JP2824177B2 - Manufacturing method of ferrule for optical fiber array - Google Patents

Manufacturing method of ferrule for optical fiber array

Info

Publication number
JP2824177B2
JP2824177B2 JP4259892A JP25989292A JP2824177B2 JP 2824177 B2 JP2824177 B2 JP 2824177B2 JP 4259892 A JP4259892 A JP 4259892A JP 25989292 A JP25989292 A JP 25989292A JP 2824177 B2 JP2824177 B2 JP 2824177B2
Authority
JP
Japan
Prior art keywords
optical fiber
groove
substrate
ferrule
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4259892A
Other languages
Japanese (ja)
Other versions
JPH06109953A (en
Inventor
隆 太田
暢嗣 福山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Priority to JP4259892A priority Critical patent/JP2824177B2/en
Priority to US08/070,619 priority patent/US5379360A/en
Priority to DE69320541T priority patent/DE69320541T2/en
Priority to EP93304295A priority patent/EP0573288B1/en
Publication of JPH06109953A publication Critical patent/JPH06109953A/en
Application granted granted Critical
Publication of JP2824177B2 publication Critical patent/JP2824177B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、光ファイバを光学素子
と接続する場合等に、光ファイバを整列固定する目的で
使用する光ファイバアレイ用フェルールの製造方法に関
するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a ferrule for an optical fiber array used for aligning and fixing an optical fiber when connecting the optical fiber to an optical element.

【0002】[0002]

【従来の技術】光ファイバと光学素子との接続に使用さ
れる従来の光ファイバアレイは、図6に示されるように
V溝基板50と上基板51とから構成されたもので、V溝基
板50には裸ファイバを収納するための光ファイバ収納溝
52と、光ファイバの被覆部を収納するための座ぐり部53
とが形成され、また上基板51の下面にも光ファイバの被
覆部を収納するための座ぐり部54を形成したものであっ
た。
2. Description of the Related Art A conventional optical fiber array used for connection between an optical fiber and an optical element comprises a V-groove substrate 50 and an upper substrate 51 as shown in FIG. 50 has an optical fiber storage groove for storing bare fiber
52 and a counterbore for accommodating the optical fiber coating 53
And a counterbore 54 for accommodating the covering portion of the optical fiber is also formed on the lower surface of the upper substrate 51.

【0003】しかしこのような従来の構造のものは、セ
ラミックス等に座ぐり部53、54を超音波加工する必要が
あるために加工の手数とコストがかかること、座ぐり部
53、54を大きめに作るので光ファイバの先端が光ファイ
バ収納溝52に正しく乗らないおそれがあること、V溝基
板50と上基板51との間で位置ずれが生じるおそれがある
こと等の問題があった。
However, such a conventional structure requires ultrasonic machining of the counterbore portions 53 and 54 on ceramics or the like, which increases the processing time and cost.
Since the 53 and 54 are made large, there is a problem that the tip of the optical fiber may not be properly placed in the optical fiber storage groove 52, and that a positional shift may occur between the V-groove substrate 50 and the upper substrate 51. was there.

【0004】このような問題点を解決するために、本発
明者は図7に示されるような構造の光ファイバアレイ用
フェルールを先に発明し、特願平4-142682号として出願
中である。これは、上部平面4に光ファイバ収納溝7を
形成するとともに、これに段差5を介して下部平面6を
設けたV溝基板1と、上部平面4の上に載せられて裸フ
ァイバを固定するファイバ固定基板2と、下部平面6の
上に載せられて光ファイバの被覆部を固定する上基板3
とから構成されたもので、図4のものに比較して加工が
容易であるうえに段差5を利用してV溝基板1に対する
上基板3の位置決めを容易に行えるようにしたものであ
る。
In order to solve such a problem, the present inventor has previously invented a ferrule for an optical fiber array having a structure as shown in FIG. 7 and has filed an application as Japanese Patent Application No. 4-42682. . In this method, an optical fiber housing groove 7 is formed in an upper plane 4 and a V-groove substrate 1 having a lower plane 6 provided on the upper plane 4 via a step 5 to fix a bare fiber placed on the upper plane 4. A fiber fixing substrate 2 and an upper substrate 3 mounted on the lower flat surface 6 for fixing the covering portion of the optical fiber.
The processing is easier than that of FIG. 4, and the positioning of the upper substrate 3 with respect to the V-groove substrate 1 can be easily performed using the step 5.

【0005】ところがその後に実用化を図るうえで、こ
の光ファイバアレイ用フェルールには次の問題があるこ
とが判明した。 V溝基板1に対する上基板3の位置決めは、段差5
を利用して縦方向には容易に行えるが、横方向の位置決
めに時間がかかること。 光ファイバ収納溝7に対して直角に端面を研磨する
必要があるため、V溝基板1の側面を基準面として利用
して研磨を行っているが、そのためにはV溝基板1の端
面が必ず外側に出ている必要がある。しかし上基板3が
わずかでもずれてその端面が出てしまうと、研磨基準面
が正確に確保できず研磨角度不良となること。 上基板3をV溝基板1に接着した接着剤が基準面に
滲み出し易く、これを後加工で除去する際にカケ不良が
生じ易いこと。
However, for practical use, it has been found that the ferrule for an optical fiber array has the following problems. The positioning of the upper substrate 3 with respect to the V-groove substrate 1
Although it can be easily performed in the vertical direction by using, the positioning in the horizontal direction takes time. Since the end face needs to be polished at right angles to the optical fiber housing groove 7, the polishing is performed by using the side surface of the V-groove substrate 1 as a reference plane. You need to be outside. However, if the upper substrate 3 is slightly displaced and its end surface comes out, the polishing reference surface cannot be accurately secured, resulting in a poor polishing angle. The adhesive bonding the upper substrate 3 to the V-groove substrate 1 easily oozes out on the reference surface, and easily removes chips when it is removed by post-processing.

【0006】[0006]

【発明が解決しようとする課題】本発明は上記した先願
の問題点を解消し、組立工数を大幅に削減することがで
きるとともに、研磨角度不良が低減でき、また接着剤の
滲み出しに伴うカケ不良も防止できる光ファイバアレイ
用フェルールの製造方法を提供するために完成されたも
のである。
SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems of the prior application, can greatly reduce the number of assembling steps, can reduce the polishing angle defect, and is accompanied by the bleeding of the adhesive. The present invention has been completed in order to provide a method of manufacturing a ferrule for an optical fiber array that can also prevent chipping defects.

【0007】[0007]

【課題を解決するための手段】上記の課題を解決するた
めになされた本発明は、数群の光ファイバ収納溝と、こ
れに対して直角方向に形成された段差溝とを持つウエハ
ーを製作し、横長の上部集積基板における下面の前記各
光ファイバ収納溝に対応する位置に被覆部収納溝を形成
して、該上部集積基板を前記段差溝に位置合わせして接
着したうえ、ウエハーとともに上部集積基板を少なく
とも光ファイバ収納溝と平行に切断してチップ化するこ
とを特徴とするものである。
SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention is directed to manufacturing a wafer having several groups of optical fiber receiving grooves and step grooves formed in a direction perpendicular to the grooves. And each of the lower surfaces of the horizontally long upper integrated substrate
Forming a cover storage groove at the position corresponding to the optical fiber storage groove
To, after which the upper integrated substrate was bonded in alignment with the stepped grooves, with parallel cutting at least the optical fiber storage groove the upper stacking substrate wafer is characterized in that chip.

【0008】[0008]

【実施例】以下に本発明を図示の実施例に沿って更に詳
細に説明する。まず図1に示すように、ガラス板8の上
面にワックス9によってセラミック製の1枚のウエハー
10を固定し、このウエハー10の上面に、数群の光ファイ
バ収納溝11を平行に形成する。実施例では5芯の光ファ
イバに対応する光ファイバ収納溝11が4群形成されてい
る。この溝加工は、研削砥石によって精度よくかつ効率
よく行うことができる。次にこれらの光ファイバ収納溝
11に対して直角方向に、段差12を持たせて段差溝13を形
成する。その数は実施例では2列であるが、任意に増減
させることができ、1列であってもよい。この結果、図
1に示すような数群の光ファイバ収納溝11と段差溝13と
を持つウエハーが製作される。なおこのようなウエハー
の製作工程は必ずしも実施例の順である必要はなく、段
差溝13が形成されたウエハー10に数群の光ファイバ収納
溝11を平行に形成してもよい。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in more detail with reference to the illustrated embodiments. First, as shown in FIG. 1, a single ceramic wafer is placed on the upper surface of a glass plate 8 with wax 9.
10 is fixed, and several groups of optical fiber storage grooves 11 are formed on the upper surface of the wafer 10 in parallel. In this embodiment, four groups of optical fiber storage grooves 11 corresponding to five-core optical fibers are formed. This groove processing can be performed accurately and efficiently by a grinding wheel. Next, these optical fiber storage grooves
A step groove 13 is formed so as to have a step 12 in a direction perpendicular to 11. Although the number is two rows in the embodiment, it can be arbitrarily increased or decreased and may be one row. As a result, a wafer having several groups of optical fiber housing grooves 11 and step grooves 13 as shown in FIG. 1 is manufactured. The steps of manufacturing such a wafer do not necessarily have to be in the order of the embodiment, and several groups of optical fiber housing grooves 11 may be formed in parallel on the wafer 10 on which the step grooves 13 are formed.

【0009】これとは別に、図2に示されるような横長
の上部集積基板14を作製しておく。この上部集積基板14
は、図3に拡大して示した上基板15が複数個一体化され
たもので、実施例では2×4の上基板15が一体化された
形状となっているが、1列のものであってもよい。各上
基板15は門型の形状であり、その中央下面には上記の光
ファイバ収納溝11に対応させて、光ファイバの被覆部を
収納するための被覆部収納溝が形成されている。また角
型の樹脂流し込み溝17が形成されている。
Separately, a horizontally long upper integrated substrate 14 as shown in FIG. 2 is prepared. This upper integrated substrate 14
Is a shape in which a plurality of upper substrates 15 shown in an enlarged manner in FIG. 3 are integrated. In the embodiment, the shape is such that a 2 × 4 upper substrate 15 is integrated. There may be. Each of the upper substrates 15 has a gate-shaped shape, and a covering portion accommodating groove for accommodating the covering portion of the optical fiber is formed on the lower surface at the center corresponding to the optical fiber accommodating groove 11. Further, a rectangular resin pouring groove 17 is formed.

【0010】この上部集積基板14は、図2に示すように
前記したウエハー10の段差溝13にエポキシ樹脂系等の接
着剤を利用して正確に接着固定される。そしてその後に
図2に一点鎖線で示すように上部集積基板14とウエハー
10とを少なくとも光ファイバ収納溝11と平行に切断し、
ガラス板8から外すと図3に示すようなチップ化された
光ファイバアレイ用フェルールとなる。実施例では1枚
のウエハー10から、16個の光ファイバアレイ用フェルー
ルが同時に製造されることとなる。
As shown in FIG. 2, the upper integrated substrate 14 is accurately bonded and fixed to the step groove 13 of the wafer 10 using an adhesive such as an epoxy resin. Then, as shown by the dashed line in FIG.
10 and cut at least parallel to the optical fiber storage groove 11,
When removed from the glass plate 8, a ferrule for an optical fiber array is formed into a chip as shown in FIG. In the embodiment, 16 ferrules for an optical fiber array are manufactured simultaneously from one wafer 10.

【0011】なお、図4、図5に示すように、上部集積
基板14の樹脂流し込み溝17を半円形に形成しておくこと
もできる。樹脂流し込み溝17をこのようなR形状として
おけば、接着剤の硬化時の収縮応力が緩和され、クラッ
クの発生を防止することができる利点がある。
As shown in FIGS. 4 and 5, the resin pouring groove 17 of the upper integrated substrate 14 may be formed in a semicircular shape. If the resin casting groove 17 is formed in such an R shape, there is an advantage that the contraction stress at the time of curing of the adhesive is alleviated, and the occurrence of cracks can be prevented.

【0012】このようにして得られた光ファイバアレイ
用フェルールは、ウエハー10が切断されたV溝基板16の
上面に上部集積基板14が切断された上基板15が固定され
た形状であるので、両者の隙間に形成されている被覆部
収納溝から多芯 (実施例では5 芯) の光ファイバを挿入
すると、各光ファイバの先端の裸ファイバ部が正確に位
置決めされた状態で光ファイバ収納溝11に入り、ファイ
バ固定基板により接着固定した後、端面を光学研磨する
ことにより、光ファイバアレイとして従来のものと同様
に他の光学機器との接続を行うことができる。
The thus obtained ferrule for an optical fiber array has a shape in which the upper substrate 15 from which the upper integrated substrate 14 is cut is fixed on the upper surface of the V-groove substrate 16 from which the wafer 10 is cut. When a multi-core (five in this embodiment) optical fiber is inserted from the sheath storage groove formed in the gap between the two, the optical fiber storage groove is positioned with the bare fiber portion at the tip of each optical fiber accurately positioned. After entering into 11 and adhering and fixing with a fiber fixing substrate, the end face is optically polished, so that an optical fiber array can be connected to other optical devices in the same manner as a conventional optical fiber array.

【0013】[0013]

【発明の効果】本発明の光ファイバアレイ用フェルール
の製造方法によれば、従来方法に比較して次の通りの多
くの利点を得ることができる。 従来は上基板3を1枚ずつ別々に加工、切断してい
たのに対して、本発明では上部集積基板14を一度に切断
することによって多数の光ファイバアレイ用フェルール
を製造することができ、加工の工数や時間を大幅に削減
することができる。 特に、加工上多くの手数を必要としていた個々の上
基板3の固定作業がなくなり、組立時間の大幅な低減が
可能となる。 上部集積基板14とウエハー10とを同時に切断した状
態で光ファイバアレイ用フェルールが製造されるので、
従来のように上基板3がV溝基板1に対してずれるおそ
れを全くなくすることができる。 また従来のような接着剤の滲み出しをほとんどなく
することができ、滲み出した接着剤の除去に伴うカケ不
良も防止できる。 切断面全体が研磨時の基準面となるので、従来のよ
うにV溝基板1の側面のみを基準面としていた場合と異
なり、研磨基準面を十分確保することができ、研磨角度
の傾きによる研磨角度不良を低減することができる。
According to the method of manufacturing a ferrule for an optical fiber array of the present invention, the following many advantages can be obtained as compared with the conventional method. Conventionally, the upper substrate 3 was separately processed and cut one by one, but in the present invention, by cutting the upper integrated substrate 14 at a time, a large number of optical fiber array ferrules can be manufactured. Processing man-hours and time can be greatly reduced. In particular, the work of fixing the individual upper substrates 3 that required a lot of work in processing is eliminated, and the assembling time can be greatly reduced. Since the optical fiber array ferrule is manufactured in a state where the upper integrated substrate 14 and the wafer 10 are cut at the same time,
The possibility that the upper substrate 3 is shifted from the V-groove substrate 1 as in the related art can be completely eliminated. Further, the bleeding of the adhesive as in the related art can be almost eliminated, and the chipping defect due to the removal of the bleeding adhesive can also be prevented. Since the entire cut surface serves as a reference surface for polishing, unlike the conventional case where only the side surface of the V-groove substrate 1 is used as the reference surface, a sufficient polishing reference surface can be secured, and polishing by the inclination of the polishing angle can be performed. Angle defects can be reduced.

【図面の簡単な説明】[Brief description of the drawings]

【図1】ウエハーに溝加工した状態を示す斜視図であ
る。
FIG. 1 is a perspective view showing a state where a groove is formed in a wafer.

【図2】ウエハーに上部集積基板を接着した状態を示す
斜視図である。
FIG. 2 is a perspective view showing a state where an upper integrated substrate is bonded to a wafer.

【図3】本発明の方法により製造された光ファイバアレ
イ用フェルールを示す斜視図である。
FIG. 3 is a perspective view showing a ferrule for an optical fiber array manufactured by the method of the present invention.

【図4】ウエハーに他の形状の上部集積基板を接着した
状態を示す斜視図である。
FIG. 4 is a perspective view showing a state where an upper integrated substrate of another shape is bonded to a wafer.

【図5】図4の上部集積基板を使用して得られた光ファ
イバアレイ用フェルールを示す斜視図である。
FIG. 5 is a perspective view showing an optical fiber array ferrule obtained by using the upper integrated substrate of FIG. 4;

【図6】従来の光ファイバアレイを示す斜視図である。FIG. 6 is a perspective view showing a conventional optical fiber array.

【図7】先願の光ファイバアレイを示す斜視図である。FIG. 7 is a perspective view showing an optical fiber array of the prior application.

【符号の説明】[Explanation of symbols]

10 ウエハー 11 光ファイバ収納溝 13 段差溝 14 上部集積基板 10 Wafer 11 Optical fiber storage groove 13 Step groove 14 Upper integrated substrate

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 数群の光ファイバ収納溝と、これに対し
て直角方向に形成された段差溝とを持つウエハーを製作
し、横長の上部集積基板における下面の前記各光ファイ
バ収納溝に対応する位置に被覆部収納溝を形成して、該
上部集積基板を前記段差溝に位置合わせして接着したう
え、ウエハーとともに上部集積基板を少なくとも光フ
ァイバ収納溝と平行に切断してチップ化することを特徴
とする光ファイバアレイ用フェルールの製造方法。
1. A wafer having a plurality of groups of optical fiber storage grooves and a step groove formed at right angles to the plurality of optical fiber storage grooves is manufactured, and each of the optical fibers on a lower surface of a horizontally long upper integrated substrate is manufactured.
To form a covering portion housing groove at a position corresponding to the bar receiving groove, the <br/> upper stacking substrate after having adhered aligned to the stepped groove, at least the optical fiber storage groove the upper stacking substrates with wafer A ferrule for an optical fiber array, wherein the ferrule is cut into parallel chips.
JP4259892A 1992-06-03 1992-09-29 Manufacturing method of ferrule for optical fiber array Expired - Lifetime JP2824177B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP4259892A JP2824177B2 (en) 1992-09-29 1992-09-29 Manufacturing method of ferrule for optical fiber array
US08/070,619 US5379360A (en) 1992-06-03 1993-06-02 Optical fiber connector and method of manufacturing the same
DE69320541T DE69320541T2 (en) 1992-06-03 1993-06-03 Fiber optic connector and its manufacturing method
EP93304295A EP0573288B1 (en) 1992-06-03 1993-06-03 Optical fiber connector and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4259892A JP2824177B2 (en) 1992-09-29 1992-09-29 Manufacturing method of ferrule for optical fiber array

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP09284752A Division JP3090899B2 (en) 1997-10-17 1997-10-17 Ferrule for optical fiber array

Publications (2)

Publication Number Publication Date
JPH06109953A JPH06109953A (en) 1994-04-22
JP2824177B2 true JP2824177B2 (en) 1998-11-11

Family

ID=17340391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4259892A Expired - Lifetime JP2824177B2 (en) 1992-06-03 1992-09-29 Manufacturing method of ferrule for optical fiber array

Country Status (1)

Country Link
JP (1) JP2824177B2 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6356619A (en) * 1986-08-27 1988-03-11 Sumitomo Electric Ind Ltd Coupling method for multicore optical connector and multicore optical connector ferrule used for the same
JPS63104007A (en) * 1986-10-22 1988-05-09 Sumitomo Electric Ind Ltd Forming method for optical connector

Also Published As

Publication number Publication date
JPH06109953A (en) 1994-04-22

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