JP2968814B2 - Machining tank equipment for Die-sinker EDM - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a machining tank device of a die-sinking electric discharge machine for putting a working fluid for performing various desired die-sculpting processes on a workpiece, and in particular, to a machining tank device. The pallet on which the object is placed is mounted on a wire electric discharge machine, small hole electric discharge machine,
A machining tank device of a die-sinking electric discharge machine applicable to a flexible manufacturing system in a group of processing machines that automatically carries in and out of predetermined processing machines in a group of processing machines such as a water jet processing machine. About.

[Conventional technology]

2. Description of the Related Art Generally, a die-sinking electrical discharge machine generates a discharge between a workpiece and a die-shaped electrode having various shapes such as a bar, and processes the workpiece by discharge energy. In addition, the wire electric discharge machine uses a portion of the wire electrode that travels in a vertical direction, generates a discharge between the workpiece and the wire electrode, and processes the workpiece with discharge energy. The wire electrode is guided by various rollers such as a tension roller and a brake roller in an automatic wire feeder, and is supplied with an appropriate tension to a wire head having a wire guide. In the electric discharge machine, the Χ-Y table on which the workpiece is mounted moves in the Χ direction and the Y direction according to the machining state of the workpiece according to a command from the NC device, and the movements of both are combined.
Machining progresses between the electrode and the electrode. During machining, the electrode and the Χ-Y table repeat servo movements, and the workpiece is subjected to electric discharge machining into a predetermined machining shape by a relative movement between the two.

In addition, a small hole electric discharge machine is used to perform electric discharge machining of a fine hole or a small hole at a predetermined position of a workpiece or to penetrate a wire electrode for electric discharge machining of a workpiece by a wire electric discharge machine. The hole is subjected to electrical discharge machining at a predetermined position of the workpiece, and a discharge is generated between the workpiece and the pipe electrode to form a small hole in the workpiece by discharge energy.

2. Description of the Related Art Recently, various apparatuses for achieving machining such as large workpieces, progressive feed machining, and unmanned machining by automation have been disclosed for electric discharge machines. When such electric discharge machining is automatically performed, if the wire electrode during the electric discharge machining is cut or lost, or if the pipe electrode or the rod-shaped electrode is worn out, the wire electrode, the pipe electrode or An electrode exchanging device for automatically exchanging an electrode for engraving is provided.

For example, JP-A-63-139616 discloses a wire electrode exchange device. An automatic wire electrode supply method of a wire electric discharge machine is disclosed, for example, in Japanese Patent Application No. 63-298396 (Japanese Patent Application Laid-Open No. 2-145215) filed by the present applicant. Further, a wire electric discharge machine for automatically removing a core, ie, a work piece, from a workpiece is disclosed, for example, in Japanese Patent Application No. Hei. ing.

Further, a small hole electric discharge machine is disclosed in, for example, Japanese Patent Application Laid-Open No. 1-246021.
JP, JP-A-1-1432321, JP-A-1-143321
There are those disclosed in Japanese Patent Publication No. Japanese Patent Laying-Open No. 1-246021 discloses a pipe electrode exchange device.

Further, as a FM of a wire electric discharge machine, there is one disclosed in JP-A-62-120960. In the FMS, a circular work moving station is provided at the center, and various types of a wire cut electric discharge machining station, a die sinking electric discharge machining station, a laser machining station, an electric discharge coating machining station, and a water jet machining station are provided around the station. When processing is performed by FMS, an optimal processing station is selected first, and a series of operations are performed by a program input to a computer of a control device that controls the entire FMS collectively.

Also, Japanese Patent Application Laid-Open No. 1-193125 discloses a processing machine provided with an unloading device.

[Problems to be solved by the invention]

However, none of the above-mentioned conventional electric discharge machines automatically sets and mounts a workpiece on a Χ-Y table in the electric discharge machine, and this is an obstacle to fully automatic electric discharge machines. Therefore, various types of processing machines such as wire electric discharge machines, small hole electric discharge machines, die sinking electric discharge machines, etc. are arranged, and workpieces are transferred from a stocking place such as a rack that accommodates the workpiece to one of the Each process of automatically loading and setting the processing machine, processing the workpiece, and unloading the workpiece from the processing machine is fully automated, enabling unmanned operation of the workpiece regardless of day or night. It is desired to perform various processes continuously.

In the FM disclosed in the above-mentioned Japanese Patent Application Laid-Open No. 62-120960, the number of workpieces that can be mounted on a circular station is limited, and in order to prepare a large number of workpieces, the diameter of the circular station becomes large. When there is a loss in the floor space occupied by the equipment itself for FMS, and because the processing time by various processing machines is different, there is a process waiting time, and when there is a processing machine with sufficient processing time, There is a problem that a time loss occurs in mounting the workpiece on the processing machine, and the cycle efficiency is reduced. In particular, it has no technical idea of automatically and accurately positioning a workpiece with respect to a processing machine.

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problem. A pallet in which a workpiece is set in advance is automatically loaded into a die-sinking machine and set therein, and the pallet is set after the die-sinking EDM. , Which automatically releases the fixed state and carries it out, and provides a machining tank device for an EDM machine that automatically performs engraving on a workpiece. A stacker crane that reciprocates along a pallet traveling system between a group of EDMs, such as EDMs and various types of EDMs, such as EDMs, and stocking locations such as racks. A pallet in which a workpiece has been set in advance by a pallet conveyance loading / unloading device such as an intermediate delivery device that reciprocates between the stacker crane and the processing machine group and transfers the pallet while maintaining the positioning state. Set to work Fully automatic various processing,
Provided is a machining tank device for a die-sinking electric discharge machine which is preferably applied to a flexible manufacturing system in a machine group capable of continuously performing various kinds of machining on a workpiece regardless of day and night. That is.

[Means for solving the problem]

The present invention relates to a processing tank comprising a liquid-tight wall disposed on a table on which a processing table is attached and having an upper portion formed in an open structure, and a workpiece in accordance with an open state of a pallet loading / unloading port formed in the processing tank. A door for opening and closing the pallet loading / unloading port for loading and unloading a pallet set in advance, a column erected along the wall of the processing tank to guide the vertical movement of the door, and attached to the column. And a first actuator for vertically opening and closing the pallet loading / unloading door by moving the opening / closing door up and down, and the support post is provided on the wall of the processing tank so that the opening / closing door closes the pallet loading / unloading door in a closed state. The present invention relates to a machining tank device of a die sinking electric discharge machine including a second actuator for pressing an opening / closing door.

The actuator includes a cylinder fixed to the support, a piston reciprocable in the cylinder, and a piston rod fixed to the door and reciprocated in response to the reciprocation of the piston.

The machining tank device of the die sinking electric discharge machine controls the pallet on which the workpiece is set through the pallet loading / unloading port in response to the detection signal of the open state of the opening / closing door so that the pallet can be loaded / unloaded and the closed state of the door. In response to the detection signal.

The columns are arranged on both sides of the pallet loading / unloading entrance. Further, each of the columns is formed with a guide groove into which a guide roller attached to the door is fitted.

In addition, the machining tank apparatus of this die sinking electric discharge machine is equipped with a large number of various types of machining machines, a rack having a plurality of shelves for storing pallets, a processing station for performing rust-proofing and the like on a workpiece, and an unloading of pallets. A pallet on which a workpiece is set is transferred to and from each of the processing machines by a pallet transfer device that reciprocates between the input stations, and the workpiece on the pallet is automatically discharged by each of the processing machines. This is applied to a flexible manufacturing system.

[Effect] Since the machining tank apparatus of the die sinking electric discharge machine according to the present invention is configured as described above, the die sinking electric discharge machine performs electric discharge machining in a machining fluid. The working fluid can be filled up to the height of the opening and closing door without leaking the working fluid from the gap, and the pallet loading / unloading port does not need to be much higher than the reference height of the working table. There is no need to configure a large lift amount of the lifting and lowering device of the processing table provided on the machine, and the processing table itself can be formed compact.

In particular, a pallet in which a workpiece is set in advance can be loaded and unloaded in response to the open state of the door, and after the pallet has been set on the worktable, die-sinking EDM in response to the closed state of the door. The electric discharge machine can be operated accurately, and malfunction can be prevented.

Further, the processing tank is provided along the wall to support the vertical movement of the opening and closing door, and an actuator attached to the support and moving the opening and closing door up and down to open and close the pallet loading / unloading port. The vertical movement of the opening / closing door can be performed smoothly.

Therefore, the pallet is loaded into the processing table by the pallet transfer and loading / unloading device such as the stacker crane and the intermediate transfer device in response to the open state of the opening / closing door, and is reliably and quickly moved to a predetermined position on the processing table. In addition, the work piece can be automatically set by an unmanned person, and the die sinking electric discharge machine can be operated in response to the closed state of the opening and closing door. In response, the pallet can be unloaded from the processing machine group to an appropriate place automatically and unmannedly by the pallet transporting and discharging device.

〔Example〕

Hereinafter, with reference to the drawings, a flexible manufacturing system (hereinafter, referred to as FMS) in a group of processing machines to which a processing tank device of a die sinking electric discharge machine according to the present invention can be applied.
An example will be described. In this embodiment of the FMS, the machine group is applied to a group of electric discharge machines, such as a wire electric discharge machine, a small hole electric discharge machine, and a die sinking electric discharge machine.
The present invention can be applied to not only these processing machines but also processing machines such as a laser processing machine for processing a workpiece and a water jet processing machine. The term "workpiece" as used herein refers to not only a workpiece but also a workpiece that has been processed. The processing machine itself is capable of performing not only processing but also assembly and final finishing. is there.

With reference to FIG. 1 and FIG. 2, an outline of one embodiment of an FMS to which a machining table apparatus of a die sinking electric discharge machine according to the present invention can be applied will be described. As shown in the figure, the FMS includes a group of processing machines in which a wire electric discharge machine 1, a small hole electric discharge machine 2, and a die sinking electric discharge machine 3 are installed, and a pallet P in which a workpiece W is set at a predetermined position. A rack 4 having a plurality of shelves 19 to be accommodated, a stacker crane 6 reciprocating along the traveling path 5, and an intermediate transfer device 7 reciprocating between the stacker crane 6 and the processing machine group. is there. Furthermore, this
The FMS includes a setup indexing device 9 having a pallet mounting table 11 for mounting and positioning a pallet P, a rust prevention treatment device 10 for performing rust prevention treatment on the workpiece W, and a machining fluid adhering to the surface of the workpiece W. Spraying device that removes deposits such as dust, foreign matter, and dust
Has 12

In this FMS, as shown in FIG. 1, a wire electric discharge machine 1, a small hole electric discharge machine 2, and a die sinking electric discharge machine 3 are shown one by one as an EDM equipped with a large number of various types of machining machines. I have. In addition, each processing machine has a filtering device 21 having a different function in each processing machine in order to filter and clean a processing liquid used in the processing machine.

In addition, this FMS is controlled by a controller (not shown), so a control panel for setup, indexing and rust prevention
13, Inventory control machine 14, Relay board 15, Switch box 16, Processing machine
The control device 22 is provided for each of 1, 2, and 3. The control device 22 inputs and outputs detection information to and from the controller, and is controlled by the controller. A monorail 18 for the reciprocating movement of the stacker crane 6 and a protective fence 1 for ensuring safety are provided in the traveling passage 5 of the stacker crane 6.
7 are provided.

Further, a controller (not shown) has information on what kind of work W is set in advance on the pallet P carried in / out through the setup / indexing device 9 and information on the pallet P carried in / out through the setup / indexing device 9. Information on the order of loading and unloading, information on pallets P stored in each shelf 19, information on loading and unloading to and from a processing machine, information on a workpiece W being processed, and the like are stored. Based on the above information, the controller inputs in advance information as to what kind of processing machine is to be used for the workpiece W and what kind of processing is to be performed on the workpiece W.

In the operation of the FMS, for example, steps from the planning schedule to the preparation of the setup schedule are configured as shown in FIG. First, a plan schedule is created in the host computer, and further the next plan schedule is created. The plan schedule created by the host computer is transmitted from the host computer to the control computer in the FMS. The plan schedule received by the control computer is displayed on a display or the like, and the plan is changed or added to the plan schedule. Next, for example, a daily schedule is created from the planned schedule. Here, as a simulation, a simulation of a schedule on a daily basis is performed, a load factor of each of the processing machines 1, 2, and 3, a schedule for each processing machine, and a setup schedule are created, and a work instruction sheet is created. After performing each of the above processes, the setup indexing device 9 starts the setup indexing operation.

Next, with reference to FIG. 3, an outline of another example of the FMS in which the machining tank device of the die sinking electric discharge machine according to the present invention can be incorporated will be described. In this embodiment of the FMS, the wire electric discharge machine 1,
The system performs the same function except that the number of the small hole electric discharge machine 2 and the die sinking electric discharge machine 3 to be installed, the layout of the processing machines, and the layout of each device are different. In this embodiment, one small-hole electric discharge machine 2 for machining a predetermined start hole in a workpiece W with a pipe electrode PE is provided at a position facing a setup indexing device 9.
On the other hand, five wire electric discharge machines 1 for processing the workpiece W into a predetermined machining shape by penetrating the wire electrode WE through a start hole formed in the workpiece W are provided in the figure. In addition, the workpiece W is formed by using various shapes such as rod-shaped engraved electrodes RE.
In the figure, four die-sinking electric discharge machines 3 are provided for processing the dies. That is, while the time required to machine the start hole in the workpiece W by the small hole electric discharge machine 2 is short, the wire electrode WE is passed through the start hole of the workpiece W by the wire electric discharge machine 1. It takes a long time to process a predetermined processing shape. Also, the time required for machining with the die sinking electric discharge machine 3 is not as long as that of the wire electric discharge machine 1,
It takes some time. Therefore, by setting the number of units in accordance with the time required for processing the workpiece W by various types of processing machines, the cycle time from when the workpiece W is loaded and mounted on the processing machine to when the workpiece W is removed and discharged is set. It is possible to shorten the process waiting time of the processing machine and improve the cycle efficiency.

An example of a preferred pallet for use in an FMS incorporating this processing tank device will be described with reference to FIGS. 4, 5, and 6. FIG. FIG. 4 is a plan view showing an example of a pallet that can be used in common with the FMS, FIG. 5 is a sectional view taken along line VV in FIG. 4, and FIG. 6 is a sectional view taken along line VI-VI in FIG. FIG.

The pallet P is for setting various workpieces W at predetermined positions in advance, and is made of a material such as stainless steel which is rich in mechanical rigidity, conductivity and rust resistance. A mounting reference means such as a reference metal fitting having a common reference surface for the machines 1, 2, and 3 and a locking means such as a concave portion are provided.

The pallet P has a cutout hole 24 at the center thereof wider than the machining area of the wire electric discharge machine 1 for running the wire electrode WE. A work holder 25, which is fixing means for setting the work W at a predetermined position, is fitted into the cutout hole 24. A large number of work holders 25 are prepared, and various cutout holes 34 that match the shape of the workpiece W are formed in the center of the work holder 25. In the cutout hole 34 of the workpiece holder 25, a workpiece setting jig 26 can be attached so as to be replaceable. Therefore, the cutout hole of the workpiece holder 25
After fitting the work W to the work piece 34, the work W can be fixed to the pallet P by tightening with the clamp 27 provided on the work setting jig 26. The workpiece setting jig 26 is prepared in various shapes that match the shape of the workpiece W.

The mounting reference means for the pallet P is based on the Χ-
It functions to set the pallet P at a predetermined position in the height direction, that is, the Z direction, and the horizontal direction, that is, the Χ direction and the Y direction with respect to the reference surface provided on the processing table on the Y table,
For example, two finishing surfaces 28 formed on both sides of the lower surface of the pallet P in the height direction, and the pallet P in the horizontal direction.
And a reference metal fitting 30 provided on one side surface 30S. Each finishing surface 28 is formed parallel to each other and at the same height. Furthermore, reference metal fitting 2
9 and 30 are preferably made of a rust-resistant material such as ceramics or super hard material and have a high abrasion resistance, and are attached to the pallet P in a replaceable manner. The reference surface 29K of the reference fitting 29 provided on the front end face 29F and the reference surface 30K of the reference fitting 30 provided on one side surface 30S are orthogonal to each other, and each reference surface 29K, 30K and each finishing surface 28 are orthogonal to each other. I have. The rotation center axis of the through hole 24 is orthogonal to each of the finishing surfaces 28. For example, the front end face 29F of the pallet P on the side facing the wire electric discharge machine 1 is set as a machining reference positioning means provided on the wire electric discharge machine 1 in order to set it at a predetermined horizontal position on the machining table. A reference surface 29K of the reference means corresponding to the positioning stopper having the surface is formed. The positioning stoppers provided for the processing machine groups 1, 2, and 3 are preferably made of a rust-resistant material such as ceramics and cemented carbide, and a material with high wear resistance. Attached to.

The locking means of the pallet P is a plurality of recesses formed on the back surface of the pallet P. That is, a plurality of (two in the figure) recesses 31 are engaged with a common locking pin provided on the fork of the stacker crane 6. A plurality of (two in the figure) recesses 33 are pin holes, which are engaged with a common operation pin provided on a lifter of the intermediate transfer device 7. , The pallet P can be pushed into or pulled out of each processing machine 1, 2, 3. A plurality of (two in the figure) recesses 32 are provided in the setup indexing device 9, the rust prevention treatment device 10, and the intermediate transfer device 7.
Are engaged with a common locking pin.

Next, a machining tank device of the die sinking electric discharge machine according to the present invention will be described with reference to FIGS. 7 to 10, and a machining table device of the die sinking electric discharge machine equipped with this machining tank device will be described.
This will be described with reference to FIGS. 11 to 13. FIG. 7 is a plan view showing a machining tank device of a die sinking electric discharge machine according to the present invention, and FIG.
FIG. 7 is a front view of FIG. 7, FIG. 9 is a cross-sectional view showing a part of the wall of the processing tank of FIG. 7, and FIG. 10 is an explanation showing a part of a mechanism of an opening / closing door of the ninth processing tank. Fig. 11 is a plan view showing a machining table to which a machining tank apparatus of the die sinking electric discharge machine according to the present invention is attached, Fig. 12 is a front view of Fig. 11, and Fig. 13 is a machining table apparatus of Fig. 11. FIG.

The machining tank device 79K of the die sinking electric discharge machine 3 is particularly shown in FIGS. 7, 8, 9 and 10.

The machining tank device 79K of the die-sinker EDM has a machining tank 76K attached to a jig base 74 on the Χ-Y table of the die-sinking EDM 3, and is used for performing the die-sinking EDM on the workpiece W. Is filled with a working fluid. The processing tank 76K is formed in a closed structure to fill the processing liquid, has an open upper part, and has a notched opening 80A for carrying in and out a pallet P on which a workpiece W is set. It comprises a wall 76F, a rear wall 76R, both side walls 76S, and a bottom wall 67 which is a sub-base attached to the jig base 74. Front wall 76F
The notch 80A is configured to be closed by an openable door 80D. Processing tank device 79K is used for processing tank 7
6K, an opening 80A formed in the front wall 76F for carrying the pallet P in and out of the front wall 76F, and an opening and closing movable downward when the front wall 76F is opened to close or open the opening 80A. A door 80D, a cylinder 92A for vertically moving the door 80D, and a vertical movement mechanism for vertically moving the door 80D by operation of the cylinder 92A are provided. In the processing tank device 79K, the vertical movement mechanism of the opening / closing door 80D includes an opening / closing door 80D for opening / closing the opening 80A, a guide column 127 provided on both sides of the opening / closing door 80D and fixed to the front wall 76F, and an upper end of the guide column 127. A cylinder 92A attached to the part, a piston rod 95P fixed to a piston that reciprocates vertically in the cylinder 92A, and a bracket 92B attached to the lower end of the piston rod 95P and fixed to the lower part of the door 80D. . That is,
The cylinder 92A and the piston rod 95P function as an actuator (first actuator) for vertically moving the door 80D.

In addition, in the vertical movement mechanism of the door 80D,
27 functions as a guide for the opening / closing door 80D and guide posts 127
Guide rollers 117 provided on the upper and lower sides of both sides of the opening / closing door 80D are engaged with the guide grooves 118 formed in (20th).
Figure). A bracket 76B is fixed to the guide column 127, and a cylinder 80C for operating the piston rod 80P is fixed to the bracket 76B (FIG. 19). When the piston 80P protrudes due to the operation of the cylinder 80C, the tip of the piston rod 80P functions to press the opening / closing door 80D against the front wall 76F. That is, when the opening and closing door 80D is raised by the operation of the cylinder 92A and the opening 80A of the front wall 76F is closed by the opening and closing door 80D, the cylinder 80C is operated to move the opening and closing door 80D to the front of the front wall 76F with the piston rod 80P. Press. In addition, a sealing material 80S is disposed between the door 80D and the front wall 76F.
Since the opening / closing door 80D and the front wall 76F abut in a closed state, it is possible to prevent scattering of the processing liquid in the processing tank 76K or leakage of the processing liquid.

The processing tank device 79K includes an open end sensor for detecting the open state of the open / close door 80D and a closed end sensor for detecting the closed state of the open / close door 80D in order to detect the open / close state of the open / close door 80D. Open end sensor and closed end sensor are located on the front wall.
76F, door 80D, cylinder 92A, etc. Therefore, the open / close door 80D is detected by the open end sensor.
When the controller detects that the pallet is in the open state, the controller receives the detection signal and controls the pallet P located at the intermediate transfer device 7 to move onto the pallet support member 120 of the die sinking electric discharge machine 3. Alternatively, the intermediate transfer device 7 transfers the pallet P on the processing table 75 from the pallet support member 120.
Control to move to. Further, the closed state of the opening / closing door 80D is detected by a closed end sensor.
Is controlled to operate.

The machining tank device of this Die-sinker EDM is very preferable to apply to each FMS, and the Die-sinker EDM can be equipped with an automatic electrode exchange device etc. like the conventional one. . The die-sinking electric discharge machine 3 is almost the same as the conventional one except that the machining tank device, the mechanism for loading and unloading the pallet P onto and from the machining table, the mechanism for fixing the pallet P to the machining table, and the machining tank are different. Since the same configuration may be used,
The different device will be described. In the drawings, the reference numerals given to the die-sinker EDM 3 denote the same parts as those of the wire EDM 1 described later, which have the same functions.

The machining operation of the die sinking electric discharge machine 3 can be performed, for example, as shown in FIG. When the preparation for machining of the die sinking machine 3 is completed, the controller issues a signal to the NC program and also issues a command to the stacker crane 6, and the stacker crane 6 sends the signal to the die sinking machine 3 to the shelf 19 of the rack 4.
A work of loading a pallet P in which a workpiece W accommodated in the pallet P is set or a pallet P in which a workpiece W processed by the wire electric discharge machine 1 is set. Die-sinking electric discharge machine 3
When the pallet P is set, the die sinking electric discharge machine 3 operates to perform electric discharge machining on the workpiece W into a predetermined machining shape.
When the EDM is completed for the workpiece W, the workpiece W
The pallet P loaded with is loaded on a predetermined shelf 19 of the rack 4 by the stacker crane 6 or carried out to the setup station 36.

In the die-sinking electric discharge machine 3, the workpiece W is
The pallet P is automatically set by the intermediate transfer device 7 and the elevating device 122 with respect to the processing table 75 fixed to the jig base 74 mounted on the Χ-Y table in an electrically insulated state. It is carried in and out of The die sinking electric discharge machine 3 includes a filtering device 21 for circulating and filtering a machining fluid for filtering a machining fluid used during electrical discharge machining, a pallet support member 120 for supporting the pallet P from the intermediate transfer device 7, An elevating device 122 for moving the pallet P up and down by moving the pallet supporting member 120 up and down in the processing tank 76K, and an elevating device 1 for fixing the pallet P on the pallet supporting member 120.
The pallet P lowered by the clamp device 78, the elevating device 122, and the lifting device 122 is mounted on the processing table 75, and the pallet pressing devices 77 and 77A that press the end of the pallet P to set the position are mounted on the jig base 74. A processing tank device 79K having an openable and closable door 80D for storing a processing liquid provided in the mounted processing tank 76K is provided. A jig base 74 is fixed on the Χ-Y table of the die sinking electric discharge machine 3 in an electrically interrupted state.
A processing tank 76K is attached to the jig base 74.

In the machining table device of the die sinking electric discharge machine to which the machining tank device is attached, a pair of machining tables 75 serving as position reference means is fixed to the upper surface of the jig base 74 or the bottom wall 67. The jig base 74 is provided with clamping devices 78 located on both sides of the processing table 75. The processing table 75 is provided with pallet pressing devices 77 and 77A for fixing the loaded pallet P at a predetermined position. Pallet support members 12
0 is a piston rod 82P that moves up and down in the cylinder 121
Are supporting rollers (three on each side shown in the figure) attached to a connecting bar 82 fixed to the connecting bar 82. Each connecting bar 82 is provided with a guide roller 126 for guiding the side and upper surfaces of the pallet P when positioning the pallet P with the pallet pressing devices 77 and 77A.

The processing table 75 is fixed to a jig base 74 so as to extend in correspondence with both ends of the pallet P so as to support both ends of the pallet P. The mounting structure between the processing table 75 and the jig base 74 is not particularly limited. Processing table 75
Are configured to move in the horizontal direction together with the horizontal movement of the table that is servo-moved by the NC device, and the positional relationship is predetermined with respect to the traveling path on which the die sinking electrode RE moves up and down. Clamps opposing both sides of the pallet 10 are attached to connecting bars 82 on both sides attached to the elevating device 122 so as to be able to move up and down with respect to the worktable 75 in order to fix the pallet P on the worktable 75 when the pallet P is pressed. 85 are fixed so that they can move up and down.

The elevating device 122 includes two cylinders 121 provided in the front-rear direction and two cylinders in the left-right direction. Each connecting bar 82 arranged on both sides is attached to each cylinder 121 on both sides via a bracket 82B. Each connecting bar 82
Can be moved up and down by the operation of cylinders 121 provided at both ends. The vertical stroke of the connecting bar 82 is large and ranges from the loading / unloading height of the pallet P to the intermediate transfer device 7 to the height of the engraving process set on the working table 75. At the rear of the connecting bar 82, a shaft 82S is connected via a bracket 82C to the connecting bar 82.
, And a pinion 124 is attached to both ends of the shaft 82S. On the other hand, racks 82R are provided on both bases of the processing table 75 extending upward on both sides. Each rack 82R is engaged with a pinion 124 that moves up and down. Therefore, the vertical movement of the connecting bar 82 caused by the operation of the four cylinders 121 is caused by the pinion 124 meshing on the rack 82R and moving up and down. Thus, the connecting bar 82 can move up and down in a horizontal state.

When the pallet P is carried in and out, the connecting bar 82 is slightly moved upward by the operation of the cylinder 121 to release the fixed state of the pallet P of the clamp 85 so that the intermediate delivery device 7 can carry out the pallet P. 7 so that the pallet P can be carried in. Further, a reference metal fitting 81 for setting a vertical position, which is a positioning stopper, is attached to the upper end portion of the processing table 75, that is, on the base (the twelfth example).
Figure). The upper surface of the reference fitting 81 functions as a reference surface 81S. The pallet P is lowered onto the processing table 75 by the elevating device 122 so that the reference surface 28 on the lower surface of the pallet P is
When the pallet P is positioned on the worktable 75 by contacting the reference surface 81S of the pallet 81, the cylinder 121 is operated to operate the clamp device 78, and the pallet P is pressed downward by the clamp 85. Therefore, the water surface, that is, the reference surface
28 comes into contact with the reference surface 81 of the reference metal fitting 81, and the pallet P is accurately and reliably positioned with respect to the processing table 75 in a predetermined height direction. A magnet 125 is attached to the connecting bar portion near the reference surface 28. The magnet 125 can be pressed against the pallet P by the spring force of the spring and can sink against the spring force when pressed in the forward direction. The magnet 125 has a function of preventing the position of the pallet P from moving when the cylinder 121 is operated and the clamping device 78 is operated.

In the die sinking electric discharge machine 3, the reference surface 29K of the pallet P,
30K is pressed against positioning stoppers 84 and 87 provided on the worktable 75 by pallet pressing devices 77 and 77A. The pallet pressing device 77 that presses the pallet P to a predetermined position in the front direction of the processing table 75,
Positioning stopper provided at the reference surface 84S of the reference bracket 84
The cylinder 86C provided on the processing table 75 is provided on both sides of the processing table 75 in order to press it. Further, a pallet pressing device 77 for pressing the pallet P to a predetermined position in the side direction of the processing table 75.
A has a cylinder 88 provided on the processing table 75 in the front-rear direction of the processing table 75 in order to press the reference surface 30K on the side surface of the pallet P against the positioning stopper provided on the processing table 75, that is, the reference surface 87S of the reference fitting 87. ing. In the cylinders 86C and 88, fluid chambers are formed on both sides of a piston that reciprocates in the cylinder, and the piston reciprocates in the cylinders 86C and 88 by introducing a fluid into the fluid chamber on either side. .

In the pallet pressing device 77 for pressing the side end of the pallet P against the reference metal fitting 84 of the processing table 75, the end of the piston rod 90 fixed to the piston in the cylinder 86C is connected to the pallet P
Is configured to be able to abut on one side. Therefore, when the cylinder 86C operates and the piston rod 90 extends, the front end face of the piston rod 90 contacts the rear end face of the pallet P,
The pallet P is pressed in the front direction, and the reference surface 29S of the reference metal fitting 29 provided on the front surface of the pallet P is brought into contact with the reference surface 84S of the reference metal fitting 84 provided on the processing table 75. You can set the position.

In the pallet pressing device 77A for pressing the reference surface 30K at the side end of the pallet P against the positioning stopper of the processing table 75, that is, the reference fitting 87, the end of the piston rod 89 fixed to the piston in the cylinder 88 is connected to the pallet P. Is configured to be able to abut on one side. Therefore, if the cylinder 88 operates and the piston rod 89 extends, the piston rod 89
Abuts against the side surface of the pallet P, presses the pallet P in the lateral direction, and makes the reference surface 30K of the forward fitting 30 provided on the side surface of the pallet P abut a positioning stopper 87 provided on the processing table 75, The pallet P can be set at a predetermined position on the side.

The pallet P is fixed to the working table 75 of the die sinking electric discharge machine 3 by a plurality of clamps 85 of a clamp device 78.
It has edges on both sides pressed by the clamp 85. The clamping device 78 includes four cylinders 121,
It is composed of a piston rod 82P that moves up and down by the operation 1, a connecting bar 82 on both sides fixed via a bracket 82B attached to the piston rod 82P, and a clamp 85 attached to the center of the connecting bar 82. In addition, a guide column 82G is fixed to the processing table 75 in order to smoothly move the connecting bar 82 up and down. The clamp device 78 is provided with a pallet fixing sensor and a pallet release sensor (not shown) for detecting that the cylinder 121 is operated to fix or release the pallet P on the processing table 75.

Pallet P is clamped by clamp 85 and reference metal fitting of worktable 75
In order to fix the piston on the cylinder 81, the piston rod 82P moves downward by introducing a fluid into the cylinder 121 through a fluid passage and moving the piston downward. Therefore, bracket 82B
And the clamp 85 attached to the piston rod 82P via the connecting bar 82 moves downward. The downward movement of the clamp 85 presses the pallet P onto the processing table 75 and fixes the pallet P to the processing table 75. In order to release the fixing of the pallet P to the worktable 75 by moving the clamp 85 of the clamp device 78 upward, the cylinder 121 can be operated in the reverse direction.

As described above, since the device for positioning the pallet P on the worktable 75 in the die sinking electric discharge machine 3 is constituted, it can be operated as follows.

A cylinder is used to open the opening / closing door 80D of the processing tank device 79K.
By operating 92A, the piston rod 95P is extended downward, and the door 80D is lowered to open the opening 80A. On the other hand, in order to raise the pallet support member 120 by operating the elevating device 122, the cylinder 121 of the clamp device 78 is operated to extend the piston rod 82P and raise the connecting bar 82. When the connecting bar 82 is raised, the pallet P is brought into a state where it can be carried into the pallet supporting member 120 located above the processing table 75. The pallet P is sent onto the pallet support member 120 by the lifter 100 of the intermediate transfer device 7. The push-pull arm 101 of the lifter 100 operates to move forward and push the pallet P onto the pallet support member 120. Next, the lifter 100 of the intermediate transfer device 7 is slightly lowered, the locking pin 7P of the push-in / pull-out arm 101 is disengaged from the concave portion 33 formed in the pallet P, and then the push-in / pull-out arm 101 of the lifter 100 is passed through the intermediate transfer. Retract to the device 7 side. Then, the elevating device 122
By operating the cylinder 121, the pallet supporting member 120 on which the pallet P is mounted is lowered onto the processing table 75. When the pallet supporting member 120 moves up and down, the magnet 125 attached to the connecting bar 82 jumps out to the pallet P side by the spring force of the spring, and prevents the pallet P from moving on the pallet supporting member 120. As a result, the reference surface 28 formed on the lower surface of the pallet P is placed in a state of being in contact with the reference surface 81S of the reference fitting 81 of the processing table 75.

In this state, the pallet pressing device 77 is operated to extend the piston rod 90, and the rear end of the pallet P is pressed so that the positioning stopper of the processing table 75, that is, the reference surface 84 of the reference fitting 84 is pressed.
Press on S. The position of the front end face of the pallet P is set by the action of the pallet pressing device 77. Next, the pallet pressing device
The cylinder 88 of 77A is operated to push the side end face of the pallet P sideways with the piston rod 89, and the reference surface 30S of the reference fitting 30 on the side end face of the pallet P is moved to the reference fitting 8 provided on the worktable 75.
7 against the reference surface 87S, and the side end surface of the pallet P
Set the position on 75. In this way, the pallet P is
After the position is set to the upper position, the clamp device 78 is operated to lower the clamp 85 slightly, and the pallet P is pressed against the worktable 75 by the clamp 85, and the reference surface 28 on the lower surface of the pallet P is set to the reference metal fitting of the worktable 75. Abut against the 81 reference surface 81S in a pressed state,
The pallet P is fixed on the processing table 75. Therefore, the pallet P can be set at a predetermined processing position on the processing table 75. Of course, in all of these operation steps, each detection signal of each sensor is input to the controller, and based on the input signal, the controller issues an operation signal of the next step to operate a predetermined device. . Next, when the position setting of the pallet P on the processing table 75 is completed,
The opening and closing door 80D is raised by operating the cylinder 92A of the processing tank device 79K, and the opening 80A of the front wall 76F is closed by the opening and closing door 80D.
The loading / unloading port of the pallet P is closed.

In this state, the machining tank 76K is filled with the machining fluid, and the die sinking electric discharge machine 3 is operated to start the die sinking electric discharge machining for the workpiece W preset on the pallet P. The electric discharge machining is performed on the workpiece W, a predetermined machining shape is machined on the workpiece W, and when the electric discharge machining is completed, the machining fluid in the machining tank 76K is discharged, and then the cylinder 92A of the machining tank device 79K is operated. The pallet P is opened by opening and closing the opening 80A by opening and closing the opening / closing door 80D. Next, the piston rods 90, 89 of the pallet pressing devices 77, 77A are inoperative and retracted. Further, the pallet P is raised by operating the cylinder 121 of the lifting device 122 to raise the pallet support member 121. Next, the lifter 100 of the intermediate transfer device 7 operates to move the pallet P from the pallet support member 120 to the intermediate transfer device 7.

Next, the equipment that can be used in each of the above examples of FMS, namely, rack 4, stacker crane 6, setup indexing device 9, rust prevention treatment device 10, fluid spraying device 12, intermediate transfer device 7, wire electric discharge machine 1 and a machining table device of the small hole electric discharge machine 2,
Each example of the work piece removing device 130, the processing bath device 79, the pipe electrode exchanging device 2C for a small hole electric discharge machine and the like will be described.

The rack 4 is provided in the FMS to which the processing tank device 79K can be attached. The rack 4 has a number of openings 20 for the entry and exit of the pallets P along the flow direction of the traveling path 5 of the stacker crane 6. A number of shelves 19 for storing pallets P are vertically arranged. Therefore, the pallet P is placed on the shelf by the operation of the stacker crane 6.
It is stored in or stored in the stacker crane 6 from the shelf 19. A rust prevention treatment device 10 and a fluid spraying device 12 are arranged in an appropriate opening 20 of the rack 4. The frame protruding from the upper part of the rack 4 toward the traveling path 5 has
Upper rail to guide the upper part of the stacker crane 6
48 are installed.

Further, as shown in FIGS. 14, 15, and 16, the FMS is provided with a setup indexing device 9 on a base 36 of the setup station. FIG. 14 is a plan view showing an example of a setup indexing device usable for this FMS, FIG. 15 is a front view of FIG. 14, and FIG. 16 is a front end side view of FIG.

In this setup station, as shown in Fig. 55,
As a setup indexing work, a setup schedule is created, and setup for mounting a work, ie, a workpiece W, on the pallet P is started. First, the stacker crane 6 is operated, an empty pallet P is discharged from the shelf 19 of the rack 4 to the setup station, and the workpiece W is mounted on the pallet P. When the work of mounting the work W on the pallet P at a predetermined position is completed, the stacker crane 6 is operated again to operate the work W
Is set on the shelf 19 of the predetermined rack 4. Next, the pallet P on which the workpiece W is mounted is carried into predetermined processing machines 1, 2, and 3 by the operation of the stacker crane 6, and subjected to electric discharge machining. The pallet P to which the workpiece W on which the electric discharge machining has been completed is mounted on the shelf 19 of the predetermined rack 4 again by the operation of the stacker crane 6, or carried out to the setup station. At the setup station, a command for unloading is issued to the pallet P to which the workpiece W, which has been subjected to the electrical discharge machining and is accommodated in the predetermined shelf 19, is issued, and the stacker crane 6 is operated to transfer the pallet P to the setup station. Take it out. Workpiece W from pallet P
Is carried out, and the removed workpiece W, that is, the product is carried out to a predetermined place. The pallet P from which the workpiece W has been removed is again stored in the shelf 19 of the rack 4 by operating the stacker crane 6. Is done. In the setup station, the above operation is repeated.

To accomplish each of the above operations, the setup indexing device 9
The workpiece W is mounted on the pallet P and positioned, and the pallet P can be carried in and out of the stacker crane 6 in a predetermined positioning state. The setup indexing device 9
In the figure, two units are provided. For example, one setup indexing device 9 can be configured only for carrying in the pallet P, and the other setup indexing device 9 can be configured only for carrying out the pallet P. The traveling cart 37 of the setup indexing device 9 is
Monorail of traveling path 5 on which stacker crane 6 travels
Moving device on rail 35 arranged at right angle to 18
It reciprocates by 41. In the drawing, the moving device 41 includes a motor, a speed reducer, a sprocket 41S fixed to the base 36, a chain 41C hanging on the sprocket 41S, and the like, but is not limited thereto, and may include a hydraulic cylinder or the like. On the traveling carriage 37, the pallet mounting base 11 is disposed rotatably about a rotation shaft 43 via a rotatable roller 40 disposed at the periphery. The pallet mounting table 11 includes a circular track member that rotates on the roller 40 and a support member on the track member, and can rotate 360 degrees on the roller 40. In addition, the pallet mounting table 11
Is configured to be able to rotate in four equal parts by manual indexing or automatic indexing, and the origin of the rotational motion is confirmed by a limit switch or the like. Also,
A stopper pin 39 is provided on the traveling carriage 37, and the stopper pin 39 is configured to be able to be locked by a locking member 42 provided on the pallet mounting table 11. Therefore, if the stopper pin 39 is locked to the locking member 42, the pallet mounting table 11 on the traveling carriage 37
Can be stopped. Pallet mounting table
A lock pin is provided on the pallet 11 and engages with the concave portion 32 formed in the pallet P, so that the positional relationship between the pallet mounting table 11 and the pallet P is positioned at a predetermined position. . The pallet P is mounted on the pallet mounting table 11 via the receiving table 38. On the pallet P, a predetermined workpiece W is set at a predetermined position.

Since the setup indexing device 9 is configured as described above, the pallet P is mounted on the pallet mounting table 11 by a forklift or the like, and the pallet mounting table 11 is rotated on the traveling carriage 37 manually or by an appropriate rotating device. If you do, pallet loading table
11 is rotated to a predetermined position with respect to the traveling carriage 37, and the locking member 42 of the pallet mounting platform 11 is
The pallet mounting table 11 stops at a predetermined position of the traveling carriage 37. Next, the moving device 41 is driven to move the traveling carriage 37 to the traveling passage 5 side. Then, the traveling cart 37 stands by, and when the stacker crane 6 moves along the traveling passage 5 and comes to the setup station, the pallet loading platform is moved.
The pallet P on 11 is carried in by the fork of the stacker crane 6.

The FMS has a stacker crane 6 that reciprocates on a monorail 18 in a travel path 5. Since the stacker crane 6 has almost the same structure except for the fork structure as compared with a conventionally used one,
A description of the same points as in the related art, such as the traveling vehicle, the driving device of the traveling vehicle, and the hoisting device, is omitted. Hereinafter, Figs.
The stacker crane 6 will be described with reference to FIG. FIG. 17 is a schematic front view showing the entire stacker crane, FIG. 18 is a side view of FIG. 17, FIG. 19 is a perspective view schematically showing the stacker crane, and FIG. 20 is mounted on the stacker crane. 21 is a perspective view showing an outline of a fork base, FIG.
Figure is a front view showing the lower part of the stacker crane, Figure 22 is a front view showing the upper part of the stacker crane, Figure 23 is a cross-sectional view showing the transmission mechanism of the fork device of the stacker crane,
FIG. 25 is a front view of the fork device, FIG. 25 is an explanatory diagram showing a state where the fork device is extended, and FIG. 26 is an explanatory diagram showing a state where the fork device is contracted.

As shown in FIGS. 17 and 18, the stacker crane 6
Is a traveling truck that reciprocates on a monorail 18 provided with stoppers 6S at both ends of the traveling passage 5 by driving of a traveling device 57.
44, mast 45 standing in the front-rear direction of the traveling carriage 44, mast 45
And a hoisting device 47 attached to the mast 45. Guide rollers 49 provided at the front, rear, left and right of the upper saddle 46 are guided by the upper rail 48 provided on the rack 4 in order to prevent the upper saddle 46 of the stacker crane 6 from swinging (FIG. 19).

Further, as shown in FIGS. 20 and 22, a fork device 50 is provided on the traveling carriage 44 of the stacker crane 6 so as to extend and contract to the left and right sides of the traveling passage 5 and to place the pallets P thereon.
Is provided. Fork device 50 is fork base 51
The carriage 52 is disposed on the fork base 51 in the front-rear direction. A guide roller 55 is rotatably mounted on the upper part of the carriage 52.
The chain 54 is hung on each. FIG. 19 and FIG.
As shown in FIG. 20, a guide roller 56 is rotatably mounted on the upper portion of the carriage 52, and the guide roller 56 is guided on the mast 45 to prevent the carriage 52 from swinging due to the vertical movement of the carriage 52. Chain 54 is a hoisting device
Winding and rewinding is performed at 47, one end of which is attached to the upper saddle 46, and the guide roller 53 which is attached to the upper saddle 46.
Guided by. Therefore, the operation of the hoisting device 47
When the wire 54 is wound or unwound, the carriage 52 moves up and down, and the fork device 50 on the fork base 51 moves up and down.

Next, the fork device 50 will be described with particular reference to FIGS. 23 is an explanatory view schematically showing a fork device and a driving device of the fork device, FIG. 24 is a sectional view showing details of the fork device, FIG. 25 is an explanatory diagram showing an extended state of the fork device, and FIG. FIG. 4 is an explanatory view showing a contracted state of the fork device.

The fork device 50 has a telescopic structure so that the pallet P can be placed and carried in and out. Fork device 50
A fork 58 fixed to the fork base 51, an intermediate fork 59 slidable on the proximal fork 58, a distal fork 60 slidable on the intermediate fork, the intermediate fork 59 and the distal fork 60 Is provided with a driving device 63 that allows the device to slide freely. In the fork device 50, in particular, a locking pin 67A and a support pin 67B are provided at both end portions of the tip fork 60. The locking pin 67A engages with the concave portion 31 formed in the pallet P, and the support pin 67B supports the lower surface of the pallet and maintains the pallet P in a horizontal state.
By engaging the locking pin 67A of the tip fork 60 with the recess 31 of the pallet P, the pallet P can be accurately and reliably positioned on the tip fork 60 of the stacker crane 6. Therefore, when the fork device 50 in the stacker crane 6 moves up and down and expands and contracts, the pallet P
Can be moved to a predetermined position together with the tip fork 60 while maintaining the state accurately and securely positioned without moving on the tip fork 60.

In addition, the proximal end fork 58 includes a forward-moving chain receiving member.
62F and the retreat-side chain receiving member 62R are fixed respectively. The forward side chain 6 is attached to the forward side chain receiving member 62F.
One end of 4F and one end of the retreat-side chain 64R are fixed to the retreat-side chain receiving member 62R. Forward chain 6
4F is the forward sprocket provided at the tip of the intermediate fork 59
The other end of the forward side chain 64F is fixed to the proximal end 66F of the distal end fork 60. Further, the retreat-side chain 64R is hung on a retreat-side sprocket 65R provided at the tip of the intermediate fork 59, and the other end of the retreat-side chain 64R is fixed to the tip-side end 66R of the tip fork 60. The driving device 63 is connected to the fork base through the transmission 71.
A pinion 70 rotatably mounted on 51 is rotationally driven.
Further, a rack 61 is fixed to the lower surface of the intermediate fork 59 in a state of extending in the longitudinal direction. The rack 61 meshes with a pinion 70 attached to the fork base 51. Guide grooves 72, 7 are provided on both sides of the intermediate fork 59.
3 are formed. Guide roller 6 for tip fork 60
8 is rotatably mounted, and a guide roller 69 is rotatably mounted on the proximal end fork 58. The guide roller 68 is loosely fitted in the guide groove 72 and guides the guide roller 68 in the guide groove 72.
Stretches smoothly against 59. Further, the guide roller 69 is loosely fitted in the guide groove 73 and the guide roller 69 is inserted into the guide groove.
The intermediate fork 59 is guided by 73
It smoothly expands and contracts with respect to.

The fork device 50 is configured as described above, and operates as follows. First, as shown in FIG. 25, when the tip fork 60 of the fork device 50 is extended, the driving device 63 is driven to rotate in one direction, and the pinion 70 is rotated through the transmission 71 in the forward direction. . Pinion
The rotational movement of 70 causes the rack 61 to move in the longitudinal direction. When the rack 61 moves to the forward side in the longitudinal direction, the intermediate fork 59 moves to the forward side, that is, the side that extends with respect to the proximal end fork 58. The extension of the intermediate fork 59 rotates the sprocket 65F attached to the intermediate fork 59 by the chain 64F, thereby increasing the distance between the forward-side chain receiving member 62F and the sprocket 65F. Distance becomes shorter. Accordingly, the tip fork 60 moves toward the forward side, that is, the side extending from the intermediate fork 59. Therefore, the fork device 50 extends the tip fork 60.

When the tip fork 60 of the fork device 50 is extended or contracted as shown in FIG.
Is rotated in the backward direction. The rotational movement of the pinion 70 moves the rack 61 to the retreating side in the longitudinal direction. When the rack 61 moves to the retreating side in the longitudinal direction, the intermediate fork 59 moves to the retreating side, that is, the retreating side with respect to the base end fork 58. The retracting of the intermediate fork 59 causes the sprocket 65R attached to the intermediate fork 59 to rotate by the chain 64R.
And the distance between the sprocket 65R and the
The distance between 5R and the proximal end 66R is reduced. Therefore, the tip fork 60 moves to the retreat side, that is, the retraction side with respect to the intermediate fork 59. Therefore, the fork device 50 causes the tip fork 60 to contract.

Therefore, in the stacker crane 6, the traveling path 5
If a fork device 50 that expands and contracts on one side and a fork device 50 that expands and contracts on the other side is provided, the stacker crane 6 can fork the device 50 that can expand and contract on both sides of the travel path 5. Will be provided. Alternatively, for the stacker crane 6, instead of providing the two telescopic fork devices 50, not shown, by providing a fork device that rotates on a fork base 51, one fork device 50 can be used in both directions. , The fork device can be oriented in a desired direction.

Therefore, the stacker crane 6 moves the fork device 50 up and down by the hoisting device 47 and has the fork device 50 that expands and contracts in the left-right direction of the traveling passage 5. If the tip fork 60 is slightly lifted up below the pallet P existing in
The locking pin 67A of the tip fork 60 engages with 31 and
The lower surface of the pallet P is placed on the support pins 67B. If the tip fork 60 is contracted in this state, the pallet P can be positioned on the fork base 51. Next, the traveling unit 44 of the stacker crane 6 is driven by the traveling unit 57, and a predetermined position, for example, the setup indexing unit 9, and each intermediate transfer unit of the various processing machines 1, 2, and 3 is commanded by the controller.
7. Move to the rust preventive treatment device 10, the fluid spraying device 12 or the shelf 19 of the rack 4. Again, the fork device 50 is operated to extend the tip fork 60 and move to the position where the pallet P is placed. If the tip fork 60 is slightly moved downward when the tip fork 60 is extended to the mounting position of the pallet P, the locking pin 67A of the tip fork 60 engaged with the recess 31 of the pallet P is released. In this state, the tip fork 60 is retracted, the fork device 50 is contracted to the state shown in FIG. 19, and the stacker crane 6 is moved to the next destination.

Therefore, the stacker crane 6 is provided with the setup indexing device 9.
The function of carrying the pallet P received by the above into the rust prevention treatment device 10, the fluid spraying device 12, the rack 4 or the intermediate transfer device 7 of the various processing machines 1, 2, and 3 can be achieved. Alternatively, the stacker crane 6 receives the pallets P from the intermediate transfer device 7 that has received the pallets P unloaded from the various processing machines 1, 2, and 3, and carries them into the intermediate transfer device 7 of another processing machine. The function of carrying out to the rack 4 or the setup indexing device 9 can be achieved.

Further, the rust prevention treatment device 10 is installed at a rust prevention station provided in a pallet traveling system for performing a rust prevention treatment on the workpiece W. The rust prevention station may be installed at any place in the pallet traveling system.
Two openings 20 are provided. Rust prevention equipment
10 will be described with particular reference to FIGS. 2, 27 and 28. FIG. 27 is a front view of a rust prevention treatment device that can be used for this FMS, and FIG. 28 is a side view of FIG.

The rust prevention device 10 has a pallet support member 23 that moves up and down while being guided by a support 4P installed in the rack 4. The pallet support member 23 maintains the pallet P from the stacker crane 6 in a predetermined positioning state. Pallet P to be able to
And locking means for engaging with the locking means provided in. A frame 4F is fixed to the upper part of the column 4P, and a driving device 10D for moving the pallet support member 23 up and down is set on the frame 4F. A tank 10T having an open top is disposed below the rack 4, and the tank 10T contains a solution for performing a rust prevention treatment. For example, one tank 10
T contains a rust removing solution for removing rust generated on the workpiece W, and the other tank 10T contains a rust preventing solution for preventing rust from being generated on the workpiece W. Further, it is preferable to provide, for example, means for applying ultrasonic vibration to the solution in the tank 10T containing the rust removing solution in order to promote the rust removing effect. The guide roller 23G of the pallet support member 23 is moved up and down by being guided by guide means provided on the support 4P of the rust prevention station.

In this FMS, the fluid spraying device 12 sprays a fluid such as high-pressure air or high-temperature water to remove a deposit such as a machining fluid, a foreign substance, or dust attached to the surface of the workpiece W, thereby removing the dust. It is provided inside. Fluid spraying device
Although 12 may be provided at any place, in the figure, it is provided at the opening 2 of the rack 4 next to the rust prevention treatment device 10. The fluid spraying device 12 is for keeping the workpiece W carried into the FMS in a sufficiently cleaned state for performing rust prevention treatment or electric discharge machining, and means for blowing fluid such as high-pressure air or high-temperature water. Since it is provided, a shutter means for closing the opening 20 is provided to prevent the fluid from scattering. The shutter means is controlled to operate according to a command from a controller. When the pallet P is carried into the fluid spraying device 12 from the stacker crane 6, the shutter means is operated to open the shutter, and the pallet P is placed on the pallet support member 25P provided in the fluid spraying device 12. . The pallet support member 25P is provided with locking means for engaging with locking means provided on the pallet P so that the pallet P can maintain a predetermined positioning state. When the pallet P is placed on the pallet support member 25P, the shutter closes, and then the fluid blowing nozzle of the fluid spraying device 12
Fluid is blown from 12N, and a cleaning process is performed on the workpiece W. When the cleaning process for the workpiece W is completed,
The shutter is opened again, and the pallet P is carried out of the pallet support member 25P by the stacker crane 6.

As described above, the rust prevention treatment device 10 and the fluid spray device 12
Is configured as an example, but the operation of the devices 10 and 12 is, for example, that the pallet P carried from the stacker crane 6 to the pallet support member 23 of the rust prevention treatment device 10 is driven by a driving device.
10D is operated and put into the tank 10T containing the rust removing solution to remove the rust generated on the workpiece W. Next, the pallet P is moved from the rust prevention treatment device 10 to the fluid spraying device 12 by the stacker crane 6, and high-pressure air is sprayed on the surface of the workpiece W by the fluid spraying device 12 to remove the rust removing solution attached to the surface. Blow off. Again, the pallet P is moved by the stacker crane 6 from the fluid spraying device 12 to the rust-preventive treatment device 10, and is put into the tank 10T in which the rust-preventive solution of the rust-preventive treatment device 10 is stored. Perform processing. In this case, the electric discharge machining is performed immediately after the rust preventive treatment on the workpiece W. In particular, the pallet P is moved from the rust preventive treatment device 10 to the fluid spraying device 12 by the stacker crane 6, and Thus, high-pressure air is blown onto the surface of the workpiece W to blow off the rust-preventive solution attached to the surface, and is conveyed by the stacker crane 6 to the intermediate delivery device 7 of the processing machine group. Alternatively, after the rust-prevention treatment, the pallet P on which the workpiece W subjected to the rust-prevention treatment is set is stored in the shelf 19 of the rack 4 by the stacker crane 6, or is carried into the processing machines 1, 2, and 3.

Next, the wire electric discharge machine 1 in the FMS will be described with reference to FIGS. 29 to 38. FIG. 29 is a side view of a machining table portion of the wire electric discharge machine, FIG. 30 is a front view of FIG. 29, FIG. 31 is a plan view of a machining table member of the wire electric discharge machine, and FIG. FIG. 33 is a partial plan view of the drawing, FIG. 33 is another side view of the working table part of the wire electric discharge machine, FIG. 34 is a partial cross-sectional view of the clamping device, FIG.
36 is a cross-sectional view of FIG. 35, FIG. 37 is a plan view of the working tank cover device, and FIG. 38 is a side view of FIG.

In this FMS, the wire electric discharge machine 1 includes an automatic wire electrode supply device, a wire electrode exchanging device, and a work piece removing device for automatically removing a core, that is, a work piece from a workpiece (FIG. 44). 45 and FIG. 45). The wire electric discharge machine 1 in this FMS is different from the conventional one in that a mechanism for carrying a pallet P in and out of a worktable 75, a mechanism for fixing the pallet P to the worktable 75, and a work tank 76 are different. Since they have almost the same configuration, the differences will be particularly described.

The machining operation of the wire electric discharge machine 1 can be performed, for example, as shown in FIG. When the wire electric discharge machine 1 is ready for machining, the controller issues a signal to the NC program and issues a command to the stacker crane 6, and the stacker crane 6 sends the rack 4 to the wire electric discharge machine 1.
A pallet P set with a workpiece W whose machining of the start hole is accommodated in the shelf 19 of the above or a pallet P set with a workpiece W whose machining of the start hole has been completed by the small-hole electric discharge machine 2 is carried in. Do the work. When the pallet P is set in the wire electric discharge machine 1, the wire electric discharge machine 1 operates to perform electric discharge machining on the workpiece W into a predetermined machining shape. When the wire electric discharge machining is completed for the workpiece W, the pallet P on which the workpiece W is mounted is stored in a predetermined shelf 19 of the rack 4 by the stacker crane 6, or is carried out to a base or setup station 36. .

In the wire electric discharge machine 1, a workpiece W is preset on each pallet P, and the pallet P is intermediately transferred to a work table 75 fixed to a jig base 74 mounted on a 取 り 付 け -Y table in an electrically insulated state. It is automatically carried in and out by the device 7. The wire electric discharge machine 1 has a filtering device 21 for filtering the machining fluid used during the electric discharge machining, and a pallet pressing device 77 for carrying the pallet P from the intermediate transfer device 7 into the machining table 75 and pushing it in for setting. , Pallet P
A clamping device 78 provided on the processing table 75 to fix the workpiece on the processing table 75, and a slide cover which is an openable and closable door provided in the processing tank 76 mounted on the jig base 74 to prevent scattering of the processing liquid. A processing tank cover device 79 with 80 is provided. A jig base 74 is fixed on the Χ-Y table in the wire electric discharge machine 1 in an electrically interrupted state, and a processing tank 76 is attached to the jig base 74. Is provided. A pair of processing tables 75 serving as position reference means are fixed to the upper surface of the jig base 74. The worktable 75 is provided with a clamp device 78 and a pallet pressing device 77 located on both sides of the jig base 74.

The machining table 75 in the wire electric discharge machine 1 is shown in FIGS.
This will be described with reference to FIG. The processing table 75 is fixed to a jig base 74 so as to extend in correspondence with both ends of the pallet P so as to support both ends of the pallet P. The mounting structure between the processing table 75 and the jig base 74 is not particularly limited. The processing table 75 is configured to move with the horizontal movement of the table that is servo-moved by the NC device, and the positional relationship with the traveling path on which the wire electrode WE travels is determined in advance. A guide roller 83A is provided at the entrance of the processing table 75. A large number of guide rollers 83 opposing both side surfaces of the pallet P are provided on the connecting bars 82 on both sides mounted on the processing table 75 so as to be vertically movable with respect to the processing table 75 so as to guide the pallet P when the pallet P is pressed. Each is rotatably fixed.
These guide rollers 83 function to smoothly move the pallet P with respect to the processing table 75. That is, the connecting bar 82 is supported by the guides 86A provided at both ends and can move in the vertical direction by the operation of the cylinder 78C.
At the upper end of the processing table 75, a reference metal fitting 81 as a positioning member is set. The upper surface of the reference bracket 81 is the reference surface
Functions as 81S. When the pallet P is carried in and out, the connecting bar 82 is moved upward by the operation of the cylinder 78C, and the upper surface of the guide roller 83 is placed on the reference surface 81S of the reference fitting 81.
The pallet P is projected upward to guide the pallet P when it is carried in and out.

Further, the respective reference surfaces 29K, 30K of the reference metal fittings 29, 30 attached to the pallet P are pressed against positioning stoppers 84, 87 provided on the working table 75 by pallet pressing devices 77, 77A. In a wire electric discharge machine, the pallet P
Pallet pressing device that presses a predetermined position in the forward direction of the pallet
77 has cylinders 86 provided on the processing table 75 on both sides of the processing table 75 to press the reference surface 29K of the pallet P against a positioning stopper 84 provided on the processing table 75. Pallet P
The pallet pressing device 77A presses the reference surface 30K on the side surface of the pallet P against the positioning stopper 87 provided on the processing table 75. 75 has a cylinder 88 provided. The cylinders 86 and 88 are double-acting cylinders. Fluid chambers are formed on both sides of a piston that reciprocates in the cylinder. 8
Reciprocate within 8.

Position the front end of the pallet P with the positioning stopper 84 of the worktable 75.
In the pallet pressing device 77 that presses the cylinder 86, one end of the cylinder 86 is rotatably mounted on the worktable 75 at a pivot point 86P, and the pressing arm 91 rotates on the end of the piston rod 90 fixed to the piston in the cylinder 86. It is attached so that it can rotate around the shaft 65. The pressing arm 91 is rotatably attached to a rotating shaft 66 attached to the processing table 75.
Therefore, when the piston rod 90 extends from the cylinder 86, as shown by the solid line in FIG.
Turns upward about the rotation shaft 66 and presses the end of the pallet P. On the other hand, the piston rod 90
When the pallet P is retracted into the cylinder 86, the end 94 of the pressing arm 91 pivots downward about the rotary shaft 66 as shown by a chain line in FIG.

Position the side end of the pallet P with the positioning stopper 87
Pallet pressing device 77A that presses the cylinder 88
The end of the piston rod 89 fixed to the piston inside is configured to be able to contact one side of the pallet P. Therefore, when the cylinder 88 operates and the piston rod 89 extends, the tip end surface of the piston rod 89 comes into contact with the side surface of the pallet P, and presses the pallet P in the side direction. The pallet P can be set at a predetermined lateral position by bringing the reference surface 30K into contact with a positioning stopper 87 provided on the processing table 75.

When the finishing surface of the lower surface of the pallet P, that is, the reference surface 28 is brought into contact with the reference surface 81S of the reference metal fitting 81 of the processing table 75, and the position of the pallet P is set on the processing table 75, the cylinder 78C is used.
Is operated in the reverse direction to move the connecting bar 82 downward, and the upper surface of the guide roller 83 is moved to the reference surface 81S of the reference metal fitting 81.
Lower the guide roller 83 so that it does not hinder positioning. Therefore, the finishing surface of the lower surface of the pallet P, that is, the reference surface 28 abuts on the reference surface 81S of the reference fitting 81, and
The pallet P is accurately and reliably positioned in the predetermined height direction with respect to the processing table 75.

In the wire electric discharge machine 1, the pallet P is fixed to the working table 75 of the wire electric discharge machine 1 by a plurality of clamps 85 of a clamp device 78, and has edges on both sides pressed by the clamps 85. ing. The clamping device 78 is shown in particular in FIGS. 30, 31, 33 and 34. The clamping device 78 is attached to the side of each processing 75 via a bracket 78B, and has a function of fixing the pallet P on the processing table 75 at a position facing each side surface of the pallet P. Clamping device 78
Is located on the side of the center of the connecting bar 82 and
A cylinder 78C fixed to the processing table 75 at 78B, a piston rod 78R fixed to a piston 78P that moves up and down by the operation of the cylinder 78C, and a clamp 85 attached to the upper end of the piston rod 78R and located above the connecting bar 82 have.

Further, the clamp device 78 is provided with a pallet fixing sensor and a pallet release sensor (not shown) for detecting that the cylinder 78C is operated to fix or release the pallet P on the processing table 75. . The upper end of the piston rod 78R passes through a through hole 85H provided in the clamp 85, and the nut 85N is screwed into a thread formed in the upper end of the piston rod 78R, thereby fixing the clamp 85 to the piston rod 78R. I have. Therefore, when fluid is introduced into the cylinder 78C through the fluid passage, the piston 78P moves downward and the piston rod 78R moves downward. Therefore, the clamp 85 fixed to the piston rod 78R moves downward. The downward movement of the clamp 85 presses the pallet P onto the processing table 75 and fixes the pallet P to the processing table 75. In order to release the fixing of the pallet P to the worktable 75 by moving the clamp 85 of the clamp device 78 upward, the cylinder 78C can be operated in the reverse direction.

In the wire electric discharge machine 1, the machining tank cover device 79
Is particularly shown in FIGS. 35, 36, 37 and 38.

The machining tank cover device 79 is the X-
It is arranged in a machining tank 76 attached to a jig base 74 on a Y table, and is used for machining a workpiece W when performing wire electric discharge machining.
It functions to prevent scattering of processing waste and the like, or to function as a guard for safety. The processing tank cover device 79 includes an air cylinder 92, a cover 93 attached to the processing tank 76, and the cover 93.
Manual opening / closing cover arranged on the side of
The pallet P includes a slide cover 80 slidable with respect to a cover 94C and a pallet P. The processing tank cover device 79 includes an air cylinder 92 that is an actuator that slides a slide cover 80 for opening and closing the entrance of the pallet P on which the workpiece W is set. The air cylinder 92 is a double-acting cylinder, which is made of a non-magnetic material. A piston 95 made of a magnetic material is arranged in the cylinder of the air cylinder 92.
The piston 95 reciprocates in the air cylinder 92 when air is supplied to either side of the piston 95 in the air cylinder 92. The slide cover 80 of the processing tank cover device 79 is located on the surface of the intermediate transfer device 7 facing the pallet carry-in / out side. Regarding the reciprocating mechanism of the slide cover 80, an air cylinder 92 and a piston 95 reciprocating in the air cylinder 92 are disposed below the processing tank cover device 79. This is achieved by supplying air to one of the air passages 97 provided in the section. A cover guide 96 is fixed to the cover 93, and a guide roller 98 is attached to the cover guide 96. A guide rail 99 is fixed to the slide cover 80, and a guide roller 98 is fitted to the guide rail 99. Further, a bracket 80B is fixed to the lower end of the slide cover 80,
A bracket 80M made of a magnet is fixed to an end of the bracket 80B. The bracket 80B adsorbs a piston 95 made of a magnetic material that reciprocates in the air cylinder 92 and reciprocates along the outer surface of the air cylinder 92. Therefore, when the piston 95 reciprocates in the cylinder, the bracket 80M holding the piston 95 moves according to the movement of the piston 95. If the bracket 80M reciprocates,
The bracket 80B reciprocates. When the bracket 80B reciprocates, the slide cover 80 reciprocates while being guided by the guide rollers 98 provided on the cover guide 96.

In order to detect the open / closed state of the slide cover 80, the processing tank cover device 79 includes an open end sensor 80F for detecting the open state of the slide cover 80 and a closed end sensor 80E for detecting the closed state of the slide cover 80. The open end sensor 80F and the closed end sensor 80E can be provided for the cover 93, the slide cover 80, or the air cylinder 92 as shown. Therefore, the controller detects that the slide cover 80 is open by the open end sensor 80F, and the controller receives the detection signal and places the pallet P located in the intermediate transfer device 7 on the work table 75 of the wire electric discharge machine 1. Control to move to the work table 75
Control is performed to move the upper pallet P from the processing table 75 to the intermediate transfer device 7. The closed state of the slide cover 80 is detected by the closed end sensor 80E, and the controller receives the detection signal and controls the wire electric discharge machine 1 to operate.

Further, the wire electric discharge machine 1 includes a reference surface 81S,
The reference surface 28, which is the finished surface formed on the back surface of the pallet P,
Reference surface 29F of reference metal fitting 29 in which pallet P is arranged on the front end surface,
Reference surface 30K of reference metal fitting 30 arranged on the side end surface of pallet P,
And a positioning stopper, that is, a reference metal fitting 8 provided on the processing table 75.
A reference surface cleaning device is provided to clean the reference surfaces 84S and 87S formed at 4,87. This reference surface cleaning device can be composed of a water spray nozzle for spraying water to the cleaning surface and an air spray nozzle for blowing air, and removes fine machining chips generated during wire electric discharge machining by the wire electric discharge machine 1. I do. Accordingly, since each reference surface can be cleaned at every setting of the pallet P or at every predetermined period, the setting of the pallet P on the processing table 75 is always reliable and does not adversely affect the processing accuracy.

As described above, since the device for positioning the pallet P on the machining table 75 in the wire electric discharge machine 1 is constituted, it can be operated as follows. That is, the wire electric discharge machine 1
Open the slide cover 80 of the processing tank cover device 79 provided in the
5 and operate cylinder 86A to connect
Raise 82. The rise of the connecting bar 82 raises the guide roller 83. In this state, the pallet P is sent onto the processing table 75 by the lifter 100 of the intermediate transfer device 7. At this time, it is preferable that the upper surface level of the guide roller 83 is the same as the upper surface level of each roller provided in the lifter 100 of the intermediate transfer device 7 described later. Then, the push-in / draw-out arm 101 of the lifter 100 operates to move forward and push the pallet P onto the worktable 75. Next, the lifter 10 of the intermediate transfer device 7
0 is slightly lowered and the push-in / pull-out arm 101 has an operating pin
170 is released from the concave portion 33 formed in the pallet P, and then the push-in / draw-out arm 101 is retracted. At this time, the solenoid valve of the cylinder 86A is set to the neutral position by the command of the controller, and falls by its own weight of the pallet P, and the connecting bar 82 and the guide roller 83 descend by the load of the pallet P. As a result, the lower surface of the pallet P is placed in a state of contact with the reference surface 81S of the reference metal fitting 81 of the processing table 75.

In this state, the pallet pressing device 77 is operated to rotate the pressing arm 91 about the rotation shaft 93, and as shown by the solid line in FIG. Press the base 74 against the reference surface 84S of the positioning stopper 84. The front end surface of the pallet P is set by the action of the pallet pressing device 77, and then the cylinder 88 of the pallet pressing device 77A is operated to push the side end surface of the pallet P sideways with the piston rod 89, so that the side end surface of the pallet P Is pressed against the reference surface 30K of the reference metal fitting 30 provided on the processing table 75, and the side end surface of the pallet P is set on the processing table 75. After the position of the pallet P is set on the processing table 75 in this way, the clamping device 78 is operated to press the pallet P, and the reference surface 28 on the lower surface of the pallet P is pressed against the reference surface 81S of the reference fitting 81 of the processing table 75. When the pallet P is brought into contact with the state and the pallet P is fixed on the processing table 75, the pallet P can be set at a predetermined processing position on the processing table 75. Of course, in all of these operation steps, each detection signal of each sensor is input to the controller, and based on the input signal, the controller issues an operation signal of the next step to operate a predetermined device. . Next, when the positioning of the pallet P on the processing table 75 is completed, the slide cover 80 of the processing tank cover device 79 slides to close the loading / unloading port of the pallet P.

In this state, the wire electric discharge machine 1 is operated, and after the wire is automatically inserted into the workpiece W preset on the pallet P, the wire electric discharge machine is started. Electric discharge machining is performed on the workpiece W, a predetermined machining shape is machined on the workpiece W, and when the electric discharge machining is completed, the automatic wire feeder cuts the wire, and then the machining tank cover device 79 operates. As a result, the slide cover 80 slides to open the loading / unloading port of the pallet P. Next, the pallet pressing device 77
Are actuated in the reverse direction to retreat the pressing arm 91 as shown by the dashed line in FIG. 33, and to deactivate the pallet pressing device 77A to eliminate the pressing force of the piston rod 89. Further, the clamp device 78 is operated to raise the clamp 85,
Raise the guide roller 83 to move the pallet P to the guide roller.
Make it mounted on 83. Next, the intermediate transfer device 7
Operates to move the pallet P from the processing table 75 to the intermediate transfer device 7.

Further, in the wire electric discharge machine 1, when wire electric discharge machining is performed on the workpiece W, machining chips separated from the workpiece W or products processed into a machining shape are generated. If these pieces are not automatically removed by electric discharge machining in the wire electric discharge machine 1, subsequent electric discharge machining cannot be performed. Here, an example of the work piece removing apparatus will be described with reference to FIGS. 44 and 45.
FIG. 44 is a schematic front view showing an example of a workpiece removing device attached to a wire electric discharge machine, and FIG. 45 is a side view of FIG.

The work piece removing device 130 is fixed to the head 1H of the wire electric discharge machine 1 by an upper mounting member 131 and a lower mounting member 132. A dog 133 is mounted on the upper mounting member 131 to guide the ball screw rod 135 that moves up and down through the dog 133. The ball screw rod 135 has a ball spline groove 141 and a screw 142 formed therein. The lower attachment member 132 is provided with a sliding member 62 that is engaged with the ball spline groove 141 and is fixed in the rotation direction and slides in the up-down direction. A gear 145 is fixed to the sliding member 62. The gear 145 is meshed with a gear 146 that meshes with the gear 145 and turns 270 degrees around the outer periphery of the gear 145.
The gear 146 includes a support member 147 attached to the lower attachment member 132.
Is fixed to a rotating shaft 148 rotatably supported on the rotating shaft 148. The rotation of the rotating shaft 148 is performed by the operation of the second servomotor 137. Therefore, the rotation axis 1
When 48 rotates, gear 146 meshes with gear 145 and gear 14
The ball screw rod 135 is rotated by rotating around the gear 5 or by rotating the gear 146 to rotate the gear 145.

A ball screw 143 that meshes with the screw 142 is attached to the lower attachment member 132. Nut rotation support holder attached to lower attachment member 132 and fixed to sliding member 62
A nut 149 is fixed to 53, and a worm wheel 144 is fixed to the nut 149 by meshing with a screw 141. The worm wheel 144 is attached to the first mounting member 132
It rotates by the operation of the servomotor 136 which is a servomotor. Therefore, when the worm wheel 144 is rotated by the operation of the servo motor 136, the sliding member 62 moves the ball screw rod 135 up and down. Further, when the servomotor 137 and the servomotor 136 are operated and the gear 145 and the worm wheel 144 rotate in synchronization, the rotational movements of the gear 145 and the worm wheel 144 cancel each other to stop, so that only the ball screw rod 135 rotates. become.

Further, an electromagnetic holder case 138 is attached to the lower end of the ball screw rod 135. Electromagnetic holder case 1
The ball screw 150 is attached to 38, and the ball screw 150
A ball screw rod 139, which is a second ball screw rod provided with a screw 151 that meshes with the rod, penetrates. A ball spline 152 is formed on the ball screw rod 139. Further, the electromagnetic holder case 138 is provided with a third servomotor 153 for rotating a worm wheel attached to the ball screw 150. Therefore, the servo motor 153
When the worm wheel of the ball screw 159 rotates by operating the ball screw 159, the ball screw rod 1
39 reciprocates horizontally. An electromagnetic holder 140 is attached to the tip of the ball screw rod 139.
Is equipped with a magnet such as an electromagnet.

Since the work piece removing device 130 is configured as described above, the ball screw rod 13 that moves up and down and rotates.
The ball screw rod 139 attached to the lower end of 5 can move up and down and rotate integrally with the ball screw rod 135, and the ball screw rod 139 itself can move horizontally with respect to the ball screw rod 135. Therefore, the electromagnetic holder 140 attached to the tip of the ball screw rod 139 can move in a three-dimensional space.

Therefore, if the electromagnet attached to the electromagnetic holder 140 of the workpiece removing device 130 is configured to protrude from the workpiece removing device 130, the electromagnet is positioned on the pallet P of the wire electric discharge machine 1. It can come into contact with the upper surface of the workpiece W. Therefore, immediately before the work piece is separated from the workpiece W by the command of the controller, the work piece removal device 130 is operated to bring the electromagnet into contact with the work piece and attract the work piece. Without dropping, the workpiece adsorbed by the electromagnet 140 can be moved upward to be stored in a predetermined workpiece storage location, and the workpiece separated from the workpiece W does not damage the processing surface. The work piece can be eliminated.

Next, regarding the small hole electric discharge machine 2 in the machine group,
39 to 43, FIG. 39 is a plan view of a small hole electric discharge machine, FIG. 40 is a side view of a pipe electrode changing device, and FIG. 41 is a line IIIX- of FIG. Sectional view at IIIX, No.
42 is a plan view of the index table and FIG.
It is sectional drawing in line BB of a figure.

The small hole electric discharge machine 2 is different from the wire electric discharge machine 1 in that a small hole, a small hole, and a wire electrode WE for wire electric discharge machining are formed on a workpiece W previously set on a pallet P using a pipe electrode PE. And a machining tank cover device for setting the position of the pallet P on the machining table.
The same device as described above can be used. Therefore, the description of the configuration and operation of the above-described apparatus will not be repeated here, and only the exchange apparatus for the pipe electrode PE and the setting apparatus for the pipe electrode PE will be described. Also, this FMS
As the pipe electrode exchange apparatus, the one disclosed in the above-mentioned Japanese Patent Application Laid-Open No. 1-246021 can be used, but the pipe electrode exchange apparatus described below is preferable.

The machining operation of the small hole electric discharge machine 2 can be performed, for example, as shown in FIG. When the preparation for machining of the small hole electric discharge machine 2 is completed, the controller issues a signal to the NC program and also issues a command to the stacker crane 6, and the stacker crane 6 sends the signal to the small hole electric discharge machine 2 to the rack 19 of the rack 4.
In order to machine a start hole, a pallet P mounted with a workpiece W having a predetermined machining shape by wire electric discharge machining accommodated in a small hole electric discharge machine 2 is carried out.
When the pallet P is set in the small-hole electric discharge machine 2, the small-hole electric discharge machine 2 operates to perform electric discharge machining of a fine hole in a predetermined position on the workpiece W. When the electric discharge machining of the start hole is completed for the work W, the pallet P on which the work W is mounted is moved by the stacker crane 6 to a predetermined shelf of the rack 4.
19 or carried into the wire electric discharge machine 1.

The small hole electric discharge machine 2 is provided with a pipe electrode exchange device 2C. The pipe electrode exchange device 2C can use a conventionally used pipe electrode PE. In order to determine a large number of pipe electrodes PE, an index table 102 and a pipe electrode PE having one indexing notch 102C are used. It has a chuck pallet 105 for support. The chuck pallet 105 is configured to be replaceable with respect to the index table 102. Pallet 105 for chuck
Has a support hole 1 that supports the chuck PEC of the pipe electrode PE.
03 is formed on the concentric circle at the same distance in the circumferential direction from the rotation center point. In the support hole 103, a notch groove 104 is opened radially outward to allow the pipe electrode PE to enter and exit. The notch groove 104 of the support hole 103 is formed so as to be distributed from a line connecting the center point of the chuck pallet 105 and the center point of the support hole 103. The diameter of the support hole 103 is formed larger than the outer diameter of the cap nut PEN of the pipe electrode PE. In the center of the chuck pallet 105, a mounting reference hole 108 for attaching the chuck pallet 105 to the index table 102 is provided. 106 (four in the figure) and an index origin confirmation hole 107 for confirming the index origin of the pipe electrode PE are formed. In addition, the center of the chuck pallet 105 and the support hole 1
One fastening hole 106 and an index origin confirmation hole 107 are located on a line connecting the center points of 03. The index origin confirmation hole 107 is configured to confirm the index origin by matching the index confirmation notch 102C of the index table 102.

The pipe electrode exchanging device 2C has an indexing mechanism for indexing the chuck pallet 105. The indexing mechanism includes a stepping motor 109 and a reduction gear transmission 110 installed between the stepping motor 109 and the chuck pallet 105. Further, the small-hole electric discharge machine 2 has its main shaft
A mechanism for inserting the electrode holder of the pipe electrode PE supported in the support hole 103 of the chuck pallet 105 into the chuck pallet 105, and a support hole
There is a mechanism for moving from the standby position of 103 to the center position of the main shaft 111 of the small hole electric discharge machine 2. The center of the main shaft 111 is a point that is the center of the pipe electrode PE and the center during processing. The above-mentioned insertion mechanism includes a vertically moving cylinder 1 for vertically moving a pallet 105 for chuck provided in a pipe electrode exchanging device 2C.
Consists of twelve. The moving mechanism for moving the chuck pallet 105 to the center position of the spindle 111 is a front-rear moving cylinder 11.
Consists of three. This forward / backward moving cylinder 113 moves the indexed pipe electrode PE to the center position of the main shaft 111 at the forward end,
Further, it has a function of retracting the chuck pallet 105 to the standby position at the retracted end. In addition, pipe electrode exchange device 2C
Has a means for checking the index origin of the chuck pallet 105 and a means for checking whether or not the pipe electrode PE exists in the support hole 103. The index origin check means is constituted by a photoelectric switch 114 attached to a frame 116 supporting a stepping motor 109. The presence / absence confirming means is constituted by a photoelectric switch 115 attached to the frame 116 supporting the stepping motor 109 and detecting whether or not the pipe electrode PE is supported in the support hole 103 facing the center of the main shaft 111. .

As described above, since the pipe electrode exchange device 2C is configured, it can operate as follows.

When attaching the pipe electrode PE to the center 111 of the main shaft of the small-hole electric discharge machine 2, the stepping motor 109 is operated to rotate the chuck pallet 105, and the photoelectric switch 114, which is a means for confirming the index origin, connects the pipe electrode PE. The supporting hole 103 to be supported is determined. Next, it is confirmed that the pipe electrode PE is supported by the support hole 103 facing the main shaft center 111 by the photoelectric switch 115 as the presence / absence confirmation means.
If the pipe electrode PE is present in 3, the pipe electrode PE is moved to the position of the main shaft center 111 by the operation of the forward and backward moving cylinder 113. Since a pipe electrode holder is provided on the main shaft of the small hole electric discharge machine 2, the vertical cylinder 112 is operated to raise the indexed pipe electrode PE of the chuck pallet 105, and the pipe electrode holder of the main shaft 111 is moved. Insert into 2H. If the pipe electrode PE is inserted into the pipe electrode holder 2H, the pipe electrode PE is automatically held in the pipe electrode holder 2H. After inserting and fixing the pipe electrode PE to the pipe electrode holder 2H, the vertical cylinder 112 is operated to lower the pallet 105 for chuck, and then the pallet 105 for chuck is operated by the cylinder 113 for forward and backward movement to change the position of the pipe electrode exchanging device 2C. Retract to the standby position.

When the pipe electrode PE is used to machine a start hole for the workpiece W and the pipe electrode PE is consumed, when the consumed pipe electrode PE is removed from the main shaft 111 of the small hole electric discharge machine 2, a chuck pallet is used. The presence of the pipe electrode PE in the support hole 103 of 105 is confirmed by the photoelectric switch 115 as a means for confirming the presence or absence, and the support hole 103 is moved to the center of the main shaft 111 so that the center of the support hole 103 and the center of the main shaft 111 are Are received, and the pipe electrode PE consumed in the support hole 103 is received. At this time,
The pipe electrode PE remaining in the electrode holder PEH is passed through the cutout groove 104 of the support hole 103, and the support hole 103 is positioned below the pipe electrode PE. Next, the holding state of the electrode holder PEH of the spindle 111 is released, and the electrode holder PEH is dropped into the support hole 103. Next, the chuck pallet 105 of the pipe electrode exchanging device 2C is retracted to the standby position. In the small-hole electric discharge machine 2, the above-mentioned pipe electrode exchange operation is automatically repeated, and a large number of pipe electrodes PE loaded on the pallet for chuck 105 are exchanged for consumable pipe electrodes PE and are used sequentially. The pipe electrode PE in the electric discharge machine 2 is always replaced with a new one, and the small hole electric discharge machining can be automatically and continuously performed on the workpiece W.

The mechanism for automatically attaching and detaching the pipe electrode holder and the pipe electrode PE in the small hole electric discharge machine 2 can use a conventional pipe electrode exchange mechanism. It is preferable to use a pipe electrode holding device. Since the pipe electrode holding device is described in detail in Japanese Utility Model Laid-Open No. 1-143321,
Here, the description is omitted.

Next, in the FMS in this processing machine group,
Refer to FIGS. 46 to 52 for the intermediate transfer device 7 provided for each of the processing machines 1, 2, and 3 in order to perform the transfer operation of the pallet P between the stackers and the stacker crane 6. I will explain. 46 is a front view showing the entire intermediate transfer device, FIG. 47 is a side view of FIG. 46, FIG. 48 is a front view of the upper portion of the intermediate transfer device, FIG. 49 is a plan view of FIG. No.
50 is a side view of FIG. 48, FIG. 51 is a front view of a lower portion of the intermediate transfer device, and FIG. 52 is a plan view of FIG.

The intermediate transfer device 7 mainly includes a carriage 163 with rollers 162 capable of reciprocating on a slide rail 161 laid on a base 160, a lifter 100 provided on a frame 164 of the carriage 163, and a push-in / draw-out arm 101 provided on the lifter 100.
Having. At the upper end of the frame 164 of the carriage 163, a locking pin 168 that engages with the concave portion 32 formed in the pallet P at the front end is provided.
A pallet seat 168S on which the lower surface of the pallet P sits is provided on the rear end side.

The base 160 includes a cylinder 159 serving as a driving device of a cart 163 fixed to the base 160, a piston rod 172 reciprocating in the cylinder 159, a cart 163 with rollers fixed to the piston rod 172, and the cart 163 Slide rail 161 laid on base 160 to run by operation
Is provided. The slide rail 161 extends in a horizontal direction perpendicular to the traveling path 5 of the stacker crane 6, that is, the traveling direction.

The carriage 163 includes a carriage frame 164 reciprocating on the base 160, a receiving member 173 of the pallet P formed on the upper surface of the carriage frame 164, and a locking pin 168 protruding from the upper surface of the receiving member 173.
And a lifter 10 mounted on the frame and capable of moving up and down
Has zero. The two receiving members 173 are arranged in parallel with the slide rail 161 in an upward direction. Each receiving member 17
The upper surface of 3 is finished, and the surface formed by each receiving member 173 is configured to be at the same level, and is configured to be parallel to the moving surface formed by the slide rail 161. .

The lifter 100 has a cylinder 166 fixed to the frame 164, a piston rod 169 reciprocating within the cylinder 166, a lifter frame 165 fixed to the piston rod 169, and a lifter frame 165 mounted on the lifter 100. The push-in / pull-out arm 101 is provided. Therefore,
The push-pull arm 101 provides a slide mechanism in which the fork-shaped arm 171 can reciprocate back and forth by a slide rail 180 with respect to the base of the lifter 100, that is, the lifter frame 165 by the operation of the cylinder 166.

The push-out arm 101 of the lifter 100 includes a cylinder 167 fixed to a lifter frame 165, a piston rod 172 reciprocating in the cylinder 167, and the piston rod 1
The tip of the fork-shaped arm 171 of the push-in / draw-out arm 101 having a fork-shaped arm 171 fixed to 72, that is, a processing machine
An operating pin 170 that engages with the concave portion 33 of the pallet P is formed on both sides at the end portions on the 1, 2, and 3 sides.

The intermediate transfer device 7 is configured as described above, and operates as follows. In the intermediate transfer device 7, the carriage 16
The operation of the reciprocating movement on the slide rail 161 of the third cylinder 15
9, the up and down movement of the lifter 100 is performed by the cylinder 166 and the push-pull arm 101 in the front-rear direction by each drive unit of the cylinder 167, but each drive is interlocked. is there. First, the cylinder 159 is operated to move the truck 163 to the stacker crane 6 side, that is, the traveling passage 5.
Move to the side. The stacker crane 6 on which the predetermined pallet P is mounted stops on the side facing the intermediate transfer device 7. By the operation of the fork device 50 of the stacker crane 6, the tip fork 60 of the fork device 50 extends onto the intermediate transfer device 7, and the pallet P mounted on the tip fork 60 is moved to the upper end of the frame 164 of the bogie 163 in the intermediate transfer device 7. The pallet P is placed so that the recess 32 of the pallet P is engaged with the locking pin 168 provided in the portion.

Next, the cylinder 166 of the lifter 100 of the intermediate transfer device 7 operates, the lifter frame 165 rises, and the operating pin 17 formed on the push-in / draw-out arm 101 provided on the lifter 100.
0 engages with the concave portion 33 provided in the pallet P. Further, when the lifter 100 is raised, the locking pin 170 provided at the upper end of the frame 164 is detached from the concave portion 32 of the pallet P. Therefore, the pallet P is placed on the push-in / draw-out arm 101 with the operating pin 170 and the concave portion 33 engaged with each other.
In this state, the cylinder 167 operates, and the push-in / draw-out arm 101 moves forward to the processing machines 1, 2, and 3. As the push-in / draw-out arm 101 advances, the pallet P is carried into the pallet support member on the processing table 75 of the processing machines 1, 2, and 3. The lifter 100 is slightly lowered by the operation of the cylinder 166, and the operating pin 168 provided on the push-in / pull-out arm 101 is separated from the concave portion 33 of the pallet P.
At this point, the cylinder 167 is operated to retract the push-in / draw-out arm 101 toward the intermediate transfer device 7 and to retract. The bogie 163 in the intermediate transfer device 7 is a work W
Are waited on the machining machines 1, 2, and 3 until the electric discharge machining is completed.

Next, when the electric discharge machining for the workpiece W in the machining machines 1, 2, 3 is completed, a signal indicating the completion of the machining from the controller is received, and the slide cover 80, which is the opening / closing door of the EDM, and the opening / closing door 80D are provided.
When the cylinder 167 of the push-in / draw-out arm 101 is completely
Operates, and the push-in / draw-out arm 101 moves forward to the processing machines 1, 2, and 3. When the push-in / pull-out arm 101 is inserted below the pallet P, the cylinder 166 of the lifter 100 operates and the lifter 10 is lifted.
The push-in / draw-out arm 101 mounted on 0 is raised. The operating pin 170 of the push-in / pull-out arm 101 is engaged with the concave portion 33 of the pallet P, and the pallet P is mounted on the push-in / pull-out arm 101. Here, the cylinder 167 is operated, and the push-in / draw-out arm 101 is retracted toward the intermediate transfer device 7 and retreats. When the push-in / pull-out arm 101 reaches a predetermined position on the bogie frame 164 of the intermediate transfer device 7, the cylinder 166 operates to lower the lifter 100. When the lifter 100 is lowered, the push-in / pull-out arm 101 is lowered, the pallet P mounted on the push-in / pull-out arm 101 is lowered, and the locking pin 168 provided on the bogie frame 164 is engaged with the concave portion 32 of the pallet P. The operating pin 170 of the push-in / pull-out arm 101 comes off from the concave portion 33 of the pallet P while being placed on the carriage frame 164. The push-in / pull-out arm 101 further descends and stops at a predetermined lower position of the bogie frame 164.

Further, the cylinder 159 is operated, and the carriage 163 moves on the rail 161 toward the stacker crane 6. The fork device 50 of the stacker crane 6 operates to extend the tip fork 60, and the tip fork 60 is located below the pallet P. When the tip fork 60 rises slightly, the tip fork 60
Lifts the pallet P, the engaging pin 67A provided on the tip fork 60 engages with the concave portion 31 of the pallet P, and the lower surface of the pallet P is placed on the support pin 67B. Is released.
The fork mounting 50 is operated, and the tip fork 60 is retracted to move the pallet P onto the stacker crane 6.

Furthermore, the FMS in this group of processing machines is configured as described above, and the fluid circuit that operates each cylinder in the FMS is configured as follows, for example. An example of each cylinder of the wire electric discharge machine 1 and the intermediate transfer device 7 will be described. On the wire electric discharge machine 1 side, liquid from a fluid pressure supply source through a pump is supplied to a fluid pressure adjusting device, a fluid switching valve, and the like. Through each cylinder 78C, 8
Fluid pressure is supplied to 6,88,92 (the cylinder 92 of the slide cover 80 may be an air cylinder). On the side of the intermediate transfer device 7, fluid from a fluid pressure supply source such as a pump is supplied to each cylinder 159, 166, 167 through a fluid pressure adjusting device, a fluid switching valve, and the like. Fluid is supplied to each of the cylinders, and the pistons in each of the cylinders reciprocate, whereby the operating state of each of the cylinders is detected by each of the sensors. The detection signal detected by each sensor is input to a controller, and the controller issues a command in response to each detection signal in accordance with an operation process which is input in advance as a sequence, and the wire electric discharge machine 1 and the intermediate transfer device 7 Is operated to carry the pallet 10 in and out of the wire electric discharge machine 1 and to carry it in and out of the intermediate transfer device 7.

In the above, an example of the fluid circuit of the wire electric discharge machine 1 and the intermediate transfer device 7 has been described, but the stacker crane 6, the small hole electric discharge machine 2, the die sink electric discharge machine 3, the rust prevention treatment device 10, and the fluid spraying The same fluid circuit can be applied to the device 12.

In the FMS in this group of processing machines, a reference surface cleaning device for cleaning the reference surface of the reference member of each processing table and the reference surface of the pallet P can of course be provided. When the reference surface cleaning device is provided, the reference surface of each of the processing tables for setting the pallet P and the reference surface of the pallet P can be cleaned every pallet setting or every initial setting period, so that the pallet P is always accurately and reliably. It can be set on each of the processing tables, and the processing accuracy for the workpiece can be improved.

〔The invention's effect〕

Since the machining tank apparatus of the die sinking electric discharge machine according to the present invention is configured as described above, the die sinking electric discharge machine performs electric discharge machining in a machining fluid, but the machining fluid is extended to the height of the opening / closing door. And the loading / unloading port of the pallet does not need to be much higher than the reference height of the machining table. Therefore, it is necessary to increase the lift amount of the lifting device of the machining table provided in the die sinking electric discharge machine. And the processing table itself can be made compact.

In particular, a pallet in which a workpiece is set in advance can be loaded and unloaded in response to the open state of the door, and after the pallet is set in the worktable, a die-sinking electric discharge machining in response to the closed state of the door. The machine can be operated, the die-sinking EDM can be operated accurately and automatically by an unmanned person, and the occurrence of a malfunction can be prevented.

Further, the processing tank is provided along the wall to support the vertical movement of the opening and closing door, and an actuator attached to the support and moving the opening and closing door up and down to open and close the pallet loading / unloading port. The pillars are arranged on both sides of the pallet carry-in / out port, and each pillar has a guide groove for receiving a guide roller attached to the opening / closing door. It can be done smoothly. In addition, by appropriately forming the shape of the guide groove, the vertical movement area of the opening / closing door can be reduced without leaving the opening / closing door so much from the wall body, and the space can be advantageously configured.

The actuator is a cylinder fixed to the support,
Since the piston has a piston that can reciprocate in the cylinder and the piston rod that is fixed to the door and reciprocates in response to the reciprocation of the piston, the operation of the door can be easily controlled by the controller. .

In addition, since the column is provided with an actuator that presses the door against the wall of the processing tank, if the actuator is operated in response to the closing of the door, the door will be closed. The pallet loading / unloading port can be completely closed.

Further, a controller is provided for loading / unloading the pallet to / from the pallet support member in response to the open / close state of the opening / closing door of the processing tank and operating in response to the closed state of the open / close door. The operation of each device can be performed accurately and reliably according to a predetermined operation process in the input operation and the machining process, and in a state of being extremely safe. Therefore, for example, when performing electrical discharge machining on the workpiece, loading, setting, and loading the workpiece into the processing machine.
A series of working steps of processing and unloading can be smoothly achieved.

In addition, the machining tank apparatus of this die sinking electric discharge machine is equipped with a large number of various types of machining machines, a rack having a plurality of shelves for storing pallets, a processing station for performing rust-proofing and the like on a workpiece, and a discharge of pallets. A pallet on which a workpiece is set is transferred to and from each of the processing machines by a pallet transfer device that reciprocates between the input stations, and the workpiece on the pallet is automatically discharged by each of the processing machines. Applied to the flexible manufacturing system, which is a flexible manufacturing system. By using a pallet transfer device, a pallet in which a work is set in advance is set on a worktable, and various types of work on the work can be fully automated. Various types of processing can be continuously performed on the workpiece by unmanned operation.

That is, in response to the open state of the door, the pallet in which the workpiece is set in advance is carried in and out, and after setting the pallet on the worktable, the die sinking machining is performed in response to the closed state of the door. The pallet can be set at a predetermined position on the worktable by aligning the reference means provided on the pallet with each of the reference means. Can be reciprocated up and down from the loading / unloading part to the machining part line. The EDM machine performs electric discharge machining in the machining fluid, but when the machining fluid is filled in the machining tank, The workpiece fixed to the pallet can be lowered to a certain part. In addition, if the workpiece is set at a predetermined position on the pallet provided with the reference means, the pallet can be pressed simply by operating the elevating device to place the pallet on the worktable. When the device and the clamping device are operated, each reference means of the pallet is aligned with each reference means of the processing table, and the pallet is positioned and fixed at a predetermined position, so that the pallet is positioned at a predetermined position on the processing table. The workpiece can be set accurately, quickly, and automatically by an unattended person, and the setting of the workpiece on the processing table can be performed accurately and reliably, so that the reliability of the setting accuracy can be improved. Moreover, after processing the workpiece, the pallet on which the workpiece is set is automatically carried out from the worktable to the stacker crane side, and the above-described steps are repeated to carry the pallet into the worktable, set,
Each process of sequentially processing the workpiece by repeating the unloading can be performed automatically and unattended continuously.

[Brief description of the drawings]

FIG. 1 is a schematic plan view showing one embodiment of an FMS in a group of processing machines which can use the processing tank apparatus of the die sinking electric discharge machine according to the present invention, FIG. 2 is a schematic front view of FIG. 1, and FIG. FMS that can use the machining tank device of the die sinking electric discharge machine according to the present invention
FIG. 4 is a schematic plan view showing another embodiment of the pallet, FIG. 4 is a plan view showing an example of a pallet that can be commonly used for FMS, FIG. 5 is a sectional view taken along line VV in FIG. 4, and FIG. Line VI in Fig. 4
7 is a plan view of the processing tank apparatus, FIG. 8 is a plan view of FIG. 7, FIG. 9 is a cross-sectional view showing a part of the wall of the processing tank of FIG. FIG. 10 is an explanatory view showing a part of the mechanism of the opening / closing door of the machining tank shown in FIG. 7, FIG. 11 is a plan view showing a machining table of a die sinking electric discharge machine incorporating the machining tank apparatus according to the present invention, and FIG. Fig. 11 is a front view of Fig. 11, Fig. 13 is a side view of a machining table part of a die-sinking electric discharge machine, Fig. 14 is a plan view showing an example of a setup indexing device usable for FMS, and Fig. FIG. 14 is a front view, FIG. 16 is a front end side view of FIG. 14, FIG. 17 is a schematic front view showing the entire stacker crane, and FIG.
17 is a side view, FIG. 19 is a perspective view schematically showing a stacker crane, FIG. 20 is a perspective view schematically showing a fork base mounted on the stacker crane, and FIG. 21 is a front view showing a lower portion of the stacker crane. , FIG. 22 is a front view showing the upper part of the stacker crane, FIG. 23 is a cross-sectional view showing the transmission mechanism of the fork device of the stacker crane, FIG. 24 is a front view of the fork device, and FIG. FIG. 26 is an explanatory view showing a state in which the fork device is contracted, FIG. 27 is a front view of a rust prevention treatment device usable for FMS,
FIG. 28 is a side view of FIG. 27, FIG. 29 is a side view of a working table portion of the wire electric discharge machine, FIG. 30 is a front view of FIG.
The figure is a plan view of the worktable part of the wire electric discharge machine, FIG. 32 is a partial plan view of FIG. 31, FIG. 33 is another side view of the worktable part of the wire electric discharge machine, and FIG. 35 is a perspective view of the processing tank cover device, and FIG.
Fig. 37 is a sectional view, Fig. 37 is a plan view of the processing tank cover device, and Fig. 38
Fig. 37 is a side view of Fig. 37, Fig. 39 is a plan view showing a small hole electric discharge machine and a pipe electrode changing device, Fig. 40 is a side view of the pipe electrode changing device, and Fig. 41 is a line IIIX- IIIX, FIG. 42 is a plan view of the index table, FIG. 43 is a cross-sectional view taken along line BB of FIG. 42, and FIG. 44 is an example of a workpiece removing device attached to a wire electric discharge machine. 45 is a schematic front view, FIG. 45 is a side view of FIG. 44, FIG. 46 is a front view of the entire intermediate transfer device, FIG. 47 is a side view of FIG. 46, and FIG. Fig. 49 is a plan view of Fig. 48, Fig. 50 is a side view of Fig. 48, Fig. 51 is a front view of the lower part of the intermediate transfer device, Fig. 52 is a plan view of Fig. 51 And FIG. 53 is a block diagram showing an example from the planning schedule to the preparation of the setup schedule in this FMS. FIG. 54 is an example of the setup work in this FMS. Block diagram showing a, FIG. 55 is a block diagram showing an example of processing of the small hole electric discharge machine in the FMS, FIG. 56 is a block diagram showing an example of the machining of a wire electric discharge machine in this FMS,
And FIG. 57 is a block diagram showing an example of machining of a die sinking electric discharge machine in this FMS. 1 ... wire electric discharge machine, 2 ... small hole electric discharge machine, 3 ... die sinking electric discharge machine, 4 ... rack, 5 ... traveling passage, 6 ... stacker crane, 7 ... intermediate transfer device, 8… Pallet body, 9… Set-up indexing device, 10… Rust prevention treatment device, 12 ……
Fluid spraying device, 19 ... shelf, 20 ... opening, 24 ... cutout hole, 29, 30 ... reference metal fittings, 28, 29K, 30K, 81S, 84S, 87S ...
Reference surface, 31, 32, 33 ... recess (locking means), 74 ... jig base (table), 75 ... processing table, 76K ... processing tank, 77, 77A ...
… Pallet pressing device, 78 …… Clamp device, 79A …… Working tank device, 80A …… Notch opening (pallet loading / unloading port), 80C
…… Cylinder (actuator), 80D …… Opening door, 80P…
… Piston rod, 81 …… Reference fitting (reference means), 82 ……
Connecting bar, 84, 87 …… Positioning stopper (reference means), 85
…… Clamp, 86,121 …… Cylinder (actuator),
92A …… Cylinder, 95P …… Piston rod, 117 …… Guide roller, 118 …… Guide groove, 127 …… Post, P… Pallet, W… Workpiece, WE… Wire electrode, PE… Pipe electrode , R
E ... Die engraving electrode.

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Junji Tanaka 1 at 868 Kubo, Oga, Koga-cho, Kasuya-gun, Fukuoka Prefecture Inside (72) Inventor Yuji Fukusaki 868, Oku-kubo, Koga-cho, Kasuya-gun, Fukuoka 1 Within Seibu Electric Co., Ltd. (72) Takashi Mitsuyasu, inventor, 868, Kubo, Oga, Koga-cho, Kasuya-gun, Fukuoka Prefecture Inside Tatsuji Komatsu, Inventor Tatsushi Komatsu, 868, 868, Kubo, Koga-cho, Kasuya-gun, Fukuoka Inside Seibu Electric Co., Ltd. (72) Inventor Kiyotaka Miyagi 1 at 868 Kubo, Oga, Koga-cho, Kasuya-gun, Fukuoka Prefecture Inside of 72 Seibu Electric Co., Ltd.Yonori Noda 1 at 868 Kubo, Oga-ku, Koga-cho, Kasuya-gun, Fukuoka 1 West Inside Electric Co., Ltd. (72) Inventor Tsutomu Watanabe 868 Kubo, Oga, Koga-cho, Kasuya-gun, Fukuoka Prefecture 1 Inside Seibu Electric Co., Ltd. 297064 (JP, A) JP Akira 64-11723 (JP, A) JP Akira 59-175923 (JP, A) JitsuHiraku Akira 61-148254 (JP, U) (58) investigated the field (Int.Cl. ⁶ , DB name) B23H 1/00, 7/02

Claims (5)

(57) [Claims] 1. A processing tank comprising a liquid-tight wall disposed on a table on which a processing table is mounted and having an upper portion formed in an open structure, and a processing machine in accordance with an open state of a pallet loading / unloading port formed in the processing tank. An opening / closing door for opening / closing the pallet loading / unloading port for loading / unloading a preset pallet, a column erected along the wall of the processing tank to guide the opening / closing door up and down, and attached to the column. A first actuator for opening and closing the pallet loading / unloading door by moving the opening / closing door up and down, and the support post is provided on the wall of the processing tank to close the pallet loading / unloading door in a closed state. A machining tank device for a die-sinking electric discharge machine comprising a second actuator for pressing the door. 2. The first actuator comprises a cylinder fixed to the support, a piston reciprocable in the cylinder, and a piston rod fixed to the opening / closing door and reciprocating in response to the reciprocation of the piston. The machining tank device of the die sinking electric discharge machine according to claim 1, comprising: 3. A pallet on which a workpiece is set is controlled to be able to be loaded and unloaded through the pallet loading / unloading port in response to a detection signal of the open state of the door, and in response to a detection signal of a closed state of the door. The machining tank device of the die sinking electric discharge machine according to claim 1, further comprising a controller operably controlled. 4. The post according to claim 1, wherein the posts are arranged on both sides of the pallet carry-in / out port, and each of the posts is formed with a guide groove for receiving a guide roller attached to the door. Drilling machine for EDM machine. 5. A pallet transporter that reciprocates between various types of processing machines, a rack having a plurality of shelves for storing pallets, a processing station for performing a process such as rust prevention on a workpiece, and a pallet loading / unloading station. The present invention was applied to a flexible manufacturing system in which a pallet in which a workpiece was set by an apparatus was delivered to each of the processing machines while maintaining the positioning state, and the workpiece on the pallet was automatically subjected to electrical discharge machining by each of the processing machines. The machining tank device of the die sinking electric discharge machine according to claim 1, comprising: