JP2943793B1 - Magnetic field detecting device and magnetic field distribution measuring device - Google Patents

Abstract

An object of the present invention is to provide a magnetic field detection device which is small in size, has a high mounting density, improves resolution, and can detect directions of magnetic fields generated in different directions. A magnetic field detection device is provided with an X-axis probe, a Y-axis probe, and a Z-axis probe in a matrix on a laminated printed circuit board.
Is configured. The X-axis and Y-axis probes 2 and 3 have a pair of parallel antenna pieces formed by printed wiring with the axial direction substantially parallel to the substrate surface, and a pair of vertical antenna pieces formed by the blind via hole 4. The X-axis and Y-axis probes 2 and 3 have an annular shape whose surfaces are substantially perpendicular to the substrate surface and whose surfaces are substantially perpendicular to each other. The Z-axis probe 3 is an annular shape having two pairs of parallel antenna pieces formed of printed wiring lines whose axis directions are substantially parallel to the substrate surface and are orthogonal to each other, and which are substantially parallel to the substrate surface. A three-dimensional magnetic field distribution can be accurately measured with a small loop probe.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a magnetic field detecting device provided with a loop probe for detecting a magnetic field, and a magnetic field distribution measuring device provided with the magnetic field detecting device.

[0002]

2. Description of the Related Art Conventionally, as a magnetic field distribution measuring device, for example, a loop antenna formed by wires as shown in FIG. 19 is arranged in a matrix on a substrate as shown in FIG. XY generated from a printed circuit board of an electronic device using the configured magnetic field detection device
The magnetic field distribution on the plane was measured at a resolution of about 1 cm, and as shown in FIGS.
A configuration for specifying an electronic component such as the LSI 21 which is C is known.

On the other hand, as shown in FIG.
As described in Japanese Patent No. 7648, a probe electrode capable of locally applying an electric field or a magnetic field to a chip surface of an integrated circuit and having a variable position is moved on the chip surface of the integrated circuit to monitor a circuit current of the integrated circuit. Thus, a configuration for detecting a faulty circuit is known.

[0004]

By the way, the generation of noise on the printed circuit board is caused by a large amount of noise.
C is L such as CPU or ASIC that uses high-speed clock.
The SI 21 is often caused by ground noise caused by a loop of a through current flowing through the IC and the bypass capacitor.

However, a configuration for measuring the magnetic field distribution on the XY plane as shown in FIG. 18 and FIG. 19, in particular, forming a loop probe with a wire and arranging it in a matrix.
In the configuration of the antenna matrix 23 provided, since the resolution is low as shown in FIGS. 20 and 21, it is not possible to measure the detailed magnetic field distribution near the IC. Cannot be used for optimal power supply wiring design. Furthermore, the direction of the probe at the measurement position is a printed circuit board 2
Since there is only one direction parallel to the two planes, the direction of the magnetic field generated in the other direction cannot be detected. FIG.
In the configuration described in JP-A-61-27648, a failure can be analyzed by applying a magnetic field locally using a probe, but there is a problem that the distribution of the magnetic field cannot be measured.

The present invention has been made in view of the above points, and is small in size, has high mounting density, improves resolution, can detect the direction of a magnetic field, and can detect the direction of a magnetic field generated in a different direction. It is an object of the present invention to provide a magnetic field detection device and a magnetic field distribution measuring device capable of detection.

[0007]

According to a first aspect of the present invention, there is provided a magnetic field detecting apparatus provided with a laminated printed wiring board on which printed wirings are laminated and provided on the laminated printed wiring board. substantially has a substantially vertical pair of vertical antenna piece to parallel pair of parallel antenna strips and the plane of the multilayer printed wiring board, said pair of parallel antenna strips and the pair of vertical antenna element is connected Te An annular loop probe having a surface substantially perpendicular to the plane of the multilayer printed wiring board.

[0008] The magnetic field detecting device according to the second aspect is the first aspect.
In the magnetic field detection device described above, the loop probes are provided in a matrix on the laminated printed wiring board.

According to a third aspect of the present invention, there is provided a magnetic field detecting apparatus.
In the magnetic field detection device according to the second aspect, the loop probe has a plurality of pairs of parallel antenna pieces and vertical antenna pieces, and is formed in a multiple annular shape.

According to a fourth aspect of the present invention, there is provided a magnetic field detecting apparatus.
In the magnetic field detection device according to any one of to 3,
Provided multilayer printed circuit board, substantially parallel pair of parallel antenna strips and the plane of the multilayer printed circuit, and has a substantially vertical pair of vertical antenna piece to the plane of the multilayer printed wiring board, having substantially vertical plane relative to surface formed by said pair of parallel antenna strips and the pair of substantially vertical in and said loop probe with respect to the vertical antenna pieces connected respectively to the plane of the multilayer printed wiring board those provided with the second loop probes cyclic.

According to a fifth aspect of the present invention, there is provided a magnetic field detecting apparatus according to the fourth aspect.
In the magnetic field detection device described above, the second loop probe has a plurality of pairs of parallel antenna pieces and vertical antenna pieces, and is formed in a multiple annular shape.

According to a sixth aspect of the present invention, there is provided a magnetic field detecting apparatus according to the first aspect.
6. The magnetic field detection device according to any one of claims 1 to 5,
The stacked detection device has a blind via hole, and the vertical antenna piece is provided in the blind via hole.

According to a seventh aspect of the present invention, there is provided a magnetic field detecting apparatus according to the first aspect.
6. The magnetic field detection device according to any one of to 6, wherein
Two pairs of parallel antenna pieces that are provided on the laminated printed wiring board, are substantially parallel to the plane of the laminated printed wiring board, and are substantially perpendicular to each other, are connected to each other, and are substantially parallel to the plane of the laminated printed wiring board. And a third loop probe having a circular shape.

[0014] The magnetic field detecting device according to the eighth aspect is the seventh aspect of the present invention.
In the magnetic field detection device described above, the third loop probe is formed by connecting a plurality of pairs of parallel antenna pieces to each other to form a multiple ring.

According to a ninth aspect of the present invention, there is provided a magnetic field detecting apparatus according to the first aspect.
8. The magnetic field detection device according to any one of items 1 to 8,
The parallel antenna piece is formed by printed wiring.

According to a tenth aspect of the present invention, there is provided the magnetic field detecting device according to any one of the first to ninth aspects, wherein the laminated printed wiring board is provided with a shield layer for blocking a magnetic field.

According to an eleventh aspect of the present invention, there is provided a magnetic field distribution measuring device for selecting a magnetic field detecting device according to any one of the first to tenth aspects and a loop probe connected to the magnetic field detecting device for detecting and outputting a magnetic field. A selector and a receiver connected to the magnetic field detection device and receiving a voltage output from the loop probe, connected to the selector and the receiver, and controlling the receiver to measure a magnetic field strength of a specific frequency. And a control unit for outputting a predetermined signal.

[0018]

Next, the configuration of a magnetic field distribution measuring apparatus according to an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a perspective perspective view showing a configuration of a magnetic field detecting device according to an embodiment of the present invention. FIG. 2 is a plan perspective view of the same. FIG. 3 is a sectional view showing the configuration of the X-axis probe according to the first embodiment. FIG. 4 is a sectional view showing the configuration of the Y-axis probe according to the first embodiment. FIG. 5 is a cross-sectional view showing the configuration of the same Z-axis probe. FIG. 6 is a perspective plan view showing a loop matrix of the above. FIG. 7 is a block diagram showing a circuit configuration of the magnetic field distribution measuring device. FIG. 8 is a sectional view showing the vicinity of the above LSI. FIG. 9 is a plan view showing the configuration of the electronic device in which the bypass capacitor is appropriately arranged. FIG. 10 is a distribution diagram showing a magnetic field distribution as a result of the measurement. FIG. 11 is a plan view showing a configuration of a printed wiring board which is a device under test in which the bypass capacitor is not properly arranged. FIG. 12 is a distribution diagram showing a magnetic field distribution as a result of the measurement. FIG. 13 is a graph illustrating the vector sum of the magnetic field strengths. FIG. 14 is a distribution diagram showing the same current direction. FIG. 15 is a cross-sectional view showing a magnetic field generated on the printed wiring board to be measured. FIG.
FIG. 2 is a plan view showing a generated magnetic field in the vertical direction in the above.

The magnetic field distribution measuring apparatus shown in FIG. 7 is provided with an X-axis probe 2 as a loop probe, a Y-axis probe 1 as a second loop probe, and a Z-axis probe 3 as a third loop probe in a matrix. And a magnetic field detecting device 28 having a laminated printed circuit board constituting the probe matrix 14. A selector 15 for selecting any of the X-axis probe 2, the Y-axis probe 1, and the Z-axis probe 3 is connected to the probe matrix 14 of the magnetic field detection device 28, and outputs the selected but detected magnetic field as a voltage. . An RF amplifier 16 for amplifying the output voltage is connected to the probe matrix 14, and an RF receiver 17 to which the amplified voltage is input is connected to the RF amplifier 16.

Further, a computer 18 is connected to the selector 15 and the RF receiver 17. The computer 18 outputs a predetermined signal to the selector 15 to select an arbitrary loop probe, and outputs a predetermined signal to the RF receiver 17 to output a specific signal to the RF receiver 16 at a specific frequency. Is transmitted to the computer 18 as a digital signal.

Further, the computer 18 is connected to a CRT monitor 19 which is a display means for processing the magnetic field strength detected by the computer 18 and outputting and displaying a magnetic field strength distribution on a screen based on the data processing. I have.
Further, a printer 20 for printing out the magnetic field intensity distribution is connected to the computer 18.

Next, the configuration of the probe matrix of the magnetic field detecting device will be described with reference to the drawings.

As shown in FIGS. 3 to 5, the magnetic field detecting device 28 is a product formed by laminating eight printed wiring layers.
The printed circuit board P is provided . The first layer is an X-axis probe constituting layer A5 provided with a printed wiring constituting a part of the X-axis probe 2, and the second layer is a Y-axis probe 1
, A Y-axis probe forming layer A6 provided with a printed wiring constituting a part of the above, a third layer is a Z-axis probe forming layer 7 provided with a printed wiring forming a Z-axis probe 3, and a fourth layer is an X-axis probe. X-axis probe constituting layer B8 provided with a printed wiring constituting a part of 2;
Y9 probe configuration layer B9 provided with a printed wiring constituting a part of the above, shield layer 1 for shielding a magnetic field from a sixth layer
The 0th, 7th, and 8th layers are the wiring layers 11 and 12 provided with wiring patterns for wiring from the X-axis probe 2, the Y-axis probe 1, and the Z-axis probe 3 to the outside. Further, the probe matrix 14 is provided with a plurality of blind via holes 4 which are substantially perpendicular to the substrate surface of the probe matrix 14.

As shown in FIGS. 1 to 3, the X-axis probe 2 has an X-axis probe configuration layer A5 of the first layer and an X-axis probe configuration layer B8 of the fourth layer, and the probe matrix 14 has the axial direction. And a pair of parallel antenna pieces formed of printed wiring lines provided substantially in parallel with the substrate surface. Also, the X-axis probe 2
A blind via hole 4 penetrating from the first layer X-axis probe component layer A5 to the fourth layer X-axis probe component layer B8;
X-axis probe constituting layer A5 of the first layer to wiring layer 1 of the seventh layer
1 has a pair of vertical antenna pieces formed by wiring provided in a blind via hole 4 penetrating therethrough. The X-axis probe 2 is connected to the pair of parallel antenna pieces and the pair of vertical antenna pieces, respectively, and is formed in an annular shape having a surface substantially perpendicular to the substrate surface of the probe matrix 14. The X-axis probe 2 detects a magnetic field generated from an electronic device to be measured in a direction substantially parallel to the substrate surface of the probe matrix 14 and outputs the detected voltage as a voltage.

As shown in FIGS. 1, 2 and 4, the Y-axis probe 1 has a second Y-axis probe constituent layer A6.
In addition, the Y-axis probe constituting layer B9 of the fifth layer has a pair of parallel antenna pieces formed by printed wiring lines provided in a line substantially in parallel with the substrate surface of the probe matrix 14 in the axial direction. . Also, Y-axis probe 1
Are blind via holes 4 penetrating from the second layer Y-axis probe forming layer A6 to the fifth layer Y-axis probe forming layer B9.
And a pair of vertical antenna pieces formed by wiring provided in a blind via hole 4 penetrating from the second layer Y-axis probe constituting layer A6 to the eighth layer wiring layer 12, respectively. The Y-axis probe 1 is connected to the pair of parallel antenna pieces and the pair of vertical antenna pieces, respectively, and is a surface substantially perpendicular to the substrate surface of the probe matrix 14 and configured by the X-axis probe 2. It is formed in an annular shape having a surface substantially perpendicular to. The other paired with the vertical antenna piece formed by the wiring provided in the Y-axis probe 1 and the blind via hole 4 penetrating from the Y-layer probe constituting layer A5 of the second layer to the wiring layer 12 of the eighth layer. Is wired to the outside of the
It is formed by a blind via hole 4 penetrating from the X-axis probe constituting layer B8 of the layer to the wiring layer 11 of the seventh layer. The Y-axis probe 1 detects a magnetic field generated from an electronic device to be measured in a direction substantially parallel to the substrate surface of the probe matrix 14 and in a direction substantially perpendicular to the magnetic field detected by the X-axis probe 1. And output it as a voltage.

Further, as shown in FIGS. 1, 2 and 5, the Z-axis probe 3 has a third layer 7
Are connected to two pairs of parallel antenna pieces formed by printed wiring lines each having an axial direction substantially parallel to the substrate surface of the probe matrix 14 and substantially perpendicular to each other, respectively. It is formed in an annular shape having a surface substantially parallel to the surface and substantially perpendicular to the surface formed by the X-axis probe 2 and the Y-axis probe 1. The Z-axis probe 3
Are formed in the blind via holes 4 penetrating from the Z-axis probe constituting layer 7 of the third layer to the wiring layer 11 of the seventh layer. The Z-axis probe 3 detects a magnetic field generated from an electronic device to be measured in a direction substantially perpendicular to the substrate surface of the probe matrix 14 and outputs the detected voltage as a voltage.

Further, as shown in FIG. 6, the X-axis probe 2, Y-axis probe 1 and Z-axis probe 3 are provided in a matrix to form a probe matrix 14. Is formed.

Next, the operation of measuring the distribution of a magnetic field generated from an electronic device by the above-described magnetic field distribution measuring device will be described with reference to the drawings.

First, as shown in FIG.
8 is a printed wiring board 30 which is an electronic device in which electronic components to be measured are mounted on the probe matrix 14 of FIG.
Is placed. In this state, the probe matrix 14 selects any X-axis probe 2, Y-axis probe 1, and Z-axis probe 3 by the selector 15,
The detected magnetic field is output as a voltage. Then, the output voltage is amplified by the RF amplifier 16 and input to the RF receiver 17. After this, the RF receiver 17
Controlled by the computer 18, the magnetic field intensity at a specific frequency is measured and converted into a digital signal by the computer 18.
Transfer to Then, the computer 18 performs data processing on the detected magnetic field strength, and outputs an image on the screen of the CRT monitor 19 as a magnetic field strength distribution, or prints out the data with the printer 20.

Here, the direction of the magnetic field is measured by vector summing the magnetic field strength detected by the X-axis probe 2 and the magnetic field strength detected by the Y-axis probe 1. That is, as shown in FIG. 13, when the magnetic field strength in the X-axis direction at the measurement point is X and the magnetic field strength in the Y-axis direction is Y, the magnetic field strength C and the direction θ at the measurement point are as follows: C = (X ² + Y ²⁾ determined using the formula ^{1/2 θ = tan -1 (Y /} X).

Using this equation, the direction of the current is perpendicular to the direction of the magnetic field, and as shown in FIG. 14, the direction of the current caused by the noise when the noise voltage 29 is applied to the metal frame is used. Can be measured.

Here, when the decoupling capacitor of the LSI 24 is properly arranged, that is, when the bypass capacitor 26 is close to the power supply pin 25 and the ground pin 27 of the LSI 24 as shown in FIG. 9, as shown in FIG. In the magnetic field strength distribution, the region where the magnetic field is strong is small. On the other hand, the decoupling capacitor is not properly placed,
That is, when the bypass capacitor 26 is far from the power pin 25 and the ground pin 27 as shown in FIG.
As shown in FIG. 2, the magnetic field strength distribution is large in a region where the magnetic field is strong. As described above, the fact that there are many regions where the magnetic field is strong indicates that high-frequency current is flowing in a wide range.
Since it can be a major factor in the occurrence of MI, the occurrence of EMI can be easily determined in detail.

As shown in FIG. 15, the direction of the magnetic field generated in the vicinity of the printed wiring board 30 of the electronic device is such that the magnetic field in the direction perpendicular to the plane of the printed wiring board 30 at the edge of the printed wiring board 30 Tend to be stronger. Therefore, as shown in FIG.
Thus, the magnetic field in the direction perpendicular to the plane of the printed wiring board 30 is measured.

As described above, in the above-described embodiment, the pair of parallel antenna pieces whose axial directions are substantially parallel to the plane of the laminated printed wiring board on which the printed wiring is laminated are formed. To form a ring-shaped X-axis probe 2 having a surface substantially perpendicular to the plane of the laminated printed wiring board by connecting a pair of vertical antenna pieces whose axis directions are substantially perpendicular to each other. A small X-axis probe 2 can be formed with a simple configuration,
Resolution can be improved.

Further, since the loop probes are provided in a matrix on the laminated printed wiring board, the magnetic field distribution can be measured in detail, and the optimal arrangement of electronic components and power supply wiring design can be efficiently performed.

Further, a pair of parallel antenna pieces whose axial directions are substantially parallel to the plane of the laminated printed wiring board on which the printed wiring is formed, and a pair of parallel antennas whose axial directions are substantially perpendicular to the plane of the laminated printed wiring board To form a circular Y-axis probe 1 having a surface substantially perpendicular to the plane of the multilayer printed wiring board and substantially perpendicular to the surface formed by the X-axis probe 2. Did
The small and detailed magnetic field distribution can be easily measured with the X-axis probe 2.

Since the vertical antenna piece is formed by using the blind via hole 4, a small loop probe using printed wiring can be formed.

Further, two pairs of parallel antenna pieces which are substantially parallel to the plane of the multilayer printed wiring board and substantially perpendicular to each other are connected to each other, and an annular Z having a plane substantially parallel to the plane of the multilayer printed wiring board is connected. Since the axis probe 3 is configured, a three-dimensional magnetic field distribution can be measured by the X-axis probe 2 and the Y-axis probe 1.

Since the parallel antenna pieces of the X-axis probe 2, the Y-axis probe 1, and the Z-axis probe 3 are formed using printed wiring, a small-sized loop probe can be configured with a simple configuration.

Also, an X-axis probe 2 and a Y-axis probe 1 are used by utilizing printed wiring in each layer of the multilayer printed wiring board.
Since the Z-axis probe 3 is configured, a small-sized loop probe can be easily configured, and the magnetic field detecting device 28 having a high resolution can be easily formed with a simple configuration.

Further, a layer constituting each of the X-axis probe 2, the Y-axis probe 1 and the Z-axis probe 3 and a layer for wiring the respective X-axis probe 2, Y-axis probe 1 and Z-axis probe 3 to the outside. Since the shield layer is provided between the X-axis probe 2, the Y-axis probe 1, and the Z-axis probe 2, the electromagnetic field generated by the signal flowing through the wiring layers 11 and 12 detects the magnetic field.
The influence on the axis probe 3 can be prevented, and higher resolution can be obtained.

Since the magnetic field distribution measuring device is constituted by using the magnetic field detecting device 28, high resolution can be easily obtained and a small device can be obtained.

In the above-described embodiment, for example, as shown in FIG. 17, a plurality of turns may be formed in a multi-ring shape. By forming this multiple ring, the resolution can be further improved.

[0045]

According to the present invention, a pair of parallel antenna pieces whose axial directions are substantially parallel to the plane of a laminated printed wiring board on which printed wirings are formed are provided. Since a pair of substantially vertical antenna pieces are connected to each other to form an annular loop probe having a surface substantially perpendicular to the plane of the laminated printed wiring board, a small loop probe can be easily formed using printed wiring, for example. It can be formed with a simple configuration, and the resolution can be improved.

Further, since the loop probes are provided in the form of a matrix on the laminated printed wiring board, the magnetic field distribution can be measured in detail, and the optimum arrangement of electronic components and power supply wiring design can be efficiently performed.

Further, a pair of parallel antenna pieces whose axial direction is substantially parallel to the plane of the laminated printed wiring board on which the printed wiring is formed, and a pair of parallel antenna pieces whose axial direction is substantially perpendicular to the plane of the laminated printed wiring board To form a second annular loop probe having a surface substantially perpendicular to the plane of the multilayer printed wiring board and substantially perpendicular to the surface formed by the loop probe by connecting the vertical antenna pieces to the respective loop antennas. A small and detailed magnetic field distribution can be easily measured with a loop probe.

Since the vertical antenna piece is formed using a blind via hole, a small-sized loop probe using printed wiring can be simply and easily constructed.

Further, two pairs of parallel antenna pieces, which are substantially parallel to the plane of the multilayer printed wiring board and are substantially perpendicular to each other, are connected to each other, and have an annular shape having a surface substantially parallel to the plane of the multilayer printed wiring board. Since three loop probes are configured, a small, three-dimensional magnetic field distribution can be measured with high resolution.

Since the parallel antenna pieces of the loop probe are formed using printed wiring, a small-sized loop probe can be formed with a simple configuration.

Further, since the loop probe is constituted by using the printed wiring in each layer of the laminated printed wiring board,
A small loop probe can be easily configured, and a device with high resolution can be formed with a simple configuration.

Further, since the shield layer for shielding the magnetic field is provided on the laminated printed wiring board, it is possible to prevent an electromagnetic field or the like generated by a signal from affecting the loop probe for detecting the magnetic field, thereby obtaining higher resolution.

Since the magnetic field distribution measuring device is constituted by using a small and high-resolution magnetic field detecting device, high resolution can be easily obtained and a small device can be obtained.

[Brief reading of drawings]

FIG. 1 is a perspective perspective view showing a configuration of a magnetic field detection device according to an embodiment of the present invention.

FIG. 2 is a plan perspective view of the same.

FIG. 3 is a cross-sectional view showing a configuration of an X-axis probe according to the first embodiment.

FIG. 4 is a sectional view showing a configuration of a Y-axis probe according to the first embodiment.

FIG. 5 is a cross-sectional view showing a configuration of a Z-axis probe of the above.

FIG. 6 is a perspective plan view showing a loop matrix of the above.

FIG. 7 is a block diagram showing a circuit configuration of the magnetic field distribution measuring device.

FIG. 8 is a cross-sectional view of the vicinity of the above LSI.

FIG. 9 is a plan view showing a configuration of the electronic device in which the bypass capacitor is appropriately arranged.

FIG. 10 is a distribution diagram showing a magnetic field distribution obtained as a result of the measurement.

FIG. 11 is a plan view showing a configuration of a printed wiring board which is a device under test in which bypass capacitors are not properly arranged.

FIG. 12 is a distribution diagram showing a magnetic field distribution as a result of the measurement.

FIG. 13 is a graph illustrating the vector sum of the magnetic field strength.

FIG. 14 is a distribution diagram showing a current direction in the first embodiment.

FIG. 15 is a cross-sectional view showing a magnetic field generated by the printed wiring board to be measured.

FIG. 16 is a plan view showing a generated magnetic field in the vertical direction in the above.

FIG. 17 is a perspective view of a loop probe showing another embodiment of the present invention.

FIG. 18 is a plan view showing a magnetic field detection device of a conventional magnetic field distribution measuring device.

FIG. 19 is a side view showing the above loop antenna.

FIG. 20 is a perspective view showing a measurement state of a magnetic field distribution according to the third embodiment.

FIG. 21 is a distribution diagram showing measurement results of a magnetic field distribution according to the embodiment.

FIG. 22 is a block diagram showing another conventional magnetic field distribution measuring device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Y-axis probe 2 X-axis probe 3 Z-axis probe 4 Blind via hole 5 X-axis probe constituent layer A 6 Y-axis probe constituent layer A 7 Z-axis probe constituent layer 8 X-axis probe constituent layer B8 9 Y-axis probe constituent layer B 10 Shield layer 11,12 wiring layer 13 loop antenna 14 probe matrix 15 selector 16 RF amplifier 17 RF receiver 18 computer 19 CRT monitor 20 printer 21,24 LSI 22 circuit board 23 antenna matrix 25 power supply pin 26 bypass capacitor 27 ground pin 28 magnetic field detection Device 29 Noise voltage 30 Printed wiring board

Claims (11)

(57) [Claims] 1. A and multilayer printed circuit board printed wiring is laminated, is provided on the multilayer printed wiring board, the plane to be substantially parallel to a pair of parallel antenna strips and the laminated printed wiring of the multilayer printed circuit board has a substantially vertical pair of vertical antenna piece to the plane of the substrate,
A magnetic field detection device, comprising: an annular loop probe connected to the pair of parallel antenna pieces and the pair of vertical antenna pieces, respectively, and having a surface substantially perpendicular to a plane of the multilayer printed circuit board. 2. The magnetic field detecting device according to claim 1, wherein the loop probes are provided in a matrix on the laminated printed wiring board. 3. The magnetic field detecting device according to claim 1, wherein the loop probe has a plurality of pairs of parallel antenna pieces and vertical antenna pieces, and is formed in a multiple ring shape. 4. A laminated printed wiring board,
A pair of flat planes substantially parallel to the plane of the multilayer printed circuit board
Row antenna piece and the plane of the laminated printed wiring board
A pair of vertical antenna pieces that are substantially perpendicular to the
The parallel antenna piece and the pair of vertical antenna pieces are
Each of them is connected to the plane of the multilayer printed circuit board.
An annular loop probe having a surface substantially perpendicular to, provided in the laminated printed circuit board, substantially parallel pair of parallel antenna strips and the plane of the multilayer printed wiring board, and the plane of the multilayer printed wiring board has a substantially vertical pair of vertical antenna piece relative, substantially vertical in and said loop probe with respect to the plane of the multilayer printed wiring board wherein a pair of parallel antenna strips and the pair of vertical antenna element is connected magnetic field detecting device according to any one of claims 1 to 3, characterized by comprising a ring-shaped second loop probe having a surface substantially perpendicular relative to the plane formed by. 5. The magnetic field detection device according to claim 4, wherein the second loop probe has a plurality of pairs of parallel antenna pieces and vertical antenna pieces, and is formed in a multiple annular shape. 6. The magnetic field detection device according to claim 1, wherein the stacked detection device has a blind via hole, and a vertical antenna piece is provided in the blind via hole. 7. A pair of parallel antennas provided on the laminated printed wiring board and substantially parallel to the plane of the laminated printed wiring board and substantially perpendicular to each other are connected to the plane of the laminated printed wiring board. 7. The magnetic field detecting device according to claim 1, further comprising an annular third loop probe having substantially parallel surfaces. 8. The magnetic field detection device according to claim 7, wherein the third loop probe is formed by connecting a plurality of pairs of parallel antenna pieces to each other to form a multiple ring. 9. The magnetic field detecting device according to claim 1, wherein the parallel antenna pieces are formed by printed wiring. 10. The magnetic field detection device according to claim 1, wherein the multilayer printed wiring board includes a shield layer that blocks a magnetic field. 11. A magnetic field detecting device according to claim 1, a selector connected to the magnetic field detecting device for selecting a loop probe for detecting and outputting a magnetic field, and connected to the magnetic field detecting device. And a receiver to which a voltage output from the loop probe is input, and a control unit connected to the selector and the receiver, for controlling the receiver to measure a magnetic field strength of a specific frequency and output a predetermined signal. A magnetic field distribution measuring device comprising: