JP2939242B1 - Coriolis mass flowmeter - Google Patents

Abstract

An object of the present invention is to provide a high-precision Coriolis mass flowmeter that provides high vibration stability by isolating external vibration transmission to a vibration fulcrum. SOLUTION: The Coriolis mass flow meter of the present invention has a parallel 2 mass flowmeter.
Two flow tubes 1 composed of two curved tubes,
2, a driving device 15, and a pair of vibration detection sensors 16, 1
7 is provided. An inlet-side manifold 24 for branching the measurement fluid from the inflow port into the two flow tubes 1 and 2, and an outlet-side manifold 25 for joining the measurement fluid flowing through the two flow tubes 1 and 2 and flowing out from the measurement fluid outlet. Is mechanically coupled to the body 30 only on the inflow side of the inlet side manifold 24 and on the outflow side of the outlet side manifold 25. As a result, the main body 3 is connected to each of the connecting ends of the inlet and outlet manifolds 24 and 25 serving as vibration fulcrums and the flow tubes 1 and 2.
The effect of vibration transmission from zero and all structures coupled thereto can be reduced.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a Coriolis mass flow meter, and more particularly to a Coriolis mass flow meter of a type using two curved tubes in parallel.

[0002]

2. Description of the Related Art One end or both ends of a flow tube through which a fluid to be measured flows is supported, and when the flow tube is vibrated around the supporting point in a direction perpendicular to the flow direction of the flow tube, the flow tube (hereinafter referred to as vibration A mass flow meter (Coriolis mass flow meter) utilizing the fact that the Coriolis force acting on a flow tube to be added is referred to as a flow tube is proportional to a mass flow rate. The shape of the flow tube in this Coriolis mass flowmeter is roughly classified into a curved tube and a straight tube.

[0003] A straight tube type Coriolis mass flow meter is characterized in that when vibrating in a direction perpendicular to a straight tube axis at a center portion of a straight tube supported at both ends, a Coriolis force is applied between the support portion and the center portion of the straight tube. , The mass flow rate is detected as a phase difference signal. Although such a straight tube type Coriolis mass flow meter has a simple, compact and robust structure, it cannot obtain high detection sensitivity.

On the other hand, the curved tube type can detect mass flow rate with high sensitivity in that a shape for effectively extracting Coriolis force can be selected. It is also known that, in order to drive the bending measurement tube more efficiently, the bending tube through which the measurement fluid flows has a configuration of two parallel tubes.

FIG. 4 is a schematic configuration diagram of such a conventional parallel two curved tube type Coriolis mass flow meter. As shown, the flow tubes 1 and 2 are two parallel curved tubes (U
The two flow tubes 1 and 2 are resonantly driven in opposite phases by a driving device 15 which is formed by a coil and a magnet at the center and is constituted by a coil. In addition, the pair of vibration detection sensors 16 and 17 composed of a coil and a magnet
It is installed at the symmetrical position on both the left and right sides with respect to the mounting position of 5,
It detects the phase difference proportional to the Coriolis force.

[0006] The measuring fluid flows into the tubular body 34 from an external flow tube connected via the flange 18 on the inlet side, where it is turned 90 ° by the end plate 35 so that the two flows flow. Branched equally into tubes 1 and 2.
Then, while merging at the outlet side of the flow tubes 1 and 2, the direction is turned by 90 ° by the end plate 36 and flows out to the external flow tube connected via the flange 19 on the outlet side. By flowing the measurement fluid equally through the two flow tubes 1 and 2 in this way, the natural vibration of the two flow tubes 1 and 2 is always maintained regardless of the type of fluid or the temperature. The numbers can be made equal, which allows efficient and stable driving, and
It is known that Coriolis mass flowmeters can be constructed without external vibration or temperature effects.

However, such a conventional Coriolis mass flowmeter using a flow tube composed of two parallel curved tubes is not perfect in isolating vibration transmission from the outside.

As shown in the drawing, substrates 27 and 28 are attached to the two flow tubes 1 and 2, and this point serves as a first fulcrum of vibration, and the two flow tubes 1 and 2. And the connection part with the main body 34 is a second fulcrum of the vibration of the flow tube, and is an important base for the whole tube vibration. However, the second fulcrum is not isolated in transmitting the vibration from the outside, and the external vibration is transmitted from the main body structure, the case, and the like, which adversely affects the performance of the Coriolis mass flow meter.

In addition, such a Coriolis mass flowmeter using a flow tube composed of two curved tubes in parallel has a branch portion at a measurement fluid inlet and a junction at a measurement fluid outlet because of its structure. Here, there is a problem that a pressure loss occurs or a fluid clogs. This is a problem especially when the liquid is easily rotten and easily clogged, such as a highly viscous fluid or food.

In addition, such a Coriolis mass flowmeter is
In terms of its structure, it is necessary to be robust at low cost and to be reliable even in the event of tube breakage, but conventional Coriolis mass flow meters are not considered enough. Did not.

Further, the conventional Coriolis mass flowmeter does not have a symmetrical mass and mounting position of the drive unit and the vibration detecting sensor, and does not consider the influence of wiring to them on the vibration of the flow tube. Instead, the effects of wiring mass, tension, and elasticity were concentrated only on the tube to which the coil was attached, which resulted in poor balance between the two flow tubes and negatively affected the performance of the Coriolis mass flow meter. .

Furthermore, the conventional Coriolis mass flowmeter does not take into account the effects of higher-order vibration modes that always exist in a vibrating flow tube.

[0013]

SUMMARY OF THE INVENTION Accordingly, the present invention solves the problems of the Coriolis mass flowmeter using two parallel curved tubes, and is capable of isolating external vibration transmission to a vibration fulcrum. An object of the present invention is to provide a high-precision Coriolis mass flow meter that provides vibration stability.

Another object of the present invention is to reduce the influence of the higher-order vibration mode of the flow tube.

Another object of the present invention is to make it difficult to transmit vibrations through the inflow path, and to greatly reduce the pressure loss at the branch at the measurement fluid inlet and at the junction at the measurement fluid outlet. And

It is another object of the present invention to provide a low-cost, mechanically strong and reliable structure, improve the vibration balance between two flow tubes, and obtain high accuracy.

It is another object of the present invention to provide a thin-walled pressure-resistant case capable of withstanding a very high pressure by making all corners integrated with the main body shape arc-shaped.

[0018]

The Coriolis mass flow meter according to the present invention includes two flow tubes 1 and 2 each composed of two parallel curved tubes. The driving device 15 drives one of the flow tubes in resonance with the other flow tube in an opposite phase to each other, and the pair of vibration detection sensors 1
6 and 17 are installed at symmetrical positions on both the left and right sides with respect to the mounting position of the driving device 15 to detect a phase difference proportional to the Coriolis force. The inlet-side manifold 24 branches the measurement fluid from the inflow port into the two flow tubes 1 and 2, and the outlet-side manifold 25 combines the measurement fluids flowing through the two flow tubes 1 and 2 for measurement. It is discharged from the fluid outlet. In such a Coriolis mass flowmeter, the inlet and outlet manifolds are mechanically coupled to the body 30 only at the inlet side of the inlet manifold 24 and at the outlet side of the outlet manifold 25. As a result, the inlet and outlet manifolds 24 and 25 serving as vibration fulcrums and the flow tubes 1 and 2
At each of the coupling ends, the effect of vibration transmission from the main body 30 and all the structures coupled thereto can be reduced.

The present invention also relates to an inlet manifold 2
The flow paths of the manifold 4 and the outlet side manifold 25 are smoothly turned in a circular arc from the inlet or the outlet, respectively, and the total cross-sectional area of the flow path is continuously changed. As a result, no pressure loss or clogging of the fluid occurs at the branch portion and the junction portion of the measurement fluid.

The present invention also relates to an inlet manifold 2
4 and the outlet side manifold 25 are formed in a curved block shape while continuously expanding. Thereby, it is possible to configure so as not to have a special natural frequency.

Further, the present invention has a box-shaped structure in which the main body 30 has a U-shaped cross section and a base plate is arranged on the upper part so as not to contact the vibration fulcrum. This makes it possible to provide a structure that is strong against bending and twisting.

The main body 30 of the present invention has a U-shaped case 3
1 and are integrally connected to each other so that the entire outer periphery has an arc shape. As a result, a very high pressure resistance can be ensured even with a thin wall.

Further, according to the present invention, the drive unit 15 and the pair of vibration detection sensors 16 and 17 are arranged between the two flow tubes and between the shafts so that no inertial moment due to the vibration inertia force is generated. Things.

Further, the present invention uses flexible printed boards 12 and 13 in which wiring to the drive unit 15 and the pair of vibration detection sensors 16 and 17 is symmetrically bent from both of the two flow tubes. Flow tubes 1, 2
Are symmetrical in the added mass and the added stress to each of them. As a result, very stable vibration can be obtained, and it is hardly affected by external vibration.

The present invention also relates to a pair of vibration detecting sensors 1
The attachment positions of 6, 17 are arranged at the nodes of the secondary vibration mode on the inflow side and the outflow side legs, which are the beams of vibration, to reduce the influence of the secondary vibration mode.

[0026]

1 to 3 show an example of a Coriolis mass flow meter to which the present invention is applied. FIG. 1 shows a case where two parallel curved flow tubes are mounted in a vertical plane. I assume. FIG. 1 is a view from the front. FIG. 2 is a partial cross-sectional view of the Coriolis mass flowmeter mounted in a vertical plane as viewed from above (from above in FIG. 1), and FIG. It is sectional drawing cut | disconnected by.

The flow tubes 1 and 2 of the exemplified Coriolis mass flowmeter are curved tubes of the same shape which are curved in a gate shape, and each end thereof has a manifold, which will be described later in detail as one of the features of the present invention. 24, 25. It is assumed that the measurement fluid flows in from the left side in FIG. 1 and flows out to the right side. That is, the measurement fluid flows in from the external flow pipe connected via the flange 18, and is equally branched into the two flow tubes 1 and 2 at the inlet-side manifold 24. Then, at the outlet side of the flow tubes 1 and 2, they merge at the manifold 25 and flow out to the external flow tube connected via the flange 19.

The main body 30 holding the connection ports at both ends and the entire flow meter has a U-shaped cross section as shown in FIG. 1 or as shown in FIG. 3 as viewed at right angles thereto. The upper opening of the main body 30 is connected to the base plate 26 so as to cover the upper part except for the manifolds 24 and 25. Thus, the main body 30 is configured in a box shape having a U-shaped cross section.

In the vicinity of both ends of the flow tubes 1 and 2, substrates 27 and 28 for forming a node of vibration when driven in a tuning fork shape are provided. Are fixed to each other.

As described above with reference to the prior art, the fixing point of the flow tubes 1 and 2 by the substrates 27 and 28 serves as a first fulcrum of vibration, and the upper ends of the flow tubes 1 and 2 and the manifolds 24 and 25. Is the second fulcrum, which is an important basis for the whole tube vibration. In this example of the present invention, the second fulcrum of the vibration is
The main body 30, the base plate 26, the pressure-resistant case 31, and the like are isolated from all structures connected to the main body. The main body 30 is mechanically connected only at the inflow side of the manifold 24 and only at the outflow side of the manifold 25. In addition, in order to form the second vibration fulcrum, it is necessary to integrally couple the two flow tubes at this point, and for example, a substrate can be used similarly to the first fulcrum. However, it is also possible by using an integral block-shaped manifold as exemplified.

As described above, according to the present invention, since the second vibration fulcrum has a structure in which the influence of vibration transmission from the outside is reduced, high vibration stability is provided, and the Coriolis mass flowmeter is highly accurate. Make things. Furthermore, the main body 3 having a U-shaped section
The box-shaped structure composed of the base plate 26 and the base plate 26 provides a structure that is strong against bending and twisting.

Further, since the pressure-resistant case 31 having the U-shaped cross-section is integrated with the main body 30 having the U-shaped cross-section, the entire outer periphery has an arc shape, and a very high pressure resistance can be obtained even with a thin wall. In this case, even if the tube is broken, the fluid flowing there will not flow out of the pressure vessel.

As described above, the fluid to be measured passes through the flange 18 on the inlet side of the flow path and passes through the inlet side manifolds 24 to 2.
It is equally branched into two flow tubes 1 and 2. Then, in the same manner, they join by the manifold 25. At this time, the flow path of the manifold 24 exemplified as an example of the present invention smoothly turns 90 ° in a circular arc from the inflow port (connection part with the flange 18) (see FIG. 1), and the flow tube 1, 2 to the connection. At this time, two flow paths are formed so as to branch from one inflow port into two flow tubes 1 and 2 (see FIG. 3). It continues to the cross-sectional area. Thereby, the pressure loss can be greatly reduced.
Generally, in order to increase the Coriolis force by increasing the flow velocity when the fluid flows through the flow tube rather than through the external flow tube, the total cross-sectional area of the flow tube is About 0.7 to 0.8.

The manifold 24 having the flow path formed as described above is designed so as not to have a special natural frequency by forming it into a curved block while continuously expanding its shape. Accordingly, it is possible to obtain a configuration in which the disturbance vibration is not amplified and the vibration is not easily transmitted.

Similarly, since the manifold 25 on the outlet side of the flow path of the measurement fluid is also symmetric with the flow path and the shape of the manifold 24 on the inlet side, detailed description will be omitted, but two flows are required. The tubes 1 and 2 merge while continuously increasing the total cross-sectional area of the flow path, and join the outlet flow path.

The driving device 15 is usually composed of a magnet and a coil. The two flow tubes 1 and 2 are placed in opposite phases at the center of the flow tubes 1 and 2 composed of two parallel curved tubes. Is driven by resonance. The pair of vibration detection sensors 16 and 17 are each composed of a magnet and a coil, are installed at symmetrical positions on both the left and right sides with respect to the mounting position of the driving device 15, and detect a phase difference proportional to the Coriolis force. ing. Driving device 15 shown
Each of the pair of vibration detection sensors 16 and 17 is disposed between the tube shafts between the flow tube 1 and the flow tube 2. In other words, as shown in FIG.
When the two flow tubes are viewed in the overlapping direction, the drive device 15 and the pair of vibration detection sensors 16 and 17 are respectively moved between the two flow tubes and on a line connecting the respective central axes of the two flow tubes. It is arranged as the center. As a result, a driving force can be applied on a line connecting the center axes of the two flow tubes, and the Coriolis force based on the driving force can be detected, so that no inertial moment due to the oscillating inertial force is generated.

In the illustrated example, the mounting position of the pair of vibration detection sensors 16 and 17 is located at the node of the secondary vibration mode on each of the inflow side and outflow side legs that become the vibration beam. I have. FIG. 5 is a diagram showing a model of a single straight tube vibration beam in order to explain the reduction of the influence of the secondary vibration mode. Each of the inflow side and the outflow side of the two flow tubes 1 and 2 has one leg,
A total of four straight tube vibration beams can be seen. This straight tube vibration beam can be modeled as shown in FIG. 5 (A), which, as described above,
Are the fixing points of the flow tubes 1 and 2 by the substrates 27 and 28, and the second fulcrums are the flow tubes 1 and 2
And the upper and lower ends of the manifolds 24 and 25. It is assumed that a fixed weight is connected to the tip of this straight tube vibration beam. This is because the mass of the zenith connecting the two right and left legs of the flow tube (Including the mass of the flowing fluid) and the mass of the drive (Dr).

FIG. 5 shows such a straight tube vibration beam.
1 used for Coriolis mass flow measurement as shown in (B)
In addition to the next fundamental vibration mode, there is always a higher-order vibration mode. Among the higher-order vibration modes, the one having the greatest effect is the secondary vibration mode whose natural frequency is close, and FIG. 5C shows this. If a detection sensor (indicated by P / O in FIG. 5A) is arranged at the node of the secondary vibration mode, it is not affected by the secondary vibration mode. The position of the node in the secondary vibration mode is determined by the weight of the zenith, the driving device, and the detection sensor. When the distance from the first fulcrum to the zenith is L, the first fulcrum From 0.65
０．８0.85 L.

Driving device 15 and pair of vibration detection sensors 1
Wiring from 6 and 17 to the outside is performed by flexible printed boards 12 and 13 symmetrically bent from both of the opposing flow tubes 1 and 2 on the center axis of the flow tube (left and right center lines in FIG. 3). Therefore, the mass added to the vibrating flow tubes 1 and 2 and the stress (additional stress) that comes into contact with the vibrating flow tubes 1 and 2 from the outside and acts on them are completely symmetrical, and high vibration stability is obtained And is less susceptible to external vibrations. The result is a very accurate mass flow meter.

In the drawing, reference numeral 10 denotes a support for wiring to the driving device 15 and the pair of vibration detection sensors 16 and 17 and wiring to the temperature sensor. The column 10 is supported by the base plate 26 and penetrates the main body 30. Driving device 15 and a pair of vibration detection sensors 16 and 17
The wiring to the flexible printed boards 12, 13 after being routed therefrom along the surfaces of the flow tubes 1, 2
Through the inside of the support post 10 and through the inside thereof, through the terminal box 1 provided outside the Coriolis mass flow meter.
4, or directly connected to an electrical control circuit. Wiring to a plurality of temperature sensors, which are usually provided,
Is drawn out to the outside. At this time, the wire outlet is sealed by the pressure-resistant wire penetration portion 11 provided in the support 10 and molded with plastic, and the internal space is cut off from the outside in cooperation with the pressure-resistant case 31 as described above. I have.

[0041]

According to the present invention, the connecting portion between the flow tube and the main body, which is the fulcrum of the tube vibration, is isolated in the transmission of vibration from the outside, thereby providing high vibration stability and high precision. A Coriolis mass flow meter can be provided.

Further, the present invention is configured such that the inlet-side manifold and the outlet-side manifold are smoothly turned in a circular arc and the total cross-sectional area of the flow path is continuously changed. Pressure loss occurs at the branching point and at the junction at the measurement fluid outlet,
No fluid clogging occurs.

Further, the present invention is configured such that the inlet-side manifold and the outlet-side manifold are formed in a curved block shape while being continuously enlarged so as not to have a special natural frequency. Accordingly, a configuration can be provided in which disturbance vibration is not amplified and vibration is difficult.

The present invention has a box-shaped structure in which the connection ports at both ends and the main body holding the entire flow meter have a U-shaped cross section, and a base plate is arranged on the upper part so as not to contact the vibration fulcrum. With this structure, it has a structure that is strong against bending and torsion, does not affect the vibration of the tube against external stress on the connection port, provides a high-precision flow meter, and makes the main body thinner and lower cost. can do.

Also, the present invention is integrally connected to the main body,
By providing a U-shaped case having an arc shape on the entire outer periphery, a very high pressure resistance can be ensured even with a thin wall, and a pressure-resistant container which is reliable even in the unlikely event of damage to the tube can be constituted.

Further, according to the present invention, the drive unit and the pair of vibration detection sensors are arranged between the two flow tubes and between the shafts, so that the inertia moment due to the vibration inertia force is not generated. it can.

Further, according to the present invention, the mounting position of the pair of vibration detection sensors is set at two positions on each of the inflow side and the outflow side legs.
By being arranged at the node of the next vibration mode, the symmetry of the vibration beam can be completely secured without being affected by the second vibration mode, and the entry of vibration from the outside can be isolated to the utmost.

Further, according to the present invention, the wiring to the driving device and the pair of vibration detection sensors uses a flexible printed board symmetrically bent from both of the flow tubes with respect to the center axis, and the added mass and the added stress are symmetrical. By doing so, a very stable vibration can be obtained, the influence of the vibration from the outside is hard to be obtained, and a very high accuracy can be obtained.

[Brief description of the drawings]

FIG. 1 is a view showing an example of a Coriolis mass flowmeter to which the present invention is applied, and is a view in which two parallel tube type flow tubes are mounted in a vertical plane and viewed from the front thereof.

FIG. 2 is a view of the Coriolis mass flow meter shown in FIG. 1 as viewed from above.

FIG. 3 is a sectional view of the Coriolis mass flow meter shown in FIG.

FIG. 4 shows a schematic configuration diagram of a conventional parallel two-bend tube type Coriolis mass flow meter.

FIG. 5 is a graph for explaining the effect reduction of the secondary vibration mode;
It is a figure which modeling and shows one straight pipe vibration beam.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Flow tube 2 Flow tube 10 Prop 11 Pressure proof electric wire penetration part 12 Flexible printed board 13 Flexible printed board 14 Terminal box 15 Drive device 16 Vibration detection sensor 17 Vibration detection sensor 18 Flange 19 Flange 24 Manifold 25 Manifold 26 Base plate 27 Substrate 28 Substrate 30 Body 31 pressure-resistant case

────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Seiji Kobayashi 3-10-8 Kamiochiai, Shinjuku-ku, Tokyo Inside the oval company (72) Inventor Ito Yasushi 3-10-8 Kamiochiai, Shinjuku-ku, Tokyo (56) References JP-A-8-128876 (JP, A) JP-A-2-206722 (JP, A) JP-A-9-250940 (JP, A) JP-A 9-126851 (JP, A) A) Actual opening Sho 64-15 (JP, U) (58) Field surveyed (Int. Cl. ⁶ , DB name) G01F 1/84

Claims (8)

(57) [Claims] 1. A flow tube composed of curved tubes installed in parallel, an inlet-side manifold branched from the measurement fluid inlet to the two flow tubes, and a measurement flowing through the two flow tubes. An outlet-side manifold that joins fluids and flows out of the measurement fluid outlet, a drive device that drives one flow tube in resonance with the other flow tube in an opposite phase, and left and right with respect to the mounting position of the drive device A Coriolis mass flowmeter comprising a pair of vibration detection sensors installed at symmetrical positions on both sides and detecting a phase difference proportional to the Coriolis force, comprising a main body for holding the connection ports on both sides and the entire flowmeter , Machine with the inlet and outlet manifolds
The connection is made between the inlet and outlet manifolds of the inlet manifold.
Perform only on the outflow side of the nifold, and
Inlet and outlet manifolds and flow tubes
Each connecting end of the body is connected to the body
A Coriolis mass flow meter , which is arranged separately from all structures . 2. The flow path of the inlet-side manifold is smoothly turned in a circular arc from the inflow port, and is branched into two flow tubes by continuously reducing the total cross-sectional area of the flow path. The flow path of the outlet-side manifold smoothly turns in a circular arc from the connection end with the two flow tubes, and merges while continuously increasing the total cross-sectional area of the flow path. The Coriolis mass flowmeter according to claim 1, wherein the Coriolis mass flowmeter is connected to an outflow side. 3. The inlet-side manifold and the outlet-side manifold are respectively connected from a measurement fluid inflow port or a measurement fluid outflow port to a connection end with two flow tubes.
3. The Coriolis mass flowmeter according to claim 1, wherein the Coriolis mass flowmeter is formed in a curved block shape while continuously expanding. 4. The apparatus according to claim 1, wherein said main body has a U-shaped cross section, and has a box-shaped structure in which a base plate is arranged at an upper portion so as not to contact said vibration fulcrum. A Coriolis mass flowmeter according to Crab. 5. The Coriolis mass flowmeter according to claim 1, wherein the main body is integrally provided with a U-shaped case having an outer periphery having an arc shape. . 6. The apparatus according to claim 1, wherein said driving device and said pair of vibration detection sensors are arranged between said two flow tubes and between their shafts. Coriolis mass flowmeter. 7. Wiring to the driving device and the pair of vibration detection sensors is a flexible shaft symmetrically deflected from both of the two flow tubes at a center axis at the center between the flow tube inlet side and the outlet side. Using a printed board,
The Coriolis mass flowmeter according to any one of claims 1 to 6, wherein the mass and the stress applied to each of the two flow tubes are set to be symmetrical. 8. The vibration sensor according to claim 1, wherein said pair of vibration detecting sensors are mounted at nodes of a secondary vibration mode at respective legs on an inflow side and an outflow side serving as beams of vibration. A Coriolis mass flowmeter according to claim 7.