JP2829469B2 - Shutter open / close control mechanism of X-ray fluorescence analyzer - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shutter opening / closing control mechanism of a fluorescent X-ray analyzer for controlling opening / closing of a shutter for preventing leakage of X-rays.

[0002]

2. Description of the Related Art In a conventional shutter structure of a fluorescent X-ray analyzer, for example, as shown in FIG. 6, a flat shutter 11 is provided at a position directly below a sample stage 14 so as to be movable in the horizontal direction. X-ray collimator 17 and X-ray
The primary X-ray X irradiated to the sample 15 on the sample stage 14 through the X-ray filter 18 and the detector 1 from the sample 15 via the X-ray filter 19 and the detector collimator 20
3 and can be switched between an open position where the X-ray fluorescence X-ray emitted toward the shutter 3 is blocked and an open position where the blockage is released.

The upper portion of the apparatus main body 3 including the sample stage 14 is covered with a shield cover 4 so as to be openable and closable. When the shield cover 4 is closed, it is locked, and a mechanical interlocking mechanism interlocks with the closing operation. (Not shown), the shutter 11 moves to the open position, and the sample 1 on the sample stage 14 is moved.
By irradiating the sample 5 with primary X-rays X and detecting the fluorescent X-rays FX emitted from the sample 15 with the detector 13, component analysis can be performed.

[0004]

As described above, conventionally, the shutter 11 operates in cooperation with the shield cover 4,
When the shield cover 4 was closed, the shutter 11 was always open.

For this reason, for example, the shutter 11 is open even while the sample chamber 5 is being evacuated, and the detector 13 receives extra fluorescent X-rays FX to accelerate the deterioration. was there.

[0006] Also, when a liquid sample is measured, if the vacuum is erroneously evacuated, the shutter 11
Is open, so that the scattered sample adheres to the X-ray tube 10 and the detector 13.

The present invention has been made in view of such circumstances,
An object of the present invention is to control opening and closing of a shutter so that a detector does not receive extra fluorescent X-rays and a failure of the detector and the X-ray tube can be prevented.

[0008]

According to the present invention, means for solving the above-mentioned problems are constituted as follows. That is, the primary X-ray emitted from the X-ray tube toward the sample is blocked.
Cut off or emitted from the sample towards the detector.
Closed position to block fluorescent X-rays and open
Fluorescent X with shutter that is switched to and from position
A shutter opening / closing control mechanism of the X-ray analyzer,
Open the shield cover that can be opened and closed freely, and open the window of the sample stage.
With the shield cover closed after placing the sample on the
In, and a shutter opening and closing control unit that starts the on operation of the measurement start switch, the pump is operated, the subsequent sample chamber
Evacuation is carried out, the vacuum degree as long as the predetermined value or more,
By the control output sent from the shutter open / close control unit,
Be actuated to move the shutter to 閉位placed Hiraku Luo position
And a shutter opening / closing unit .
Further, from another viewpoint, the present invention cuts the primary X-ray which is formed in a V-shaped cross section and is irradiated on one side from the X-ray tube toward the sample, and simultaneously cuts the primary X-ray from the sample on the other side to the detector. A shutter opening / closing control mechanism for a fluorescent X-ray analyzer having a shutter that is switched between a closed position for blocking fluorescent X-rays emitted and an open position for releasing the blocking. Open the shield cover that covers freely, place the sample on the window of the sample stage, and turn on the shutter open / close control circuit and the pump operation switch that are started by turning on the measurement start switch with the shield cover closed. After the operation, the sample chamber is evacuated, and if the degree of vacuum is equal to or more than a predetermined value, the shutter is moved from the closed position to the open position by the control output sent from the shutter opening / closing control circuit. Is characterized in that a shuttering unit for moving.

[0009]

After the measurement start switch is turned on, a pump for evacuating the sample chamber is operated, and when the degree of vacuum is less than a predetermined value, the shutter opening / closing control circuit controls the shutter opening / closing section. Output is sent and shutter does not open.

Therefore, the shutter is closed while the sample chamber is being evacuated, so that no extra fluorescent X-rays are incident on the detector, and the detector is protected.

Further, even if the vacuum is erroneously evacuated at the time of measuring the liquid sample, the degree of vacuum in the sample chamber does not exceed a predetermined value (for example, 1 torr or less), so that the shutter is not opened and the malfunction is immediately noticed. , X-ray tube and detector are also well protected.

[0012]

Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 is a block diagram of a shutter opening / closing control mechanism of the X-ray fluorescence spectrometer 1 (see FIGS. 4 and 5). The measurement start provided in the computer 30 separately connected to the X-ray fluorescence spectrometer 1 is started. A switch 2, a pump operation switch 7 for operating a pump 6 for reducing the pressure in the sample chamber 5 to a vacuum, and a vacuum gauge 8 for measuring the degree of vacuum in the sample chamber 5
Is connected to the input side of the shutter opening / closing control circuit 9, while the output side thereof is connected to the primary X-ray radiated from the X-ray tube 10.
A shutter opening / closing unit 12 for opening / closing a shutter 11 having a V-shaped cross section for preventing the line X from leaking to the outside is connected. When the pump 6 for evacuating the inside of the sample chamber 5 is operated by the shutter opening / closing control unit 9 and the shutter opening / closing unit 12 and the degree of vacuum is equal to or less than a predetermined value, the shutter 11 is not opened. Shutter opening / closing control means for controlling the shutter opening / closing. The sample chamber 5
Is formed in an air-tight state by a cylindrical container-shaped shield cover 4 which is in close contact with the sample stand 14 via an O-ring, and a pump 6 provided separately from the apparatus main body 3 is connected to a hose 2.
1 is connected to the sample chamber 5 and the sample chamber 5
The degree of vacuum inside is detected by the vacuum gauge 8. In FIG. 4, reference numeral 14a denotes a window opened on the sample stage 14,
FX is a fluorescent X-ray emitted from a sample (not shown).

The above-mentioned shutter opening / closing control section 9 is activated by an ON signal from the measurement start switch 2, receives an ON signal from the pump operation switch 7, and receives a detection signal from the vacuum gauge 8 so that the inside of the sample chamber 5 is detected. The degree of vacuum is a predetermined value or more (1
When it is confirmed that the shutter speed has become equal to or less than (torr), a control output is sent to the shutter opening / closing unit 12 and the shutter 11 is opened.

On the other hand, as shown in FIG. 4, the shutter 11 is connected to a rotary solenoid constituting the shutter opening / closing section 12 via a link mechanism 12a, and extends along a V-groove formed below the sample table 14 by an arrow. In one direction, the X-ray tube 10 irradiates the sample from the X-ray tube 10 on one side 11a, and the fluorescent light emitted from the sample to the detector 13 on the other side 11b. The switching operation is performed between a closed position indicated by a two-dot chain line for blocking the optical X-ray FX and an open position indicated by a solid line for releasing the blocking.

On the other hand, a locking member 23 constituting locking means 22 is fixed to a front portion of the shield cover 4, and when the shield cover 4 is closed, a locking member provided on the front portion of the apparatus main body 3 is provided. The locking member 23 is locked by 24. More specifically, the locking member 24 is urged in the locking direction (left direction) by a spring 25, and when the shield cover 4 is open, it comes into contact with the stopper 26 and is set at the unlocked position. Is closed, the stopper 26 is pushed down by the hooked member 23 so that the hooking member 24
Move in the locking direction by the bias of the spring 25, the hooked member 23 is hooked, the shield cover 4 is locked, and the inside of the sample chamber 5 is airtight. To release the lock, the lever 27 attached to the latch member 24 may be moved rightward. When the operation of the lever 27 is detected by the limit switch 29, the shutter opening / closing unit 1 is released.
2, the shutter 11 is moved to the closed position, and furthermore, the lever 27 is moved rightward.
Is released, and the sample chamber 5 is opened. In FIG. 4, reference numeral 28 denotes a limit switch for detecting the unlocked position of the locking member 24.

FIGS. 2 and 3 and FIGS. 4 and 5 show the basic flow of the opening / closing control of the shutter 11 having such a configuration.
First, the shield cover 4 is opened (S1), the sample is placed on the window 14a of the sample stage 14 (S2), and then the shield cover 4 is closed (S3). Next, when the measurement start switch 2 is turned on (S4),
The shutter opening / closing control section 9 is activated (S5).

Then, after the pump operation switch 7 is turned on (S6), it is determined whether the indicated value of the vacuum gauge 8 is 1 torr or less (S7), and it is 1 torr or less (the degree of vacuum is a predetermined value or more). For example, the shutter opening / closing unit 12 operates (S8), and the shutter 11 is opened (S9). In addition,
When the pump operation switch 7 is not turned on in step 6, the shutter 11 is opened and closed regardless of the degree of vacuum.

Accordingly, while the sample chamber 5 is being evacuated, the shutter 11 is closed, so that no extra fluorescent X-ray FX is incident on the detector 13.
The detector 13 can be protected.

Further, even if the vacuum is erroneously evacuated at the time of measuring the liquid sample, the indicated value of the vacuum gauge 8 in the sample chamber 5 does not become less than 1 torr, so that the shutter 11 is not opened and the erroneous operation is immediately noticed. With X-ray tube 1
The protection of zero and detector 13 can also be adequately provided.

[0020]

As described above, according to the present invention,
When there is an ON signal from the measurement start switch, the pump operates, and the degree of vacuum in the sample chamber is equal to or less than a predetermined value,
Since the shutter is not opened, the shutter is closed while the sample chamber is being evacuated, preventing extra fluorescent X-rays from being incident on the detector and protecting the detector. it can.

Further, even if the vacuum is erroneously evacuated at the time of measuring the liquid sample, the shutter is not opened, so that the operator can immediately notice the erroneous operation and sufficiently protect the X-ray tube and the detector. In other words, by evacuation
In the conventional example, the liquid sample must be X-ray
Although it leaked to the tube and the detector, in the present invention,
Unlike the example, with the shield cover closed
Shutter until the degree of vacuum in the sample chamber reaches a predetermined value.
Is closed, during which time the sample chamber is
The inside of the liquid sample boils above the specified value due to boiling of the liquid sample
It will never happen and the shutter will not open, so immediately
Of the X-ray tube and detector,
Protection can also be provided.

In the present invention, it is needless to say that the structure of the shutter opening / closing section and the interlocking mechanism are not limited to the embodiment, and any one can be appropriately adopted.

[Brief description of the drawings]

FIG. 1 is a block diagram of a shutter opening / closing control mechanism of a fluorescent X-ray analyzer according to the present invention.

FIG. 2 is the first half of the basic control flow.

FIG. 3 is a latter half of the basic control flow.

FIG. 4 is a perspective view showing a shutter structure of the X-ray fluorescence spectrometer.

FIG. 5 is an overall perspective view of the fluorescent X-ray analyzer.

FIG. 6 is a sectional view of a conventional fluorescent X-ray analyzer.

[Explanation of symbols]

2: Measurement start switch, 4: Shield cover, 5: Sample chamber, 6: Pump, 9: Shutter opening / closing control unit , 11: Shutter, 12: Shutter opening / closing unit, 14: Sample stage, 1
4a: Window of sample stage.

Claims (2)

(57) [Claims] 1. A primary irradiating a sample from an X-ray tube
Either shut off the X-rays or go from the sample to the detector
Closed position to block emitted fluorescent X-rays and release
With a shutter that can be switched to the open position to be removed
The shutter opening and closing control mechanism of the fluorescent X-ray analyzer
Open the shield cover that covers the sample stage
After placing the sample on the sample stage window, remove the shield cover.
In the closed state, and a shutter opening and closing control unit that starts the on operation of the measurement start switch, the pump is activated, then
Vacuum in the sample chamber takes place, the degree of vacuum is a predetermined value or more on
If it is, the control output sent from the shutter
Forces the shutter to move from the closed position to the open position
And a shutter opening / closing control mechanism for the X-ray fluorescence spectrometer. 2. A fluorescent lamp having a V-shaped cross section, which blocks primary X-rays emitted from an X-ray tube toward a sample on one side and emits from the sample toward a detector on the other side. Light X
A shutter opening / closing control mechanism of a fluorescent X-ray analyzer having a shutter that is operated to be switched between a closed position for blocking a line and an open position for releasing the blockage, wherein a shield cover for opening and closing the sample stage is opened. Then, after placing the sample on the window of the sample stage, with the shield cover closed, a shutter opening / closing control circuit started by turning on the measurement start switch, and the inside of the sample chamber after the pump operation switch is turned on And a shutter opening / closing section operable to move the shutter from the closed position to the open position by a control output sent from the shutter opening / closing control circuit when the degree of vacuum is equal to or more than a predetermined value. A shutter opening / closing control mechanism of the fluorescent X-ray analyzer.