of the main body 43 is improper, the LED 44 is blinked to notify the measurer. Therefore, when the LED 44 blinks, the measurement of the detection target is improper. Can be confirmed.

FIGS. 16 to 18 show a sixth embodiment of the present invention. The same parts as those in the first embodiment are denoted by the same reference numerals and description thereof will be omitted. That is, in FIG. 16 showing the detection head 17 in cross section, the detection head 17 is provided with a light projecting unit 22 and a light receiving unit 23, and outputs a slit-shaped laser beam from the light projecting unit 22 and a light receiving unit. At 23, the slit light reflected by the detection target is received. Here, a control board 48 is provided between the light projecting unit 22 and the light receiving unit 23, and an LED 49 mounted on the control board 48 faces the outside.

In FIG. 17, which shows a main part of the electrical configuration of the detection head 17, a light projecting unit 22 includes a laser diode 22a.
And the photodiode 22b are integrated so as to face each other, and a part of the light emitted from the laser diode 22a is received by the photodiode 22b.

On the other hand, the control board 48 is provided with a laser driving circuit 50 for driving the laser diode 22a of the light projecting section 22 and a laser life determining circuit 51 for determining the life of the laser diode 22.

The laser drive circuit 50 receives the light receiving signal from the photodiode 22b of the light projecting section 22 and can receive the laser output value VREF from the host computer 21, and the signal level of the light receiving signal from the photodiode 22b is changed. The laser diode 2 is set so as to have the laser output value VREF given from the host computer 21.
The amount of power supply to 2a is controlled. Therefore,
The light emission intensity of the laser diode 22a is automatically adjusted to a set level according to a command from the host computer 21.

The laser life judging circuit 51 includes a comparator 5
2 as a main component. This comparator 52
The light receiving signal from the photodiode 22b is given to the non-inverting input terminal of the, and the reference potential adjusted by the volume 53 is given to the inverting input terminal. in this case,
As the reference potential, a potential slightly lower than the laser output value VREF given from the host computer 21 is set.

The output from the comparator 52 is connected to the LED 49 through the interface circuit 54 so that the LED 49 is turned on when the output level from the comparator 52 is at a negative level.

When the light emission time of the laser diode 52a reaches a long time (about 20,000 hours), the light emission intensity of the laser diode 22a by the laser drive circuit 50 is automatically adjusted so as to become the set level set by the host computer 21. Irrespective of this, the emission intensity decreases from the set level due to the deterioration due to the life of the laser diode 22a.

As a result, the signal level from the photodiode 22b decreases as the emission intensity of the laser diode 22a decreases, and finally the signal level from the photodiode 22b is applied to the reference input terminal of the comparator 52 at the inverting input terminal. It becomes lower than the potential. Then, the output level from the comparator 52 is inverted from the positive level to the negative level, so that a current flows through the LED 49 to emit light.

In the case of the sixth embodiment, an LED 49 is provided on the detection head 17 and the laser diode 22 of the light projecting section 22 is provided.
When the LED a has reached the end of its life, the LED 49 is made to blink. Therefore, when the LED 49 is lit, the measurer judges that the laser diode 22a has reached the end of its life and detects it by replacing it with a new laser diode. Accurate measurement of the object becomes possible.

The present invention is not limited to the above embodiments, but can be modified or expanded as follows. 1 in which a plurality of lookup tables are stored in the controller 20
One EPROM may be mounted, and the CPU 25 may refer to a look-up table corresponding to the operation state detection head.

EPROM mounted on controller 20
The host computer 21 may be configured to write the look-up table. The detection head 17 may be provided with a buzzer, and the buzzer may be driven when the object to be measured is out of the measurable range of the detection head 17 or when the laser diode 22a has reached the end of its life.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing an overall electrical configuration according to a first embodiment of the present invention.

FIG. 2 is a perspective view showing the entire configuration.

FIG. 3 is a schematic view of a main part showing a second embodiment of the present invention.

FIG. 4 is a view corresponding to FIG. 1, showing a third embodiment of the present invention;

FIG. 5 is a perspective view showing a detection head and a controller.

FIG. 6 is a perspective view of a main part of the controller when the ROM is removed.

FIG. 7 is a view corresponding to FIG. 2, showing a fourth embodiment of the present invention;

FIG. 8 is a diagram corresponding to FIG. 1;

FIG. 9 is a diagram showing a relationship between a detection head and a measurable range.

FIG. 10 is a diagram showing a relationship between a CCD pixel and a measurable range.

FIG. 11 is a flowchart showing a measurement procedure.

FIG. 12 is a view corresponding to FIG. 2, showing a fifth embodiment of the present invention;

FIG. 13 is a diagram showing a main part of an electrical configuration.

FIG. 14 is a view showing a measurable range of a PSD.

FIG. 15 is a flowchart showing the operation of the CPU;

FIG. 16 is a longitudinal sectional view of a detection head.

FIG. 17 is a diagram showing a main part of an electrical configuration.

FIG. 18 is a diagram showing a relationship between a monitor output and an LED blinking period.

FIG. 19 is a diagram corresponding to FIG. 2 showing a conventional example.

[Explanation of symbols]

17, 18 are detection heads, 19 is a detection target, 20 is a controller, 22 is a light emitting unit, 23 is a light receiving unit, and 25 is a CP.
U (measuring means), 30 and 31 are EPROMs (storage means), 32 is an analog switch (providing means), 33 is E
PROM (storage means), 35 is a buffer (providing means),
36 is a socket (providing means), 37 is an LED (notifying means), 40 is a CCD, 42 is a main body, 44 is an LED (notifying means), 45 is an LED (light emitting section), 46 is a PSD (light receiving section), 49 Is an LED (notifying means).

────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-2-223810 (JP, A) JP-A 1-2242907 (JP, A) JP-A 5-67195 (JP, A) (58) Field (Int.Cl. ⁷ , DB name) G01B 11/00-11/30 102 G06T 1/00 G06T 7/00

Claims (4)

(57) [Claims] 1. A plurality of detection heads in which a light projecting unit for projecting slit light on the surface of a detection target and a light receiving unit for imaging reflected slit light on the surface of the detection target are integrated, A measuring unit that is provided so as to be connectable to a head and measures a surface shape of the detection target based on an imaging state of slit light by a light receiving unit of the detection head and a given conversion table; and individually for the plurality of detection heads. Storage means for storing a plurality of conversion tables corresponding to the plurality of conversion tables; and providing means for providing, to the measurement means, a conversion table corresponding to the detection head in the operating state among the plurality of conversion tables stored in the storage means. A surface shape measuring device characterized by the above-mentioned. 2. A plurality of detection heads, in which a light projecting unit for projecting slit light on the surface of a detection target and a light receiving unit for imaging reflected slit light on the surface of the detection target are integrated, A measuring unit that is provided so as to be connectable to a head and measures a surface shape of the detection target based on an imaging state of slit light by a light receiving unit of the detection head and a given conversion table; and individually corresponds to the detection head. A plurality of storage units in which a conversion table is stored for each of the detection heads; and a storage unit in which these storage units are provided so as to be selectively mountable, and an application unit that gives the conversion table stored in the mounted storage unit to the measurement unit. A surface shape measuring device comprising: 3. A detection head in which a light projecting unit for projecting slit light on the surface of a detection target and a light receiving unit for imaging a reflection slit light on the surface of the detection target are integrated, and a light reception of the detection head. A measuring unit for measuring the surface shape of the detection target based on the imaging state of the slit light by the unit and a predetermined conversion table; and a notifying unit provided on the detection head for notifying whether the measurement of the detection target is possible or not. A surface shape measuring device comprising: 4. A detecting head in which a light projecting unit for projecting slit light on the surface of the detection target and a light receiving unit for imaging a reflected slit light on the surface of the detecting target are integrated, A measuring unit for measuring a surface shape of the detection target based on an imaging state of the slit light by the unit and a predetermined conversion table; and a notifying unit provided on the detection head for notifying whether or not the light emitting unit can be used. A surface shape measuring device comprising: