JP3007506U - Discharge tube - Google Patents
Discharge tubeInfo
- Publication number
- JP3007506U JP3007506U JP1994009658U JP965894U JP3007506U JP 3007506 U JP3007506 U JP 3007506U JP 1994009658 U JP1994009658 U JP 1994009658U JP 965894 U JP965894 U JP 965894U JP 3007506 U JP3007506 U JP 3007506U
- Authority
- JP
- Japan
- Prior art keywords
- discharge tube
- end plate
- vacuum
- fitting portion
- tubular body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
(57)【要約】
【目的】 放電により所望のガス種のイオンやラジカル
を生成し、これをビーム状として真空容器内の所定の箇
所に放出する放電管であって、融接や溶接によることな
く真空封止を可能とした放電管を提供することを目的と
している。
【構成】 パイロリティック窒化ボロン製の筒状本体３
とビーム透過孔６が設けられた端板４で構成されてい
る。端板４の側面に少なくとも１ｍｍの長さで突設した
柱状嵌入部５の径を、筒状本体３の内径より０．１〜
０．４ｍｍ大きくしてあり、柱状嵌入部５を筒状本体３
の端部に嵌入固定してある。
(57) [Summary] [Purpose] A discharge tube that generates ions or radicals of a desired gas species by discharge and emits these into a beam shape at a predetermined location in a vacuum vessel, by fusion welding or welding. It is an object of the present invention to provide a discharge tube that can be vacuum-sealed. [Structure] Pyrolytic boron nitride tubular body 3
And an end plate 4 provided with a beam transmission hole 6. The diameter of the columnar fitting portion 5 projecting on the side surface of the end plate 4 with a length of at least 1 mm is set to be 0.1 to 10 mm larger than the inner diameter of the tubular body 3.
It is made larger by 0.4 mm, and the columnar fitting portion 5 has a cylindrical main body 3
It is fitted and fixed at the end of.
Description
【０００１】[0001]
この考案は、放電により所望のガス種のイオンやラジカルを生成し、これをビ ーム状として真空容器内の所定の箇所に放出する放電管に関する。 The present invention relates to a discharge tube that generates ions or radicals of a desired gas species by discharge and discharges them into a beam at a predetermined location in a vacuum container.
【０００２】[0002]
従来、真空薄膜評価装置において、イオンビームやラジカルビーム等を得る為 に、薄膜が形成された基板を収容する真空容器内に、放電管を設置している。放 電管内に所望のガスを導入して放電を起し、放電によって生じたイオンやラジカ ルを前記基板へビーム状にして放出するようになっている。 Conventionally, in a vacuum thin film evaluation apparatus, in order to obtain an ion beam, a radical beam, or the like, a discharge tube is installed in a vacuum container containing a substrate on which a thin film is formed. A desired gas is introduced into the discharge tube to cause a discharge, and ions and radicals generated by the discharge are emitted in a beam shape to the substrate.
【０００３】 前記放電管の内部圧力は、導入したガスの放電を生起させる為に、１０-2〜１ ０-5Ｔｏｒｒ程度の圧力とする一方、前記真空容器内の圧力は、薄膜作成や、他 の分析評価等を行う必要もあることから、１０-5〜１０-8Ｔｏｒｒ程度の圧力と している。The internal pressure of the discharge tube is set to a pressure of about 10 −2 to 10 −5 Torr in order to cause discharge of the introduced gas, while the pressure inside the vacuum vessel is set to a thin film formation, Since it is necessary to perform other analytical evaluations, the pressure is set to about 10 -5 to 10 -8 Torr.
【０００４】[0004]
放電管内の圧力と真空容器内の圧力の間に前記のような差圧を維持する為に、 ガスが導入される放電管を真空封止構造とする必要があり、従来の放電管では図 ４のように石英製として真空封止部Ａを融接構造としたり、金属製として真空封 止部Ａを溶接構造としていたが、放電管を構成した石英または金属が不純物とし て前記イオンビームまたはラジカルビームに混入する問題点があった。 In order to maintain the above-mentioned differential pressure between the pressure inside the discharge tube and the pressure inside the vacuum vessel, the discharge tube into which the gas is introduced needs to have a vacuum sealing structure. As described above, the vacuum sealing portion A made of quartz has a fusion-welding structure, and the vacuum sealing portion A made of metal has a welding structure. There was a problem of mixing with the beam.
【０００５】 このような不純物混入の対策として、放電管をパイロリティック窒化ボロン（ 以下ＰＢＮという）或いはパイロリティックグラファイト（以下ＰＧという）で 構成する試みがあったが、この種の材料では図３に示したように真空封止が難し く、放電管に導入したガスが真空容器側にＢのように漏れることから、放電管と 真空容器の間に差圧を維持できない問題点があった。As a countermeasure against such contamination of impurities, there has been an attempt to configure the discharge tube with pyrolytic boron nitride (hereinafter referred to as PBN) or pyrolytic graphite (hereinafter referred to as PG). As shown, the vacuum sealing is difficult, and the gas introduced into the discharge tube leaks to the vacuum vessel side as shown by B, so that there is a problem that the differential pressure cannot be maintained between the discharge tube and the vacuum vessel.
【０００６】 この考案は上記の問題点に鑑みてなされたもので、融接や溶接によることなく 真空封止を可能とした放電管を提供することを目的としている。The present invention has been made in view of the above problems, and an object thereof is to provide a discharge tube capable of vacuum sealing without fusion welding or welding.
【０００７】[0007]
上記の目的を達成したこの考案の放電管は、真空容器内に設置される放電管で あって、筒状本体と、ビーム透過孔が設けられた端板で構成され、前記端板の側 面に突設した柱状嵌入部を前記筒状本体の端部に嵌入固定してあることを特徴と する真空容器内に設置される放電管である。 The discharge tube of the present invention, which has achieved the above-mentioned object, is a discharge tube installed in a vacuum vessel, and is composed of a cylindrical body and an end plate provided with a beam transmission hole, and a side surface of the end plate. A discharge tube installed in a vacuum container, characterized in that a columnar fitting portion projecting from the above is fitted and fixed to an end portion of the cylindrical main body.
【０００８】 また、真空容器内に設置される放電管であって、パイロリティック窒化ボロン 又はパイロリティックグラファイト製とした、筒状本体とビーム透過孔が設けら れた端板で構成され、前記端板の側面に少なくとも１ｍｍの長さで突設した柱状 嵌入部の径を、前記筒状本体の内径より０．１〜０．４ｍｍ大きくしてあり、該 柱状嵌入部を筒状本体の端部に嵌入固定してあることを特徴とする真空容器内に 設置される放電管である。Further, a discharge tube installed in a vacuum container, which is made of a pyrolytic boron nitride or a pyrolytic graphite and is composed of a cylindrical body and an end plate provided with a beam transmission hole, The diameter of the columnar fitting portion protruding from the side surface of the plate with a length of at least 1 mm is made larger than the inner diameter of the tubular body by 0.1 to 0.4 mm. It is a discharge tube installed in a vacuum container characterized by being fitted and fixed in.
【０００９】[0009]
この考案の放電管では、端板と筒状本体の接合部が、端板の柱状嵌入部の筒状 本体の端部への嵌入固定によって真空封止される。 In the discharge tube of the present invention, the joint portion between the end plate and the tubular body is vacuum-sealed by fitting and fixing the columnar fitting portion of the end plate to the end portion of the tubular body.
【００１０】 従って放電管内と真空容器内で差圧を維持することができると共に、不純物混 入を防ぐＰＢＮやＰＧで放電管を構成することができる。Therefore, the pressure difference can be maintained between the inside of the discharge tube and the vacuum vessel, and the discharge tube can be configured with PBN or PG that prevents the mixture of impurities.
【００１１】[0011]
以下、ＰＢＮ製としたこの考案の実施例を図１、２を参照して説明する。 An embodiment of this invention made of PBN will be described below with reference to FIGS.
【００１２】 図１において、１が真空容器、２が放電管である。放電管２は、筒状本体３（ 円筒）と端板４で構成されている。放電の為に、例えば高周波コイルが筒状本体 ３の外側に嵌装されるが、複雑化を避ける為に図示はしていない。In FIG. 1, 1 is a vacuum vessel and 2 is a discharge tube. The discharge tube 2 is composed of a tubular body 3 (cylindrical) and an end plate 4. For discharging, for example, a high-frequency coil is fitted on the outside of the cylindrical main body 3, but it is not shown in order to avoid complication.
【００１３】 前記筒状本体３と端板４の結合は嵌合構造としてあるもので、端板４の側面に 突設した断面円形の柱状嵌入部５を筒状本体３の端部内側に嵌入することによっ て固定してある。The tubular main body 3 and the end plate 4 are connected to each other by a fitting structure. It is fixed by doing.
【００１４】 柱状嵌入部５の長さは少なくとも１ｍｍの長さで形成し、かつ径（直径）は、 筒状本体３の端部内径よりも０．１〜０．４ｍｍ大きくすることによって、筒状 本体３と端板４の間に気密を保ち、微小のコンダクタンスしか形成されないよう にしてある。柱状嵌入部５の外周面および筒状本体３の端部内周面は、３ミクロ ン前後の表面荒さで仕上げる。The columnar fitting portion 5 is formed to have a length of at least 1 mm, and the diameter (diameter) is set to be 0.1 mm to 0.4 mm larger than the inner diameter of the end of the cylindrical main body 3 to form a cylinder. Airtightness is maintained between the main body 3 and the end plate 4 so that only a small conductance is formed. The outer peripheral surface of the columnar fitting portion 5 and the inner peripheral surface of the end portion of the cylindrical main body 3 are finished with a surface roughness of about 3 microns.
【００１５】 上記実施例の放電管２によって、図２に示したような差圧を、真空容器（チャ ンバー）１と放電管２の間で維持することができた。真空容器１は１００ l／ｓ の排気速度を有する排気装置で排気した。前記端板４には直径０．２ｍｍのビー ム透過孔６が設けてある。With the discharge tube 2 of the above-described embodiment, the differential pressure as shown in FIG. 2 could be maintained between the vacuum container (chamber) 1 and the discharge tube 2. The vacuum container 1 was evacuated by an evacuation device having an evacuation rate of 100 l / s. The end plate 4 is provided with a beam transmission hole 6 having a diameter of 0.2 mm.
【００１６】 図２から明らかなように、真空容器１側の圧力を放電管２内の圧力に対し、３ 桁低い圧力に維持し、かつ１０-7〜１０-8Ｔｏｒｒの超高真空とすることもでき た。図３に示した従来の放電管では、図２の曲線Ａのように、真空容器内を１０-7 Ｔｏｒｒ台以下の圧力とすることが困難であったが、大幅に改善することがで きた。筒状本体３および端板４はＰＢＮ製であるので、不純物の混入の問題が無 いのは言うまでもない。As is apparent from FIG. 2, the pressure on the vacuum vessel 1 side is maintained at a pressure that is three orders of magnitude lower than the pressure inside the discharge tube 2, and an ultrahigh vacuum of 10 −7 to 10 −8 Torr is set. I was able to do it. In the conventional discharge tube shown in FIG. 3, it was difficult to keep the pressure in the vacuum vessel to the level of 10 −7 Torr or less as shown by the curve A in FIG. 2, but it was possible to make a great improvement. . Since the cylindrical body 3 and the end plate 4 are made of PBN, it goes without saying that there is no problem of mixing impurities.
【００１７】 実施例はＰＢＮ製としたがＰＧ製も同様に実施することができる。The embodiment is made of PBN, but PG can be similarly used.
【００１８】[0018]
以上に説明の通り、この考案によれば、真空容器側の圧力を悪化させない放電 管を提供できる効果がある。 As described above, according to this invention, it is possible to provide a discharge tube that does not deteriorate the pressure on the vacuum vessel side.
【００１９】 また、筒状本体および端板をＰＢＮ製またはＰＧ製とすることによって、イオ ンまたはラジカルビームへ不純物が混入しない放電管とできる効果がある。Further, by making the cylindrical main body and the end plate made of PBN or PG, there is an effect that a discharge tube in which impurities are not mixed into the ion or radical beam can be obtained.
【図１】（ａ）はこの考案の実施例の断面図、（ｂ）は
同じく分解断面図である。1A is a sectional view of an embodiment of the present invention, and FIG. 1B is an exploded sectional view of the same.
【図２】この考案の実施例の圧力特性のグラフである。FIG. 2 is a graph of pressure characteristics of the embodiment of the present invention.
【図３】従来の放電管の断面図である。FIG. 3 is a sectional view of a conventional discharge tube.
【図４】従来の別の放電管の断面図である。FIG. 4 is a cross-sectional view of another conventional discharge tube.
１ 真空容器 ２ 放電管 ３ 筒状本体 ４ 端板 ５ 柱状嵌入部 ６ ビーム透過孔 1 Vacuum Container 2 Discharge Tube 3 Cylindrical Body 4 End Plate 5 Columnar Fitting 6 Beam Transmission Hole
Claims (2)
て、筒状本体と、ビーム透過孔が設けられた端板で構成
され、前記端板の側面に突設した柱状嵌入部を前記筒状
本体の端部に嵌入固定してあることを特徴とする真空容
器内に設置される放電管。1. A discharge tube installed in a vacuum vessel, comprising a cylindrical body and an end plate provided with a beam transmission hole, and a columnar fitting portion protruding from a side surface of the end plate. A discharge tube installed in a vacuum container, which is fitted and fixed to an end of a tubular body.
て、パイロリティック窒化ボロン又はパイロリティック
グラファイト製とした、筒状本体とビーム透過孔が設け
られた端板で構成され、前記端板の側面に少なくとも１
ｍｍの長さで突設した柱状嵌入部の径を、前記筒状本体
の内径より０．１〜０．４ｍｍ大きくしてあり、該柱状
嵌入部を筒状本体の端部に嵌入固定してあることを特徴
とする真空容器内に設置される放電管。2. A discharge tube installed in a vacuum container, comprising a cylindrical body made of pyrolytic boron nitride or pyrolytic graphite, and an end plate provided with a beam transmission hole, said end plate At least 1 on the side of
The diameter of the columnar fitting portion protruding in a length of mm is set to be 0.1 to 0.4 mm larger than the inner diameter of the tubular body, and the columnar fitting portion is fitted and fixed to the end of the tubular body. A discharge tube installed in a vacuum container characterized in that
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1994009658U JP3007506U (en) | 1994-08-05 | 1994-08-05 | Discharge tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1994009658U JP3007506U (en) | 1994-08-05 | 1994-08-05 | Discharge tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP3007506U true JP3007506U (en) | 1995-02-21 |
Family
ID=43143351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1994009658U Expired - Lifetime JP3007506U (en) | 1994-08-05 | 1994-08-05 | Discharge tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3007506U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02179616A (en) * | 1988-12-29 | 1990-07-12 | Sharp Corp | Liquid crystal display device |
| JPH09170606A (en) * | 1996-11-29 | 1997-06-30 | Howa Mach Ltd | Rodless cylinder |
-
1994
- 1994-08-05 JP JP1994009658U patent/JP3007506U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02179616A (en) * | 1988-12-29 | 1990-07-12 | Sharp Corp | Liquid crystal display device |
| JPH09170606A (en) * | 1996-11-29 | 1997-06-30 | Howa Mach Ltd | Rodless cylinder |
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