JP2907829B2 - Gas discharge tube lighting method - Google Patents

Gas discharge tube lighting method

Info

Publication number
JP2907829B2
JP2907829B2 JP62311921A JP31192187A JP2907829B2 JP 2907829 B2 JP2907829 B2 JP 2907829B2 JP 62311921 A JP62311921 A JP 62311921A JP 31192187 A JP31192187 A JP 31192187A JP 2907829 B2 JP2907829 B2 JP 2907829B2
Authority
JP
Japan
Prior art keywords
discharge
voltage
discharge tube
circuit
gas discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62311921A
Other languages
Japanese (ja)
Other versions
JPH01154495A (en
Inventor
勇 織田
信男 浜本
哲郎 小野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62311921A priority Critical patent/JP2907829B2/en
Publication of JPH01154495A publication Critical patent/JPH01154495A/en
Application granted granted Critical
Publication of JP2907829B2 publication Critical patent/JP2907829B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02BCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B20/00Energy efficient lighting technologies, e.g. halogen lamps or gas discharge lamps

Landscapes

  • Circuit Arrangements For Discharge Lamps (AREA)
  • Discharge-Lamp Control Circuits And Pulse- Feed Circuits (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はガス封入形放電管に係り、特にタウンゼント
放電を用いた放電灯に好適な放電点灯方式に関する。 〔従来の技術〕 従来、ガス封入形放電管の点灯回路方式については
「照明ハンドブツク、(1978年)第160頁から第203頁
(オーム社刊)」において論じられている。本文献で
は、けい光灯の点灯方式について論じている。 〔発明が解決しようとする問題点〕 上記従来技術は微少電流のタウンゼント放電の点灯に
ついては論述されておらず、自動的にタウンゼント放電
を開始する技術は確立されていなかつた。 本発明の目的は自動的にタウンゼント放電を開始する
ことにある。またさらに点灯後紫外線の量を制御するこ
とにある。 〔問題点を解決するための手段〕 上記目的は、ガス放電管の陽極と陰極間に直流電圧と
パルス電圧の複合波形を印加することより達成される。 また、紫外線量の制御については点灯後紫外線の量を
紫外線検出器を介し印加電圧を制御することにより達成
される。 〔作用〕 放電管内に封入したガスを陽極と陰極間より印加した
直流電圧で電離する。そこで該直流電圧の値は、電離で
生じる荷電粒子を残存させるに必要な最低電圧にする。
該直流電圧印加後管内に残つている荷電粒子をパルス状
の電圧で連続的に励起する。この励起によりパルス電圧
の立上り時にブレークダウンを起し、放電管に電流が流
れる。これにより、該荷電粒子はエネルギー準位が変化
し、紫外線を放出して管壁のけい光体を発光させる。 このように直流電圧とパルス電圧の印加時間を組み合
せることにより放電を自動的に開始することができる。 また本発明では、放電により発生した紫外線を検出
し、放電管に流れる電流を制御する。このため、印加パ
ルス電圧の尖頭値やパルスの周期を可変し、紫外線量を
制御する。 〔実施例〕 以下、本発明の一実施例を第1図を用いて説明する。
第1図は本発明を説明する構成図でスイツチ100がオン
すると、直流電圧印加タイミング回路101が動作し、第
2図のVDCなるタイミング信号をあらかじめ決めたTDC
間だけ出力する。TDC期間を終了すると同時に信号線110
を通し、パルスタイミング発生回路102に起動を掛け
る。パルスタイミング発生回路では第2図に示すVPなる
パルス状の信号を発生する。パルス信号VPは時間が経過
するに従い、パルスの周期が変化する波形を出し、オア
回路103により直流電圧印加タイミング回路101のVDC
号とVp信号の論理和を取つてドライバ回路104へ供給す
る。ドライバ回路104では上記タイミングを受け高圧電
圧を放電管部106に印加する。 ドライバ回路104の回路例を第3図に示す。該論理和
の信号をFET(電界効果トランジスタ)のゲートGに印
加する。FETのドレインD側に放電管302に直列に抵抗30
3を接続し、さらにこれに並列に抵抗301を接続する。抵
抗301は放電管302の陰極Kの電位を決定するために取付
けてあり、抵抗303は放電の安定化をはかる目的で付け
てある。 ゲート電圧を印加することによりドレインDとソース
S間の電圧が低くなりFETを完全にオンし、ドレインD
はグランドレベルになる。これにより放電管106の陽極
Aと陰極Kに高圧電圧が印加され、荷電粒子を放電管30
2内に生成する。ここでの直流電圧印加期間TDCは放電管
内のガス圧やガス種類によつて変化するが、グロー放電
を発生させない範囲でかつ、荷電粒子を生成する時間と
する。 次に第2図のVPに従つたタイミングのパルス高電圧を
ドライバ回路104を介して放電管部106に印加する。この
高電圧パルスTON期間に放電管302内にタウンゼント放電
が前記TDC発生した荷電粒子を種に発生する。たとえ
ば、放電管長さ10cm,幅2.5cmでガスとして水銀と(6×
10-3Torr),アルゴン(3Torr)を封入し、立上り50×1
0-9秒のパルス電圧を印加した時タウンゼント放電が発
生したことを確認している。これにより該放電で管内に
紫外線が発生し、管外へ放射する。 発生した紫外線は、第1図の検出器回路107で検出す
る。目的の放射紫外線量に比例した電圧VSETをあらかじ
め判別回路111に設定しておく。パルス状の紫外線を時
間的に平均化するため,積分回路挿入した紫外線検出回
路107で検出する。紫外線検出回路107からの信号第2図
のVBを信号線108を介して判別回路111に入れ、設定値V
SETと比較判定をする。その結果設定値以下の時には、
信号線109を介して,パルスタイミング回路102に電圧を
与え、パルスの周期を小さく(周波数を高く)する。周
波数が高くなると放電による紫外線の量は増大し、紫外
線検出回路107の信号が増大する。そこで設定値と紫外
線検出回路107からの信号VBを常に比較し、設定値以上
になつた時にパルスの周期を可変する電圧信号を停止
し、保持する。これより、あらかじめ設定した紫外線量
の放射を得ることができる。 さらに本発明では、放電の自動点灯回路や紫外線量制
御回路にコイルを必要としない。従つて回路のIC化が容
易となる。 〔発明の効果〕 以上のように本発明の点灯方式によれば、タウンゼン
ト放電を自動的に発生し、さらに紫外線量を制御するこ
とができるため、CVD装置やレジスト感光装置の光源と
して用いて極めて効果的である。
The present invention relates to a gas-filled discharge tube, and more particularly to a discharge lighting method suitable for a discharge lamp using Townsend discharge. [Prior Art] Conventionally, a lighting circuit system for a gas-filled discharge tube has been discussed in "Lighting Handbook, (1978), pp. 160-203 (published by Ohmsha)". In this document, the lighting method of the fluorescent lamp is discussed. [Problems to be Solved by the Invention] The above-mentioned prior art does not discuss the lighting of the townsend discharge with a small current, and the technology of automatically starting the townsend discharge has not been established. An object of the present invention is to automatically start Townsend discharge. Another object is to control the amount of ultraviolet light after lighting. [Means for Solving the Problems] The above object is achieved by applying a composite waveform of a DC voltage and a pulse voltage between an anode and a cathode of a gas discharge tube. Further, the control of the amount of ultraviolet rays is achieved by controlling the applied voltage of the amount of ultraviolet rays after lighting up via an ultraviolet ray detector. [Operation] The gas sealed in the discharge tube is ionized by a DC voltage applied between the anode and the cathode. Therefore, the value of the DC voltage is set to the minimum voltage required for remaining charged particles generated by ionization.
After the application of the DC voltage, the charged particles remaining in the tube are continuously excited by a pulsed voltage. This excitation causes a breakdown when the pulse voltage rises, and a current flows through the discharge tube. As a result, the energy level of the charged particles changes, and the charged particles emit ultraviolet light to cause the phosphor on the tube wall to emit light. In this way, the discharge can be automatically started by combining the application time of the DC voltage and the pulse voltage. Further, in the present invention, the ultraviolet ray generated by the discharge is detected, and the current flowing through the discharge tube is controlled. Therefore, the peak value of the applied pulse voltage and the cycle of the pulse are varied to control the amount of ultraviolet light. Embodiment One embodiment of the present invention will be described below with reference to FIG.
FIG. 1 is a block diagram for explaining the present invention. When a switch 100 is turned on, a DC voltage application timing circuit 101 operates and outputs a timing signal of V DC shown in FIG. 2 for a predetermined T DC period. At the end of the TDC period, the signal line 110
, The pulse timing generation circuit 102 is activated. A pulse timing generation circuit generates a pulse signal consisting V P shown in Figure 2. According pulse signal V P is the passage of time, issues a waveform period of the pulse is changed, the supply to the connexion driver circuit 104 preparative logical sum of V DC signal and V p signal of the DC voltage application timing circuit 101 by an OR circuit 103 I do. In response to the above timing, the driver circuit 104 applies a high voltage to the discharge tube unit 106. FIG. 3 shows a circuit example of the driver circuit 104. The signal of the logical sum is applied to the gate G of the FET (field effect transistor). A resistor 30 is connected in series with the discharge tube 302 on the drain D side of the FET.
3, and a resistor 301 is connected in parallel with the connection. The resistor 301 is provided for determining the potential of the cathode K of the discharge tube 302, and the resistor 303 is provided for the purpose of stabilizing the discharge. By applying the gate voltage, the voltage between the drain D and the source S decreases, and the FET is completely turned on.
Goes to ground level. As a result, a high voltage is applied to the anode A and the cathode K of the discharge tube 106, and charged particles are discharged from the discharge tube 30.
Generate within 2. Here, the DC voltage application period T DC varies depending on the gas pressure and gas type in the discharge tube, but is set to a range in which glow discharge is not generated and a time for generating charged particles. Then a pulse high voltage従Tsuta timing through the driver circuit 104 to the V P of FIG. 2 is applied to the discharge tube section 106. The Townsend discharge occurs seed the T DC generated charged particles to a high voltage pulse T ON period into the discharge tube 302. For example, a mercury (6 ×
10 -3 Torr) and argon (3 Torr) are sealed and the rise is 50 × 1
0 -9 seconds Townsend discharge when a pulse voltage is applied to it is confirmed that has occurred. As a result, ultraviolet rays are generated inside the tube by the discharge and radiate outside the tube. The generated ultraviolet light is detected by the detector circuit 107 shown in FIG. A voltage V SET in proportion to a target amount of emitted ultraviolet light is set in the discriminating circuit 111 in advance. In order to temporally average the pulsed ultraviolet light, the ultraviolet light is detected by an ultraviolet light detection circuit 107 inserted with an integration circuit. The V B of the signal a second view of the ultraviolet detector 107 via the signal line 108 placed on the discrimination circuit 111, setting value V
Make a comparison with SET . As a result, when it is below the set value,
A voltage is applied to the pulse timing circuit 102 via the signal line 109 to reduce the pulse cycle (increase the frequency). As the frequency increases, the amount of ultraviolet light due to discharge increases, and the signal of the ultraviolet light detection circuit 107 increases. Therefore always compares the signal V B from the setting value and an ultraviolet detector circuit 107, and stops the voltage signal for varying the period of the pulse when has decreased to less than the set value, holds. As a result, radiation of a predetermined amount of ultraviolet light can be obtained. Further, in the present invention, no coil is required for the automatic discharge lighting circuit and the ultraviolet ray amount control circuit. Therefore, the circuit can be easily integrated into an IC. [Effects of the Invention] As described above, according to the lighting method of the present invention, a townsend discharge is automatically generated and the amount of ultraviolet rays can be controlled. It is effective.

【図面の簡単な説明】 第1図は本発明の一実施例の構成を示すブロツク図、第
2図は第1図で使用する信号のタイミングおよび波形
図、第3図は第1図中のドライバ回路104の一例を示す
回路図である。 100…スイツチ、101…直流電圧印加タイミング回路、10
2…パルスタイミング発生回路、103…オア回路、104…
ドライバ回路、105…高電圧印加回路、106…放電管部、
107…紫外線検出回路、111…判別回路。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing the configuration of an embodiment of the present invention, FIG. 2 is a timing chart and waveform diagram of signals used in FIG. 1, and FIG. FIG. 2 is a circuit diagram illustrating an example of a driver circuit 104. 100: switch, 101: DC voltage application timing circuit, 10
2… Pulse timing generation circuit, 103… OR circuit, 104…
Driver circuit, 105: high voltage application circuit, 106: discharge tube section,
107 ... ultraviolet ray detection circuit, 111 ... discrimination circuit.

フロントページの続き (56)参考文献 特開 昭50−113068(JP,A) 特開 昭53−100676(JP,A) 特開 昭61−71596(JP,A) 特開 昭59−60881(JP,A) (58)調査した分野(Int.Cl.6,DB名) H05B 41/14 - 41/234 H05B 41/26 - 41/30 Continuation of the front page (56) References JP-A-50-113068 (JP, A) JP-A-53-100676 (JP, A) JP-A-61-71596 (JP, A) JP-A-59-60881 (JP, A) , A) (58) Field surveyed (Int.Cl. 6 , DB name) H05B 41/14-41/234 H05B 41/26-41/30

Claims (1)

(57)【特許請求の範囲】 1.管壁にけい光体が塗布されかつガスを封入したガス
放電管と、前記放電管の駆動回路にグロー放電を発生さ
せずかつ荷電粒子を生成する期間出力する直流電圧とタ
ウゼント放電を発生維持するパルス電圧を得る手段と、
前記放電管からの紫外線を検出する検出手段と、前記検
出手段からの信号に基づいて前記パルス電圧の間隔を制
御する手段とを具備したことを特徴とするガス放電駆動
装置。 2.前記駆動回路として電界効果トランジスタであるこ
とを特徴とする特許請求の範囲第1項記載のガス放電駆
動装置。 3.前記パルス電圧の立ち上がり時間が50ナノ秒程度で
あることを特徴とする特許請求の範囲第1項記載のガス
放電駆動装置。
(57) [Claims] A gas discharge tube in which a phosphor is applied to a tube wall and gas is sealed, and a glow discharge is not generated in a driving circuit of the discharge tube, and a DC voltage and a Tausen discharge which are output during generation of charged particles are generated and maintained. Means for obtaining a pulse voltage;
A gas discharge driving device comprising: a detecting unit for detecting ultraviolet rays from the discharge tube; and a unit for controlling an interval between the pulse voltages based on a signal from the detecting unit. 2. 2. The gas discharge driving device according to claim 1, wherein the driving circuit is a field effect transistor. 3. 2. The gas discharge driving device according to claim 1, wherein the rise time of the pulse voltage is about 50 nanoseconds.
JP62311921A 1987-12-11 1987-12-11 Gas discharge tube lighting method Expired - Lifetime JP2907829B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62311921A JP2907829B2 (en) 1987-12-11 1987-12-11 Gas discharge tube lighting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62311921A JP2907829B2 (en) 1987-12-11 1987-12-11 Gas discharge tube lighting method

Publications (2)

Publication Number Publication Date
JPH01154495A JPH01154495A (en) 1989-06-16
JP2907829B2 true JP2907829B2 (en) 1999-06-21

Family

ID=18023026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62311921A Expired - Lifetime JP2907829B2 (en) 1987-12-11 1987-12-11 Gas discharge tube lighting method

Country Status (1)

Country Link
JP (1) JP2907829B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5666031A (en) * 1994-03-16 1997-09-09 Osram Sylvania Inc. Neon gas discharge lamp and method of pulsed operation
US5923118A (en) * 1997-03-07 1999-07-13 Osram Sylvania Inc. Neon gas discharge lamp providing white light with improved phospher

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5910035B2 (en) * 1974-02-14 1984-03-06 松下電工株式会社 discharge lamp lighting device
JPS53100676A (en) * 1977-02-15 1978-09-02 Grace W R & Co Method of and device for generating light from gassfilled tube
JPH0247836B2 (en) * 1982-09-29 1990-10-23 Toshiba Electric Equip HODENTOTENTOSOCHI
JPS6171596A (en) * 1984-09-13 1986-04-12 松下電工株式会社 Device for firing discharge lamp

Also Published As

Publication number Publication date
JPH01154495A (en) 1989-06-16

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