JP2951732B2 - Original vacuum suction mounting equipment for printing equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a printing apparatus for sticking or projecting an original onto a photosensitive substrate to be exposed and printing the image, and more particularly to an apparatus for vacuum-sucking an original on which a pattern to be printed is drawn.

[0002]

2. Description of the Related Art In general, a vacuum contact printing method is used as one method for copying a pattern on a transparent original plate made of a film, a glass plate, or the like onto a photosensitive substrate with high quality (for example, Japanese Patent Application Laid-Open No. H11-163, 1988). No. 58-136026).

FIG. 5 shows an example of a contact printing apparatus utilizing such a vacuum contact printing method. The contact printing apparatus includes a pair of frames 3 and 3 in which the originals 2 and 2 are vacuum-adsorbed and fixed by vacuum suction grooves 9 to dispose the originals 2 and 2 made of glass or the like on both sides of the photosensitive substrate 1. Sealing packings 4 and 4 attached to opposing surfaces of the frames 3 and 3; a vacuum pump (not shown) connected to an exhaust port 5 formed in one of the frames 3;
And a light source 7 arranged on both sides of the substrate 1.

[0004] The printing operation of this contact printing apparatus is performed as follows. That is, first, the photosensitive substrate 1 is
After positioning at a predetermined position between the two, the pair of frames 3 and 3 are moved in a direction approaching the photosensitive substrate 1, and the photosensitive substrate 1 is sandwiched between the original plates 2 and 2 on both sides, and the sealing packings 4 and 4 are closed. To seal the gaps between the frames 3 and 3 so that the originals 2 and 2
The packing 4 forms a sealed chamber 8. Next, the inside of the closed chamber 8 is evacuated by suctioning the internal air from the exhaust port 5 communicating with the closed chamber 8 with a vacuum pump. As a result, the originals 2 and 2 on both sides are pressed by the atmosphere and adhere to the photosensitive substrate 1. Thereafter, by turning on the light sources 7, the patterns of the originals 2, 2 are printed on the photosensitive substrate 1.

[0005] In such a contact printing apparatus, as a method of attaching the original 2 to the frame 3, as shown in FIG.
A vacuum suction groove 9 is provided all around the frame 3 for holding the original 2,
It is a general practice to evacuate the groove 9 through a pipe 10 communicating with the base 2 to vacuum-adsorb the periphery of the original 2.
In this case, as shown in the AA cross section in the figure, packing 11 is often arranged on both sides of the vacuum suction groove 9 in order to further promote the vacuum suction action, but this packing 11 is not always necessary. Absent.

Although the above is the method of attaching the original in the close contact printing apparatus, the same method of attaching the original is adopted in the projection printing apparatus.

[0007]

However, in the original mounting method as shown in FIG. 6, the vacuum suction groove 9 of the frame 3 is provided over the entire outer periphery of the original 2.
If the original plate is not necessarily flat and warped, air leaks into the vacuum suction groove 9 during suction and exhaust at the non-flat portion, and as a result, the suction capability of the entire vacuum suction groove 9 is reduced. Such a master 2 has a problem that it is difficult to adsorb to the frame 3.

[0008] Such a problem that it is difficult to be attracted is the same when the packing 11 is provided around the groove 9. If the elasticity of the packing 11 itself is not considerably reduced, it will not be easily attracted. However, the packing with low elasticity is difficult to restore, and after several uses, the packing remains crushed and becomes unusable. Conversely, the use of highly resilient packing causes the same problems as when there is no packing.

[0009]

SUMMARY OF THE INVENTION The present invention has been made in view of such a problem, and an object of the present invention is to divide a groove for adsorbing an original plate and give each groove a vacuum suction function. Accordingly, an object of the present invention is to provide an original vacuum suction mounting apparatus in a printing apparatus in which an original can be adsorbed even if the entire periphery is not sealed if any groove is sealed by the original.

[0010]

According to the present invention, there is provided a printing apparatus for printing an original on which a pattern is drawn on the surface of a base material coated with a photosensitive material. An original vacuum suction mounting apparatus, wherein a plurality of suction grooves are provided at intervals around a frame on which the original is mounted, and each suction groove individually performs a vacuum suction function. It is.

In this case, a packing having a plurality of holes is arranged around the frame for mounting the original plate at intervals, or a plurality of packings having holes at the center are arranged at intervals. It is desirable to form the above-mentioned suction groove.

[0012]

According to the present invention, a plurality of suction grooves are provided at intervals around the frame on which the original is mounted, and each suction groove is configured to individually perform a vacuum suction function.
Even if the original plate to be attached is not flat and warped, even if it is not possible to suction by the suction groove of that part in the uneven part, it can be vacuum suctioned by the suction groove of that part in other parts, so In comparison, the original plate adsorption performance is further improved.

[0013]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing an embodiment of an original plate vacuum suction mounting apparatus in a printing apparatus according to the present invention. FIG. 1 is a perspective view of an original plate 2 mounting frame 3 provided with an original plate vacuum suction mounting device according to one embodiment of the present invention, and a sealing packing 4 for forming a sealed chamber 8 (see FIG. 5) all around its outermost periphery. And a packing 12 for forming a groove for adsorbing the original 2 is provided all around the inside thereof. As shown in the figure, the packing 12 has divided suction grooves 13.
Are provided at regular intervals over the entire circumference of the frame 3. On the other hand, at the position corresponding to each suction groove 13 of the frame 3, the exhaust hole 1 is provided.
2, each exhaust hole 14 has a relatively small diameter exhaust branch pipe 15 branched from a relatively large diameter pipe 16 for evacuation, as is apparent from the partially enlarged view of FIG.
Are connected respectively. Also, as shown in FIG. 3, which is a cross-sectional view taken along line AA in FIG.
It is adhered to the plane of the frame 3 (a), or a groove is provided in the plane of the frame 3 and a part thereof is buried in the groove (b) and fixed. In the case of FIG. 3A, the packing 12 is sucked and the exhaust holes 1 are removed.
Stopper 17 to prevent suction
Need to be provided at the bottom of the groove 13, but in the case of FIG. 3B, the periphery of the groove of the frame 3 becomes a stopper when the original 2 is sucked, so it is not always necessary to provide such a stopper.

When the original vacuum suction mechanism is constructed as described above, since the diameter of the exhaust branch pipe 15 connected to the divided vacuum suction grooves 13 is smaller than the diameter of the pipe 16, some of the grooves 13
Even if the seal is not made by the adsorption of the master 2,
Since the degree of vacuum of 6 is hardly affected, each groove 13 independently performs a vacuum suction operation. Therefore, when the original 2 is not flat and has a warp or the like, even if the original 2 cannot be sucked in a non-flat portion, it is vacuum-adsorbed by the groove 13 in the other portion. Improve further.

When a shadow mask is to be printed, for example, the length a of the groove 13 is desirably 50 to 100 mm, the gap b between the grooves 13 is desirably about 10 mm.
The thickness of 2 is desirably 3-4 mm (in the case of flat packing) at neoprene (chloroprene) rubber and a hardness of 65 degrees in consideration of durability.

The divided suction grooves 13 are not formed by one packing 12 as shown in FIG. 1, but as shown in a plan view in FIG. 4, a plurality of elliptical independent packings 12 'are formed. Can also be formed. Even if the packings 12 and 12 'are omitted, a similar suction action can be performed by forming a shallow groove around the exhaust hole 14 of the frame 3.

Although the original plate vacuum suction mounting apparatus of the present invention has been described with reference to the embodiments, the present invention is not limited to these embodiments, and various modifications are possible. In addition, the original plate vacuum suction mounting device of the present invention is not limited to a contact printing device,
The present invention can also be applied to an original mounting device of a projection printing device.

[0018]

As described above, according to the original plate vacuum suction mounting device in the printing apparatus of the present invention, a plurality of suction grooves are provided at intervals around the frame on which the original plate is mounted, and each suction groove is formed. Since it is configured to individually perform the vacuum suction function, even if the original plate to be mounted is not flat and has warpage, even if the suction cannot be performed by the suction groove in that portion in the non-flat portion, it is not Since the vacuum suction can be performed by the suction groove of the portion, the original suction performance is further improved as compared with the conventional one.

[Brief description of the drawings]

FIG. 1 is a perspective view of an original mounting frame provided with an original vacuum suction mounting device according to one embodiment of the present invention.

FIG. 2 is a partially enlarged view of FIG.

FIG. 3 is a sectional view taken along line AA of FIG. 1;

FIG. 4 is a plan view showing a packing shape of another embodiment.

FIG. 5 is a schematic cross-sectional view of an example of a contact printing apparatus utilizing a vacuum contact printing method.

FIG. 6 is a perspective view and a partial cross-sectional view of an original mounting frame provided with a conventional original vacuum suction mounting device.

[Explanation of symbols]

 2 ... Original plate 3 ... Original mounting frame 4 ... Sealing packing 5 ... Exhaust port 12, 12 '... Packing 13 ... Suction groove 14 ... Exhaust hole 15 ... Thin exhaust branch pipe 16 ... Thick pipe 17 ... Stopper

Claims (3)

(57) [Claims] 1. A precursor vacuum suction attachment device printing apparatus for printing a pattern is drawn precursor on the surface of a substrate made of a photosensitive material is applied, between the periphery of the frame for mounting the original
An original vacuum suction mounting device in a printing apparatus, wherein a plurality of suction grooves are provided at intervals, and each suction groove individually performs a vacuum suction function. 2. An interval is provided around the frame on which the original is to be mounted.
2. An apparatus according to claim 1, wherein a packing having a plurality of holes is arranged, and said holes form said suction grooves. 3. An interval is provided around the frame on which the original is to be mounted.
2. The original plate vacuum suction mounting apparatus in a printing apparatus according to claim 1, wherein a plurality of packings each having a hole at a central portion thereof are arranged, and the suction grooves are formed by these holes.