JP2983272B2 - High frequency cavity type electron gun - Google Patents
High frequency cavity type electron gunInfo
- Publication number
- JP2983272B2 JP2983272B2 JP2259381A JP25938190A JP2983272B2 JP 2983272 B2 JP2983272 B2 JP 2983272B2 JP 2259381 A JP2259381 A JP 2259381A JP 25938190 A JP25938190 A JP 25938190A JP 2983272 B2 JP2983272 B2 JP 2983272B2
- Authority
- JP
- Japan
- Prior art keywords
- frequency
- electron gun
- electrons
- cavity
- frequency cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Description
【発明の詳細な説明】 a.産業上の利用分野 本発明は高周波空胴型電子銃に関するもので、特に高
周波空胴共振器を利用した電子銃に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high-frequency cavity type electron gun, and more particularly to an electron gun using a high-frequency cavity resonator.
b.従来の技術 一般に、電子ビームを発生させる装置（以下、電子銃
という）では、直流電圧を使用した静電型電子銃が用い
られることが多い。すなわち、電界により電子を放射す
る陰極には、例えば先端が約100nmの曲率半径をもった
針状タングステンが用いられ、対向する陽極との間に数
kVの電圧を印加して、強電界（＞107V/cm）にすること
により電子放射させている。そして、放射電子の一部は
更に多段の陽極により所要のエネルギーにまで加速して
いる。b. Prior Art In general, in an apparatus for generating an electron beam (hereinafter referred to as an electron gun), an electrostatic electron gun using a DC voltage is often used. In other words, for the cathode that emits electrons by an electric field, for example, needle-shaped tungsten with a tip having a radius of curvature of about 100 nm is used, and a few tungsten atoms are provided between the cathode and the opposite anode.
Electrons are emitted by applying a kV voltage to create a strong electric field (> 10 7 V / cm). Some of the emitted electrons are further accelerated to the required energy by the multistage anodes.
しかし、近年ではこれに変わり、高周波電界を用いて
電子を放射させる高周波空胴型電子銃が、利用される機
会が増えてきている。この方法を用いると、小型の本体
で高いエネルギーの電子を発生させることができ、かつ
電子をさらに加速する場合に電子をバンチングする必要
がない、という利点がある。However, in recent years, the frequency of use of a high-frequency cavity electron gun that emits electrons by using a high-frequency electric field has been increasing. The use of this method has the advantage that high-energy electrons can be generated in a small body and there is no need to bunch the electrons when the electrons are further accelerated.
c.発明が解決しようとする課題 しかしながら、この方法によると発生した電子のエネ
ルギーは、第４図に示すように、時間に対して正弦波分
布をもつため、加速器に入射する際に磁場などを用い
て、必要なエネルギーの電子だけを取り出す必要があ
り、このとき振り分けられた他の電子は電力損失になる
という問題点がある。c. Problems to be Solved by the Invention However, according to this method, the energy of the generated electrons has a sinusoidal distribution with respect to time, as shown in FIG. In this case, it is necessary to extract only electrons having a necessary energy, and the other electrons distributed at this time have a problem that power loss occurs.
また、近年は加速器の開発も進み、加速用の高周波電
界に第三次高調波を混ぜて、電子を加速するための電界
を、多くの時間にわたって均一にした、所謂フラットト
ップ型の高周波型加速器も建設されているが、従来の高
周波空胴型電子銃では十分にこの装置の能力を引きだせ
なかった。In recent years, the development of accelerators has also progressed, and the so-called flat-top type high-frequency accelerator has been used in which the third harmonic is mixed with the high-frequency electric field for acceleration to make the electric field for accelerating electrons uniform for many hours. However, conventional high-frequency cavity electron guns did not fully exploit the capabilities of this device.
本発明にかかる点に鑑みなされたもので、その目的は
前記問題点を解消し、ある特定のエネルギーの含有率の
多い電子ビームが得られる高周波空胴型電子銃を提供す
ることにある。SUMMARY OF THE INVENTION It is an object of the present invention to provide a high-frequency cavity electron gun capable of solving the above-mentioned problems and obtaining an electron beam having a high specific energy content.
d.課題を解決するための手段 前記目的を達成するための本発明の構成は、高周波空
胴共振器の内部に、電界により電子放射する陰極を配設
した高周波空胴型電子銃において、前記空胴共振器が基
本周波およびその第三次高調波の双方で共振するように
形成されたことを特徴とする。d. Means for Solving the Problems The configuration of the present invention for achieving the object is a high-frequency cavity electron gun in which a cathode that emits electrons by an electric field is provided inside a high-frequency cavity resonator, The cavity is formed so as to resonate at both the fundamental frequency and its third harmonic.
e.作用 本発明は以上のように構成されているので、この高周
波空胴型電子銃は基本周波とその第三次高調波の両方で
励振される。e. Operation Since the present invention is configured as described above, this high-frequency cavity electron gun is excited at both the fundamental frequency and its third harmonic.
本発明の試験結果を、従来のものとの比較において説
明する。まず、従来の高周波空胴型電子銃により発生し
た電子のエネルギーは、第４図に示すように、時間に対
して正弦波分布をもっている。すなわち、ある一定の範
囲のエネルギーをもった電子が、全体に占める割合は非
常に少なく、例えば±１％の誤差内のエネルギーをもっ
た電子は、最も多いものでも全体の6.4％に達しない。
しかし、基本周波に適度な割合でその第三次高調波を加
えることによって、電子のエネルギーを、第３図に示す
ように、分布させることも可能であり、この場合±１％
の誤差内のエネルギーをもった電子は、最も多いもので
は全体の15％にも達する。The test results of the present invention will be described in comparison with the conventional test results. First, the energy of electrons generated by the conventional high-frequency cavity electron gun has a sine wave distribution with respect to time, as shown in FIG. That is, the ratio of electrons having a certain range of energy to the whole is very small, and for example, the largest number of electrons having an energy within ± 1% does not reach 6.4% of the whole.
However, by adding the third harmonic to the fundamental frequency at an appropriate ratio, the energy of the electrons can be distributed as shown in FIG. 3, in which case ± 1%
Electrons with energies within this error account for up to 15% of the total.
f.実施例 以下、図面に基づいて本発明の好適な実施例を例示的
に詳しく説明する。f. Examples Hereinafter, preferred examples of the present invention will be illustratively described in detail with reference to the drawings.
第１図は本発明の一実施例を示す高周波空胴型電子銃
の構成図、第２図は高周波空胴共振器の概略断面図であ
る。同図において、１は高周波空胴型電子銃、２は空胴
共振器、３は電子放射用の陰極部、４は先端が針状の陰
極、5,6は空胴共振器２の共振周波数を調整するための
同調機構（または共振周波数可変機構）で、５は基本周
波、６はその第三次高調波をそれぞれ可変できる部分に
配設されている。7,8はそれぞれ基本周波およびその第
三次高調波の整合機構で、独立に調整可能であり、9,10
はそれぞれ基本周波およびその第三次高調波を出力する
高周波発生器、11は陰極部3,高周波発生器9,10を動作さ
せるための電源装置である。FIG. 1 is a configuration diagram of a high-frequency cavity type electron gun showing one embodiment of the present invention, and FIG. 2 is a schematic sectional view of a high-frequency cavity resonator. In the figure, 1 is a high-frequency cavity type electron gun, 2 is a cavity resonator, 3 is a cathode portion for electron emission, 4 is a needle-shaped cathode, and 5 and 6 are resonance frequencies of the cavity resonator 2. Is a tuning mechanism (or a resonance frequency variable mechanism) for adjusting the fundamental frequency, and 6 is disposed at a portion where the third harmonic can be varied. 7, 8 are matching mechanisms for the fundamental frequency and its third harmonic, which can be adjusted independently.
Denotes a high-frequency generator for outputting the fundamental frequency and its third harmonic, respectively, and 11 denotes a power supply device for operating the cathode unit 3 and the high-frequency generators 9 and 10.
空胴共振器２は基本周波に対してTM010モードの円筒
型共振空胴であるが、通常の形状では第三次高調波に共
振しないので、第２図に示すように、縁2aの形状により
インピーダンスを変えて丁度３倍の比を持つ２つの周波
数で共振するように形成している。そして、前記空胴共
振器２を共振基本周波（TM010モード）および第三次高
調波（TM020モード）でそれぞれに励振し、各電力，位
相を調整して共振器２の半径方向中央部の電界が最大部
で時間的に極力平坦な特性20を持つよう調整する。この
状態で、陰極４より電子を発生し高周波電界を利用して
電子ビームを取り出すもので、12は発生した電子流の経
路を示す。Although the cavity resonator 2 is a cylindrical resonance cavity in the TM010 mode with respect to the fundamental frequency, it does not resonate with the third harmonic in a normal shape, and therefore, as shown in FIG. To resonate at two frequencies having a ratio of just three times. Then, the cavity 2 is excited at the resonance fundamental frequency (TM 010 mode) and the third harmonic (TM 020 mode) respectively, and each power and phase are adjusted to adjust the center of the cavity 2 in the radial direction. The electric field is adjusted so as to have a characteristic 20 as flat as possible at the maximum in time. In this state, electrons are generated from the cathode 4 and an electron beam is extracted using a high-frequency electric field. Reference numeral 12 denotes a path of the generated electron flow.
第３図はこの状態における前記空胴共振器２からの放
射電子のエネルギーＥの時間Ｔに対する分布図を示し、
第４図の従来のものによる場合の分布図と比較すると、
平坦な特性部分20を占める割合が多く、ある特定のエネ
ルギーの含有率が多い電子流を得ることができる。FIG. 3 shows a distribution diagram of the energy E of the radiated electrons from the cavity resonator 2 with respect to time T in this state,
Compared to the distribution diagram of the conventional case in FIG.
It is possible to obtain an electron flow that has a large proportion of the flat characteristic portion 20 and a large content of a specific energy.
なお、前記空胴共振器２の前記同調機構5,6は、２つ
のモードの共振周波数をそれぞれに微調整できるよう
に、できるだけ他モードの周波数に影響を及ぼさない一
実施例に設けるのが望ましい。The tuning mechanisms 5 and 6 of the cavity resonator 2 are desirably provided in an embodiment that does not affect the frequencies of the other modes as much as possible so that the resonance frequencies of the two modes can be finely adjusted. .
なお、本発明の技術は前記実施例における技術に限定
されるものではなく、同様な機能を果す他の態様の手段
によってもよく、また本発明の技術は前記構成の範囲内
において種々の変更，付加が可能である。Note that the technology of the present invention is not limited to the technology in the above-described embodiment, but may be implemented by means of another embodiment that performs the same function. Addition is possible.
g.発明の効果 以上の説明から明らかなように本発明の高周波空胴型
電子銃によれば、空胴共振器を、基本周波とその第三次
高調波との双方で共振するように形成したので、ある特
定のエネルギーの含有率の多い電子ビームを得ることが
可能となる。g. Effects of the Invention As is clear from the above description, according to the high-frequency cavity electron gun of the present invention, the cavity resonator is formed so as to resonate at both the fundamental frequency and its third harmonic. Therefore, it is possible to obtain an electron beam having a high specific energy content.
また、本発明は電子のエネルギーの均一性を要求され
る技術、例えば電子線直射型の物性加工における加工効
率の向上等にとって、極めて有用である。Further, the present invention is extremely useful for a technique that requires uniformity of electron energy, for example, for improving the processing efficiency in electron beam direct type physical property processing.
第１図は本発明の一実施例を示す高周波空胴型電子銃の
構成図、第２図は空胴共振器の概略断面図、第３図は本
実施例による放射電子のエネルギーの時間に対する分布
図、第４図は従来の空胴共振器による放射電子のエネル
ギーの時間に対する分布図である。 １……高周波空胴型電子銃、 ２……空胴共振器、 ４……陰極、 ９……高周波（基本周波）発生器、 10……高周波（第三次高調波）発生器。FIG. 1 is a configuration diagram of a high-frequency cavity type electron gun showing one embodiment of the present invention, FIG. 2 is a schematic sectional view of a cavity resonator, and FIG. FIG. 4 is a distribution diagram with respect to time of the energy of radiated electrons by a conventional cavity resonator. 1. High frequency cavity electron gun, 2. Cavity resonator, 4. Cathode, 9 High frequency (fundamental frequency) generator, 10 High frequency (third harmonic) generator.
Claims (1)
子放射する陰極を配設した電子銃において、 前記空胴共振器が基本周波およびその第三次高調波の双
方で共振するように形成されたことを特徴とする高周波
空胴型電子銃。1. An electron gun having a cathode for emitting electrons by an electric field inside a high-frequency cavity resonator, wherein the cavity resonates at both a fundamental frequency and a third harmonic thereof. A high frequency cavity type electron gun characterized by being formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2259381A JP2983272B2 (en) | 1990-09-28 | 1990-09-28 | High frequency cavity type electron gun |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2259381A JP2983272B2 (en) | 1990-09-28 | 1990-09-28 | High frequency cavity type electron gun |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04137441A JPH04137441A (en) | 1992-05-12 |
| JP2983272B2 true JP2983272B2 (en) | 1999-11-29 |
Family
ID=17333344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2259381A Expired - Lifetime JP2983272B2 (en) | 1990-09-28 | 1990-09-28 | High frequency cavity type electron gun |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2983272B2 (en) |
-
1990
- 1990-09-28 JP JP2259381A patent/JP2983272B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04137441A (en) | 1992-05-12 |
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