JP2939475B2 - Honing equipment - Google Patents

Honing equipment

Info

Publication number
JP2939475B2
JP2939475B2 JP6217332A JP21733294A JP2939475B2 JP 2939475 B2 JP2939475 B2 JP 2939475B2 JP 6217332 A JP6217332 A JP 6217332A JP 21733294 A JP21733294 A JP 21733294A JP 2939475 B2 JP2939475 B2 JP 2939475B2
Authority
JP
Japan
Prior art keywords
granular material
powder
vibration
honing
transport path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP6217332A
Other languages
Japanese (ja)
Other versions
JPH0871922A (en
Inventor
誠 橋ヶ谷
秀幸 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASAHI TEKUNO GURASU KK
Original Assignee
ASAHI TEKUNO GURASU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASAHI TEKUNO GURASU KK filed Critical ASAHI TEKUNO GURASU KK
Priority to JP6217332A priority Critical patent/JP2939475B2/en
Publication of JPH0871922A publication Critical patent/JPH0871922A/en
Application granted granted Critical
Publication of JP2939475B2 publication Critical patent/JP2939475B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明はホーニング装置(研磨材
噴射装置)に係り、さらに詳しくは、粉粒体(研磨材)
の強制搬送における詰まりなどの感知を可能としたホー
ニング装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a honing apparatus (abrasive spraying apparatus), and more particularly, to a granular material (abrasive).
The present invention relates to a honing device capable of detecting clogging or the like in forced conveyance of a sheet.

【0002】[0002]

【従来の技術】周知のように、たとえば金属製品の表面
に、梨地模様の加工を施す場合、ホーニング装置(もし
くは研磨材噴射装置)が使用されている。そして、この
種のホーニング装置としては、たとえば、実公平 3-334
24号公報などに開示されているように、サイクロン方式
のホーニング装置、あるいは自重沈降方式のホーニング
装置が知られている。
2. Description of the Related Art As is well known, a honing apparatus (or an abrasive spraying apparatus) is used, for example, when a matte pattern is formed on a surface of a metal product. As this type of honing device, for example,
As disclosed in, for example, Japanese Patent Publication No. 24, a cyclone type honing apparatus or a self-weight settling type honing apparatus is known.

【0003】図4は,ホーニング装置の構成例を断面的
に示したもので、1は粉粒体(研磨材)を収容する粉粒
体収容槽、2は前記粉粒体収容槽1内の粉粒体3を強制
搬送する粉粒体搬送路、4は前記粉粒体搬送路2を搬送
される粉粒体3を被加工面に強制射出する射出ノズル、
5は前記射出ノズルから射出された粉粒体3を前記粉粒
体収容槽1内へ移送回収する粉粒体回収手段である。
FIG. 4 is a cross-sectional view showing an example of the configuration of a honing apparatus, in which 1 is a powder container for accommodating powder (abrasive), and 2 is a powder container in the powder container 1. An injection nozzle 4 for forcibly injecting the granular material 3 conveyed through the granular material transport path 2 onto the surface to be processed;
Reference numeral 5 denotes a powder / particle recovery means for transferring and recovering the powder / particles 3 injected from the injection nozzle into the powder / particle storage tank 1.

【0004】そして、前記ホーニング装置は、適用範囲
・分野の拡大や性能的な要求に対応して、前記実公平 3
-33424号公報を始め、実公平 5-24454号公報などに見ら
れるごとく、いろいろの改善・工夫も加えられたものも
開発されている。たとえば、予め設定されたプログラム
に従って、被加工物面を自動的に表面処理することが可
能なホーーニング装置も開発されている。
[0004] The honing apparatus is designed to meet the demands for expanding the range of application and the field of performance and to meet the demands for performance.
As shown in Japanese Utility Model Publication No. 333424, Japanese Utility Model Publication No. 5-24454, etc., there have been developed ones with various improvements and ideas. For example, a honing apparatus capable of automatically performing a surface treatment on a workpiece surface according to a preset program has been developed.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、従来知
られているホーニング装置の場合、次ぎのような問題が
認められる。すなわち、ホーニング装置は、実用的な要
求に対応して機能的に改善、向上などなされているが、
粉粒体搬送路2を搬送される粉粒体3の流れの不均一化
が生じる場合がしばしば起こる。ここで、粉粒体3の流
れの不均一化、換言すると、粉粒体搬送路2などにおけ
る粉粒体3の詰まりなどを招来することがあり、結果的
に均質なホーニング加工を確保し得なかったり(仕上が
り加工のムラ発生)、また前記粉粒体3の詰まりに伴い
所定の加工が進行していないのに、ホーニング装置を運
転・駆動する恐れもある。つまり、所要のホーニング加
工および効率的なホーニング加工の常時確保、もしくは
信頼性の高い加工を経済的に確保するという点で、実用
上未だ十分満足し得る手段といえない。
However, in the case of the known honing apparatus, the following problems are recognized. That is, the honing device has been functionally improved and improved in response to practical demands.
Often, the flow of the powder 3 conveyed through the powder conveyance path 2 becomes uneven. Here, the flow of the granular material 3 may be uneven, in other words, the granular material 3 may be clogged in the granular material transport path 2 or the like, and as a result, a uniform honing process may be secured. There is also a possibility that the honing device may be operated or driven even if the processing is not performed (the finish processing is uneven) or the predetermined processing is not progressing due to the clogging of the powdery granules 3. In other words, it is not a practically satisfactory means in terms of always securing required honing processing and efficient honing processing, or economically securing highly reliable processing.

【0006】本発明は上記事情に基づいてなされたもの
で、粉粒体搬送路における粉粒体の詰まりを容易かつ確
実に感知し、適切な対応を採ることにより、高品質なホ
ーニング加工を効率よく行うことが可能なホーニング装
置の提供を目的とする。
The present invention has been made on the basis of the above circumstances, and it is possible to easily and surely detect the clogging of a granular material in a granular material conveying path and take an appropriate countermeasure to efficiently perform high-quality honing processing. An object of the present invention is to provide a honing device that can be performed well.

【0007】[0007]

【課題を解決するための手段】本発明に係るホーニング
装置は、粉粒体収容槽と、前記粉粒体収容槽内の粉粒体
を強制搬送する粉粒体搬送路と、前記粉粒体搬送路を搬
送される粉粒体を被加工面に強制射出する射出ノズル
と、前記射出ノズルから射出された粉粒体を前記粉粒体
収容槽内へ移送回収する粉粒体回収手段とを具備して成
るホーニング装置において、前記粉粒体搬送路に、粉粒
体の強制搬送流を振動として検出する振動感知機構を配
設し、かつ前記振動感知機構の不感知時間に応じて警報
を発する警報発生手段を付設したことを特徴とする。
According to the present invention, there is provided a honing apparatus comprising: a granular material storage tank; a granular material transport path for forcibly transporting the granular material in the granular material storage tank; An injection nozzle for forcibly injecting the granules conveyed on the conveyance path to the surface to be processed, and a granule collection means for transferring and collecting the granules ejected from the injection nozzle into the granule storage tank. In the honing apparatus provided, a vibration sensing mechanism for detecting a forced conveying flow of the granular material as vibration is disposed in the granular material transport path, and an alarm is issued according to a non-sensing time of the vibration sensing mechanism. It is characterized in that an alarm generating means for generating an alarm is provided.

【0008】[0008]

【作用】本発明に係るホーニング装置においては、強制
的に射出され被加工面をホーニング加工する粉粒体が粉
粒体搬送路を強制搬送される過程で、その搬送(流動)
状態が振動感知機構によって常時チェックされ、異常時
には警報される。つまり、粉粒体搬送路を強制搬送され
る粉粒体が詰まり、粉粒体搬送路における搬送(流動)
が停止もしくは大幅に低減したりすると、粉粒体の強制
搬送(流動)力に伴う振動も連動して停止もしくは大幅
に低減するので、前記振動の停止もしくは大幅な低減を
警報させることにより、ホーニング加工の不均一性や無
駄な加工動作などなどを、容易に回避することが可能と
なる。
In the honing apparatus according to the present invention, the powder (forcibly injected) which is forcibly injected and which hones the surface to be processed is conveyed (flowed) in the process of being forcibly conveyed through the powder / particle conveying path.
The condition is constantly checked by the vibration sensing mechanism, and an alarm is issued when an abnormality occurs. In other words, the granules forcedly conveyed in the granule conveying path are clogged and conveyed (flow) in the granule conveying path.
If the vibration is stopped or greatly reduced, the vibration accompanying the forced conveyance (fluidity) force of the granular material is also stopped or greatly reduced in conjunction with it. It is possible to easily avoid non-uniform processing, unnecessary processing operations, and the like.

【0009】[0009]

【実施例】以下図1〜図3を参照して本発明の実施例を
説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS.

【0010】図1は、本発明に係るホーニング装置の主
要部構成を概略的に示す断面図であり、1は粉粒体(研
磨材)を収容する粉粒体収容槽、2は前記粉粒体収容槽
1内の粉粒体3を強制搬送するたとえば硬質金属製パイ
プなどから成る粉粒体搬送路である。また、4は前記粉
粒体搬送路2を、搬送される粉粒体3を被加工体面に強
制射出するたとえば硬質金属製ノズルなどの射出ノズ
ル、5は前記射出ノズルから射出された粉粒体3を、前
記粉粒体収容槽1内へ移送・回収する粉粒体回収手段で
ある。ここで、粉粒体回収手段5は、たとえばスクリュ
コンベア,スプリングフィダー,ファンなどであり、被
加工体(物)面のホーニング加工のため、強制射出され
た粉粒体3を粉粒体収容槽1内に移送・回収し、繰り返
し利用し得る構成と成っている。
FIG. 1 is a cross-sectional view schematically showing a main part of a honing apparatus according to the present invention, wherein 1 is a powder container for storing powder (abrasive material), and 2 is the powder. This is a powder / particle transport path composed of, for example, a hard metal pipe for forcibly transporting the powder / particle 3 in the body container 1. Reference numeral 4 denotes an injection nozzle such as a hard metal nozzle for forcibly ejecting the conveyed powder 3 onto the surface of the workpiece through the powder / particle conveyance path 2 and reference numeral 5 denotes a powder or granule ejected from the injection nozzle 3 is a powder / particle recovery means for transferring and collecting the powder / particles 3 into the powder / particle storage tank 1. Here, the powder / particle recovery means 5 is, for example, a screw conveyor, a spring feeder, a fan, or the like, and forcibly ejects the powder / particle 3 for honing the surface of the workpiece (object). It is configured to be transferred / collected into the unit 1 and used repeatedly.

【0011】さらに、6は前記粉粒体搬送路2に介装さ
れた振動感知機構、7は前記振動感知機構6に隣接して
設置された警報手段である。ここで、前記振動感知機構
6は、図2に断面的に示すごとく、粉粒体搬送路2に介
装(配設)され、さらに警報手段7が振動感知機構6に
接続・配置されている。すなわち、振動感知機構6は、
強制搬送される粉粒体の流動に、実質的に支障が及ばな
い程度の太さの棒状体もしくは幅の板状体,長さに形成
された振動感知子(振動検知子)6a、および前記振動感
知子6aの振動方向面に対応して配置された振動センサ6b
を具備した構成を成している。そして、この振動感知機
構6の振動感知子6a先端部を、前記粉粒体搬送路2の側
壁に形設した挿入孔2aを介して粉粒体搬送路2内に装着
する一方、前記挿入孔2a内壁面との間に Oリング8を配
設して密封した形に装着・支持されている。ここで、振
動感知子6aの材質,形状などは,粉粒体の種類や粉粒体
の流速などにもより適宜選択すればよい。一般的には、
粉粒体の衝突による摩耗を考慮すると、鉄鋼,セラミッ
クスのように硬くて振動を伝達し易い高剛性の材質が望
ましく、太さもしくは幅は粉粒体搬送路2径の高々 1/3
程度もしくは数mm程度、先端部が粉粒体搬送路2径の中
心部に達する程度の長さでよい。
Further, reference numeral 6 denotes a vibration sensing mechanism interposed in the powdery material conveying path 2, and reference numeral 7 denotes an alarm means provided adjacent to the vibration sensing mechanism 6. Here, as shown in cross section in FIG. 2, the vibration sensing mechanism 6 is interposed (arranged) in the granular material conveying path 2, and an alarm means 7 is connected and arranged to the vibration sensing mechanism 6. . That is, the vibration sensing mechanism 6
A rod-like body or a plate-like body having a thickness that does not substantially impede the flow of the powdery material being forcibly conveyed, a vibration sensor (vibration detector) 6a formed in a length, and Vibration sensor 6b arranged corresponding to the vibration direction plane of vibration sensor 6a
Is provided. Then, the tip of the vibration sensor 6a of the vibration sensing mechanism 6 is mounted in the granular material transport path 2 through an insertion hole 2a formed in the side wall of the granular material transport path 2, while the insertion hole An O-ring 8 is arranged between the inner wall surface 2a and mounted and supported in a sealed form. Here, the material and shape of the vibration sensor 6a may be appropriately selected depending on the type of the granular material, the flow velocity of the granular material, and the like. In general,
Taking into account the wear due to the impact of the granular material, it is desirable to use a material of high rigidity, such as steel or ceramics, which is hard and easy to transmit vibration, and the thickness or width is at most 1/3 of the diameter of the granular material transport path 2.
The length may be about or several mm, such that the leading end reaches the center of the diameter of the granular material conveying path 2.

【0012】また、前記振動センサ6bは、振動感知子6a
の振動方向(粉粒体搬送路2の流れ軸方向)を検出方向
として取り付けてある。この構成では、粉粒体搬送路2
を搬送される粉粒体の流れによって、前記 Oリング8を
支点として振動感知子6aが振動を発生し、その振動を効
率よく振動センサ6bに伝達することになる。ここで、振
動センサ6bに伝達されている間は、粉粒体が粉粒体搬送
路2を定常的に搬送されていることを示し、振動センサ
6bへの振動伝達が停止したときは、粉粒体3が粉粒体搬
送路2で詰まりを起こしたことを示す。そして、振動セ
ンサ6bが振動伝達が停止すると、この振動伝達停止時間
(間隔)をタイマー7aで検出し、一定時間もしくは一定
の積算時間を経過した時点で、前記タイマー7aに連動し
て警報器7bで警報を発する構成と成っている。なお、こ
の振動感知機構6の取り付け位置は、ホーニング装置の
他の機構、たとえば粉粒体収容槽1内の構造なども考慮
し、詰まり検出という本来の機能を、より効果的に果た
し得るように適宜選択する。 次ぎに、前記構成のホー
ニング装置の動作例を説明する。
The vibration sensor 6b includes a vibration sensor 6a
(The flow axis direction of the granular material transport path 2) is attached as a detection direction. In this configuration, the powder material conveying path 2
The vibration sensor 6a generates vibration with the O-ring 8 as a fulcrum due to the flow of the granular material conveyed, and the vibration is efficiently transmitted to the vibration sensor 6b. Here, while being transmitted to the vibration sensor 6b, it indicates that the granular material is steadily transported along the granular material transport path 2, and the vibration sensor
When the transmission of the vibration to 6b is stopped, it indicates that the granular material 3 has been clogged in the granular material transport path 2. When the vibration sensor 6b stops transmitting vibration, the vibration transmission stop time (interval) is detected by the timer 7a, and when a certain time or a certain integration time has elapsed, the alarm 7b is linked with the timer 7a. It is configured to issue an alarm. The mounting position of the vibration sensing mechanism 6 is determined in consideration of other mechanisms of the honing device, for example, the structure of the powdery material storage tank 1, so that the original function of clog detection can be more effectively performed. Select as appropriate. Next, an operation example of the honing apparatus having the above-described configuration will be described.

【0013】図3はこの実施例に係るホーニング装置に
ついてのフローチャート図であり、ホーニング加工を開
始するとき、振動感知機構6の振動センサ6bに接続する
タイマー7aをリセットする。この状態で前記粉粒体収容
槽1内の粉粒体3を、粉粒体搬送路2を強制搬送し、射
出ノズル4を介して被加工体面に粉粒体3を射出し、所
要のホーニング加工を施す。ここで、粉粒体3が粉粒体
搬送路2を定常的に搬送し、正常なホーニング加工が行
われていると、振動感知機構6の振動感知子6aから振動
センサ6bに振動が連続的に伝達されるので、前記タイマ
ー7aはリセットされたままホーニンク加工が続行される
ことになる。一方、粉粒体搬送路2を粉粒体3が詰まり
などにより不正常な搬送状態となると、前記振動感知子
6aからの振動センサ6bに対する振動伝達が停止もしくは
間隔を採るので、タイマー7aのカウントが開始され、一
定時間(たとえば 5秒程度)経過すると、タイムアップ
となって、警報器7bが自動的に動作して粉粒体3の詰ま
りが警報される。
FIG. 3 is a flowchart for the honing apparatus according to this embodiment. When the honing process is started, the timer 7a connected to the vibration sensor 6b of the vibration sensing mechanism 6 is reset. In this state, the granular material 3 in the granular material storage tank 1 is forcibly transported through the granular material transport path 2, and the granular material 3 is injected to the surface of the workpiece through the injection nozzle 4, and the required honing is performed. Apply processing. Here, when the granular material 3 is constantly conveyed in the granular material conveying path 2 and normal honing is performed, the vibration is continuously transmitted from the vibration sensor 6a of the vibration sensing mechanism 6 to the vibration sensor 6b. The horning process is continued while the timer 7a is reset. On the other hand, if the powder / particle transport path 2 enters an abnormal transport state due to clogging of the powder / particle 3 or the like, the vibration sensor
Since the transmission of vibration from 6a to vibration sensor 6b stops or takes an interval, the timer 7a starts counting, and after a certain period of time (for example, about 5 seconds), the time is up and the alarm 7b operates automatically. Then, the clogging of the granular material 3 is warned.

【0014】本発明は上記実施例に限定されるものでな
く、発明の趣旨を逸脱しない範囲でいろいろの変形を採
り得る。たとえば、上記実施例では、振動センサ7の出
力をon-offとしたが、アナログ出力として、そのアナロ
グ出力の大きさから、詰まりを判定することも可能であ
る。また、警報手段も警報器の代わりに、たとえば表示
灯もしくは回転灯などで報知する構成してもよい。
The present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the invention. For example, in the above embodiment, the output of the vibration sensor 7 is on-off, but it is also possible to determine clogging as an analog output from the magnitude of the analog output. In addition, the alarm means may be configured to notify by an indicator light or a rotating light, for example, instead of the alarm device.

【0015】[0015]

【発明の効果】上記実施例および一般的な説明からも分
かるように、本発明に係るホーニング装置によれば、加
工剤としての粉粒体が、粉粒体搬送路内に詰まった場
合、容易かつ速やかに検知することができる。すなわ
ち、粉粒体の不均一な流動量に起因するムラ模様の研磨
加工回避、あるいは浪費的な(詰まりによるホーニング
加工の不可能性)ホーニング加工の防止などを確実に図
り得る。しかも、前記粉粒体の詰まり検知(感知)は、
警報手段に連動して詰まりを報知するので、この連動性
を利用して、ホーニング装置の駆動源を制御した場合
は、自動的な制御操作が可能となる。また、この構成で
は、ホーニング装置の大形化、もしくは操作の煩雑化な
どもないので、前記信頼性の高いホーニング加工を常時
実施し得る点と相俟って、実用性のうえで多くの利点を
もたらすものといえる。
As can be seen from the above embodiment and the general description, according to the honing apparatus according to the present invention, when the granular material as the processing agent is clogged in the granular material conveying path, And it can detect promptly. That is, it is possible to reliably prevent the polishing process of the uneven pattern due to the uneven flow amount of the powder or the honing process which is wasteful (inability of the honing process due to clogging). Moreover, the clogging detection (sensing) of the granular material is
Since the clogging is notified in conjunction with the alarm means, when the driving source of the honing device is controlled using this interlocking, an automatic control operation becomes possible. Further, in this configuration, since there is no increase in the size of the honing device or complicated operation, there are many advantages in terms of practicality, in combination with the fact that the highly reliable honing process can be always performed. It can be said that it brings.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係るホーニング装置の主要部構成例を
示す断面図。
FIG. 1 is a cross-sectional view showing an example of a main part configuration of a honing device according to the present invention.

【図2】図1に図示したホーニング装置の振動感知機構
を拡大して示す断面図。
FIG. 2 is an enlarged sectional view showing a vibration sensing mechanism of the honing device shown in FIG. 1;

【図3】本発明に係るホーニング装置の使用・動作例を
説明するためのフローチャート図。
FIG. 3 is a flowchart for explaining an example of use and operation of the honing device according to the present invention.

【図4】従来のホーニング装置の主要部構成を示す断面
図。
FIG. 4 is a cross-sectional view showing a configuration of a main part of a conventional honing device.

【符号の説明】[Explanation of symbols]

1……粉粒体収容槽 2……粉粒体搬送路 2a
……挿入孔 3……粉粒体 4……射出ノズル
5……粉粒体回収手段 6……振動感知機構
6a……振動子 6b……振動センサ 7…
…警報手段7a……タイマー 7b……警報器 8
……Oリング
1 ... powder and granular material storage tank 2 ... powder and particle transport path 2a
... Insertion hole 3... Granular material 4... Injection nozzle 5... Granular material collecting means 6... Vibration sensing mechanism
6a… Vibrator 6b… Vibration sensor 7…
... Alarm means 7a ... Timer 7b ... Alarm 8
...... O-ring

フロントページの続き (56)参考文献 特開 平2−131871(JP,A) 実開 昭60−131358(JP,U) 実開 昭62−81566(JP,U) 実公 平3−33424(JP,Y2) 実公 平5−24454(JP,Y2) (58)調査した分野(Int.Cl.6,DB名) B24C 7/00 Continuation of front page (56) References JP-A-2-131187 (JP, A) JP-A-60-131358 (JP, U) JP-A-62-81566 (JP, U) JP-A-3-33424 (JP) , Y2) Jiko 5-24454 (JP, Y2) (58) Fields investigated (Int. Cl. 6 , DB name) B24C 7/00

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 粉粒体収容槽と、前記粉粒体収容槽内の
粉粒体を強制搬送する粉粒体搬送路と、前記粉粒体搬送
路を搬送される粉粒体を被加工面に強制射出する射出ノ
ズルと、前記射出ノズルから射出された粉粒体を前記粉
粒体収容槽内へ移送回収する粉粒体回収手段とを具備し
て成るホーニング装置において、 前記粉粒体搬送路に、搬送される粉粒体が衝突する振
動感知子を突出させ、この振動感知子の振動を検出する
振動感知機構を配設し、かつ前記振動感知機構の不感知
時間に応じて警報器を作動させる警報手段を付設したこ
とを特徴とするホーニング装置。
1. A powder and granular material storage tank, a powder and granular material transport path for forcibly transporting the powder and granular material in the powder and granular material storage tank, and a powder and granular material transported through the powder and granular material transport path are processed. A honing device comprising: an injection nozzle forcibly injecting the powder onto a surface; and a powder and granular material recovery means for transferring and recovering the powder and granular material injected from the injection nozzle into the powder and granular material storage tank. In the transport path , the vibrations against which
A motion sensor is protruded, a vibration sensing mechanism for detecting the vibration of the vibration sensor is provided, and alarm means for activating an alarm in accordance with a non-sensing time of the vibration sensing mechanism is provided. Honing equipment.
【請求項2】 振動感知機構が、振動子、この振動子の
支点を兼ねるOリングおよび振動子に接する振動センサ
で構成されているとを特徴とする請求項1記載のホー
ニング装置。
2. A vibration sensing mechanism, vibrator, honing device of claim 1, wherein that you are configured by the vibration sensor in contact with the O-ring and vibrator serving as a fulcrum of the vibrator.
JP6217332A 1994-09-12 1994-09-12 Honing equipment Expired - Fee Related JP2939475B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6217332A JP2939475B2 (en) 1994-09-12 1994-09-12 Honing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6217332A JP2939475B2 (en) 1994-09-12 1994-09-12 Honing equipment

Publications (2)

Publication Number Publication Date
JPH0871922A JPH0871922A (en) 1996-03-19
JP2939475B2 true JP2939475B2 (en) 1999-08-25

Family

ID=16702524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6217332A Expired - Fee Related JP2939475B2 (en) 1994-09-12 1994-09-12 Honing equipment

Country Status (1)

Country Link
JP (1) JP2939475B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101870669B1 (en) * 2011-11-22 2018-06-27 세메스 주식회사 Injection unit, Apparatus and Method for treating substrate with the unit

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60131358U (en) * 1984-02-13 1985-09-03 株式会社 不二精機製造所 Abnormality detection device in slurry transfer system in wet blasting equipment
JPH0333424U (en) * 1989-08-11 1991-04-02

Also Published As

Publication number Publication date
JPH0871922A (en) 1996-03-19

Similar Documents

Publication Publication Date Title
AU665949B2 (en) Blasting apparatus and method
KR102108604B1 (en) Polishing device and polishing method
CA1325954C (en) Cleaning device
US5081799A (en) Blasting apparatus
WO2011121853A1 (en) Machining apparatus equipped with waste recovery device, and method of machining article to be machined
EP0523181A1 (en) Improvement in blasting apparatus
JP2939475B2 (en) Honing equipment
JP2982528B2 (en) Powder transport equipment
JP4544094B2 (en) Powder collection method
JP2007244989A (en) Continuous discharge type dust collector and dust collection method
GB2162499A (en) Method of and means for preventing clogging of light powdery granules in apparatus for treating the granules
JP2007155544A (en) Decontaminating apparatus and method
JP2000000767A (en) Feeding method for abrasive
JP2704481B2 (en) Torch nozzle cleaning device
JPH10250821A (en) Mist type belt cleaner equipment
JP2893126B2 (en) Ice grain shot blasting equipment
JP2001038629A (en) Shot blasting material, and shot blasting method
US6095631A (en) Ink jet recording device
US8622532B2 (en) Method and system for clog detection and mitigation in delivering solid-ink pellets to an imaging apparatus
JP2645850B2 (en) Abrasive projection nozzle and abrasive projection device
JP3056916B2 (en) Granulation control device using fluidized bed
JPH08157040A (en) Recovering device for powdery and granular material collected from belt conveyor
JPH0563635U (en) Powder adhesion prevention device
JPH0513490Y2 (en)
JPH0613840Y2 (en) Abrasive feeder

Legal Events

Date Code Title Description
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 19990119

LAPS Cancellation because of no payment of annual fees