JP2921555B2 - Variable polarization insertion light source device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a variable polarization insertion light source device for generating radiation having various polarizations by inserting it into a linear portion of an electron accelerator or an electron storage device. The present invention relates to a magnetic field generation mechanism.

The variable polarization insertion light source device is suitable for examining the state of magnetic electrons in a magnetic material, and provides useful information for material development in the field of magnetic engineering.

[0003]

2. Description of the Related Art As is well known, when high-energy electrons are moved in a periodic magnetic field, radiation having high directivity and extremely high brightness is obtained. A device for obtaining such radiation is an insertion light source. FIG. 12 shows a magnet configuration of a basic insertion light source device. As shown in FIG. 12, a pair of magnet rows 801 and 802 are spaced apart along the z-axis which is the traveling direction of the electron beam, and the permanent magnets 803 constituting each magnet row 801 and 802 have their magnetizations. The directions are arranged in a regularly changing direction. With the magnet configuration shown in FIG. 12, linearly polarized radiation light can be obtained.

On the other hand, various insertion light source devices for generating circularly or elliptically polarized radiation have been invented so far. Fig. 1 shows a circular (or elliptical) polarizer by Konuki.
As shown in FIG. 3, there is a configuration in which two pairs of magnet rows, that is, a set of A and A and a set of B and B are arranged orthogonally on four surfaces (Applied Physics Letter 5).
2, (1988), 173). While synchronizing a pair of opposing magnet rows in each of the magnet rows,
By moving the pair of magnet rows so as to change the phase, elliptically polarized light or circularly polarized radiation light can be obtained. However, in this type of apparatus, since the vacuum duct needs to be surrounded from all sides, the magnet gap is widened, and it is necessary to use a large magnet to generate the required magnetic field. In addition, the vacuum duct must be removed once for installation, and the high vacuum condition must be broken.

Have devised a circularly polarized light insertion light source device different from that of Onuki et al. For example, Nuc
near Instruments and Meth
ods in Physics Research A
291, (1990), 371 and Nuclear I
Nstruments and Methods in
Physics Research A304, (1
991), 719.

[0006] The magnetic circuit of the circularly polarized light insertion light source device described in the above-mentioned document has a magnet array arranged only on the upper and lower sides as shown in FIG. 14, and each magnet is arranged as shown in FIG. Magnetization direction. When the upper magnet row 811 is shifted in the horizontal direction with respect to the lower magnet row 812, it is possible to continuously change from circularly polarized light to linearly polarized light depending on the phase angle. Unlike the Onuki type, since the left and right sides are open, there are few restrictions due to the shape of the vacuum duct and the magnet gap can be narrowed, so that the magnetic field intensity can be changed over a wide range, and the tuning range of the emitted light is It has become widely available. However, in this magnetic circuit, since the meandering surface of the electrons is at 45 ° with respect to the horizontal plane, the radiation light is also 45 °.
Since the linearly polarized light is tilted in the ° direction, there is a disadvantage that inconvenience may occur in use.

On the other hand, Sasaki et al. Including the present inventors have invented a new variable polarization insertion light source device and have already filed an application as Japanese Patent Application No. 4-110236. FIG. 15 is a schematic diagram of a magnetic circuit portion of the insertion light source. This magnetic circuit section is composed of two pairs of magnet rows 821 to 824 in the vertical direction. Each of the magnet rows 821 to 824 includes a magnet 826 having an odd-numbered magnetization direction inclined with respect to the central axis direction of the magnetic circuit, that is, the z-axis direction, and an even-numbered magnetization direction having the center axis direction of the magnetic circuit, that is, the z-axis direction. The magnets 828 in parallel with are arranged alternately so that four magnets 828 constitute one cycle. Note that the inclination of the magnetization direction of the magnet 826 is arbitrary. The phase of a pair of opposed diagonal magnet rows (for example, the magnet row 821 and the magnet row 824) is maintained, and the remaining pair of diagonal magnet rows (for example, the magnet row 822 and the magnet row 823) is moved in the Z direction. By shifting the phase, it is possible to generate vertically polarized light, circularly polarized light, elliptically polarized light, and horizontally polarized light without tilting the polarization plane. By configuring the magnetic circuit unit as shown in FIG. 15, the efficiency of generating a magnetic field is maximized, a strong magnetic field is generated, and the weight of the permanent magnet used can be reduced as compared with the conventional case.

A variable polarization insertion light source using a magnetic circuit unit as shown in FIG. 15 has a phase shift of a diagonal magnet array and a gap shift between opposing magnets, which are necessary to obtain radiation having various polarizations. In some cases, the moving method becomes complicated in order to realize the above. Therefore, Sasaki et al., Including the present inventors,
We have invented an insertion light source device capable of performing necessary operations with a minimum necessary ball screw, and filed an application as Japanese Patent Application No. 5-105320.

[0009]

However, in this insertion light source device, the mechanism for performing the phase movement of the diagonal magnet array and the gap movement between the opposing magnets has become simpler than in the prior art. When changing the phase, an attractive or repulsive force acts depending on the phase state between adjacent magnet rows.
Thus, the gap between adjacent magnet rows varies, but within mechanical tolerances. That is, when the phase is changed in the variable polarization insertion light source described above, an attractive force or a repulsive force acts between adjacent magnet arrays, so that the attractive force or the repulsive force changes with the moving amount of the magnet array. As a result, there has been a problem that the minute gap between the adjacent magnet rows slightly changes, and an unnecessary change may occur in the magnetic field distribution.

The magnet is fixed to the magnet cassette or the base yoke by an adhesive, and the magnet is moved by moving the magnet cassette or the base yoke. The attractive force or repulsive force also acts on the magnet itself depending on the phase state between adjacent magnet rows, and the adhesive that secures the magnet to the magnet cassette or yoke base is subjected to a complex force, which may cause the adhesive to peel off. There was a problem that there was.

Further, when it is necessary to rapidly switch the phase between the magnet rows, that is, when it is necessary to change the phase at a high speed, it is necessary to drive against the above-mentioned attractive force or repulsive force. There has also been a problem that a large driving device is required.

Therefore, improvement of these points has been desired.

Accordingly, an object of the present invention is to provide a variable polarization insertion light source device in which the gap between adjacent magnet rows does not fluctuate and the magnet rows can be moved at high speed with a small driving force.

[0014]

SUMMARY OF THE INVENTION In order to achieve the above object, a variable polarization insertion light source device according to the present invention for generating radiation having various polarizations is provided so as to be vertically spaced apart and opposed to each other. A magnet row composed of a pair of permanent magnets is provided, and the diagonal magnet row of the two pairs of magnet rows moves relative to an adjacent magnet row while maintaining the phase, and the adjacent magnet rows are mechanically coupled to each other. The adjacent magnet row has a mechanism for changing the gap between the adjacent magnet row while maintaining the phase, and further includes means for canceling the attractive force or the repulsive force generated between the adjacent magnet rows by a magnetic force. It is characterized by the following.

[0015]

According to the variable polarization insertion light source device of the present invention, means for canceling the attractive force or repulsive force generated between adjacent magnet rows by magnetic force is provided, so that the attractive force or repulsive force generated between adjacent magnet rows is canceled. Since the magnetic force generated by the means cancels out the magnetic force generated by the means, the force opposing the gap is reduced or eliminated when the gap between the adjacent magnet rows is changed or when the adjacent magnet rows are relatively moved from one direction to the opposite direction at a high speed.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a variable polarization insertion light source device according to the present invention will be described below with reference to the drawings.

FIG. 1 is a diagram schematically showing a side surface of a variable polarization insertion light source device according to an embodiment of the present invention. FIG. 2 shows FIG.
3 shows a front view as viewed from the AA line, and FIG.
FIG. 1 shows a plan view as seen from the line BB. FIG.
1 is a partially exploded perspective view as viewed from C in FIG. 1, and FIG. 5 is a partially exploded perspective view as viewed from D in FIG.

According to the apparatus of the present invention, the phase shift of the adjacent diagonal magnet rows is performed while maintaining the phase of the diagonal magnet rows, and the adjacent magnet rows together form a gap with respect to the opposing magnet rows. It is necessary to balance the changing operation. Since the upper and lower configurations are the same with the gap therebetween, only the upper components and configurations will be described with reference to FIGS.

The variable polarization insertion light source device of the present invention comprises magnet row support mechanisms 1 and 1 ', magnet row horizontal movement mechanisms 2 and 2',
It is composed of magnet row elevating mechanisms 3 and 3 ', a gantry 4, and a control circuit (not shown).

The magnet row support mechanism 1 has a first back plate 11 and a second back plate 12. A magnet row 111 composed of a plurality of permanent magnets is provided at one end of the first back plate 11, and a magnet row 112 composed of a plurality of permanent magnets is provided at the other end. ). In addition,
The permanent magnet is fixed to a magnet cassette or a base yoke by an adhesive. The first back plate 11 and the second
Two linear guides 113 and 114 are provided on the surface in contact with the back plate 12 so as to be vertically separated from each other so that the first back plate 11 can slide on the surface of the second back plate 12 in the horizontal direction. ing. The first back plate 11 is also provided with a coupling member 115 for engaging with a drive mechanism for moving the first back plate 11 in a horizontal direction, protruding through a through hole provided in the second back plate 12. A magnet row 121 composed of a plurality of permanent magnets is provided at one end of the second back plate 12, and a magnet row 122 composed of a plurality of permanent magnets is provided at the other end. A magnet cassette or base yoke (not shown) And is fixedly held. The permanent magnet is fixed to a magnet cassette or a base yoke by an adhesive. Coupling plates 123 and 124 for vertically engaging the drive mechanism for moving the second back plate 12 with respect to the support plate 23 in a horizontal direction are attached to the second back plate 12 vertically. The second back plate 12 is provided on the end portions of the coupling plates 123 and 124 and the surface of the support plate 23 corresponding thereto.
Are provided with linear guides 125 and 126, respectively, so as to be able to slide horizontally with respect to the support plate 23. The permanent magnet may be held and fixed directly to the back plate without going through the magnet cassette or the base yoke.

The magnet row horizontal moving mechanism 2 includes a second back plate horizontal moving mechanism 21 for moving the second back plate 12 in the horizontal direction, and a first back plate horizontal moving mechanism for moving the first back plate 11 in the horizontal direction. 22. The second back plate horizontal moving mechanism 21 includes a servo motor 211, a bracket 212, and a ball screw 21.
3, a feed screw mechanism comprising a nut 214 and a bracket 215. The servo motor 211 is fixed to the support plate 23 by a bracket 212, and the nut 214 is fixed to the coupling plate 123. Therefore, the second back plate 12 is driven by the servo motor 211 to move in the horizontal direction with respect to the support plate 23. Similarly, the first back plate horizontal moving mechanism 22
Is composed of a feed screw mechanism including a servo motor 221, a bracket 222, a ball screw 223, and a ball screw receiving portion 224. The servo motor 221 is fixed to the support plate 23 by a bracket 222, and the ball screw receiving portion 224 is fixed to the coupling member 115.
Therefore, the first back plate 11 is driven by the servo motor 221 to move in the horizontal direction with respect to the support plate 23.

The magnet row elevating mechanism 3 comprises a support column 31 fixed to the gantry 4, linear guides 32 and 33, a magnet row elevating mechanism 34, and a support plate 35. The linear guides 32 and 33 move the magnet arrays 111 and 121 in the vertical direction, so that the support plate 23 is slidable with respect to the support column 31 and the support plate 23 and the support column 31 are supported. It is provided in. The magnet row elevating mechanism 34 includes a stepping motor 341, a screw jack 342, and a coupling member 343. Support plate 35
Is fixed to the frame of the gantry 4. The stepping motor 341 and the screw jack 342 are
It is fixed to. The coupling member 343 is a support plate 23
, And is engaged with the screw jack 342. Therefore, the support plate 23 is driven by the stepping motor 341 to move up and down, and as a result, the magnet arrays 111 and 121 move up and down together. Therefore, the magnet rows 111 and 121 are supported by the gantry 4 via the support plate 23 in a side-by-side structure.
Since 1 'and 121' are also supported by the gantry 4 in a cantilever structure, the upper and lower two pairs of magnet rows 111, 121, 111 can be used without removing the vacuum duct of the electron accelerator or electron storage device in which the apparatus is used. ', 121' to the magnet row 11
2, 122, 112 'and 122' can be inserted and installed.

The lower magnet row supporting mechanism 1 ', the magnet row horizontal moving mechanism 2', and the magnet row raising / lowering mechanism 3 'have the same configuration as those of the above-mentioned upper row, and will not be described.

Next, the operation and action of the variable polarization insertion light source device of the present invention shown in FIGS. 1 to 5 will be described together with a more detailed configuration. Permanent magnet rows 111, 121, 111 '
And 121 ', including the arrangement and the magnetization direction of the permanent magnets in each magnet row, for example, the magnet row 8 shown in FIG.
21 to 824 may be used. These four rows of magnets 111, 121, 111 'and 121' generate a magnetic field which acts on the electrons traveling in the air gap between them to generate emitted light.

All of the servo motors 211 and 221 and the stepping motor 341 provided in the apparatus for moving the upper and lower magnet arrays are controlled by a control circuit (not shown) as follows.

The magnet rows 111 and 121 'located at diagonal positions
The servo motors corresponding to the magnet arrays are controlled so that the magnet arrays 121 and 111 'move synchronously while maintaining the phase with each other.

The diagonal magnet arrays 111 and 121 'are shifted in phase relative to the other diagonal magnet arrays 121 and 111', and are moved by the same amount in the opposite directions in the horizontal direction. The servo motor is controlled. As a result,
111 and 121, 111 'and 12 between adjacent magnet rows
Since the center of gravity does not move due to the phase shift of 1 ', vibration and noise caused by the vibration are very small.

Further, since the gap magnetic field strength is changed by changing the gap interval, the adjacent magnet rows 111 and 12
The stepping motor 341 is controlled so that 1 and 111 'and 121' can move up and down independently of each other, and the upper and lower magnet rows can be moved up and down independently. Thereby, the upper magnet row 1
The gap magnetic field strength can be changed by arbitrarily changing the gap between the magnet rows 11 and 121 and the lower magnet rows 111 'and 121', and a desired gap magnetic field strength can be obtained.

First and second back plates 11 and 12
, The phase between the magnet rows 112 and 122 provided on the opposite side to the magnet rows 111 and 121 is opposite to the phase between the corresponding magnet rows 111 and 121, and the adjacent magnet rows 111 And the arrangement of magnets constituting each magnet row, so that the absolute value of the attraction force (or repulsion force) generated by the magnet rows 112 and 122 and the repulsion force (or attraction force) of the magnetic force generated by the magnet rows 112 and 122 become equal. The intensity and its magnetization direction are determined. That is, magnet row 1
12 and 122 have the cycle lengths of the magnet rows 111 and 12
It is equal to the one and is shifted by a half cycle.

The magnet array 112 for canceling the attraction (or repulsion) generated by the adjacent magnet arrays 111 and 121.
And 122 are positioned so as to affect the magnetic field of the air gap and not the electron orbit.

FIG. 6 shows a magnet array 1 for canceling the attraction / repulsion force.
FIG. 9 shows magnetization directions that generate an attractive force and a repulsive force when the magnetization directions of the magnet arrays 12 and 122 and the magnetic field generating magnet arrays 111 and 121 are parallel. In FIG. 6, the magnet row 111
And when the magnets in 121 have the magnetization directions shown in (A),
The magnets corresponding to the magnet rows 112 and 122 have the magnetization directions shown in FIG. 7B, and when the magnets in the magnet rows 111 and 121 have the magnetization directions shown in FIG.
The corresponding magnet in 22 has the magnetization direction shown in (A).

By providing the magnet rows 112 and 122 configured as described above, the attractive force (or repulsive force) generated by the magnet rows 111 and 121 is changed by the repulsive force (or attractive force) generated by the magnet rows 112 and 122. Because it is mitigated, or optimally canceled out, there is no force to change the micro gap between adjacent magnet rows, so that no unnecessary changes to the magnetic field distribution occur. Further, since unnecessary force does not act on the adhesive bonding the magnet and the magnet cassette or the base yoke, the possibility that the adhesive is peeled off is reduced or eliminated. Furthermore, since there is no attractive force or repulsive force between the adjacent magnet rows, the phase between the magnet rows is quickly switched by a driving device having a smaller capacity than before, that is,
The phase change can be performed at high speed.

FIG. 7 is a view showing another configuration of the magnetization direction of the magnet row for canceling the attraction / repulsion force according to the present invention.
(A) shows a case where a suction force is generated, and (B) shows a case where a repulsion force is generated. As shown in FIG. 6, a larger attraction / repulsion force is obtained when the magnetic pole faces are opposed to each other, as shown in FIG. 6, to obtain the attraction / repulsion force. Therefore, FIG.
By adopting the magnetization direction as shown in FIG. 6, the shape of the magnet can be made smaller in order to obtain the same magnitude of attractive / repulsive force as in the case of the configuration shown in FIG. 6, and as a result, the weight of the magnet is reduced. It is more preferable because it can be used. However, also in this case, the cycle length of the magnet rows must be the same as that of the magnet rows 111 and 121. Also, the lower magnet row 111 '
And magnet array 11 for canceling the attraction / repulsion force of 121 '
The same applies to the configurations 2 'and 122'.

In the embodiment shown in FIG. 1, the position of the magnet row for canceling the attractive / repulsive force is determined by the magnet row 111 '.
And 121 ′ are on the opposite side of the air gap where the magnetic field is generated, that is, are apart from each other, but need not necessarily be at this position. If it does not affect the magnetic field generated in the air gap, it may be arranged at a position such as the side surface or the bottom surface of the magnet rows 111 and 121, for example. Also, the number of magnet rows for canceling the attraction / repulsive force may be two or more, instead of one.

FIG. 8 shows two pairs of magnet arrays 112, 122, 112 'and 122' for canceling the attraction / repulsion force adjacent to the top (or bottom) of the magnet arrays 111, 121, 111 'and 121. (A) shows an example in which an adjacent magnet row of a magnetic field generating magnet row generates an attractive force, and (B) shows an example in which an adjacent magnet row generates a repulsive force. Here is an example. 8, reference numeral 116 denotes a magnet cassette, 117 denotes a linear guide, 118 denotes a magnetic field shielding back yoke, 501 denotes a magnetic field generating magnet row 111, 1
The permanent magnets constituting each of the magnets 21, 111 ′ and 121 ′ are denoted by 502.
2, 122, 112 'and 122' are shown respectively. The magnets 501 and 502 are held and fixed to the magnet cassette 116 by an adhesive.
The back yoke 118 is fixed to the gantry 4. Since the magnet row 111 and the magnet cassette 116 are attached to the first back plate 11 and move in the horizontal direction as described above, a linear guide is provided between the magnet cassette 116 and the back yoke 118 so as to be able to slide with respect to the back yoke 118. 117 are provided. The same mechanism applies to other magnet arrays.

FIG. 9 is a view showing a structure of the magnet for canceling the attraction / repulsion force according to the present invention provided with the iron yoke for reducing the magnetic flux leakage. Attraction / repulsion canceling magnet arrays 112 and 122 with respect to magnetic field generating magnet arrays 111 and 121 (FIG. 1).
, The influence of the magnetic field exerted on the gap by the magnet arrays 112 and 122 decreases. However, if the distance is increased, the structure of the device becomes larger, and the fulcrum becomes longer.
The torque generated by the repulsive force increases, which is not preferable. Therefore, in order to arrange the magnet arrays 112 and 122 as close as possible to the magnet arrays 111 and 121 (FIG. 1) and to reduce the effect on the air gap, in one embodiment of the present invention shown in FIG. And 122 are surrounded by an iron yoke 503 to reduce magnetic flux leakage to the surroundings. In FIG. 9, reference numeral 504 denotes a magnet cassette, and reference numeral 505 denotes a linear guide, which have the same functions as those of the magnet cassette 116 and the linear guide 117 described in the embodiment in FIG. While the iron yoke 503 is fixed to the gantry 4, the magnet cassette 504 is attached to the first back plate 11.
And move in the horizontal direction.
A linear guide 505 is provided so that the 04 can slide with respect to the iron yoke 503. By providing the iron yoke as described above, the magnetic flux leakage to the gap where the vacuum duct is inserted is reduced, and as a result, the fluctuation due to the magnetic flux leakage of the variable-polarization radiation generation magnetic field generated in the gap is reduced. Is done.

FIG. 10 is a diagram for explaining an example of an arrangement structure of a linear guide according to the present invention for maintaining the gap between adjacent magnet rows more constant. FIG. 10A shows a normal case in which the linear guide is supported in only one direction,
(B) shows a case where two directions are supported by a linear guide,
(C) shows a case where a linear guide is further provided between adjacent magnet rows. Attraction / repulsion between adjacent magnet rows is reduced by the canceling magnet rows, but may not be completely canceled depending on the installation location. In order to hold such a magnet row, as shown in FIG. 10A, instead of being supported by the linear guide in only one direction, if the linear guide is supported in two or more directions, the adjacent magnet row can be further fixed. Is held. In FIG. 10A, 111 'and 112'
Denotes a lower adjacent magnet row for generating a magnetic field, 506 denotes a magnet cassette, 507 denotes a linear guide, and 508 denotes an iron yoke. The magnet array 111 'is fixed to the magnet cassette 506 with an adhesive, and the magnet cassette 506 is supported by the iron yoke 508 via a linear guide 507 provided on the bottom surface. In FIG. 10B, a linear guide 509 is also provided between the side wall of the iron yoke 508 and the side surface of the magnet cassette 506 to hold the bottom surface and the side wall in two directions, thereby further strengthening the magnet cassette 506. I support it. In FIG. 10C, a linear guide 510 is provided between the adjacent magnet rows 111 'and 112' to further suppress the change in the gap between them, and as a result, the magnetic field fluctuation in the gap portion Has the effect of reducing.

As shown in FIG. 11A, the magnets 501 are fixedly held on a magnet cassette 506 by an adhesive 511. However, the direction of the magnetic field felt by this magnet is not only the attraction force in the gap direction (y direction) but also the attraction force or repulsion force in the y direction and x direction changes continuously due to the interaction between adjacent magnets. Applied. Therefore, a shear force acts in a direction in which the strength of the adhesive decreases. Frequent phase shifts can reduce the reliability of the adhesive and, in the worst case, can cause it to peel. Therefore, as shown in FIG.
A notch 512 is provided at a diagonal position of a cross section of the magnet cassette 506, and the notch 512 is provided with a projection 51 provided at a corresponding position of the magnet cassette 506.
By mechanically fixing the magnet 3, the probability of magnet separation can be eliminated. Notches and protrusions may be provided for the magnets and magnet cassettes in the magnet row for canceling the attractive / repulsive force for the same purpose.

[0039]

Since the present invention is configured as described above, the following operational effects can be obtained.

By providing a means for canceling the attraction or repulsion generated between adjacent magnet rows by magnetic force, the attraction or repulsion generated between adjacent magnet rows is canceled by the magnetic force generated by the means. When the gap between the adjacent magnet rows is changed, or when the adjacent magnet rows are relatively moved from one direction to the opposite direction at a high speed, the force against it is reduced or eliminated. As a result, unnecessary changes in the gap between adjacent magnet rows due to the attractive force or repulsive force, which have conventionally occurred, have been eliminated, and as a result, unnecessary changes in the magnetic field distribution have not occurred. Further, since it is not necessary to drive against the attraction force or the repulsion force, it is possible to move the magnet array with a small-capacity drive device, and further, the phase can be reversed at a high speed, and at a high speed. Phase shifting is now possible. Further, when the magnet is fixed to the magnet cassette or the yoke base with an adhesive, the force applied to the adhesive is reduced, and the possibility of the adhesive being peeled is eliminated.

[Brief description of the drawings]

FIG. 1 is a diagram schematically illustrating a side surface of a variable polarization insertion light source device according to an embodiment of the present invention.

FIG. 2 is a front view as seen from line AA in FIG.

FIG. 3 is a plan view seen from line BB in FIG.

FIG. 4 is a partially exploded perspective view as viewed from C in FIG.

FIG. 5 is a partially exploded perspective view seen from D in FIG.

FIG. 6 is a diagram illustrating a magnetization direction that causes attraction or repulsion when the magnetization directions of adjacent magnets of a magnet row for attraction / repulsion canceling are parallel.

FIG. 7 is a diagram showing another configuration of the magnetization direction of the magnet row for canceling the attraction / repulsion force according to the present invention.

FIG. 8 shows an embodiment of the present invention in which a pair of magnet arrays for canceling the attraction / repulsion are provided adjacent to the upper surface (or the bottom surface) of the magnet array for generating a magnetic field. (B) shows an example in which an adjacent magnet row of a magnet row generates an attraction force, and (B) shows an example in which an adjacent magnet row generates a repulsive force.

FIG. 9 is a view showing a structure in which a magnetic flux leakage reducing iron yoke of the attraction / repulsion canceling magnet according to the present invention is provided.

10A and 10B are diagrams for explaining an example of an arrangement structure of a linear guide according to the present invention for maintaining a gap between adjacent magnet rows more constant. FIG. 10A is supported by the linear guide in only one direction. (B) shows a case where two directions are supported by a linear guide, and (C) shows a case where a linear guide is further provided between adjacent magnet rows.

11A and 11B are diagrams showing an embodiment of the present invention in which a notch is provided in a magnet and mechanically fixed to a magnet cassette in comparison with a conventional adhesive fixing method. FIG. 11A shows a conventional adhesive method.
(B) is a figure which shows the mechanical fixing method by the notch of this invention.

FIG. 12 is a diagram showing a configuration of a basic insertion light source device.

FIG. 13 is a diagram showing a conventional insertion light source device having a configuration in which two pairs of magnet rows are arranged orthogonally on four surfaces to generate circularly or elliptically polarized radiation.

FIG. 14 is a view showing a conventional insertion light source device in which magnet rows are arranged only at the upper and lower sides to generate circularly polarized radiation light.

FIG. 15 is a diagram showing a conventional variable polarization insertion light source device in which two pairs of magnet rows are arranged in a vertical direction.

[Explanation of symbols]

1, 1 ': magnet array support mechanism 11: first back plate 12: second back plate 111, 121, 111', 121 ': magnet array for generating magnetic field 112, 122, 112', 122 ': attractive / repulsive force Canceling magnet row 116: Magnet cassette 117: Linear guide 118: Back yoke 2, 2 ': Magnet row horizontal moving mechanism 21: Second back plate horizontal moving mechanism 22: First back plate horizontal moving mechanism 211, 221: Servo motor 3, 3 ': magnet row elevating mechanism 341: stepping motor 4: gantry 501, 502: magnet 503, 508: iron yoke 504, 506: magnet cassette 505, 507, 509, 510: linear guide 512: notch 513: protrusion Department

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Masayuki Kawai 1-1, Kawasaki-cho, Akashi-shi, Hyogo Prefecture Inside Akashi Plant of Kawasaki Heavy Industries, Ltd. (72) Inventor Ken Ohashi 2-5-1, Kitafu, Takefu-shi, Fukui Prefecture Shin-Etsu Chemical Co., Ltd. Magnetic Materials Laboratory (56) References JP-A-3-203200 (JP, A) JP-A-5-226144 (JP, A) JP-A-5-303000 (JP, A) JP 6-318767 (JP, A) (58) Fields investigated (Int. Cl. ⁶ , DB name) H05H 13/04 G21K 1/093 H01S 3/30

Claims (8)

(57) [Claims] 1. A magnet array comprising two pairs of permanent magnets which are vertically spaced and opposed to each other, wherein a diagonal magnet array of the two magnet arrays maintains a phase. Various types of polarized light that move relative to the adjacent magnet rows, and that the adjacent magnet rows are mechanically coupled to each other, and that the adjacent magnet rows have a mechanism to maintain the phase and change the gap between the adjacent magnet rows. A variable polarized light insertion light source device for generating radiation light, comprising: means for canceling an attractive force or a repulsive force generated between adjacent magnet rows by a magnetic force. 2. The variable polarization insertion light source device according to claim 1, wherein the canceling means is at least one pair of magnet rows in which each magnet row has an opposite phase to each of the adjacent magnet rows.
The variable polarization insertion light source device is provided at a position that does not affect the electron trajectory, and each magnet row is composed of a pair of magnet rows fixed to each of the adjacent magnet rows. 3. The variable polarized light insertion light source device according to claim 2, wherein each of the pair of magnet rows includes a plurality of magnets, and one magnet row of the pair of magnet rows and the other magnet row. A variable polarization insertion light source device, wherein the pole faces of the corresponding magnets of the magnet row face each other. 4. The variable polarization insertion light source device according to claim 2, wherein the pair of magnet rows are surrounded by magnetic flux shielding means. 5. The variable polarization insertion light source device according to claim 1, wherein the adjacent magnet rows move so as to be displaced by the same amount in opposite directions. 6. The variable polarization insertion light source device according to claim 1, wherein each of the two magnet rows is supported by a base yoke via a linear guide, and the linear guides are provided on two surfaces of the magnet row. A variable polarization insertion light source device, which is disposed. 7. The variable polarization insertion light source device according to claim 1, wherein the upper and lower two pairs of magnet rows are supported by a support base in a cantilever structure. 8. The variable polarization insertion light source device according to claim 1, wherein the shape of the magnets constituting the magnet row is a rectangular parallelepiped, and cutouts are provided at at least two places on the ridges thereof. A variable polarization insertion light source device, characterized in that a magnet row accommodating portion for accommodating the magnet is provided with a protrusion that fits into a notch of the magnet, whereby the magnet is mechanically fixed to the magnet accommodating portion.