JP2804483B2 - Two-dimensional motion mechanism - Google Patents
Two-dimensional motion mechanismInfo
- Publication number
- JP2804483B2 JP2804483B2 JP63184234A JP18423488A JP2804483B2 JP 2804483 B2 JP2804483 B2 JP 2804483B2 JP 63184234 A JP63184234 A JP 63184234A JP 18423488 A JP18423488 A JP 18423488A JP 2804483 B2 JP2804483 B2 JP 2804483B2
- Authority
- JP
- Japan
- Prior art keywords
- axis
- rod
- ball screw
- axis ball
- bevel gears
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Standing Axle, Rod, Or Tube Structures Coupled By Welding, Adhesion, Or Deposition (AREA)
- Transmission Devices (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明はＸ−Ｙステージ等の２次元運動機構に関す
る。Description: TECHNICAL FIELD The present invention relates to a two-dimensional motion mechanism such as an XY stage.
（従来の技術） 従来、移動体を所定の矩形平面内で移動可能に設けた
２次元運動機構としては、本願発明者が開発し、実開昭
59−88556号公報に開示される技術が有る。この技術は
３次元運動機構であるが、平行に配された２組のＸ軸ガ
イドと、平行に配されると共に、前記Ｘ軸ガイドとは略
同一平面内で直交する２組のＹ軸ガイドと、前記Ｘ軸ガ
イドとＹ軸ガイドとで囲まれて形成される矩形平面内を
移動可能な移動体と、前記Ｘ軸ガイドに沿って移動可能
に配された２個のＸ軸駆動部と、前記Ｙ軸ガイドに沿っ
て移動可能に配された２個のＹ軸駆動部と、前記移動体
へ前記Ｙ軸ガイドに平行に挿通され、両端が前記Ｘ軸駆
動部に連結されたＸ軸ロッドと、前記移動体へ前記Ｘ軸
ガイドに平行に挿通され、両端が前記Ｙ軸駆動部に連結
されたＹ軸ロッドとを有し、移動体は２次元運動を行う
構成になっている。(Prior Art) Conventionally, a two-dimensional motion mechanism in which a moving body is provided so as to be movable within a predetermined rectangular plane has been developed by the present inventor,
There is a technique disclosed in JP-A-59-88556. This technology is a three-dimensional motion mechanism, and two sets of X-axis guides arranged in parallel, and two sets of Y-axis guides arranged in parallel and orthogonal to the X-axis guide in substantially the same plane. A movable body movable in a rectangular plane formed by being surrounded by the X-axis guide and the Y-axis guide; and two X-axis driving units movably arranged along the X-axis guide. Two Y-axis driving sections movably arranged along the Y-axis guide, and an X-axis inserted through the moving body in parallel with the Y-axis guide and both ends connected to the X-axis driving section. The mobile body has a configuration in which a two-dimensional motion is performed, the mobile body having a rod and a Y-axis rod that is inserted into the mobile body in parallel with the X-axis guide and both ends are connected to the Y-axis drive unit.
（発明が解決しようとする課題） しかしながら、上記の従来の２次元運動機構には次の
ような課題が有る。(Problems to be Solved by the Invention) However, the above-described conventional two-dimensional motion mechanism has the following problems.
１台の２次元運動機構装置で多種類の作業を行う場
合、移動体を交換する必要が有る。その際、Ｘ軸ロッド
及びＹ軸ロッドをＸ軸駆動体及びＹ軸駆動体へ連結する
位置を正確に決める調整が難しい。特にＸ軸ロッド及び
／またはＹ軸ロッドの数が複数本になるとさらに連結位
置の調整は難しくなり装置の停止時間が長くなってしま
い作業量がダウンするという課題が有る。When performing various types of work with one two-dimensional motion mechanism device, it is necessary to replace the moving body. At this time, it is difficult to make an accurate determination of the position at which the X-axis rod and the Y-axis rod are connected to the X-axis driver and the Y-axis driver. In particular, when the number of X-axis rods and / or Y-axis rods is more than one, it is more difficult to adjust the connection position, the stopping time of the device becomes longer, and the amount of work is reduced.
従って、本発明は移動体を交換する際に容易にＸ軸ロ
ッド及びＹ軸ロッドを、Ｘ軸駆動体及びＹ軸駆動体の所
定連結位置へ正確に連結可能な２次元運動機構を提供す
ることを目的とする。Therefore, the present invention provides a two-dimensional motion mechanism capable of easily and accurately connecting the X-axis rod and the Y-axis rod to predetermined connection positions of the X-axis drive body and the Y-axis drive body when exchanging the moving body. With the goal.
（課題を解決するための手段） 上記課題を解決するため、本発明は次の構成を備え
る。(Means for Solving the Problems) In order to solve the above problems, the present invention has the following configuration.
すなわち、平行に配された２個のＸ軸ボールネジと、
平行に配されると共に、軸線が前記Ｘ軸ボールネジの軸
線と直交するよう配された２個のＹ軸ボールネジと、前
記各々のＸ軸ボールネジに螺合され、Ｘ軸ボールネジの
回転に伴いＸ軸ボールネジ上を移動可能な２個のＸ軸駆
動体と、前記各々のＹ軸ボールネジに螺合され、Ｙ軸ボ
ールネジの回転に伴いＹ軸ボールネジ上を移動可能な２
個のＹ軸駆動体と、両端がそれぞれ前記Ｘ軸駆動体に連
結されると共に、前記Ｙ軸ボールネジへ平行に設けられ
たＸ軸ロッドと、両端がそれぞれ前記Ｙ軸駆動体に連結
されると共に、前記Ｘ軸ボールネジへ平行に設けられた
Ｙ軸ロッドと、前記Ｘ軸ロッドと前記Ｙ軸ロッドが挿通
され、Ｘ軸ロッド上及びＹ軸ロッド上を移動自在に設け
られた移動体とを有する２次元運動機構において、前記
Ｘ軸ボールネジの一方を直接回転させる１個のＸ軸駆動
手段と、前記各々のＸ軸ボールネジと一体に回転可能に
設けられた２個の第１の笠歯車、及び両端に該２個の第
１の笠歯車とそれぞれ歯合する笠歯車が設けられた第１
の伝達軸から成り、前記Ｘ軸駆動手段の回転力を他方の
Ｘ軸ボールネジへ伝達すると共に、他方のＸ軸ボールネ
ジを一方のＸ軸ボールネジと同一方向へ回転させる第１
の伝達機構と、前記Ｙ軸ボールネジの一方を直接回転さ
せる１個のＹ軸駆動手段と、前記各々のＹ軸ボールネジ
と一体に回転可能に設けられた２個の第２の笠歯車、及
び両端に該２個の第２の笠歯車とそれぞれ歯合する笠歯
車が設けられた第２の伝達軸から成り、前記Ｙ軸駆動手
段の回転力を一方のＹ軸ボールネジへ伝達すると共に、
他方のＹ軸ボールネジを他方のＹ軸ボールネジと同一方
向へ回転させる第２の伝達機構と、前記Ｘ軸ロッド及び
Ｙ軸ロッドを、前記Ｘ軸駆動体及びＹ軸駆動体へそれぞ
れ連結する際に、所定の位置へ連結するための位置決め
部を有する連結手段とを具備することを特徴とする。That is, two X-axis ball screws arranged in parallel,
Two Y-axis ball screws which are arranged in parallel and whose axes are orthogonal to the axis of the X-axis ball screw, and which are screwed to the respective X-axis ball screws; Two X-axis driving members movable on the ball screw, and two screw members screwed to the respective Y-axis ball screws and movable on the Y-axis ball screw with rotation of the Y-axis ball screw.
The Y-axis driving body and both ends are respectively connected to the X-axis driving body, and the X-axis rod provided in parallel with the Y-axis ball screw, and both ends are respectively connected to the Y-axis driving body. A Y-axis rod provided in parallel with the X-axis ball screw, and a moving body through which the X-axis rod and the Y-axis rod are inserted and movably provided on the X-axis rod and the Y-axis rod. In the two-dimensional motion mechanism, one X-axis driving means for directly rotating one of the X-axis ball screws, two first bevel gears provided to be rotatable integrally with the respective X-axis ball screws, and A first bevel gear provided at both ends with bevel gears meshing with the two first bevel gears, respectively.
A transmission shaft for transmitting the rotational force of the X-axis driving means to the other X-axis ball screw and rotating the other X-axis ball screw in the same direction as the one X-axis ball screw.
Transmission mechanism, one Y-axis driving means for directly rotating one of the Y-axis ball screws, two second bevel gears provided to be rotatable integrally with the respective Y-axis ball screws, and both ends And a second transmission shaft provided with bevel gears meshing with the two second bevel gears, respectively, for transmitting the rotational force of the Y-axis driving means to one of the Y-axis ball screws,
A second transmission mechanism for rotating the other Y-axis ball screw in the same direction as the other Y-axis ball screw, and connecting the X-axis rod and the Y-axis rod to the X-axis driver and the Y-axis driver, respectively. And a connecting means having a positioning portion for connecting to a predetermined position.
（作用） 作用について説明する。(Action) The action will be described.
２個のＸ軸ボールネジ及び２個のＹ軸ボールネジを、
各々１個のＸ軸駆動手段及び第１の伝達機構と１個のＹ
軸駆動手段及び第２の伝達機構を用いて回転させる。こ
のため、第１の伝達軸及び第２の伝達軸が捩じられて捩
じり応力が発生し、その捩じり応力の作用によってバッ
クラッシュが打ち消され、Ｘ軸ロッド及びＹ軸ロッドの
繰り返し位置決め精度が向上でき、結果として移動体の
繰り返し位置決め精度を向上できる。Two X-axis ball screws and two Y-axis ball screws
One X-axis driving means, one first transmission mechanism, and one Y
Rotation is performed using the shaft driving means and the second transmission mechanism. For this reason, the first transmission shaft and the second transmission shaft are twisted to generate a torsional stress, and the backlash is canceled by the action of the torsional stress, and the X-axis rod and the Y-axis rod are repeated. The positioning accuracy can be improved, and as a result, the repeated positioning accuracy of the moving body can be improved.
そして、高い繰り返し位置決め精度が要求される本機
構において、位置決め部を有する連結手段によって、Ｘ
軸ロッド及びＹ軸ロッドを、それぞれＸ軸駆動体及びＹ
軸駆動体の連結位置へ正確かつ容易に連結できる。これ
により、移動体の交換を調整作業を行うことなく容易に
行うことができるのである。Then, in the present mechanism that requires high repetitive positioning accuracy, the connecting means having the positioning portion allows X
The X-axis driving body and the Y-axis rod
It can be connected accurately and easily to the connection position of the shaft drive. Thus, the exchange of the moving body can be easily performed without performing the adjustment work.
（実施例） 以下、本発明の好適な実施例について添付図面と共に
詳述する。Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
まず構成について説明する。 First, the configuration will be described.
第１図において、10はフレームであり、中央がくり抜
かれた四角い枠状をなす剛体に形成されている。In FIG. 1, reference numeral 10 denotes a frame which is formed as a rigid body having a square frame shape with a hollow center.
12、14はＸ軸ガイドの一例であるＸ軸ボールネジであ
り、平行に配されている。Ｘ軸ボールネジ12、14は不図
示の支持部材によってフレーム10上に回動自在に支持さ
れている。Reference numerals 12 and 14 denote X-axis ball screws, which are examples of the X-axis guide, and are arranged in parallel. The X-axis ball screws 12 and 14 are rotatably supported on the frame 10 by support members (not shown).
16、18はＹ軸ガイドの一例であるＹ軸ボールネジであ
り、平行に配されていると共に、軸線がＸ軸ボールネジ
12、14の軸線と略同一平面内で直交するよう配されてい
る。Ｙ軸ボールネジ16、18もやはり不図示の支持部材に
よってフレーム10上に回動自在に支持されている。Reference numerals 16 and 18 denote Y-axis ball screws which are an example of a Y-axis guide.
They are arranged so as to be orthogonal to the axes of 12 and 14 in substantially the same plane. The Y-axis ball screws 16 and 18 are also rotatably supported on the frame 10 by support members (not shown).
20はＸ軸駆動手段であるＸ軸モータであり、各々のＸ
軸ボールネジ12、14と一体に回転可能に設けられた２個
の第１の笠歯車であるベベルギア24、24、及び両端に該
２個のベベルギア24、24とそれぞれ歯合する笠歯車（ベ
ベルギア24、24）が設けられた第１の伝達軸である軸22
とからなる第１の伝達機構を介して２個のＸ軸ボールネ
ジ12、14を同方向へ同速度で回転させる。Reference numeral 20 denotes an X-axis motor as X-axis driving means.
Bevel gears 24, 24, which are two first bevel gears, which are rotatably provided integrally with the shaft ball screws 12, 14, and bevel gears (bevel gears 24) meshing with the two bevel gears 24, 24 at both ends, respectively. , 24) which is the first transmission shaft provided with
The two X-axis ball screws 12, 14 are rotated at the same speed in the same direction via a first transmission mechanism consisting of
26はＹ軸駆動手段であるＹ軸モータであり、各々のＹ
軸ボールネジ16、18と一体に回転可能に設けられた２個
の第２の笠歯車であるベベルギア30、30、及び両端に該
２個のベベルギア30、30とそれぞれ歯合する笠歯車（ベ
ベルギア30、30）が設けられた第２の伝達軸である軸28
とからなる第２の伝達機構を介して２個のＹ軸ボールネ
ジ16、18を同方向へ同速度で回転させる。Reference numeral 26 denotes a Y-axis motor serving as a Y-axis driving unit.
Bevel gears 30, 30, which are two second bevel gears rotatably provided integrally with the shaft ball screws 16, 18, and bevel gears (bevel gears 30) meshing with the two bevel gears 30, 30 at both ends, respectively. , 30) is the second transmission shaft, the shaft 28
The two Y-axis ball screws 16, 18 are rotated at the same speed in the same direction via a second transmission mechanism consisting of
32、34はＸ軸駆動体であり、Ｘ軸ボールネジ12、14へ
それぞれ螺合され、Ｘ軸ボールネジ12、14が回転するこ
とによりＸ軸ボールネジ12、14上を移動する。Reference numerals 32 and 34 denote X-axis driving bodies, which are screwed to the X-axis ball screws 12 and 14, respectively, and move on the X-axis ball screws 12 and 14 as the X-axis ball screws 12 and 14 rotate.
36、38はＹ軸駆動体であり、Ｙ軸ボールネジ16、18へ
それぞれ螺合され、Ｙ軸ボールネジ16、18が回転するこ
とによりＹ軸ボールネジ16、18上を移動する。Reference numerals 36 and 38 denote Y-axis driving bodies, which are screwed to the Y-axis ball screws 16 and 18, respectively, and move on the Y-axis ball screws 16 and 18 as the Y-axis ball screws 16 and 18 rotate.
40はＸ軸ロッドであり、Ｙ軸ボールネジ16、18へ平行
に配され、両端は連結手段42、44を介してＸ軸駆動体3
2、34へ連結されている。Numeral 40 denotes an X-axis rod, which is arranged in parallel with the Y-axis ball screws 16 and 18, and whose both ends are connected to the X-axis driving body 3 through connecting means 42 and 44.
2, 34.
46はＹ軸ロッドであり、Ｘ軸ボールネジ12、14へ平行
に配され、両端は連結手段48、50を介してＹ軸駆動体3
6、38へ連結されている。Reference numeral 46 denotes a Y-axis rod, which is disposed in parallel with the X-axis ball screws 12 and 14, and both ends of which are connected to the Y-axis driving body 3 through connecting means 48 and 50.
It is connected to 6, 38.
52は移動体でありＸ軸ロッド40とＹ軸ロッド46が直角
に挿通されており、Ｘ軸ボールネジ12、14とＹ軸ボール
ネジ16、18に囲まれて形成される矩形平面54内でＸ軸ロ
ッド40とＹ軸ロッド46上を移動することによりＸ−Ｙ方
向の２次元運動を行う。Reference numeral 52 denotes a moving body in which the X-axis rod 40 and the Y-axis rod 46 are inserted at right angles, and the X-axis is formed within a rectangular plane 54 formed by the X-axis ball screws 12, 14 and the Y-axis ball screws 16, 18. By moving on the rod 40 and the Y-axis rod 46, a two-dimensional motion in the XY directions is performed.
この移動体52にロボット装置のヘッド、工具もしくは
ワークを取り付け、矩形平面54内で位置決めを行ないつ
つ作業を行うことができる。また、移動体52には第１図
に図示したブロック状のものの他、第２図（ａ）〜
（ｄ）に示すように作業の用途等により様々な形状のも
のを取り付ける必要があり、Ｘ軸ロッド40、Ｙ軸ロッド
46と共に交換可能にする必要が有る。そのため本発明で
は連結手段42、44、48、50を用いている。第３図にＸ軸
ロッド40とＸ軸駆動体32を連結している連結手段42を示
す。他の連結手段44、48、50も同じ構造なので連結手段
42について説明する。A head, a tool, or a work of the robot device is attached to the moving body 52, and the work can be performed while performing positioning within the rectangular plane 54. In addition to the block-shaped moving body 52 shown in FIG.
As shown in (d), it is necessary to attach various shapes depending on the application of the work, etc.
Must be interchangeable with 46. Therefore, in the present invention, the connecting means 42, 44, 48, 50 are used. FIG. 3 shows a connecting means 42 for connecting the X-axis rod 40 and the X-axis driving body 32. Since the other connecting means 44, 48, 50 have the same structure, the connecting means
42 will be described.
第３図において56は延設部であり、Ｘ軸駆動体32の下
部から水平に延設されている。その延設部56上面には位
置決め部を構成する２本の位置決めピン58、60が立設さ
れている。また、延設部56には２個の雌螺孔62、64も穿
設されている。一方、66は連結部であり、Ｘ軸ロッド40
の端部へ固定されている。連結部66の底面には位置決め
ピン58、60と嵌合し、位置決め部を構成する位置決め孔
（不図示）が２個穿設されている。また、連結部66のフ
ランジ68、70には延設部56の雌螺孔62、64に対応する位
置に透孔72、74が穿設されている。連結部66の、延設部
56への取り付けは、連結部66の位置決め孔と延設部56の
位置決めピン58、60を嵌合させ、ボルト76、78を透孔7
2、74へ挿通させると共に雌螺孔62、64へ螺着させれば
Ｘ軸ロッド40のＸ軸駆動体32への連結が完了する。連結
部66を延設部56へ２本のボルト76、78を介して固定する
ので位置決めピン58、60及び位置決め孔からなる位置決
め部は無くてもよいように思われるが、迅速な位置決め
と、ボルト以外の他の手段、例えば連結部66と延設部56
を単に挾着する手段で取り付ける場合には位置決め部は
不可欠である。In FIG. 3, reference numeral 56 denotes an extending portion, which extends horizontally from the lower portion of the X-axis driving body 32. On the upper surface of the extending portion 56, two positioning pins 58, 60 constituting a positioning portion are erected. Further, two female screw holes 62 and 64 are also formed in the extension portion 56. On the other hand, 66 is a connecting portion, and the X-axis rod 40
Is fixed to the end. Two positioning holes (not shown) are formed in the bottom surface of the connecting portion 66 so as to be fitted with the positioning pins 58 and 60 and constitute a positioning portion. Further, through holes 72 and 74 are formed in the flanges 68 and 70 of the connecting portion 66 at positions corresponding to the female screw holes 62 and 64 of the extending portion 56. Extension part of connecting part 66
For attachment to the 56, the positioning holes of the connecting portion 66 and the positioning pins 58, 60 of the extension portion 56 are fitted, and the bolts 76, 78 are inserted through the through holes 7.
The connection of the X-axis rod 40 to the X-axis driving body 32 is completed by inserting the X-axis rod 40 into the female screw holes 62 and 64 and inserting the X-axis rod 40 into the female screw holes 62 and 64. Since the connecting portion 66 is fixed to the extending portion 56 via the two bolts 76 and 78, it seems that there is no need for the positioning portion including the positioning pins 58 and 60 and the positioning hole. Means other than bolts, such as the connecting portion 66 and the extension portion 56
The positioning part is indispensable when the parts are simply attached by means of clamping.
なお、実際にはＸ軸ボールネジ12、14及びＹ軸ボール
ネジ16、18等にはカバー（不図示）が取り付けられるた
め、延設部56はそのカバーより矩形平面54側へカボーに
設けられたスロット等から突出するようになっている。In addition, since a cover (not shown) is actually attached to the X-axis ball screws 12, 14 and the Y-axis ball screws 16, 18, etc., the extending portion 56 is provided with a slot provided on the board toward the rectangular plane 54 from the cover. And so on.
従って、移動体52の交換は、交換する移動体52に挿通
されたＸ軸ロッド40とＹ軸ロッド46の長さ（矩形平面54
のサイズで予め決められる）さえ同一ならば４個の連結
手段42、44、48、50の取り外しと付け換えで簡単に行な
うことができる。Therefore, the replacement of the moving body 52 is performed by changing the length (the rectangular plane 54) of the X-axis rod 40 and the Y-axis rod 46 inserted through the moving body 52 to be replaced.
Can be easily performed by removing and replacing the four connecting means 42, 44, 48, 50 if they are the same.
上述の実施例ではＸ軸ロッド40とＹ軸ロッド46の各一
本ずつ挿通された移動体52について説明したが、移動体
52が支持する工具もしくはワーク等が重い場合等、第４
図に示すように複数のＸ軸ロッド40a・・・及び／もし
くはＹ軸ロッド46a・・・が挿通された移動体52が用い
られる。その場合の連結手段42aを第５図に示す。第３
図と同様、Ｘ軸駆動体32に対応する連結手段42aで説明
する。延設部56の構造は第３図の例と同一である。長尺
の連結部66aは底面にはやはり位置決めピン58、60に嵌
合可能な位置決め孔（不図示）が穿設されている。ま
た、連結部66aには雌螺孔62、64に対応した位置に透孔7
2a、74aが穿設されており、ボルト76a、78aで延設部56
へ連結部66aを取り付けるようになっている。In the above-described embodiment, the moving body 52 in which each of the X-axis rod 40 and the Y-axis rod 46 is inserted has been described.
If the tool or work supported by 52 is heavy,
As shown in the figure, a moving body 52 into which a plurality of X-axis rods 40a... And / or Y-axis rods 46a. FIG. 5 shows the connecting means 42a in that case. Third
As in the case of the drawing, the description will be made on the connecting means 42a corresponding to the X-axis driving body 32. The structure of the extension portion 56 is the same as the example of FIG. A positioning hole (not shown) that can be fitted to the positioning pins 58 and 60 is also formed in the bottom surface of the long connecting portion 66a. The connecting portion 66a has through holes 7 at positions corresponding to the female screw holes 62 and 64.
2a and 74a are drilled, and the extension 56
The connecting portion 66a is attached to the housing.
以上、本発明の好適な実施例について種々述べて来た
が、本発明は上述の実施例に限定されるのではなく、発
明の精神を逸脱しない範囲で多くの改変を施し得るのは
もちろんである。As described above, various preferred embodiments of the present invention have been described. However, the present invention is not limited to the above-described embodiments, and it goes without saying that many modifications can be made without departing from the spirit of the invention. is there.
（発明の効果） 本発明に係る２次元運動機構を用いると、２個のＸ軸
ボールネジ及び２個のＹ軸ボールネジを、各々１個のＸ
軸駆動手段及び第１の伝達機構と１個のＹ軸駆動手段及
び第２の伝達機構を用いて回転させる。このため、第１
の伝達軸及び第２の伝達軸が捩じられて捩じり応力が発
生し、その捩じり応力の作用によってバックラッシュが
打ち消され、Ｘ軸ロッド及びＹ軸ロッドの繰り返し位置
決め精度が向上でき、結果として移動体の繰り返し位置
決め精度を向上できるという著効を奏する。(Effect of the Invention) When the two-dimensional motion mechanism according to the present invention is used, two X-axis ball screws and two Y-axis ball screws are each replaced with one X-axis ball screw.
The rotation is performed using the shaft driving means and the first transmission mechanism, and one Y-axis driving means and the second transmission mechanism. Therefore, the first
The transmission shaft and the second transmission shaft are twisted to generate torsional stress, the backlash is canceled by the action of the torsional stress, and the repeat positioning accuracy of the X-axis rod and the Y-axis rod can be improved. As a result, there is a remarkable effect that the positioning accuracy of the moving body can be improved.
そして、高い繰り返し位置決め精度が要求される本機
構において、位置決め部を有する連結手段によって、Ｘ
軸ロッド及びＹ軸ロッドを、それぞれＸ軸駆動体及びＹ
軸駆動体の連結位置へ正確かつ容易に連結できる。これ
により、移動体の交換を容易に行うことができる。すな
わち、形状、重量等の仕様の異なる移動体、Ｘ軸ロッド
およびＹ軸ロッドからなるユニットを、位置決め部を有
する連結手段によって容易かつ正確に交換でき、２次元
運動機構（ロボット）の仕様変更に好適かつ柔軟に対応
できるのである。Then, in the present mechanism that requires high repetitive positioning accuracy, the connecting means having the positioning portion allows X
The X-axis driving body and the Y-axis rod
It can be connected accurately and easily to the connection position of the shaft drive. Thereby, the exchange of the moving body can be easily performed. In other words, a moving body having different specifications such as a shape and a weight, and a unit composed of an X-axis rod and a Y-axis rod can be easily and accurately exchanged by a connecting means having a positioning portion. It is possible to respond appropriately and flexibly.
従って、本発明によれば、移動体の繰り返し位置決め
精度を向上できると共に、種々の仕様の移動体に対応
し、その移動体の迅速かつ正確な交換が可能であるとい
う著効を奏する。Therefore, according to the present invention, the repetitive positioning accuracy of the moving body can be improved, and the moving body of various specifications can be supported, and the moving body can be quickly and accurately replaced.
第１図は本発明に係る２次元運動機構の実施例を示した
平面図、第２図（ａ）〜（ｄ）は移動体の他の態様を示
した平面図、第３図は連結手段を示した斜視図、第４図
（ａ）〜（ｅ）は複数のＸ軸ロッド及び／もしくはＹ軸
ロッドを用いた移動体の平面図、第５図は第４図に示し
た移動体を取り付けるための連結手段の斜視図。 12,14……Ｘ軸ボールネジ、 16,18……Ｙ軸ボールネジ、 20……Ｘ軸モータ、26……Ｙ軸モータ、 32,34……Ｘ軸駆動体、 36,38……Ｙ軸駆動体、 40……Ｘ軸ロッド、42,44……連結手段、46……Ｙ軸ロ
ッド、 48,50……連結手段、52……移動体、 58,60……位置決めピン。FIG. 1 is a plan view showing an embodiment of a two-dimensional movement mechanism according to the present invention, FIGS. 2 (a) to 2 (d) are plan views showing another embodiment of a moving body, and FIG. 4 (a) to 4 (e) are plan views of a moving body using a plurality of X-axis rods and / or Y-axis rods, and FIG. 5 is a plan view of the moving body shown in FIG. FIG. 4 is a perspective view of a connecting means for attachment. 12,14 ... X-axis ball screw, 16,18 ... Y-axis ball screw, 20 ... X-axis motor, 26 ... Y-axis motor, 32,34 ... X-axis driver, 36,38 ... Y-axis drive Body, 40 X-rod, 42, 44 Connecting means, 46 Y-rod, 48, 50 Connecting means, 52 Moving body, 58, 60 Positioning pin.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭57−12155（ＪＰ，Ａ) 特開 昭58−198369（ＪＰ，Ａ) 特開 平１−303359（ＪＰ，Ａ) 特開 昭60−33810（ＪＰ，Ａ) 実開 昭59−88556（ＪＰ，Ｕ) 特公 昭43−11186（ＪＰ，Ｂ１) 実公 昭43−11187（ＪＰ，Ｙ１) (58)調査した分野(Int.Cl.6，ＤＢ名) F16H 25/20 F16H 25/24──────────────────────────────────────────────────続 き Continuation of front page (56) References JP-A-57-12155 (JP, A) JP-A-58-198369 (JP, A) JP-A-1-303359 (JP, A) JP-A 60-1983 33810 (JP, A) JP-A-59-88556 (JP, U) JP-B-43-11186 (JP, B1) JP-B-43-11187 (JP, Y1) (58) Fields investigated (Int. Cl. 6 , DB name) F16H 25/20 F16H 25/24
Claims (1)
線と直交するよう配された２個のＹ軸ボールネジと、 前記各々のＸ軸ボールネジに螺合され、Ｘ軸ボールネジ
の回転に伴いＸ軸ボールネジ上を移動可能な２個のＸ軸
駆動体と、 前記各々のＹ軸ボールネジに螺合され、Ｙ軸ボールネジ
の回転に伴いＹ軸ボールネジ上を移動可能な２個のＹ軸
駆動体と、 両端がそれぞれ前記Ｘ軸駆動体に連結されると共に、前
記Ｙ軸ボールネジへ平行に設けられたＸ軸ロッドと、 両端がそれぞれ前記Ｙ軸駆動体に連結されると共に、前
記Ｘ軸ボールネジへ平行に設けられたＹ軸ロッドと、 前記Ｘ軸ロッドと前記Ｙ軸ロッドが挿通され、Ｘ軸ロッ
ド上及びＹ軸ロッド上を移動自在に設けられた移動体と
を有する２次元運動機構において、 前記Ｘ軸ボールネジの一方を直接回転させる１個のＸ軸
駆動手段と、 前記各々のＸ軸ボールネジと一体に回転可能に設けられ
た２個の第１の笠歯車、及び両端に該２個の第１の笠歯
車とそれぞれ歯合する笠歯車が設けられた第１の伝達軸
から成り、前記Ｘ軸駆動手段の回転力を他方のＸ軸ボー
ルネジへ伝達すると共に、他方のＸ軸ボールネジを一方
のＸ軸ボールネジと同一方向へ回転させる第１の伝達機
構と、 前記Ｙ軸ボールネジの一方を直接回転させる１個のＹ軸
駆動手段と、 前記各々のＹ軸ボールネジと一体に回転可能に設けられ
た２個の第２の笠歯車、及び両端に該２個の第２の笠歯
車とそれぞれ歯合する笠歯車が設けられた第２の伝達軸
から成り、前記Ｙ軸駆動手段の回転力を他方のＹ軸ボー
ルネジへ伝達すると共に、他方のＹ軸ボールネジを一方
のＹ軸ボールネジと同一方向へ回転させる第２の伝達機
構と、 前記Ｘ軸ロッド及びＹ軸ロッドを、前記Ｘ軸駆動体及び
Ｙ軸駆動体へそれぞれ連結する際に、所定の位置へ連結
するための位置決め部を有する連結手段とを具備するこ
とを特徴とする２次元運動機構。1. Two X-axis ball screws arranged in parallel, two Y-axis ball screws arranged in parallel and arranged so that an axis is orthogonal to an axis of the X-axis ball screw; The two X-axis driving bodies screwed to the X-axis ball screw and movable on the X-axis ball screw with the rotation of the X-axis ball screw; Accordingly, two Y-axis driving bodies movable on the Y-axis ball screw, both ends are respectively connected to the X-axis driving body, and an X-axis rod provided in parallel to the Y-axis ball screw; A Y-axis rod connected to the Y-axis driving body and provided in parallel with the X-axis ball screw; the X-axis rod and the Y-axis rod are inserted therethrough and moved on the X-axis rod and the Y-axis rod Moving body provided freely One X-axis driving means for directly rotating one of the X-axis ball screws; and two first bevel gears provided so as to be integrally rotatable with each of the X-axis ball screws. And a first transmission shaft provided at both ends with bevel gears meshing with the two first bevel gears, respectively, for transmitting the rotational force of the X-axis driving means to the other X-axis ball screw. A first transmission mechanism for rotating the other X-axis ball screw in the same direction as the one X-axis ball screw, one Y-axis driving unit for directly rotating one of the Y-axis ball screws, and each of the Y-axis ball screws A second transmission shaft provided with two second bevel gears provided so as to be integrally rotatable with each other, and bevel gears respectively meshed with the two second bevel gears at both ends, The rotational force of the Y-axis drive means is A second transmission mechanism for transmitting the other Y-axis ball screw in the same direction as the one Y-axis ball screw, and transmitting the X-axis rod and the Y-axis rod to the X-axis driver and the Y-axis driver. And a connecting means having a positioning portion for connecting to a predetermined position when connecting to each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63184234A JP2804483B2 (en) | 1988-07-22 | 1988-07-22 | Two-dimensional motion mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63184234A JP2804483B2 (en) | 1988-07-22 | 1988-07-22 | Two-dimensional motion mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0235252A JPH0235252A (en) | 1990-02-05 |
| JP2804483B2 true JP2804483B2 (en) | 1998-09-24 |
Family
ID=16149723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63184234A Expired - Fee Related JP2804483B2 (en) | 1988-07-22 | 1988-07-22 | Two-dimensional motion mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2804483B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3346836B2 (en) * | 1993-06-28 | 2002-11-18 | 有限会社創造庵 | Rotary movement mechanism |
| EP1472557A2 (en) * | 2002-02-08 | 2004-11-03 | Lockheed Martin Corporation | System and method for doppler track correlation for debris tracking |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5712156A (en) * | 1980-06-26 | 1982-01-22 | Brother Ind Ltd | X-y feed driver |
| JPS5988556U (en) * | 1982-12-03 | 1984-06-15 | 柳沢 健 | 3D movement mechanism |
-
1988
- 1988-07-22 JP JP63184234A patent/JP2804483B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0235252A (en) | 1990-02-05 |
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