JP2874386B2 - Board appearance inspection method - Google Patents

Board appearance inspection method

Info

Publication number
JP2874386B2
JP2874386B2 JP3123644A JP12364491A JP2874386B2 JP 2874386 B2 JP2874386 B2 JP 2874386B2 JP 3123644 A JP3123644 A JP 3123644A JP 12364491 A JP12364491 A JP 12364491A JP 2874386 B2 JP2874386 B2 JP 2874386B2
Authority
JP
Japan
Prior art keywords
bad
camera
substrate
board
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP3123644A
Other languages
Japanese (ja)
Other versions
JPH04351000A (en
Inventor
暢史 戸倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP3123644A priority Critical patent/JP2874386B2/en
Publication of JPH04351000A publication Critical patent/JPH04351000A/en
Application granted granted Critical
Publication of JP2874386B2 publication Critical patent/JP2874386B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、カメラによる外観検査
と、バッドマーカーによるバッドマークの付与を作業性
よく行うための基板の外観検査方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for inspecting the appearance of a substrate for performing an appearance inspection using a camera and a bad mark with a bad marker with good workability.

【0002】[0002]

【従来の技術】電子部品実装装置により、基板に電子部
品(以下チップという)を搭載した後、チップの位置ず
れ、欠品、半田付状態等の基板検査が行われる。従来、
この基板検査は、一般に作業者の目視により行われてい
たが、近年は、カメラやレーザ装置などの光学手段によ
る自動検査が次第に行われるようになってきている。
2. Description of the Related Art After an electronic component (hereinafter, referred to as a chip) is mounted on a substrate by an electronic component mounting apparatus, a board inspection such as a displacement of the chip, a missing item, and a soldered state is performed. Conventionally,
This board inspection is generally performed visually by an operator, but in recent years, an automatic inspection using an optical unit such as a camera or a laser device has been gradually performed.

【0003】図4は、従来の基板検査装置を示すもので
あって、図中、101は基板S(S1,S2)の搬送用
コンベアであり、基板SにはチップPが搭載されてい
る。103はXYテーブルであって、カメラ104とバ
ッドマーカー105が装着されている。
FIG. 4 shows a conventional board inspection apparatus. In the figure, reference numeral 101 denotes a conveyor for transferring a board S (S1, S2), on which a chip P is mounted. An XY table 103 has a camera 104 and a bad marker 105 mounted thereon.

【0004】本装置は、XYテーブル103を駆動して
カメラ104をXY方向に移動させながら、基板S1上
のチップPの位置ずれ、欠品、半田付け状態の良否等を
検査する。
[0004] This apparatus inspects a position shift, a missing item, a good soldering state, and the like of the chip P on the substrate S1 while driving the XY table 103 to move the camera 104 in the XY directions.

【0005】カメラ104による外観検査が終了したな
らば、再度XYテーブル103を駆動して、バッドマー
カー105をXY方向に移動させながら、基板S1上の
不良チップにバッドマークを付するようになっている。
When the appearance inspection by the camera 104 is completed, the XY table 103 is driven again, and while the bad marker 105 is moved in the XY directions, a bad mark is added to the defective chip on the substrate S1. I have.

【0006】このようにして、基板検査が終了した基板
S1は、コンベア101によりセパレータ(図外)へ搬
送され、セパレータにより良品基板と不良品基板とに仕
分けされて、それぞれ良品マガジンと不良品マガジンと
に回収するようになっている。
[0006] In this way, the substrate S1 for which the substrate inspection has been completed is conveyed to a separator (not shown) by the conveyor 101, and is separated into a non-defective substrate and a defective substrate by the separator. And to be collected.

【0007】[0007]

【発明が解決しようとする課題】ところが、上記従来手
段では、カメラ104による外観検査終了後に、外観検
査と同じステージでバッドマーカー105で不良品のマ
ーキングを行うため、このマーキング作業が終了するま
で、次検査の基板S2は搬入側で待機しなければなら
ず、この待機時間がロスタイムとなって、作業能率が上
がらない問題点があった。
However, in the above-mentioned conventional means, after the appearance inspection by the camera 104 is completed, the defective product is marked with the bad marker 105 at the same stage as the appearance inspection. The substrate S2 for the next inspection has to wait on the carry-in side, and this standby time becomes a loss time, and there is a problem that the working efficiency is not improved.

【0008】そこで、本発明は上記従来手段の問題点を
解消できる手段を提供することを目的とする。
Therefore, an object of the present invention is to provide means capable of solving the above-mentioned problems of the conventional means.

【0009】[0009]

【課題を解決するための手段】このために本発明は、外
観検査の対象基板と、外観検査が終了したバッドマーク
付与の対象基板の2枚の基板を一緒にXY方向へ移動さ
せるXYテーブルと、上記外観検査の対象基板の上方に
あって、この基板に搭載された複数のチップを視野に取
り込むカメラと、上記バッドマーク付与の対象基板の上
方にあって、この基板上の上記外観検査で不良と判断さ
れたチップにバッドマークを付与するバッドマーカー
と、このバッドマーカーを少なくとも上記カメラの視野
に対応するエリア内をXY方向に移動させるXY方向移
動装置とを備えた基板の外観検査装置を用いる基板の外
観検査方法であって、上記XYテーブルを駆動して上記
2枚の基板を一緒にXY方向へ移動させて、上記外観検
査の対象基板上の複数のチップを上記カメラの視野内に
取り込んでこれらのチップの外観検査を行いながら、上
記バッドマーク付与の対象基板に対して、上記XY方向
移動装置を駆動して上記バッドマーカーをXY方向へ移
動させて、上記視野に対応する位置にあって上記外観検
査で不良と判断されたチップについてバッドマークを付
与するようにした
For this purpose, the present invention is to move two substrates, that is, a substrate to be subjected to an appearance inspection and a substrate to which a bad mark is to be provided after the appearance inspection is completed, in the XY directions together.
An XY table , a camera above the target board for the visual inspection, and a camera for capturing a plurality of chips mounted on the board into a field of view, and a camera above the target board for the bad mark, Judged as defective by the above visual inspection
Of a board using a board appearance inspection apparatus, comprising: a bad marker for giving a bad mark to the chip thus obtained; and an XY direction moving device for moving the bad marker in at least the area corresponding to the field of view of the camera in the XY directions . Outside
A visual inspection method, wherein the XY table is driven to
Move the two substrates together in the X and Y directions, and
Multiple chips on the target board within the field of view of the camera
While inspecting the appearance of these chips,
With respect to the substrate to be provided with the bad mark,
Drive the moving device to move the bad marker in the X and Y directions.
And move it to the position corresponding to the
Bad marks for chips determined to be bad
I gave it .

【0010】[0010]

【作用】上記構成によれば、基板をカメラにより観察し
て、カメラの視野毎にチップの外観検査を行う。このよ
うにカメラの視野内のチップの外観検査を行っている
間、バッドマーカーは既に検査済の基板の上記視野に相
当するエリア内をXY方向に移動しながら、このエリア
内の不良チップにバッドマークを付与していく。
According to the above construction, the substrate is observed by the camera, and the appearance of the chip is inspected for each field of view of the camera. While the visual inspection of the chip in the field of view of the camera is performed in this way, the bad marker moves in the XY direction in an area corresponding to the field of view of the already inspected substrate, and the bad marker is attached to the defective chip in this area. Marks are added.

【0011】[0011]

【実施例】次に、図面を参照しながら本発明の実施例を
説明する。
Next, an embodiment of the present invention will be described with reference to the drawings.

【0012】図1は外観検査装置の斜視図である。1は
XYテーブル1A、Yテーブル1Bから成るXYテーブ
ルであり、その上部に位置決め部2が設けられている。
MXはXモータ、MYはYモータである。
FIG. 1 is a perspective view of a visual inspection apparatus. Reference numeral 1 denotes an XY table including an XY table 1A and a Y table 1B, on which a positioning unit 2 is provided.
MX is an X motor, and MY is a Y motor.

【0013】位置決め部2には、2枚の基板S1,S2
が位置決めされている。一方の基板S1は外観検査が終
了した基板であり、不良チップに対してバッドマークが
付与される。また他方の基板S2は、外観検査が行われ
る基板である。基板S1と基板S2は同一品種の基板で
あって、各基板S1,S2には、同一座標位置に同一チ
ップP(P1〜Pn)が搭載されている。
The positioning unit 2 includes two substrates S1 and S2
Is positioned. One substrate S1 is a substrate for which the appearance inspection has been completed, and a bad mark is given to a defective chip. The other substrate S2 is a substrate on which an appearance inspection is performed. The substrates S1 and S2 are of the same type, and the same chips P (P1 to Pn) are mounted on the respective substrates S1 and S2 at the same coordinate positions.

【0014】3はカメラであって、基板S2の上方に配
設されており、チップPを観察して、位置ずれ、欠品、
半田付状態などを検査する。4はバッドマーカーであっ
て、XY方向移動装置5に保持されている。このバッド
マーカー4は、基板S1の上方にあって、不良チップP
にバッドマークBを付与する(以上、図3も参照)。
Reference numeral 3 denotes a camera, which is disposed above the substrate S2.
Inspect the soldering condition. Reference numeral 4 denotes a bad marker, which is held by the XY direction moving device 5. The bad marker 4 is located above the substrate S1 and has a defective chip P
Is given a bad mark B (see also FIG. 3).

【0015】図2において、A(A1〜A4)は、基板
S2上のカメラ3の視野であり、各々の視野A1〜A4
内の複数のチップPの画像を取り込み、その外観検査を
行う。この視野A1〜A4は、XYテーブル1を駆動し
て、基板S2をXY方向に移動させることにより切り替
えられる。
In FIG. 2, A (A1 to A4) is the field of view of the camera 3 on the substrate S2.
The images of a plurality of chips P in the inside are taken in and the appearance inspection is performed. The visual fields A1 to A4 are switched by driving the XY table 1 and moving the substrate S2 in the XY directions.

【0016】図2において、A’(A’1〜A’4)
は、基板S1上の上記視野A1〜A4に対応するエリア
である。バッドマーカー4は、XY方向移動装置5が駆
動することにより、各々のエリアA’1〜A’4内をX
Y方向に移動し、不良チップPにバッドマークBを付与
する。
In FIG. 2, A '(A'1 to A'4)
Is an area on the substrate S1 corresponding to the fields of view A1 to A4. When the XY direction moving device 5 drives the bad marker 4, X in each of the areas A ′ 1 to A ′ 4 is moved.
Moving in the Y direction, a bad mark B is given to the defective chip P.

【0017】本装置は、外観検査の対象基板S2と、バ
ッドマーク付与の対象基板S1は、一緒に位置決め部2
に位置決めされており、XYテーブル1が駆動すること
により、一緒にXY方向に移動する。したがって、カメ
ラ3が例えば視野A1内のチップP1,P2の外観検査
を行っている際には、XY方向移動装置5を駆動するこ
とにより、バッドマーカー4はこの視野A1に対応する
エリアA’1内をXY方向に移動し、カメラ3の外観検
査により、予め不良と判断されたチップにバッドマーク
Bを付与する。
In this apparatus, the target substrate S2 to be subjected to the appearance inspection and the target substrate S1 to which the bad mark is to be attached are jointly positioned by the positioning unit 2.
And the XY table 1 is driven to move together in the XY directions. Therefore, when the camera 3 performs, for example, the appearance inspection of the chips P1 and P2 in the visual field A1, by driving the XY direction moving device 5, the bad marker 4 moves the area A′1 corresponding to the visual field A1. The chip is moved in the XY directions, and a bad mark B is given to a chip which has been previously determined to be defective by an appearance inspection of the camera 3.

【0018】以下同様に、カメラ3が視野A2のチップ
P3〜P5の外観検査を行っている際には、バッドマー
カー4はこれに対応するエリアA’2の不良チップにバ
ッドマークBを付与する。
Similarly, when the camera 3 performs the appearance inspection of the chips P3 to P5 in the field of view A2, the bad marker 4 gives the bad mark B to the corresponding defective chip in the area A'2. .

【0019】本手段によれば、カメラ3により基板S2
上のチップPの外観検査を視野A毎に行いながら、XY
方向移動装置5を駆動することにより、これと同時に、
外観検査済の基板S1上の不良チップに、バッドマーク
Bを付与できるので、きわめて作業性がよい。しかもバ
ッドマーカー4は、カメラ3の視野Aに対応するエリア
A’内を移動できればよいので、XY方向移動装置5の
移動ストロークは短くてよく、したがってXY方向移動
装置5を小型化できるだけでなく、バッドマーカー4の
XY方向移動ストロークは短いので、高速度でバッドマ
ークBを付与できる。
According to this means, the camera S3 is used for the substrate S2.
While performing the visual inspection of the upper chip P for each visual field A, XY
By driving the direction moving device 5, at the same time,
Since the bad mark B can be added to the defective chip on the substrate S1 whose appearance has been inspected, the workability is extremely good. Moreover, since the bad marker 4 only needs to be able to move within the area A 'corresponding to the field of view A of the camera 3, the moving stroke of the XY direction moving device 5 may be short, so that not only the XY direction moving device 5 can be downsized, Since the moving stroke of the bad marker 4 in the XY directions is short, the bad mark B can be provided at a high speed.

【0020】[0020]

【発明の効果】以上説明したように本発明によれば、外
観検査の対象基板とバッドマーク付与の対象基板をXY
テーブルにより一緒にXY方向移動させながら、外観
検査の対象基板のチップの外観検査と、この外観検査で
不良と判断されたチップに対するバッドマークの付与を
並行して同時に作業性よく行うことができる。しかもバ
ッドマーカーを移動させるXY方向移動装置を小型化し
て、高速度でバッドマークの付与を行える。
As described above , according to the present invention , the substrate to be subjected to the appearance inspection and the substrate to be provided with the bad mark are XY.
While moving the XY directions together by table look
Inspection of the appearance of the chip on the substrate to be inspected and the addition of a bad mark to the chip determined to be defective by this appearance inspection
In parallel, Ru can be performed with good workability at the same time. Moreover, the size of the XY-direction moving device for moving the bad marker can be reduced, and the bad mark can be provided at a high speed.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る外観検査装置の斜視図FIG. 1 is a perspective view of a visual inspection device according to the present invention.

【図2】本発明に係る外観検査装置の平面図FIG. 2 is a plan view of a visual inspection device according to the present invention.

【図3】本発明に係る外観検査装置の正面図FIG. 3 is a front view of a visual inspection device according to the present invention.

【図4】従来手段に係る外観検査装置の斜視図FIG. 4 is a perspective view of a visual inspection device according to a conventional means.

【符号の説明】[Explanation of symbols]

2 位置決め部 3 カメラ 4 バッドマーカー 5 XY方向移動装置 A 視野 A’エリア S 基板 P チップ 2 Positioning unit 3 Camera 4 Bad marker 5 XY direction moving device A Field of view A 'area S Substrate P Chip

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】外観検査の対象基板と、外観検査が終了し
バッドマーク付与の対象基板の2枚の基板を一緒に
Y方向へ移動させるXYテーブルと、上記外観検査の対
象基板の上方にあって、この基板に搭載された複数のチ
ップを視野に取り込むカメラと、上記バッドマーク付与
の対象基板の上方にあって、この基板上の上記外観検査
で不良と判断されたチップにバッドマークを付与するバ
ッドマーカーと、このバッドマーカーを少なくとも上記
カメラの視野に対応するエリア内をXY方向に移動させ
るXY方向移動装置とを備えた基板の外観検査装置を用
いる基板の外観検査方法であって、上記XYテーブルを
駆動して上記2枚の基板を一緒にXY方向へ移動させ
て、上記外観検査の対象基板上の複数のチップを上記カ
メラの視野内に取り込んでこれらのチップの外観検査を
行いながら、上記バッドマーク付与の対象基板に対し
て、上記XY方向移動装置を駆動して上記バッドマーカ
ーをXY方向へ移動させて、上記視野に対応する位置に
あって上記外観検査で不良と判断されたチップについて
バッドマークを付与するようにしたことを特徴とする基
板の外観検査方法
1. An object board for appearance inspection and an appearance inspection are completed.
The two substrates of the target substrate to which the bad mark is to be added together by X
An XY table to be moved in the Y direction, a camera above the target board for the visual inspection, and a camera for capturing a plurality of chips mounted on the board into a field of view, and a camera above the target board for the bad mark addition, The above visual inspection on this board
A bad marker conferring bad marks on chips judged to be defective in this XY direction moving device for a bad marker move within the area corresponding to at least the camera field of view in the XY direction and the appearance inspection device for the substrate having a For
A method for inspecting the appearance of a substrate, wherein the XY table is
Drive to move the two substrates together in the XY directions
The multiple chips on the target board
Into the field of view of the camera for visual inspection of these chips
While performing the process,
And driving the XY-direction moving device to move the bad marker
Move the camera in the XY directions and move it to a position
For chips that were determined to be defective in the above visual inspection
A base characterized by providing a bad mark
Board appearance inspection method .
JP3123644A 1991-05-28 1991-05-28 Board appearance inspection method Expired - Fee Related JP2874386B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3123644A JP2874386B2 (en) 1991-05-28 1991-05-28 Board appearance inspection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3123644A JP2874386B2 (en) 1991-05-28 1991-05-28 Board appearance inspection method

Publications (2)

Publication Number Publication Date
JPH04351000A JPH04351000A (en) 1992-12-04
JP2874386B2 true JP2874386B2 (en) 1999-03-24

Family

ID=14865699

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3123644A Expired - Fee Related JP2874386B2 (en) 1991-05-28 1991-05-28 Board appearance inspection method

Country Status (1)

Country Link
JP (1) JP2874386B2 (en)

Also Published As

Publication number Publication date
JPH04351000A (en) 1992-12-04

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