JP3002900B2 - Acceleration sensor - Google Patents

Acceleration sensor

Info

Publication number
JP3002900B2
JP3002900B2 JP2405327A JP40532790A JP3002900B2 JP 3002900 B2 JP3002900 B2 JP 3002900B2 JP 2405327 A JP2405327 A JP 2405327A JP 40532790 A JP40532790 A JP 40532790A JP 3002900 B2 JP3002900 B2 JP 3002900B2
Authority
JP
Japan
Prior art keywords
piezoelectric ceramic
acceleration
output
acceleration sensor
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2405327A
Other languages
Japanese (ja)
Other versions
JPH04213068A (en
Inventor
靖則 大槻
哲男 吉田
力 増子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Original Assignee
Tokin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokin Corp filed Critical Tokin Corp
Priority to JP2405327A priority Critical patent/JP3002900B2/en
Publication of JPH04213068A publication Critical patent/JPH04213068A/en
Application granted granted Critical
Publication of JP3002900B2 publication Critical patent/JP3002900B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は自動車の衝突時の安全確
保のために用いられるエアバックや悪路における乗り心
地の改善などに用いられる加速度センサに関し,特に一
個のセンサで直交する2つの方向の加速度の検出が可能
な加速度に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an acceleration sensor for use in an airbag used for ensuring safety in the event of a collision of an automobile and for improving riding comfort on a rough road, and more particularly to two directions orthogonal to each other with one sensor. The acceleration relates to the acceleration that can be detected.

【0002】[0002]

【従来の技術】従来から加速度の検出には種々の方式の
ものが実用化されている。その中でも圧電セラミックス
を用いた加速度センサは,構造が簡単で高温での使用が
可能であることから,各種機械の振動検出および自動車
のエンジンのノッキング検出などに広く使用されてい
る。
2. Description of the Related Art Conventionally, various types of acceleration detection have been put to practical use. Among them, acceleration sensors using piezoelectric ceramics are widely used for detecting vibration of various machines and detecting knocking of automobile engines because of their simple structure and use at high temperatures.

【0003】図5は従来の圧電方式の加速度センサの一
例を示す側面図である。この例において,両面に電極が
形成され,厚さ方向に分極された圧電セラミックス円環
57,57′を端子板56を介して分極の向きが逆向き
になるように重合せ,おもり54と共にケースを兼ねた
ベース53にボルト55で締め付けた構造をしている。
FIG. 5 is a side view showing an example of a conventional piezoelectric acceleration sensor. In this example, electrodes are formed on both sides, and piezoelectric ceramic rings 57, 57 'polarized in the thickness direction are superimposed via the terminal plate 56 so that the directions of polarization are opposite to each other. The structure is such that it is fastened to the base 53 serving also as a bolt with a bolt 55.

【0004】図5において,ベース53が圧電セラミッ
クス円環の厚さ方向に振動すると,圧電セラミックス円
環にはおよそ(1)式で表される力Fが作用し,圧電セ
ラミックス円環の電極間には(2)式で表される電圧V
が発生する。 F=M・α ……(1) V=K・F ……(2) ここに,Mはおもりの質量,αは加速度,Kは比例定数
である。上記(1),(2)式から解るように,圧電セ
ラミックス円環に発生する電圧Vは加速度αに比例す
る。
In FIG. 5, when the base 53 vibrates in the thickness direction of the piezoelectric ceramic ring, a force F approximately expressed by the following equation (1) acts on the piezoelectric ceramic ring, and the electrode F of the piezoelectric ceramic ring is placed between the electrodes. Has a voltage V expressed by equation (2).
Occurs. F = M · α (1) V = K · F (2) where M is the mass of the weight, α is the acceleration, and K is the proportionality constant. As can be seen from the above equations (1) and (2), the voltage V generated in the piezoelectric ceramic ring is proportional to the acceleration α.

【0005】[0005]

【発明が解決しようとする課題】図5に示した従来の加
速度センサは圧電セラミックス円環の厚さ方向の加速度
成分だけを検出するものであり,互いに直交するX,Y
の2軸を同時に検出するためには図5に示した加速度セ
ンサ2個を直角に配置する必要があり,構造的に複雑
で,大きくなる上に,セット時に2つの加速度センサの
直角度を精度良く合わせることが難しいと云う欠点があ
った。
The conventional acceleration sensor shown in FIG. 5 detects only the acceleration component in the thickness direction of the piezoelectric ceramic ring, and X, Y orthogonal to each other.
In order to detect the two axes simultaneously, it is necessary to arrange the two acceleration sensors shown in FIG. 5 at a right angle. There was a drawback that it was difficult to match well.

【0006】そこで,本発明の技術的課題は以上に示し
た従来の加速度センサの欠点を除去し,簡単な構造の1
個のセンサで互いに直交するX軸,Y軸の2軸の加速度
を検出することが可能な加速度センサを提供することに
ある。
Therefore, a technical object of the present invention is to eliminate the above-mentioned drawbacks of the conventional acceleration sensor and to provide a simple structure.
It is an object of the present invention to provide an acceleration sensor capable of detecting accelerations in two axes of X-axis and Y-axis orthogonal to each other with a plurality of sensors.

【0007】[0007]

【課題を解決するための手段】本発明によれば、一端面
を固定された圧電セラミックス円環を備えた加速度セン
サにおいて、前記圧電セラミックス円環の内周面と外周
との間に径方向の分極処理を施し、前記圧電セラミッ
クス円環の一方の端面に円周を4等分する分割電極を形
成しそれぞれ出力電極とするとともに他端面に全面電極
を形成しアース電極とし、前記圧電セラミックス円環の
アース電極端面をベースに固定し、前記ベースを前記圧
電セラミックス円環の中心軸と直角な方向に振動させた
時、互いに向かい合う出力電極に発生する電圧の差動電
圧に基づいて加速度を検出可能としたことを特徴とする
2軸加速度センサが得られる。
According to the present invention, in an acceleration sensor having a piezoelectric ceramic ring having one end face fixed , a radial direction is defined between an inner peripheral surface and an outer peripheral surface of the piezoelectric ceramic ring. The piezoelectric ceramic ring is subjected to a polarization treatment, and divided electrodes are formed on one end face of the piezoelectric ceramic ring to divide the circumference into four equal parts. When the ground electrode end face of the ring is fixed to the base and the base is vibrated in a direction perpendicular to the central axis of the piezoelectric ceramic ring, acceleration is detected based on a differential voltage of voltages generated at output electrodes facing each other. A two-axis acceleration sensor characterized by being made possible is obtained.

【0008】[0008]

【作 用】本発明においては,中心軸に関して互いに対
称的な一対の出力電極の中心を結ぶ方向に振動的な加速
度が加わると,圧電セラミックス円環には夫々の出力電
極部分にすべり応力が作用する。この時,圧電セラミッ
クス円環の内周面から外周面方向に分極処理されている
ため,一対の出力電極の内の一方においては分極方向と
逆向きなすべり応力が作用し,また一対の出力電極の内
他方においては分極方向と同じ向きのすべり応力が作用
するため,圧電セラミックス円環のアース電極と一方の
出力電極との間には(+)電圧,アース電極と他方の出
力電極との間には(−)電圧の逆極性の電圧が発生す
る。
[Work] In the present invention, when an oscillating acceleration is applied in a direction connecting the centers of a pair of output electrodes symmetrical to each other with respect to the center axis, a slip stress acts on each output electrode portion on the piezoelectric ceramic ring. I do. At this time, since the polarization process is performed from the inner peripheral surface to the outer peripheral surface of the piezoelectric ceramics ring, a sliding stress acts on one of the pair of output electrodes in a direction opposite to the polarization direction, and the pair of output electrodes On the other side, a sliding stress acts in the same direction as the polarization direction, so that a (+) voltage is applied between the earth electrode and one output electrode of the piezoelectric ceramic ring, and between the earth electrode and the other output electrode. , A voltage having a polarity opposite to the (−) voltage is generated.

【0009】又,他の一対の出力電極においては,中心
軸はすべり応力方向と直交し,かつ分極方向は左記中心
軸度に対して対称となるため,他の一対の出力電極間に
は電圧が発生しない。従って,一対の出力電極間の差動
出力電圧は加えられた加速度の大きさにほぼ比例し,他
の一対の出力電極間の差動出力電圧は0となる。
In the other pair of output electrodes, the central axis is orthogonal to the direction of the sliding stress, and the polarization direction is symmetric with respect to the central axis, so that a voltage is not applied between the other pair of output electrodes. Does not occur. Therefore, the differential output voltage between the pair of output electrodes is substantially proportional to the magnitude of the applied acceleration, and the differential output voltage between the other pair of output electrodes becomes zero.

【0010】一方,前述の加速度と交差する方向の加速
度の場合は,一対の出力電極及び他の一対の出力電極
は,夫々の一対の出力電極を結ぶ直径方向の加速度の成
分に相当する電圧を出力することになる。よって,加速
度の方向とその大きさを差動出力電圧から検出すること
ができる。
On the other hand, in the case of acceleration in a direction intersecting with the above-described acceleration, the pair of output electrodes and the other pair of output electrodes apply a voltage corresponding to a component of a diametrical acceleration connecting each pair of output electrodes. Output. Therefore, the direction and magnitude of the acceleration can be detected from the differential output voltage.

【0011】[0011]

【実施例】以下,本発明の加速度センサについて図面を
用いて詳しく説明する。図1は本発明の実施例に係る加
速度センサの構造を示す斜視図,図2(a),(b),
(c)は図1の加速度センサに用いる圧電セラミックス
円環の(a)底面図,(b)正面図,(c)平面図であ
る。この例において圧電セラミックス円環1の内周面1
aと外周面1bそれぞれに電極を形成し,分極処理を施
し,分極処理後電極を取り除き,電極が除去された圧電
セラミックス円環1の一端面に90°間隔でこの端面を
4分割する位置に電極21,22,23,24を形成し
それぞれ出力電極とし,また一端面に対向する他端面に
全面電極25を形成しアース電極とし,この他端面を,
ベース3に固定して加速度センサとしている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an acceleration sensor according to the present invention will be described in detail with reference to the drawings. FIG. 1 is a perspective view showing the structure of an acceleration sensor according to an embodiment of the present invention, and FIGS.
2C is a bottom view, FIG. 2B is a front view, and FIG. 2C is a plan view of a piezoelectric ceramic ring used in the acceleration sensor of FIG. In this example, the inner peripheral surface 1 of the piezoelectric ceramic ring 1
a, electrodes are formed on each of the outer peripheral surface 1b, a polarization process is performed, and after the polarization process, the electrodes are removed. The electrodes 21, 22, 23, and 24 are formed and used as output electrodes, respectively, and the entire surface electrode 25 is formed on the other end surface facing one end surface to serve as a ground electrode.
The acceleration sensor is fixed to the base 3.

【0012】図3(a),(b),(c)は第1図の加
速度センサの動作原理の説明図で,(a)は平面図,
(b)は断面図,(c)は検出回路の構成図である。図
3(a),(b)において,出力電極22と24との中
心を結ぶ方向に振動的な加速度11が加わると,圧電セ
ラミックス円環1には出力電極22の部分と出力電極2
4の部分に矢印12で示すようなすべり応力が作用す
る。この時,圧電セラミックス円環1の内周面から外周
面方向即ち,破線の矢印13で示される方向に分極処理
されているため,出力電極22においては分極方向13
と逆向きなすべり応力12が作用し,また出力電極22
においては分極83方向と同じ向きのすべり応力12が
作用するため,圧電セラミックス円環1のアース電極2
5と出力電極22との間には(+)電圧,また,アース
電極25と出力電極24との間には(−)電圧の逆極性
の電圧が発生する。又,出力電極21と出力電極23の
中心軸はすべり応力方向12と直交し,かつ分極方向1
3はこの中心軸に対して対称となるため,出力電極21
と出力電極23との間には電圧が発生しない。
3 (a), 3 (b) and 3 (c) are explanatory views of the operation principle of the acceleration sensor shown in FIG. 1, (a) is a plan view,
(B) is a sectional view, and (c) is a configuration diagram of a detection circuit. 3A and 3B, when an oscillating acceleration 11 is applied in a direction connecting the centers of the output electrodes 22 and 24, the portion of the output electrode 22 and the output electrode 2
A sliding stress as shown by an arrow 12 acts on the portion 4. At this time, since the polarization processing is performed in the direction from the inner peripheral surface to the outer peripheral surface of the piezoelectric ceramic ring 1, that is, in the direction indicated by the dashed arrow 13, the polarization direction 13
A sliding stress 12 acts in a direction opposite to that of the output electrode 22.
In this case, a sliding stress 12 acts in the same direction as the polarization 83 direction.
5 and the output electrode 22, and a voltage of the opposite polarity of the (−) voltage is generated between the ground electrode 25 and the output electrode 24. The central axes of the output electrode 21 and the output electrode 23 are orthogonal to the slip stress direction 12 and
3 is symmetric with respect to this central axis, so that the output electrode 21
No voltage is generated between the output electrode 23 and the output electrode 23.

【0013】従って,図3(c)に示されるように,端
子14で検出される差動増幅器9による出力電極21と
出力電極23の差動出力電圧は0となり,端子15で検
出される出力電極22と出力電極24の差動出力電圧は
加えられた加速度の大きさにほぼ比例することになる。
同様にして,出力電極21と23の中心を結ぶ方向に振
動的な加速度が加わると,出力電極21と出力電極23
に逆極性の電圧が発生し,これら2つの出力電圧の差動
出力は加えられた加速度の大きさにほぼ比例することに
なる。
Therefore, as shown in FIG. 3 (c), the differential output voltage between the output electrode 21 and the output electrode 23 by the differential amplifier 9 detected at the terminal 14 becomes 0, and the output detected at the terminal 15 becomes zero. The differential output voltage between electrode 22 and output electrode 24 will be approximately proportional to the magnitude of the applied acceleration.
Similarly, when an oscillating acceleration is applied in a direction connecting the centers of the output electrodes 21 and 23, the output electrodes 21 and 23
And the differential output of these two output voltages is approximately proportional to the magnitude of the applied acceleration.

【0014】図3において,加えられる加速度の方向が
出力電極の対向軸方向と異なる場合は,それぞれ直交す
る出力電極の対向軸方向の成分が検出される。つまり,
2つの検出信号を処理することにより,加えられた加速
度の方向および大きさを求めることも出来る。更に,本
発明の実施例に係る加速度センサにおいては,検出軸と
直交する方向の振動,すなわち図3における圧電セラミ
ックス円環の中心軸方向の振動に対しては,各検出軸と
もに,対向する出力電極に発生する電圧の極性が同じと
なるため,それらの差動出力としてはほとんど出力され
ないことになる。
In FIG. 3, when the direction of the applied acceleration is different from the direction of the opposing axis of the output electrode, the components of the opposing axis of the output electrode that are orthogonal to each other are detected. That is,
By processing the two detection signals, the direction and magnitude of the applied acceleration can also be obtained. Further, in the acceleration sensor according to the embodiment of the present invention, for the vibration in the direction perpendicular to the detection axis, that is, the vibration in the direction of the center axis of the piezoelectric ceramic ring in FIG. Since the polarities of the voltages generated at the electrodes are the same, they are hardly output as differential outputs.

【0015】以上の説明は圧電セラミックス円環単体で
振動系を構成した場合について行ったが,検出すべき加
速度の周波数が低く,出来るだけ出力電圧感度を大きく
したい場合には,図4に示すように圧電セラミックス円
環1の一方の端部におもり4を負荷し,他方の端部をベ
ース3に固定する構造としても良い。また,本発明の実
施例に係る加速度センサにおいては,圧電セラミックス
のすべり応力により電圧を発生させる方式であり,分極
の向きと電極の面が平行であるためパイロ効果の影響が
すくない。
The above description has been made on the case where the vibration system is constituted by the piezoelectric ceramic ring alone. However, when the frequency of the acceleration to be detected is low and the output voltage sensitivity is to be increased as much as possible, as shown in FIG. The weight 4 may be applied to one end of the piezoelectric ceramic ring 1 and the other end may be fixed to the base 3. Further, in the acceleration sensor according to the embodiment of the present invention, the voltage is generated by the sliding stress of the piezoelectric ceramic, and the effect of the pyro effect is small since the direction of the polarization is parallel to the surface of the electrode.

【0016】[0016]

【発明の効果】以上に説明したように,本発明によれ
ば,単体の圧電セラミックス円環を使用した簡単な構造
で,セット時の角度調整が不要な加速度センサが得られ
実用的に非常に効果が大きい。
As described above, according to the present invention, it is possible to obtain an acceleration sensor having a simple structure using a single piezoelectric ceramic ring and not requiring an angle adjustment at the time of setting. Great effect.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施例に係る加速度センサの斜視図で
ある。
FIG. 1 is a perspective view of an acceleration sensor according to an embodiment of the present invention.

【図2】(a),(b),(c)は図1の加速度センサ
に用いる圧電セラミックス円環の構造図で,(a)は底
面図,(b)は正面図,(c)は平面図である。
2 (a), (b) and (c) are structural views of a piezoelectric ceramic ring used for the acceleration sensor of FIG. 1, (a) is a bottom view, (b) is a front view, and (c) is It is a top view.

【図3】(a),(b),(c)は本発明の実施例に係
る2軸加速度センサの動作原理の説明図で,(a)は平
面図,(b)は断面図,(c)は検出回路構成図であ
る。
FIGS. 3A, 3B and 3C are explanatory views of the operation principle of the two-axis acceleration sensor according to the embodiment of the present invention, wherein FIG. 3A is a plan view, FIG. (c) is a configuration diagram of the detection circuit.

【図4】本発明の2軸加速度センサの別の構造例を示す
斜視図である。
FIG. 4 is a perspective view showing another example of the structure of the two-axis acceleration sensor of the present invention.

【図5】従来の圧電方式の加速度センサの一例を示す側
面図である。
FIG. 5 is a side view showing an example of a conventional piezoelectric acceleration sensor.

【符号の説明】[Explanation of symbols]

1 圧電セラミックス円環 21,22,23,24 分割電極 25 アース電極, 3 ベース 4 おもり 5 ボルト 53 ベース 54 おもり 55 ボルト 56 端子板 57,57′ 圧電セラミックス円環 DESCRIPTION OF SYMBOLS 1 Piezoelectric ceramic ring 21, 22, 23, 24 Split electrode 25 Earth electrode, 3 Base 4 Weight 5 volts 53 Base 54 Weight 55 Volt 56 Terminal plate 57, 57 'Piezoelectric ceramic ring

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 実開 昭60−56275(JP,U) (58)調査した分野(Int.Cl.7,DB名) G01P 15/09 G01P 15/00 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-60-56275 (JP, U) (58) Field surveyed (Int. Cl. 7 , DB name) G01P 15/09 G01P 15/00

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 一端面を固定された圧電セラミックス円
環を備えた加速度センサにおいて、 前記圧電セラミックス円環の内周面と外周面との間に
方向の分極処理を施し、前記圧電セラミックス円環の一
方の端面に円周を4等分する分割電極を形成しそれぞれ
出力電極とするとともに他端面に全面電極を形成しアー
ス電極とし、前記圧電セラミックス円環のアース電極端
面を固定するとともに前記固定端を前記圧電セラミック
ス円環の中心軸と直角な方向に振動させた時、互いに向
かい合う出力電極に発生する電圧の差動電圧に基づいて
加速度を検出可能としたことを特徴とする加速度セン
サ。
1. An acceleration sensor having a piezoelectric ceramic ring having one end face fixed thereto, wherein a radial polarization process is performed between an inner peripheral surface and an outer peripheral surface of the piezoelectric ceramic ring, and the piezoelectric ceramic circular ring is provided. On one end face of the ring, divided electrodes are formed to divide the circumference into four equal parts, each is used as an output electrode, and the other end face is formed with a full-surface electrode to serve as a ground electrode. An acceleration sensor characterized in that when the fixed end is vibrated in a direction perpendicular to the center axis of the piezoelectric ceramic ring, acceleration can be detected based on a differential voltage of voltages generated at output electrodes facing each other.
JP2405327A 1990-12-06 1990-12-06 Acceleration sensor Expired - Fee Related JP3002900B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2405327A JP3002900B2 (en) 1990-12-06 1990-12-06 Acceleration sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2405327A JP3002900B2 (en) 1990-12-06 1990-12-06 Acceleration sensor

Publications (2)

Publication Number Publication Date
JPH04213068A JPH04213068A (en) 1992-08-04
JP3002900B2 true JP3002900B2 (en) 2000-01-24

Family

ID=18514939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2405327A Expired - Fee Related JP3002900B2 (en) 1990-12-06 1990-12-06 Acceleration sensor

Country Status (1)

Country Link
JP (1) JP3002900B2 (en)

Also Published As

Publication number Publication date
JPH04213068A (en) 1992-08-04

Similar Documents

Publication Publication Date Title
US5386726A (en) Vibratory gyroscope
JPH0949856A (en) Acceleration sensor
US6761070B2 (en) Microfabricated linear accelerometer
JPH11101816A (en) Angular acceleration sensor and method for detecting angular acceleration
JP3118660B2 (en) 2-axis acceleration sensor
JP3002900B2 (en) Acceleration sensor
US4611490A (en) Angular acceleration sensor
JP2607395B2 (en) Acceleration sensor
JP2607396B2 (en) Acceleration sensor
JPH06242135A (en) Driving circuit for angular velocity sensor
JP2671064B2 (en) 2-axis acceleration sensor
JP3092022B2 (en) 2-axis acceleration sensor
JP2946352B2 (en) Acceleration sensor
JP3148937B2 (en) Accelerometer
JP3070424B2 (en) Accelerometer mounting structure
JP2607403B2 (en) 2-axis acceleration sensor
JP2946362B2 (en) 2-axis acceleration sensor
Okada Development of tri-axial accelerometers using piezoresistance, electrostatic capacitance and piezoelectric elements
JP3136547B2 (en) 2-axis acceleration sensor
JP3136544B2 (en) Gyro device
JPH0954112A (en) Acceleration sensor device
Mizuno et al. Silicon bulk micromachined accelerometer with simultaneous linear and angular sensitivity
JP3250086B2 (en) Piezoelectric vibration gyro
SU962815A1 (en) Apparatus for measuring accelerations
JPH06230026A (en) Acceleration sensor

Legal Events

Date Code Title Description
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 19991020

LAPS Cancellation because of no payment of annual fees