JP2838715B2 - Mirror vibration mechanism of exposure equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial application field) The present invention relates to an SOR light exposure apparatus used for forming a fine pattern such as a super LSI or the like. The present invention relates to a mirror vibration mechanism used to enlarge a light irradiation area.

(Prior Art) Since the technology of the present invention belongs to a relatively new technology, the number of published reports and documents is extremely small. However, the concept of a method of exposing by enlarging the irradiation area by vibrating a reflecting mirror is described in “Synchrotron radiation” edited by the Physical Society of Japan, pp. 264-270.

FIG. 2 (front sectional view) is a schematic view of a conventional mirror vibration mechanism.

Numeral 1 denotes a deflection axis serving as a center of vibration, and a reflecting mirror 3
Often taken on the reflective surface of In the figure, 1 on the reflective surface
Appears in dots. 2 is a fine adjustment mechanism for finely adjusting the mirror for reflection 3 up, down, left and right to position the mirror (details of the mechanism are omitted), 4 is a vacuum chamber serving as a path for SOR light, 5 is a semi-cylindrical bearing, Reference numeral 6 denotes a swing arm, which is attached to the deflection shaft 1 by a pivot mechanism (not shown). Reference numeral 7 denotes a vibration drive mechanism, the main body of which is swingably mounted on the pivot pin 71 on the kamaboko type bearing 5,
A very small amount of the central shaft 70 is vibrated in and out, and the swing arm 6 is finely vibrated around the deflection shaft 1 along the Kamaboko bearing 5 by the pivot pin 72 at the tip of the central shaft 70. 8
Is a member for confining the atmosphere inside the vacuum chamber 4 and allowing and absorbing the vibration and the displacement of the swing arm 6 caused by the fine adjustment of the fine adjustment mechanism 2. In the case of the figure, a metal bellows is used.

The reflecting mirror 3 is relatively small (250m wide even if it is large)
m, with a depth of about 500 mm) and around the deflection axis 1 (horizontal and, as described above, represented by one point in the figure as described above) orthogonal to the traveling direction of the SOR light by the above configuration. Then, a small angle vibration of several mrad is applied to reflect and deflect the thin and wide SOR light beam 90 taken in from the incident light taking port 9 on the left side of the vacuum chamber 4. The SOR light that has been reflected and changed direction exits from the reflected light extraction port 10 on the right. At the position of the take-out port 10, the thin SOR light is vibratingly deflected vertically 11, 11 ', 11 "in the vertical direction.

The deflected SOR light exits the port 10 and irradiates the surface of a wafer (not shown) several meters away, and is used for exposing a resist material already formed on the surface. The oscillation frequency of the reflecting mirror is several Hz, which is considerably high.

In another conventional apparatus shown in FIGS. 3a (front view) and 3b (side view), the cam-shaped bearing 5 shown in FIG. 2 is removed and the shaft pin 71 of the vibration drive mechanism 7 is directly connected. It is swingably mounted on the vacuum chamber wall. It remains the same that the center shaft 70 is vibrated minutely in and out, and the swing arm 6 is finely vibrated around the deflection axis 1 by the shaft pin 72 at the end of the center shaft 70. The bearing 12 of the swing arm 6 is provided in the atmosphere which is an extension of the axis of the deflection shaft 1 as shown in FIG.
Attached to the outer side wall surface. In this configuration,
The radius of the vibration about the deflection axis 1 indicated by R in FIG. 2 can be made slightly smaller.

(Problems to be Solved by the Invention) These conventional devices shown in FIGS.
There are 1,2,3,4 problems.

1. Because the fine adjustment mechanism 2 is in the vacuum chamber 4,
If the hand is not put in the vacuum chamber 4, the position of the mirror 3 cannot be finely adjusted.

2. The whole mechanism is structurally irrational and complicated, resulting in high cost and difficulty in achieving required performance. That is,
The position of the reflecting mirror 3 is defined by the orthogonal coordinates X, Y, Z
It is necessary to vibrate the entire mirror system around the deflecting axis 1 with high accuracy while the fine and fine adjustment mechanism 2 for finely adjusting each axis direction and each axis (not shown) is mounted. However, the whole mechanism is inevitably complicated and large. The structure is extremely irrational for vibrations of a high frequency of several Hz, and the precision of the bearing part is inevitably deteriorated, and the poor precision is magnified and adversely affects deflection.

3. The operation of the fine adjustment mechanism 2 for the mirror position and the operation of the vibration mechanism 7 interfere with each other. That is, a slight change in the mirror position appears as a large error on the irradiation surface several meters ahead,
When the fine adjustment mechanism 2 is adjusted to determine the direction 11 of the center of the reflected light, the incident position of the light 90 is almost off the deflection axis 1 in most cases. As a result of the deflection being performed at a position different from the vibration center, a remarkable error occurs in the irradiation position on the light irradiation surface several meters ahead.

4. In the conventional method, the mirror 3 is vibrated in the vacuum chamber 4. The method of moving an object in a vacuum includes a method of introducing and transmitting a movement from outside the vacuum to the inside of the vacuum, and a method of moving the object in the vacuum. There is a method of directly driving with a power source (for example, a motor) placed inside. The former has the disadvantage of complicating the configuration as described above, but the latter configuration generally lacks reliability and shortens the maintenance interval to increase the running cost, and is rather inferior to the former.

(Object of the Invention) An object of the present invention is to solve the above-mentioned problems 1, 2, 3, and 4.

(Means for Solving the Problem) In order to solve the above-mentioned problems, the present invention provides a method for reflecting and deflecting SOR light taken in from an incident light taking-in port with a mirror, taking out the reflected light from a reflected light taking-out port and exposing an IC or the like. In a mirror vibration mechanism used for exposure of an apparatus, a mirror is fixed inside a chamber constituting a light path from an intake port to an extraction port, and the mirror is vibrated by vibrating the chamber. is there.

A configuration in which the vibration drive mechanism for vibrating the chamber and the chamber are mounted on a fine adjustment mechanism for finely adjusting the position of the mirror can be conveniently adopted.

By providing a bellows between each of the chamber and the intake port and between the chamber and the extraction port as a member that allows and absorbs the displacement of the chamber caused by the vibration and the fine adjustment of the mirror position, the apparatus can be downsized.

(Embodiment) FIG. 1 is a schematic cross-sectional view of a mirror vibration mechanism according to an embodiment of the present invention. Members equivalent to those in FIGS.

In the mirror vibration mechanism of the present invention, the vacuum chamber 4
Bellows 8 ′, 8 ″ are provided between the left SOR light input port 9 and the right SOR light output port 10 as relative movement absorbing members.

Inside the vacuum chamber 4, the reflecting mirror 3 is fixed to the inner wall. When fixing the reflecting mirror 3 to the chamber 4, the deflection axis 1 on the surface of the reflecting mirror and the center axis of the vibration bearing 12 provided outside the vacuum chamber 4 are aligned with the maximum possible by machining. Alignment with the accuracy of. The alignment can be performed by irradiating the reflecting mirror 3 with light instead of the SOR light and adjusting the reflecting mirror installation position while moving the reflecting mirror around the oscillation axis.

When the mirror oscillating mechanism shown in FIG. 1 (front view) is incorporated in the exposure apparatus, which is the parent apparatus, a fine adjustment mechanism for correctly aligning the incident SOR light 90 with the axis passing through the center of the left intake port 9. 2 is required, but as shown in the figure, the reflecting mirror 3
The whole of the unit and the chamber 4 are mounted on the fine adjustment mechanism 2 which is fixed. And the vibration driving mechanism 7
The pivot pin 71 is attached to the fine adjustment mechanism 2, and the pivot pin 72 is attached to the chamber 4.

The metal bellows 8 ', 8 "have a length and a diameter that can sufficiently absorb the displacement of the chamber caused by vibration and fine adjustment.

Although the embodiment of FIG. 1 shows a case where the light passage in the chamber is in a vacuum atmosphere, the inside of the chamber 4 is not limited to a vacuum, but may be a specific gas such as an argon gas. May be filled with the atmosphere.

(Effects of the Invention) It is apparent that the above-mentioned problem (1) is solved because the mirror and the vacuum chamber are integrated, so that if the vacuum chamber is finely adjusted, the mirror position can be simultaneously and equally adjusted. .

The problem (2) is the most important, but in the configuration of the present invention, the entire moving structure is put together in the atmosphere and can be driven in the atmosphere, so that the structure can be extremely simplified as shown.

In general, a heater is provided in the vacuum chamber for venting gas. However, since the vibration driving device can be separated from the heater, considerations such as heat resistance are not required, and there are no restrictions on lubricants and materials used for bearings. You can enjoy the accuracy, speed, and smoothness of the motion obtained by the general machine in the state, and reduce the manufacturing cost.

The problem (3) is that the vibration mechanism integrated with the mirror rides on the fine adjustment mechanism, so that the above-mentioned mutual interference cannot occur at all.

 It is clear that problem 4 has been solved.

[Brief description of the drawings]

FIG. 1 is a schematic front view of an embodiment of the mirror vibration mechanism of the present invention. FIG. 2 is a front sectional view of a similar mechanism in the related art. FIG. 3a is a front view of another conventional mechanism, and FIG. 3b is a side sectional view thereof. DESCRIPTION OF SYMBOLS 1 ... Deflection axis, 2 ... Mirror position fine adjustment mechanism, 3 ... Reflection mirror, 4 ... Vacuum chamber, 5 ... Kamaboko bearing, 6 ... Swing arm, 7 ... Vibration drive mechanism, 8,
8 ', 8 "... Bellows, 9 ... Intake port, 10 ... Extraction port, 12 ... Bearing, 90 ... Incoming SOR light, 11,11', 1
1 ″… Reflected SOR light.

──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. ⁶ , DB name) H01L 21/027

Claims (3)

(57) [Claims] An SOR light (Syncrotoron Orbic Radiation) taken in from an incident light taking-in port is vibratingly reflected and polarized by a mirror, taken out from a reflected light taking-out port, and read by a mirror vibrating mechanism used for exposure of an exposure apparatus. A mirror vibration of the exposure apparatus, wherein the mirror is fixed inside a chamber constituting a light passage from the input port to the extraction port, and the mirror is vibrated by vibrating the chamber. mechanism. 2. The exposure apparatus according to claim 1, wherein the vibration drive mechanism for vibrating the chamber and the chamber are mounted on a fine adjustment mechanism for finely adjusting the position of the mirror. Mirror vibration mechanism. 3. The chamber and the intake port, and
Between each of the chamber and the removal port,
3. The first or second claim, wherein a bellows is provided as a member that allows and absorbs the displacement of the chamber caused by the vibration and the fine adjustment of the mirror position.
13. A mirror vibration mechanism for an exposure apparatus according to claim 10.