JP2982142B2 - Substrate transfer device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transfer device for transferring a flat substrate.

[0002]

2. Description of the Related Art As an example of this type of substrate transfer apparatus, there is a frame transfer apparatus provided in a wire bonding apparatus shown in FIG. Since the detailed structure of the wire bonding apparatus is disclosed in Japanese Utility Model Laid-Open No. Hei 4-20232, the description of the entire apparatus will be briefly described here, and only the main parts will be described in detail.

As shown in FIG. 26, in the wire bonding apparatus, a magazine M in which a plurality of lead frames L＼F are arranged and accommodated (arranged in a direction perpendicular to the paper surface) is loaded into a loader 151. A plurality of IC chips 153 are mounted on each of the lead frames L # F at an equal pitch along the longitudinal direction.

For example, one of the lowermost frames of the lead frames L # F in the loaded magazine M is extruded by the pushing means 154, further transferred by the frame transferring means described later, and brought on the heater plate 155. You. The lead frame L # F transferred by the frame transfer means is guided by a pair of guide rails 157, 158 arranged corresponding to both sides thereof. As shown by an arrow N in the figure, the distance between the guide rails 157 and 158 is adjustable, and the guide rails 157 and 158 can correspond to various lead frames having different widths.

When the lead frame L @ F reaches the heater plate 155 as described above, the frame transfer means intermittently feeds the lead frame L @ F by the arrangement pitch of each IC chip 153, and accordingly, IC chip 1
53 and a lead (not shown) formed on the lead frame are bonded by bonding means 160 using a conductive wire. Then, the lead frame L # F that has completed the bonding is further fed back by the frame transfer means, and is accommodated in an empty magazine M loaded in an unloader 162 having the same configuration as the loader 151.

Next, when the positioning means described later is operated, the magazine M is lowered by one pitch of the arrangement pitch of the accommodated lead frames L＼F, and the above-described series of operations is performed two times from the lowermost stage. This is performed for the lead frame of the eye. Hereinafter, the process is repeated until the bonding is completed for each lead frame L # F in the magazine M.

Here, the loader 151 will be described in detail. As described above, since the unloader 162 has the same configuration as the loader 151, the description thereof is omitted.

[0008] As shown schematically in FIG.
The reference numeral 51 designates lowering or raising the magazine M by the arrangement pitch of the lead frames L # F in order to extrude the lead frames L # F arranged and accommodated in the magazine M one by one by the pushing means 154 described above. Positioning means 165 for positioning by making it perpendicular to the paper surface), a movable base 166 on which the positioning means 165 is mounted, and a magazine M provided on the movable base 166 to move the magazine M downward (or upward). And a regulating means 167 for regulating in a vertical horizontal plane. However, the regulation of the magazine M by the regulating means 167 does not mean that the magazine M is completely fixed, but is a regulation in which an appropriate gap is provided between the magazine M and the positioning means 165.
Allows the magazine M to move down (or up). The positioning means 165
, The pushing means 154, and the above-described frame transfer means (described later) constitute a frame transfer device as a substrate transfer device.

The movable base 166 is mounted on a gantry 170, which is the main body of the wire bonding apparatus, via a guide mechanism (not shown). The position can be adjusted in a direction parallel to N.

Here, the lead frame L # F pushed out of the magazine M on the loader 151 by the pushing means 154 is transferred onto the heater plate 155, and further transferred to the magazine M on the unloader 162 at the subsequent stage. The transfer means will be described in detail.

This frame transfer means has a gripping mechanism 241 shown in FIG. As shown in FIG. 27, the holding mechanism 241 includes a pair of holding members 245 and 246 for holding the lead frame L # F from above and below.
Opening and closing means (described later) for vertically opening and closing relatively to hold and release the gripping member F;
A gripping member moving means (not shown) for moving the gripping mechanism 241 including 46 in the direction in which the lead frame L # F is to be transported is provided.

As shown in FIG. 27, both holding members 245 and 246 both support shaft 245a on slider 248,
246a so as to be swingable through each of them,
The claw portions 245b and 246b provided at each end grip the lead frame L # F. The slider 248 is provided on a base (not shown) as a main body of the wire bonding apparatus.
On the base 250, the lead frame L # F is reciprocally movable in a direction in which the lead frame L # F is to be transferred, in this case, in a direction perpendicular to the sheet of FIG. The above-mentioned gripping member moving means moves the slider 248.

A coil spring 252 is hung between the other ends of the two gripping members 245 and 246, and the two gripping members are urged by the coil spring 252 in a direction to open each other. An adjusting screw 253 is screwed into the gripping member 246 arranged on the lower side,
The tip of the adjusting screw is engaged with the upper gripping member 245. The gripping member 24 is located below the slider 248.
Solenoid plunger 25 for applying a driving force to motor 6
4 are provided.

In the frame transfer means having the above-described structure, when power is supplied to the solenoid plunger 254, the output shaft 254a performs a projecting operation, and the output shaft 25
4a rocks the free end of the lower gripping member 246 so as to push it up against the urging force of the coil spring 252. Then, at the same time, this power is also transmitted to the upper holding member 245 via the adjustment screw 253 and is swung, whereby the lead frame L # F is held. When the power supply to the solenoid plunger 254 is cut off, both of the gripping members 245 and 246 are swung in the opening direction by the coil spring 252, and the gripping state of the lead frame L # F is released. Then, the slider 248 is moved in accordance with the opening / closing operation, and the lead frame L＼F is brought onto the heater plate 155 as shown in FIGS.

[0015]

Recently, in the above-described substrate transfer apparatus, it is desired that the transfer of the substrate and the positioning of the substrate at a desired position be performed with high accuracy. An object is to provide a transport device. Further, the present invention relates to the substrate transfer apparatus, and further has an object to achieve simplification of handling at the time of transportation and the like and reduction of cost.

[0016]

A substrate transfer apparatus according to the present invention.
Is a base part on the fixed side, and the base is detachably connected to each other.
Movable to guide the board along a predetermined path
Side guide member and each of the guide members is driven to
Guide member driving means for coming and going with respect to the
Movably provided, and relatively open and close to open the substrate.
A plurality of gripping members to grip, and opening and closing the gripping members
Opening and closing means, and moving the gripping member in the substrate transport direction.
Gripping member moving means for moving the gripping member
Extends in the direction of contact and separation of the guide member, and
A movable member guided and movable in the transport direction;
The moving member is provided with a driving force to move the moving member to the substrate.
Driving force applying means for moving in the transport direction, and the moving member
Are disposed so as to be sandwiched in the substrate transport direction,
A plurality of rotating members pivotally supported on the gripping member;
Wherein the gripping member is configured such that the rotating member is the moving member.
By rolling along the direction of contact and separation of the guide member
Is relatively movably connected to the guide member.
The gripping member moving means includes the guide member and the gripping portion.
That is mounted on the base part independently of the material.
You. Also, at least one of each of the rotating members,
The position can be adjusted.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, a wire bonding apparatus equipped with a substrate transfer device according to an embodiment of the present invention will be described with reference to the accompanying drawings. In this embodiment, wire bonding will be described as an example, but the present invention is of course applicable to die bonding and the like. Since the wire bonding apparatus is configured similarly to the conventional wire bonding apparatus shown in FIG. 26 except for the parts described below, the description of the entire wire bonding apparatus is omitted, and only the main part is described. To In the following description, the same components as those of the conventional wire bonding apparatus are denoted by the same reference numerals.

The structure according to the present invention is provided in an area indicated by reference numeral J in FIG. As is clear from the figure, a bonding stage (this bonding stage is the IC chip 153 to be connected by bonding, and a plurality of IC chips 153 before and after the bonding stage are included in the bonding stage in the lead frame L $ F, that is, the entire length of the substrate). I
A bonding operation is performed on the heater plate 155 acting as a stage portion carrying the portion on which the C chip is mounted) and the lead frame L # F brought on the bonding stage. The bonding means 160 and the lead frame L # F extruded from the magazine M loaded in the loader 151 at the preceding stage by the pushing means 154 are brought onto the bonding stage, and the lead frame L # after the bonding connection is completed. F, which transports F toward the magazine M on the unloader 162 at the subsequent stage (described in detail later), and the lead frames L # F which are transported by the frame transport device, and are arranged corresponding to both sides of the lead frame. A guide rail as a guide member for guiding the frame L＼F along a predetermined path. Such as Le 2 and 3 are disposed.

As shown, both guide rails 2
And 3 are not continuous over their entire lengths, but are formed by connecting divided rails 4, 5 and 6, 7 each having a length of about half of the total length at predetermined intervals. by the way,
Since each mechanism included in the area J is relatively complicated, an attempt was made to conceptually draw it as a skeleton diagram in order to facilitate understanding of its configuration, and is shown in FIGS. 24 and 25. Therefore, please refer to both figures. However, the details of the drawing method of the skeleton diagram will be described later. Also,
FIGS. 24 and 25 are views in which the configuration originally shown as one figure is divided into two figures in order to clearly show the details in detail. Line k-
By making k coincide with each other, the original figures can be combined.

FIG. 2 is a plan view of each mechanism in the area J shown in FIG. 1. FIGS. FIG. FIG. 6 is a plan view showing a part of a part of a mechanism included in the area J in a sectional view.
10 to FIG. 10 are shown by arrows DD and EE in FIG.
It is a figure which shows the arrow view, FF arrow view, and GG arrow view.

As shown in FIG. 2 to FIG. 5 in these figures, the wire bonding apparatus is provided with a base portion 9 in the area J on which the above mechanisms are mounted. The base portion 9 is made of steel, and is fixed on a gantry 170 (see FIG. 1) as a main body of the wire bonding apparatus by bolts or the like. Hereinafter, the configurations of various mechanisms mounted on the base unit 9 will be described in order.

First, the guide rails 2 and 3 will be described in detail.

As described above, both guide rails 2 and 3
Consists of two divided rails 4, 5 and 6, 7 in a row. Each of these divided rails 4 to 7 is configured as follows.

Since the four divided rails 4 to 7 have the same configuration, only the divided rail 6, for example, will be described as a representative. As shown in FIGS. 11 and 12, the split rail 6 includes a lower block 6b having a horizontal guide surface 6a for guiding a lead frame L フ レ ー ム F transferred by a frame transfer means (described later) on a lower surface side thereof. And an upper plate 6d having a horizontal guide surface 6c fixed to the upper portion of the lower block 6b and guiding the upper surface of the lead frame L # F. The lower block 6b is formed with a vertical guide surface 6e which guides the side end of the lead frame L # F perpendicularly to the horizontal guide surface 6a. As is clear from FIG. 11, on the lower surface of the end of the upper plate 6d,
A tapered surface 6f is formed to facilitate entry of the lead frame L # F into a guide path defined by the horizontal guide surfaces 6a, 6c and the vertical guide surface 6e.
As shown in FIGS. 1 and 4 and FIGS. 11 and 12, a small ball bearing 6g is disposed in the vicinity of the tapered surface 6f. Promote the change. 2 to 5, the lower block 6b of the split rail 6 is used.
And the lower block which the other divided rails 4, 5 and 7 each have, together with the upper plate 6d.
b, 5b, 7b, and the upper plate is denoted by reference numeral 4.
d, 5d and 7d. A ball bearing similar to the ball bearing 6g provided on the above-mentioned split rail 6 is also provided on the other split rails 4, 5, and 7. In FIGS. 7 g,
4 g.

The pair of left and right guide rails 2 and 3 composed of the above-mentioned divided rails 4 and 5 and 6 and 7 can increase or decrease the distance between the rails. It is configured to be able to respond to changes in the frame width dimension. Subsequently, a configuration for adjusting the rail interval will be described.

First, each of the above-mentioned divided rails 4 to 7 is movably attached to the above-mentioned base 9 by the following configuration.

As shown in FIGS. 2 to 5, a pair of track rails 11 are provided on the base 9 near the left and right sides.
a and 12a are attached parallel to each other in the front-rear direction. In each of the drawings, the direction indicated by arrow X and the opposite direction are defined as the left-right direction of the wire bonding apparatus, the direction indicated by arrow Y and the opposite direction are defined as the front-rear direction, and the direction indicated by arrow Z. The opposite direction will be described as the up-down direction.

On each of the track rails 11a and 12a, three sliders 11b and 12b are slidably mounted, respectively.
a, 12a and the sliders 11b, 12b constitute a linear motion guide unit. A pair of front and rear movable frames 14 and 15 extending in the left and right direction (the direction of the arrow X and the opposite direction) are provided, and the movable frames 14 and 15 are provided at both ends thereof with the sliders 11b, 12b. For more information,
The left end of the front movable frame 14 is fastened to one slider 11b by a bolt (not shown), and the right end is fastened to two sliders 12b. However, the movable frame 14 and each slider 11
An auxiliary frame 17 which is formed to have substantially the same length as the movable frame 14 and also has a function as a spacer is interposed between the movable frame 14 and the movable frame 14b. Further, as for the movable frame 15 arranged rearward, the left end portion is fastened to the two sliders 11b, and the right end portion remains as one slider 12b.
b.

As shown in FIGS. 2 to 5, the front movable frame 14 includes two sets of two brackets, a total of four brackets 18 and 19, which are bolted (not denoted by reference numerals). Installed. Each bracket 1
Reference numerals 8 and 19 extend upward, and the front divided rails 6 and 7 of the above-mentioned four divided rails are fastened to the upper ends of the brackets 18 and 19 by a bolt (not shown). ing.

On the other hand, as shown in FIGS.
A bracket 15a extending upward is integrally formed on the rear movable frame 15, and the other two divided rails 4 and 5 are attached to the bracket 15a by bolts (not denoted by reference numerals). Has been concluded.

In the above configuration, each slider 11
When the rails b and 12b reciprocate with respect to the track rails 11a and 12a, a pair of left and right guide rails 2 and 3 (reference numerals refer to FIG. 1), each of which includes the divided rails 4 to 7, are movable. With the frames 14 and 15 being close to and apart from each other, the rail interval is adjusted.

Next, guide member driving means for moving the two guide rails 2 and 3 serving as the guide members so as to move toward and away from each other will be described. First, the configuration of the guide member driving means for moving the rear guide rail 2 (comprising the divided rails 4 and 5) will be described.

3 to 5, the guide member driving means for the guide rail 2 is designated by the reference numeral 21 as a whole.
Indicated by As shown in the drawing, the guide member driving means 21 includes a bracket 21a fixed on a rear left portion of the base portion 9 using a bolt (not shown). A screw shaft 21b is rotatably attached to both ends of the bracket 21a via bearings (not shown). The screw shaft 21b is connected to the guide rail 2
Are provided so as to extend in the front-rear direction (the direction of the arrow Y and the direction opposite thereto) in which the movement is to be performed.

A pulse motor 21c is disposed below the bracket 21a and is fixed to the base 9. A toothed pulley 21d and 21e are fitted on the output shaft (not shown) of the pulse motor 21c and the end of the screw shaft 21b, respectively. Is wound around the toothed belt 21f.

A nut 21g is screwed onto the screw shaft 21b, and the nut 21g is fixed to the rear movable frame 15 to which the guide rail 2 is attached. In such a configuration, the nut 21g is reciprocated by the forward or reverse rotation of the pulse motor 21c,
The guide rail 2 moves together with the movable frame 15 connected to the nut 21g. Here, the components of the guide member driving means 21 are summarized as follows.
a, screw shaft 21b, pulse motor 21c, toothed belt wheels 21d, 21e, toothed belt 21f, nut 21g, leaf spring 21h, sensor 21i, light shielding plate 2
1j and peripheral small parts related to these members.
Incidentally, the nut 21g is not directly fixed to the movable frame 15, but is connected via a leaf spring 21h shown in FIGS. This leaf spring 21h is provided for the following reason.

That is, in order to move the guide rail 2 smoothly, the nut 21g needs to move smoothly without twisting or the like with respect to the rotation of the screw shaft 21b. However, between the movable frame 15 to which the nut 21g is fixed and the bracket 21a supporting the screw shaft 21b, a number of members such as the base 9, track rails 11a and 12a, and sliders 11b and 12b are interposed. There is a concern that due to the accumulation of the mutual assembling errors of these members, the screwing accuracy of the nut 21g with respect to the screw shaft 21b may not be obtained. The leaf spring 21h is for absorbing the accumulated error by its bending. However, since the leaf spring 21h has sufficient rigidity in the power transmission direction, there is no hindrance to power transmission.

It should be noted that, as shown in FIG.
A sensor 21i made of a photocoupler is attached to the rear end of the bracket 21a to which the bracket b is attached.
The sensor 21i is provided to detect that the nut 21g, that is, the guide rail 2 has moved to the rearmost position (the direction opposite to the arrow Y direction) of the movement stroke. The method of detection is such that light constantly emitted from the light emitting element (not shown) of the sensor 21i toward the light receiving element is applied to the light shielding plate 21 attached to the nut 21g.
j (also shown in FIG. 4) to generate a signal from the sensor 21i.

On the other hand, as shown in FIG.
Front guide rail 3 (consisting of split rails 6 and 7)
The guide member driving means 22 for moving the guide member is provided. The guide member driving unit 22 is configured in the same manner as the above-described guide member driving unit 21 for the guide rail 2, and thus a detailed description is omitted. However, in each drawing, the components shown in the drawings among the components of the guide member driving means 22 are the same as those corresponding to the components 21a, 21b,... Of the other guide member driving means 21. 22a, with the letters a, b,.
22b,...

Here, the operation of adjusting the distance between the guide rails 2 and 3 will be briefly described. That is, first, the respective pulse motors 21c and 22c of the guide member driving means 21 and 22 are reversely rotated, and the guide rails 2 and 3 are moved to the movement limit positions in the direction away from each other. The fact that the two guide rails 2 and 3 have reached this movement limit position is confirmed by the detection signals being emitted from the sensors 21i and 22i shown in FIGS. This movement limit position is set as a reference position for each of the guide rails 2 and 3. Subsequently, the pushing means 154 shown in FIG. 1 is operated, and one lead frame L # F is pushed out of the magazine M on the loader 151 so that a part thereof is located between the guide rails 2 and 3. Lead frame L＼F
This is detected by the sensor 24a shown in FIGS. 2 to 5. As shown in these figures, a sensor 24b similar to the sensor 24a is provided. The sensor 24b is located at a position where the rear end of the lead frame L＼F can be pushed by a frame sending means described later. It is to detect that it has reached. The sensors 24a and 24b are, for example, magnetic proximity sensors.

Based on the signal from the sensor 24a, the pulse motors 21c and 22c are rotated forward, and the guide rails 2 and 3 approach the protruding lead frame LF. Then, the closest approach is confirmed by the signals from the sensors 24c and 24d shown in FIGS. 2 to 5, and the pulse motors 21c and 22c, and thus the guide rails 2 and 3, are stopped. In addition, these sensors 24c, 2
4d is, for example, a fiber sensor. Thereafter, the two pulse motors 21c and 22c are slightly reversely rotated by several pulses, whereby the vertical guide surfaces of the guide rails 2 and 3 (FIG. 11 and FIG. (Shown) and a side end of the lead frame L # F, so that the lead frame L # F can be transported. In addition, since the movement amount from the above-mentioned movement limit position set as the reference position of both guide rails 2 and 3 to this point can be known by the number of pulses, etc., it will be newly treated based on this movement amount. Lead frame L＼F
Can be obtained by calculation.

As shown in FIGS. 2 and 5, another sensor 24e, in this case a fiber sensor, is provided on the guide rail 2 (the divided rail 4) and near the heater plate 155. In this sensor 24e, the tip of the lead frame L フ レ ー ム F is
This is for detecting that the vehicle has reached the vicinity of No. 5.

Next, frame transfer means for transferring the lead frame L # F will be described. The frame transfer means transfers the lead frame L＼F extruded from the magazine M on the loader 151 shown in FIG. 1 by the pushing means 154 (shown in FIG. 1) to the frame guide defined by the guide rails 2 and 3 described above. The lead frame L # F is carried into the heater plate 155 through the path, and transferred to the magazine M on the unloader 161 at the subsequent stage after the bonding connection is completed.

This frame transfer means is shown in FIGS.
, A pair of left and right gripping mechanisms indicated by reference numerals 26 and 27, respectively. These gripping mechanisms 26 and 27
Has a pair of upper and lower gripping members 26a, 26b, 27a and 27b for gripping one side end of the lead frame L # F in the vertical direction (the direction of the arrow Z and the opposite direction). Prior to a detailed description of the two gripping mechanisms 26 and 27, first, each of the gripping members 26a, 2
6b, 27a, 27b in the right and left direction (the direction of arrow X and the opposite direction) to which the lead frame L＼F is to be transferred (the base portion 9 as a fixed side).
The gripping member moving means for moving (relative to) will be described.

The two gripping mechanisms 26 and 27 are mounted on a movable bracket indicated by reference numeral 30 in FIGS. However, FIGS. 5 and 10 show only a part of the movable bracket 30. As is particularly clear from FIGS. 3, 4 and 6, the movable bracket 30 is formed in a flat plate shape as a whole and in a U-shape that opens upward, and has a main surface thereof. It is provided to be vertical. The one gripping mechanism 26 is attached to one side 30a of the U-shape of the movable bracket 30 on the left side, and the other gripping mechanism 27 is attached to the other side 30b on the right side.

The movable bracket 30 is moved in the left-right direction (arrow X), which is the direction in which the lead frame L＼F is transferred.
Direction and the opposite direction). Specifically, as shown in FIGS. 3, 4, and 7 to 9, the front portion of the movable frame 14 supporting the front guide rail 3 (comprising the divided rails 6 and 7) is
One track rail 31a is provided extending in the left-right direction, and a bolt (not denoted by a reference numeral) is provided.
Installed by. As shown in FIGS. 2 and 6, two sliders 31b are slidably mounted on the track rail 31a, and the track rail 31a and both sliders 31b constitute a linear motion guide unit. . As is particularly clear from FIGS. 3 and 7, the movable bracket 30 described above is fastened to these sliders 31b by bolts (not denoted by reference numerals). In this configuration, each slider 31b
Reciprocates with respect to the track rail 31a, so that the movable bracket 30 and the above-mentioned two gripping mechanisms 26 and 27 move in the left and right direction (the direction of the arrow X and the direction opposite thereto) to which the lead frame L＼F is to be transferred. I do. In addition, as is clear from the above configuration, each of the gripping mechanisms 2
Reference numerals 6 and 27 denote a movable direction of the guide rail 3 with respect to the base 9 together with the guide rail 3 as a guide member for guiding the lead frame L / F (the direction of the arrow Y and the opposite direction).
Is coupled to the guide rail 3 to move at.

As shown in FIG. 3 and FIGS. 7 to 10,
A lower part (arrow Z)
(A direction opposite to the opposite direction) is formed. A small bracket 33 is attached to the rear side of the protruding portion 30c so as to extend in the left-right direction (the arrow X direction and the opposite direction). Then, on the lower surface of both ends of the small bracket 33, 1
Each ball bearing 34 is provided. The rotation axes of the ball bearings 34 coincide with the vertical direction (the direction of the arrow Z and the opposite direction).

As shown in FIGS. 3, 7, and 9 , the guide rails 2 and 3 are sandwiched between the ball bearings 34 in the lead frame transport direction (the direction of the arrow X and the opposite direction). How to move
The moving member 36 is provided so as to extend in the direction (the direction of the arrow Y and the direction opposite thereto) . As is clear from FIGS. 7 and 9, the moving member 36 is formed in a substantially rectangular plate shape, and is moved by a linear motion guide unit including a track rail 37a and a slider 37b in the lead frame transport direction (the direction indicated by the arrow X and its direction). (In the opposite direction) and is free to move. The track rail 37a is fastened to the base 9 by bolts (not shown). Further, the rear end of the moving member 36 is fixed to the slider 37b by a bolt (not shown).

When the movable frame 14 is moved to move the guide rail 3 for adjusting the rail interval, the two ball bearings 34 are moved forward (in the direction of arrow Y) or rearward (in the direction of arrow Y) together with the movable frame 14. Move in the opposite direction) and roll along the side surface of the moving member 36.

That is, the moving member 36 is movable by being guided by the linear guide unit (track rail 37a and slider 37b) in the lead frame transport direction (the direction of the arrow X and the opposite direction), and is movable. For the two gripping mechanisms 26 and 27 provided on the movable bracket, the front-rear direction (the direction of the arrow Y and the direction opposite thereto), which is the moving direction of the guide rail 3
Are connected so as to be relatively movable. In such a configuration, when the driving force is applied to the moving member 36 by the driving force applying means described later and the moving member 36 moves in the left and right direction (the direction of the arrow X and the opposite direction), the movable bracket 30 and the two gripping mechanisms are provided. 26 and 27 also move in the same direction. The movable bracket 30 and the two gripping mechanisms 2
When the members 6, 27 move in the front-rear direction (the direction of the arrow Y and the opposite direction) together with the guide rail 3, the moving member 36
Only the two ball bearings 34 roll along both side surfaces thereof, and do not move in the front-rear direction. In FIG. 7, at least one of the pair of ball bearings 34 provided in front and rear with the moving member 36 interposed therebetween, at least one of them, in this case, the right ball bearing 34 can be adjusted in position. Specifically, a pin 34a that supports the ball bearing 34 with respect to the small bracket 33 is an eccentric pin. The eccentric pin has two shaft portions whose axes are shifted from each other. One of the two shaft portions is fitted to the small bracket 33, and the other is fitted to the ball bearing 34. That is, by turning the eccentric pin using a driver or the like, the position of the ball bearing 34 can be adjusted and the side surface of the moving member 36 can be contacted with high precision. As described above, the two ball bearings 3
4, the driving force is reliably transmitted to the moving member 36 regardless of the position of the two ball bearings.
6, 27 can be moved to a desired position with high precision.

Next, a driving force applying means for applying a driving force to the moving member 36 in order to move the movable bracket 30 and the two gripping mechanisms 26 and 27 in the lead frame transport direction will be described.

As shown in FIGS. 3 and 4, a ball screw shaft 39 is rotatably mounted on the base portion 9 at both ends thereof via bearings (not shown). The ball screw shaft 39 is provided so as to extend in the left-right direction (the direction of the arrow X and the direction opposite thereto) in which the moving member 36 should move.

A pulse motor 40 is disposed in front of the ball screw shaft 39 and is fixed to the base 9. The output shaft 40a of the pulse motor 40
(See FIG. 4) and toothed belt wheels 41a and 41b are fitted to the ends of the ball screw shaft 39, respectively, and the toothed belt 41c is wound around the toothed belt wheels 41a and 41b. ing.

A nut 42 (shown in FIG. 3) is screwed into the ball screw shaft 39, and the nut 42 is fixed to a slider 37b to which the moving member 36 is attached. In this configuration, the nut 42 is reciprocated by the forward or reverse rotation of the pulse motor 40, and a driving force is applied to the moving member 36 coupled to the nut 42 to move the moving member 36.

The moving member is constituted by the above-described ball screw shaft 39, pulse motor 40, double toothed belt wheels 41a and 41b, toothed belt 41c, nut 42, and small peripheral parts related thereto. A driving force applying means for applying a driving force to 36 is provided.

The driving force applying means and the moving member 36
The above-mentioned two gripping mechanisms 26 and 27 are formed by itself, a ball bearing 34, a linear motion guide unit (consisting of a track rail 37a and a slider 37b) for guiding the moving member 36, and small peripheral parts related thereto. A gripping member moving means for moving the lead frame L # F in the left-right direction in which the lead frame L # F is to be transferred (the direction of the arrow X and the direction opposite thereto) is configured.

Here, as is clear from the above description, the gripping member moving means guides the lead frame L＼F and is perpendicular to the lead frame transport direction (the direction of the arrow X and the direction opposite thereto). A guide rail 3 as a movable side provided movably in a front-rear direction (arrow Y direction and a direction opposite thereto), that is, a guide member;
With respect to the gripping mechanisms 26 and 27 that move back and forth together with them, they are independently mounted on the base 9 on the fixed side.

According to this configuration, the guide rail 3
The movable part that moves in the front-rear direction (the direction of the arrow Y and the direction opposite thereto) perpendicular to the lead frame transport direction (the direction of the arrow X and the direction opposite thereto) does not include the gripping member moving means, so that its weight is small. Therefore, the movement and positioning of the guide rail 3 at the time of adjusting the distance between the rails are performed in a well-balanced, stable and precise manner. The effect is achieved that the positioning can be performed with high accuracy.

Further, in the configuration in which the gripping member moving means is provided separately from the guide rail 3 as described above, the vibration generated by the pulse motor 40 provided as a driving force generating source in the gripping member moving means causes the guide rail 3 to vibrate. 3 is prevented, and from this point also, the conveyance and positioning of the lead frame L # F guided by the guide rail 3 become highly accurate.

Further, in such a configuration, the following effects can be obtained.

In other words, when the movable part including the guide rail 3 is heavy, such as when the wire bonding apparatus is shipped or transported from a manufacturing factory where the wire bonding apparatus is manufactured, the movable part including the guide rail 3 is vibrated or impacted during transport to cause the movable part to move. The movable part itself and peripheral mechanisms may be damaged due to the movement of the movable part.
Specifically, the slider 12b, which is a part of the movable portion, and a nut 22g for applying a driving force to the movable portion (FIG. 2)
4) (see FIG. 24) may be damaged. Therefore, usually, the movable portion is transported in a state where the movable portion is fixed to the base portion 9 with a locking means. As described above, in the wire bonding apparatus, since the weight of the movable portion is small, it is not necessary to attach and remove such a locking means, so that the handling is easy and the cost is reduced.

Subsequently, the gripping mechanisms 26 and 27 described above are used.
And the gripping member 2 in which each gripping mechanism includes a pair.
The opening and closing means for opening and closing these 6a, 26b, 27a and 27b will be described.

First, both gripping mechanisms 26 and 27 will be described. One gripping mechanism 26 will be described first.

The gripping mechanism 26 has a pair of gripping members 26a and 26b as described above, and the two gripping members 26a and 26b are relatively opened and closed in the vertical direction (the direction of arrow Z and the opposite direction). Freely grip the side end of the lead frame L # F. FIG. 13 shows the holding member 2.
Details of 6a and 26b are shown. As shown in the figure, the two gripping members 26a and 26b are plate-shaped claw portions 26c and 26 that directly contact the upper and lower surfaces of the lead frame L # F, respectively.
d, and main bodies 26e and 26f with the respective claw portions 26c and 26d attached to the upper end. Each body 26
Projections 26g and 26h extending further downward are integrally formed at the lower ends of e and 26f.
Ball bearings 26i and 26j are attached to the tip of h. These ball bearings 26
The rotation axes of i and 26j coincide with the front-back direction (the arrow Y direction and the opposite direction).

FIGS. 3 to 10, in particular FIGS. 4 and 6
As shown in FIG. 8 and FIG.
6k, and the small bracket 26k is fixed to one side 30a of the movable bracket 30 by bolts (not denoted by reference numerals) or the like. The small bracket 2
6k is provided with a linear guide unit comprising a track rail 26m and a slider 26n on both left and right sides thereof. And are relatively movable in the vertical direction (the arrow Z direction and the opposite direction).

One gripping mechanism 26 is configured as described above. Note that the other gripping mechanism 27 is configured in the same manner as the gripping mechanism 26, and thus detailed description is omitted. However, in each drawing, regarding the constituent members of the gripping mechanism 27 shown in the drawings, the constituent members 26a, 26b, 26 of the gripping mechanism 26 described above are provided.
. corresponding to c, 26d,... are assigned the same alphabet a, b,.
d,...

As is clear from the above, each of the gripping members 26a, 26
b, 27a and 27b are linear motion guide units (configured by a track rail 26m, a slider 26n, etc.)
Therefore, they open and close linearly with each other. Therefore, the type of the lead frame L # F to be conveyed is changed to change its thickness, or the grip members 26a, 26
Even if the claw portions 6b, 27a, and 27b are replaced due to wear or the like, and the lengths of the new and old claw portions are changed, the holding members with high precision abut against the lead frame L＼F. The effect is obtained that the state can be easily maintained with little damage.

Next, the gripping members 26a, 26b, 27a and 27b of the gripping mechanisms 26 and 27 are provided.
The opening / closing means for opening and closing will be described. First,
The opening / closing means for opening / closing the gripping members 26a and 26b of one gripping mechanism 26 will be described.

As shown in FIGS. 2 to 6 and FIGS. 8 and 10, in particular, FIGS. 6, 8 and 10, a pulse motor 45 a as driving force applying means is disposed behind the gripping mechanism 26. And the bracket 45b
(Shown in FIGS. 6, 8 and 10). As described above, the movable frame 14 has the guide rail 3 attached thereto. The pulse motor 45a is disposed such that its output shaft 45c coincides with the left-right direction (the direction of the arrow X and the opposite direction). Cam member 45
d and 45e are fitted concentrically, and are rotated by applying a driving force by a pulse motor 45a as driving force applying means. The cam members 45d and 45e are for individually displacing the gripping members 26a and 26b, respectively.

As shown in FIG. 8, both cam members 45
An optical sensor 45f for detecting that each of the cam members 45d and 45e has reached the origin position of its rotation is disposed near the brackets 4d and 45e.
5b is attached by a small screw (not shown) or the like. The optical sensor 45f is composed of a photocoupler, and the light emitted from a light emitting element (not shown) provided in the optical sensor 45f is, for example, a light transmitting hole 45w formed in one cam member 45e.
A signal is generated when the light reaches a light receiving element (not shown) through a light receiving element (not shown) through a light emitting element (not shown).

On the other hand, as shown in FIG. 2, FIG. 3, FIG. 5 to FIG. 8, and FIG. 10, and especially FIG. 6 to FIG. A pair of upper and lower swing brackets 45g and 45h are disposed in front of the motor 45a. Each of the swing brackets 45g and 45h is elongated and formed in a substantially U-shape, extends in the left-right direction (the direction of the arrow X and the opposite direction), and the U-shape is substantially forward. (Arrow Y direction). Each of the swing brackets 45g and 45h has a pin 45i in the left-right direction (the direction of the arrow X and the opposite direction), that is, at both ends in the longitudinal direction and near the rear portion (the side opposite to the direction of the arrow Y). Via the movable frame 1
4 is swingably mounted. Note that the center axes of these pins 45i are aligned with the left and right directions, and
Therefore, each of the swing brackets 45g and 45h swings in a plane perpendicular to the left-right direction.

As shown in FIGS. 8 and 10, short intermediate members 45j and 45k are respectively attached to the rear end surfaces of the swing brackets 45g and 45h by bolts (not denoted by reference numerals) at the upper ends thereof. It is fastened and attached in a state of hanging substantially downward. These intermediate members 4
Ball bearings 45m and 45n as cam followers are rotatably attached to the lower ends of 5j and 45k, and abut against the cam surfaces formed on the outer peripheral portions of the cam members 45d and 45e. .

As shown in FIGS. 6 to 8, in particular, shafts 45o and 45p having circular cross sections as sliding members are provided at the front ends, ie, free ends, of the swing brackets 45g and 45h in the left and right directions (arrows). X direction and the opposite direction), that is, it extends and is attached in the lead frame transport direction. The ball bearings 26i and 26j (see FIG. 13) provided at the lower ends of the gripping members 26a and 26b are used as shafts 45o and 45j.
Each is in contact with the upper surface of p. That is, the driving force from the pulse motor 45a is applied to the shafts 45o and 45p via the cam member, and the ball bearings 26i and 26j of the two gripping members 26a and 26b moving in the lead frame transport direction are passed through the shafts 45o and 45p. The driving force is transmitted. 6, 8, and 10,
In particular, as shown in FIG. 8, one pin 45q is implanted in each of the intermediate members 45j and 45k to which the ball bearings 45m and 45n serving as the cam followers are attached, respectively.
Coil springs 45r and 45s are hung between the pins 45q and the bracket 45b. These coil springs 45r and 45s bias the ball bearings 45m and 45n toward the cam surfaces of the cam members 45d and 45e.

On the other hand, as shown in FIG. 3 to FIG. 10, two pins 45t
Are implanted, and two coil springs 45u and 45v are stretched between these pins 45t. These coil springs 45u and 45v connect the ball bearings 26i and 26h of the gripping members 26a and 26b to the shaft 45 with which they abut.
o, 45p, that is, it is urged downward. That is, the gripping member 26a to be brought into contact with the upper surface of the lead frame L # F is urged in the closing direction by the coil spring 45u, and the gripping member 26b to be brought into contact with the lower surface of the lead frame L # F is moved by the coil spring 45v. Urged in the opening direction.

The pulse motor 45a as the driving force applying means shown in the above description, and the cam members 45d and 45
e, swing brackets 45g and 45h, and intermediate member 45
j, 45k, ball bearings 45m, 45n, shafts 45o, 45p, and coil springs 45r, 4
5s, 45u, 45v and peripheral small parts related thereto, the two gripping members 2 included in one gripping mechanism 26 are included.
Opening / closing means for opening / closing 6a, 26b is configured.

The opening / closing means for opening / closing the two gripping members 26a and 26b of one gripping mechanism 26 is configured as described above. The other opening / closing means for opening / closing the two gripping members 27a and 27b of the other gripping mechanism 27 is configured in the same manner as the opening / closing means for the one gripping mechanism 26 (described above). Omitted. However, in each figure, among the constituent members of the opening / closing means for the other gripping mechanism 27, those shown in the drawings relate to the constituent members 45a,
45b, 45d,... Are denoted by the same reference numerals 48, 48b, 48c,.

The lead frame L＼ is formed by the two gripping mechanisms 26 and 27, the two opening / closing means for the two gripping mechanisms, and the gripping member moving means (including the moving member 36 and the pulse motor 40). Frame transfer means for transferring F is configured. Further, the frame transfer means, the base portion 9 on which the frame transfer means is mounted, guide rails 2 and 3 (comprising divided rails 4 to 7) as guide members for guiding the lead frame L # F, The guide member driving means (described above) for moving the guide rails 2 and 3, the pushing means 154 and the positioning means 1 shown in FIG.
A frame transporting device (substrate transporting device) is constituted by 65 and a frame sending means described later.

As is clear from the above description, the opening / closing means for the two gripping mechanisms 26 and 27 correspond to the pair of gripping members 2 provided by the two gripping mechanisms 26 and 27, respectively.
For each of 6a, 26b and 27a, 27b, the number of cam members 45d, 45e (4
8d, 48e), and each of the gripping members is driven independently. Therefore, even if the type of the lead frame L # F to be conveyed is changed and its thickness is changed, each gripping member 26a, 26b,
27a and 27b can always be brought into contact with the lead frame L # F at an optimal timing, and the effect of preventing deformation and the like of the lead frame L # F and improving reliability can be obtained. Further, according to this configuration, no complicated adjustment work conventionally performed for bringing each gripping member into contact with the lead frame at an optimum timing is required, so that workability is improved.

The two opening / closing means are respectively provided with gripping members 26a, 26b, 27a, 27a, 26b as movable sides in the left-right direction (direction of arrow X and the direction opposite thereto), which is the direction in which the lead frame L＼F is to be conveyed. On the base portion 9 which is on the fixed side with respect to 27b, each of the holding members is mounted independently. That is, both opening / closing means are mounted on the movable frame 14 which is movable in the front-back direction (the direction of the arrow Y and the direction opposite thereto) perpendicular to the lead frame transport direction (the direction of the arrow X and the direction opposite thereto) with respect to the base 9. However, it does not move in the lead frame transport direction and is fixed. Therefore, each of the gripping members 26a, 26b,
The weight and inertia of the movable part that moves in the lead frame transport direction, including the movable parts 27a and 27b, does not include the opening / closing means and is reduced. Therefore, the movable part can be operated at high speed, and the lead frame L搬 送 F can be transported at high speed.

Here, the above-mentioned opening / closing means will be described in more detail. As described above, the opening / closing means is individually provided for each of the two gripping mechanisms 26 and 27. However, since both have the same configuration, one of the gripping mechanisms 2 is used.
Only the opening / closing means for 6 will be described in detail.

First, the form of the cam surfaces of the two cam members 45d and 45e provided in the opening / closing means will be described.

FIG. 14 shows the claws 26 of the gripping members 26a, 26b according to the rotation angles θ of the cam members 45d, 45e.
The positions of c and 26d are indicated by solid lines a and b, respectively. Each cam surface of each cam member 45d, 45e is formed such that both gripping members 26a, 26b perform such a movement.

In the opening / closing means, taking into account that the type of the lead frame L # F to be conveyed is changed and its thickness is changed, the cam members 45d and 45e are provided with the holding members 26a and 26b. A plurality of types, two different types of cam surfaces in this case, are continuously formed at a certain interval so that the operation mode corresponds to various lead frames. FIG.
In FIG. 4, the angle ranges in which the two types of cam surfaces are formed are shown as area c and area d, respectively. As is clear from the figure, the angle range of the area c is from 0 ° to 9 °.
0 °, and the angle range of the area d is from 180 ° to 270.
°, and both angle ranges are provided at 90 ° apart. Area c is used when transporting a lead frame L＼F having a thickness of up to 0.5 mm, and area d is used.
Is used to transport a lead frame L＼F having a thickness of 0.5 mm to 1.0 mm. However, when the area c is used, the gripping members 26a and 26b perform the closing operation by rotating the cam members 45d and 45e from 0 ° to 90 ° as the first origin, and conversely from 90 °. The opening operation is performed by rotating toward 0 °. On the other hand, when the area d is used, the cam members 45d and 45e are moved from 270 ° which is the second origin by 1 degree.
By rotating the holding member 26 by 80 degrees,
a and 26b perform the closing operation, and the opening operation is performed by rotating from 180 ° to 270 °. The angle 0 ° to 360 ° is an absolute angle defined as a certain point in the circumferential direction of each of the cam members 45d and 45e as an absolute origin.

As described above, each of the cam members 45d, 45d
An optical sensor 45f (see FIG. 8) for detecting that 45e is located at the first origin or the second origin is provided. For example, when the work performed using the two areas C is changed to the use of the area d, the angular positions of the cam members 45d and 45e with respect to the output shaft 45c (shown in FIG. 10) of the pulse motor 45a are changed. Up to 1
The optical sensor 45f is re-mounted so as to be shifted by 80 °, and the mounting position of the optical sensor 45f is changed so as to correspond to the light transmitting hole 45w (shown in FIG. 8) of the shifted cam member 45e. In addition, two light transmission holes are formed shifted from each other by 180 °,
If two optical sensors are provided so as to correspond to these respective light transmitting holes, it is necessary to re-install such a cam member and an optical sensor by switching the detection of the two sensors by the control unit. Is gone and automated.

As described above, each of the cam members 45d, 45d
In e, a plurality of cam surfaces which are continuous with each other are formed, and the operation modes of the gripping members 26a and 26b are different depending on the various cam surfaces. Therefore, various types of lead frames having different thicknesses can be handled.

The movement of the claw portions 26c and 26d of the gripping members 26a and 26b when using the area C will be described with reference to FIG. Note that the same applies to the case where the area d is used, and a description thereof will be omitted.

As shown in the figure, the rotation from 0 ° to 43 ° as the first origin causes the gripping member 26b abutting on the lower surface of the lead frame L # F to reach the top dead center of its operation stroke. The position of this top dead center is
This is a reference position (level) for the conveyance of F, and the reference position is indicated by reference numeral 50 in each drawing. In addition, in each figure, in addition to the reference position 50, the center of the transport path on which the lead frame L # F is to be transported is indicated by reference numeral 51, and the bonding means 160 (see FIG. 1) is used. The position where the bonding connection should be made to F is indicated by reference numeral 52 as the bonding position. Now, when the gripping member 26b reaches the top dead center, as shown in FIG.
ΔF is slightly (50 μm to 100 μm) from the horizontal guide surface 6a of each of the guide rails 2 and 3 (in this case, the divided rail 7 is shown) by the claw 26d of the gripping member 26b.
m) Lifted up and out of contact with the guide rail. Then, it is transported while maintaining this non-contact state. Since there is no contact in this way, wear of the lead frame L と F and the guide rail due to friction can be prevented.
Therefore, the life of the rail component is prolonged, and the lead frame L # F treated as a product is not damaged.

On the other hand, as shown in FIG. 12, when the claw portion 26d of the gripping member 26b reaches the top dead center of its operation stroke, the claw portion 26c of the other gripping member 26a is still in the lead frame L＼F. As shown in FIG. 14, the cam members 45d, 45d are not engaged.
When e further rotates, it comes into contact with the lead frame L # F. If the lead frame L @ F being handled has a thickness of, e.
If is of 5 mm, the claw portion 26c is set so as to be brought into contact with the lead frame L\F when the cam member 45d, 45 e has reached the angular position 52 ^o. However, during this time, as is clear from FIG. 14, the other gripping member 26b is maintained at the position of the top dead center. After the abutment of the claw portion 26c, the claw portion 26c is slightly moved down (for example, to the angular position 55 ^° ).
This is called subduction. This sinking operation is for generating a required gripping force by the claw portions 26c and 26d of both gripping members 26a and 26b. However, this sinking amount is always kept constant irrespective of the change in the thickness of the various lead frames L＼F. Therefore, the contact position of the holding member 26a with the lead frame L＼F is It can be arbitrarily set. When the gripping members 26a and 26b release the gripping of the lead frame L # F, the gripping operation is performed in a completely opposite process.

Further, during the above-described series of gripping and gripping releasing operations, the pulse motor 45a does not always rotate at a constant speed. That is, at the time of the gripping operation, the claw 2 of the gripping member 26a
6c is rotated at a high speed until it reaches the vicinity of the lead frame L # F, and is rotated at a low speed from the vicinity position to gripping. Then, at the time of the grip release operation, the rotation is completely reversed. As described above, by changing the operation speed of the gripping member, it is possible to reduce the time required for the operation and to reduce the impact applied to the lead frame L 把持 F when gripping the lead frame L＼F. Deformation of the loop (see FIG. 20) is prevented. The start position of the low-speed rotation can be arbitrarily changed by the setting of the program of the control unit, and the start position is changed according to the thickness of each type of the lead frame L # F. This is particularly effective in reducing the time spent on the gripping operation. That is, in FIG.
The horizontal guide surface 6a of the split rail 7 is formed by the claw portion 26d of FIG.
Consider a case where the claw 26c of the gripping member 26a approaches the lead frame L # F lifted from above. In this case, as the thickness of the lead frame L # F is larger, the claw portion 26c of the upper gripping member 26a reaches the lead frame L # F earlier by this thickness, and conversely, the shorter the thickness, the slower the thickness. Will be reached. At this time, if the switching position from the high-speed operation to the low-speed operation is always constant regardless of the thickness of the lead frame L # F, the lead frame L #
The smaller the thickness of F, the larger the low-speed operation amount of the gripping member 26a, which also takes into account the sinking amount described above. In the configuration in which the low-speed operation start position of the gripping member 26a can be set according to the change in the thickness of the lead frame L # F as described above, the time from the start to the completion of the gripping operation can be shortened, and It contributes to the improvement of performance. In addition, apart from this, during a series of frame transfer operations, for example, the gripping mechanism 26 (27) is moved in the lead frame transfer direction (the direction of the arrow X and the direction opposite thereto) for the purpose of not holding the lead frame L＼F. ), The two gripping members 26a and 26b are stopped at the switching boundary position from the high-speed operation to the low-speed operation, so that the operation for gripping the lead frame L＼F next time is only the low-speed operation. It is possible, and the time can be further reduced. In addition, when the thickness of the lead frame L＼F is 0 mm, that is, when there is no lead frame L＼F, a worker inputs a thickness of the lead frame into the storage circuit of the control unit by a key input operation. Can automatically calculate the above-mentioned low-speed operating point and control the rotation angle of the pulse motor.

For detecting that the lead frame L # F has been gripped by the two gripping members 26a and 26b, a piezoelectric element as a detecting means is provided at an appropriate position such as the claw portions 26c and 26d of the gripping member. It is also possible to provide a sensor, a magnetic sensor, or the like, and perform the detection by a signal emitted from the sensor. It is also possible to automatically detect the thickness of the lead frame L＼F based on a signal from the gripping detection sensor. You can take advantage of this. Further, by providing such a frame thickness detecting means, each time the gripping members 26a and 26b are opened and closed, the position where these gripping members 26a and 26b are in contact with the lead frame L # F is detected and corrected, so that the frame thickness of each lot is detected. Variations and burrs generated on the lead frame L # F itself can be dealt with, and an appropriate gripping state can be maintained in any case.

By the way, each of the gripping members 26a, 2
With respect to the claw portions 26c and 26d of 6b, adjustment means for adjusting the position of each claw portion with respect to the reference position (level: described above) 50 for transporting the lead frame L # F is provided. That is, in FIG. 8, these claw portions 26c, 2
6d and each ball bearing 2 interposed between the pulse motor 45a as a driving force applying means.
6i and 26j can be adjusted in position, whereby the positions of the claws 26c and 26d are adjusted. Specifically, the ball bearings 26i, 2
The pins 26p and 26q that support the shaft 6j are eccentric pins. This eccentric pin has two shaft parts whose axes are shifted from each other, one of the two shaft parts is fitted to the protrusions 26g, 26h of the gripping members 26a, 26b, and the other is the ball bearing 2
6i, 26j. By turning these eccentric pins using a driver or the like, the positions of the claw portions 26c and 26d can be adjusted. By having such an adjusting means, it is possible to transport the lead frame L＼F with high accuracy.

Here, the operation of the frame transfer means described so far will be described.

First, in FIG. 1, the first lead frame L＼F is pushed out of the magazine M on the loader 151 by the operation of the pushing means 154. Prior to this, the two gripping mechanisms 26, 27 ( One of the gripping mechanisms 2
6) Then, in order to bring the gripping mechanism to a position where the end of the extruded lead frame L # F can be gripped, move the movable bracket 30 carrying the gripping mechanisms 26 and 27 to the left. (In the direction of arrow X). In particular,
The ball screw shaft 39 is driven to rotate by rotating the pulse motor 40 in the reverse direction. That is, when the ball screw shaft 39 rotates in the reverse direction, a driving force is applied to the nut 42 screwed to the ball screw shaft 39. Therefore,
A driving force is applied to the movable bracket 30 via the moving member 36, the ball bearing 34, and the small bracket 33 sequentially connected to the nut 42, and the movable bracket 30
Moves to the left. In this state, the pushing means 154
1 (shown in FIG. 1) is operated, one lead frame L # F is pushed out of the magazine M on the loader 151, and the leading end reaches a position where it can be gripped by the gripping mechanism 26.

Then, the gripping mechanism 26 is operated to close and grip the extruded tip end of the lead frame L # F.
Specifically, this closing operation is based on the fact that the pulse motor 45a is rotated forward. When the pulse motor 45a rotates forward, the cam members 45d and 45e fitted on the output shaft 45c of the pulse motor 45a rotate in the same direction.
Then, in FIG. 8 and FIG.
e is transmitted to the ball bearing 45n as a cam follower that is in sliding contact with the cam member.
It is transmitted to a swing bracket 45h via an intermediate member 45k pivotally supporting the ball bearing 45n, and the swing bracket 45h swings counterclockwise in FIG. 8 around a pin 45i pivotally supporting the same. Therefore, the shaft 45p provided at the free end of the swing bracket 45h moves upward, and the gripping member 26b having the claw 26d to be brought into contact with the lower surface side of the lead frame L＼F is moved by the shaft 45p. It is pushed up and rises against the urging force (downward: opening direction) of the coil spring 45v.

On the other hand, the gripping member 26a having the claw portion 26c to be brought into contact with the upper surface of the lead frame L # F is lowered by the rotation of the other cam member 45d. That is, when the cam member 45d rotates forward, the cam member 45d
The cam surface acts in a direction away from the ball bearing 45m which is in sliding contact with the cam surface as a cam follower. Then, since the ball bearing 45m is urged toward the cam surface of the cam member 45d by the coil spring 45r, it follows the cam surface. Therefore,
The intermediate member 45j pivotally supporting the ball bearing 45m and the swing bracket 45g integrated therewith swing in the clockwise direction in FIG. 8 around the pin 45i. Accordingly, the shaft 45o provided at the free end of the swing bracket 45g moves downward, and the gripping member 26a is lowered by the urging force applied by the coil spring 45u.

The closing operation of the gripping mechanism 26, that is, the gripping operation is as described above. Here, the opening operation, that is, the releasing operation of the grip will be described together.

During the opening operation, the pulse motor 45a rotates in the reverse direction, and the cam members 45d and 45e rotate in the same direction.
Then, the holding member 26b descends, and the other holding member 26
a rises. That is, when one of the cam members 45e rotates in the reverse direction, the cam surface of the cam member 45e acts in a direction away from the ball bearing 45n that is in sliding contact with the cam surface as a cam follower. Then, since the ball bearing 45n is urged toward the cam surface of the cam member 45e by the coil spring 45s,
Follows the cam surface. Therefore, the ball bearing 45
The intermediate member 45k pivotally supporting n and a swing bracket 45h integral therewith swing in the clockwise direction in FIG. 8 around the pin 45i. Therefore, the shaft 45p provided at the free end of the swing bracket 45h moves downward,
The gripping member 26b is lowered by the urging force applied by the coil spring 45v.

On the other hand, when the other cam member 45d rotates in the reverse direction, the acting force from the cam member 45d is transmitted to the ball bearing 45m slidably contacting the cam member as a cam follower, and the ball bearing 45m is pivotally supported. The rotation bracket 45g is transmitted to the swing bracket 45g via the intermediate member 45j, and swings counterclockwise in FIG. 8 around the pin 45i. Therefore, the shaft 45o provided at the free end of the swing bracket 45g
Moves upward, the gripping member 26a is pushed up by the shaft 45o, and rises against the urging force (downward: closing direction) of the coil spring 45u.

The opening operation of the gripping mechanism 26 is as described above.

Here, as is apparent, when the above-described closing operation is performed, the gripping member 26b having the claw portion 26d to be brought into contact with the lower surface side of the lead frame L # F is:
From the output shaft 45c of the pulse motor 45a,
An elastic member such as a coil spring does not intervene in the driving force transmission system leading to b, and the driving force is applied inelastically. On the other hand, regarding the gripping member 26a having the claw portion 26c to be brought into contact with the upper surface side of the lead frame L # F, a driving force transmission system from the output shaft 45c of the pulse motor 45a to the gripping member 26a is provided. A coil spring 45u as an elastic member is interposed, and is urged by the elastic force of the coil spring 45u to contact the lead frame L # F. According to this configuration, it is possible to prevent the lead frame L $ F from rubbing against the guide rails 2 and 3 due to the lowering of the holding member 26b, and to apply an excessive force to the lead frame L $ F by the holding member 26a. It is not applied (a grip force higher than the elastic force of the coil spring 45u does not act).

The opening / closing operation of the other gripping mechanism 27 disposed on the right side of the one gripping mechanism 26 is the same as the opening / closing operation of the gripping mechanism 26 described above, and therefore the description thereof is omitted. .

Now, the lead frame L # F pushed out of the magazine M on the loader 151 (shown in FIG. 1) by the pushing means 154 is gripped by the gripping mechanism 26 as described above. Thereafter, the pulse motor 40 is rotated forward, and the ball screw shaft 39 is driven to rotate (forward rotation). Accordingly, the movable bracket 30 carrying the gripping mechanism 26 (and the gripping mechanism 27) is moved rightward (in a direction opposite to the arrow X direction). As a result, the lead frame L # F is conveyed while being held by the holding mechanism 26, and faces the heater plate 155.

When the lead frame L # F is transported by a certain distance and the leading end of the lead frame L # F is detected by the sensor 24e shown in FIGS. 1 and 5, the sensor 24e
Based on the detection signal, the pulse motor 40 is stopped, and the lead frame L # F is stopped.

Next, the lead frame L # F is intermittently transported to the right by a fixed distance. That is, the movable bracket 30 advances to the right and returns to the left, and the opening and closing operation of the gripping mechanism 26 is performed appropriately.
The transfer is performed while gradually shifting the gripping position of the lead frame L # F by the step S6. After the lead frame L # F comes off the gripping mechanism 26, the gripping mechanism 27 disposed on the right side is used. Thus, the lead frame L
＼F is a predetermined distance (1 of the arrangement pitch of the IC chips 153 (see FIG. 1) mounted on the lead frame L＼F).
The wafers are intermittently conveyed at intervals of a pitch, and with this conveyance, a bonding connection operation is performed by the bonding means 160 shown in FIG. 1 and the like.

Lead frame L by frame transfer means
The transport operation of $ F is as described above.

As described above, the lead frame L # F extruded from the magazine M on the loader 151 by the pushing means 154 is brought to the bonding position by the bonding means 160 by the frame transfer means, and thereafter, the unloader at the subsequent stage 162 (shown in FIG. 1) is transported to be accommodated in an empty magazine M loaded thereon.

Here, when the lead frame L # F is accommodated in the empty magazine M on the unloader 162, it cannot be completely accommodated only by the above-described frame transfer means. That is, since the lead frame L $ F is gripped and transported by both gripping members 27a and 27b (see FIG. 5 and the like) of the gripping mechanism 27 described above, only the portion gripped by these gripping members 27a and 27b lastly That is, it is in an uncontained state. In order to completely accommodate the lead frame L, a frame sending means is provided for sending the lead frame L # F conveyed by the frame transferring means a further distance, that is, a predetermined distance toward the magazine M. Next, the frame transmitting means will be described.

As shown in FIGS. 2 and 5, the frame sending means 61 is disposed near the right end of the split rail 5 which forms a part of the guide rail 2 (shown in FIG. 1). Then, the movable frame 1 carrying the divided rail 5
5 is mounted on the bracket 15a. FIG.
5 to 17 show details of the frame sending means 61.

As shown in FIGS. 15 to 17, the contact frame sending means 61 has a base portion 61a formed by bending a steel plate or the like. It is attached to the upper end. As shown in the drawing, a cylinder mechanism 61b as driving force applying means is fastened on the left end of the base portion 61a. The cylinder mechanism 61b is operated by compressed air. The cylinder mechanism 61b is used to inject compressed air in order to make the piston rod 61c provided with the cylinder mechanism 61b extend and retract.
It has two inlets 61d and 61e. The cylinder mechanism 61b is arranged so that the piston rod 61c reciprocates in the left-right direction (the direction of the arrow X and the direction opposite thereto) as the lead frame transport direction.

At the tip of the piston rod 61c,
A delivery member 61g is attached so as to be swingable about the axial center of the piston rod 61c. More specifically, a boss 61h is fitted to the distal end of the piston rod 61c, and the delivery member 61g is swingably attached to the boss 61h at one end thereof. The boss 61h
An enlarged diameter portion (not denoted by a reference numeral) is formed at the front end of the transmission member 61, thereby preventing the sending member 61g from coming off toward the front end (right side). A receiving member 61i is fixed to the piston rod 61c so as to sandwich the sending member 61g between the piston rod 61c and the enlarged diameter portion.
The movement of the sending member 61g to the left is restricted by 1i. In addition, as shown in FIG.
In i, a guide shaft 61k is implanted in parallel with the piston rod 61c, and the guide shaft 61k swings freely in a guide hole (not shown) formed in a cylinder portion of the cylinder mechanism 61b. Mated.

The sending-out member 61g itself will be described in detail.
And a small screw 61n at one end of the fitting portion 61m (FIG. 16).
(See FIG. 1). At the other end of the arm portion 61o, an engaging portion 61p is formed for engaging with the rear end of the lead frame L # F and sending out the lead frame L # F. Then, the fitting portion 6
A ball bearing 61q as a cam follower is attached to a lower surface of 1m with a small screw 61r.

On the other hand, a cam member 61s as guide displacement means is fastened on the right end of the base portion 61a by a small screw 61t. As is clear from FIG. 18, the cam member 61s has a horizontal direction (arrow X direction and its opposite direction) and a vertical direction (arrow Z direction and its opposite direction).
And a cam surface 61u parallel to the vertical direction and inclined in the left-right direction and the front-rear direction (the direction of the arrow Y and the opposite direction) and continuous with the left side of the cam surface 61u. A cam surface 61v is formed. The above-mentioned ball bearing 61q is provided with both cam surfaces 61u, 6u.
1v.

That is, the delivery member 61g always receives the moment based on its own weight, and always receives the piston rod 61g.
The ball bearing 61q of the delivery member 61g is slid in contact with the cam surfaces 61u and 61v with this moment. In such a configuration, the cylinder mechanism 61b
When the delivery member 61g is driven to the right (the direction opposite to the direction of the arrow X), which is the lead frame feeding direction, as shown in FIG.
As shown in FIG. 8, the ball bearing 61q is guided in the lead frame feed direction by the two cam surfaces 61u and 61v, and the shaft center 61
w is displaced from a state inclined with respect to the vertical direction (the direction of the arrow Z and the opposite direction) to a state parallel thereto. Conversely, when the delivery member 61g is driven to the left (in the direction of the arrow X), it is displaced from this parallel state to an inclined state. Thus, when the axial center 61w of the ball bearing 61q is parallel to the vertical direction, the delivery member 6
1g is referred to as a first position.
The 1 g of the engaging portion 61p is located in the lead frame transfer path by the above-described frame transfer means. The position of the sending member 61g when the shaft center 61w of the ball bearing 61q is inclined with respect to the vertical direction is referred to as a second position. It is designed to leave the route.

That is, until the lead frame reaches a position where the engaging portion 61p of the sending member 61g can be engaged with the rear end of the lead frame L # F transferred by the above-described frame transferring means. Since the engagement portion 61p itself hinders the transfer of the lead frame, the engagement portion 6p
In order to retract 1p from the lead frame transfer path, the piston rod 61c is positioned at the second position by performing a retracting operation. Then, when the rear end of the lead frame L # F slightly passes through the position of the engaging portion 61p, the piston rod 61c is caused to protrude. Then, the engaging portion 61p is displaced from the second position to the first position and moves in the lead frame feeding direction (rightward: the direction opposite to the direction of the arrow X) to move the rear end of the lead frame L を F. Push to completely house the lead frame in magazine M on unlog 162 (shown in FIG. 1). In addition,
The detection that the rear end of the lead frame L # F has reached the position corresponding to the engagement portion 61p is performed by the sensor 24b shown in FIGS.

Incidentally, in the wire bonding apparatus, the above-mentioned frame sending means 61 is provided separately from the above-mentioned frame transferring means. Therefore, even while the frame sending means 61 sends out the lead frame L # F toward the subsequent stage (unlog 162: see FIG. 1), the next lead frame L # pushed out from the preceding stage (loader 151: see FIG. 1). F is held by the frame transfer means and the heater plate 1 is a bonding stage.
55, no delay time is required, and an improvement in bonding work efficiency is achieved.

Further, as described above, the frame sending means 61 is provided with a sending member 61g for engaging with and sending out the lead frame L 、 F, guiding the sending member 61g in the lead frame sending direction, and A cam member 61s serving as a guide displacing means for displacing between a first position located in a lead frame transfer path by the frame transfer means and a second position separated from the frame transfer path during the guiding process; Cylinder mechanism 61b as driving force applying means for applying driving force to member 61g
Consists of That is, according to this configuration, the delivery member 61g can be displaced between the first position and the second position and moved in the lead frame feed direction only by the cylinder mechanism 61b. Thus, the cost can be reduced because only one driving force applying means is required.

Next, a bonding stage in which the bonding means 160 (see FIG. 1) makes a bonding connection to the lead frame L # F will be described in detail.

As described above, this bonding stage includes the heater plate 155 functioning as a stage.
Is called. 1, 2, 4 and 19,
In particular, as apparent from FIG.
55 is mounted on a heater block 64 for heating it to a predetermined temperature. As shown in FIG. 19, the heater block 64 has a built-in heating means 64a. Note that the heater block 64 is the same as that shown in FIG.
5 and also shown in FIG.

As shown in FIGS. 2 to 5 and FIG.
The heater block 64 is mounted on a movable base 65. As shown in FIG. 19, the movable base 65 is moved up and down (in the direction of the arrow Z and in the direction opposite thereto) by a linear guide unit comprising a track rail 66a and a slider 66b.
And is movable. The track rail 66a is fixed to the above-described base 9 (see FIGS. 1, 2 and 3).

As shown in FIGS. 2, 4, 5, 6, and 19, a ball bearing 68 as a cam follower is mounted on the movable table 65, and a disk that slides on the ball bearing 68 is provided. A cam member 69 is provided. The cam member 69 is driven to rotate by a pulse motor 70, whereby the movable table 65, that is, the heater plate 155 and the heater block 64 are moved up and down at a predetermined timing based on the action of the cam surface of the cam member 69. From the pulse motor 70 to the cam member 6
The power transmission mechanism leading to 9 is as follows. That is, as shown in FIGS. 2 and 5, a toothed belt wheel 71 is fixedly mounted concentrically on the cam member 69, and a toothed belt wheel 72 is fitted on the output shaft of the pulse motor 70. Is being worn. A toothed belt 73 is wound around the two toothed belt wheels 71 and 72. Thereby, the pulse motor 7
The driving force from zero is transmitted to the cam member 69.

Here, at the time of bonding on the bonding stage, that is, on the heater plate 155, the lead frame LF is connected to the heater plate 155.
The pressing means for pressing and fixing to the surface will be described.

This pressing means has a frame presser 74 shown in FIG. In addition, as is clear from FIG.
A plurality of IC chips 153 are mounted on the lead frame L # F at a constant pitch in the longitudinal direction.
As shown in FIG. 10, the frame holder 74 has an opening 74a facing these IC chips 153.

As shown in FIG. 10, the frame presser 7
4 is mounted on a support base 75. The support table 75 is also shown in FIGS. However, the frame retainer 74 is not shown in FIGS.

As shown in FIG. 10, the support table 75 is guided by a linear motion guide unit including a track rail 76a and a slider 76b in the vertical direction (the direction of the arrow Z and the opposite direction) and is movable. The track rail 76a is fixed to the above-described base portion 9 (shown in FIGS. 1, 2 and 3).

As shown in FIG. 10, a ball bearing 78 as a cam follower is attached to the slider 76b.
A disc-shaped cam member 79 is provided for sliding contact. The cam member 79 is connected to the heater block 64 described above.
Motor 7 together with a cam member 69 for raising and lowering
It is rotationally driven by 0. Based on the action of the cam surface of the cam member 69, the support base 75, and thus the frame presser 4, moves up and down at a predetermined timing, and the lead frame L
＼F is pressed and fixed and released.

By the way, the above-mentioned heater plate 155
In the above, when the bonding connection operation to the lead frame L # F is performed by the bonding means 160 (see FIG. 1), the lead frame L # F is connected to the heater plate 15 as described below in order to perform the operation with high accuracy.
Vacuum suction is performed on 5. Specifically, as described above, a plurality of ICs are provided on the lead frame L $ F.
A chip 153 (shown in FIG. 1) is mounted, and each of the IC chips 153 is bonded on an island (described below) formed on the lead frame L # F. The vacuum suction is performed on one of these islands that carries an IC chip 153 on which a bonding operation is performed as a bonding target. At this time, the lead frame L＼F is heated to a predetermined temperature through the heater plate 155 by the heat from the above-described heating means 64a, and the bonding operation is performed in the heated state.

As shown in FIG. 20, the heater plate 1
55 is formed with a plurality of suction holes 155a opened on the frame supporting surface of the heater plate 155. The lead frame L @ F has an island 82 on which the IC chip 153 is mounted, and a number of leads 83 formed so as to surround the island 82. Each of the suction holes 155a corresponds to the island 82. It is arranged. And as is clear from the figure, each suction hole 155a
Is a communication hole 1 provided inside the heater plate 155.
The communication holes 55b communicate with each other at 55b and are integrated into one, and the communication holes 155b are open to the lower surface side.

On the other hand, as shown in the drawing, the heater block 64 disposed below the heater plate 155
Is formed with a communication hole 64c communicating with the communication hole 155b. Vacuum suction is performed by the suction means described below through the communication holes 64c, and the islands 82 are sucked and fixed. Note that the communication means 64c
2 and 5 are shown in FIGS.

The bonding connection by the bonding means 160 shown in FIG.
This is performed in a state where the island 82 of F is fixed by suction to the heater plate 155. This is particularly because the bonding means 160 is connected to the wire 85 (FIG. 20) by the provided capillary (bonding tool: not shown).
(Shown in FIG. 2), ultrasonic vibration is applied to the capillary.

FIG. 21 shows a configuration for generating a vacuum suction force. In the figure, a negative pressure generating means 88 for generating a negative pressure such as a vacuum pump is provided, and the suction port of the negative pressure generating means 88 and the communication hole 6 of the heater block 64 are provided.
4c is communicated by a tube 84 (described above). An electromagnetic valve 90 is interposed at a predetermined position of the tube 84, and the operation of the electromagnetic valve 90 performs vacuum suction and release. The negative pressure generating means 88 and the solenoid valve 90 constitute a suction means.

On the other hand, as also shown in FIG. 21, pressurized gas supply means 91 for supplying a pressurized gas, in this case compressed air.
The supply port of the pressurized gas supply means 91 and the tube 84 are connected by another tube 92. However, the tube 92 is connected to the tube 84 between the communication hole 64 c and the solenoid valve 90. A solenoid valve 94 is provided at a predetermined position of the tube 92.
The compressed air is supplied and released by the operation of the solenoid valve 90. The injection means is constituted by the pressurized gas supply means 91 and the electromagnetic valve 94. As is apparent, this injection means injects compressed air between the heater plate 155 as the bonding stage and the lead frame L # F. This allows
The lead frame L＼F is instantaneously and surely detached from the heater plate 155 that has been adsorbed.

As shown in FIG. 21, the opening and closing operations of the solenoid valves 90 and 94 are controlled by a control section 96, and are operated at the following predetermined timings. The control section 96 controls the overall operation of the wire bonding apparatus.
The two solenoid valves 90 and 94 are operated in connection with the operation of the frame transfer means (see FIG. 1) and the frame transfer means (described above).

Here, the timing of the vacuum suction by the suction unit and the injection of the compressed air by the injection unit will be described. First, an example of the timing will be described with reference to FIG.

In FIG. 22, the “bonding operation” is performed on each of the IC chips 153 (see FIG. 1) on the lead frame L # F by the bonding means 160 shown in FIG. Also, "vacuum suction"
And "compressed air injection" are based on the operation of the suction unit and the injection unit, respectively. Also, "Frame holder and heater"
This means the pressing and fixing operation of the lead frame L # F by the above-mentioned frame presser (shown in FIG. 19), the releasing operation thereof, and the operating state of the overheating means 64a (also shown in FIG. 19). And, "lead frame transfer" indicates the operation and stop state of the above-described frame transfer means.

As is clear from FIG. 22, in the wire bonding apparatus, the vacuum suction by the suction means is performed at the bonding position while a certain IC chip 153 (shown in FIGS. 1 and 20) is being bonded. The island 82 (shown in FIG. 20) on which the IC chip 153 is mounted is suction-fixed to the heater plate 155. Then, when the bonding operation is completed and the lead frame L＼F is transported by the frame transfer means so as to bring the next IC chip to the bonding position, the vacuum suction by the suction means is released and the injection means by the injection means is used. An injection of pressurized gas, ie compressed air, is performed. In particular,
In FIG. 21, one electromagnetic valve 90 is changed from an open state to a closed state, and the other electromagnetic valve 94 is changed from a closed state to an open state. Due to such a configuration, the heater plate 155 can be used while the IC chip 153 is being bonded.
The lead frame L $ F (island 82) that has been suction-fixed to the heater plate 155 is instantaneously and surely detached from the heater plate 155. Therefore, the next IC chip 153
The lead frame L＼F is moved by the above-mentioned frame transfer means to bring the heater plate 1 to the bonding position.
20 is not transferred while being strongly rubbed against the lead frame 55.
(See FIG. 3), and the bonding operation can be continued smoothly and stably.

Next, a second example of the timing of vacuum suction and compressed air injection by the suction unit and the injection unit will be described with reference to FIG.

As is apparent from FIG. 23, in this timing example, the injection of the compressed air by the injection means performed simultaneously with the release of the vacuum suction by the suction means is for a very short time (indicated by Δt in FIG. 23). Done. As described above, the lead frame L＼F
The vacuum suction state of the (island 82) is completely destroyed, and the lead frame is securely connected to the heater plate 155.
However, the following effects can be further obtained.

That is, in the timing example shown in FIG. 22, the injection of the compressed air by the injection means is started simultaneously with the release of the vacuum suction by the suction means, and the next I
This is continued throughout the transfer of the lead frame L＼F performed by the frame transfer means to bring the C chip 153 (see FIG. 1) to the bonding position. Then, the suction means is operated to suction-fix the island 82 (see FIG. 20) on which the next IC chip is mounted to the heater plate 155, and the injection of the compressed air is stopped at the time when the vacuum suction is performed. In this operation, the injection time of the compressed air becomes relatively long, and therefore, the temperature distribution on the upper portion of the heater plate 155 to be heated to the predetermined temperature is changed, and a good bonding state is obtained. Is not preferred. In addition, even if the compressed air is injected for a long time, it is conceivable to reduce the injection amount of the compressed air in order to keep the temperature distribution of the heater plate 155 uniform. Is not performed sufficiently, or it takes a long time to completely break the lead frame, which hinders the transfer of the lead frame L＼F by the frame transfer means. However, as shown in FIG. 23, by injecting compressed air with a strong pressure for a very short time, these problems can be avoided.

FIGS. 24 and 25 are skeleton diagrams schematically showing the members shown in FIGS. 2 to 18 in the form of conceptually thin linear members. This skeleton diagram was created in an attempt to promote the understanding of a configuration that is complicated and difficult to read only by drawing based on trigonometry, etc. I'm drawing. (Art regulations) (1) In principle, figures should be viewed from a single point of view. (2) A single member or a group of members is indicated by one solid line.
However, this is not a limitation as long as the configuration can be easily understood, and an appropriate description as needed is permitted by supplementing a commentary or the like. (3) A reference numeral (or member name) is also described. (4) The properties and states of the members, the interrelationships between the members, the movement modes, and the like are represented using symbols as shown in Tables 1 to 3. In this case, attention should be paid to compatibility with existing symbols. (5) It does not require the possibility of restoring (reversibility) from a skeleton diagram (schematic diagram) to a normal projection view or perspective view. (6) Abstraction and omission in which importance is placed on the function of the portion related to the inventive concept are allowed.

[Table 1]

[Table 2]

[Table 3]

[0139]

As described above, in the substrate transfer apparatus according to the present invention, the holding members (26a, 26b, 27
a, 27b) for moving the substrate (L＼F) in a direction perpendicular to the substrate transport direction by a gripping member moving means (40, 39, 42, 30,...) for moving the substrate in the substrate transport direction. Are mounted on a base portion (9) which is fixed to a guide member (2, 3) as a movable side provided movably. According to such a configuration, the weight is kept small because not include the gripping member moving means movable portion which moves in a direction perpendicular to the substrate conveying direction includes the guide member, the movement and hence the guide member Positioning is performed stably and precisely in a well-balanced manner. As a result, there is an effect that the transfer of the substrate and the positioning to a desired position based on the guidance by the guide member can be performed with high precision. In the configuration in which the gripping member moving means is provided separately from the guide member as described above, the pulse motor (4) provided as a driving force generation source by the gripping member moving means is provided.
Vibration such as 0) is prevented from being transmitted to the guide member, and from this point also, the transfer and positioning of the substrate guided by the guide member become highly accurate. Further, in the substrate transfer device according to the present invention, the following effects can be obtained. That is, when the movable portion including the above-mentioned guide member is heavy, such as when the substrate transfer device (or a bonding device equipped with the device) is shipped or transported from a manufacturing factory, the movable portion is moved by vibration or impact applied during transport. Since there is a risk that the part itself may move and the mechanism around it may be damaged, the movable part is usually transported in a state in which the movable part is fixed to the base part of the apparatus by a locking means. In the substrate transfer apparatus according to the present invention, as described above, since the weight of the movable portion is small, it is not necessary to attach and remove such a locking means, and the handling is easy and the cost is reduced.

[Brief description of the drawings]

FIG. 1 is a plan view of a wire bonding apparatus according to the present invention.

FIG. 2 is a plan view of a configuration provided in an area J in FIG. 1;

FIG. 3 is a view on arrow AA of FIG. 2;

FIG. 4 is a view on arrow BB in FIG. 2;

FIG. 5 is a view on arrow CC in FIG. 2;

FIG. 6 is a plan view of a part of the configuration shown in FIG. 2 including a partial cross section.

FIG. 7 is a view on arrow DD including a partial cross section with respect to FIG. 6;

FIG. 8 is a view on arrow EE including a partial cross section with respect to FIG. 6;

FIG. 9 is a view on arrow FF in FIG. 6;

FIG. 10 is a cross-sectional view of FIG.
FIG.

FIG. 11 is an enlarged view of a part of a guide rail included in the wire bonding apparatus shown in FIG. 1;

FIG. 12 is a view on arrow QQ in FIG. 11;

13 is an exploded perspective view showing a holding member for holding a lead frame provided in the wire bonding apparatus shown in FIG. 1 and a part of a lead frame to be held by these members;

FIG. 14 is a diagram illustrating an operation mode of the gripping member illustrated in FIG. 13;

FIG. 15 is a plan view including a partial cross section of a frame sending means provided in the wire bonding apparatus shown in FIG. 1;

FIG. 16 relates to FIG. 15 and includes a partial cross section H
FIG.

FIG. 17 is a view taken along the arrow II in FIG. 15;

FIG. 18 is a perspective view showing a cam member included in the frame delivery means shown in FIGS. 15 to 17 and a ball bearing which slides on the cam member as a cam follower.

FIG. 19 is a perspective view of a part of the wire bonding apparatus shown in FIG. 1 including a partial cross section.

20 is a longitudinal sectional view of a part of a heater plate and a heater block included in the wire bonding apparatus shown in FIG. 1;

FIG. 21 is a block diagram showing suction means for vacuum-adsorbing the lead frame to the heater plate shown in FIG. 20, and jetting means for breaking the vacuum suction state.

FIG. 22 is a diagram illustrating an example of operation timings of the suction unit and the ejection unit illustrated in FIG. 21 and other components related thereto;

FIG. 23 is a diagram illustrating another example of the operation timing of the suction unit and the ejection unit illustrated in FIG. 21 and another configuration related thereto;

FIG. 24 is a perspective view conceptually depicting a part of the configuration shown in FIG. 2 as a skeleton diagram.

FIG. 25 is a perspective view conceptually depicting a part of the configuration shown in FIG. 2 as a skeleton diagram.

FIG. 26 is a plan view of a conventional wire bonding apparatus.

FIG. 27 is a view on arrow VV of FIG. 26;

FIG. 28 is an operation explanatory diagram of the wire bonding apparatus shown in FIGS. 26 and 27;

FIG. 29 is an operation explanatory diagram of the wire bonding apparatus shown in FIGS. 26 and 27;

FIG. 30 is an operation explanatory diagram of the wire bonding apparatus shown in FIGS. 26 and 27;

FIG. 31 is an explanatory diagram of the operation of the wire bonding apparatus shown in FIGS. 26 and 27;

[Explanation of symbols]

2,3 guide rail 4,5,6,7 split rail 4b, 5b, 6b, 7b lower block 4d, 5d, 6d, 7d upper plate 4g, 6g, 7g ball bearing 6a, 6c horizontal guide surface 6e vertical guide surface 6f Taper surface 9 Base 11a, 12a Track rail 11b, 12b Slider 14, 15 Movable frame 15a Bracket 17 Auxiliary frame 18, 19 Bracket 21, 22 Guide drive 21a Bracket 21b Screw shaft 21c Pulse motor 21d, 21e toothed belt Wheel 21f toothed belt 21g nut 21h leaf spring 21i sensor 21j light shielding plate 24a, 24b, 24c, 24d, 24e sensor 26, 27 gripping mechanism 26a, 26b, 27a, 27b gripping member 26c, 26d claw 26e, 26f body 26g, 2 h Projection 26i, 26j Ball bearing 26k Small bracket 26m Track rail 26n Slider 26p, 26q Pin 30 Movable bracket 30a One side 30b Other side 30c Projection 31a Track rail 33 Small bracket 34 Ball bearing 36 Moving member 37a Track rail 37b Slider 39 Ball Screw shaft 40 Pulse motor 40a Output shaft 41a, 41b Toothed belt wheel 41c Toothed belt 42 Nut 45a Pulse motor 45b Bracket 45c Output shaft 45d, 45e Cam member 45f Optical sensor 45g, 45h Swing bracket 45i Pin 45j, 45k Intermediate member 45m, 45n Ball Bearing 45o, 45p Shaft 45q Pin 45r, 45s Coil Spring 45t Pin 45u, 45v Coil Spring 45w Light transmitting hole 50 Reference position (level) (for lead frame transport) 51 Center (for lead frame transport path) 52 Bonding position 61 Frame sending means 61a Base unit 61b Cylinder mechanism 61c Piston rod 61d, 61e Inlet 61g Sending member 61h Boss 61i Receiving member 61k Guide shaft 61m Fitting part 61n Small screw 61o Arm part 61p Engaging part 61q Ball bearing 61r Small screw 61s Cam member 61t Small screw 61u, 61v Cam surface 61w Shaft center 64 Heater block 64a Heating means 64c Communication Hole 65 Movable base 66a Track rail 66b Slider 68 Ball bearing 69 Cam member 70 Pulse motor 71 Toothed belt wheel 72 Toothed belt wheel 74 Frame holder 75 Support base 76a Rack rails 76b slider 78 ball bearing 79 cam member 82 island 83 lead 84 tube 85 wire 88 negative pressure generator 90 solenoid valve 91 pressurized gas supply means 92 tube 94 solenoid valve 96 control unit

Claims (2)

(57) [Claims] 1. A fixed-side base portion is disposed on the base portion so as to be able to freely contact and separate from each other.
A guide member which is a movable side for guiding along a path, and a guide member which drives each of the guide members to come into contact with and separate from each other
It is provided movably in the driving means and the substrate transfer direction, and is relatively provided.
A plurality of gripping members that open and close to grip the substrate , opening and closing means for opening and closing the gripping members, and a gripping member for moving the gripping members in the substrate transport direction
Moving means, wherein the gripping member moving means extends in the direction of contact and separation of the guide member.
And moves while being guided in the substrate transfer direction.
A movable member, and a driving force applied to the movable member to allow the movable member to
A driving force applying means for moving the moving member in the board conveying direction; and a driving force applying means for sandwiching the moving member in the board conveying direction.
Placed, and a plurality of
A rotating member, and the gripping member is configured such that the rotating member is moved along the moving member.
By rolling, in the direction of contact and separation of the guide member
The gripping member moving means is coupled to the guide member so as to be relatively movable, and the guide member and the gripping member
Characterized in that they are independently mounted on the base portion .
Substrate transfer device. 2. The rotating member according to claim 1,
2. The device according to claim 1, wherein the position is adjustable.
Substrate transfer equipment.