JP3008335B2 - Method for manufacturing PEEK molded article and PEEK holding / conveying tool - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a PE used in a container for holding and transporting articles in a manufacturing process in the semiconductor industry and the like.
The present invention relates to a method for producing an EK (polyether-ether-ketone) molded article and an improvement in a PEEK- made holding and conveying device .

[0002]

2. Description of the Related Art Conventionally, as this type of article holding / transporting container, a holding container made of quartz and a holding container made of PFA reinforced with a metal core (iron) are known. However, although the holding container has high strength, and is excellent in heat resistance and chemical resistance, the former quartz product uses a high-temperature chemical solution or an aqueous solution (80 to 80).
(100 ° C.) or broken during handling or is easily broken by cracks and the like, and is eroded by a hydrofluoric acid solution, so that the use conditions are restricted. On the other hand, in the latter metal core material reinforced PFA product, the chemical solution that has permeated the PFA corrodes the metal,
Cannot be used for a long time.

[0003]

In order to solve the above problem, a molded article using a polyether ether ketone (hereinafter referred to as PEEK) resin developed as a super engineering plastic (high performance resin) has been proposed. It is used. To obtain the PEEK molded body,
First, PEEK resin is molded as a raw material having a shape such as a plate-like body, a columnar body, or a cylindrical body, and this material is made to have a glass transition point (132).
° C) or more and a heat treatment at a temperature of not more than the melting point (334 ° C) to crystallize the amorphous molecules, remove internal strain, cut out a member having a required shape, and then construct a desired shape. A method of manufacturing a compact by welding the cut-out members to each other using a PEEK welding rod has been performed. However, the PEEK molded body obtained by the above method has a
When exposed to a high-temperature atmosphere at 120 ° C, the welded portion and other parts of the molded body are thermally deformed due to residual strain, and the dimensions and angles of each part of the molded body are disturbed, resulting in a change in the shape of the molded body as a whole. There is. Therefore, if the compact is part of a machine, the machine may lose its function due to deformation. Further, since the molded body is deformed, an abnormal force is applied to a specific portion of the molded body, and the molded body may be damaged. In particular, the weld is often damaged.

[0004] The present invention has been made in view of the above points, and a method of manufacturing a PEEK molded body that is not deformed or damaged in a high-temperature atmosphere, and a PEEK holding and transporting method.
The purpose is to provide tools .

[0005]

In order to achieve the above-mentioned object, a method for producing a PEEK molded article according to the first aspect of the present invention comprises:
After the heat treatment at a temperature not higher than the melting point, the members are cut into members of a required shape, and the members are fixed to each other in a state where the cut members are fixed to a fixing frame jig having a skeletal structure of a desired form.
A formed body is processed and manufactured by welding using a K-made welding rod, and thereafter, the re-heat treatment is performed at a temperature lower by at least 20 ° C. or more than the heat treatment temperature while the welded formed body is fixed to a fixing frame jig. The gist is that.

The temperature of the reheat treatment is preferably 200 ° C. or less in consideration of prevention of discoloration of the molded article. If the reheating treatment is not lowered at least by 20 ° C., the strain (residual strain) that cannot be removed by the first heat treatment is removed, and dimensional changes, warpage, and the like occur. Further, the PEE of the invention of claim 2
The holding and transporting device made of K is a holding and transporting device configured by welding a PEEK material into a required form, and has at least three endothermic peaks in the chart of the differential thermal analysis. And

[0007] According to the method for manufacturing a PEEK molded article according to the first aspect, the residual strain and the distortion at the time of welding of a part of the PEEK molded article are:
It is removed by re-heat treatment. In addition, the residual strain that cannot be completely removed is heat-treated while being fixed with a fixing frame jig.
Since it is stabilized (heat set), the molded body does not deform or break even when exposed in a high-temperature atmosphere.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS As shown in FIGS. 1 to 3, a PEEK material is heat-treated (132.degree. C. to 334.degree. C.) and then cut into a required shape. The members 1, 2, 3, 4, and 5 are fixed to a fixed frame jig 6 having a skeletal structure of a desired form, and the members are mutually connected by PEE.
The members 1 to 5 are welded using a K-made welding rod, assembled into a required form, and then heat-treated at 200 ° C. while the welded molded body is fixed to the fixed frame jig 5. After the reheat treatment, the jig is removed to obtain a PEEK molded product.

[0009]

1 to 3 show a PE used as a container for holding and transporting a plurality of disk-shaped objects in a semiconductor manufacturing process.
1 shows an example of manufacturing an EK molded body. Figure 1
In FIG. 3, reference numerals 1 and 2 denote left and right frame members, and reference numerals 3, 4 and 5 denote arm members. These members 1 to 5 heat-treat a PEEK material at a temperature equal to or higher than the glass transition point and equal to or lower than the melting point. This is a member that has been crystallized to remove internal strains and then cut out into required dimensions. The arm members 4 and 5
Are provided with a large number of grooves for holding a disk-shaped object.

In order to manufacture a ladder-shaped molded body using the members 1 to 5 obtained as described above, a fixed frame member 6 having a skeleton structure according to the shape is prepared. The frame members 1 and 2 are fixed by appropriate means, and then the arm members 3, 4 and 5 are attached to the frame members 1 and 2 at both ends thereof.
Welding is performed using a PEEK welding rod to process and manufacture a ladder-shaped formed body.

The ladder-like formed body processed and manufactured as described above is subjected to a reheat treatment at a temperature lower than the heat treatment temperature by at least 20 ° C. while being fixed to the fixing frame jig 6. This re-heat treatment temperature range is also the same as the initial heat treatment temperature.

After the re-heat treatment, the fixing frame jig 6 is removed to obtain the desired ladder-shaped PEEK molded article. Incidentally, the ladder-shaped formed body is a set of two, which is used as a holding and transporting container for a disk-shaped object, and the arm members 4 and 5 are provided with grooves provided in the disk-shaped object. The arm member 3 is for mounting the molded body on a robot or the like for holding.

[Example 1] In order to produce the molded body shown in FIGS. 1 to 3, the frame members 1 and 2 were 50 cm long and 2.5 cm wide.
m, a member having a thickness of 2.5 cm; an arm member 3 having a length of 35 cm, a width of 5 cm, and a thickness of 2.5 cm; and an arm member 4 having a length of 35 cm, a width of 2.5 cm, and a thickness of 1. As the arm member 5, a grooved member having a length of 35 cm and a diameter of 2.5 cm was used as the arm member 5. These members are obtained by subjecting a PEEK material to a heat treatment at 310 ° C. for 5 hours and then cutting the material into the above-described dimensions and shapes. The members 1 and 2 cut out as described above are first fixed to the fixing frame jig 6, and then the members 3, 4 and 5 are attached to the members 1 and 2 at both ends thereof at 420 ° C. using a PEEK welding rod. Welded with hot air. The molded body formed in a ladder shape as described above was subjected to a reheat treatment at 180 ° C. for 3 hours while being fixed to a fixing jig.

[Comparative Example 1] The members 1 to 5 of Example 1 were used to form a ladder without using a fixing frame jig, and the members were mutually connected using a PEEK welding rod as in Example 1. 42
A compact was formed by welding with hot air of 0 ° C. However, no reheat treatment is performed.

[Comparative Example 2] In Example 1, a molded body was obtained without performing re-heat treatment.

The physical properties of the PEEK molded bodies obtained in Example 1 and Comparative Examples 1 and 2 are shown in Table 1 below.

[0017]

[Table 1]

In the table, “shape stability” is obtained by observing a change in shape after heating at 150 ° C. for 5 hours. “DSC measurement” refers to differential scanning calorimetry (Differential Scanning Calibration).
This measurement allows qualitative and quantitative evaluation of the solid-phase reaction of the specimen. As in the present invention,
As shown in the chart of FIG. 4, a plurality of endothermic peaks corresponding to the heat treatment conditions are observed in the final product (molded body) that has been heat-treated a plurality of times. That is, the appearance of three endothermic peaks in the DSC measurement is due to the melting point and the material heat treatment (310
C.) and re-heat treatment (180 ° C. to 200 ° C.). Therefore, both the heat treatment of the material and the reheat treatment after the welding are indispensable.

[0019]

As described above, as described in detail above, the P
According to the method of manufacturing an EEK molded body, the molded body is heated at 50 ° C.
A PEEK molded article having excellent shape stability without dimensional change or breakage even when exposed to a use atmosphere at 20 ° C. is obtained. In addition, as a secondary effect, it is possible to solve a problem that a mechanical device using a PEEK molded body does not operate halfway.

[Brief description of the drawings]

FIG. 1 shows a PEE with a fixing frame jig showing one embodiment of the present invention.
It is a front view of a K compact.

FIG. 2 is a longitudinal sectional view of FIG.

FIG. 3 is an exploded front view of the PEEK molded body.

FIG. 4 is a chart of differential thermal analysis of a PEEK molded body.

[Explanation of symbols]

 1, 2 frame member 3, 4, 5 arm member 6 fixed frame jig

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. ⁷ , DB name) B29C 65/00-65/82 B29B 13/02 B29C 71/02

Claims (2)

(57) [Claims] 1. A material made of PEEK before cutting out a member is heat-treated at a temperature not lower than a glass transition point and not higher than a melting point, and then cut out into a member having a required shape. With the cut-out members fixed,
The members are welded to each other using a PEEK welding rod to form and process a molded body. Thereafter, the welded molded body is fixed to a fixed frame jig at least two times from the heat treatment temperature.
PEE characterized by performing re-heat treatment at a temperature lower by 0 ° C.
A method for producing a K molded body. 2. A holding and conveying device made of a PEEK material in a required form by welding , wherein at least three endothermic peaks are present in a differential thermal analysis chart .