JP2919208B2 - Diffusion furnace equipment - Google Patents
Diffusion furnace equipmentInfo
- Publication number
- JP2919208B2 JP2919208B2 JP33686992A JP33686992A JP2919208B2 JP 2919208 B2 JP2919208 B2 JP 2919208B2 JP 33686992 A JP33686992 A JP 33686992A JP 33686992 A JP33686992 A JP 33686992A JP 2919208 B2 JP2919208 B2 JP 2919208B2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- heater
- connection terminal
- thermocouple
- diffusion furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【０００１】[0001]
【産業上の利用分野】本発明は拡散炉装置に関し、特に
熱処理の熱源であるヒーターの温度制御手段を備えた拡
散炉装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a diffusion furnace apparatus, and more particularly to a diffusion furnace apparatus having a temperature control means for a heater which is a heat source for heat treatment.
【０００２】[0002]
【従来の技術】従来の拡散炉装置は、図３のブロック図
に示すように、温度制御部１と、温度検出用熱電対２
と、検出した熱起電力を補償導線へ伝える接続端子部３
と、ヒーター５への出力を制御するヒーター制御部４
と、熱源であるヒーター５とにより構成されている。2. Description of the Related Art As shown in a block diagram of FIG. 3, a conventional diffusion furnace apparatus comprises a temperature control unit 1 and a thermocouple 2 for temperature detection.
Connection terminal 3 for transmitting the detected thermoelectromotive force to the compensating conductor
And a heater controller 4 for controlling the output to the heater 5
And a heater 5 as a heat source.
【０００３】拡散炉の温度制御は、ヒーター５の温度を
熱電対２により検出し、検出した温度と設定された温度
とを温度制御部１にて比較し、検出温度と設定温度の差
が無くなるように、ヒーター制御部４により熱源である
ヒーター５を制御している。In controlling the temperature of the diffusion furnace, the temperature of the heater 5 is detected by the thermocouple 2, and the detected temperature and the set temperature are compared by the temperature control unit 1, so that there is no difference between the detected temperature and the set temperature. As described above, the heater 5 as a heat source is controlled by the heater control unit 4.
【０００４】[0004]
【発明が解決しようとする課題】この従来の温度制御方
法では、熱電対と補償導線とを接続している接続端子部
の温度が上昇すると、熱電対の素線と補償導線との接続
部も熱電対として作用する為、熱電対の検出した起電力
に、接続端子部が熱電対として作用した分の起電力が上
のせされて、モニターすべきヒーターの実温以上の温度
を表示してしまう不具合が生じ、そのためヒーターの実
温は目的の温度よりも下がってしまうという問題があっ
た。In this conventional temperature control method, when the temperature of the connection terminal connecting the thermocouple and the compensating conductor rises, the connection between the thermocouple element wire and the compensating conductor also increases. Because it acts as a thermocouple, the electromotive force detected by the thermocouple is added to the amount of electromotive force that the connection terminal has acted as a thermocouple, and the temperature that is higher than the actual temperature of the heater to be monitored is displayed. There was a problem that the actual temperature of the heater was lower than the target temperature.
【０００５】例えば、ＰＲタイプの補償導線において
は、接続点の温度が０〜１５０℃の範囲で＋３〜−７℃
の測定誤差が生じてしまう（ＪＩＳの誤差許容差）。[0005] For example, in the case of a PR type compensating lead wire, the temperature of the connection point is +3 to -7 ° C in the range of 0 to 150 ° C.
Measurement error (JIS error tolerance).
【０００６】[0006]
【課題を解決するための手段】本発明の拡散炉装置は、
装置を加熱するヒーター温度を制御するための熱電対を
備え、この熱電対素線と補償導線との接続端子部での温
度を検知する温度センサーと、この熱電対素線と補償導
線との接続端子部で生じる起電力を温度センサーの検出
温度をもとに補正する補正回路とを有している。The diffusion furnace apparatus of the present invention comprises:
A thermocouple for controlling the temperature of the heater that heats the device, a temperature sensor that detects the temperature at the connection terminal between the thermocouple wire and the compensating wire, and a connection between the thermocouple wire and the compensating wire A correction circuit that corrects the electromotive force generated at the terminal based on the temperature detected by the temperature sensor.
【０００７】[0007]
【実施例】次に本発明について図面を参照して説明す
る。図１は本発明の第１実施例のブロック図である。DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings. FIG. 1 is a block diagram of a first embodiment of the present invention.
【０００８】ヒーター５の温度は熱電対２により熱起電
力として検出され、接続端子部３で補償導線へ伝えられ
る。このとき、接続端子３の温度を接続端子部３に取り
付けた温度センサー７で検出し、補正回路６で温度セン
サー７により検出された温度をもとに接続端子部３が熱
電対として作用した起電力分を補正し、温度制御部１へ
出力する。これにより、熱電対２により検出したヒータ
ー５の実温が、接続端子部３の温度変化に関係なく正確
に温度制御部１へ入力され、ヒーター制御部４によりヒ
ーター５を制御する。The temperature of the heater 5 is detected as a thermoelectromotive force by the thermocouple 2 and transmitted to the compensating conductor at the connection terminal 3. At this time, the temperature of the connection terminal 3 is detected by the temperature sensor 7 attached to the connection terminal portion 3, and the correction circuit 6 causes the connection terminal portion 3 to act as a thermocouple based on the temperature detected by the temperature sensor 7. The power is corrected and output to the temperature control unit 1. Thus, the actual temperature of the heater 5 detected by the thermocouple 2 is accurately input to the temperature control unit 1 irrespective of the temperature change of the connection terminal unit 3, and the heater control unit 4 controls the heater 5.
【０００９】次に図２を用いた第２実施例を説明する。
図２は本発明の第２実施例のブロック図である。Next, a second embodiment will be described with reference to FIG.
FIG. 2 is a block diagram of a second embodiment of the present invention.
【００１０】ヒーター５の温度は熱電対２により、熱起
電力として検出され、接続端子部３で補償導線へ伝えら
れる。接続端子部３の横に零接点補償回路８が設置され
ており、接続端子部３の温度変化と同様に零接点補償回
路８の温度も変化する構造となっている。この零接点補
償回路８により、接続端子部３の温度補償を行ない、補
正回路６で補償導線より入力される起電力を補正し、温
度制御部１へ出力する。これにより、熱電対２により検
出したヒーター５の実温が、接続端子部３の温度変化に
関係なく正確に温度制御部１へ入力される。The temperature of the heater 5 is detected by the thermocouple 2 as a thermoelectromotive force and transmitted to the compensating conductor at the connection terminal 3. A zero-contact compensation circuit 8 is provided beside the connection terminal 3, and the temperature of the zero-contact compensation circuit 8 changes in the same manner as the temperature of the connection terminal 3 changes. The zero-contact compensation circuit 8 compensates the temperature of the connection terminal section 3, and the compensation circuit 6 compensates the electromotive force input from the compensation lead wire and outputs the compensation power to the temperature control section 1. Thus, the actual temperature of the heater 5 detected by the thermocouple 2 is accurately input to the temperature control unit 1 irrespective of the temperature change of the connection terminal unit 3.
【００１１】[0011]
【発明の効果】以上説明したように本発明は、接続端子
部の温度を検出することによって、熱電対素線と補償導
線の接続端子部が熱電対として作用する為に生じる測定
誤差分を補正する機能を持つため、接続端子部の温度が
変化しても、ヒーターの温度を安定かつ正確にモニター
出来るという効果を持ち、ヒーターの温度を安定に保つ
ことが可能である。As described above, according to the present invention, by detecting the temperature of the connection terminal, the measurement error caused by the connection terminal of the thermocouple wire and the compensating conductor acting as a thermocouple is corrected. Therefore, even if the temperature of the connection terminal changes, the temperature of the heater can be monitored stably and accurately, and the temperature of the heater can be kept stable.
【図１】本発明の第１実施例のブロック図である。FIG. 1 is a block diagram of a first embodiment of the present invention.
【図２】本発明の第２実施例のブロック図である。FIG. 2 is a block diagram of a second embodiment of the present invention.
【図３】従来の拡散炉の温度制御方式のブロック図であ
る。FIG. 3 is a block diagram of a conventional temperature control method for a diffusion furnace.
１ 温度制御部 ２ 熱電対 ３ 接続端子部 ４ ヒーター制御部 ５ ヒーター ６ 補正回路 ７ 温度センサー ８ 零接点補償回路 DESCRIPTION OF SYMBOLS 1 Temperature control part 2 Thermocouple 3 Connection terminal part 4 Heater control part 5 Heater 6 Correction circuit 7 Temperature sensor 8 Zero contact compensation circuit
Claims (1)
備え半導体基板の熱処理及び不純物の拡散を行なう拡散
炉装置において、前記ヒーター温度を検出する熱電対と
補償導線との接続端子部の温度変化を検出する温度セン
サと、この検出した温度をもとに前記接続端子部の起電
力の補正をする補正回路とを有することを特徴とする拡
散炉装置。In a diffusion furnace apparatus provided with a heater controlled by a temperature control unit to perform heat treatment of a semiconductor substrate and diffusion of impurities, a temperature change of a connection terminal portion between a thermocouple for detecting the heater temperature and a compensating conductor is provided. A diffusion furnace device comprising: a temperature sensor for detecting; and a correction circuit for correcting the electromotive force of the connection terminal based on the detected temperature.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33686992A JP2919208B2 (en) | 1992-12-17 | 1992-12-17 | Diffusion furnace equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33686992A JP2919208B2 (en) | 1992-12-17 | 1992-12-17 | Diffusion furnace equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06188208A JPH06188208A (en) | 1994-07-08 |
| JP2919208B2 true JP2919208B2 (en) | 1999-07-12 |
Family
ID=18303403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33686992A Expired - Fee Related JP2919208B2 (en) | 1992-12-17 | 1992-12-17 | Diffusion furnace equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2919208B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100219419B1 (en) * | 1996-08-26 | 1999-10-01 | 윤종용 | A heat exchange system of semiconductor fabrication apparatus |
-
1992
- 1992-12-17 JP JP33686992A patent/JP2919208B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06188208A (en) | 1994-07-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19990406 |
|
| LAPS | Cancellation because of no payment of annual fees |