JP2969361B2 - Method of manufacturing magnetic disk substrate - Google Patents

Method of manufacturing magnetic disk substrate

Info

Publication number
JP2969361B2
JP2969361B2 JP6474790A JP6474790A JP2969361B2 JP 2969361 B2 JP2969361 B2 JP 2969361B2 JP 6474790 A JP6474790 A JP 6474790A JP 6474790 A JP6474790 A JP 6474790A JP 2969361 B2 JP2969361 B2 JP 2969361B2
Authority
JP
Japan
Prior art keywords
magnetic disk
disk substrate
peripheral portion
magnetic
outer peripheral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6474790A
Other languages
Japanese (ja)
Other versions
JPH03266218A (en
Inventor
孝 高見沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6474790A priority Critical patent/JP2969361B2/en
Publication of JPH03266218A publication Critical patent/JPH03266218A/en
Application granted granted Critical
Publication of JP2969361B2 publication Critical patent/JP2969361B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Manufacturing Of Magnetic Record Carriers (AREA)

Description

【発明の詳細な説明】 〔概要〕 この発明は、たとえばコンピュータシステムの外部記
憶装置である磁気ディスク装置の記憶媒体としての磁気
ディスクの製造工程における磁気ディスク基板の製造方
法に関し、 磁気ディスク基板の表面に磁性被膜を被着させて製造
された磁気ディスクの内周部から外周部にわたって、磁
気記録・再生特性が良くなる磁気異方性が同じで高品質
の磁気ディスクを製造すること、また、磁気ディスク上
を磁気ヘッドがコンタクト・スタート・ストップ(以
下、CSSと言う)する位置で磁気ヘッドの浮上性を良く
するようにした磁気ディスを製造することを目的とし、 回転している磁気ディスク基板の平面にポリッシング
部材を押し当てて円周方向に微細な溝を形成する際に、
この磁気ディスク基板の内周部と外周部との周速の差に
よる前記溝の加工状態が相違しないようにするため、前
記磁気ディスク基板の内周部から外周部に押し当てる前
記ポリッシング部材を、磁気ディスク基板の内周部側に
行くに従って粗い研磨粒子、外周部側に行くに従って緻
密な研磨粒子を有する複数のポリッシング部材に分割し
たことを特徴とする磁気ディスク基板の製造方法とした
ものである。
DETAILED DESCRIPTION OF THE INVENTION [Summary] The present invention relates to a method of manufacturing a magnetic disk substrate in a process of manufacturing a magnetic disk as a storage medium of a magnetic disk device which is an external storage device of a computer system, for example. To produce a high-quality magnetic disk with the same magnetic anisotropy that improves magnetic recording / reproducing characteristics from the inner peripheral portion to the outer peripheral portion of a magnetic disk manufactured by applying a magnetic coating to the magnetic disk; The purpose of this study is to manufacture a magnetic disk with a magnetic head that improves the buoyancy of the magnetic head at the position where the magnetic head makes contact start / stop (hereinafter referred to as CSS) on the disk. When pressing a polishing member against a flat surface to form a fine groove in the circumferential direction,
In order to prevent the processing state of the groove from being different due to a difference in peripheral speed between an inner peripheral portion and an outer peripheral portion of the magnetic disk substrate, the polishing member that presses from the inner peripheral portion to the outer peripheral portion of the magnetic disk substrate, A magnetic disk substrate manufacturing method characterized in that the magnetic disk substrate is divided into a plurality of polishing members having coarse abrasive particles toward the inner peripheral side and dense abrasive particles toward the outer peripheral side. .

〔産業上の利用分野〕[Industrial applications]

この発明は、たとえばコンピュータシステムの外部記
憶装置である磁気ディスク装置の記憶媒体としての磁気
ディスクの製造工程における磁気ディスク基板の製造方
法に関するものである。
The present invention relates to a method of manufacturing a magnetic disk substrate in a process of manufacturing a magnetic disk as a storage medium of a magnetic disk device which is an external storage device of a computer system, for example.

〔従来の技術〕[Conventional technology]

従来、アルミニウム合金のディスク基板の表面にニッ
ケル・燐などの被膜を被着した磁気ディスク基板に成膜
される磁性被膜に、磁気記録・再生特性が良くなる磁気
異方性をつける方法は次のようにして行っている。
Conventionally, a method of imparting magnetic anisotropy for improving magnetic recording / reproducing characteristics to a magnetic film formed on a magnetic disk substrate in which a coating such as nickel and phosphorus is applied to the surface of an aluminum alloy disk substrate is as follows. I'm going like that.

すなわち、磁気ディスク基板を化学的にエッチングす
るか、または第3図に示すように、回転している磁気デ
ィスク基板1の半径方向の全面に、ポリッシングテープ
などのポリッシング部材2を、磁気ディスク基板1の両
面から押し当てることにより円周方向に微細な溝をつけ
る。なお、3はポリッシング部材2を磁気ディスク基板
1に押し付けるための押圧ローラ、4はこの押圧ローラ
3の支軸、7はこの押圧ローラ3の磁気ディスク基板1
に押し付ける力を付与するための加圧ローラである。
That is, the magnetic disk substrate is chemically etched or, as shown in FIG. 3, a polishing member 2 such as a polishing tape is placed on the entire surface of the rotating magnetic disk substrate 1 in the radial direction. By pressing from both sides of the surface, fine grooves are formed in the circumferential direction. 3 is a pressing roller for pressing the polishing member 2 against the magnetic disk substrate 1, 4 is a support shaft of the pressing roller 3, and 7 is a magnetic disk substrate 1 of the pressing roller 3.
Is a pressure roller for applying a pressing force to the roller.

このように磁気ディスク基板1に円周方向に微細な溝
をつけることにより、この溝上に磁性被膜を成膜したと
きに、この溝に沿って磁性粒子が並ぶことにより磁気異
方性がつき、磁気記録・再生特性を良くすることができ
る。
By forming fine grooves in the circumferential direction on the magnetic disk substrate 1 as described above, when a magnetic film is formed on the grooves, magnetic particles are arranged along the grooves to provide magnetic anisotropy. Magnetic recording / reproducing characteristics can be improved.

〔発明が解決しようとする課題〕[Problems to be solved by the invention]

しかしながら、従来のように、磁気ディスク基板1の
全面にポリッシング部材2の全面を押し当て、磁気ディ
スク基板1を回転することにより円周方向に微細な溝を
つける場合は、その磁気ディスク基板1の内周側は周速
が遅く、外周側は周速が速くなり、周速が遅い磁気ディ
スク基板1の内周側はより緻密な溝がつき、周速が速い
磁気ディスク基板1の外周側は内周側より粗い溝がつ
き、このような加工性の差が磁気異方性の差、ひいては
磁気記録・再生特性の差になってしまう。
However, when a fine groove is formed in the circumferential direction by pressing the entire surface of the polishing member 2 against the entire surface of the magnetic disk substrate 1 and rotating the magnetic disk substrate 1 as in the related art, The inner peripheral side has a lower peripheral speed, the outer peripheral side has a higher peripheral speed, the inner peripheral side of the magnetic disk substrate 1 having a lower peripheral speed has finer grooves, and the outer peripheral side of the magnetic disk substrate 1 having a higher peripheral speed has Rough grooves are formed on the inner peripheral side, and such a difference in workability results in a difference in magnetic anisotropy and a difference in magnetic recording / reproducing characteristics.

また、磁気ディスク基板のある領域を希望条件に合わ
せると、他の部分は加工による歪みが大きくなり、その
箇所が磁気ディスクの完成後に磁気記録・再生のエラー
の原因になってしまう。
Further, if a certain area of the magnetic disk substrate is adjusted to a desired condition, distortion of the other part due to processing increases, and that part causes a magnetic recording / reproducing error after the completion of the magnetic disk.

このように従来の方法では、磁気ディスクの全面にわ
たって良い磁気特性すなわち磁気記録・再生のエラーが
少ない磁気ディスクを作ることが非常に難しい。また、
できたとしても製造条件が厳しく制限されてしまう。
As described above, according to the conventional method, it is very difficult to produce a magnetic disk having good magnetic characteristics over the entire surface of the magnetic disk, that is, having few errors in magnetic recording and reproduction. Also,
Even if it can be done, the manufacturing conditions are severely restricted.

この発明は、このような従来の課題を解決するために
なされた発明であって、磁気ディスク基板の表面に磁性
被膜を被着させて製造された磁気ディスクの内周部から
外周部にわたって、磁気記録・再生特性が良くなる磁気
異方性が同じて高品質の磁気ディスを製造すること、ま
た、磁気ディスク上を磁気ヘッドがCSSする位置で磁気
ヘッドの浮上性を良くするようにした磁気ディスを製造
することを目的としたものである。
The present invention has been made in order to solve such a conventional problem, and has been developed in such a manner that a magnetic film is formed on a surface of a magnetic disk substrate by applying a magnetic film from an inner peripheral portion to an outer peripheral portion of the magnetic disk. To manufacture high-quality magnetic disks with the same magnetic anisotropy that improves the recording / reproducing characteristics, and to improve the floating characteristics of the magnetic head at the position where the magnetic head performs CSS on the magnetic disk. Is intended to be manufactured.

〔課題を解決するための手段〕[Means for solving the problem]

この発明は、前記のような課題を解決するため、第1
図および第4図に示すように、回転している磁気ディス
ク基板1の平面1aにポリッシング部材2を押し当てて円
周方向に微細な溝を形成する際に、この磁気ディスク基
板1の内周部と外周部との周速の差による前記溝の加工
状態が相違しないようにするため、前記磁気ディスク基
板1の内周部から外周部に押し当てる前記ポリッシング
部材2を、磁気ディスク基板1の内周部側に行くに従っ
て粗い研磨粒子、外周部側に行くに従って緻密な研磨粒
子を有する複数のポリッシング部材21,22,23に分割した
ことを特徴とする磁気ディスク基板の製造方法としたも
のである。
SUMMARY OF THE INVENTION The present invention provides a
As shown in FIG. 4 and FIG. 4, when the polishing member 2 is pressed against the plane 1a of the rotating magnetic disk substrate 1 to form fine grooves in the circumferential direction, the inner circumference of the magnetic disk substrate 1 is formed. In order to prevent the processing state of the groove from being different due to a difference in peripheral speed between the portion and the outer peripheral portion, the polishing member 2 pressed against the outer peripheral portion from the inner peripheral portion of the magnetic disk substrate 1 A method for manufacturing a magnetic disk substrate, characterized by being divided into a plurality of polishing members 2 1 , 2 2 , 2 3 having coarse abrasive particles toward the inner peripheral side and dense abrasive particles toward the outer peripheral side. It was done.

〔作用〕[Action]

この発明のようにすると、すなわち、磁気ディスク基
板1の内周部から外周部にわたって押し当てるポリッシ
ング部材2を、その研磨粒子が相違した複数のポリッシ
ング部材21,22,23に分割すると、製造された磁気ディス
ク基板1の表面に磁性被膜を被着させて製造された、磁
気ディスクの内周部から外周部にわたって、磁気異方性
が同じで高品質の磁気ディスクを製造することができ
る。
According to the present invention, that is, when the polishing member 2 pressed from the inner peripheral portion to the outer peripheral portion of the magnetic disk substrate 1 is divided into a plurality of polishing members 2 1 , 2 2 , and 2 3 having different abrasive particles, A high quality magnetic disk having the same magnetic anisotropy can be manufactured from the inner circumference to the outer circumference of the magnetic disk manufactured by applying a magnetic coating on the surface of the manufactured magnetic disk substrate 1. .

〔実施例〕〔Example〕

以下、この発明の磁気ディスク基板の製造方法の実施
例を第1図および第2図に基づいて詳細に説明する。
Hereinafter, an embodiment of a method of manufacturing a magnetic disk substrate according to the present invention will be described in detail with reference to FIGS.

第1図はこの発明の実施例の概略斜視図、第2図はこ
の発明の実施例におけるポリッシング部材を磁気ディス
ク基板に押圧する押圧ローラ部の断面図であり、1はア
ルミニウム合金のディスク基板の表面にニッケル・燐な
どの被膜を被着した磁気ディスク基板であり、図示しな
い回転駆動手段によって回転駆動されるようになってい
る。2はこの磁気ディスク基板1の平面1aに押し当てて
円周方向に微細な溝を形成するためのポリッシングテー
プなどのポリッシング部材であり、この実施例において
はポリエステル樹脂テープにアルミナの微粒子をバイン
ダを介して塗布して形成されている。
FIG. 1 is a schematic perspective view of an embodiment of the present invention, and FIG. 2 is a sectional view of a pressing roller portion for pressing a polishing member against a magnetic disk substrate in the embodiment of the present invention. This is a magnetic disk substrate having a surface coated with a coating of nickel, phosphorus or the like, and is rotatably driven by rotation driving means (not shown). Numeral 2 denotes a polishing member such as a polishing tape for pressing the flat surface 1a of the magnetic disk substrate 1 to form fine grooves in the circumferential direction. In this embodiment, fine particles of alumina are applied to a polyester resin tape with a binder. It is formed by application through a hole.

また、この磁気ディスク基板1の内周部と外周部との
周速の差による前記微細な溝の加工状態が相違しないよ
うにするため、その内周部から外周部にわたって押し当
てるポリッシング部材2は、その研磨粒子が相違した複
数のポリッシング部材21,22,23に分割されている。
In order to prevent the processing state of the fine groove from being different due to a difference in peripheral speed between the inner peripheral portion and the outer peripheral portion of the magnetic disk substrate 1, the polishing member 2 pressed from the inner peripheral portion to the outer peripheral portion is required. The polishing particles are divided into a plurality of polishing members 2 1 , 2 2 , 2 3 different from each other.

31,32,33は、このテープ状のポリッシング部材21,22,
23を磁気ディスク基板1の平面1aに押し当てるための少
なくとも外周部が弾性材で作られた押圧ローラで、第2
図に示すように、支軸41,42,43に支軸51,52,53を介して
回転自在に取付けられており、これらの支軸41,42,43
それぞれ自在継手6によって連結されている。71,72,73
は前記押圧ローラ31,32,33を磁気ディスク基板1側に押
す力を付与するための加圧部材である加圧ローラであ
り、これらの加圧ローラの支軸がスプリングなどの押圧
部材81,82,83で押圧されている。
3 1 , 3 2 , 3 3 are the tape-like polishing members 2 1 , 2 2 ,
2 3 by a pressing roller, at least the outer peripheral portion for pressing the plane 1a of the magnetic disk substrate 1 is made of an elastic material, and the second
As shown, the support shaft 4 1, 4 2, 4 3 the support shaft 5 1, 5 2, 5 3 are rotatably mounted through these support shafts 4 1, 4 2, 4 3 Are connected by a universal joint 6. 7 1 , 7 2 , 7 3
Is a pressing roller which is a pressing member for applying a force for pressing the pressing rollers 3 1 , 3 2 , 3 3 against the magnetic disk substrate 1, and the support shaft of these pressing rollers is pressed by a spring or the like. It is pressed by the member 8 1, 8 2, 8 3.

前記テープ状のポリッシング部材21,22,23の両端は巻
芯91,92にロール状に巻かれており、巻芯91,92のどちら
か一方この実施例においては巻芯92が巻取り側となって
巻取り駆動されるようになっている。
Said tape-like polishing member 2 1, 2 2, 2 3 of both ends in the core 9 1, 9 2 is wound into a roll, the winding in Either this embodiment of the core 9 1, 9 2 core 9 2 is adapted to be driven winding is a winding side.

従来例のように、同一種類のポリッシング部材を回転
している磁気ディスク基板に押圧した場合、磁気ディス
ク基板の周速の遅い内周部は緻密な溝が形成され、周速
の速い外周部が粗い溝が形成されるので、前記複数に分
割されたポリッシング部材21,22,23は、内周部に押圧さ
れるポリッシング部材21の研磨粒子を粗く、順次外周部
に行くにしたがって研磨粒子を徽密にすると、磁気ディ
スク基板1の全体に均一な溝が形成される。
When a polishing member of the same type is pressed against a rotating magnetic disk substrate as in the conventional example, a dense groove is formed in the inner peripheral portion of the magnetic disk substrate having a low peripheral speed, and the outer peripheral portion having a high peripheral speed is formed. since the coarse grooves are formed, the plurality of divided the polishing member 2 1, 2 2, 2 3, coarse abrasive particles of the polishing member 2 1 is pressed against the inner peripheral portion, toward the sequentially outer peripheral portion When the abrasive particles are dense, uniform grooves are formed in the entire magnetic disk substrate 1.

なお、前記のようなポリッシング部材21,22,23を、磁
気ディスク基板1の両面から押圧してその両面に円周方
向の微細な溝を加工するようにしている。
Incidentally, the polishing member 2 1, 2 2, 2 3 as described above, so that processing the circumferential fine grooves on both sides thereof is pressed from both sides of the magnetic disk substrate 1.

以下説明した実施例のように製造された磁気ディスク
基板に、たとえば周知のスパッタリング装置によって磁
性被膜を被着させると、磁気円周方向に形成された微細
な溝に沿って磁性粒子が並ぶことにより磁気異方性がつ
き、磁気記録・再生の特性を良くすることができる。
When a magnetic film is applied to a magnetic disk substrate manufactured as in the embodiment described below by, for example, a well-known sputtering device, magnetic particles are aligned along fine grooves formed in a magnetic circumferential direction. With magnetic anisotropy, magnetic recording / reproducing characteristics can be improved.

〔発明の効果〕 この発明は、以下説明したように、回転している磁気
ディスク基板の平面にポリッシング部材を押し当てて円
周方向に微細な溝を形成する際に、この磁気ディスク基
板の内周部と外周部との周速の差による前記溝の加工状
態が相違しないようにするため、その内周部から外周部
に押し当てるポリッシング部材を、その研磨粒子が相違
した複数のものに分割したので、このようにして製造さ
れた磁気ディスク基板の表面に磁性被膜を被着させて製
造された、磁気ディスクの内周部から外周部にわたっ
て、磁気異方性が同じで高品質の磁気ディスクを製造す
ることができる。
[Effects of the Invention] As described below, the present invention provides a method for forming a fine groove in a circumferential direction by pressing a polishing member against a plane of a rotating magnetic disk substrate. In order to prevent the processing state of the groove from being different due to a difference in peripheral speed between the peripheral portion and the outer peripheral portion, a polishing member pressed from the inner peripheral portion to the outer peripheral portion is divided into a plurality of polishing members having different abrasive particles. Therefore, a high quality magnetic disk having the same magnetic anisotropy from the inner peripheral portion to the outer peripheral portion of the magnetic disk manufactured by applying a magnetic coating on the surface of the magnetic disk substrate manufactured in this manner. Can be manufactured.

【図面の簡単な説明】[Brief description of the drawings]

第1図はこの発明の実施例の概略斜視図、第2図はポリ
ッシング部材を押圧する押圧ローラ部の断面図、第3図
は従来例の概略斜視図である。 1……磁気ディスク基板 1a……平面 2……ポリッシング部材 21,22,23……ポリッシング部材 31,32,33……押圧ローラ 4……支軸 41,42,43……支軸 51,52,53……軸受 6……自在継手 71,72,73……加圧ローラ 81,82,83……押圧部材 91,92……巻芯
FIG. 1 is a schematic perspective view of an embodiment of the present invention, FIG. 2 is a sectional view of a pressing roller portion for pressing a polishing member, and FIG. 3 is a schematic perspective view of a conventional example. 1 ...... magnetic disk substrate 1a ...... plane 2 ...... polishing member 2 1, 2 2, 2 3 ...... polishing member 3 1, 3 2, 3 3 ...... pressing roller 4 ...... shaft 4 1, 4 2, 4 3 … Support shaft 5 1 , 5 2 , 5 3 … Bearing 6… Universal joint 7 1 , 7 2 , 7 3 … Pressure roller 8 1 , 8 2 , 8 3 … Press member 9 1 , 9 2 ... core

フロントページの続き (58)調査した分野(Int.Cl.6,DB名) G11B 5/84 G11B 5/82 Continuation of the front page (58) Field surveyed (Int.Cl. 6 , DB name) G11B 5/84 G11B 5/82

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】回転している磁気ディスク基板(1)の平
面(1a)にポリッシング部材(2)を押し当てて円周方
向に微細な溝を形成する際に、この磁気ディスク基板
(1)の内周部と外周部との周速の差による前記溝の加
工状態が相違しないようにするため、前記磁気ディスク
基板(1)の内周部から外周部に押し当てる前記ポリッ
シング部材(2)を、磁気ディスク基板(1)の内周部
側に行くに従って粗い研磨粒子、外周部側に行くに従っ
て緻密な研磨粒子を有する複数のポリッシング部材
(21,22,23)に分割したことを特徴とする磁気ディスク
基板の製造方法。
When a polishing member (2) is pressed against a plane (1a) of a rotating magnetic disk substrate (1) to form fine grooves in a circumferential direction, the magnetic disk substrate (1) is formed. The polishing member (2) pressed against the outer peripheral portion from the inner peripheral portion of the magnetic disk substrate (1) so that the processing state of the groove does not differ due to the difference in the peripheral speed between the inner peripheral portion and the outer peripheral portion. Is divided into a plurality of polishing members (2 1 , 2 2 , 2 3 ) having coarse abrasive particles toward the inner periphery of the magnetic disk substrate (1) and dense abrasive particles toward the outer periphery. A method for manufacturing a magnetic disk substrate.
JP6474790A 1990-03-15 1990-03-15 Method of manufacturing magnetic disk substrate Expired - Lifetime JP2969361B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6474790A JP2969361B2 (en) 1990-03-15 1990-03-15 Method of manufacturing magnetic disk substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6474790A JP2969361B2 (en) 1990-03-15 1990-03-15 Method of manufacturing magnetic disk substrate

Publications (2)

Publication Number Publication Date
JPH03266218A JPH03266218A (en) 1991-11-27
JP2969361B2 true JP2969361B2 (en) 1999-11-02

Family

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Family Applications (1)

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JP6474790A Expired - Lifetime JP2969361B2 (en) 1990-03-15 1990-03-15 Method of manufacturing magnetic disk substrate

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Also Published As

Publication number Publication date
JPH03266218A (en) 1991-11-27

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