JP2986893B2 - Semiconductor optical package - Google Patents
Semiconductor optical packageInfo
- Publication number
- JP2986893B2 JP2986893B2 JP2284276A JP28427690A JP2986893B2 JP 2986893 B2 JP2986893 B2 JP 2986893B2 JP 2284276 A JP2284276 A JP 2284276A JP 28427690 A JP28427690 A JP 28427690A JP 2986893 B2 JP2986893 B2 JP 2986893B2
- Authority
- JP
- Japan
- Prior art keywords
- fiber
- light receiving
- glass plate
- light
- receiving element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Optical Couplings Of Light Guides (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は光フアイバを通して伝播される光を検出する
半導体受光パツケージの光フアイバと受光素子との合わ
せ構造に関する。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical fiber and light receiving element of a semiconductor light receiving package for detecting light propagating through an optical fiber.
従来、光フアイバから出射された光を受光素子で把え
る受光パツケージては、特開昭55−166974号公報に提案
されているように、光フアイバから出射された光を（レ
ンズで集光し）受光素子に効率よく照射する。あるい
は、フアイバ先端を球面化した先球フアイバを用いてフ
アイバから出射された光と受光素子に照射するという方
法が受光パツケージは採られる。Conventionally, as a light receiving package in which light emitted from an optical fiber can be captured by a light receiving element, as disclosed in Japanese Patent Application Laid-Open No. 55-166974, light emitted from an optical fiber is collected by a lens. ) Irradiate light-receiving elements efficiently. Alternatively, a method of irradiating the light emitted from the fiber and the light receiving element by using a spherical fiber whose tip is made spherical is used as the light receiving package.
上記の従来技術ではフアイバから出射された光を効率
良く受光素子に照射させるため、レンズや先球フアイバ
の光軸を高精度に最適位置に合致させる必要がある。こ
の光軸合わせはフアイバに垂直な二方向（x,y）及び、
フアイバ軸方向（ｚ）の三方向の合わせが必要であつ
た。この三軸合わせ構造では軸合わせ後、長期安定性が
得られ難いという欠点がある。これはレンズ、フアイバ
の固定（レンズ、はんだによる固定）が温度変動の影響
を受けやすく、三軸方向に動きやすい構造となつている
という理由による。本発明の目的は光フアイバを、直
接、受光素子に接触、あるいは薄い透明材料を介在させ
ることでｚ方向の軸合わせを省略することが可能であ
り、光軸合わせを容易にし、同時に光軸ずれに対する安
定を著しく上げることにある。In the above prior art, in order to efficiently irradiate the light emitted from the fiber to the light receiving element, it is necessary to match the optical axes of the lens and the spherical fiber to the optimum position with high accuracy. This optical axis alignment is performed in two directions (x, y) perpendicular to the fiber, and
Alignment in three directions in the fiber axis direction (z) was required. This three-axis alignment structure has a disadvantage that it is difficult to obtain long-term stability after axis alignment. This is because the fixing of the lens and the fiber (fixation by the lens and the solder) is easily affected by the temperature fluctuation, and the structure is easy to move in three axial directions. An object of the present invention is to directly align an optical fiber with a light receiving element or to interpose a thin transparent material, thereby making it possible to omit axial alignment in the z direction, and to facilitate optical axis alignment, and at the same time, optical axis deviation To significantly increase the stability against
上記目的を達成するために、本発明は光軸合わせ（三
自由度）の内、光フアイバ方向の軸合わせを省くことが
できるようにしたものである。このため、フアイバと受
光素子との間に透明材料を挿入することで透明材料の厚
さ相当の間隔（位置合わせ）を容易に得ることができる
構造とした。In order to achieve the above object, the present invention is intended to omit the optical fiber alignment in the optical axis alignment (three degrees of freedom). For this reason, a structure in which a transparent material is inserted between the fiber and the light receiving element to easily obtain an interval (alignment) corresponding to the thickness of the transparent material is adopted.
また、光フアイバを透明材料に融着するという方法を
とることによつて、広面積の透明材料が受光素子を覆い
得ることから、レジンモールド構造の長期安定性に優れ
た受光パツケージを実現し、提供するものである。Also, by adopting a method of fusing an optical fiber to a transparent material, a wide area transparent material can cover the light receiving element, thereby realizing a light receiving package having excellent long-term stability of the resin mold structure, To provide.
光フアイバの端面は受光素子の受光部に接触してい
る。素子の表面は保護膜がある。このため光フアイバと
受光部の間隔は一定であり、ばらつきがない。光フアイ
バの軸方向の位置合わせが、このように接触させること
で一律に決まり、組立ての位置合わせは光フアイバに垂
直な二方向となる。これによつて、従来の三方向の位置
合わせに比べ位置合わせが容易となり、また、一方向の
位置変動が抑制されるため、固定後の変動に対する安定
性が著しく増す。フアイバの先端に薄いガラス板などの
透明材料の挿入、あるいは融着した場合にも、ガラス板
を受光部に接触させるため、フアイバ軸方向の位置合わ
せは不用となり、上記と同様に、固定後の安定性がよ
い。The end face of the optical fiber is in contact with the light receiving portion of the light receiving element. The surface of the device has a protective film. For this reason, the interval between the optical fiber and the light receiving section is constant, and there is no variation. The positioning of the optical fiber in the axial direction is uniformly determined by such contact, and the positioning of the assembly is performed in two directions perpendicular to the optical fiber. As a result, the positioning becomes easier than the conventional three-way positioning, and the one-way position fluctuation is suppressed, so that the stability against the fluctuation after fixing is remarkably increased. Even when a transparent material such as a thin glass plate is inserted or fused at the tip of the fiber, the glass plate is brought into contact with the light-receiving part, so positioning in the fiber axis direction is unnecessary. Good stability.
この構造が実現することにより、光路を妨げるものが
無くなるため、樹脂埋込みが可能となり樹脂モールドパ
ツケージが提供できる。By realizing this structure, there is no obstruction to the optical path, so that the resin can be embedded and a resin mold package can be provided.
以下、本発明の一実施例を第１図ないし第５図により
説明する。An embodiment of the present invention will be described below with reference to FIGS.
第１図はフアイバ１の端面を半導体受光素子２の受光
部に合わせた後、エポキシ系樹脂３で固定したものであ
る。素子に形成されているパツドにはあらかじめワイヤ
をボンデイングし、フアイバ１の他端から入射された光
を受光部に照射しながら最大光量、即ち、ワイヤを通し
て最大起電流（電圧）が発生する位置でフアイバを樹脂
固定する。なお、受光部表面には保護膜を形成し、フア
イバを接触させたとき受光部が破損することを防いでい
る。FIG. 1 shows a state in which the end face of the fiber 1 is aligned with the light receiving portion of the semiconductor light receiving element 2 and then fixed with an epoxy resin 3. A wire is previously bonded to the pad formed on the element, and the light incident from the other end of the fiber 1 is applied to the light receiving portion while the maximum amount of light, that is, the maximum electromotive force (voltage) is generated through the wire. Fix the fiber with resin. Note that a protective film is formed on the surface of the light receiving unit to prevent the light receiving unit from being damaged when the fiber is brought into contact.
第２図はフアイバの先端に0.1mm厚の石英ガラス板４
を当て、フアイバの周囲に樹脂を付けてガラス板と接合
し、その後で受光素子と位置合わせを行つて固定する。
フアイバの位置合わせは最大光量（起電流）が得られる
ところを検出して決定される。石英ガラス板の厚さは厚
い板を使用するとフアイバ端から受光部までの距離が増
えるため光束が拡散し、受光効率が低下する。このた
め、薄い石英ガラス板が適する。光フアイバと屈折率が
同じ石英ガラス板が使用するガラス板として優れるが他
のガラス材料の平板も使用できる。Fig. 2 shows a 0.1 mm thick quartz glass plate 4 at the tip of the fiber.
Then, a resin is applied to the periphery of the fiber and bonded to the glass plate, and then the light receiving element is aligned and fixed.
Fiber positioning is determined by detecting where the maximum light quantity (electromotive current) is obtained. If a thick quartz glass plate is used, the distance from the end of the fiber to the light receiving portion increases, so that the light beam is diffused and the light receiving efficiency decreases. For this reason, a thin quartz glass plate is suitable. Although a quartz glass plate having the same refractive index as that of the optical fiber is excellent as a glass plate to be used, a flat plate of another glass material can be used.
第３図はフアイバ先端を溶かしてガラス板に接合した
ものである。フアイバ融着装置を用いてフアイバ先端を
一部軟化させた後、ガラス板に押し付けて融着させて組
立てられる。FIG. 3 shows a state where the tip of the fiber is melted and joined to a glass plate. After the fiber tip is partially softened using a fiber fusion device, it is pressed against a glass plate and fused to be assembled.
第４図は第１図ないし第３図で組立てたフアイバと受
光素子のアセンブリをステム５上に載せ、キヤツプ６で
覆つてパツケージに仕上げたものである。ステムにはガ
ラスハーメを介してリード７が挿入され、受光信号を取
り出している。FIG. 4 shows a fiber and light receiving element assembly assembled in FIGS. 1 to 3 mounted on a stem 5 and covered with a cap 6 to complete a package. A lead 7 is inserted into the stem via a glass herm to extract a light receiving signal.
第５図はフアイバの先端に直角プリズムを接合したも
ので、プリズムの傾斜面（反射膜形成）で出射光を曲
げ、素子の受光部に照射する。ケースは平らな箱型であ
り、プリズムとフアイバをレジンで固定した後、ケース
内全体にレジンでモールドされる。In FIG. 5, a right-angle prism is joined to the tip of the fiber, and the emitted light is bent on the inclined surface (reflection film formation) of the prism and irradiated to the light receiving portion of the element. The case has a flat box shape, and after fixing the prism and the fiber with resin, the entire inside of the case is molded with resin.
この受光素子を内蔵させたパツケージでは、受光素子
表面とガラス板との間は樹脂を介在させる場合もある
が、わずかな空間を形成させる場合もある。空間を持た
せる場合には素子の受光部の周囲にわずかな突起部を設
け、この突起部にガラス板を接触させて形成する。In a package incorporating this light receiving element, a resin may be interposed between the surface of the light receiving element and the glass plate, but a slight space may be formed in some cases. When a space is provided, a slight protrusion is provided around the light receiving portion of the element, and a glass plate is brought into contact with this protrusion to form the device.
本発明によると、フアイバ先端を、受光部に接触させ
る。また、ガラス板を介在させて受光部に接触させる。
このため受光素子とフアイバの光軸合わせで必要な三軸
合わせの自由度を一つ減らすことができる。即ち、フア
イバ、ガラス板付フアイバを単に受光部に接触させるこ
とで位置合わせの自由度を減らすことが可能となる。こ
の位置合わせが二自由度となることでパツケージに形成
された後のフアイバ受光部の位置ずれによる光出力の低
下という問題が著しく改善される。According to the present invention, the tip of the fiber is brought into contact with the light receiving section. Further, the light receiving section is brought into contact with the light receiving section via a glass plate.
For this reason, the degree of freedom of the three-axis alignment required for the optical axis alignment of the light receiving element and the fiber can be reduced by one. That is, it is possible to reduce the degree of freedom in positioning by simply bringing the fiber or the fiber with a glass plate into contact with the light receiving portion. Since the alignment has two degrees of freedom, the problem of a decrease in optical output due to a positional shift of the fiber light receiving unit after being formed in the package is remarkably improved.
また、フアイバ先端をガラス板に接触，融着させるこ
とにより、フアイバ端からの光の反射が無くなり、この
反射による光量検出性能の安定性が改善される。In addition, by contacting and fusing the tip of the fiber to the glass plate, reflection of light from the end of the fiber is eliminated, and the stability of the light amount detection performance due to this reflection is improved.
また、フアイバと受光素子の間が透明材料で充たされ
るため、レジンモールド構造の受光パツケージが提供で
きる。Also, since the space between the fiber and the light receiving element is filled with the transparent material, a light receiving package having a resin mold structure can be provided.
第１図ないし第３図は本発明の一実施例を示すフアイバ
ー素子の配置構成を示す断面図、第４図はパツケージの
断面図、第５図は別のパツケージの説明図である。 １……光フアイバ、２……受光素子、３……樹脂、４…
…ガラス板、５……ステム、６……キヤツプ、７……リ
ード、８……プリズム。1 to 3 are cross-sectional views showing an arrangement of a fiber element according to an embodiment of the present invention, FIG. 4 is a cross-sectional view of a package, and FIG. 5 is an explanatory view of another package. 1 ... optical fiber, 2 ... light receiving element, 3 ... resin, 4 ...
... Glass plate, 5 ... Stem, 6 ... Cap, 7 ... Lead, 8 ... Prism.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 柳生 泰利 茨城県土浦市神立町502番地 株式会社 日立製作所機械研究所内 (72)発明者 佐々山 厚 長野県小諸市大字柏木190番地 株式会 社日立製作所小諸工場内 (56)参考文献 特開 昭62−28705（ＪＰ，Ａ) 実開 昭62−53409（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.6，ＤＢ名) G02B 6/42 - 6/43 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Yasutoshi Yagyu 502 Kandachi-cho, Tsuchiura-shi, Ibaraki Pref. Machinery Research Laboratory, Hitachi, Ltd. In-plant (56) References JP-A-62-28705 (JP, A) Fully open Sho-62-53409 (JP, U) (58) Fields investigated (Int. Cl. 6 , DB name) G02B 6 /42- 6/43
Claims (2)
し、前記光ファイバから出射された光が素子の受光部取
り込まれる状態でガラス板付きファイバを前記受光素子
に固定したことを特徴とする半導体光パッケージ。A thin glass plate is adhered to an end of an optical fiber, and a fiber with a glass plate is fixed to the light receiving element in a state where light emitted from the optical fiber is taken into a light receiving portion of the element. Semiconductor optical package.
を溶かして前記ガラス板に接合した半導体光パッケー
ジ。2. The semiconductor optical package according to claim 1, wherein a tip of said optical fiber is melted and joined to said glass plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2284276A JP2986893B2 (en) | 1990-10-24 | 1990-10-24 | Semiconductor optical package |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2284276A JP2986893B2 (en) | 1990-10-24 | 1990-10-24 | Semiconductor optical package |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04159504A JPH04159504A (en) | 1992-06-02 |
| JP2986893B2 true JP2986893B2 (en) | 1999-12-06 |
Family
ID=17676438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2284276A Expired - Lifetime JP2986893B2 (en) | 1990-10-24 | 1990-10-24 | Semiconductor optical package |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2986893B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6411758B1 (en) * | 2000-01-31 | 2002-06-25 | Motorola, Inc. | Method and apparatus for aligning a waveguide to a device |
| EP1154298A1 (en) * | 2000-05-09 | 2001-11-14 | Alcatel | Arrangement consisting of a photodiode and an optical fiber |
-
1990
- 1990-10-24 JP JP2284276A patent/JP2986893B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04159504A (en) | 1992-06-02 |
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