JP2911112B2 - Combustion deodorization of organic silicon-containing exhaust gas - Google Patents

Combustion deodorization of organic silicon-containing exhaust gas

Info

Publication number
JP2911112B2
JP2911112B2 JP9074917A JP7491797A JP2911112B2 JP 2911112 B2 JP2911112 B2 JP 2911112B2 JP 9074917 A JP9074917 A JP 9074917A JP 7491797 A JP7491797 A JP 7491797A JP 2911112 B2 JP2911112 B2 JP 2911112B2
Authority
JP
Japan
Prior art keywords
exhaust gas
organic silicon
combustion
temperature
deodorizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP9074917A
Other languages
Japanese (ja)
Other versions
JPH10267249A (en
Inventor
耕治 五貫
英男 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chugai Ro Co Ltd
Original Assignee
Chugai Ro Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chugai Ro Co Ltd filed Critical Chugai Ro Co Ltd
Priority to JP9074917A priority Critical patent/JP2911112B2/en
Publication of JPH10267249A publication Critical patent/JPH10267249A/en
Application granted granted Critical
Publication of JP2911112B2 publication Critical patent/JP2911112B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は有機シリコン含有排
ガスの燃焼脱臭方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for burning and deodorizing exhaust gas containing organic silicon.

【0002】[0002]

【従来の技術】塗装乾燥炉の排ガスや印刷工場内の空調
排ガスには、有機シリコン、有機溶剤、リン、ヒ素、鉛
等の有害・悪臭物質が含まれている。そして、この有害
・悪臭物質のうち約95%が有機シリコンである。従
来、これら有害・悪臭物質を含む排ガスは、燃焼脱臭装
置に供給して有害・悪臭物質を燃焼除去した後、処理ガ
スとして大気に放出している。ところで、前記燃焼脱臭
装置としては、大別して、蓄熱燃焼方式と触媒燃焼方式
とがある。前記蓄熱燃焼方式は、例えば燃焼装置を有す
る燃焼室に複数の蓄熱体を設け、前記燃焼室で排ガス中
の有害・悪臭物質を燃焼させ、この燃焼ガス(処理ガ
ス)を蓄熱体に通して蓄熱する一方、前述のようにして
蓄熱した他の蓄熱体に有害・悪臭物質を含む排ガスを通
して予熱したうえで燃焼室に供給し、前記蓄熱する蓄熱
体を順次切り換えながら燃焼脱臭するものである。ま
た、前記触媒燃焼方式は、排ガス中の有害・悪臭物質を
触媒により燃焼するものである。
2. Description of the Related Art Exhaust gas from paint drying ovens and air-conditioning exhaust gas in printing plants contain harmful and odorous substances such as organic silicon, organic solvents, phosphorus, arsenic, and lead. And about 95% of the harmful and odorous substances are organic silicon. Conventionally, exhaust gases containing these harmful and odorous substances are supplied to a combustion deodorizer to burn and remove harmful and odorous substances, and then released to the atmosphere as processing gas. Incidentally, the combustion deodorizing apparatus is roughly classified into a heat storage combustion system and a catalytic combustion system. In the heat storage combustion system, for example, a plurality of heat storage bodies are provided in a combustion chamber having a combustion device, and harmful and odorous substances in exhaust gas are burned in the combustion chamber, and the combustion gas (processing gas) is passed through the heat storage body to store heat. On the other hand, the preheated exhaust gas containing harmful and malodorous substances is supplied to the other heat accumulators stored as described above and then supplied to the combustion chamber, and the heat accumulators for heat accumulation are sequentially switched to be deodorized by combustion. The catalytic combustion method burns harmful and odorous substances in exhaust gas with a catalyst.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、蓄熱燃
焼方式においては、有害・悪臭物質を含む排ガス(以
下、排ガスという)は、たとえばセラミック等の蓄熱材
を充填した蓄熱体によって予熱されるが、有機シリコン
は200℃前後で熱分解してヤニ等の粘着性物質を生成
するため、この粘着性物質が蓄熱材に付着し、さらに有
機シリコンの熱分解によりできた無機シリコンが付着し
て蓄熱体内を閉塞し、排ガス処理に支障を与える等の問
題を有する。なお、前記蓄熱体は排ガスと処理ガスとを
同一通路に順次切り換えながら供給することにより断続
的に排ガスを予熱するようにした蓄熱式の熱交換器だ
が、蓄熱式の熱交換器とせず排ガスと処理ガスとを別通
路に供給し、連続的に排ガスを予熱する熱交換器とする
こともできる。しかし、この場合であっても同様に熱交
換器を閉塞するという問題を有する。
However, in the regenerative combustion system, exhaust gas containing harmful and odorous substances (hereinafter referred to as "exhaust gas") is preheated by a regenerator filled with a regenerative material such as ceramic. Silicon is thermally decomposed at about 200 ° C. to generate a sticky substance such as tar, and this sticky substance adheres to the heat storage material, and furthermore, inorganic silicon formed by thermal decomposition of organic silicon adheres to the heat storage body. It has problems such as blockage and hindrance to exhaust gas treatment. The regenerator is a regenerative heat exchanger in which the exhaust gas and the processing gas are intermittently preheated by sequentially switching and supplying the exhaust gas and the processing gas to the same passage. It is also possible to provide a heat exchanger that supplies the processing gas to another passage and continuously preheats the exhaust gas. However, even in this case, there is a problem that the heat exchanger is similarly blocked.

【0004】一方、触媒燃焼方式では、白金触媒による
酸化反応によって生じた無機シリコンが該触媒を被覆
し、劣化させる。したがって、触媒燃焼方式において
は、アルミナ系前処理剤を白金触媒の上流側に配設し、
前記アルミナ系前処理剤で有機シリコンを酸化分解した
排ガスを白金触媒に供給して白金触媒の劣化を防止する
ようにしている。このとき、有機シリコンがアルミナ系
前処理剤と酸化反応するには排ガスを350℃以上に昇
温する必要がある。
[0004] On the other hand, in the catalytic combustion system, inorganic silicon produced by an oxidation reaction using a platinum catalyst coats and degrades the catalyst. Therefore, in the catalytic combustion system, an alumina-based pretreatment agent is disposed upstream of the platinum catalyst,
Exhaust gas obtained by oxidatively decomposing organic silicon with the alumina pretreatment agent is supplied to a platinum catalyst to prevent the platinum catalyst from deteriorating. At this time, it is necessary to raise the temperature of the exhaust gas to 350 ° C. or more for the organic silicon to undergo an oxidation reaction with the alumina-based pretreatment agent.

【0005】すなわち、図2に示すように、たとえば、
有機シリコンとトルエンとを含む塗装乾燥炉の排ガスを
フィルタ1に通し、排ガス中に混入している異物ダスト
等を除去したのちブロワ2により排ガスを予熱用熱交換
器3に供給し、該予熱用熱交換器3で約265℃に予熱
してアルミナ系前処理剤4に供給する。この場合、前記
アルミナ系前処理剤4は有機シリコンと反応するのに3
50℃以上の温度が必要であるため、予熱バーナ5によ
り排ガスを350℃まで昇温してアルミナ系前処理剤4
に供給し、有機シリコンを予め除去する。そして、有機
シリコンを除去された排ガスは白金触媒6に至り、排ガ
ス中の有機溶剤である、たとえばトルエン等の有害・悪
臭物質が燃焼して脱臭され、トルエンの濃度が自燃限界
である1300ppmの場合、約510℃の処理ガスと
なり、前記予熱用熱交換器3を通って煙突7から放出さ
れる。なお、トルエンは1m3Nあたりの濃度が100
0ppmの時、燃焼による温度上昇が126.4℃であ
る。
[0005] That is, as shown in FIG.
Exhaust gas from a coating and drying furnace containing organic silicon and toluene is passed through a filter 1 to remove foreign particles and the like mixed in the exhaust gas. It is preheated to about 265 ° C. in the heat exchanger 3 and supplied to the alumina pretreatment agent 4. In this case, the alumina-based pretreatment agent 4 needs 3 to react with the organic silicon.
Since a temperature of 50 ° C. or more is required, the temperature of the exhaust gas is increased to 350 ° C. by the preheating burner 5 and the alumina pretreatment agent 4
To remove organic silicon in advance. Then, the exhaust gas from which the organic silicon has been removed reaches the platinum catalyst 6, and the organic solvent in the exhaust gas, for example, a harmful or odorous substance such as toluene, is burned and deodorized. , And is discharged from the chimney 7 through the preheating heat exchanger 3. The concentration of toluene per 1 m 3 N is 100.
At 0 ppm, the temperature rise due to combustion is 126.4 ° C.

【0006】しかし、この方式では、排ガスを350℃
以上に予熱してアルミナ系前処理剤4に供給する必要が
あり、そのためのエネルギーを必要とするうえ、排ガス
中の有機溶剤等が白金触媒6で酸化分解(燃焼)するた
め、処理ガスが高温になる。さらに、アルミナ系前処理
剤4は高価なため、無機シリコンで被覆されて処理能力
が低下するごとに交換しなければならないのでランニン
グコストが高くなるという問題があった。
However, in this method, the exhaust gas is heated at 350 ° C.
It is necessary to preheat and supply to the alumina-based pretreatment agent 4, which requires energy. In addition, since the organic solvent and the like in the exhaust gas are oxidized and decomposed (combusted) by the platinum catalyst 6, the processing gas is heated to a high temperature. become. Furthermore, since the alumina-based pretreatment agent 4 is expensive, it has to be replaced every time it is coated with inorganic silicon and its processing ability is reduced, so that there is a problem that the running cost is increased.

【0007】そこで、本発明者らは、前記各方式の欠点
を除去するため、前処理剤について検討した結果、活性
炭を主成分とする多孔質吸着体に注目した。この吸着体
は、有機シリコン以外の悪臭物質も吸着するが、有機シ
リコンは比較的沸点が高くて分子量も大きいため、沸点
が低くて分子量の小さい悪臭物質より吸着されやすく、
先に吸着している悪臭物質を追い出して選択的に吸着
し、また、前記吸着体は、アルミナ系前処理剤では劣化
の著しい20〜100℃においても充分吸着性能を維持
することが判明した。したがって、本発明は、排ガス中
の有機シリコンを活性炭等の多孔質吸着体で吸着除去し
てから燃焼することにより前記課題を解決する有機シリ
コン含有排ガスの燃焼脱臭方式を提供することを目的と
する。
[0007] The inventors of the present invention have studied a pretreatment agent in order to eliminate the disadvantages of each of the above methods, and as a result, have paid attention to a porous adsorbent containing activated carbon as a main component. This adsorbent also adsorbs malodorous substances other than organic silicon, but since organic silicon has a relatively high boiling point and a large molecular weight, it is easier to adsorb than malodorous substances with a low boiling point and a small molecular weight,
It has been found that the previously adsorbed malodorous substance is driven out and selectively adsorbed, and that the adsorbent maintains sufficient adsorption performance even at 20 to 100 ° C. where the alumina-based pretreatment agent is significantly deteriorated. Therefore, an object of the present invention is to provide a combustion deodorization method for an organic silicon-containing exhaust gas that solves the above-mentioned problem by adsorbing and removing organic silicon in the exhaust gas with a porous adsorbent such as activated carbon and then burning. .

【0008】[0008]

【課題を解決するための手段】本発明は、前記目的を達
成するために、有機シリコンが含まれる排ガスを燃焼脱
臭する有機シリコン含有排ガスの燃焼脱臭方法におい
て、前記排ガス中の有機シリコンを予め吸着除去すると
ともに、この排ガスを燃焼脱臭したあとの処理ガス温度
が所定温度を維持するように前記排ガスの燃焼脱臭装置
への供給温度を調整して燃焼脱臭するようにしたもので
ある。また、前記有機シリコンを活性炭で吸着除去した
排ガスとこの排ガスを白金触媒で燃焼脱臭した処理ガス
とを熱交換して、前記有機シリコンを吸着除去した排ガ
スを所定温度に昇温するようにしたものである。
According to the present invention, there is provided a method of burning and deodorizing an exhaust gas containing organic silicon, wherein the organic silicon in the exhaust gas is adsorbed in advance. In addition to removing the exhaust gas, the exhaust gas is burned and deodorized by adjusting the supply temperature of the exhaust gas to the combustion deodorizing device so that the temperature of the processing gas after the combustion is deodorized is maintained at a predetermined temperature. Further, heat exchange is performed between an exhaust gas obtained by adsorbing and removing the organic silicon with activated carbon and a processing gas obtained by burning and deodorizing the exhaust gas with a platinum catalyst, so that the exhaust gas obtained by adsorbing and removing the organic silicon is heated to a predetermined temperature. It is.

【0009】[0009]

【発明の実施の形態】つぎに、本発明の実施形態を図1
にしたがって説明する。図において、有機シリコンとト
ルエン等を含有する排ガス(20℃)は、フィルタ11
により異物を除去されたのち、ブロワ12により活性炭
を主成分とする多孔質吸着体からなる前処理剤14に供
給され、該前処理剤14を通過する間に有機シリコンが
前処理剤14に吸着除去される。その後、定常運転中の
燃焼脱臭装置では、排ガスが予熱用熱交換器13で処理
ガスと熱交換することにより約190℃に予熱されて白
金触媒16に至る。この白金触媒16において前記排ガ
スは既に白金触媒との酸化反応に必要な190℃まで昇
温しているため、排ガス中の有機溶剤等の可燃分を燃焼
して約350℃の処理ガスとなり、前述のように予熱用
熱交換器13で排ガスと熱交換したのち煙突17から排
出される。
FIG. 1 shows an embodiment of the present invention.
It is explained according to. In the figure, an exhaust gas (20 ° C.) containing organic silicon, toluene, etc.
After the foreign matter is removed by the blower 12, the foreign matter is supplied to the pretreatment agent 14 composed of a porous adsorbent containing activated carbon as a main component by the blower 12, and the organic silicon is adsorbed to the pretreatment agent 14 while passing through the pretreatment agent 14. Removed. Thereafter, in the combustion deodorization apparatus during the steady operation, the exhaust gas is preheated to about 190 ° C. by exchanging heat with the processing gas in the preheating heat exchanger 13 and reaches the platinum catalyst 16. In the platinum catalyst 16, since the exhaust gas has already been heated to 190 ° C. necessary for an oxidation reaction with the platinum catalyst, combustible components such as organic solvents in the exhaust gas are burned to become a processing gas at about 350 ° C. After the heat exchange with the exhaust gas in the preheating heat exchanger 13 as described above, the exhaust gas is discharged from the chimney 17.

【0010】なお、有機溶剤が、たとえば前述のように
トルエンであると、排ガス中のトルエン濃度が白金触媒
16での自燃限界濃度である1300ppm未満のと
き、あるいは燃焼脱臭装置が定常運転となっていない作
業初期において排ガスが低温のため自燃しないときは、
予熱バーナ15を燃焼させて排ガス温度を190℃まで
昇温する必要がある。そして、白金触媒16で有機溶剤
が燃焼を開始すると、白金触媒16自体の温度が上昇す
るとともに排ガス温度も上昇するので、その後は、白金
触媒16を出た処理ガスの温度により予熱バーナ15の
燃焼量を調節して定常運転を維持する(前記のように濃
度が1300ppmのトルエンの場合、白金触媒16を
出た処理ガスの温度が350℃となるように調節す
る)。この場合においても、予熱バーナ15は従来の触
媒燃焼方式のように常に燃焼させるものではないので従
来のものに比べて省エネルギーを図ることができる。な
お、前記予熱用熱交換器13に代えて、蓄熱式の熱交換
器とし、排ガスと燃焼ガスとを交互に連通させるか、あ
るいは蓄熱体を回転させて燃焼ガスにより蓄熱された部
分に排ガスを供給して予熱するようにしてもよい。ま
た、多孔質吸着体として活性炭のかわりに疎水性ゼオラ
イト等を使用してもよい。
If the organic solvent is, for example, toluene as described above, the toluene concentration in the exhaust gas is lower than the self-flammable limit concentration of 1,300 ppm in the platinum catalyst 16, or the combustion deodorizer is in a steady operation. If the exhaust gas is not self-burning due to low temperature in the early stage of work,
It is necessary to burn the preheating burner 15 to raise the exhaust gas temperature to 190 ° C. When the organic solvent starts burning on the platinum catalyst 16, the temperature of the platinum catalyst 16 itself rises and the exhaust gas temperature also rises. Thereafter, the combustion of the preheating burner 15 depends on the temperature of the processing gas leaving the platinum catalyst 16. The amount is adjusted to maintain a steady operation (in the case of toluene having a concentration of 1300 ppm as described above, the temperature of the processing gas leaving the platinum catalyst 16 is adjusted to 350 ° C.). Also in this case, since the preheating burner 15 does not always burn as in the conventional catalytic combustion system, energy saving can be achieved as compared with the conventional one. Note that, instead of the preheating heat exchanger 13, a regenerative heat exchanger is used, and the exhaust gas and the combustion gas are alternately communicated with each other, or the regenerator is rotated so that the exhaust gas is stored in a portion stored by the combustion gas. It may be supplied and preheated. Further, a hydrophobic zeolite or the like may be used instead of activated carbon as the porous adsorbent.

【0011】さらに、前記実施の態様では、触媒燃焼方
式に適用したものであるが、蓄熱燃焼方式であっても多
孔質吸着体を蓄熱体の上流側に設けて、有機シリコンを
除去した排ガスを予熱するようにすればよい。
Furthermore, in the above embodiment, the present invention is applied to a catalytic combustion system. However, even in a heat storage combustion system, a porous adsorbent is provided on the upstream side of the heat storage body to remove exhaust gas from which organic silicon has been removed. What is necessary is just to preheat.

【0012】[0012]

【発明の効果】以上の説明で明らかなように、本発明に
よれば、排ガス中から有機シリコンを選択的に吸着除去
したのち燃焼脱臭するようにしたため、脱臭装置が蓄熱
燃焼方式にあってはヤニや無機シリコンの付着による蓄
熱体の閉塞を防止し、また、触媒燃焼方式にあっては、
前処理剤が従来のアルミナ系のように酸化処理するもの
でなく常温で有機シリコンを吸着除去するものであるた
め、アルミナ系を使用するもののように前処理段階で排
ガスを350℃まで昇温する必要がなくそれだけ省エネ
ルギーを図ることができる。さらに、本発明において
は、前記有機シリコンを除去された排ガスを燃焼脱臭装
置へ供給するにあたりこの排ガスを予熱することがある
が、この予熱は燃焼脱臭されたあとの処理ガス温度に基
づき行なうもので、処理ガスの温度によっては予熱を行
なう必要がない(常に予熱しない)ため従来のものに比
べて省エネルギーを図ることができる。なお、白金触媒
での酸化分解に必要な温度(190℃)まで排ガスを昇
温するのに処理ガスとの熱交換を利用すれば、バーナを
定常燃焼する必要がなくなり、一段の省エネルギーを図
ることができる。しかも前処理剤を活性炭にすれば、ア
ルミナ系のものに比べて安価であるためランニングコス
トを大幅に軽減することができる。
As is apparent from the above description, according to the present invention, the organic silicon is selectively adsorbed and removed from the exhaust gas and then deodorized by combustion. Prevent clogging of the heat storage body due to adhesion of tar and inorganic silicon, and in the catalytic combustion system,
Since the pretreatment agent does not oxidize as in the conventional alumina system, but adsorbs and removes organic silicon at room temperature, the exhaust gas is heated to 350 ° C in the pretreatment stage as in the case of using an alumina system. There is no need to save energy. Further, in the present invention, when the exhaust gas from which the organic silicon has been removed is supplied to a combustion deodorization apparatus, the exhaust gas may be preheated. This preheating is performed based on the processing gas temperature after the combustion deodorization. Depending on the temperature of the processing gas, it is not necessary to perform preheating (it is not always preheated), so that energy saving can be achieved as compared with the conventional one. If heat exchange with the processing gas is used to raise the temperature of the exhaust gas to the temperature required for oxidative decomposition with a platinum catalyst (190 ° C.), it is not necessary to steadily burn the burner, thereby further saving energy. Can be. In addition, if activated carbon is used as the pretreatment agent, the cost is lower than that of an alumina-based material, so that the running cost can be greatly reduced.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明にかかる有機シリコン含有排ガスの燃
焼脱臭方法を示す図。
FIG. 1 is a view showing a method for burning and deodorizing an organic silicon-containing exhaust gas according to the present invention.

【図2】 従来の有機シリコン含有排ガスの燃焼脱臭方
法を示す図。
FIG. 2 is a diagram showing a conventional method for deodorizing combustion of an organic silicon-containing exhaust gas.

【符号の説明】[Explanation of symbols]

13…予熱用熱交換器、14…前処理剤(多孔質吸着
体)、15…予熱バーナ、16…白金触媒。
13: heat exchanger for preheating, 14: pretreatment agent (porous adsorbent), 15: preheating burner, 16: platinum catalyst.

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6,DB名) F23G 7/06 ZAB F23G 7/06 101 F23G 7/06 102 F23G 7/06 103 ──────────────────────────────────────────────────の Continued on the front page (58) Field surveyed (Int.Cl. 6 , DB name) F23G 7/06 ZAB F23G 7/06 101 F23G 7/06 102 F23G 7/06 103

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 有機シリコンが含まれる排ガスを燃焼脱
臭する有機シリコン含有排ガスの燃焼脱臭方法におい
て、 前記排ガス中の有機シリコンを予め吸着除去するととも
に、この排ガスを燃焼脱臭したあとの処理ガス温度が所
定温度を維持するように前記排ガスの燃焼脱臭装置への
供給温度を調整して燃焼脱臭することを特徴とする有機
シリコン含有排ガスの燃焼脱臭方法。
1. A method for deodorizing an organic silicon-containing exhaust gas by burning and deodorizing an exhaust gas containing an organic silicon, wherein the organic silicon in the exhaust gas is adsorbed and removed in advance, and the temperature of the processing gas after burning and deodorizing the exhaust gas is reduced. A combustion deodorization method for an organic silicon-containing exhaust gas, comprising adjusting a supply temperature of the exhaust gas to a combustion deodorization device so as to maintain a predetermined temperature and performing combustion deodorization.
【請求項2】 前記有機シリコンを活性炭で吸着除去し
た排ガスとこの排ガスを白金触媒で燃焼脱臭した処理ガ
スとを熱交換して、前記有機シリコンを吸着除去した排
ガスを所定温度に昇温することを特徴とする請求項1に
記載の有機シリコン含有排ガスの燃焼脱臭方法。
2. An exhaust gas obtained by adsorbing and removing the organic silicon with activated carbon and a treatment gas obtained by burning and deodorizing the exhaust gas with a platinum catalyst to heat the exhaust gas from which the organic silicon is adsorbed and removed to a predetermined temperature. The method for deodorizing combustion of an organic silicon-containing exhaust gas according to claim 1, characterized in that:
JP9074917A 1997-03-27 1997-03-27 Combustion deodorization of organic silicon-containing exhaust gas Expired - Fee Related JP2911112B2 (en)

Priority Applications (1)

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JP9074917A JP2911112B2 (en) 1997-03-27 1997-03-27 Combustion deodorization of organic silicon-containing exhaust gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9074917A JP2911112B2 (en) 1997-03-27 1997-03-27 Combustion deodorization of organic silicon-containing exhaust gas

Publications (2)

Publication Number Publication Date
JPH10267249A JPH10267249A (en) 1998-10-09
JP2911112B2 true JP2911112B2 (en) 1999-06-23

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US7727923B2 (en) 2004-03-30 2010-06-01 Nikki-Universal Co., Ltd. Catalyst for exhaust gas purification and method for exhaust gas purification
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CN101839492B (en) * 2010-06-02 2011-12-14 蓝星硅材料有限公司 Method for recycling waste heat of silica fume
JP5982958B2 (en) * 2012-03-30 2016-08-31 東洋紡株式会社 Gas processing system containing organic solvent including organic silicon
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