JP2832216B2 - Power generation device using electrostatic force - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a power generation device using an electrostatic force, such as an electrostatic motor or an electrostatic actuator.

Conventionally, various types of power generating devices of this type have been proposed. For example, Japanese Patent Application Laid-Open No. Sho 62-44079 discloses a power generating device in which a pair of stator electrodes are arranged facing each other. A rotor or a linear kinetic element is provided, and electric energy is converted to mechanical rotation or a linear kinetic energy or mechanical rotation or a linear kinetic energy is electrically An apparatus for converting energy is disclosed.

In addition, a movable member made of a dielectric material that is relatively movable at a certain interval with respect to an electrode arrangement surface of a stator having a plurality of electrodes at a predetermined interval is provided, and a stator electrode is provided on the stator electrode. An electrostatic actuator or an electrostatic motor configured to move a mover by moving an electric field generated from an electrode by sequentially applying a voltage is disclosed in, for example, JP-A-63-95858 and JP-A-63-9
Known methods are described, for example, in JP-A-5859 and JP-A-63-95860.

In such a known apparatus, as shown in FIG. 2 of the accompanying drawings, a plurality of electrodes B1 to B1 to a stator A having a plurality of electrodes A1 to A5 at predetermined intervals are provided. B4
Is provided with the electrodes facing each other, and a gap is provided between the stator A and the mover B, that is, air having a relative dielectric constant (εs = 1) enters. I have.

In the illustrated state, the electrode A2 of the stator and the electrode B2 of the mover B are shown.
When a voltage is applied between the two electrodes, the two electrodes attract each other due to the generated electrostatic force, whereby the mover B moves to the left in the drawing, and the electrodes A2 of the stator and the electrodes of the mover B are moved.
It moves between the positions where B2 faces. In this state, the electrode A3 of the stator and the electrode B3 of the mover B are half facing each other, and subsequently the voltage is switched from between the electrodes A2 and B2 to between the electrodes A3 and B3. Child B moves further to the left. In this manner, the movable element B can be moved by sequentially applying a voltage between the electrodes of the stator A and the movable element B in a partly facing phase.

[Problems to be Solved by the Invention] In the above-described known device that has been conventionally proposed, the electrostatic attractive force acting between the electrodes is represented by F = εs · εoSV ² / 2d ^2. In the formula, ε is a relative dielectric constant, εo is a dielectric constant of vacuum, S is an electrode area, V is an applied voltage between electrodes, and d is a distance between electrodes.

As can be seen from this equation, when the electrode area S is fixed, the distance d between the stator and the movable element is made as small as possible, and when the applied voltage V between the electrodes is made large, the electrostatic attraction acting between the electrodes can be obtained. Power grows. However, since the dielectric between the electrodes is actually air, reducing the distance d between the electrodes and increasing the applied voltage V to the extent that a sufficient torque can be generated is limited by the withstand voltage of the air. Become.

On the other hand, if the electrode area S is made as large as possible, the improvement can be made to some extent, but the half-side device itself becomes large, and the small feature which is an essential feature of this type of device is spoiled.

Therefore, a conventional structure using air having a relatively low dielectric constant and dielectric strength as a dielectric between electrodes cannot obtain sufficient torque, and a practical electrostatic actuator or motor can be realized. Not been.

Therefore, an object of the present invention is to provide a power generation device using electrostatic force capable of solving such a problem and generating a sufficient torque for practical use.

[Means for Solving the Problems] In order to achieve the above object, a power generation device using electrostatic force according to the present invention is configured such that two stators each having a large number of electrodes face each other at an interval. And two types of dielectrics having different dielectric constants alternately arranged at intervals different from adjacent electrode intervals in each stator between these two stators. A movable element that moves by electric induction is arranged, and a gap between each stator and the movable element is filled with a liquid dielectric made of tricresyl phosphate.

Preferably, the liquid dielectric interposed between each stator and mover has a relative dielectric constant of approximately 6.5 and a dielectric strength of approximately 14 KV / mm.

[Operation] In the power generation device using the electrostatic force according to the present invention configured as described above, the gap between each stator and the mover is filled with the liquid dielectric made of tricresyl phosphate. Therefore, the dielectric constant and the dielectric strength in the gap between each stator and the mover are increased, so that the distance between the electrodes can be reduced, and the applied voltage between the electrodes can be increased, thereby achieving sufficient practical use. A large torque that can be provided can be generated.

Embodiment An embodiment of the present invention will be described below with reference to FIG. 1 of the accompanying drawings.

FIG. 1 schematically shows a main part of a configuration of an embodiment in which the present invention is implemented as an electrostatic linear motor. Reference numeral 1 denotes a stator that extends long to the left and right of the drawing and is provided to face each other at an interval. A large number of electrodes 2 project from the facing surface of each stator 1 at predetermined intervals along the longitudinal direction of the stator 1.
Between the two stators 1, a linear motion element 3 forming a mover is arranged so as to be able to move linearly relative to each of the stator elements 1 in opposition to each of the stator elements 1. ,
Two types of dielectrics 4 and 5 having different dielectric constants are alternately arranged at a predetermined interval different from the interval between adjacent electrodes in each of the stators 1. Numerous electrodes 4 are provided at different predetermined intervals.

Each of the electrodes 2 of each of the stators 1 is connected to a drive power source (not shown) so that a voltage can be applied in a predetermined order.

A liquid dielectric made of tricresyl phosphate having a relative dielectric constant of about 6.5 and a dielectric strength of about 14 KV / mm is filled between each stator 1 and the linear motion element 3 as indicated by reference numeral 6. ing.

By the way, it is known that a substance having a high dielectric constant usually decomposes in a high electric field. Therefore, the present inventors have used various existing liquid dielectrics for electrostatic motors and actuators, measured the dielectric constant and dielectric strength at that time, and measured the generated torque. As a result, the power generation device using electrostatic force was used. The most suitable liquid dielectric is a relative dielectric constant of about 6.5 and almost 14 KV /
It was found to be tricresyl phosphate [molecular formula (CH ₃ C ₆ H ₄ O) ₃ PO] having a withstand voltage of mm.

By using tricresyl phosphate having such characteristics as a dielectric between each stator 1 and the linear motion element 3, the characteristics can be maintained stably for a long time, and a very high torque can be generated. Was observed.

In the operation of the illustrated apparatus configured as described above, voltages are sequentially applied to the respective electrodes 2 of the respective stators 1 in a predetermined order, so that linear movement is performed in the same manner as in the conventional apparatus shown in FIG. The child 3 can be moved to the left or right in the drawing.

By the way, in the illustrated embodiment, an electrostatic linear motor that obtains a linear motion has been described. It is needless to say that the above can be equally applied.

[Effects of the Invention] As described above, according to the present invention, a movable element is provided between two stators each including a large number of electrodes and arranged at an interval to face each other. Since the gap is filled with a liquid dielectric made of tricresyl phosphate, the dielectric constant and dielectric strength in the gap between each stator and the mover are increased, thereby reducing the distance between the electrodes and It is possible to increase the voltage applied between the electrodes, thereby providing a power generating device capable of generating a large torque sufficient for practical use.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a main part of a power generating device according to an embodiment of the present invention, and FIG. 2 is a schematic diagram showing an example of a conventional device. In the figure, 1: stator 2: electrode 3: linear motor 4: dielectric 5: dielectric 6: liquid dielectric

──────────────────────────────────────────────────続 き Continuing from the front page (73) Patent holder 999999999 Japan Vacuum Engineering Co., Ltd. 2500 Hagizono, Chigasaki-shi, Kanagawa (73) Patent holder 999999999 Science and Technology Promotion Corporation 4-1-1-8 Honcho, Kawaguchi-shi, Saitama ( 72) Inventor Masafumi Yano 1-170 Yayoi-cho, Chiba-shi, Chiba 1-301 Staff dormitory of the University of Tokyo 1-272 (72) Inventor Toru Kira 22-22 Nagaikecho, Abeno-ku, Osaka-shi, Osaka Inside Sharp Corporation (72) Inventor Moriya Koji 4-1-2, Hirano-cho, Chuo-ku, Osaka-shi Osaka Gas Co., Ltd. (72) Inventor Kunio Okamoto 5-9-1-7 Toranomon, Minato-ku, Tokyo Co., Ltd. Yamatoya Shokai Co., Ltd. (72) Inventor Tetsuji Kiyota 2500 Hagizono, Chigasaki-shi, Kanagawa Prefecture, Japan Vacuum Technology Co., Ltd. (56) References JP-A-3-65083 (JP, A) JP-A-3-103085 JP, A) JP flat 1-185177 (JP, A) (58 ) investigated the field (Int.Cl. ^6, DB name) H02N 1 / 00,2 / 00,11 / 00

Claims (2)

(57) [Claims] 1. A power generating device using an electrostatic force in which a stator having a large number of electrodes and a movable member which is moved by electrostatic induction between the electrodes of the stator are opposed to each other at an interval. In, two stators are provided facing each other at an interval, and between these two stators, two kinds of dielectric materials having different dielectric constants alternately arranged at intervals different from adjacent electrode intervals in each stator. A power generating device utilizing electrostatic force, wherein a movable element is disposed, and a gap between each stator and the movable element is filled with a liquid dielectric made of tricresyl phosphate. 2. The power utilizing electrostatic force according to claim 1, wherein the liquid dielectric inserted between each stator and the mover has a relative dielectric constant of approximately 6.5 and a dielectric strength of approximately 14 KV / mm. Generator.